CN114325996A - Optical fiber lead-in device and optical fiber lead-in method - Google Patents

Optical fiber lead-in device and optical fiber lead-in method Download PDF

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Publication number
CN114325996A
CN114325996A CN202111403064.2A CN202111403064A CN114325996A CN 114325996 A CN114325996 A CN 114325996A CN 202111403064 A CN202111403064 A CN 202111403064A CN 114325996 A CN114325996 A CN 114325996A
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China
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optical fiber
glue
annular boss
vacuum
seat
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CN202111403064.2A
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CN114325996B (en
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王妍智
孙国华
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Beijing Youwei Precision Measurement And Control Technology Research Co ltd
Beijing U Precision Tech Co Ltd
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Beijing U Precision Tech Co Ltd
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Priority to CN202111403064.2A priority Critical patent/CN114325996B/en
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Publication of CN114325996A publication Critical patent/CN114325996A/en
Priority to PCT/CN2022/120570 priority patent/WO2023093253A1/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Light Guides In General And Applications Therefor (AREA)

Abstract

The present invention relates to the field of vacuum chamber technology, and more particularly, to an optical fiber introduction device and an optical fiber introduction method for a vacuum chamber. The invention aims to provide an optical fiber introduction device and an optical fiber introduction method, which have higher air tightness when an optical fiber is introduced into a vacuum chamber. Wherein optic fibre leading-in device includes separation blade, encapsulating seat, vacuum encapsulating glue film, sealed bonding glue film, first cell body has been seted up at the separation blade edge, encapsulating seat inner wall is provided with first annular boss, the annular boss of second, being close to of first annular boss the second cell body has been seted up at the edge of centre bore, the separation blade place in on the first annular boss, the separation blade with first annular boss interconnect corresponds each other first cell body the second cell body forms and is used for holding one the fixed slot of the bare wire of optic fibre, the vacuum encapsulating glue layer cover in on the separation blade, sealed bonding glue film cover in on the vacuum encapsulating glue film.

Description

Optical fiber lead-in device and optical fiber lead-in method
Technical Field
The present invention relates to the field of vacuum chamber technology, and more particularly, to an optical fiber introduction device and an optical fiber introduction method for a vacuum chamber.
Background
At present, the transmission of extreme ultraviolet light of a common EUV lithography machine requires that a workpiece table cavity has extremely high vacuum degree, the influences of outgassing, airtightness and the like are comprehensively considered, and partial light path needs to be transmitted inside and outside the cavity through optical fibers. One of the methods for realizing the conduction of the optical fibers inside and outside the cavity is to adopt an integrated optical fiber and seal the optical fiber when the optical fiber passes through the wall of the vacuum cavity; the existing optical fiber leading-in device can cause the leakage of a workpiece table cavity due to low air tightness and influence the use.
Disclosure of Invention
The invention provides an optical fiber introduction device and an optical fiber introduction method, which have higher air tightness when an optical fiber is introduced into a vacuum chamber.
In order to solve the technical problem, the application provides the following technical scheme:
the optical fiber leading-in device comprises a baffle, a glue filling seat, a vacuum glue filling layer and a sealing adhesive layer, wherein the baffle is in a sheet shape, a first groove body for an optical fiber to pass through is formed in the edge of the baffle, the glue filling seat is a hollow body surrounded by side walls, a central hole is formed in the center of the glue filling seat, a first annular boss and a second annular boss are arranged on the inner wall of the glue filling seat, the width of the first annular boss is larger than that of the second annular boss, a second groove body is formed in the edge, close to the central hole, of the first annular boss and used for the optical fiber to pass through, the baffle is placed on the first annular boss and connected with the first annular boss, the first groove body and the second groove body are in one-to-one correspondence, and a fixing groove for accommodating a bare wire of the optical fiber is formed by the first groove body and the second groove body which are in one-to-one correspondence, the vacuum potting adhesive layer covers the baffle, and the sealing adhesive layer covers the vacuum potting adhesive layer.
According to the optical fiber leading-in device, the first groove body and the second groove body are semicircular.
The optical fiber leading-in device is characterized in that the blocking piece is provided with at least two countersunk flat head screws, the first annular boss is provided with corresponding connecting holes, and the blocking piece and the first annular boss are connected with each other by the at least two countersunk flat head screws respectively penetrating through the corresponding countersunk flat head screws and the corresponding connecting holes.
According to the optical fiber lead-in device, one side of the first annular boss, which is far away from the second annular boss, is provided with the annular sealing groove, and the sealing ring is arranged in the annular sealing groove.
In the optical fiber lead-in device, a gap is reserved between the baffle plate and the step groove, and the edge of the second annular boss close to the central hole is provided with a radius.
According to the optical fiber lead-in device, an exhaust structure is arranged on one side surface of the glue filling seat corresponding to the annular sealing groove, the exhaust structure is a plurality of grooves formed in the side wall of the glue filling seat, and each groove is communicated with the annular sealing groove.
The optical fiber leading-in device further comprises a mounting seat, wherein the mounting seat is used for connecting the glue filling seat to the wall of the vacuum cavity, and the mounting seat is connected with the glue filling seat.
The method for guiding the optical fiber by adopting the optical fiber guiding device comprises the following steps:
the part of the optical fiber, which is positioned in the vacuum cavity, is a first section, the part of the optical fiber, which is positioned at the encapsulation position, is a second section, the plastic protective layer outside each first section is removed, the plastic protective layer and the metal layer outside each second section are removed, the length of each second section is smaller than the thickness of the encapsulating glue, the thickness of the encapsulating glue is the distance from the upper surface of the blocking piece to the top surface of the encapsulating glue base after the blocking piece is placed in the encapsulating glue base,
sleeving the optical fibers into a second groove body on a glue pouring seat respectively, placing a blocking piece on a first annular boss to enable the first groove body and the second groove body to correspond one to one, forming fixing grooves by the first groove body and the second groove body which correspond to each other, accommodating the second section of each optical fiber into one fixing groove respectively, and connecting the blocking piece with the glue pouring seat;
pouring vacuum glue on the surface of the separation blade, wherein the vacuum glue is filled in the space between the optical fiber and the separation blade and the space between the optical fiber and the glue pouring seat, and the vacuum glue covers the surface of the separation blade;
and forming a vacuum glue layer after the vacuum glue is solidified, and pouring sealing adhesive glue outside the vacuum glue layer, wherein the sealing adhesive glue is not more than the surface of the glue pouring seat.
The method for leading in the optical fiber of the invention also comprises the following steps: and after the sealing adhesive is cured, a sealing ring is arranged in the sealing groove.
The method for leading in the optical fiber of the invention also comprises the following steps: and after the sealing ring is installed, the glue pouring seat is connected to the installation seat.
Compared with the prior art, the optical fiber lead-in device has at least the following beneficial effects:
according to the optical fiber leading-in device, the fixing grooves formed by the first groove body and the second groove body are used for accommodating an optical fiber bare wire, so that the optical fiber can be ensured to be in good contact with pouring sealant during pouring, gapless sealing is realized, the vacuum airtightness of a vacuum cavity is ensured when the optical fiber is led into the vacuum cavity, meanwhile, the plurality of first groove bodies are arranged on the baffle, and the plurality of second groove bodies are arranged on the pouring base, so that a plurality of optical fibers can be sealed simultaneously, the integration level is higher, the pouring base is provided with the central hole, the installation is convenient, and the optical fiber leading-in device is not limited by the size type of an optical fiber connector.
The optical fiber lead-in device of the present invention will be further described with reference to the accompanying drawings.
Drawings
FIG. 1 is a schematic diagram of an exploded structure of an optical fiber lead-in device according to the present invention;
FIG. 2 is a schematic diagram of an assembled optical fiber lead-in device according to the present invention;
FIG. 3 is a schematic structural view of a baffle plate of the optical fiber lead-in device according to the present invention;
FIG. 4 is a schematic structural diagram of a potting base in the optical fiber guiding device according to the present invention;
FIG. 5 is a schematic structural view of a glue filling base in another direction of the optical fiber guiding device according to the present invention;
FIG. 6 is a schematic view of an installation structure of a blocking plate and a glue filling seat in the optical fiber guiding device of the present invention.
Detailed Description
As shown in fig. 1, 2, 3, 4, and 5, an optical fiber guiding device according to an embodiment of the present invention includes a blocking sheet 1, a potting seat 2, a vacuum potting adhesive layer, a sealing adhesive layer 8, the potting seat 2 and the blocking sheet 1 are made of a metal material with a low gas release amount, the blocking sheet 1 is thin, the edge of the blocking sheet 1 is provided with a plurality of first grooves 11 for the optical fiber 4 to pass through, the potting seat 2 is a hollow body surrounded by side walls, a central hole 21 is formed in the center of the potting seat 2, the inner wall of the potting seat 2 is provided with a first annular boss 24 and a second annular boss 27, the width of the first annular boss 24 is greater than that of the second annular boss 27, the edge of the first annular boss 24 near the central hole 21 is provided with a plurality of second grooves 22 for the optical fiber 4 to pass through, the blocking sheet 1 is placed on the first annular boss 24, and the blocking sheet 1 is connected to the first annular boss 24, the first tank body 11 and the second tank body 22 correspond to each other one by one, the first tank body 11 and the second tank body 22 which correspond to each other form a fixing groove for accommodating a bare optical fiber 4, the optical fiber 4 usually comprises a plastic protection layer 42, a metal layer 41 and a central layer from outside to inside, the metal layer 41 is a metal calcium layer or other metal material layers, the bare optical fiber 4 refers to the central layer after the plastic protection layer 42 and the metal layer 41 are peeled off, a vacuum pouring sealant layer covers the baffle plate 1, and a sealing adhesive layer 8 covers the vacuum pouring sealant layer. According to the optical fiber leading-in device, the fixing groove formed by the first groove body 11 and the second groove body 22 is used for accommodating a bare optical fiber 4, so that the optical fiber 4 can be ensured to be in good contact with pouring sealant during pouring, gapless sealing is realized, the vacuum airtightness of a vacuum cavity is ensured when the optical fiber 4 is led into the vacuum cavity, meanwhile, the plurality of first groove bodies 11 are arranged on the blocking piece 1, and the plurality of second groove bodies 22 are arranged on the pouring sealant seat 2, so that a plurality of optical fibers can be sealed simultaneously, the integration level is higher, the central hole 21 is formed in the pouring sealant seat 2, the installation is convenient, and the limitation of the size type of an optical fiber connector is avoided.
Alternatively, as shown in fig. 6, the first groove 11 and the second groove 22 are both semicircular, and the shape and size of the fixing groove formed by the first groove 11 and the second groove 22 corresponding to each other are adapted to the shape and size of the cross section of the bare wire of the optical fiber 4.
Optionally, the blocking piece 1 is provided with two or more countersunk head holes 12, the first annular boss 24 is provided with corresponding connecting holes, and the two or more countersunk head screws penetrate through the countersunk head holes 12 and the connecting holes to connect the blocking piece 1 and the first annular boss 24. The separation blade 1 and the glue pouring base 2 can also adopt other connection modes.
Optionally, an annular seal groove 25 is formed in a side of the first annular boss 24 away from the second annular boss 27, and a seal ring 3 is disposed in the annular seal groove 25. When the glue pouring base 2 of the optical fiber lead-in device is connected with the mounting base, the vacuum airtightness of the vacuum cavity can be further ensured due to the arrangement of the sealing ring, and meanwhile, the sealing ring can be disassembled and assembled for many times, so that the maintenance or the replacement is convenient.
Optionally, the blocking sheet 1 is a rounded rectangle, the second annular boss 27 is a rounded rectangle ring, a gap 241 is left between the long sides of the blocking sheet 1 and the second annular boss 27, the short sides and the rounded corners of the blocking sheet 1 and the second annular boss 27 contact each other, and a radius is arranged on the edge of the second annular boss 27 close to the central hole 21. Due to the arrangement of the gap 241 and the radius, glue flows when glue is conveniently poured, the bonding area is increased, the glue filling rate is guaranteed, the separation blade 1 and the short edge and the round corner of the second annular boss 27 are in mutual contact, accurate positioning can be achieved, and the gap is reserved on the long edge, so that the glue can fully flow into the gap to seal the assembling position of the optical fiber wire and the sealing groove.
Optionally, an exhaust structure 26 is disposed on a side surface of the potting seat 2 corresponding to the annular sealing groove 25, the exhaust structure 26 is a plurality of grooves disposed on a sidewall of the potting seat 2, and each groove is communicated with the annular sealing groove 25. Specifically, the cross section of the annular sealing groove 25 is rectangular, the cross section of the sealing ring 3 is circular, the exhaust structure 26 is arranged at the opposite angle of the potting seat 2, and the depth of the exhaust structure 26 is smaller than that of the annular sealing groove 25. When the glue pouring base 2 is connected to the mounting base 6, due to the arrangement of the exhaust structure 26, the sealing ring 3 is extruded and deformed, gas between the sealing ring 3 and the annular sealing groove 25 is released through the exhaust structure 26, the sealing ring 3 is fully deformed, the sealing effect is guaranteed, the gap of the annular sealing groove 25 cannot continuously release gas during vacuumizing, and the vacuum degree of the vacuum cavity is guaranteed. Because the cross section of cyclic annular seal groove 25 is the rectangle, and the cross section of sealing washer 3 is circular, and circular cross section takes place to warp when sealing washer 3 is compressed, has the trend of filling the rectangular section four corners of cyclic annular seal groove 25, and exhaust structure 26 sets up in the diagonal position of encapsulating seat 2, can in time, thoroughly discharge the air in the four corners compressed space, can make sealing washer 3 fully even deformation, guarantees sealed effect.
Optionally, the vacuum cavity sealing device further comprises a mounting seat 6, the mounting seat 6 is used for connecting the glue pouring seat 2 to the vacuum cavity wall, and the mounting seat 6 is connected with the glue pouring seat 2. Specifically, the mounting base 6 can select for use the flange of different models according to the actual demand, offers threaded blind hole 23 on encapsulating seat 2, will encapsulate encapsulating seat 2 and install on the flange through screw 5, then install whole optic fibre gatherer on the vacuum cavity wall through the flange again.
The invention discloses a method for leading in an optical fiber, which comprises the following steps:
the optical fiber 4 is partially positioned outside the vacuum cavity, partially positioned in the vacuum cavity and partially positioned at the encapsulation position, the part of the optical fiber 4 positioned in the vacuum cavity is a first section, the part of the optical fiber 4 positioned at the encapsulation position is a second section, the part of the optical fiber 4 positioned outside the vacuum cavity is a third section, the plastic protection layer 42 outside each first section is removed, the plastic protection layer 42 and the metal layer 41 outside each second section are removed, the plastic protection layer 42 and the metal layer 41 are reserved in the third section, the length of each second section is smaller than the glue filling thickness, and the glue filling thickness is the distance from the upper surface of the baffle plate 1 to the top surface of the glue filling seat 2 after the baffle plate 1 is placed in the glue filling seat 2;
sleeving each optical fiber 4 into a second groove body 22 on the potting seat 2, placing the blocking piece 1 on a first annular boss 24 to enable the first groove bodies 11 and the second groove bodies 22 to correspond one to one, forming fixing grooves by the first groove bodies 11 and the second groove bodies 22 which correspond to each other, respectively accommodating second sections of the optical fibers 4 in the fixing grooves, and connecting the blocking piece 1 with the potting seat 2;
pouring vacuum glue on the surface of the separation blade 1, wherein the vacuum glue is filled in the space between the optical fiber 4 and the separation blade 1 and the space between the optical fiber 4 and the glue pouring base 2, and the vacuum glue covers the surface of the separation blade 1; the vacuum adhesive adopts an adhesive with small vacuum outgassing, such as Lord320, but the vacuum adhesive has low strength after being cured and is easy to tear after being stressed.
And forming a vacuum adhesive layer after the vacuum adhesive is cured, and pouring sealing adhesive glue outside the vacuum adhesive layer, wherein the sealing adhesive glue does not exceed the surface of the glue pouring base 2. The sealing adhesive does not need to consider the vacuum outgassing performance, and adopts an adhesive which has higher strength and can bear force after being cured.
According to the method for guiding the optical fiber, the optical fiber 4 is processed in a segmented mode, different use requirements inside and outside a vacuum cavity can be met, the part located inside the vacuum cavity only keeps the metal layer with low outgassing rate, outgassing amount is reduced, the part located outside the vacuum cavity keeps the outermost plastic protective layer, strength and cleanliness are guaranteed, the bare wire is stripped at the encapsulation position, the optical fiber is in good contact with the encapsulation glue, gapless sealing is achieved, and the vacuum airtightness requirement of the vacuum cavity is met.
Optionally, a method for guiding an optical fiber according to the present invention further includes the steps of: after the sealing adhesive is cured, the sealing ring 3 is installed in the sealing groove 25.
Optionally, a method for guiding an optical fiber according to the present invention further includes the steps of: after the sealing ring 3 is installed, the glue pouring base 2 is connected to the installation base 6.
The above-mentioned embodiments are merely illustrative of the preferred embodiments of the present invention, and do not limit the scope of the present invention, and various modifications and improvements of the technical solution of the present invention by those skilled in the art should fall within the protection scope defined by the claims of the present invention without departing from the spirit of the present invention.

Claims (10)

1. The optical fiber guiding device is characterized by comprising a blocking piece (1), a glue pouring seat (2), a vacuum glue pouring layer and a sealing adhesive layer (8), wherein the blocking piece (1) is in a sheet shape, a first groove body (11) for allowing an optical fiber (4) to pass through is arranged at the edge of the blocking piece (1), the glue pouring seat (2) is a hollow body enclosed by side walls, a center hole (21) is formed in the center of the glue pouring seat (2), a first annular boss (24) and a second annular boss (27) are arranged on the inner wall of the glue pouring seat (2), the width of the first annular boss (24) is larger than that of the second annular boss (27), a second groove body (22) is arranged at the edge of the first annular boss (24) close to the center hole (21), the second groove body (22) is used for the optical fiber (4) to pass through, the blocking piece (1) is placed on the first annular boss (24), separation blade (1) with first cyclic annular boss (24) interconnect, first cell body (11) with second cell body (22) one-to-one, mutual correspondence first cell body (11) second cell body (22) form and are used for holding one the fixed slot of the bare wire of optic fibre (4), vacuum encapsulating glue film cover in on separation blade (1), sealed bonding glue film (8) cover in on the vacuum encapsulating glue film.
2. The optical fiber lead-in device according to claim 1, wherein the first groove body (11) and the second groove body (22) are semicircular.
3. The optical fiber lead-in device according to claim 2, wherein the blocking piece (1) is provided with at least two countersunk flat head screws (12), the first annular boss (24) is provided with corresponding connecting holes, and at least two countersunk flat head screws respectively penetrate through the corresponding countersunk flat head screws (12) and the connecting holes to connect the blocking piece (1) and the first annular boss (24) with each other.
4. The optical fiber lead-in device according to claim 3, wherein an annular sealing groove (25) is formed in a side of the first annular boss (24) facing away from the second annular boss (27), and a sealing ring (3) is disposed in the annular sealing groove (25).
5. The device for introducing optical fibers according to claim 4, wherein a gap (241) is left between the baffle (1) and the long side of the second annular projection (27), and the edge of the second annular projection (27) close to the central hole (21) is provided with a radius.
6. The optical fiber lead-in device according to claim 5, wherein an exhaust structure (26) is disposed on a side surface of the potting seat (2) corresponding to the annular sealing groove (25), the exhaust structure (26) is a plurality of grooves opened on a sidewall of the potting seat (2), and each groove is communicated with the annular sealing groove (25).
7. The optical fiber lead-in device according to claim 6, further comprising a mounting seat (6), wherein the mounting seat (6) is used for connecting the glue filling seat (2) to the vacuum cavity wall, and the mounting seat (6) is connected with the glue filling seat (2).
8. A method for guiding an optical fiber using the optical fiber guiding device as claimed in any one of claims 1 to 7, comprising:
the part of the optical fiber (4) in the vacuum cavity is a first section, the part of the optical fiber (4) in the encapsulation position is a second section, the plastic protective layer (42) outside each first section is removed, the plastic protective layer (42) and the metal layer (41) outside each second section are removed, the length of each second section is smaller than the thickness of the encapsulating adhesive, the thickness of the encapsulating adhesive is the distance from the upper surface of the baffle (1) to the top surface of the encapsulating adhesive base (2) after the baffle (1) is placed in the encapsulating adhesive base (2),
sleeving the optical fibers (4) into a second groove body (22) on the potting seat (2) respectively, placing the blocking piece (1) on a first annular boss (24) to enable the first groove body (11) and the second groove body (22) to correspond one to one, forming fixing grooves by the first groove body (11) and the second groove body (22) which correspond to each other, accommodating the second section of each optical fiber (4) into one fixing groove respectively, and connecting the blocking piece (1) with the potting seat (2);
pouring vacuum glue on the surface of the separation blade (1), wherein the vacuum glue is filled in the space between the optical fiber (4) and the separation blade (1) and the space between the optical fiber (4) and the glue pouring seat (2), and covers the surface of the separation blade (1);
and forming a vacuum adhesive layer after the vacuum adhesive is cured, and pouring sealing adhesive glue outside the vacuum adhesive layer, wherein the sealing adhesive glue does not exceed the surface of the glue pouring base (2).
9. A method of guiding an optical fiber according to claim 8, further comprising: and after the sealing adhesive glue is cured, a sealing ring (3) is arranged in the sealing groove (25).
10. A method of guiding an optical fiber according to claim 9, further comprising: and after the sealing ring (3) is installed, the glue pouring base (2) is connected to the installation base (6).
CN202111403064.2A 2021-11-24 2021-11-24 Optical fiber introduction device and optical fiber introduction method Active CN114325996B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN202111403064.2A CN114325996B (en) 2021-11-24 Optical fiber introduction device and optical fiber introduction method
PCT/CN2022/120570 WO2023093253A1 (en) 2021-11-24 2022-09-22 Optical fiber guide-in device and optical fiber guide-in method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111403064.2A CN114325996B (en) 2021-11-24 Optical fiber introduction device and optical fiber introduction method

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CN114325996A true CN114325996A (en) 2022-04-12
CN114325996B CN114325996B (en) 2024-06-28

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WO2023093253A1 (en) * 2021-11-24 2023-06-01 北京华卓精科科技股份有限公司 Optical fiber guide-in device and optical fiber guide-in method

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CN111198417A (en) * 2020-03-17 2020-05-26 中山市美速光电技术有限公司 2XN optical fiber array and manufacturing method thereof
CN113325535A (en) * 2021-06-15 2021-08-31 长飞光纤光缆股份有限公司 Optical fiber airtight interface device and manufacturing method thereof
WO2021169205A1 (en) * 2020-02-27 2021-09-02 歌尔股份有限公司 Potting mold, potting apparatus, and potting method

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US6491445B1 (en) * 1999-12-08 2002-12-10 The Whitaker Corporation Crimp plug for a connector
JP2004191422A (en) * 2002-12-06 2004-07-08 Kyocera Corp Package for optical semiconductor device and optical semiconductor device
CN101551491A (en) * 2009-04-24 2009-10-07 中国科学院电工研究所 Sealing optical fiber device at low temperature
CN103616750A (en) * 2013-12-03 2014-03-05 四川飞阳科技有限公司 Airtight optical fiber and manufacturing method thereof
US20180246282A1 (en) * 2015-06-23 2018-08-30 Adc Telecommunications (Shanghai) Distribution Co., Ltd. Optical fiber connector assembly
US10008362B1 (en) * 2016-12-27 2018-06-26 Mapper Lithography Ip B.V. Optical fiber feedthrough device and fiber path arrangement
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Publication number Priority date Publication date Assignee Title
WO2023093253A1 (en) * 2021-11-24 2023-06-01 北京华卓精科科技股份有限公司 Optical fiber guide-in device and optical fiber guide-in method

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