CN114310273A - Auxiliary installation device and method for reaction chamber - Google Patents
Auxiliary installation device and method for reaction chamber Download PDFInfo
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- CN114310273A CN114310273A CN202111616927.4A CN202111616927A CN114310273A CN 114310273 A CN114310273 A CN 114310273A CN 202111616927 A CN202111616927 A CN 202111616927A CN 114310273 A CN114310273 A CN 114310273A
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- reaction chamber
- guide rail
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- 238000009434 installation Methods 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 title claims abstract description 19
- 229920002120 photoresistant polymer Polymers 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 230000033001 locomotion Effects 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
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Abstract
The application belongs to the technical field of semiconductor processing, and particularly relates to a reaction chamber auxiliary installation device and an installation method. The auxiliary mounting device comprises an auxiliary frame, guide rails, sliders and bearing plates, wherein more than two guide rails are arranged at the top of the auxiliary frame side by side, each guide rail is correspondingly provided with the slider, the sliders are movably arranged on the corresponding guide rails, the bearing plates and the guide rails are correspondingly arranged, the bearing plates are supported by the corresponding sliders on the guide rails, the reaction chambers can fall on the bearing plates and push the reaction chambers, and the reaction chambers can drive the bearing plates to slide to positions to be mounted along the guide rails. The application can improve the installation efficiency, the installation cost and the installation safety of the reaction chamber of the photoresist removing equipment, and has good practical value.
Description
Technical Field
The application belongs to the technical field of semiconductor processing, and particularly relates to a reaction chamber auxiliary installation device and an installation method.
Background
The reaction chamber quality of equipment of photoresist stripping is heavier, needs high-order fork truck to hoist the reaction chamber when installation and maintenance to supplementary installation, to installer's manpower, the required appurtenance of installation and wait to install the required maintenance space requirement near the equipment higher, the installation effectiveness is low, and installation cost is higher.
In addition, after the reaction chamber of the photoresist removing equipment is hoisted, two persons are required to push the reaction chamber to the connecting position of the conveying chamber, and then the reaction chamber is fixed by the mounting screws of the other two persons, so that the mounting mode consumes manpower, the safety risk is high during mounting, and the accident that a heavy object hurts a person easily occurs.
Therefore, improvements to the prior art are needed.
Disclosure of Invention
In order to solve the technical problem, the application provides a reaction chamber auxiliary installation device and an installation method, which aim to improve the installation efficiency, the installation cost and the installation safety of the reaction chamber of the photoresist stripping equipment to a certain extent.
The technical scheme of the application is as follows:
in one aspect, the present application provides a reaction chamber auxiliary mounting device to assist in mounting a reaction chamber, the auxiliary mounting device comprising:
an auxiliary frame;
more than two guide rails arranged in parallel on the top of the auxiliary frame;
the sliding blocks are correspondingly arranged on the guide rails, and the sliding blocks are movably arranged on the corresponding guide rails;
the bearing plate and the guide rail are correspondingly arranged, the bearing plate is supported by the corresponding sliding block on the guide rail, the reaction chamber can fall on the bearing plate to push the reaction chamber, and the reaction chamber can drive the bearing plate to slide along the guide rail to a position to be installed.
In some embodiments, the auxiliary frame comprises two oppositely disposed support plates;
the guide rail is provided with two, the guide rail with the backup pad sets up correspondingly, the guide rail is fixed to be set up in corresponding on the backup pad.
In some embodiments, the guide rail is provided with positioning members at both ends in the length direction.
In some embodiments, the opposite ends of the two positioning members on each guide rail are provided with buffer members.
In some embodiments, both sides of the guide rail in the width direction are provided in a groove, and the slider is provided with a guide portion embedded in the groove.
In some embodiments, the bearing plate and the corresponding slider on the guide rail are fixedly connected.
Optionally, the bearing plate and the corresponding slide block on the guide rail are fixedly connected through a plurality of screws.
In some embodiments, the first positioning members are disposed on the outer sides of the top of the carrying plates in the width direction, and the first positioning members on the two carrying plates and the reaction chamber have the same size in the width direction.
In some embodiments, the width direction's of the top of loading board outside all still is provided with the second setting element, the second setting element includes first locating plate and the second locating plate of fixed connection and formation L shape, the medial surface of first locating plate with the medial surface of first locating element is located same straight line, the second locating plate sets up the inboard of first locating plate.
In another aspect, the present application further provides a method for installing a reaction chamber, wherein the method for installing the reaction chamber comprises:
operating the reaction chamber on the bearing plate of the auxiliary mounting device;
pushing a reaction cavity, wherein the reaction cavity drives the bearing plate to slide to a position to be installed along a guide rail;
and assembling the reaction chamber to a place to be installed.
The beneficial effects of this application include at least:
the utility model provides a reaction chamber assists installation device and installation method, when implementing, operate reaction chamber to on auxiliary installation device's the loading board earlier, because auxiliary frame's top is provided with two or more guide rails that parallel, and all correspond on every guide rail and be provided with the slider, the loading board supports through the slider on the corresponding guide rail, after reaction chamber falls on the loading board, can promote reaction chamber, reaction chamber can drive and slide to waiting the mounted position along the guide rail on the loading board, reaction chamber's installation can be carried out, better mechanization has, can improve the installation effectiveness of the reaction chamber of equipment that strips, installation cost and the security of installation, and has very good practical value.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a reaction chamber auxiliary mounting device according to an embodiment of the present disclosure;
FIG. 2 is a schematic structural view of the sub-frame of FIG. 1;
FIG. 3 is an enlarged schematic view taken at A in FIG. 1;
FIG. 4 is a schematic view of the assembly of the slider of FIG. 3 on a guide rail;
FIG. 5 is a schematic structural diagram of the carrier plate in FIG. 1.
Reference numerals:
100-auxiliary frame, 101-vehicle body, 102-roller, 103-supporting plate, 200-guide rail, 201-groove, 202-positioning piece, 203-buffering piece, 204-fixing piece, 210-first through hole, 220-second through hole, 300-sliding block, 301-guiding part, 400-bearing plate, 401-first positioning piece, 402-second positioning piece, 4021-first positioning plate, 4022-second positioning plate.
Detailed Description
The technical solutions in the embodiments of the present application will be described clearly and completely with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that all the directional indications in the embodiments of the present application are only used to explain the relative position relationship, the motion situation, and the like between the components in a certain posture, and if the certain posture is changed, the directional indication is changed accordingly.
The following disclosure provides many different embodiments, or examples, for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, which have been repeated for purposes of simplicity and clarity and do not in themselves dictate a relationship between the various embodiments and/or arrangements discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.
Fig. 1 is a schematic structural diagram of a reaction chamber auxiliary mounting apparatus according to an embodiment of the present invention, which is used to assist the mounting of a reaction chamber, and the auxiliary mounting apparatus includes an auxiliary frame 100, a guide rail 200, a slider 300, and a carrier plate 400, in combination with fig. 1.
Fig. 2 is a schematic structural view of the auxiliary frame shown in fig. 1, and referring to fig. 1 and 2, an auxiliary frame 100 according to an embodiment of the present invention includes a vehicle body 101, rollers 102 and a support plate 103, wherein the vehicle body 101 may be box-shaped as a whole, the rollers 102 are disposed at a bottom of the vehicle body 101, the auxiliary frame 100 can be moved to a desired position through the rollers 102, and the rollers 102 have a braking function, and after the auxiliary frame 100 is moved to the desired position, the rollers 102 can be braked, so that the auxiliary frame 100 is positioned to the desired position.
Referring to fig. 1, in the embodiment of the present invention, two or more guide rails 200 are arranged in parallel on the top of the sub-frame 100.
Specifically, in the embodiment of the present application, with reference to fig. 1 and fig. 2, two support plates 103 may be disposed oppositely, two support plates 103 are disposed oppositely on the top of the vehicle body 101, and correspondingly, two guide rails 200 are also disposed.
Referring to fig. 1 and 2, in the embodiment of the present application, a plurality of support plates 103 are arranged on the top of the vehicle body 101 at intervals, the support plates 103 and the guide rails 200 are correspondingly arranged, and each guide rail 200 can be fixed on the support plate 103 by a connecting member such as a bolt.
Fig. 3 is an enlarged schematic view of a point a in fig. 1, and in the embodiment of the present application, in combination with fig. 1 and fig. 3, a sliding block 300 is correspondingly disposed on each guide rail 200, and the sliding block 300 is movably disposed on the corresponding guide rail 200.
Fig. 4 is an assembly diagram of the slider in fig. 3 on the guide rail, and with reference to fig. 3 and fig. 4, in the embodiment of the present application, two sides in the width direction of the guide rail 200 are provided with the grooves 201, the grooves 201 are guide grooves, the slider 300 is provided with the guide portions 301 embedded in the grooves 201, and when the slider 300 is pushed to move on the guide rail 200, the guide portions 301 move in the corresponding grooves 201, so that not only can the movement of the slider 300 be guided, but also the stability of the slider 300 during movement can be improved.
With reference to fig. 1 and fig. 3, in the embodiment of the present application, positioning parts 202 are disposed at two ends of the guide rail 200 in the length direction, a plurality of sliders 300 on each guide rail 200 are located between the positioning parts 202 at two ends of the guide rail 200, and when a component to be moved moves on the guide rail 200 through the sliders 300, the positioning parts 202 can limit the moving position of the sliders 300.
Specifically, the positioning element 202 of the embodiment of the present application may be a positioning element, which may be connected to the supporting plate 103 by a fixing element such as a bolt, and the positioning element 202 is provided with a through hole for the guide rail 200 to pass through, and the height of the positioning element 202 is not higher than the height of the slider 300, so that the positioning element 202 only acts on the slider 300, thereby being capable of adapting to the movement of a larger-sized component.
Referring to fig. 1 and 3, in the embodiment of the present application, buffer members 203 may be disposed at opposite ends of two positioning members 202 on each guide rail 200, and the buffer members 203 may have an elastic function, and are in flexible contact with the guide rail 200, so as to prevent an accident caused by the contact between the guide rail 200 and the positioning members 202.
With reference to fig. 1 and fig. 3, in the embodiment of the present application, a fixing element 204 is further disposed outside one end in the length direction of the guide rail 200, the fixing element 204 is fixedly disposed on the support plate 103 corresponding to the guide rail 200, the height of the fixing element 204 is higher than that of the slider 300 on the guide rail 200, and the fixing element 204 is used for positioning the component to be moved in the length direction.
Referring to fig. 1 and fig. 3, in the embodiment of the present application, the supporting plate 400 and the guide rail 200 are correspondingly disposed, the supporting plate 400 is supported by the corresponding slider 300 on the guide rail 200, the reaction chamber can fall on the supporting plate 400, the reaction chamber is pushed, and the reaction chamber can drive the supporting plate 200 to slide along the guide rail 200 to a position to be installed.
In the embodiment of the present application, the bearing plate 400 and the corresponding sliding block on the guide rail 200 can be fixedly connected by a plurality of screws.
Fig. 5 is a schematic structural diagram of the carrier plate in fig. 1, and referring to fig. 1, fig. 3 and fig. 5, the first positioning members 401 are disposed on the outer sides of the carrier plate 400 in the width direction, and the first positioning members 401 on the two carrier plates 400 are consistent with the dimension of the reaction chamber in the width direction, that is, the first positioning members 401 on the two carrier plates 400 can position the reaction chamber in the width direction.
Further, with reference to fig. 1, fig. 3 and fig. 5, in this embodiment of the application, the outer sides of the top of the loading plate 400 in the width direction are both provided with a second positioning piece 402, the second positioning piece 402 includes a first positioning plate 4021 and a second positioning plate 4022 that are fixedly connected and form an L shape, the inner side surface of the first positioning plate 4021 and the inner side surface of the first positioning piece 401 are located on the same straight line, the first positioning plate 4021 and the first positioning piece 401 on the same side are used for shifting the width direction of the reaction chamber, and the second positioning plate 4022 is disposed on the inner side of the first positioning plate 4021 and is used for shifting one side of the reaction chamber in the length direction.
In the embodiment of the present application, the first positioning element 401 and the second positioning element 402 can be fixedly connected to the supporting plate 400 by a fixing element such as a bolt or a one-day molding, which is not limited herein.
In another aspect, the present application also provides a method of installing a reaction chamber. The installation method comprises the following steps:
s1: operating the reaction chamber on the carrier plate 400 of the auxiliary mounting device;
specifically, the method comprises the following steps: the reaction chamber can be manually lifted onto the carrier plate 400 of the auxiliary mounting means.
S2: pushing the reaction chamber, and driving the bearing plate to slide to a position to be installed along the guide rail by the reaction chamber;
specifically, the method comprises the following steps: after the reaction chamber is lifted to the supporting plate 400 of the auxiliary mounting device, the reaction chamber can be pushed by a single person under the action of the gravity of the reaction chamber and the first positioning member 401 and the second positioning member 402 to drive the supporting plate 400 and the slider 300 to slide and rub on the guide rail 200, so that the reaction chamber can be moved to the mounting connection with the transmission chamber.
S3, assembling the reaction chamber to a place to be installed;
specifically, the method comprises the following steps: after the reaction chamber moves to the position where the reaction chamber is connected with the conveying chamber, the reaction chamber and the conveying chamber can be fixedly connected through connecting pieces such as bolts, and then installation can be completed.
The reaction chamber auxiliary installation device and the installation method have good mechanization, dependence on a crane for installing an auxiliary tool can be reduced, the requirement of the auxiliary crane on the space of an equipment installation plant is lowered, the sliding rail equipped by the auxiliary crane is convenient and efficient to operate, convenience of installation and maintenance personnel can be improved, safety of the installation and maintenance personnel can be improved, and accordingly installation efficiency, installation cost and installation safety of the reaction chamber of the degumming equipment are improved, and the reaction chamber auxiliary installation device and the installation method have good practical value.
While the preferred embodiments of the present application have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all alterations and modifications as fall within the scope of the application.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.
Claims (10)
1. A reaction chamber auxiliary mounting apparatus for assisting in mounting a reaction chamber, the auxiliary mounting apparatus comprising:
an auxiliary frame;
more than two guide rails arranged in parallel on the top of the auxiliary frame;
the sliding blocks are correspondingly arranged on the guide rails, and the sliding blocks are movably arranged on the corresponding guide rails;
the bearing plate and the guide rail are correspondingly arranged, the bearing plate is supported by the corresponding sliding block on the guide rail, the reaction chamber can fall on the bearing plate to push the reaction chamber, and the reaction chamber can drive the bearing plate to slide along the guide rail to a position to be installed.
2. The reaction chamber auxiliary mounting device of claim 1, wherein the auxiliary frame comprises two oppositely disposed support plates;
the guide rail is provided with two, the guide rail with the backup pad sets up correspondingly, the guide rail is fixed to be set up in corresponding on the backup pad.
3. The auxiliary installation device of reaction chamber as claimed in claim 1, wherein the guide rail is provided with positioning members at both ends in the length direction.
4. The reaction chamber auxiliary mounting device of claim 3, wherein the opposite ends of the two positioning members on each guide rail are provided with buffer members.
5. The reaction chamber auxiliary mounting device according to claim 1, wherein both sides in the width direction of the guide rail are provided with grooves, and the slider is provided with guide portions fitted in the grooves.
6. The auxiliary mounting device for reaction chamber as claimed in claim 1, wherein the carrying plate is fixedly connected to the corresponding slide block on the guide rail.
7. The auxiliary mounting device for reaction chamber as claimed in claim 6, wherein the bearing plate and the corresponding slide block on the guide rail are fixedly connected by a plurality of screws.
8. The auxiliary mounting device for reaction chamber as claimed in claim 1, wherein the first positioning members are disposed on the top of the carrying plate at the outer sides in the width direction, and the first positioning members on the two carrying plates are consistent with the dimension of the reaction chamber in the width direction.
9. The auxiliary mounting device for a reaction chamber according to claim 8, wherein a second positioning member is further disposed on the outer side of the top of the loading plate in the width direction, the second positioning member includes a first positioning plate and a second positioning plate that are fixedly connected and form an L shape, the inner side surface of the first positioning plate and the inner side surface of the first positioning member are located on the same straight line, and the second positioning plate is disposed on the inner side of the first positioning plate.
10. A method of installing a reaction chamber, the method comprising:
operating the reaction chamber on the carrier plate of the auxiliary mounting device according to any one of claims 1 to 9;
pushing a reaction cavity, wherein the reaction cavity drives the bearing plate to slide to a position to be installed along a guide rail;
and assembling the reaction chamber to a place to be installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111616927.4A CN114310273A (en) | 2021-12-27 | 2021-12-27 | Auxiliary installation device and method for reaction chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111616927.4A CN114310273A (en) | 2021-12-27 | 2021-12-27 | Auxiliary installation device and method for reaction chamber |
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| Publication Number | Publication Date |
|---|---|
| CN114310273A true CN114310273A (en) | 2022-04-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202111616927.4A Pending CN114310273A (en) | 2021-12-27 | 2021-12-27 | Auxiliary installation device and method for reaction chamber |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202391963U (en) * | 2011-11-11 | 2012-08-22 | 浙江上众自动化设备有限公司 | Linear guide rail device |
| CN205184377U (en) * | 2015-10-30 | 2016-04-27 | 深圳大宇精雕科技有限公司 | Positioning apparatus |
| CN208948301U (en) * | 2018-09-30 | 2019-06-07 | 张家港江苏科技大学产业技术研究院 | A kind of multidirectional material carrying platform based on PLC |
| CN210016361U (en) * | 2019-05-30 | 2020-02-04 | 成都福誉科技有限公司 | Novel straight line module |
| CN213705734U (en) * | 2020-12-07 | 2021-07-16 | 新大洋造船有限公司 | Boats and ships pipe installation auxiliary device that makes a command |
-
2021
- 2021-12-27 CN CN202111616927.4A patent/CN114310273A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202391963U (en) * | 2011-11-11 | 2012-08-22 | 浙江上众自动化设备有限公司 | Linear guide rail device |
| CN205184377U (en) * | 2015-10-30 | 2016-04-27 | 深圳大宇精雕科技有限公司 | Positioning apparatus |
| CN208948301U (en) * | 2018-09-30 | 2019-06-07 | 张家港江苏科技大学产业技术研究院 | A kind of multidirectional material carrying platform based on PLC |
| CN210016361U (en) * | 2019-05-30 | 2020-02-04 | 成都福誉科技有限公司 | Novel straight line module |
| CN213705734U (en) * | 2020-12-07 | 2021-07-16 | 新大洋造船有限公司 | Boats and ships pipe installation auxiliary device that makes a command |
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Application publication date: 20220412 |