CN114334754A - Wafer transfer box unlocking door opening system for wafer loader - Google Patents

Abstract

The invention discloses a wafer loading box unlocking and door opening system for a wafer loader, which comprises a frame of the wafer loader, wherein an interface is arranged on the frame, a door opening device is arranged on the frame, the door opening device comprises a taking and placing assembly, an unlocking assembly and an interface plate, the taking and placing assembly is fixedly connected with the interface plate, the interface plate is arranged corresponding to the interface, the interface plate is in butt joint with a sealing door of the wafer loading box, the unlocking assembly is arranged on the interface plate, the sealing door of the wafer loading box is unlocked from a box body through the unlocking assembly, and the taking and placing assembly drives the interface plate to be opened and closed with the interface, so that the sealing door of the wafer loading box is taken and placed through the interface. Through getting the combination of putting subassembly and unblock subassembly, inject the motion route of door opener, reduce the motion degree of freedom, will need the function that three driving piece was accomplished to reduce into two, simplify spatial structure, control is simple, improves the reliability that the wafer loaded the action, has realized the sealed door of wafer loading box and has got the modular design of putting the mechanism.

Description

Wafer transfer box unlocking door opening system for wafer loader

Technical Field

The invention relates to the field of semiconductor processing equipment, in particular to a system for unlocking and opening a door of a wafer transfer box of a wafer loader.

Background

The wafer cassette is a container for protecting, transporting and storing wafers in semiconductor manufacturing process, and generally contains a certain number of wafers, and its main components are a front-opening container capable of containing 25 wafers and having a front-opening sealing door for opening and closing the container, which is an important transfer container for an automatic transfer system in a wafer factory. When the wafer needs to be loaded into the processing equipment for processing, the special equipment is needed to open the sealing door of the front-opening wafer loading box, and then the subsequent loading can be carried out.

However, in the prior art, the structure for opening the sealing door needs three driving members, the action route for placing the sealing door at the designated position is completely fixed, and the three driving members are arranged, so that the degree of freedom of movement is relatively large, the space structure is complex, the operation and the control are also complex, and the reliability is also reduced.

Therefore, the inventor of the present invention aims to solve the above technical problems by inventing a system for unlocking and opening a door of a wafer loading box of a wafer loader, which has relatively few driving parts and relatively simple and easily controlled movement.

Disclosure of Invention

To overcome the above disadvantages, the present invention provides a system for unlocking a door of a wafer cassette of a wafer loader.

In order to achieve the above purposes, the invention adopts the technical scheme that: a system for unlocking and opening a wafer loading box of a wafer loader comprises a frame of the wafer loader, and is characterized in that: offer the handing-over interface in the frame, and set up door opener, door opener gets subassembly, unblock subassembly and handing-over plate including getting, gets to put the subassembly and connect the handing-over plate, the handing-over plate corresponds the setting with the handing-over interface, simultaneously the handing-over plate loads the sealing door butt joint of box with the wafer, just sets up the unblock subassembly on the handing-over plate, the unblock subassembly can load the sealing door and the box body unblock of box with the wafer, gets to put the subassembly and realizes opening and shutting with the handing-over interface through the drive handing-over plate to get the sealing door of wafer loading box through the handing-over interface. The rack is provided with a loading platform, a wafer loading box is placed on the loading platform, the sealing door faces the handing-over port, the taking and placing assembly can take the unlocked sealing door out of the wafer loading box through the handing-over port, the sealing door is driven to penetrate to one side from the other side of the handing-over port, the sealing door is further placed at a preset position at the bottom of the wafer loading machine, and then the action of taking and placing the sealing door of the wafer loading box through the handing-over port is completed.

Preferably, get and put the subassembly and include the backbone, the backbone is fixed to be set up in the frame, just it sets up the backbone to articulate on the backbone, backbone and handing-over board fixed connection, it still includes the driving piece to get and put the subassembly, the driving piece is the linear motion cylinder, the both ends of driving piece are articulated with the bottom and the backbone of loading platform respectively, and telescopic motion through the driving piece piston rod can drive the backbone and the up-and-down and swing motion of handing-over board, and then realizes opening and shutting of handing-over board and handing-over mouth.

Preferably, the middle part of the ridge rod is provided with a guide shaft, the guide shaft is provided with a rolling bearing, the ridge plate is correspondingly provided with a sliding chute to provide a movement path of the guide shaft, and the width of the sliding chute is matched with the outer diameter of the rolling bearing on the guide shaft to ensure that the rolling bearing can smoothly roll along the inner wall of the sliding chute on the ridge plate.

Preferably, the sliding groove comprises a straight sliding groove part and an arc sliding groove part, the straight sliding groove part and the arc sliding groove part are connected smoothly through a transition smooth groove to ensure smoothness of the guiding shaft in the process of moving along the sliding groove, and the straight sliding groove part and the arc sliding groove part are connected smoothly through the transition smooth groove to provide a moving path of the guiding shaft and ensure smoothness of the guiding shaft in the process of moving along the sliding groove.

Preferably, the lower end of the ridge rod is rotatably connected with the first rotating shaft and the second rotating shaft.

Preferably, install straight slide rail on the backbone, sliding connection slider on the straight slide rail, fixed mounting has the connecting plate on the slider, the first pivot of connecting plate fixed connection, second pivot, connecting plate and slider along the synchronous up-and-down motion of slide rail.

Preferably, a loading platform is arranged on the rack, the tail end of the driving part is hinged to a support fixed at the bottom of the loading platform, a piston rod of the driving part is fixedly connected with the second rotating shaft through a connector, the driving part piston rod can extend out or retract to drive the ridge rod to move, and the ridge rod drives the cross connecting plate to complete opening and closing and up-and-down movement of the relative cross connecting port under the constraint of the sliding groove and the straight sliding rail. Under the driving action of the driving piece, the swinging freedom degree of the ridge rod in the up-and-down movement process is restrained through the guiding action of the straight sliding groove part on the guide shaft on the ridge rod; through the guide effect of arc spout portion to guiding axle on the backbone, the backbone drives the handing-over board and swings together, accomplishes opening and shutting of relative handing-over mouth, realizes taking in and putting the sealing door after the unblock from the wafer loading box through the butt joint of handing-over board and sealing door.

Preferably, the axial symmetry center plane of the straight slide rail and the symmetry center plane of the straight slide groove part are parallel vertical planes, and the motion track plane of the first rotating shaft center line and the symmetry center plane of the straight slide groove part of the slide groove on the ridge plate are coincident vertical planes, so that the up-and-down motion of the ridge rod is vertical translation motion without swinging, and the stability of the butt plate in the up-and-down motion process is ensured.

Preferably, the central arc line of the arc chute part is an arc, the radius of the arc is equal to the center distance between the first rotating shaft and the guide shaft, and the center of the arc is located on the symmetrical center line of the straight chute part, so that the first rotating shaft is kept static in the process that the guide shaft moves along the arc chute part on the ridge rod, and the ridge rod drives the connecting plate to swing to rotate in a fixed axis mode. The cross plate is in butt joint with the sealing door of the wafer loading box, and the fixed axis rotation of the cross plate can realize the stability of the sealing door in the process of taking out the sealing door from the wafer loading box. The width and the thickness of the radius of the central arc line of the arc chute part relative to the sealing door are large, so that the sealing door is close to horizontal movement in the process of taking out or putting back from the wafer loading box, the safety of the butt joint process is guaranteed, and the friction between the sealing door and the wafer loading box is avoided.

Preferably, the unlocking assembly comprises two rotary cylinders, the rotary cylinders are symmetrically arranged on the cross connection plate in the left-right direction, rotating shafts of the two rotary cylinders penetrate through two ends of the cylinder body and extend out, one ends of the rotating shafts penetrate through the cross connection plate and are fixedly connected with T-shaped keys, and the other ends of the rotating shafts are fixedly connected with optical code disks. The T-key interfaces with a key hole in the wafer cassette (which is known in the industry according to the international association for semiconductors standards).

Preferably, the shaft end of the rotary cylinder for mounting the optical code disc and the optical code disc are provided with the same positioning flat edge for mounting and positioning the optical code disc, so that the optical code disc and the T-shaped key are arranged in a matched manner in the initial state.

Preferably, two rotary cylinders are provided with 90-degree rotary travel (which is according to the standard of the international semiconductor association and is well known in the industry), two photoelectric sensors fixed on the cross connection plate are correspondingly arranged around two optical code discs, the two photoelectric sensors around the optical code discs are arranged at intervals of 90 degrees by taking a rotary shaft of the rotary cylinder as a center, the symmetrical center planes of the two sensors are respectively parallel to and perpendicular to the positioning flat edge, the optical code discs and the T-shaped key rotate synchronously, and the state of the T-shaped key can be detected by combining the photoelectric sensors.

Preferably, the optical code disc is formed by sequentially connecting 90-degree fan-shaped blocking pieces, (90-2 alpha) large and small-angle fan-shaped notches and 2 alpha-sized fan-shaped blocking pieces, and the included angles between two sides of the 90-degree fan-shaped blocking pieces and the positioning flat side are alpha and (90-alpha) respectively, wherein the alpha size is matched with the light spot size of the photoelectric sensor. The specific structure of the optical code disc is combined with the arrangement of the specific positions of the two photoelectric sensors around the optical code disc, so that the T-shaped key can be detected to be in three states of unlocking, locking and middle position.

The wafer transfer box unlocking and door opening system for the wafer loader has the advantages that the movement route of the door opening device is limited through the combination of the picking and placing assembly and the unlocking assembly, the movement freedom degree is reduced, the functions which are traditionally completed by three driving pieces are reduced into two, the space structure is simplified, the control is simple, the reliability of the wafer loading action is improved, and the modular design of a sealing door picking and placing mechanism of a wafer loading box on the wafer loader is realized.

Drawings

Fig. 1 is a schematic structural diagram of a wafer cassette unlocking and door opening system for a wafer loader.

Fig. 2 is a schematic view of fig. 1 from another perspective.

Fig. 3 is a schematic view of a pick-and-place assembly from a certain viewing angle.

Fig. 4 is a schematic view of a spine board.

Fig. 5 is another view of the pick-and-place assembly.

Fig. 6 is a schematic view of an arc chute portion of a substrate.

FIG. 7 is a schematic view of the unlocking assembly.

FIG. 8 is a schematic view of the overall structure of an optical code disk

FIG. 9 is a schematic diagram of a sector component of an optical code disc.

Fig. 10 is a schematic view of a wafer cassette.

Fig. 11 is an opened view of the wafer cassette.

FIG. 12 is a schematic view of the position of the optical code disc with the unlocking assembly prior to opening the sealing door.

FIG. 13 is a schematic view of the position of the T-key prior to opening the seal door.

FIG. 14 is a schematic view of the position of the optical code wheel with the unlocking assembly in the open position of the sealing door.

FIG. 15 is a schematic view of the position of the T-key with the unlocking assembly in the opening of the sealing door.

Fig. 16 is a cross-sectional view of the pod unlock door system during the opening of the sealing door.

Fig. 17 is a sectional view of the pod unlock door system with the seal door fully opened.

In the figure:

1. a frame, 2, an interface, 3, a taking and placing component, 4, an unlocking component, 5, an interface board, 6, a wafer loading box, 7, a vacuum chuck, 8, a connector, 9 and a loading platform,

301. ridge plate, 302, ridge rod, 303, first rotating shaft, 304, second rotating shaft, 305, guide shaft, 306, rolling bearing, 307, connecting plate, 308, sliding block, 309, straight sliding rail, 310, driving piece, 311, bracket,

301001, straight slide groove part, 301002, arc slide groove part, 301003, transition round slide groove,

401. a rotary cylinder, 402, a T-shaped key, 403, a light code disc, 404, a photoelectric sensor,

404000, a lower photosensor, 404001, a left photosensor,

403001, positioning the flat edge,

601. sealing door, 602, key hole, 603, vacuum adsorption surface.

Detailed Description

The following detailed description of the preferred embodiments of the present invention, taken in conjunction with the accompanying drawings, will make the advantages and features of the invention easier to understand by those skilled in the art, and thus will clearly and clearly define the scope of the invention.

Referring to fig. 1-17, in the present embodiment, a system for unlocking and opening a wafer loading box of a wafer loader includes a frame 1 of the wafer loader, a loading platform 9 is disposed on the frame 1, an interface 2 is opened, and a door opening device is disposed, the door opening device includes a pick-and-place component 3, an unlocking component 4, and an interface plate 5, the pick-and-place component 3 is connected to the interface plate 5, the interface plate 5 is disposed corresponding to the interface 2, the interface plate 5 is in butt joint with a sealing door 601 of the wafer loading box 6, and an unlocking component 4 is disposed on the interface plate 5, the unlocking component 4 can unlock the sealing door 601 of the wafer loading box 6 from the box body, and the pick-and-place component 3 drives the interface plate 5 to open and close the interface 2.

Set up load table 9 on the frame 1, place wafer loading box 6 on the load table 9, and sealing door 601 orientation is handed over interface 2 in addition, the subassembly 3 is got to the getting that sets up on the frame 1, can take out the sealing door 601 after the unblock from wafer loading box 6 through handing over interface 2, drive sealing door 601 and wear to one side from handing over interface 2's opposite side to further put sealing door 601 the preset position of wafer loader bottom, and then realize getting sealing door 601 of getting through handing over interface 2 and putting wafer loading box 6.

Referring to fig. 3, the picking and placing assembly 3 includes a ridge board 301, the ridge board 301 is fixedly disposed on the rack 1, the ridge board 301 is hinged to a ridge rod 302, the ridge rod 302 is fixedly connected to the interface board 5, the picking and placing assembly 3 further includes a driving member 310, the driving member 310 is a linear motion cylinder, two ends of the driving member 310 are hinged to the bottom of the loading platform and the ridge rod 302 respectively, the ridge rod 302 and the interface board 5 can be driven to move up and down and swing through the extending or retracting motion of a piston rod of the driving member 310, and the interface board 5 and the interface board 2 can be opened and closed.

The middle part of ridge pole 302 sets up guide shaft 305, installs antifriction bearing 306 on the guide shaft 305, sets up the spout on backbone 301 correspondingly, provides the motion path of guide shaft 305, and the width of spout and the external diameter of antifriction bearing 306 on guide shaft 305 cooperate in order to guarantee that antifriction bearing 306 can smoothly roll along the spout inner wall on backbone 301.

Referring to fig. 4, the sliding chute includes a straight sliding chute portion 301001 and an arc sliding chute portion 301002, the straight sliding chute portion 301001 and the arc sliding chute portion 301002 are smoothly connected by a transition smooth groove 301003 to enable the movement path of the guide shaft 305 along the sliding chute and to ensure the smoothness of the guide shaft 305 during the movement along the sliding chute, and the straight sliding chute portion 301001 and the arc sliding chute portion 301002 are smoothly connected by a transition smooth groove 301003 to provide the movement path of the guide shaft 305 and to ensure the smoothness of the guide shaft 305 during the movement along the sliding chute.

Referring to fig. 3, the lower ends of the ridge rod 302 are rotatably connected to a first rotating shaft 303 and a second rotating shaft 304, respectively.

The ridge plate 301 is provided with a straight slide rail 309, the straight slide rail 309 is connected with a slide block 308 in a sliding manner, the slide block 308 is fixedly provided with a connecting plate 307, the connecting plate 307 is fixedly connected with a first rotating shaft 303, and the first rotating shaft 303, the connecting plate 307 and the slide block 308 synchronously move up and down along the slide rail.

Referring to fig. 1-4, the tail end of the driving member 310 is hinged to a bracket 311 fixed on the frame 1, a piston rod of the driving member 310 is fixedly connected to the second rotating shaft 304 through the connector 8, the extension or retraction of the piston rod of the driving member 310 can drive the movement of the spine 302, and the spine 302 drives the interface board 5 to complete the opening and closing and up-and-down movement relative to the interface 2 under the constraint of the sliding groove and the straight sliding rail 309. Under the driving action of the driving piece 310, the guide action of the straight slide groove part 301001 on the guide shaft 305 on the ridge rod 302 is used for restricting the swinging freedom degree of the ridge rod 302 in the process of up-and-down movement; through the guide effect of arc spout portion 301002 to guiding axle 305 on ridge pole 302, ridge pole 302 drives handing-over board 5 and swings together, accomplishes opening and shutting of relative handing-over mouth 2, realizes taking in and putting the sealing door 601 after the unblock from wafer loading box 6 through the butt joint of handing-over board 5 and sealing door 601.

Referring to fig. 5, the axial center plane of symmetry of the straight slide rail 309 and the center plane of symmetry of the straight slide groove portion 301001 are parallel vertical planes, and the motion trajectory plane of the first rotation axis center line and the center plane of symmetry of the straight slide groove portion 301001 of the slide groove on the spine board 301 are coincident vertical planes, so that the up-and-down motion of the spine rod 302 is a vertical translation motion without swinging, and the stability of the docking board during the up-and-down motion is ensured.

Referring to fig. 6, the arc of the arc chute 301002 is an arc, the radius of the arc is equal to the distance between the centers of the first rotating shaft 303 and the guide shaft 305, and the center of the arc is located on the center line of symmetry of the straight chute 301001, so that the first rotating shaft 303 remains stationary during the movement of the guide shaft 305 on the spine 302 along the arc chute 301002, and the spine 302 drives the cross-connecting plate 5 to swing around a fixed axis. The interface board 5 is in butt joint with the sealing door 601 of the wafer loading box 6, and the fixed axis rotation of the interface board 5 can realize the stability in the process of taking out the sealing door 601 from the wafer loading box 6. The radius of the central arc of the arc chute 301002 is larger than the width and thickness of the sealing door 601, so that the sealing door 601 moves nearly horizontally in the process of taking out or putting back from the wafer loading box 6, the safety of the butt joint process is ensured, and the friction between the sealing door 601 and the wafer loading box 6 is avoided.

The size of the cross joint plate 5 is matched with that of the cross joint opening 2, and the cross joint plate 5 can be opened or closed with the cross joint opening 2 in an approximately horizontal movement under the action of the driving assembly. Namely, the cross joint plate 5 can be just clamped into the cross joint port 2, so that the positioning is realized, and the convenience is provided for the subsequent work of the unlocking assembly 4.

Referring to fig. 1, fig. 2 and fig. 7, the unlocking assembly 4 includes two rotary cylinders 401, the two rotary cylinders 401 are symmetrically disposed on the cross plate 5, the two rotary shafts of the two rotary cylinders 401 penetrate through two ends of the cylinder body and extend out, one end of each rotary shaft penetrates through the cross plate 5 and is fixedly connected with a T-shaped key, and the other end of each rotary shaft is fixedly connected with a light code disc 403. The T-key 402 interfaces with a key hole 602 in the wafer cassette 6 (which is known in the industry according to the international association for semiconductors standards).

It should be noted that the end of the T-shaped key 402 is a substantially rectangular parallelepiped block (which is well known in the industry according to the international association of semiconductors standards), and in order to achieve precise control of the position of the T-shaped key 402 via the optical code disc 403, the axial end of the rotary cylinder 401 where the optical code disc 403 is mounted and the optical code disc 403 have the same positioning flat edge 403001 for mounting and positioning the optical code disc 403, so as to ensure the matching arrangement of the optical code disc 403 and the T-shaped key, see fig. 8 and 9.

Two rotary cylinders 401 are provided with a 90 ° rotary stroke (which is according to the international semiconductor association standard and is well known in the industry), referring to fig. 12, two photoelectric sensors 404 fixed on the interface board 5 are respectively and correspondingly arranged around two optical code discs 403, the two photoelectric sensors 404 around the optical code discs 403 are arranged at intervals of 90 ° by taking the rotary shaft of the rotary cylinder 401 as the center, the symmetrical center planes of the two sensors are respectively parallel and perpendicular to the positioning flat edge, the optical code discs 403 and the T-shaped key 402 rotate synchronously, and the state of the T-shaped key 402 can be detected by combining the photoelectric sensors 404.

The optical code disc 403 is formed by sequentially connecting 90-degree fan-shaped blocking pieces, 90-2 alpha-degree fan-shaped notches and 2 alpha-degree fan-shaped blocking pieces, and the included angles between two sides of the 90-degree fan-shaped blocking pieces and the positioning flat side are alpha and (90-alpha), wherein the alpha size is matched with the light spot size of the photoelectric sensor 404. The unlocking, locking and intermediate positions of the T-shaped key 402 can be detected by the specific structure of the optical code disc 403 and the arrangement of the specific positions of the two photoelectric sensors 404 around the optical code disc 403.

Referring to fig. 1, a vacuum chuck 7 is further disposed on the interface board 5, and the vacuum chuck 7 can suck the sealing door 61. I.e., disengagement of the sealing door 61 is ensured.

The wafer transfer box unlocking and door opening system for the wafer loader has the advantages that the movement route of the door opening device is limited through the combination of the picking and placing assembly and the unlocking assembly, the movement freedom degree is reduced, the functions which are traditionally completed by three driving pieces are reduced into two, the space structure is simplified, the control is simple, the reliability of the wafer loading action is improved, and the modular design of a sealing door picking and placing mechanism of a wafer loading box on the wafer loader is realized.

The basic working principle of the device is as follows:

the processing of the wafers is generally performed in a clean environment, so that the wafers are transferred between different fields or different stations by being placed in the wafer loading box 6, and then the wafer loading box 6 is opened by an unlocking door opening system of the wafer loader to load the wafers into a slightly clean environment of different stations. A wafer cassette 66 is shown in fig. 10 and 11, which is generally composed of a wafer cassette and a sealing door 601, wherein the sealing door 601 has a keyhole 602 and a vacuum suction surface 603, and the opening of the sealing door 601 requires that a rectangular block of a T-shaped key 402 with a T-shaped structure is inserted into the keyhole 602 and rotated 90 ° in a specific direction to open, and the stroke of the corresponding selected rotary cylinder 401 is 90 °.

When the device is in operation, the state of the T-shaped key 402 is checked, the control system receives signals of the photoelectric sensor 404, and the position state of the T-shaped key 402 is determined according to the state signals of the photoelectric sensor. In the initial state, the photosensors 404 are all in a state where light is interrupted. During normal operation of the photosensor 404, the control system receives three combinations of signals via the photosensor 404:

a. if the control system receives the signals from the lower photo sensor 404000 and the left photo sensor 404001 that both lights are interrupted, it can be determined that the T-key 402 is in the correct initial position, see fig. 12 and 13, when the T-key 402 is in the upright position;

b. if the control system receives a signal from the lower photosensor 404000 that the light is interrupted and a signal from the left photosensor 404001 that the light is not interrupted, the control system indicates that the T-key 402 is in the neutral position and the control system provides a signal for locking (counterclockwise rotation from the perspective of fig. 12) to reset the T-key 402;

c. if the control system receives a signal that the lower photosensor 404000 is not blocking light and the left photosensor 404001 is blocking, see fig. 14 and 15, indicating that the T-key 402 is unlocked, the control will likewise signal that the T-key 402 is locked (counterclockwise from the perspective of fig. 12), which will reset the T-key 402.

If the control system receives a combination of signals other than the three mentioned above, which indicates a wrong position of the optical code disc 403 or a wrong signal of the photoelectric sensor 404, the control system gives an indicator light signal to inform maintenance personnel to check.

After the system receives any one of the signals a, b or c, in order to further determine that the two photoelectric sensors 404 can work normally, a signal is given to reset the T-shaped key 402, then a signal is sent to enable the T-shaped key 402 to complete the actions of unlocking (clockwise rotation from the perspective of fig. 12) and locking (counterclockwise rotation from the perspective of fig. 12) in sequence, in the process, if the control system can receive the change signal of each photoelectric sensor 404, the photoelectric sensor 404 is determined to be in a normal state, otherwise, the control system determines to be in a fault state, and gives an indicator light signal to inform maintenance personnel to check.

After confirming that the T-shaped key 402 is in the correct position, the wafer loader sends out a running signal, the wafer loader enters into a working state, a wafer loading box 6 containing wafers is loaded on the loading platform 9, the connection plate 5 is close to a sealing door 601 of the wafer loading box 6 at the moment, the T-shaped key 402 is inserted into a key hole 602, a vacuum chuck 7 is attached to a vacuum adsorption surface 603 on the sealing door 601, the wafer loader starts to work, the control system controls the vacuum work, the vacuum chuck 7 tightly attaches the sealing door 601 to the connection plate 5, a rotary air cylinder 401 rotates 90 degrees clockwise, the control system receives a designated signal of a photoelectric sensor 404, the sealing door 601 and a wafer transmission box are unlocked at the moment, the control system further sends out a signal for controlling a driving air cylinder to extend, a piston rod extends, a ridge rod 302 is pushed to swing, a rolling bearing on a guide shaft 305 connected with the ridge rod 302 slides in a sliding groove of the ridge plate 301, the ridge rod 302 is in a swing operation state.

The ridge rod 302 drives the cross connection plate 5 at the upper end to synchronously swing, the sealing door 601 tightly adsorbed on the cross connection plate 5 by means of vacuum is taken out from the wafer loading box 6, in order to ensure that the wafer stably swings to ensure that the sealing door 601 does not interfere with the side wall of the wafer loading box 6 in the taking-out process, the radius of the central arc of the arc chute part 301002 is equal to the center distance between the first rotating shaft 303 and the guide shaft 305, the first rotating shaft 303 keeps static in the swinging process of the ridge rod 302, the swinging of the ridge rod 302 rotates around the fixed shaft of the first rotating shaft 303, meanwhile, the radius of the central arc of the arc chute part 301002 is larger than the width and the thickness of the sealing door 601, the sealing door 601 is enabled to move nearly horizontally in the taking-out or putting-back process of the wafer loading box 6, the safety of the butt joint process is ensured, and the friction between the sealing door 601 and the wafer loading box 6 is avoided.

Meanwhile, during the swing of the ridge rod 302, the connection plate 307 and the slide block 308 are kept in a static state, and when the guide shaft 305 moves to the transition smooth groove 301003, the swing of the ridge rod 302 and the connection plate 5 is completed, so that the sealing door 601 is taken out of the wafer loading box 6. See fig. 16.

As the piston rod of the driver 310 continues to extend, pushing the spine 302 to continue moving, the guide shaft 305 begins to slide down the straight slide groove 301001. In order to make the ridge rod 302 drive the stability of the cross connection plate 5 and the sealing door 601 in the vertical downward movement process, the axial symmetrical center plane of the straight slide rail 309 and the symmetrical center plane of the straight slide groove portion 301001 are parallel vertical planes, and the movement track plane of the first rotating shaft center line and the symmetrical center plane of the straight slide groove portion 301001 of the slide groove on the ridge plate 301 are coincident vertical planes, so that the swing freedom degree of the ridge rod 302 is restricted, the stability of the cross connection plate and the sealing door 601 in the up-and-down movement process is ensured, and the influence on the adsorption stability of the vacuum chuck 7 and the sealing door 601 on the cross connection plate is avoided.

Referring to fig. 17, the ridge rod 302, the connecting plate 307 and the sliding block 308 synchronously move in a downward translational motion along the vertical sliding rail, when the piston rod of the driving element 310 is completely extended, the ridge rod 302 stops moving, the sealing door 601 is located at the bottom of the wafer loader, all actions of unlocking, taking out the sealing door 601 and placing the sealing door 601 at a specified position are completed, and meanwhile, a control system of the wafer loader sends a signal to an upper computer to wait for the action of the upper computer. Similarly, after the host computer completes a series of actions, and issues an instruction to the control system of the wafer loader to put the sealing door 601 back into the wafer loading cassette 6 and lock it, the wafer loader will put the sealing door 601 into the wafer loading cassette 6 and lock the sealing door 601 with the wafer loading cassette 6 by rotating the air cylinder 401 in the reverse order of actions, then unload the vacuum, and further unload the wafer loading cassette 6 from the wafer loader.

The above embodiments are merely illustrative of the technical concept and features of the present invention, and the present invention is not limited thereto, and any equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of the present invention.

Claims (12)

1. A system for unlocking and opening a wafer transfer box of a wafer loader comprises a frame of the wafer loader, and is characterized in that: be provided with the loading platform in the frame and set up the handing-over interface, and set up door opener, door opener is including getting and put subassembly, unblock subassembly and handing-over board, it includes the backbone to get to put the subassembly, the backbone is fixed to be set up in the frame, just swing joint has the backbone on the backbone, it still includes the driving piece to get to put the subassembly, and the both ends of driving piece are articulated with the bottom and the backbone of loading platform respectively, handing-over board and backbone fixed connection, just the handing-over board corresponds the setting with the handing-over interface, and the overhead door butt joint of box is loaded to the simultaneous handing-over board and wafer, set up the unblock subassembly on the handing-over board, the unblock subassembly can load the sealing door and the box body unblock of box with the wafer, gets to put the subassembly and realize opening and shutting with the handing-over interface through the drive handing-over interface to get the sealing door of wafer loading box through the handing-over interface.

2. The system of claim 1, wherein the system further comprises: the ridge plate is provided with a sliding groove, the sliding groove comprises a straight sliding groove part and an arc sliding groove part, and the straight sliding groove part and the arc sliding groove part are smoothly connected through a transition smooth groove.

3. The system for unlocking the door of the wafer loading box of the wafer loader as claimed in claim 1 or 2, wherein: the lower end of the ridge rod is rotatably connected with a first rotating shaft and a second rotating shaft, a guide shaft is arranged in the middle of the ridge rod, a rolling bearing is installed on the guide shaft, the width of the sliding groove on the ridge plate is matched with the outer diameter of the rolling bearing, and the rolling bearing rolls along the inner wall of the sliding groove on the ridge plate.

4. The system of claim 2, wherein the wafer cassette for a wafer loader unlocks the door with the door open position, and wherein: the central arc line of the arc chute part is an arc, the radius of the arc is equal to the center distance between the first rotating shaft and the guide shaft, and the center of the arc is positioned on the symmetrical center line of the straight chute part.

5. The system of claim 1, wherein the system further comprises: the ridge plate is provided with a straight slide rail, the straight slide rail is connected with a slide block in a sliding mode, the slide block is fixedly provided with a connecting plate, and the connecting plate is fixedly connected with a first rotating shaft.

6. The system for unlocking the door of the wafer loading box of the wafer loader as claimed in claim 5 or 2, wherein: the axial symmetry center plane of the straight slide rail and the symmetry center plane of the straight slide groove part are parallel vertical planes.

7. The system for unlocking the door of the wafer loading box of the wafer loader as claimed in claim 5 or 2, wherein: the motion trail surface of the central line of the first rotating shaft and the symmetrical central surface of the straight sliding groove part of the sliding groove on the ridge plate are coincident vertical surfaces.

8. A system for unlocking a door of a wafer loading cassette for a wafer loader as claimed in claim 1 or 3, wherein: the driving piece is a linear motion cylinder, the tail end of the driving piece is hinged to a support fixed on the rack, and a piston rod of the driving piece is fixedly connected with the second rotating shaft through a connector.

9. The system of claim 1, wherein the system further comprises: the unlocking assembly comprises two rotary cylinders, the two rotary cylinders are arranged on the cross connection plate in a bilateral symmetry mode, rotating shafts of the two rotary cylinders penetrate through two ends of the cylinder body and extend out, one end of each rotating shaft penetrates through the cross connection plate to be fixedly connected with a T-shaped key, the other end of each rotating shaft is fixedly connected with an optical code disc, and two photoelectric sensors fixed on the cross connection plate are correspondingly arranged on the periphery of each optical code disc.

10. The system of claim 9, wherein the door is unlocked from a wafer cassette of a wafer loader: the shaft end of the rotary cylinder for mounting the optical code disc and the optical code disc are provided with the same positioning flat edge for mounting and positioning the optical code disc.

11. The system for unlocking the door of the wafer loading box of the wafer loader as claimed in claim 9 or 10, wherein: the two rotary cylinders are provided with 90-degree rotary strokes, the two photoelectric sensors around the optical code disc are arranged at intervals of 90 degrees by taking the rotary shaft of the rotary cylinder as the center, and the symmetrical center planes of the two sensors are respectively parallel and perpendicular to the positioning flat edge.

12. The system for unlocking the door of the wafer loading box of the wafer loader according to any one of claims 7, 8 and 9, wherein: the optical code disc is formed by sequentially connecting 90-degree fan-shaped blocking pieces, 90-2 alpha-degree fan-shaped notches and 2 alpha-degree fan-shaped blocking pieces, included angles between two sides of the 90-degree fan-shaped blocking pieces and a positioning flat side are alpha and 90-alpha respectively, and the angle of the alpha is matched with the light spot of the photoelectric sensor.

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