CN114321590A - Ultrahigh vacuum system and temperature-controllable vacuum method thereof - Google Patents

Abstract

The invention discloses an ultrahigh vacuum system and a temperature-controllable vacuum method thereof, wherein the ultrahigh vacuum system comprises a bottom plate, a vacuum cavity is arranged at the top of the bottom plate, circular plates are fixedly connected to the top and the bottom of the vacuum cavity, and clamping and reinforcing mechanisms are arranged at the top of the bottom plate and the front side and the rear side of the vacuum cavity; the clamping and reinforcing mechanism comprises a sliding chute arranged at the top of the bottom plate, and a bidirectional screw rod is rotatably connected between the front side and the rear side of the inner wall of the sliding chute. This super high vacuum system and controllable temperature vacuum method thereof through the setting of clamping reinforcement mechanism, has realized the tight fixed of quick clamp to the vacuum cavity, has avoided the condition that the too big removal appears in vacuum cavity vibrations when the evacuation, has promoted the efficiency of evacuation, through the setting of two arc splint, has realized the effect of thermal-insulated protection in addition, and the vacuum cavity when having avoided staff careless contact heating causes the scald, but the reinforcing security.

Description

An ultra-high vacuum system and its temperature-controlled vacuum method

technical field

The invention relates to the technical field of ultra-high vacuum systems, in particular to an ultra-high vacuum system and a temperature-controlled vacuum method thereof.

Background technique

According to molecular energy, vacuum space can be divided into four types, near-field vacuum, thermal vacuum, low-temperature plasma vacuum and high-energy particle vacuum. The average energies of particles flying in each vacuum are ≤5eV, ≤0.3eV, ≤100eV and ≤40TeV, respectively. Fusion plasmas made in vacuum chambers, not low temperature plasmas (≥10keV), ultra-high vacuums are often used in surface science because molecules in the air will attach to solid surfaces exposed to air, and Changes the surface properties of solids. Even in a high vacuum, a layer of molecules adheres to a bare solid surface within 3 seconds. In ultra-high vacuum, however, the same process would take several hours to complete, allowing the study of surface properties to proceed normally. At such ultra-low pressures, the mean free path of a single molecule can reach 40Km. That is to say, almost all molecules in the vacuum chamber will collide with the walls of the chamber.

In the existing ultra-high vacuum system, the vacuum chamber vibrates too much during vacuuming, and the fixing is unstable and easy to move, which affects the efficiency of vacuuming. In addition, the vacuum chamber lacks a protection device when heating, and the temperature of the outer shell is high, which is easy to burn the surrounding equipment. Staff, we propose an ultra-high vacuum system and its temperature-controlled vacuum method to solve the above problems.

SUMMARY OF THE INVENTION

In view of the deficiencies of the prior art, the present invention provides an ultra-high vacuum system and a temperature-controllable vacuum method thereof, which solves the problems of excessive vibration of the vacuum chamber, unstable fixation and easy movement, and the lack of a protection device when the vacuum chamber is heated .

In order to achieve the above purpose, the present invention is achieved through the following technical solutions: an ultra-high vacuum system, comprising a bottom plate, a vacuum chamber is provided on the top of the bottom plate, and a circular plate is fixedly connected to the top and bottom of the vacuum chamber, so The top of the bottom plate and the front and rear sides of the vacuum chamber are provided with a clamping and reinforcement mechanism; the clamping and reinforcement mechanism includes a chute opened on the top of the bottom plate, and a bidirectional wire is rotatably connected between the front and rear sides of the inner wall of the chute The front end of the two-way screw rod penetrates through the bottom plate and extends to the front side of the bottom plate, the front side of the bottom plate is fixedly connected with a motor, and the output end of the motor is fixedly connected with the front end of the two-way screw rod through a coupling, so The front and rear sides of the outer surface of the two-way screw rod are threadedly connected with L-shaped plates, the outer surfaces of the two L-shaped plates are slidably connected with the inner surface of the chute, and the opposite sides of the two L-shaped plates are fixedly connected There are vertical plates, the opposite sides of the two vertical plates are provided with arc-shaped splints, the opposite sides of the two arc-shaped splints are both contacted and extruded with the outer surface of the vacuum chamber, and the two arc-shaped splints are connected with the vertical plates. Disassembly and assembly components are arranged between the plates, and buffer mechanisms are provided on the top and bottom of the opposite sides of the two vertical plates; A connecting rod is fixedly connected to the side away from the arc-shaped splint, the top and bottom of the two connecting rods are provided with slots, and the ends of the two connecting rods that are far away from each other pass through the circular groove and extend to the circular groove Inside, the opposite sides of the two vertical plates are fixedly connected with two fixed rods, the opposite ends of the four fixed rods are fixedly connected with vertical pipes, and the ends of the four vertical pipes are slidably connected There are insertion rods, the opposite ends of the four insertion rods all penetrate the vertical pipe and extend to the interior of the slot, the outer surfaces of the four insertion rods are all clamped with the inner surface of the slot, and the four insertion rods are The outer surfaces of the four slides are all fixedly connected with slide plates, the outer surfaces of the four slide plates are all slidably connected with the inner surfaces of the standpipes, the outer surfaces of the four insert rods are all sleeved with first springs, and the four first The opposite ends of the springs are fixedly connected to one side of the slide plate, the remote ends of the four first springs are fixedly connected to the inner surface of the vertical pipe, and the remote ends of the four insertion rods are fixedly connected with handles.

Preferably, the buffer mechanism includes square grooves formed at the top and bottom of the opposite sides of the two vertical plates, and buffer plates are slidably connected to the inner surfaces of the four square grooves.

Preferably, a transverse tube is fixedly connected to one side of the four buffer plates away from each other, and a transverse rod is fixedly connected to the inner walls of the four square grooves.

Preferably, opposite ends of the four transverse rods all penetrate the transverse tube and extend to the interior of the transverse tube, and second springs are sleeved on the outer surfaces of the four transverse tubes.

Preferably, the opposite ends of the four second springs are all fixedly connected to one side of the buffer plate, and the farther ends of the four second springs are all fixedly connected to the inner wall of the square groove.

Preferably, two supporting rods are fixedly connected to the bottom of the circular plate at the bottom, the bottoms of the two supporting rods are in contact with the top of the bottom plate, and the top of the circular plate at the top is connected with a vacuum tube.

Preferably, one end of the vacuum tube penetrates the vacuum chamber and extends to the interior of the vacuum chamber, a vacuum pump is fixedly connected to the right side of the top of the bottom plate, and the air inlet of the vacuum pump is communicated with the other end of the vacuum tube.

Preferably, a heater is fixedly connected to the right side of the top of the bottom plate, a heating wire is connected to the top of the heater, and the front end of the heating wire is connected to the outer surface of the vacuum chamber.

The invention also discloses a temperature-controlled vacuum method for an ultra-high vacuum system, which specifically includes the following steps:

S1. First start the motor, so that the motor drives the two-way screw to rotate, and at the same time the two-way screw drives the two L-shaped plates to move in opposite directions. At the same time, the L-shaped plate drives the two vertical plates to move oppositely, and the vertical plate drives the two arc-shaped splints. The vacuum chamber is clamped and fixed, and the fast clamping and fixing of the vacuum chamber is realized through the setting of the clamping and reinforcement mechanism;

S2, further start the vacuum pump to evacuate the vacuum chamber, and then start the heater, so that the heating wire electrically heats the vacuum chamber;

S3. When the curved splint needs to be replaced, pull the two handles, so that the handles drive the two insertion rods to slide back, and at the same time, the two insertion rods drive the two slides to slide back along the inner surface of the standpipe, and at the same time the two slides start Squeeze and compress the first spring, and finally the two insertion rods slide out of the slot, and further pull out the arc-shaped splint and the connecting rod from the circular groove to realize disassembly, and further replace the arc-shaped splint before installation.

Preferably, the dimensions of the four insertion rods are all adapted to the dimensions of the slot, and the vacuum pump and the heater are all electrically connected to an external power source.

beneficial effect

The invention provides an ultra-high vacuum system and a temperature-controlled vacuum method thereof. Compared with the prior art, it has the following beneficial effects:

(1) In the ultra-high vacuum system and its temperature-controlled vacuum method, by starting the motor, the motor drives the two-way screw to rotate, and the two-way screw drives the two L-shaped plates to move oppositely, and the L-shaped plate drives the two The vertical plate moves in opposite directions, and at the same time, the vertical plate drives two arc-shaped splints to clamp and fix the vacuum chamber. Through the setting of the clamping and reinforcement mechanism, the vacuum chamber can be quickly clamped and fixed, which avoids the vibration of the vacuum chamber during vacuuming. If it is too large, it will move, which improves the efficiency of vacuuming. In addition, through the setting of two curved splints, the effect of heat insulation protection is realized, which avoids burns caused by the staff accidentally touching the vacuum chamber during heating, and enhances safety. sex.

(2) In the ultra-high vacuum system and its temperature-controllable vacuum method, by pulling the two handles, the handles drive the two insertion rods to slide backwards, and at the same time, the two insertion rods drive the two sliding plates along the inner surface of the standpipe Slide back, at the same time, the two sliding plates begin to squeeze and compress the first spring, and finally the two insertion rods slide out of the slot, and further pull out the arc-shaped splint and the connecting rod from the circular groove to realize disassembly. , realizes the quick disassembly and replacement of the arc splint, avoids the arc splint being easily deformed by long-term heat, and has strong practicability.

(3) In the ultra-high vacuum system and its temperature-controlled vacuum method, the two vertical plates move in opposite directions, so that the two circular plates are finally pressed into contact with the buffer plate, and at the same time, the two circular plates drive the buffer plate to slide into the square. Inside the groove, at the same time, the buffer plate drives the horizontal tube to slide along the outer surface of the horizontal bar, and at the same time the horizontal tube begins to squeeze and compress the second spring. The deformation of the vertical plate is prolonged, and the service life of the vertical plate and the circular plate is prolonged.

Description of drawings

1 is a perspective view of the external structure of the present invention;

Fig. 2 is the separation state diagram of the arc splint of the present invention and the vacuum chamber;

3 is a perspective view of the clamping and reinforcing mechanism of the present invention;

4 is a perspective view of a disassembly assembly of the present invention;

Fig. 5 is the partial enlarged view of A place in Fig. 4 of the present invention;

6 is a cross-sectional view of a standpipe of the present invention;

Fig. 7 is the partial enlarged view of B place in Fig. 6 of the present invention;

8 is an exploded perspective view of the buffer mechanism of the present invention;

Fig. 9 is the partial enlarged view of C place in Fig. 8 of the present invention;

Figure 10 is a diagram of the separation state of the arc splint and the connecting rod of the present invention;

In the picture: 1- Bottom plate, 2- Vacuum chamber, 3- Round plate, 4- Clamping reinforcement mechanism, 41- Chute, 42- Bidirectional screw, 43- Motor, 44-L-shaped plate, 45- Vertical plate, 46-Arc-shaped splint, 47-Disassembly assembly, 48-Buffer mechanism, 471-Circular groove, 472-Connecting rod, 473-Slot, 474-Fixing rod, 475-Stand pipe, 476-Inserting rod, 477-Sliding plate , 478-first spring, 479-handle, 481-square groove, 482-buffer plate, 483-cross tube, 484-crossbar, 485-second spring, 5-support rod, 6-vacuum tube, 7-vacuum pump, 8-Heater, 9-Heating wire.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

1-10, the present invention provides a technical solution: an ultra-high vacuum system, comprising a bottom plate 1, a vacuum chamber 2 is arranged on the top of the bottom plate 1, and a circular plate 3 is fixedly connected to the top and bottom of the vacuum chamber 2 , the top of the bottom plate 1 and the front and rear sides of the vacuum chamber 2 are provided with a clamping and reinforcing mechanism 4; There is a two-way screw 42, the two-way screw 42 is the prior art, the surface of the two-way screw 42 is engraved with two threads of opposite helical directions, which can drive the two L-shaped plates 44 to move opposite or back, and the two-way screw 42 The front end of the motor 43 penetrates through the bottom plate 1 and extends to the front side of the bottom plate 1. The front side of the bottom plate 1 is fixedly connected with a motor 43, the motor 43 is a three-phase asynchronous motor, the motor 43 is controlled by an external switch, and the output end of the motor 43 is connected to the The front end of the two-way screw rod 42 is fixedly connected, the front and rear sides of the outer surface of the two-way screw rod 42 are threadedly connected with L-shaped plates 44, and the outer surfaces of the two L-shaped plates 44 are slidably connected with the inner surface of the chute 41. The opposite sides of the profile plate 44 are fixedly connected with vertical plates 45 , and the opposite sides of the two vertical plates 45 are provided with arc-shaped splints 46 . Matching, the opposite sides of the two arc-shaped clamping plates 46 are in contact with the outer surface of the vacuum chamber 2 and extruded, a disassembly assembly 47 is provided between the two arc-shaped clamping plates 46 and the vertical plates, and the opposite sides of the two vertical plates 45 are arranged. A buffer mechanism 48 is provided on both the top and bottom of the mounting plate; the dismounting assembly 47 includes circular grooves 471 on opposite sides of the two vertical plates 45, and connecting rods 472 are fixedly connected to the sides of the two arc-shaped splints 46 away from each other. The top and bottom of the two connecting rods 472 are provided with slots 473 , the ends of the two connecting rods 472 away from each other pass through the circular groove 471 and extend to the inside of the circular groove 471 , and the opposite sides of the two vertical plates 45 are fixedly connected There are two fixing rods 474 , the opposite ends of the four fixing rods 474 are fixedly connected with vertical pipes 475 , and the opposite ends of the four vertical pipes 475 are slidably connected with inserting rods 476 , and the opposite ends of the four inserting rods 476 pass through. The vertical pipe 475 extends to the inside of the slot 473, the outer surfaces of the four insertion rods 476 are all snapped with the inner surface of the slot 473, and the outer surfaces of the four insertion rods 476 are fixedly connected with a sliding plate 477, and the four sliding plates 477 The outer surfaces of the four insert rods 476 are all slidably connected with the inner surface of the vertical pipe 475, the outer surfaces of the four insert rods 476 are all sleeved with first springs 478, and the opposite ends of the four first springs 478 are fixedly connected to one side of the slide plate 477, The ends of the four first springs 478 away from each other are fixedly connected to the inner surface of the vertical pipe 475 , and the ends of the four insertion rods 476 away from each other are fixedly connected with a handle 479 . The square grooves 481 on the top and bottom of the side, the inner surfaces of the four square grooves 481 are all slidably connected with buffer plates 482, and the sides of the four buffer plates 482 away from each other are fixedly connected with horizontal tubes 483, and the inner walls of the four square grooves 481 are connected Both are fixedly connected with a cross bar 48 4. The opposite ends of the four transverse rods 484 all pass through the transverse tube 483 and extend to the interior of the transverse tube 483. The outer surfaces of the four transverse tubes 483 are all sleeved with second springs 485. The opposite ends of the four second springs 485 They are all fixedly connected to one side of the buffer plate 482, the ends of the four second springs 485 away from each other are fixedly connected to the inner wall of the square groove 481, and the bottom of the bottom circular plate 3 is fixedly connected with two support rods 5, two support rods. The bottom of 5 is in contact with the top of the bottom plate 1, the top of the top circular plate 3 is communicated with a vacuum tube 6, one end of the vacuum tube 6 penetrates the vacuum chamber 2 and extends to the interior of the vacuum chamber 2, and the right side of the top of the bottom plate 1 is fixedly connected with a vacuum pump 7, The vacuum pump 7 is the prior art, and the interior of the vacuum chamber 2 can be evacuated through the vacuum tube 6. The air inlet of the vacuum pump 7 is communicated with the other end of the vacuum tube 6, and the right side of the top of the bottom plate 1 is fixedly connected with a heater 8. The heater 8. Using an electric heater, heat can be transferred to the vacuum chamber 2 through the heating wire 9. The top of the heater 8 is connected with the heating wire 9, and the front end of the heating wire 9 is connected to the outer surface of the vacuum chamber 2.

The invention also discloses a temperature-controlled vacuum method for an ultra-high vacuum system, which specifically includes the following steps:

S1. First start the motor 43, so that the motor 43 drives the two-way screw 42 to rotate, and at the same time the two-way screw 42 drives the two L-shaped plates 44 to move oppositely, while the L-shaped plates 44 drive the two vertical plates 45 to move oppositely, and at the same time the vertical The plate 45 drives the two arc-shaped splints 46 to clamp and fix the vacuum chamber 2, and through the setting of the clamping reinforcement mechanism 4, the vacuum chamber 2 is quickly clamped and fixed;

S2, further start the vacuum pump 7 to evacuate the vacuum chamber 2, and then start the heater 8, so that the heating wire 9 electrically heats the vacuum chamber 2;

S3. When it is necessary to replace the curved splint 46, pull the two handles 479, so that the handles 479 drive the two insertion rods 476 to slide back, and at the same time, the two insertion rods 476 drive the two sliding plates 477 along the inner surface of the standpipe 475 to back away At the same time, the two sliding plates 477 begin to squeeze and compress the first spring 478, and finally the two insertion rods 476 slide out of the slot 473, and the arc-shaped splint 46 and the connecting rod 472 are further pulled out from the circular groove 471 to realize disassembly, and further The curved splint 46 is replaced and then installed. The dimensions of the four insertion rods 476 are all adapted to the dimensions of the slot 473 , and the vacuum pump 7 and the heater 8 are both electrically connected to the external power supply.

Meanwhile, the contents not described in detail in this specification belong to the prior art known to those skilled in the art.

It should be noted that, in this document, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any relationship between these entities or operations. any such actual relationship or sequence exists. Moreover, the terms "comprising", "comprising" or any other variation thereof are intended to encompass non-exclusive inclusion such that a process, method, article or device comprising a list of elements includes not only those elements, but also includes not explicitly listed or other elements inherent to such a process, method, article or apparatus.

Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, and substitutions can be made in these embodiments without departing from the principle and spirit of the invention and modifications, the scope of the present invention is defined by the appended claims and their equivalents.

Claims (10)

1. The utility model provides an ultrahigh vacuum system, includes bottom plate (1), the top of bottom plate (1) is provided with vacuum cavity (2), the equal fixedly connected with plectane (3) in top and the bottom of vacuum cavity (2), its characterized in that: a clamping and reinforcing mechanism (4) is arranged on the top of the bottom plate (1) and is positioned at the front side and the rear side of the vacuum cavity (2);

the clamping and reinforcing mechanism (4) comprises a sliding groove (41) arranged at the top of the bottom plate (1), a bidirectional screw rod (42) is rotatably connected between the front side and the rear side of the inner wall of the sliding groove (41), the front end of the bidirectional screw rod (42) penetrates through the bottom plate (1) and extends to the front side of the bottom plate (1), a motor (43) is fixedly connected to the front side of the bottom plate (1), the output end of the motor (43) is fixedly connected with the front end of the bidirectional screw rod (42) through a coupler, L-shaped plates (44) are in threaded connection with the front side and the rear side of the outer surface of the bidirectional screw rod (42), the outer surfaces of the two L-shaped plates (44) are in sliding connection with the inner surface of the sliding groove (41), vertical plates (45) are fixedly connected to the opposite sides of the two L-shaped plates (44), arc-shaped clamping plates (46) are arranged on the opposite sides of the two L-shaped clamping plates (46), and are in contact extrusion with the outer surface of the vacuum cavity (2), a dismounting assembly (47) is arranged between the two arc-shaped splints (46) and the vertical plates, and the tops and the bottoms of the opposite sides of the two vertical plates (45) are respectively provided with a buffer mechanism (48);

the disassembly and assembly component (47) comprises circular grooves (471) formed in opposite sides of two vertical plates (45), connecting rods (472) are fixedly connected to one sides, away from the two arc-shaped clamping plates (46), of the two connecting rods (472), slots (473) are formed in the tops and the bottoms of the two connecting rods (472), one ends, away from the two connecting rods (472), of the two connecting rods penetrate through the circular grooves (471) and extend to the inside of the circular grooves (471), two fixing rods (474) are fixedly connected to the opposite sides of the two vertical plates (45), vertical pipes (475) are fixedly connected to opposite ends of the four fixing rods (474), inserting rods (476) are slidably connected to one ends, away from the four vertical pipes (475), of the opposite ends of the four inserting rods (476) penetrate through the vertical pipes (475) and extend to the inside of the slots (473), and outer surfaces of the four inserting rods (476) are clamped with inner surfaces of the slots (473), four the equal fixedly connected with slide (477) of surface of inserted bar (476), four the surface of slide (477) all with the internal surface sliding connection of standpipe (475), four the surface of inserted bar (476) all overlaps and is equipped with first spring (478), four the looks remote site of first spring (478) all with one side fixed connection of slide (477), four the one end of keeping away from mutually of first spring (478) all with the internal surface fixed connection of standpipe (475), four the equal fixedly connected with handle (479) of one end that inserted bar (476) kept away from mutually.

2. The ultra-high vacuum system of claim 1, wherein: the buffer mechanism (48) comprises square grooves (481) formed in the top and the bottom of the opposite sides of the two vertical plates (45), and buffer plates (482) are connected to the inner surfaces of the four square grooves (481) in a sliding mode.

3. The ultra-high vacuum system of claim 2, wherein: the four buffer plates (482) are respectively fixedly connected with a transverse pipe (483) at one side far away from each other, and cross rods (484) are respectively fixedly connected with the inner walls of the four square grooves (481).

4. The ultra-high vacuum system of claim 3, wherein: the opposite ends of the four cross rods (484) penetrate through the transverse pipe (483) and extend to the inside of the transverse pipe (483), and the outer surfaces of the four transverse pipes (483) are sleeved with second springs (485).

5. The ultra-high vacuum system of claim 4, wherein: the opposite ends of the four second springs (485) are fixedly connected with one side of the buffer plate (482), and the ends, far away from the four second springs (485), are fixedly connected with the inner wall of the square groove (481).

6. The ultra-high vacuum system of claim 1, wherein: the bottom of the circular plate (3) is fixedly connected with two support rods (5), the bottoms of the two support rods (5) are in contact with the top of the bottom plate (1), and the top of the circular plate (3) is communicated with a vacuum tube (6).

7. The ultra-high vacuum system of claim 6, wherein: one end of the vacuum tube (6) penetrates through the vacuum cavity (2) and extends into the vacuum cavity (2), a vacuum pump (7) is fixedly connected to the right side of the top of the bottom plate (1), and an air inlet of the vacuum pump (7) is communicated with the other end of the vacuum tube (6).

8. The ultra-high vacuum system of claim 1, wherein: the heating device is characterized in that a heater (8) is fixedly connected to the right side of the top of the bottom plate (1), the top of the heater (8) is communicated with a heating lead (9), and the front end of the heating lead (9) is connected with the outer surface of the vacuum cavity (2).

9. A temperature-controllable vacuum method of an ultrahigh vacuum system is characterized in that: the method specifically comprises the following steps:

s1, firstly, starting a motor (43), enabling the motor (43) to drive a bidirectional screw rod (42) to rotate, simultaneously driving two L-shaped plates (44) to move oppositely by the bidirectional screw rod (42), simultaneously driving two vertical plates (45) to move oppositely by the L-shaped plates (44), simultaneously driving two arc-shaped clamping plates (46) by the vertical plates (45) to clamp and fix the vacuum cavity (2), and realizing rapid clamping and fixing of the vacuum cavity (2) through the arrangement of a clamping and reinforcing mechanism (4);

s2, further starting a vacuum pump (7) to vacuumize the vacuum cavity (2), and then starting a heater (8) to electrically heat the vacuum cavity (2) by a heating wire (9);

s3, when the arc-shaped clamping plate (46) needs to be replaced, two handles (479) are pulled, the handles (479) drive two inserting rods (476) to slide back to back, simultaneously the two inserting rods (476) drive two sliding plates (477) to slide back along the inner surface of a vertical pipe (475), simultaneously the two sliding plates (477) start to extrude and compress a first spring (478), finally the two inserting rods (476) slide out of a slot (473), the arc-shaped clamping plate (46) and a connecting rod (472) are further pulled out of a circular groove (471), disassembly is achieved, and the arc-shaped clamping plate (46) is further replaced and then installed.

10. A temperature-controllable vacuum method for ultra-high vacuum system as claimed in claim 9, wherein: the sizes of the four insertion rods (476) are all matched with the size of the slot (473), and the vacuum pump (7) and the heater (8) are electrically connected with an external power supply.

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