CN114321590A - Ultrahigh vacuum system and temperature-controllable vacuum method thereof - Google Patents
Ultrahigh vacuum system and temperature-controllable vacuum method thereof Download PDFInfo
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Abstract
The invention discloses an ultrahigh vacuum system and a temperature-controllable vacuum method thereof, wherein the ultrahigh vacuum system comprises a bottom plate, a vacuum cavity is arranged at the top of the bottom plate, circular plates are fixedly connected to the top and the bottom of the vacuum cavity, and clamping and reinforcing mechanisms are arranged at the top of the bottom plate and the front side and the rear side of the vacuum cavity; the clamping and reinforcing mechanism comprises a sliding chute arranged at the top of the bottom plate, and a bidirectional screw rod is rotatably connected between the front side and the rear side of the inner wall of the sliding chute. This super high vacuum system and controllable temperature vacuum method thereof through the setting of clamping reinforcement mechanism, has realized the tight fixed of quick clamp to the vacuum cavity, has avoided the condition that the too big removal appears in vacuum cavity vibrations when the evacuation, has promoted the efficiency of evacuation, through the setting of two arc splint, has realized the effect of thermal-insulated protection in addition, and the vacuum cavity when having avoided staff careless contact heating causes the scald, but the reinforcing security.
Description
Technical Field
The invention relates to the technical field of ultrahigh vacuum systems, in particular to an ultrahigh vacuum system and a temperature-controllable vacuum method thereof.
Background
Vacuum spaces can be divided into four types according to molecular energy, namely near-field vacuum, thermal vacuum, low-temperature plasma vacuum and high-energy particle vacuum. The average energy of the particles flying in each vacuum is less than or equal to 5eV, less than or equal to O.3eV, less than or equal to 100eV and less than or equal to 40TeV respectively. The nuclear fusion plasma produced in the vacuum chamber is not a low temperature plasma (10 keV), and ultra-high vacuum is commonly used for surface science because molecules in air adhere to the surface of a solid exposed to air and change the surface characteristics of the solid. Even in high vacuum, a layer of molecules will adhere to the exposed solid surface within 3 seconds. However, in ultra-high vacuum, the same process will take several hours to complete, thus ensuring proper development of surface property studies. At such ultra-low pressures, the mean free path of a single molecule can reach 40 Km. That is to say almost all molecules in the vacuum chamber collide with the chamber wall.
The existing ultrahigh vacuum system has the problems that the vacuum cavity is too large in vibration during vacuumizing, unstable in fixation and easy to move, the vacuumizing efficiency is affected, in addition, the vacuum cavity is lack of a protection device during heating, the temperature of an external shell is high, surrounding workers are easily scalded, and the ultrahigh vacuum system and the temperature-controllable vacuum method thereof are provided for solving the problems.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides an ultrahigh vacuum system and a temperature-controllable vacuum method thereof, which solve the problems that a vacuum cavity is too large in vibration, unstable in fixation and easy to move, and the vacuum cavity is lack of a protection device during heating.
In order to achieve the purpose, the invention is realized by the following technical scheme: an ultrahigh vacuum system comprises a bottom plate, wherein a vacuum cavity is arranged at the top of the bottom plate, circular plates are fixedly connected to the top and the bottom of the vacuum cavity, and clamping and reinforcing mechanisms are arranged at the top of the bottom plate and on the front side and the rear side of the vacuum cavity; the clamping and reinforcing mechanism comprises a chute arranged at the top of the bottom plate, a bidirectional screw rod is rotatably connected between the front side and the rear side of the inner wall of the chute, the front end of the bidirectional screw rod penetrates through the bottom plate and extends to the front side of the bottom plate, the front side of the bottom plate is fixedly connected with a motor, the output end of the motor is fixedly connected with the front end of a bidirectional screw rod through a coupler, the front side and the rear side of the outer surface of the bidirectional screw rod are both in threaded connection with L-shaped plates, the outer surfaces of the two L-shaped plates are both in sliding connection with the inner surface of a sliding groove, the opposite sides of the two L-shaped plates are both fixedly connected with vertical plates, the opposite sides of the two vertical plates are both provided with arc-shaped clamping plates, the opposite sides of the two arc-shaped clamping plates are both in contact extrusion with the outer surface of a vacuum cavity, a dismounting assembly is arranged between the two arc-shaped clamping plates and the vertical plates, and the tops and bottoms of the opposite sides of the two vertical plates are both provided with buffer mechanisms; the assembling and disassembling component comprises circular grooves formed in the opposite sides of two vertical plates, connecting rods are fixedly connected to the far sides of the two arc-shaped clamping plates, slots are formed in the tops and the bottoms of the two connecting rods, the far ends of the two connecting rods penetrate through the circular grooves and extend into the circular grooves, two fixing rods are fixedly connected to the opposite sides of the two vertical plates, vertical pipes are fixedly connected to the opposite ends of the four fixing rods, inserting rods are slidably connected to the far ends of the four vertical pipes, the opposite ends of the four inserting rods penetrate through the vertical pipes and extend into the slots, the outer surfaces of the four inserting rods are clamped with the inner surfaces of the slots, sliding plates are fixedly connected to the outer surfaces of the four inserting rods, the outer surfaces of the four sliding plates are slidably connected with the inner surfaces of the vertical pipes, and first springs are sleeved on the outer surfaces of the four inserting rods, the opposite ends of the four first springs are fixedly connected with one side of the sliding plate, the ends, far away from the four first springs, of the four first springs are fixedly connected with the inner surface of the vertical pipe, and the ends, far away from the four insertion rods, of the four insertion rods are fixedly connected with handles.
Preferably, the buffer mechanism comprises square grooves formed in the tops and the bottoms of the two vertical plates on the opposite sides, and buffer plates are connected to the inner surfaces of the four square grooves in a sliding mode.
Preferably, four equal fixedly connected with horizontal pipes in one side that the buffer board kept away from, four equal fixedly connected with horizontal pole of inner wall in square groove.
Preferably, the opposite ends of the four cross rods penetrate through the transverse pipe and extend to the inside of the transverse pipe, and the outer surfaces of the four transverse pipes are sleeved with second springs.
Preferably, the opposite ends of the four second springs are fixedly connected with one side of the buffer plate, and the ends, far away from the four second springs, are fixedly connected with the inner wall of the square groove.
Preferably, the bottom of the circular plate at the bottom is fixedly connected with two support rods, the bottoms of the two support rods are in contact with the top of the bottom plate, and the top of the circular plate at the top is communicated with a vacuum tube.
Preferably, one end of the vacuum tube penetrates through the vacuum cavity and extends into the vacuum cavity, a vacuum pump is fixedly connected to the right side of the top of the bottom plate, and an air inlet of the vacuum pump is communicated with the other end of the vacuum tube.
Preferably, the heater is fixedly connected to the right side of the top of the bottom plate, the top of the heater is communicated with a heating lead, and the front end of the heating lead is connected with the outer surface of the vacuum cavity.
The invention also discloses a temperature-controllable vacuum method of the ultrahigh vacuum system, which comprises the following steps:
s1, firstly, starting a motor, enabling the motor to drive a bidirectional screw rod to rotate, simultaneously driving two L-shaped plates to move oppositely by the bidirectional screw rod, simultaneously driving two vertical plates to move oppositely by the L-shaped plates, simultaneously driving two arc-shaped clamping plates to clamp and fix the vacuum cavity by the vertical plates, and realizing the rapid clamping and fixing of the vacuum cavity by the arrangement of a clamping and reinforcing mechanism;
s2, further starting a vacuum pump to vacuumize the vacuum cavity, and then starting a heater to electrically heat the vacuum cavity by the heating wire;
s3, when the arc-shaped clamping plate needs to be replaced, two handles are pulled, so that the handles drive two insertion rods to slide backwards, the two insertion rods drive two sliding plates to slide backwards along the inner surface of the vertical pipe, the two sliding plates start to extrude and compress the first spring, finally the two insertion rods slide out of the insertion slots, the arc-shaped clamping plate and the connecting rod are further pulled out of the circular slot, disassembly is achieved, and the arc-shaped clamping plate is further replaced and then installed.
Preferably, the size of four inserted bars all matches with the size of slot, vacuum pump and heater all are connected with external power supply electrical behavior.
Advantageous effects
The invention provides an ultrahigh vacuum system and a temperature-controllable vacuum method thereof. Compared with the prior art, the method has the following beneficial effects:
(1) this super high vacuum system and controllable temperature vacuum method thereof, through starter motor, make the motor drive two-way lead screw and rotate, two-way lead screw drives two L template opposite displacement simultaneously, the L template drives two riser opposite displacement simultaneously, the riser drives two arc splint and presss from both sides tight fixedly to the vacuum cavity simultaneously, through the setting of pressing from both sides tight strengthening mechanism, the quick clamp that has realized the vacuum cavity is pressed from both sides fixedly, the condition that the removal appears too big in vacuum cavity vibrations when having avoided the evacuation, the efficiency of evacuation has been promoted, in addition, through the setting of two arc splint, the effect of thermal-insulated protection has been realized, vacuum cavity when having avoided staff's careless contact heating causes the scald, but the reinforcing security.
(2) This super high vacuum system and controllable temperature vacuum method thereof, through pulling two handles, make the handle drive two inserted bars and slide dorsad, two inserted bars drive two slides and slide along the internal surface dorsad of standpipe simultaneously, two slides begin to extrude the first spring of compression simultaneously, two final inserted bar roll-off slots, further extract arc splint and connecting rod from the circular slot, realize dismantling, setting through the dismouting subassembly, the quick dismantlement of arc splint is changed, avoided arc splint to be heated for a long time and deformed easily, the practicality is very strong.
(3) This super high vacuum system and controllable temperature vacuum method thereof through two riser opposite direction movements, finally makes two plectanes and buffer board extrusion contact, and two plectanes drive the inside buffer board slip square groove simultaneously, and the buffer board drives violently the pipe and slides along the surface of horizontal pole simultaneously, violently the pipe begins to extrude compression second spring simultaneously, through buffer gear's setting, has avoided producing the rigidity contact between riser and the plectane to the deformation of having avoided the riser has prolonged the life of riser with the plectane.
Drawings
FIG. 1 is a perspective view of the external structure of the present invention;
FIG. 2 is a view of the arcuate clamp plate of the present invention shown separated from the vacuum chamber;
FIG. 3 is a perspective view of the clamping reinforcement mechanism of the present invention;
FIG. 4 is a perspective view of the removable assembly of the present invention;
FIG. 5 is an enlarged view of a portion of the invention at A in FIG. 4;
FIG. 6 is a cross-sectional view of a standpipe of the present invention;
FIG. 7 is an enlarged view of a portion of the invention at B in FIG. 6;
FIG. 8 is an exploded perspective view of the cushioning mechanism of the present invention;
FIG. 9 is an enlarged view of a portion of the invention at C of FIG. 8;
FIG. 10 is a view showing the state in which the arc splint of the present invention is separated from the connecting rod; .
In the figure: 1-bottom plate, 2-vacuum chamber, 3-round plate, 4-clamping reinforcing mechanism, 41-sliding chute, 42-bidirectional screw rod, 43-motor, 44-L-shaped plate, 45-vertical plate, 46-arc splint, 47-dismounting component, 48-buffer mechanism, 471-round groove, 472-connecting rod, 473-slot, 474-fixed rod, 475-vertical tube, 476-inserted rod, 477-sliding plate, 478-first spring, 479-handle, 481-square groove, 482-buffer plate, 483-horizontal tube, 484-horizontal rod, 485-second spring, 5-supporting rod, 6-vacuum tube, 7-vacuum pump, 8-heater and 9-heating wire.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-10, the present invention provides a technical solution: an ultrahigh vacuum system comprises a bottom plate 1, wherein the top of the bottom plate 1 is provided with a vacuum cavity 2, the top and the bottom of the vacuum cavity 2 are both fixedly connected with circular plates 3, and the top of the bottom plate 1 and the front and rear sides of the vacuum cavity 2 are provided with clamping and reinforcing mechanisms 4; the clamping and reinforcing mechanism 4 comprises a sliding groove 41 arranged at the top of the bottom plate 1, a bidirectional screw rod 42 is rotatably connected between the front side and the rear side of the inner wall of the sliding groove 41, the bidirectional screw rod 42 is in the prior art, two threads with opposite spiral directions are engraved on the surface of the bidirectional screw rod 42 and can drive the two L-shaped plates 44 to move in opposite directions or in opposite directions, the front end of the bidirectional screw rod 42 penetrates through the bottom plate 1 and extends to the front side of the bottom plate 1, a motor 43 is fixedly connected to the front side of the bottom plate 1, the motor 43 is a three-phase asynchronous motor, the motor 43 is controlled by an external switch, the output end of the motor 43 is fixedly connected with the front end of the bidirectional screw rod 42 through a coupler, the front side and the rear side of the outer surface of the bidirectional screw rod 42 are both in threaded connection with the L-shaped plates 44, the outer surfaces of the two L-shaped plates 44 are both in sliding connection with the inner surface of the sliding groove 41, the opposite sides of the two L-shaped plates 44 are both fixedly connected with vertical plates 45, and arc-shaped clamping plates 46 are arranged on the opposite sides of the two vertical plates 45, the arc-shaped clamping plates 46 are made of rubber, have good heat insulation effect and are matched with the size of the vacuum cavity 2, the opposite sides of the two arc-shaped clamping plates 46 are in contact extrusion with the outer surface of the vacuum cavity 2, the dismounting assemblies 47 are arranged between the two arc-shaped clamping plates 46 and the vertical plates, and the tops and bottoms of the opposite sides of the two vertical plates 45 are provided with buffer mechanisms 48; the dismounting assembly 47 comprises circular grooves 471 formed on opposite sides of two vertical plates 45, connecting rods 472 are fixedly connected to the far sides of the two arc-shaped clamping plates 46, slots 473 are formed in the tops and the bottoms of the two connecting rods 472, the far ends of the two connecting rods 472 penetrate through the circular grooves 471 and extend into the circular grooves 471, two fixing rods 474 are fixedly connected to the opposite sides of the two vertical plates 45, vertical pipes 475 are fixedly connected to opposite ends of the four fixing rods 474, inserting rods 476 are slidably connected to the far ends of the four vertical pipes 475, opposite ends of the four inserting rods 476 penetrate through the vertical pipes 475 and extend into the slots 473, outer surfaces of the four inserting rods 476 are clamped with inner surfaces of the slots 473, sliding plates 477 are fixedly connected to outer surfaces of the four inserting rods 476, outer surfaces of the four sliding plates 477 are slidably connected with inner surfaces of the vertical pipes 475, first springs 478 are sleeved on the outer surfaces of the four inserting rods 476, the opposite ends of the four first springs 478 are fixedly connected with one side of the sliding plate 477, the far ends of the four first springs 478 are fixedly connected with the inner surface of the vertical tube 475, the far ends of the four insertion rods 476 are fixedly connected with the handle 479, the buffer mechanism 48 comprises square grooves 481 arranged at the top and the bottom of the opposite sides of the two vertical plates 45, the inner surfaces of the four square grooves 481 are slidably connected with buffer plates 482, the far sides of the four buffer plates 482 are fixedly connected with transverse tubes 483, the inner walls of the four square grooves 481 are fixedly connected with transverse rods 484, the opposite ends of the four transverse rods 484 penetrate through the transverse tubes 483 and extend to the inner parts of the transverse tubes 483, the outer surfaces of the four transverse tubes 483 are sleeved with second springs 485, the opposite ends of the four second springs 485 are fixedly connected with one side 482 of the buffer plates, the far ends of the four second springs 485 are fixedly connected with the inner walls of the square grooves 481, two bracing pieces 5 of bottom plectane 3's bottom fixedly connected with, the bottom of two bracing pieces 5 and the top contact of bottom plate 1, the top intercommunication of top plectane 3 has vacuum tube 6, the one end of vacuum tube 6 runs through vacuum cavity 2 and extends to the inside of vacuum cavity 2, the right side fixedly connected with vacuum pump 7 at 1 top of bottom plate, vacuum pump 7 is prior art, accessible vacuum tube 6 carries out the evacuation to the inside of vacuum cavity 2, vacuum pump 7's air inlet and vacuum tube 6's the other end intercommunication, the right side fixedly connected with heater 8 at 1 top of bottom plate, heater 8 adopts electric heater, accessible heating wire 9 gives vacuum cavity 2 with heat transfer, heater 8's top intercommunication has heating wire 9, the front end of heating wire 9 and the surface connection of vacuum cavity 2.
The invention also discloses a temperature-controllable vacuum method of the ultrahigh vacuum system, which comprises the following steps:
s1, firstly, starting the motor 43, so that the motor 43 drives the two-way screw rod 42 to rotate, meanwhile, the two-way screw rod 42 drives the two L-shaped plates 44 to move oppositely, meanwhile, the L-shaped plates 44 drive the two vertical plates 45 to move oppositely, meanwhile, the vertical plates 45 drive the two arc-shaped clamping plates 46 to clamp and fix the vacuum cavity 2, and the rapid clamping and fixing of the vacuum cavity 2 are realized through the arrangement of the clamping and reinforcing mechanism 4;
s2, further starting the vacuum pump 7 to vacuumize the vacuum cavity 2, and then starting the heater 8 to electrically heat the vacuum cavity 2 by the heating wire 9;
s3, when the arc-shaped clamping plate 46 needs to be replaced, two handles 479 are pulled, the handles 479 drive two inserting rods 476 to slide back to back, meanwhile, the two inserting rods 476 drive two sliding plates 477 to slide back along the inner surface of the vertical pipe 475, meanwhile, the two sliding plates 477 start to extrude and compress the first spring 478, finally, the two inserting rods 476 slide out of the inserting grooves 473, the arc-shaped clamping plate 46 and the connecting rod 472 are further pulled out of the circular groove 471, disassembly is achieved, the arc-shaped clamping plate 46 is further replaced and then installed, the sizes of the four inserting rods 476 are matched with the size of the inserting grooves 473, and the vacuum pump 7 and the heater 8 are electrically connected with an external power supply.
And those not described in detail in this specification are well within the skill of those in the art.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. The utility model provides an ultrahigh vacuum system, includes bottom plate (1), the top of bottom plate (1) is provided with vacuum cavity (2), the equal fixedly connected with plectane (3) in top and the bottom of vacuum cavity (2), its characterized in that: a clamping and reinforcing mechanism (4) is arranged on the top of the bottom plate (1) and is positioned at the front side and the rear side of the vacuum cavity (2);
the clamping and reinforcing mechanism (4) comprises a sliding groove (41) arranged at the top of the bottom plate (1), a bidirectional screw rod (42) is rotatably connected between the front side and the rear side of the inner wall of the sliding groove (41), the front end of the bidirectional screw rod (42) penetrates through the bottom plate (1) and extends to the front side of the bottom plate (1), a motor (43) is fixedly connected to the front side of the bottom plate (1), the output end of the motor (43) is fixedly connected with the front end of the bidirectional screw rod (42) through a coupler, L-shaped plates (44) are in threaded connection with the front side and the rear side of the outer surface of the bidirectional screw rod (42), the outer surfaces of the two L-shaped plates (44) are in sliding connection with the inner surface of the sliding groove (41), vertical plates (45) are fixedly connected to the opposite sides of the two L-shaped plates (44), arc-shaped clamping plates (46) are arranged on the opposite sides of the two L-shaped clamping plates (46), and are in contact extrusion with the outer surface of the vacuum cavity (2), a dismounting assembly (47) is arranged between the two arc-shaped splints (46) and the vertical plates, and the tops and the bottoms of the opposite sides of the two vertical plates (45) are respectively provided with a buffer mechanism (48);
the disassembly and assembly component (47) comprises circular grooves (471) formed in opposite sides of two vertical plates (45), connecting rods (472) are fixedly connected to one sides, away from the two arc-shaped clamping plates (46), of the two connecting rods (472), slots (473) are formed in the tops and the bottoms of the two connecting rods (472), one ends, away from the two connecting rods (472), of the two connecting rods penetrate through the circular grooves (471) and extend to the inside of the circular grooves (471), two fixing rods (474) are fixedly connected to the opposite sides of the two vertical plates (45), vertical pipes (475) are fixedly connected to opposite ends of the four fixing rods (474), inserting rods (476) are slidably connected to one ends, away from the four vertical pipes (475), of the opposite ends of the four inserting rods (476) penetrate through the vertical pipes (475) and extend to the inside of the slots (473), and outer surfaces of the four inserting rods (476) are clamped with inner surfaces of the slots (473), four the equal fixedly connected with slide (477) of surface of inserted bar (476), four the surface of slide (477) all with the internal surface sliding connection of standpipe (475), four the surface of inserted bar (476) all overlaps and is equipped with first spring (478), four the looks remote site of first spring (478) all with one side fixed connection of slide (477), four the one end of keeping away from mutually of first spring (478) all with the internal surface fixed connection of standpipe (475), four the equal fixedly connected with handle (479) of one end that inserted bar (476) kept away from mutually.
2. The ultra-high vacuum system of claim 1, wherein: the buffer mechanism (48) comprises square grooves (481) formed in the top and the bottom of the opposite sides of the two vertical plates (45), and buffer plates (482) are connected to the inner surfaces of the four square grooves (481) in a sliding mode.
3. The ultra-high vacuum system of claim 2, wherein: the four buffer plates (482) are respectively fixedly connected with a transverse pipe (483) at one side far away from each other, and cross rods (484) are respectively fixedly connected with the inner walls of the four square grooves (481).
4. The ultra-high vacuum system of claim 3, wherein: the opposite ends of the four cross rods (484) penetrate through the transverse pipe (483) and extend to the inside of the transverse pipe (483), and the outer surfaces of the four transverse pipes (483) are sleeved with second springs (485).
5. The ultra-high vacuum system of claim 4, wherein: the opposite ends of the four second springs (485) are fixedly connected with one side of the buffer plate (482), and the ends, far away from the four second springs (485), are fixedly connected with the inner wall of the square groove (481).
6. The ultra-high vacuum system of claim 1, wherein: the bottom of the circular plate (3) is fixedly connected with two support rods (5), the bottoms of the two support rods (5) are in contact with the top of the bottom plate (1), and the top of the circular plate (3) is communicated with a vacuum tube (6).
7. The ultra-high vacuum system of claim 6, wherein: one end of the vacuum tube (6) penetrates through the vacuum cavity (2) and extends into the vacuum cavity (2), a vacuum pump (7) is fixedly connected to the right side of the top of the bottom plate (1), and an air inlet of the vacuum pump (7) is communicated with the other end of the vacuum tube (6).
8. The ultra-high vacuum system of claim 1, wherein: the heating device is characterized in that a heater (8) is fixedly connected to the right side of the top of the bottom plate (1), the top of the heater (8) is communicated with a heating lead (9), and the front end of the heating lead (9) is connected with the outer surface of the vacuum cavity (2).
9. A temperature-controllable vacuum method of an ultrahigh vacuum system is characterized in that: the method specifically comprises the following steps:
s1, firstly, starting a motor (43), enabling the motor (43) to drive a bidirectional screw rod (42) to rotate, simultaneously driving two L-shaped plates (44) to move oppositely by the bidirectional screw rod (42), simultaneously driving two vertical plates (45) to move oppositely by the L-shaped plates (44), simultaneously driving two arc-shaped clamping plates (46) by the vertical plates (45) to clamp and fix the vacuum cavity (2), and realizing rapid clamping and fixing of the vacuum cavity (2) through the arrangement of a clamping and reinforcing mechanism (4);
s2, further starting a vacuum pump (7) to vacuumize the vacuum cavity (2), and then starting a heater (8) to electrically heat the vacuum cavity (2) by a heating wire (9);
s3, when the arc-shaped clamping plate (46) needs to be replaced, two handles (479) are pulled, the handles (479) drive two inserting rods (476) to slide back to back, simultaneously the two inserting rods (476) drive two sliding plates (477) to slide back along the inner surface of a vertical pipe (475), simultaneously the two sliding plates (477) start to extrude and compress a first spring (478), finally the two inserting rods (476) slide out of a slot (473), the arc-shaped clamping plate (46) and a connecting rod (472) are further pulled out of a circular groove (471), disassembly is achieved, and the arc-shaped clamping plate (46) is further replaced and then installed.
10. A temperature-controllable vacuum method for ultra-high vacuum system as claimed in claim 9, wherein: the sizes of the four insertion rods (476) are all matched with the size of the slot (473), and the vacuum pump (7) and the heater (8) are electrically connected with an external power supply.
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| CN202111589800.8A CN114321590A (en) | 2021-12-23 | 2021-12-23 | Ultrahigh vacuum system and temperature-controllable vacuum method thereof |
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