CN114334762A - Sample transmission device and semiconductor equipment - Google Patents
Sample transmission device and semiconductor equipment Download PDFInfo
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- CN114334762A CN114334762A CN202111511557.8A CN202111511557A CN114334762A CN 114334762 A CN114334762 A CN 114334762A CN 202111511557 A CN202111511557 A CN 202111511557A CN 114334762 A CN114334762 A CN 114334762A
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Abstract
The invention provides a sample transmission device for transmitting a sample in a cavity of a semiconductor device, comprising: the conveying table is used for placing a sample; the conveying rod is movably combined with or separated from the conveying table, one end of the conveying rod comprises a positioning piece, an embedding cavity is formed in the conveying table, the positioning piece is circumferentially rotated and axially moved in the embedding cavity to enable the front end face or the rear end face of the positioning piece in the axial moving direction to be in contact with the conveying table, and the conveying table is pushed and pulled through the positioning piece to transmit a sample in the cavity; and the limiting module is used for limiting the conveying rod to enable the conveying rod to form a locking state preventing axial movement, and when circumferential rotating force is applied to the conveying rod to enable the positioning piece to rotate, the positioning piece is switched between the locking state and an unlocking state capable of driving the conveying rod to move axially. The invention also provides a semiconductor device comprising the sample transmission device. The invention solves the problem that the conveying table collides because the static conveying rod and the conveying table slide.
Description
Technical Field
The invention relates to the technical field of semiconductor equipment, in particular to a sample transmission device and semiconductor equipment.
Background
The semiconductor device generally includes a preparation chamber and a main chamber, and a sample is transferred from the preparation chamber to a clamping stage in the main chamber by a sample transfer device, and a subsequent process is performed on the sample in the main chamber. In the prior art, a sample transfer apparatus includes a transfer rod and a transfer stage for placing a sample, and the transfer rod is used to push and pull the transfer stage to transfer the sample within a cavity of a semiconductor device, for example, to transfer the sample between a preparation cavity and a main cavity.
Taking the sample detection or measurement in a vacuum state as an example, firstly vacuumizing a main cavity, then putting the sample on a conveying table in a preparation cavity, vacuumizing the preparation cavity, opening a gate valve between the main cavity and the preparation cavity after the vacuum degree of the preparation cavity meets the condition so as to horizontally convey the sample into a clamping table in the main cavity, then drawing out a sample rod to enable the sample and the conveying table to stay at the clamping table, and finally closing the gate valve to finish the sample conveying process. The sampling process is the reverse of the sample feeding process. Taking the sample feeding process as an example, there is a need to make the transfer rod stand still, for example, when a vacuum is drawn to the preparation chamber, the transfer rod and the transfer stage need to be left still.
The applicant has pointed out that the sample transfer devices of the prior art have the following problems: the transfer rod and the transfer table may slide due to the inability to lock the transfer rod at rest, creating a risk of collision for the transfer table. For example, when the preparation chamber is communicated with the outside atmosphere when a sample is placed on the transfer table in the preparation chamber, after a vacuum is drawn on the preparation chamber, a pressure difference exists between the inside and the outside of the preparation chamber, and the transfer rod and the transfer table slide in the direction of the main chamber under the atmospheric pressure, so that there is a risk that the transfer table collides (for example, the transfer table collides with a gate valve or the main chamber), possibly causing damage to the semiconductor device or causing the sample to fall off the transfer table; furthermore, when the standing transfer rod is disturbed by an external force, the transfer rod and the transfer table may also slide due to its lack of locking, and the above-mentioned risk of collision also exists.
Disclosure of Invention
The invention aims to disclose a sample transmission device and a semiconductor device based on the sample transmission device, which are used for solving the problem that a conveying table in the prior art collides.
To achieve the above object, the present invention discloses a sample transfer device for transferring a sample in a chamber of a semiconductor device, comprising:
the conveying table is used for placing a sample;
the conveying rod is movably combined with or separated from the conveying table, one end of the conveying rod comprises a positioning piece, an embedding cavity is formed in the conveying table, the positioning piece is enabled to rotate in the circumferential direction and move in the axial direction in the embedding cavity, so that the front end face or the rear end face of the positioning piece in the axial moving direction is in contact with the conveying table, and the positioning piece pushes and pulls the conveying table to transmit a sample in the cavity;
and the limiting module is used for limiting the conveying rod to enable the conveying rod to form a locking state for preventing axial movement, and when the conveying rod applies circumferential rotating force to enable the positioning piece to rotate, the positioning piece is switched between the locking state and an unlocking state capable of driving the conveying rod to move axially.
As a further improvement of the present invention, the limiting module includes a first limiting member and a second limiting member, the first limiting member is convexly disposed on the transmission rod, and when the transmission rod rotates circumferentially and moves axially, the first limiting member and the second limiting member can be limited or separated, so that the positioning member can be switched between the locked state and the unlocked state.
As a further improvement of the present invention, the first limiting member is a handle, and both the first limiting member and the second limiting member are disposed outside the cavity.
As a further improvement of the present invention, the front end surface of the positioning member and/or the insertion cavity is provided with a protruding abutting portion for abutting against the first sidewall of the positioning member, so as to form a space between the first sidewall and the positioning member.
As a further improvement of the present invention, the front end surface of the positioning element is convexly provided with the abutting portion, the first side wall is configured to be a plane, and a protrusion or a plane is formed at the end of the abutting portion.
As a further improvement of the present invention, the front end surface of the positioning element is provided with the abutting portion in a protruding manner, and the first side wall and the abutting portion are accommodated in a concave-convex manner.
As a further improvement of the present invention, a locking surface matched with the contour of the rear end surface of the positioning element is formed on the second side wall of the insertion cavity in the retraction direction moving axially along the transmission rod, the locking surface and the rear end surface of the positioning element are accommodated in a concave-convex manner, when the positioning element stops at the locking surface, the positioning element is in a locking state, and when the positioning element is separated from the locking surface, the positioning element is in an unlocking state.
As a further improvement of the present invention, a conveying surface is further formed on the second side wall, the conveying surface is arranged to intersect with the locking surface, the conveying surface is matched with the contour of the rear end surface of the positioning member, the conveying surface and the rear end surface of the positioning member are accommodated in a concave-convex manner, and the positioning member is stopped against the conveying surface before the sample is conveyed by using the conveying rod.
As a further improvement of the invention, the method also comprises the following steps: a dynamic seal guide module, the dynamic seal guide module comprising: at least one circle of sealing element and linear sliding element which are coaxial and surround the outer wall of the transmission rod, and a shell; the sealing ring and the linear sliding piece are contained in the shell, and the shell is connected with the cavity.
Based on the same inventive concept, the present invention also provides a semiconductor device including: a chamber and the sample transmission device.
Compared with the prior art, the invention has the beneficial effects that: it is right through spacing module the spacing locking state that makes the conveying pole form the prevention and make axial displacement of conveying pole, it is right when the conveying pole applies the circumference turning force and makes the setting element rotate, realize the setting element is in locking state switches between the unblock state that axial displacement was made to the conveying pole that can drive the conveying pole to prevent effectively that the conveying pole and the conveying platform of stewing from sliding, and can get rid of the conveying pole effectively and lead to conveying platform to bump's hidden danger because of taking place to slide.
Drawings
Fig. 1 is a perspective view of a sample transfer device according to an embodiment of the present invention, with a positioning element in an unlocked state;
FIG. 2 is an enlarged view of a portion of area A of FIG. 1;
fig. 3 is a perspective view of the sample transfer device according to the embodiment of the present invention, wherein the positioning element is in a locked state;
FIG. 4 is an enlarged partial view of the area B in FIG. 3;
FIG. 5 is a schematic view of the positioning member of FIG. 1;
FIG. 6 is a cross-sectional view of a transfer table at an insertion cavity in an embodiment of the invention.
Detailed Description
The present invention is described in detail with reference to the embodiments shown in the drawings, but it should be understood that these embodiments are not intended to limit the present invention, and those skilled in the art should understand that functional, methodological, or structural equivalents or substitutions made by these embodiments are within the scope of the present invention. The term "and/or" includes any and all combinations of one or more of the associated listed items. The terms "central," "longitudinal," "lateral," "length," "upper," "lower," "vertical," "horizontal," "top," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like refer to orientations or positional relationships illustrated in the drawings, which are used for convenience in describing and simplifying the present disclosure, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and therefore are not to be construed as limiting the present disclosure.
As shown in fig. 1-6, the present embodiment provides a sample transmission device for transmitting a sample (e.g., a wafer) in a cavity (not shown) of a semiconductor device, comprising:
the conveying table 1 is used for placing a sample;
the conveying platform comprises a conveying rod 2 movably combined with or separated from the conveying platform 1, one end of the conveying rod 2 comprises a positioning piece 3, an embedding cavity 4 is formed in the conveying platform 1, the positioning piece 3 is enabled to rotate in the circumferential direction and move in the axial direction in the embedding cavity 4, so that the front end face 31 or the rear end face 33 of the positioning piece 3 in the axial moving direction is in contact with the conveying platform 1, and the conveying platform 1 is pushed and pulled through the positioning piece 3 to transmit a sample in the cavity;
and the limiting module is used for limiting the conveying rod 2 to enable the conveying rod 2 to form a locking state preventing axial movement, and when the conveying rod 2 applies circumferential rotating force to enable the positioning piece 3 to rotate, the positioning piece 3 is switched between the locking state and an unlocking state capable of driving the conveying rod 2 to move axially.
It is right through spacing module the spacing locking state that makes the conveying pole form the prevention and make axial displacement of conveying pole, it is right when the conveying pole applys the circumference turning force and makes the setting element rotate, realize the setting element is in locking state switches between with the unblock state that can drive the conveying pole and make axial displacement, can solve because of the gliding problem of conveying pole 2 no locking of stewing, for example, can solve conveying pole 2 and receive external force disturbance and lead to conveying pole 2 gliding problem to prevent effectively that conveying pole 2 and conveying platform 1 that stews from sliding, and can get rid of effectively that conveying pole 2 slides and lead to conveying platform 1 to bump's hidden danger.
Illustratively, even if the cavity of the semiconductor device is vacuumized to cause a difference in vacuum degree between the inside and the outside of the cavity, and further cause the standing transfer rod 2 to be subjected to thrust, the sample transmission device provided by the embodiment of the invention is also suitable for such a situation, namely, the problem that the standing transfer rod 2 slides due to the pressure difference between the inside and the outside of the cavity caused by the vacuumization of the cavity of the semiconductor device can be solved, so that the transfer rod 2 and the transfer table 1 are prevented from sliding, and the hidden danger that the transfer table 1 collides is eliminated.
Illustratively, the cavity comprises a preparation cavity and a main cavity, and a gate valve is arranged between the main cavity and the preparation cavity and can be opened or closed. Wherein the sample transfer device is used for executing a sample feeding process for transferring the sample from the preparation cavity to the main cavity or executing a sample retrieving process for transferring the sample from the main cavity to the preparation cavity, so as to transfer the sample in the cavity of the semiconductor device by using the sample transfer device.
Illustratively, the volume of the chamber formed by the preparation chamber is smaller than the volume of the chamber formed by the main chamber, and a clamping table (not shown) is provided in the main chamber to transfer the sample to the transfer table 1 through the clamping table, receive the sample sent by the transfer table or take out the transfer table 1 and the sample from the main chamber, and various processes related to the semiconductor manufacturing process, such as inspection, measurement or processing, are performed on the sample in the main chamber. Wherein, after the conveying platform 1 and the clamping platform are aligned and detachably fixed (in this embodiment, the conveying platform 1 is clamped with the clamping platform), the conveying rod is extracted to enable the conveying platform 1 and the samples on the conveying platform 1 to stay at the clamping platform. After the semiconductor process of the sample is finished in the main cavity, the conveying rod is aligned and fixed with the clamping table again and drives the conveying table 1 to be separated from the clamping table so as to take back the sample.
In the present embodiment, as shown in fig. 6, the term "axial direction" indicating the spatial orientation refers to the axial direction P of the transfer lever 2, and the term "circumferential direction" is the direction in which the transfer lever 2 rotates about the axial direction P.
Illustratively, the limiting module includes a first limiting member and a second limiting member (not shown), the first limiting member is convexly disposed on the transmission rod 2, and when the transmission rod 2 circumferentially rotates and axially moves, the first limiting member and the second limiting member can be limited or separated, so that the positioning member 2 is switched between the locked state and the unlocked state. As shown in fig. 1 and 3, the first limiting member is a handle 5, and both the first limiting member and the second limiting member are disposed outside the cavity.
For example, referring to fig. 2 and 5, the front end surface 31 of the positioning element 3 and/or the insertion cavity 4 is provided with a protruding abutting portion 32 opposite to a first side wall (not shown) of the positioning element 3 for abutting against between the first side wall and the positioning element 3, so as to form a gap (not shown) between the first side wall and the positioning element 3, when the conveying rod 2 is used to push against the conveying table 1, the positioning element 3 of the conveying rod 2 has a gap with the conveying table 1, and the conveying rod has a small contact area and is less worn, so that particles are not easily generated. In this embodiment, the front end surface 31 of the positioning element 3 is protruded with the abutting portion 32.
Illustratively, the first side wall is configured to be a plane, the end of the holding portion 32 forms a protrusion or a plane, and the end of the holding portion 32 is used for pushing against the first side wall.
Exemplarily, the first side wall and the abutting portion 32 are accommodated in a concave-convex manner, so that the abutting portion 32 can be guided and limited, the abutting portion 32 can be quickly abutted and pushed on the first side wall, a certain limit can be provided for the abutting portion 32, the deviation of the transmission rod 2 can be avoided, the alignment error can be avoided, and the transmission rod 2 can be ensured to move along the axial direction thereof. For example, a groove is formed on the first sidewall, and a protrusion is formed at the end of the abutting portion 32; or a protrusion is formed on the first side wall, and a groove is formed at the end of the abutting portion 32. The cross section of the protrusion may be rectangular, semicircular or semi-elliptical, and the cross section of the groove may be rectangular, semicircular or semi-elliptical, but is not limited thereto, and the groove completely or partially receives the protrusion. In this embodiment, the protrusions are spherical protrusions and the recesses are spherical recesses.
In this embodiment, as shown in fig. 2 and fig. 6, the transmission rod 2 is inserted into the insertion cavity 4 from the insertion hole 11 or retreats from the insertion cavity 4, a locking surface 42 matched with the contour of the rear end surface 33 of the positioning member 3 is formed on the second side wall 41 of the retraction direction of the axial movement of the insertion cavity 4 along the transmission rod 2, the locking surface 42 is concave-convex accommodated with the rear end surface 33 of the positioning member 3, when the positioning member 3 is parked at the locking surface 42, the positioning member 3 is in the locking state, and when the positioning member 3 is separated from the locking surface 42, the positioning member 3 is in the unlocking state. Through setting up locking surface 42 and making locking surface 42 and the unsmooth cooperation of setting element 3, can further carry out circumference spacing to transfer lever 2, make it keep at the locking state, be difficult for breaking away from the locking state because of being disturbed.
To switch the transfer lever 2 from the locked state to the unlocked state, the transfer lever 2 may be rotated circumferentially such that the positioning member 3 disengages from the locking surface 42 and the first and second limiting members are separated. For example, the handle 5 is used to drive the transmission rod 2 to rotate circumferentially, so that the handle 5 is separated from the second limiting member, and the positioning member 3 is separated from the locking surface 42.
Referring to fig. 6, in the present embodiment, in order to avoid circumferential deviation of the transmission rod 2 when the transmission rod 2 is moved axially to transmit a sample, similarly, a transmission surface 43 is further formed on the second side wall 41 and is crossed with the locking surface 42, the transmission surface 43 is matched with the contour of the rear end surface 33 of the positioning member 3, the transmission surface 43 and the rear end surface 33 of the positioning member 3 are accommodated in a concave-convex manner, and the positioning member 3 is stopped at the transmission surface 43 before the sample is transmitted by using the transmission rod 2.
The conveying surface 43 and the locking surface 42 can limit circumferential rotation of the conveying rod 2, but do not limit axial movement of the conveying rod 2, when the conveying rod 2 is in a locked state, the conveying rod 2 cannot move axially, and when the conveying rod 2 is in an unlocked state, the conveying rod 2 can move axially.
In this embodiment, when the positioning member 3 rests on the locking surface 42 or the conveying surface 43, the abutting portions 32 abut against the first side walls respectively.
Illustratively, the locking surface 42 is provided as a recess, and the rear end surface 33 of the positioning member 3 forms a projection; alternatively, the locking surface 42 may be provided as a protrusion, and the rear end surface 33 of the positioning member 3 may be formed as a groove, and the conveying surface 43 may be provided as a groove or a protrusion, which will not be described herein. The cross section of the protrusion may be rectangular, semicircular or semi-elliptical, and the cross section of the groove may be rectangular, semicircular or semi-elliptical, but is not limited thereto, and the groove completely or partially receives the protrusion.
For example, to facilitate switching the positioning member 3 between the locking surface 42 and the conveying surface 43, the rear end surface 33 of the positioning member 3 may be configured as a convex arc surface, the locking surface 42 and/or the conveying surface 43 may be configured as an arc-shaped groove, and the locking surface 42 and/or the conveying surface 43 may also be configured as a rectangular or other-shaped groove.
In this embodiment, referring to fig. 2, 4 and 6, the insertion hole 11 of the insertion cavity 4 is in a horizontal state, and after the axial direction P of the transfer rod 2 is axially moved into the insertion cavity 4 of the transfer table 1, the positioning member 3 is in a horizontal state at this time. When the sample needs to be transferred, the positioning member 3 is rotated circumferentially to be stopped and limited on the conveying surface 43, for example, the positioning member 3 in a horizontal state is rotated 90 degrees so that the positioning member 3 is stopped on the conveying surface 43 in a vertical direction; when the transmission rod 2 needs to be placed still, the positioning piece 3 is rotated in the circumferential direction to be stopped and limited on the locking surface 42; when the transfer rod 2 needs to be withdrawn, the axial movement or the axial movement and the circumferential rotation are selected to withdraw the transfer rod 2 from the insertion hole 11 according to the position of the positioning piece 3 at the moment.
In the present embodiment, referring to fig. 6, a pair of locking surfaces 42 and a pair of conveying surfaces 43 are provided on the second side wall 41 above and below the insertion hole 11, the two locking surfaces 42 arranged up and down are linearly provided along the imaginary line M, the two conveying surfaces 43 arranged up and down are linearly provided along the imaginary line N, and an included angle θ between the locking surfaces 42 and the conveying surfaces 43 (i.e., the imaginary line M and the imaginary line N) satisfies 0 < θ < 180 °, and θ ≠ 90 °, for example, 1 ≦ θ ≦ 45 °.
In this embodiment, the sample transmission device further comprises a dynamic seal guide module 6, wherein the dynamic seal guide module 6 comprises: at least one ring of sealing element and linear sliding element (both not shown) which are coaxial and enclose the outer wall of the transmission rod, and a shell; the sealing ring and the linear sliding piece are contained in the shell, and the shell is connected with the cavity.
Illustratively, the dynamic seal guiding module 6 includes: the sealing module comprises a shell and at least one circle of sealing element, and the guiding module comprises a linear sliding piece. Wherein, the outer wall of conveying pole 2 is enclosed to sealing member and linear sliding piece, and the sealing member is acceptd in the casing with linear sliding piece, and the casing is connected with preparing the cavity. Preferably, the dynamic seal guide module 6 includes two rings of spaced seals, including O-rings. Two circles of grooves for embedding the sealing element are formed in the inner wall surface of the shell.
The linear sliding part is arranged to restrain the conveying rod 2, so that the conveying rod 2 can perform linear motion along the axial direction of the conveying rod 2, the pitching phenomenon existing when the conveying rod 2 moves axially is effectively solved, on one hand, particles generated due to friction between the conveying rod 2 and a cavity body caused by pitching of the conveying rod 2 in the repeated axial movement process of the conveying rod 2 are effectively prevented, the abrasion of the conveying rod 2 is effectively reduced, and the service life of the conveying rod 2 is prolonged; on the other hand, the accuracy of the sample introducing and taking-out process performed by the transfer lever 2 is improved.
Illustratively, the linear slide includes a linear bearing or a linear guide slider.
The present embodiment also provides a semiconductor device including: a chamber and the sample transmission device.
Illustratively, the cavity comprises a main cavity and a preparation cavity, and the sample is transmitted between the preparation cavity and the main cavity through the sample transmission device, and a gate valve is arranged between the main cavity and the preparation cavity.
Illustratively, the semiconductor device may be a semiconductor film thickness measuring device or a semiconductor defect detecting device, and the sample may be a semiconductor sample (e.g., a wafer), but is not limited thereto, and for example, when the semiconductor device is a FIB-SEM (focused ion beam-scanning electron microscope), the sample may also be a non-semiconductor sample (e.g., a biological sample).
In this embodiment, a gate valve capable of being opened or closed movably is disposed between the main cavity and the preparation cavity, the volume of the cavity formed by the preparation cavity is smaller than that of the cavity formed by the main cavity, a clamping table is disposed in the main cavity, the clamping table and the transfer table are oppositely matched to receive the sample sent by the transfer table or take out the sample, and various processes related to semiconductor manufacturing processes are performed on the sample in the main cavity.
The above-listed detailed description is only a specific description of a possible embodiment of the present invention, and they are not intended to limit the scope of the present invention, and equivalent embodiments or modifications made without departing from the technical spirit of the present invention should be included in the scope of the present invention.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. A sample transfer device for transferring a sample within a chamber of a semiconductor device, comprising:
the conveying table is used for placing a sample;
the conveying rod is movably combined with or separated from the conveying table, one end of the conveying rod comprises a positioning piece, an embedding cavity is formed in the conveying table, the positioning piece is enabled to rotate in the circumferential direction and move in the axial direction in the embedding cavity, so that the front end face or the rear end face of the positioning piece in the axial moving direction is in contact with the conveying table, and the positioning piece pushes and pulls the conveying table to transmit a sample in the cavity;
and the limiting module is used for limiting the conveying rod to enable the conveying rod to form a locking state for preventing axial movement, and when the conveying rod applies circumferential rotating force to enable the positioning piece to rotate, the positioning piece is switched between the locking state and an unlocking state capable of driving the conveying rod to move axially.
2. The sample transmission device according to claim 1, wherein the limiting module comprises a first limiting member and a second limiting member, the first limiting member is protruded on the transmission rod, and when the transmission rod rotates circumferentially and moves axially, the first limiting member and the second limiting member can be limited or separated, so that the positioning member can be switched between the locked state and the unlocked state.
3. The sample transmission device according to claim 2, wherein the first retaining member is a handle, and the first retaining member and the second retaining member are both disposed outside the cavity.
4. The sample transfer device according to claim 1, wherein the front end surface of the positioning member and/or the insertion cavity is provided with a protruding abutting portion for abutting against a first sidewall of the positioning member so as to form a space between the first sidewall and the positioning member.
5. The apparatus according to claim 4, wherein the front end of the positioning member is protruded with the abutting portion, the first sidewall is configured to be a plane, and a protrusion or a plane is formed at a distal end of the abutting portion.
6. The apparatus according to claim 4, wherein the abutting portion is protruded from a front end surface of the positioning member, and the first sidewall and the abutting portion are concave-convex accommodated.
7. The sample transmission device according to any one of claims 1 to 6, wherein a locking surface matched with the contour of the rear end surface of the positioning member is formed on a second side wall of the insertion cavity in the retraction direction in which the transmission rod axially moves, the locking surface and the rear end surface of the positioning member are accommodated in a concave-convex manner, when the positioning member is stopped at the locking surface, the positioning member is in a locked state, and when the positioning member is separated from the locking surface, the positioning member is in an unlocked state.
8. The device for transferring a sample according to claim 7, wherein a transfer surface is formed on the second sidewall and intersects with the locking surface, the transfer surface is matched with the contour of the rear end surface of the positioning member, the transfer surface and the rear end surface of the positioning member are received in a concave-convex manner, and the positioning member is stopped on the transfer surface before the transfer rod is used for transferring a sample.
9. The sample transmission device of claim 1, further comprising: a dynamic seal guide module, the dynamic seal guide module comprising: at least one circle of sealing element and linear sliding element which are coaxial and surround the outer wall of the transmission rod, and a shell; the sealing ring and the linear sliding piece are contained in the shell, and the shell is connected with the cavity.
10. A semiconductor device, comprising: a chamber and a sample transmission device as claimed in any one of claims 1 to 9.
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CN202111511557.8A CN114334762A (en) | 2021-12-06 | 2021-12-06 | Sample transmission device and semiconductor equipment |
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CN202111511557.8A CN114334762A (en) | 2021-12-06 | 2021-12-06 | Sample transmission device and semiconductor equipment |
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