CN114320989A - Molecular pump temperature measuring device, temperature measuring method and temperature measuring device of running part - Google Patents
Molecular pump temperature measuring device, temperature measuring method and temperature measuring device of running part Download PDFInfo
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- CN114320989A CN114320989A CN202111680750.4A CN202111680750A CN114320989A CN 114320989 A CN114320989 A CN 114320989A CN 202111680750 A CN202111680750 A CN 202111680750A CN 114320989 A CN114320989 A CN 114320989A
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Abstract
The application provides a molecular pump temperature measuring device, temperature measuring method and temperature measuring device of running part, are used for measuring the temperature of the shafting turbine rotor of molecular pump at least, and the molecular pump includes: a pump body; a main shaft; the turbine rotor is connected with the main shaft and forms a shafting turbine rotor; the static turbine stages are alternately matched with the turbine rotor; drive arrangement can drive the main shaft and rotate for turbine rotor can rotate for quiet turbine stage relatively, and temperature measuring device includes: at least one non-contact sensor arranged in the pump body and used for determining heat radiation parameters of the turbine rotor and/or the main shaft, wherein the heat radiation parameters at least comprise heat radiation intensity parameters and/or frequency spectrum parameters; and the processing unit is electrically connected with the non-contact sensor and is used for determining the temperature of the shafting turbine rotor according to the heat radiation parameters of the turbine rotor and/or the main shaft. The temperature measuring device simply and conveniently achieves the purpose of monitoring the temperature of the turbine rotor running at high speed in real time, and improves the running safety of equipment.
Description
Technical Field
The application relates to the technical field of molecular pumps, in particular to a molecular pump temperature measuring device and a molecular pump temperature measuring method, and further relates to a temperature measuring device of an operation component.
Background
A molecular vacuum pump is a high-speed rotating mechanical device, which utilizes a moving impeller rotating at a high speed to transfer momentum to gas molecules, so that the gas molecules obtain a directional speed, are compressed and driven to an exhaust port, and then are pumped away as a front stage. The method is widely applied to the fields of industrial leak detection, chemical vapor deposition, vacuum electronic device manufacturing, optical coating, electron beam welding and the like. With the increasing process load requirements of the application industry, the operational reliability and real-time state monitoring of the molecular pump are more and more important, and especially the real-time monitoring of the actual temperature of the turbine rotor of the molecular pump is more and more important.
However, in the conventional technology, temperature detection is usually performed on a stationary component, such as by contacting a temperature sensor with a measured component in real time. Temperature detection is difficult for components that are in motion, particularly in high speed operation. In some related art techniques, the temperature of the high-speed operating components may be determined indirectly based on indirect detection methods, such as by detecting the temperature of static components having a correlation with the high-speed operating rotor components. However, the temperature obtained by this detection method is not accurate, and has a certain hysteresis and a large error. Probably, methods and devices for detecting rotor components by using complex technical means exist, but the process and manufacturing cost is inevitably increased, and the defects of reduced equipment durability, increased working condition requirements and the like exist.
Therefore, how to easily and reliably monitor the temperature of the turbine rotor of the molecular pump in real time becomes a technical direction for those skilled in the art to make an effort.
Disclosure of Invention
In view of this, the present application is directed to provide a temperature measuring device and method for a molecular pump, which are capable of detecting thermal radiation of a turbine rotor and/or a main shaft of the molecular pump to monitor the temperature of the turbine rotor in real time, and are simple and effective, and solve the technical problems in the prior art that the real-time temperature detection of the rotor running at a high speed cannot be performed simply, and the operation cannot be stopped timely when the temperature exceeds a standard, thereby easily causing equipment failure or affecting the use. The application also provides a temperature measuring device of the running part.
To achieve at least part of the above objects, in a first aspect of the present application, there is provided a temperature measuring device for a molecular pump, for measuring a temperature of a shafting turbine rotor of the molecular pump, the molecular pump including: a pump body; the main shaft is rotatably arranged in the pump body; the turbine rotor is arranged in the pump body and fixedly connected with the main shaft to form a shafting turbine rotor; the static turbine stages are alternately matched with the turbine rotor; the drive arrangement can drive the main shaft rotates for the turbine rotor can rotate for the quiet turbine stage, temperature measuring device includes: at least one non-contact sensor arranged in the pump body and used for determining heat radiation parameters of the turbine rotor and/or the main shaft, wherein the heat radiation parameters at least comprise heat radiation intensity parameters and/or frequency spectrum parameters; and the processing unit is electrically connected with the non-contact sensor and is used for determining the temperature of the shafting turbine rotor according to the heat radiation parameters of the turbine rotor and/or the main shaft.
Optionally, the temperature measuring device includes: at least two of the non-contact sensors; determining the thermal radiation parameter of the turbine rotor and/or the main shaft comprises determining the thermal radiation parameter from an average of the detection results of the at least two non-contact sensors.
Optionally, the temperature measuring device further includes an environmental sensor electrically connected to the processing unit for determining an environmental temperature inside the pump body; determining the ambient temperature includes determining an ambient temperature of a stationary component within the pump body, the stationary component configured to secure the non-contact sensor; and determining the temperature of the shafting turbine rotor further comprises the steps of carrying out conversion of corresponding units on the measured value of the non-contact sensor or the mean value of the detection result and the measured value of the environment sensor, carrying out difference value calculation, and determining the temperature of the shafting turbine rotor according to the difference value.
Optionally, the at least two non-contact sensors are spaced apart in the direction of rotation of the turbine rotor.
Optionally, the non-contact sensor is a thermopile sensor; the non-contact sensor is fixed on a fixed part in the pump body.
In a second aspect, a method for measuring temperature of a turbine rotor of a molecular pump is provided, the method comprising: a pump body; the main shaft is rotatably arranged in the pump body; the turbine rotor is arranged in the pump body and fixedly connected with the main shaft to form a shafting turbine rotor; the static turbine stages are alternately matched with the turbine rotor; a drive arrangement configured to drive rotation of the main shaft such that the turbine rotor is rotatable relative to the stationary turbine stage, the method comprising: determining thermal radiation parameters of the turbine rotor and/or the main shaft, the thermal radiation parameters at least comprising thermal radiation intensity parameters and/or spectral parameters; and determining the temperature of the shafting turbine rotor according to the heat radiation parameters of the turbine rotor and/or the main shaft.
Optionally, the determining heat radiation parameters of the turbine rotor and/or the main shaft further comprises: and determining the thermal radiation parameters of the turbine rotor and/or the main shaft according to the mean value of the detection results of the at least two non-contact sensors by utilizing the at least two non-contact sensors arranged in the pump body.
Optionally, the determining the temperature of the shafting turbine rotor comprises: determining a temperature parameter of a stationary part that holds the non-contact sensor using at least one environmental sensor disposed within the pump body; converting the measured value or the operation result value of the detection result of the non-contact sensor and the measured value of the environment sensor by corresponding units, and calculating the difference; and determining the temperature of the shafting turbine rotor according to the calculated difference.
In a third aspect, there is provided a temperature measuring device for a running part for measuring a temperature of the running part, the running part being drivingly connected to a driving device and running, the temperature measuring device comprising: a non-contact sensor for determining thermal radiation parameters of the moving part, the thermal radiation parameters including at least a thermal radiation intensity parameter and/or a spectral parameter; and the processing unit is electrically connected with the non-contact sensor and used for determining the temperature of the operating component according to the heat radiation parameter of the operating component.
Optionally, the temperature measuring device further includes an environmental sensor electrically connected to the processing unit, and configured to determine an environmental temperature of the operating component, where determining the environmental temperature includes determining an environmental temperature of a fixed component, the fixed component being configured to fix the non-contact sensor and being disposed opposite to the operating component; the determining the temperature of the operational component further comprises: converting the measured value of one non-contact sensor or the average value of the measured values of a plurality of non-contact sensors with the measured value of the environment sensor by corresponding units, and calculating the difference value; and determining the temperature of the running part according to the calculated difference.
The molecular pump temperature measuring device and the molecular pump temperature measuring method provided by the embodiment of the application utilize the non-contact sensor arranged in the molecular pump body to measure the thermal radiation of the turbine rotor and/or the main shaft rotating at high speed in real time to obtain the thermal radiation parameters of the turbine rotor and/or the main shaft, based on the deterministic variation law between the thermal radiation parameters and the temperature, the temperature of the shafting turbine rotor is determined according to the monitored thermal radiation parameters, the real-time monitoring of the turbine rotor is realized, the technical scheme is simple, convenient and effective, can ensure the requirement of low production cost while ensuring the measurement precision, the technical problems that in the prior art, real-time temperature detection cannot be simply carried out on a rotor running at a high speed, and the operation cannot be stopped timely when the temperature exceeds the standard, so that equipment failure is easily caused or the use is easily influenced are solved, and the method has practical use significance.
Drawings
Fig. 1 is a schematic structural diagram of a molecular pump provided in an embodiment of the present application;
FIG. 2 is a schematic diagram of a temperature measuring device according to an embodiment of the present disclosure;
FIG. 3 is a first schematic view illustrating an installation of a temperature measuring device according to an embodiment of the present disclosure;
FIG. 4 is a second schematic view illustrating an installation of a temperature measuring device according to an embodiment of the present disclosure;
FIG. 5 is a third schematic view illustrating an installation of a temperature measuring device according to an embodiment of the present disclosure;
FIG. 6 is a fourth schematic view illustrating an installation of a temperature measuring device according to an embodiment of the present disclosure;
fig. 7 is a schematic flowchart of a temperature measurement method according to an embodiment of the present application.
11-pump body, 12-main shaft, 13-turbine rotor, 14-static turbine stage, 15-lock nut, 20-temperature measuring device, 21-non-contact sensor, 22-processing unit and 23-environment sensor.
Detailed Description
The embodiment of the application provides a molecular pump temperature measuring device and method, through the thermal radiation that detects the turbine rotor and/or the main shaft of molecular pump, realize the real-time supervision to shafting turbine rotor temperature, simple and effective to solved prior art, can't simpler carry out real-time temperature detection to high-speed moving rotor, thereby can't lead to equipment trouble or influence the technical problem who uses when the temperature exceeds standard in time the shutdown. The embodiment of the application also provides a temperature measuring device of the running component based on the same principle.
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments.
The molecular pump temperature measuring device and the molecular pump temperature measuring method provided by the embodiment of the application are applied to the molecular pump, so that the related technology of the molecular pump and the problems existing in the related technology are exemplified in detail at first.
The molecular pump is a high-speed rotating mechanical device, and utilizes a moving impeller rotating at high speed to transfer momentum to gas molecules, so that the gas molecules obtain a directional speed, are compressed and driven to an exhaust port, and then are pumped away as a front stage. The method can be applied to a plurality of fields such as industrial leak detection, chemical vapor deposition, vacuum electronic device manufacturing, optical coating, electron beam welding and the like.
As shown in fig. 1, which is a schematic structural diagram of a molecular pump provided in an embodiment of the present application, the molecular pump shown in fig. 1 mainly includes a pump body 11, a main shaft 12, a turbine rotor 13, a static turbine stage 14, and a driving device, which are disposed in the pump body, and driving power of the driving device is a motor.
The pump body 11 includes a pump cover and a pump base, the pump cover and the pump base surround to form a hollow cylindrical structure, and can accommodate each component arranged in the pump body 11.
The main shaft 12 is arranged in the pump body 11, is fixed with the lock nut 15 through a bearing, a thrust disc and the like, is further connected with the pump base and can rotate around the rotation center of the pump base, and the motor is in transmission connection with one end of the main shaft 12 so as to drive the main shaft 12 to rotate; the center of rotation of spindle 12 may coincide with the center line of pump body 11.
The turbine rotor 13 is arranged in the pump body 11, and the rotating shaft of the turbine rotor coincides with the rotating center of the main shaft 12; one end of the turbine rotor 13 is fixedly connected with the main shaft 12 to form an integrated shafting turbine rotor, and the main shaft 12 drives the turbine rotor 13 to rotate together when rotating. The turbine rotor 13 and the main shaft 12 may be fixedly connected by screws, that is, corresponding screw holes are formed in the turbine rotor 13 and the main shaft 12, and then the turbine rotor 13 and the main shaft 12 are fixed by inserting screws into the screw holes.
The static turbine stage 14 is arranged inside the pump body 11, fixed with respect to said pump body 11. The stationary turbine stage 14 includes a plurality of stationary blades, which are stacked in a vertical direction with a plurality of rotating blades on the turbine rotor 13, and the stationary blades and the rotating blades are stacked alternately in a circumferential direction, so that the rotating blades on the turbine rotor 13 can interact with the stationary blades of the stationary turbine stage 14 to form a strong pumping action when the turbine rotor 13 rotates.
The motor comprises a motor stator and a motor rotor, wherein the motor stator is sleeved outside the motor rotor. And the magnetic surface of the cylinder is opposite to the magnetic surface of the motor rotor and is fixedly arranged on the pump seat and extends to the inner side of the hollow part of the turbine rotor 13. After the power is switched on, a rotating magnetic field is formed between the motor rotor and the magnetic surface of the motor stator to drive the motor rotor to rotate at a high speed, the motor rotor drives the main shaft 12 to rotate together, the main shaft 12 drives the turbine rotor 13 to rotate together, and finally a strong air extraction effect is formed between the turbine rotor 13 and the static turbine stage 14.
As mentioned above, the molecular pump can be applied in the semiconductor industry, for example, in dry etching (dry etching) or Chemical Vapor Deposition (CVD) processes. A large flow of process gas is required to be introduced, and the molecular pump is generally used as a main exhaust device of the process chamber, so that the molecular pump needs to have a large exhaust flow and to keep the process pressure stable in order to improve the efficiency of the process and the product quality.
In the above-described etching and other processes, a large amount of reaction products accumulate in the process chamber, and when the pump is used for pumping, these deposits accumulate in the pump body, and particularly easily accumulate in the gas flow path on the downstream side of the pump. It will be appreciated that in a molecular pump, there is always a small clearance running between the turbine rotor and the stationary turbine stage. Therefore, if the gap between the turbine rotor and the stationary turbine stage is accumulated with the reaction product, various problems may be caused. For example, the turbine rotor is grounded to the stationary turbine stage resulting in the turbine rotor not being able to rotate; for example, the imbalance caused by the reaction products accumulated on the blades of the turbine rotor affects the stability of the rotation.
In view of the above problems, a method of adding a temperature control device may be used in the related art to solve the above problems. For example, a heater and a cooling water path may be provided in the pump, and a temperature detection unit may be provided in the pump. When the temperature detection device works, the temperature detection unit is used for detecting the temperature inside the pump body, and when the detected temperature is lower than a preset value, the heater can be controlled to work to improve the temperature of the pump body; and when the temperature that surveys is higher than the default, can open the solenoid valve in cooling water route and make condenser tube can cool off the pump body. Thereby maintaining the turbine rotor in a set temperature range to reduce condensation of reaction products. In this technical implementation, the temperature of the turbine rotor of the molecular pump needs to be monitored.
Of course, the above is only an exemplary requirement that the turbine rotor needs to be temperature controlled and monitored, and in the wide application of the molecular pump, there are other situations that need to be monitored.
However, due to the high-speed operation of the turbine rotor of the molecular pump, the implementation of the temperature detection unit is very difficult, and the detection method in the prior art either lacks real-time performance, accuracy or is complex to implement. For example, in some related arts, the temperature of the rotor may be indirectly determined by detecting the temperature of the pump body casing based on an indirect detection method. However, the temperature obtained by this detection method is not the true temperature of the turbine rotor and has a certain hysteresis.
For another example, in some related arts, the temperature relationship of the magnetic characteristics of the permanent magnet may be utilized, that is, the remanence of the permanent magnet and the field strength or flux density of the magnetic field generated therefrom may vary with temperature. Specifically, an object made of temperature-linear permanent magnet material can be installed on the rotor, the magnitude of the remanence of the object can be changed along with the change of the real-time temperature of the turbine rotor, the temperature of the turbine rotor and the magnitude of the remanence of the object generally show approximately linear changes, so that sensors for measuring the magnitude and the direction of the permanent magnet of the turbine rotor can be installed on the stator and/or the base of the molecular pump, and the temperature of the rotor can be determined according to the magnitude of the remanence measured by the sensors.
As an implementation, it is also possible to mount the sensor on the turbine rotor using the principle of infrared emission, and then mount the receiving device on the pump body.
However, the above method still has the following problems: when the molecular pump works at high speed, the permanent magnet or the infrared emission sensor additionally arranged on the turbine rotor can additionally increase the load of the turbine rotor, and the molecular pump can be thrown out under the action of centrifugal force when the rotating speed of the turbine rotor is higher, so that equipment fails; also, after mounting the permanent magnet mass or the infrared emission sensor, the turbine rotor needs to be dynamically balanced, which increases the manufacturing cost. Accordingly, there is a need for a simple, reliable method of measuring turbine rotor temperature.
In view of this, embodiments of the present application provide a temperature measurement apparatus and method for a molecular pump, which determine the temperature of a turbine rotor of a shaft system according to changes in thermal radiation parameters of the turbine rotor and/or a main shaft, so as to implement non-contact measurement and real-time monitoring of the temperature of the turbine rotor.
Specifically, heat radiation is a phenomenon in which an object radiates electromagnetic waves due to temperature, and is a heat transfer means in which the object radiates heat energy outward in the form of electromagnetic radiation. It does not depend on any external conditions. The turbine rotor and the main shaft of the molecular pump always emit heat radiation outwards in the operation process, the emitted heat radiation is increased along with the increase of the temperature, namely the intensity is increased along with the increase of the temperature, the output signal of the sensor for measuring the heat radiation can be increased along with the increase of the intensity, and therefore the measured heat radiation and the temperature have a determined corresponding relation. Based on the principle, the temperature measuring device provided by the embodiment of the application realizes real-time monitoring of the temperature of the turbine rotor of the shafting through monitoring the thermal radiation parameters of the turbine rotor and/or the main shaft and then according to the linear or basically linear corresponding relation between the thermal radiation parameters and the temperature.
Fig. 2 shows a schematic structural diagram of a temperature measuring device provided in an embodiment of the present application, which can be applied to measure the temperature of a shafting turbine rotor of a molecular pump shown in fig. 1. Referring to fig. 1 and 2, the temperature measuring device 20 includes a non-contact sensor 21 and a processing unit 22. Wherein the processing unit 22 is electrically connected to the non-contact sensor 21, and the output terminal of the non-contact sensor 21 is connected to the input terminal of the processing unit 22, so that the processing unit 22 can receive the signal emitted by the non-contact sensor 21. The non-contact sensors 21 may be provided in plural, and are configured to acquire thermal radiation parameters of the turbine rotor 13 and/or the main shaft 12, and transmit the thermal radiation parameters acquired in real time to the processing unit 22, and the processing unit 22 converts the received thermal radiation parameter values into corresponding temperature values according to a pre-stored correspondence relationship between the thermal radiation parameters and the temperatures, so as to determine the temperature of the shafting turbine rotor. The processing unit 22 may further compare the obtained temperature value of the shafting turbine rotor with a preset safe temperature range (e.g., -40 ℃ to 300 ℃), determine whether the temperature value is within the preset safe temperature range, if so, continue to operate, and if not, send an alarm or an abnormal signal. Of course, the processing unit 22 may also compare the measured thermal radiation parameter value with a preset thermal radiation safety range, determine whether the measured thermal radiation parameter value is within the safety range, convert the thermal radiation parameter value into a corresponding temperature value if the measured thermal radiation parameter value is within the safety range, and send an alarm or an abnormal signal if the measured thermal radiation parameter value is not within the safety range. The temperature measuring device 20 may further include a signal output device such as an alarm or a signal lamp, which can send out a visual signal to directly prompt the worker.
So set up, the temperature measuring device that this embodiment provided, under the condition that does not influence turbine rotor operation, accurate, simple and convenient and reliably realized shafting turbine rotor temperature's non-contact measurement and real-time supervision, when not too much increase manufacturing cost, solved high-speed moving turbine rotor and as important operation part, the unable accurate monitoring of its temperature and the problem of unable prevention or timely processing equipment operation trouble provides effective guarantee for the safe and stable operation of molecular pump.
The turbine rotor 13 and the main shaft 12 together form a shafting turbine rotor, and the turbine rotor 13 and the main shaft 12 are connected and synchronously run at the same speed, so that the temperature of the shafting turbine rotating system can be determined by measuring the heat radiation parameters of the turbine rotor 13 through the non-contact sensor 21, the temperature of the shafting turbine rotor can also be determined by measuring the heat radiation parameters of the main shaft 12, or the heat radiation parameters of the shafting turbine rotor and the shaft can be measured together, for example, two groups of non-contact sensors 21 are arranged to respectively measure the rotating blades of the main shaft 12 and the turbine rotor 13, and the temperature of the shafting turbine rotor at the moment can be determined according to two groups of values measured together at each moment. Of course, when measuring the heat radiation of the main shaft 12, it is preferable that the end of the main shaft 12 near the turbine rotor 13 or the middle upper portion of the end is near.
The non-contact sensor 21 is provided in the pump body 11, and when the main shaft 12 is monitored, the detection probe can be aligned with the cylindrical surface portion of the main shaft 12, and preferably, the detection direction is perpendicular to the axis of the main shaft 12. At this time, the non-contact sensor 21 can detect the thermal radiation emitted by the main shaft 12, and according to a preset algorithm, the measured value can reflect the temperature of the main shaft 12 and can also reflect the temperature of the turbine rotor 13; the temperature changes of the main shaft 12 and the turbine rotor 13 can be obtained from the change of the heat radiation based on the connection monitoring at a plurality of times. When the non-contact sensor 21 monitors the turbine rotor 13, the detection probe is aligned with the blade surface of the rotating blade, preferably, the detection direction is perpendicular to the blade surface. At this time, the non-contact sensor 21 can detect the thermal radiation emitted from the turbine rotor 13, the detected value can reflect the temperature of the turbine rotor 13, and the temperature change of the turbine rotor 13 can be obtained according to the change of the thermal radiation based on the multi-time connection monitoring. When the turbine rotor 13 and the main shaft 12 are monitored simultaneously, at least two sets of the non-contact sensors 21 are provided and measure the heat radiation of the main shaft 12 and the turbine rotor 13, respectively. In some embodiments, the processing unit 22 performs an averaging process on two sets of thermal radiation values measured at the same time, then converts the average value, and determines whether the calculated temperature value is within the safe temperature range. In other embodiments, the processing unit 22 may first perform a difference calculation on two groups of thermal radiation values measured at the same time, and determine whether the difference is within a preset safety difference range; if yes, carrying out mean value calculation on the two groups of heat radiation numerical values, carrying out temperature conversion on the mean value, and detecting whether the mean value is within a preset safety temperature range; if not, an alarm or an abnormal signal is sent.
In the above embodiment, the processing unit 22 correspondingly converts the temperature of the shafting turbine rotor according to the value of the detected quantity, that is, obtains a thermal radiation parameter H according to the voltage amplitude V output by the sensor, and then obtains the corresponding temperature T through conversion according to the deterministic corresponding relationship between the thermal radiation parameter H and the temperature T, such as the relationship between linear correlation and approximately linear correlation. In other embodiments, the temperature of the shafting turbine rotor can be determined according to the change value of the detection quantity. For example, when the temperature of the turbine rotor 13 and/or the main shaft 12 changes Δ T, the intensity characteristic and the frequency spectrum characteristic of the thermal radiation change Δ H, and the voltage amplitude change Δ V of the output signal of the non-contact sensor 21, the processing unit 22 can calculate Δ H according to the voltage change and the thermal radiation detected by the sensor detection probe, and the thermal radiation and temperature corresponding relationship, such as linear correlation and approximately linear correlation, and the voltage amplitude change Δ V of the current sensor output signal. After the variation quantity delta H of the heat radiation is determined, the temperature T of the shafting turbine rotor at the current moment can be determined.
The method for determining the temperature T of the turbine rotor by the processing unit according to the heat radiation parameter H or the variation Δ H of the parameter may be various, and the embodiment of the present application is not limited thereto. For example, as an implementation manner, the voltage amplitude V of the sensor output signal and the heat radiation parameter H of the turbine rotor at different temperatures T are measured in advance, a functional relationship T ═ f (H) between the turbine rotor temperature T and the heat radiation parameter H, or a functional relationship T ═ f (V, H) between T, V and H is fitted according to the above data, and the functional relationship is stored in the processing unit as a conversion relationship. When the processing unit receives the voltage amplitude V transmitted by the sensor, the heat radiation H is obtained, and the temperature T of the shafting turbine rotor can be determined by converting according to T ═ f (H), or the temperature T of the shafting turbine rotor can be directly obtained according to T ═ f (V, H) according to the received voltage amplitude V.
As another implementation manner, the variation of the voltage amplitude of the sensor signal at different temperatures and the variation of the heat radiation parameter of the turbine rotor may be measured in advance, and a functional relationship T ═ f (Δ H) between the turbine rotor temperature T and the variation Δ H of the heat radiation parameter itself, or a functional relationship T ═ f (Δ V, Δ H) between T and Δ V and Δ H is fitted according to the above data; the functional relationship is stored as a scaling relationship in the processing unit. When the processing unit receives the change delta V of the voltage amplitude value transmitted by the sensor, the heat radiation change delta H is obtained, and then the temperature T of the shafting turbine rotor can be determined through conversion according to the value T ═ f (delta H), or the temperature T of the shafting turbine rotor can be directly determined according to the value T ═ f (delta V, delta H). Of course, it should be noted here that the above calculation of the mean value or the difference value of each measured value by the processing unit belongs to another part of algorithm process, and does not conflict with the exemplary description of the algorithm for determining the temperature T of the shafting turbine rotor according to the heat radiation parameter H or the variation Δ H of the parameter described in this embodiment, and the two parts of algorithm are steps that need to be executed in the whole algorithm of the processing unit, and are a combined relationship.
In some embodiments, the non-contact sensor 21 may be a thermopile sensor. The thermopile sensor can accurately measure the thermal radiation and the thermal radiation change emitted by a measured object by utilizing the principle of the thermoelectric effect, has better long-term working reliability, stable signal and strong anti-interference capability. Of course, the thermal radiation parameters include at least the intensity and spectral characteristics of the thermal radiation, in other words, both the intensity and the spectral characteristics of the thermal radiation reflect the thermal radiation of the object. Therefore, the non-contact sensor 21 in the embodiment of the present application may also be other types of non-contact measurement sensors, such as a non-contact temperature measurement sensor or a Charge Coupled Device (CCD) image sensor.
Because the turbine rotor and the main shaft rotate at high speed, the thermopile sensor needs to be arranged on a position which is relatively fixed and smooth on the surface of the rotor or the main shaft; the position of the sensor relative to the rotor in operation is prevented from moving, the situation that errors exist in received heat radiation due to the fact that the surface is not smooth is avoided, and the influence on the accuracy of the measuring result is reduced.
The thermopile sensor is fixed to a fixed component within the pump body 11, as shown in fig. 3-5, and specifically, the fixed component may include, but is not limited to, a stationary turbine stage, a bore wall surrounding a through-bore hole of the main shaft, an inner wall of the pump body near the turbine rotor, a thrust disk near the main shaft, and the like. As shown in fig. 4 and 5, the thermopile sensor may be provided on the stationary turbine stage 14, such as a stationary blade, which is close to the rotating blade of the turbine rotor 13 and does not undergo a positional change, and connected to the stationary blade, so that the detection direction of the detection probe can be stably maintained in a positional relationship perpendicular to the blade surface of the rotating blade. Since the stationary blade does not change its position and is close to the rotating blade, the sensor is provided on the stationary blade, so that the influence of the change in the position of the sensor on the measurement accuracy can be reduced.
The thermopile sensor may also be disposed on the inner wall of the through hole surrounding the spindle 12, as shown in fig. 3, the inner wall of the through hole is close to the spindle 12 without shielding, and the detection direction of the detection probe is perpendicular to the cylindrical surface of the spindle 12. Thus, the heat radiation parameters of the spindle 12 can be measured stably and accurately. Obviously, as shown in fig. 6, the thermopile sensor may also be arranged on the inner wall of the pump body close to the turbine rotor 13 or the main shaft 12, for example, on the pump cover above the turbine rotor, or on the bottom and/or bottom cover of the pump body 11.
In practical applications, the rotating blades of the turbine rotor have dynamic displacement vibration, and in order to avoid the influence of the adverse factor on the measurement accuracy, in some embodiments, the testing apparatus of the embodiment of the present application may include at least two non-contact sensors 21, that is, may include at least two thermopile sensors, respectively monitor different areas of the turbine rotor 13 or the main shaft 12, that is, perform multipoint arrangement multipoint monitoring, and then calculate a result value according to the detection results of the at least two thermopile sensors, that is, the processing unit 22 calculates the detection values of the at least two thermopile sensors according to a preset algorithm to obtain an operation result value, and determine the thermal radiation parameter or the parameter variation of the turbine rotor 13 or the main shaft 12 according to the operation result value, thereby determining the temperature of the shafting turbine rotor. This reduces the effect on the measurement accuracy due to vibrational variations in the turbine rotor.
Of course, if the turbine rotor 13 and the main shaft 12 are measured simultaneously, two sets of sensors are required, and each set of sensors includes at least two thermopile sensors corresponding to different regions of the measured object. The processing unit firstly calculates the measured values of the sensors in each group, and then performs subsequent calculation according to the algorithm for simultaneously monitoring the turbine rotor and the main shaft in the embodiment to finally determine the temperature of the shafting turbine rotor. Also, be provided with multiunit thermopile sensor corresponding to main shaft or turbine rotor, multiunit thermopile sensor carries out the branch point along the axial of main shaft or turbine rotor's direction of height etc. and arranges to monitor when dividing the point to different regions, reinforcing measuring result's accuracy nature.
As for the specific operation of the processing unit 22 on a plurality of measured values at the same time, there are many algorithm manners, and therefore, the preset algorithm is not limited herein. The specific selection setting may be performed according to an actual application scenario or an application requirement, for example, the average value calculation or the calculation according to the priority is performed.
Further, in some embodiments, the at least two thermopile sensors in each group may be arranged in points along the rotation direction of the turbine rotor, and preferably uniformly arranged. For example, when two thermopile electric sensors are included in one group of sensors, the two thermopile sensors may be symmetrically disposed on both sides of the main shaft 12 or the turbine rotor 13 along the central axis; when a plurality of thermopile sensors are included in one group of sensors, the plurality of thermopile sensors may be arranged in a partitioned manner in a circumferential direction centered on the central axis; this avoids inaccuracies in the measurement due to turbine rotor vibration or main shaft vibration. Of course, the at least two thermopile sensors may also be arranged in different points along other directions, such as the axial direction of the main shaft or the height direction of the turbine rotor.
In order to eliminate the adverse effect of the ambient temperature on the measurement result, since the actual stationary turbine stage 14 itself has a certain temperature and slight temperature fluctuation, in this embodiment, the temperature measuring device 20 further includes an ambient sensor 23, as shown in fig. 3, for measuring the ambient temperature or the parameter related to the ambient temperature in the pump body 11, and the processing unit 22 performs unit conversion on the measured values between the non-contact sensor 21 and the ambient sensor 23, performs difference calculation after the conversion into unit values, and determines the temperature of the shafting turbine rotor according to the difference. So set up, can eliminate the measuring error that arouses because of ambient temperature in the measuring result, improve and measure the precision, the eliminating measuring error of very big degree avoids leading to measuring result to have the deviation and then influence the operation that will implement of carrying out temperature monitoring to turbine rotor.
In some embodiments, the environment sensors 23 are arranged according to the number and the positions of the non-contact sensors 21, one environment sensor 23 is arranged near each non-contact sensor 21, and temperature measurement is performed on a fixed component for fixing the non-contact sensors 21, such as the static turbine stage 14, specifically, a stationary blade, an inner wall of a shaft hole, a thrust disc, and the like, namely, the temperature measurement is equivalent to the measurement of the environment temperature of the environment in which the non-contact sensors 21 are located.
In some embodiments, the environmental sensor 23 may be of the same type as the non-contact sensor 21 described above for measuring thermal radiation parameters of the turbine rotor 13 and/or the main shaft 12, such as a thermopile sensor or a ccd image sensor, and measure environmental thermal radiation parameters of the environment in which the non-contact sensor 21 is located inside the pump body 11, such as thermal radiation parameters of stationary blades, and/or thermal radiation measurements of the inner wall of a through-bore surrounding the main shaft 12, and/or thermal radiation measurements of the thrust disk; the processing unit 22 calculates a difference between the measured thermal radiation parameters of the turbine rotor 13 and/or the main shaft 12 and the environmental thermal radiation parameters measured by the environmental sensor 23, eliminates systematic measurement errors such as environmental temperature, obtains a thermal radiation difference with higher accuracy, and converts the thermal radiation difference into a temperature value, thereby obtaining the temperature of the accurate shafting turbine rotor.
In other embodiments, because the measurement object of the environmental sensor 23 is stationary, the environmental sensor 23 may also be a temperature sensor that needs to be in contact with a fixed component, and a detection end of the temperature sensor is in contact with or attached to the measurement object, such as a stationary blade, a thrust disc, or the like, to directly obtain an accurate temperature value of the measurement object, that is, an environmental temperature value of an environment where the non-contact sensor 21 is located; then, the processing unit 22 may convert the thermal radiation parameter measured by the non-contact sensor 21 into a temperature value, and then calculate a difference between the temperature value and an environmental temperature value to obtain the temperature of the shafting turbine rotor. Of course, the processing unit 22 may also perform difference processing on the environmental coefficient through other algorithms, such as directly performing difference calculation on the voltage amplitude of the non-contact sensor 21 and the voltage amplitude of the environmental sensor 23.
Because each measuring position is provided with one non-contact sensor 21 and one adjacent or very close to the environment sensor 23, when the difference value between the measured values of the non-contact sensor 21 and the environment sensor 23 is calculated, the difference value processing can be carried out on the two measured values at each measuring position, a plurality of difference values are obtained according to the number of the measuring positions, the processing unit 22 carries out mean value calculation on the difference values, and finally the obtained mean value is converted into a temperature value, namely the temperature of the shafting turbine rotor; or, the measured values of all the non-contact sensors 21 at each position at the same time are subjected to mean value calculation to obtain a first mean value, the measured values of all the environment sensors 23 at each position at the same time are subjected to mean value calculation to obtain a second mean value, then, the processing unit 22 performs difference value calculation on the first mean value and the second mean value, and then, the difference value is converted to obtain a temperature value, namely, the temperature value is the temperature of the shafting turbine rotor.
The embodiment of the present application does not limit the connection mode between each sensor (including the non-contact sensor 21 such as a thermopile sensor, and the environmental sensor 23 such as a temperature sensor) and the fixed component (such as the stationary turbine stage, the thrust disc, and the inner wall of the shaft hole). For example, each sensor may be fixed to the fixing member by a screw connection. Alternatively, each sensor may be fixed to a fixing member in the pump body 11 by means of potting. For another example, in one embodiment, the sensor and the fixing member may be fixed and connected by a circuit board or a bracket by soldering to a fixing base having a low thermal expansion coefficient. In order to prevent the sensor from being collided by other parts, a protective cover can be covered outside the sensor. The fixed base and the protective outer cover of the sensor can be made of materials with small thermal expansion coefficients, and the influence of errors caused by ambient temperature can be reduced or eliminated
The apparatus embodiments of the present application are described in detail above in conjunction with fig. 1-6, and the method embodiments of the present application are described below in conjunction with fig. 7. It is to be understood that the description of the method embodiments corresponds to the description of the apparatus embodiments, and therefore reference may be made to the preceding apparatus embodiments for parts which are not described in detail.
FIG. 7 is a schematic flow chart of a thermometry method provided by an embodiment of the present application that may be used to measure the temperature of a turbine rotor of a molecular pump. The method includes optional steps S31 and S33, including optional step S32.
At step S31, thermal radiation parameters of the turbine rotor 13 and/or main shaft 12 are determined, including but not limited to physical characteristics of their intensity characteristics and spectral characteristics;
the heat radiation parameter may also include a change in heat radiation, and may be, for example, a change Δ H in the amount of radiation of the heat radiation measurement region.
In some embodiments, determining the thermal radiation parameter of the turbine rotor 13 or the main shaft 12 may be by means of at least one contactless sensor 21 arranged in the pump body, in particular a thermopile sensor of the prior art. Alternatively, in some embodiments, at least two non-contact sensors 21 disposed in the pump body 11 may be used to simultaneously measure different areas of the turbine rotor 13 or the main shaft 12 in the circumferential direction, and the thermal radiation parameter of the turbine rotor 13 or the main shaft 12 may be determined according to an average value of detection results of the at least two non-contact sensors 21. Therefore, fluctuation of output signals of the sensor caused by dynamic displacement vibration in the rotating process of the turbine rotor 13 and the main shaft 12 can be avoided, and the accuracy of measurement is further reduced.
In some embodiments, the at least two non-contact sensors 21 may be arranged uniformly along the direction of rotation of the turbine rotor or main shaft. For example, two non-contact sensors 21 are symmetrically arranged on both sides of the turbine rotor or main shaft, which can avoid inaccurate measurement due to run-out.
In some embodiments, two sets of non-contact sensors 21 are disposed in the pump body 11, and the turbine rotor 13 and the main shaft 12 are respectively monitored simultaneously, one set of sensors corresponds to the turbine rotor 13, and the other set of sensors corresponds to the main shaft 12, and each set of sensors includes at least one or at least two of the non-contact sensors 21. The processing unit 22 performs averaging on the measured values at the same time in each group, and then performs averaging on the two averages again.
The non-contact sensor 21 may be a thermopile sensor.
In step 32, the ambient temperature of the non-contact sensor 21 is determined, which may be achieved by determining the temperature of a stationary part in the pump body for attaching the non-contact sensor 21, specifically including determining a heat radiation parameter of the stationary part or a temperature parameter of the stationary part.
The temperature of the fixed part is determined, in particular by measuring a parameter of the fixed part using an environmental sensor 23 fixed in the pump body 11. In some embodiments, the environmental sensor 23 is the same type of sensor as the non-contact sensor 21, such as a thermopile sensor, and the fixed component is measured for a thermal radiation parameter, resulting in an environmental thermal radiation. Alternatively, in some embodiments, the environmental sensor 23 is a temperature sensor, and the temperature of the fixed component is measured to obtain the environmental temperature. The number of the environmental sensors 23 may be plural, and may be set according to the number of the non-contact sensors 21, for example, one environmental sensor 23 may be provided at each fixed position of the non-contact sensors 21.
And step S33, the processing unit performs conversion according to the measured value to determine the temperature of the shafting turbine rotor. The determination of the temperature of the turbine rotor according to the thermal radiation parameter or the thermal radiation mean value measured in step 31 can be divided into two algorithms, first, without step 32, according to whether step 32 is included: after determining the thermal radiation parameters of the turbine rotor and/or the main shaft according to step S31, the temperature of the turbine rotor at the present time is determined according to the conversion function; or determining the temperature of the turbine rotor according to the variation of the heat radiation parameter of the turbine rotor and/or the main shaft; the specific conversion method may be various, and this is not limited in the embodiment of the present application. Secondly, step 32 is included, a difference value is calculated between the measured value obtained in step 31 and the measured value obtained in step 32, and specific corresponding calculation of the difference value can be referred to the description in the embodiment of the apparatus, which is not described herein again; after the difference is obtained, the processing unit 22 obtains the temperature of the shafting turbine rotor according to a preset conversion function.
The operating components operating at high speed are involved in various kinds of equipment, wherein the operating components are the key components of the equipment, the smooth operation of the operating components influences the normal operation of the operation performed by the equipment, and the temperature is an important parameter reflecting the conditions of the operating components, because the temperature is related to the operating time, the operating load and other factors of the operating components, and the temperature of the operating components is changed along with the operating time and the operating load. Therefore, the operating conditions of the operating components can be accurately monitored by monitoring the temperature of the operating components.
Therefore, the embodiment of the present application further provides a temperature measuring device 20 for monitoring the operating component, as shown in fig. 2, which includes a non-contact sensor 21 and a processing unit 22, and optionally also includes an environment sensor 23, and determines the temperature of the operating component according to the corresponding relationship between the thermal radiation parameter and the temperature by measuring the thermal radiation parameter of the operating component. It should be understood that the description of the principles and various algorithms of the thermometric device in the operational component embodiment are consistent with the description of the device embodiment, and therefore reference is made to the previous device embodiment for portions not described in detail.
In some embodiments, the temperature measuring device 20 includes at least one non-contact sensor 21, the non-contact sensor 21 is connected and fixed to a fixed component of the equipment, which is opposite to the moving component, the detecting probe is not blocked from the moving component, the detecting probe faces the moving component, and the detecting direction is perpendicular to the surface of the moving component. The processing unit 22 obtains the heat radiation parameter of the operating component according to the output signal of the non-contact sensor 21, and performs conversion according to the corresponding relationship, such as a functional relationship, between the pre-stored heat radiation parameter and the temperature value, so as to obtain the temperature of the operating component. Under the real-time monitoring, the temperature of the operation component can be known in real time, the temperature change of the operation component can also be obtained, and the effective monitoring of the operation component is realized. After the temperature value of the operating component is obtained, the processing unit 22 may further compare the temperature value with a preset safe temperature range, and if the temperature value is not within the safe temperature range, send an abnormal signal or a warning signal in time. Therefore, when the temperature exceeds the preset safety range, the working personnel can timely know and process the temperature, and the accident is prevented from influencing the equipment use and even influencing the safety of the working personnel.
The non-contact sensors may be arranged in plurality and uniformly arranged along a certain direction of the operating member, and the processing unit may perform an average value processing on the measured values of the plurality of non-contact sensors to obtain a temperature value of the operating member according to the average value. Thus, the measurement accuracy can be improved, and the measurement error caused by the dynamic vibration of the operation part can be eliminated.
The non-contact sensor may be a thermopile sensor, and may be used to accurately measure parameters of the moving parts without contact. Of course, the contactless sensor may also be provided as a charge coupled device image sensor that measures spectral characteristics.
In some embodiments, the temperature measuring device 20 further includes an environment sensor 23 for measuring the temperature of the environment where the operating component is located to obtain an environment temperature parameter, and the processing unit 22 performs unit conversion and difference calculation on the value measured by the non-contact sensor 21 and the environment temperature parameter, and determines the temperature of the operating component according to the obtained difference. Thus, the influence of the ambient temperature on the measurement accuracy can be eliminated.
The temperature of the environment can be measured by measuring the temperature of the fixed part, and the temperature obtained by measuring the fixed part can represent the environment temperature due to the fact that the non-contact sensor is connected to the fixed part. The environmental sensor 23 may be a temperature sensor or a thermopile sensor for measuring a thermal radiation parameter.
The embodiments described above are only a part of the embodiments of the present application, and not all of the embodiments. The order in which the above-described embodiments are described is not intended to be a limitation on the preferred order of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be understood that in the embodiment of the present application, "B corresponding to a" means that B is associated with a, from which B can be determined. It should also be understood that determining B from a does not mean determining B from a alone, but may be determined from a and/or other information.
It should be understood that the term "and/or" herein is merely one type of association relationship that describes an associated object, meaning that three relationships may exist, e.g., a and/or B may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.
In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless explicitly specifically limited otherwise. All directional indicators in the embodiments of the present application (such as upper, lower, left, right, front, rear, top, bottom … …) are only used to explain the relative positional relationship between the components, the movement, etc. in a particular posture (as shown in the drawings), and if the particular posture is changed, the directional indicator is changed accordingly. Furthermore, the terms "include" and "have," as well as any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those steps or elements but may alternatively include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus
The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present application, and shall be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. A molecular pump temperature measuring device is used for measuring the temperature of a shafting turbine rotor of a molecular pump, and is characterized in that the molecular pump comprises: a pump body (11); a main shaft (12) rotatably disposed within the pump body (11); the turbine rotor (13) is arranged in the pump body (11), is fixedly connected with the main shaft (12) and forms a shafting turbine rotor; a stationary turbine stage (14) arranged in alternating cooperation with the turbine rotor (13); a drive device capable of driving the main shaft (12) to rotate so that the turbine rotor (13) can rotate relative to the static turbine stage (14), wherein the temperature measuring device comprises:
at least one non-contact sensor (21) arranged in the pump body (11) for determining thermal radiation parameters of the turbine rotor (13) and/or of the main shaft (12), said thermal radiation parameters comprising at least thermal radiation intensity parameters and/or spectral parameters;
a processing unit (22) electrically connected to the non-contact sensor (21) for determining the temperature of the shafting turbine rotor based on the thermal radiation parameters of the turbine rotor (13) and/or the main shaft (12).
2. The molecular pump temperature measurement device of claim 1,
the temperature measuring device includes: at least two of said non-contact sensors (21);
determining a thermal radiation parameter of the turbine rotor (13) and/or the main shaft (12) comprises determining the thermal radiation parameter from an average of the detection results of the at least two non-contact sensors (21).
3. The molecular pump temperature measurement device of claim 1,
the temperature measuring device also comprises an environmental sensor (23), electrically connected with the processing unit (22), and used for determining the environmental temperature in the pump body (11), wherein the determination of the environmental temperature comprises the determination of the environmental temperature of a fixed component in the pump body (11), and the fixed component is used for fixing the non-contact sensor (21);
and the step of determining the temperature of the shafting turbine rotor further comprises the steps of carrying out conversion of corresponding units on the measured value or the mean value of the detection result of the non-contact sensor (21) and the measured value of the environment sensor (23), carrying out difference calculation, and determining the temperature of the shafting turbine rotor according to the difference.
4. The molecular pump thermometry device according to any one of claims 1-3, wherein the at least two non-contact sensors (21) are spaced apart in the direction of rotation of the turbine rotor (13).
5. The molecular pump thermometry device of any of claims 1-3, wherein the non-contact sensor (21) is a thermopile sensor; the non-contact sensor (21) is fixed to a fixed member in the pump body (11).
6. A temperature measurement method of a molecular pump is used for measuring the temperature of a shafting turbine rotor of the molecular pump, and is characterized in that the molecular pump comprises: a pump body (11); a main shaft (12) rotatably disposed within the pump body (11); the turbine rotor (13) is arranged in the pump body (11) and is fixedly connected with the main shaft (12) to form a shafting turbine rotor; a stationary turbine stage (14) arranged in alternating cooperation with the turbine rotor (13); -drive means able to drive the main shaft (12) in rotation so that the turbine rotor (13) is able to rotate with respect to the stationary turbine stage (14), the method comprising:
determining thermal radiation parameters of the turbine rotor (13) and/or the main shaft (12), the thermal radiation parameters comprising at least a thermal radiation intensity parameter and/or a spectral parameter;
and determining the temperature of the shafting turbine rotor according to the heat radiation parameters of the turbine rotor (13) and/or the main shaft (12).
7. The method according to claim 6, wherein the temperature of the molecular pump is measured,
said determining heat radiation parameters of said turbine rotor (13) and/or said main shaft (12) further comprises: -determining a thermal radiation parameter of the turbine rotor (13) and/or of the main shaft (12) from an average of the detection results of the at least two non-contact sensors (21) by means of at least two non-contact sensors (21) arranged in the pump body (11).
8. The method according to claim 7, wherein the temperature of the molecular pump is measured,
the determining the temperature of the shafting turbine rotor comprises: determining a temperature parameter of a stationary part that holds the contactless sensor (21) by means of at least one environmental sensor (23) arranged in the pump body (11);
converting the measured value or the mean value of the detection results of the non-contact sensor (21) and the measured value of the environment sensor (23) by corresponding units, and calculating the difference value;
and determining the temperature of the shafting turbine rotor according to the calculated difference.
9. A temperature measuring device for a moving member for measuring a temperature of the moving member, the moving member being drivingly connected to a driving device and being operated, the temperature measuring device comprising:
-a non-contact sensor (21) for determining thermal radiation parameters of said operative component, said thermal radiation parameters comprising at least a thermal radiation intensity parameter and/or a spectral parameter;
a processing unit (22) electrically connected to the non-contact sensor (21) for determining the temperature of the moving part based on the heat radiation parameter of the moving part.
10. The temperature measuring apparatus for a running member according to claim 9,
the temperature measuring device also comprises an environment sensor (23) which is electrically connected with the processing unit (22) and is used for determining the environment temperature of the operation component, wherein the determination of the environment temperature comprises the determination of the environment temperature of a fixed component which is used for fixing the non-contact sensor (21) and is arranged opposite to the operation component;
the determining the temperature of the operational component further comprises: converting the measured value of one non-contact sensor (21) or the calculation result value of the measured values of a plurality of non-contact sensors (21) and the measured value of the environment sensor (23) in a corresponding unit, and calculating the difference value; and determining the temperature of the running part according to the calculated difference.
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