CN114308909A

CN114308909A - Cleaning equipment for integrated circuit processing

Info

Publication number: CN114308909A
Application number: CN202111611535.9A
Authority: CN
Inventors: 王倍昌; 于明明
Original assignee: Shenzhen Century Zhongyun Technology Co ltd
Current assignee: Shenzhen Century Zhongyun Technology Co ltd
Priority date: 2021-12-27
Filing date: 2021-12-27
Publication date: 2022-04-12
Anticipated expiration: 2041-12-27
Also published as: CN114308909B

Abstract

The invention belongs to the technical field of integrated circuit processing, in particular to cleaning equipment for integrated circuit processing, which aims at the problems that a screening device in the prior art is low in screening efficiency and easy to cause ore blockage. When the PC circuit board cleaning machine is used for cleaning chipped metal, if metal particles are adhered to the surface of the PC circuit board, the vibration mechanism at the bottom end is controlled to be started, the lower surface of the PC circuit board is continuously knocked, so that the metal particles on the upper surface of the PC circuit board are forced to jump, and the metal particles can be easily and vertically adsorbed by matching with the arrangement of the exhaust fan, so that the metal particles are effectively prevented from sliding on the surface of the PC circuit board to generate scraping.

Description

Cleaning equipment for integrated circuit processing

Technical Field

The invention relates to the technical field of integrated circuit processing, in particular to cleaning equipment for integrated circuit processing.

Background

Since the advent, integrated circuits have been developed rapidly, and are widely used in various fields, including high-precision computers of various sizes, and small-precision computer sockets and flashlights, without the function of integrated circuit chips, and the manufacturing process of integrated circuit chips is very important.

In the manufacturing process of the integrated circuit chip, a large number of metal spikes can be formed on the integrated circuit chip, workers can cut the metal spikes to form a large number of metal chips, but due to a large number of integrated components on the surface of the integrated circuit chip, the metal chips can be left in gaps among the components and are not easy to clean, manual operation is needed for workers to remove the metal chips, the chip is easy to damage, the working efficiency is reduced, and the process needs to be improved.

Traditional clearance mode does not have the non and utilizes high-power dust catcher to adsorb, the sweeping of subsidiary brush, but this two kinds of modes one kind can lead to the energy extravagant, if the component height difference on the integrated circuit board, the power that needs to increase the suction fan this moment just can adsorb the metal piece, if the metal piece is glutinous on the circuit board, then needs the brush, the paint finish on the colored circuit board is scraped very easily to the multiple slip of metal piece on the circuit board like this, consequently just needs a neotype cleaning device.

Disclosure of Invention

The invention provides a cleaning device for processing an integrated circuit, aiming at overcoming the problem that scrap metal scattered on an integrated circuit board is not easy to clean.

In order to achieve the purpose, the invention adopts the following technical scheme: a cleaning device for integrated circuit processing comprises an operating platform which is of a flat square tube structure integrally, wherein a rectangular hole is formed in the middle of the upper surface of the operating platform, lifting mechanisms are arranged at four corners of the rectangular hole, which are located on the top inner wall of the operating platform, pressing plate mechanisms are arranged at four corners of the rectangular hole, which are located on the upper surface of the operating platform, mounting rods are fixed under the rectangular hole in the middle of the operating platform, a vibration mechanism is clamped in the middle of the mounting rods, groove-shaped slide rails with upward openings and parallel to each other are fixed on the upper surface of the operating platform near the edges of two sides respectively, sliding blocks are connected in sliding grooves of the two groove-shaped slide rails in a sliding manner, cambered frames are fixed on the upper surfaces of the two sliding blocks, a top cross beam rail with a downward groove opening is fixed between the two cambered frames, and an exhaust fan is connected on the lower surface of the top cross beam rail in a sliding manner, and the inlet scoop of air exhauster has cup jointed the hose, the bottom opening part of hose leaves the distance with the PC circuit board surface, and the hose is plastic corrugated pipe, its length can be elongated along with corrugated drawing, thereby can be when clearing up remaining welding slag or piece metal in PC circuit board surface, if the metal particle glues the surface at the PC circuit board, only need the vibrations mechanism start-up of control bottom this moment, strike the lower surface of PC circuit board constantly and make the metal particle of its upper surface compelled to beat, the setting of air exhauster of deuterogamying can be easily adsorbed the metal particle perpendicularly this moment, the metal particle has been avoided effectively to produce the scraping at the surperficial slip of PC circuit board.

As a preferable scheme in the invention, the lifting mechanism comprises four centrosymmetric groove-shaped guide plates, the groove-shaped guide plates are fixed on the inner wall of the top of the operation table near four corners, sliding ram rods are connected in the groove-shaped guide plates in a sliding manner, spring sinking grooves are formed in the ends, close to each other, of the upper surfaces of all the sliding ram rods, buffer springs are fixed at the bottoms of the spring sinking grooves, and anti-skidding support blocks are fixed at the top ends of the buffer springs, so that the extending lengths of the sliding ram rods can be adjusted according to the size of a PC circuit board to be operated, the positions of the anti-skidding support blocks are abutted to the edges, and the lifting mode is stable and can not damage parts in the middle of the PC circuit board.

As a preferable scheme in the invention, the bottom end of the groove-shaped guide plate is provided with guide wheel grooves at two ends, the guide wheel grooves at two ends of the groove-shaped guide plate are provided with guide wheels, and the lower surface of the sliding ram is provided with a groove with a width matched with the thickness of the guide wheel, so that when the sliding ram needs to be extended and drawn out in use, the drawing-out action is smoother, and the drawing-out resistance is reduced.

As a preferable scheme in the invention, the pressing plate mechanism comprises a rotary hinge seat which is fixed on the upper surface of the operating platform and is close to four corners of a rectangular hole, a sleeve is hinged in the middle of the rotary hinge seat, an arch-shaped pressing rod is inserted into one end, far away from the rotary hinge seat, of the sleeve, and a rubber pressing block is fixed at one end, far away from the sleeve, of the arch-shaped pressing rod.

As the preferable scheme in the invention, the orthographic projection of the bow-shaped pressure lever falls on the central line of the sliding ram, and the shaft lever and the torsion spring are arranged in the rotary hinge seat, so that strong downward pressure can be provided for the end part of the bow-shaped pressure lever, and the falling-off of the bow-shaped pressure lever can be avoided under the high-frequency vibration of the vibration mechanism.

As the preferable proposal of the invention, the vibration mechanism comprises an outer barrel which is internally provided with a cavity and has an overall cylindrical structure, a compression spring is fixed at the bottom of the outer barrel, a guide barrel with an upward opening is fixed at the top end of the compression spring, an installation notch is arranged on the circumferential outer wall of the guide barrel, an umbrella-shaped frame is fixed at the top end of the guide barrel, a tamping rod is fixed at the top end of the umbrella-shaped frame, a driving motor is fixed on the vertical inner wall of the outer barrel at the installation gap, and the top end of the output shaft of the driving motor is fixed with a cliff-jumping wheel, and the inner wall of the bottom of the guide barrel is fixed with a support rod, therefore, when the anti-vibration device is used, when the scarp wheel pushes the abutting rod to slowly descend, the compression spring can slowly store energy, the abutting rod is suddenly not extruded when the scarp wheel runs to a scarp opening, the tamping rod is quickly pushed upwards under the pushing of the compression spring to form a primary impact, and the vibration is formed by the reciprocating motion.

As the preferable scheme of the invention, a steering table is fixed between the lower surface of each rotary hinge seat and the upper surface of the operating table, so that the four bow-shaped compression rods can be rotated to a position far away from the rectangular hole during loading, parts on the surface of the PC circuit board are effectively prevented from being touched during placement, and the integrity of the parts is protected.

As a preferable scheme in the invention, one end of the side face of the groove-shaped guide plate close to the rectangular hole opening is provided with a gear groove, the side faces of the top inner wall of the operating platform, which are positioned in the gear groove, are provided with vertical transmission rods, the circumferential outer wall of each transmission rod, which is positioned in the gear groove, is fixedly provided with a gear, the side faces of the sliding cantilever rods are respectively provided with tooth grooves which are mutually meshed with the gear, the bottom ends of all the transmission rods are fixedly provided with belt pulleys, and the circumferential outer walls of all the belt pulleys are wound with the same conveying belt.

As the preferable scheme in the invention, the speed reducing motor is fixed at the bottom end of one of the transmission rods, and the outer wall of the speed reducing motor is fixed on the inner wall of the operating platform through the hoop, so that all the sliding ram rods can be controlled to stretch out and draw back simultaneously by controlling the forward and reverse rotation of the speed reducing motor when the device is used, and the convenience in control and the accuracy in extension length are improved.

To sum up, the beneficial effect in this scheme is:

1. this kind of cleaning device is used in integrated circuit processing, through setting up the air exhauster that suspends in midair in the vibrations mechanism and the top that are located PC circuit board below in the operation panel inside, can be when remaining welding slag or piece metal in clearance PC circuit board surface, if the metal particle glues the surface at the PC circuit board, the vibrations mechanism that only needs the control bottom this moment starts, the lower surface that constantly strikes the PC circuit board makes the metal particle of its upper surface compelled to beat, the setting of air exhauster of deuterogamying this moment can easily adsorb the metal particle vertically, the metal particle production scraping of sliding on the surface of PC circuit board has been avoided effectively.

Drawings

FIG. 1 is a schematic view of the overall structure of a machining process according to an embodiment of the present invention;

fig. 2 is a schematic perspective view of a first embodiment of the present invention;

FIG. 3 is a schematic cross-sectional view of a vibration mechanism according to an embodiment of the present invention;

FIG. 4 is a schematic view of a portion of a cross-sectional structure of a vibration mechanism of the present invention;

FIG. 5 is a schematic perspective view of a second platen mechanism according to an embodiment of the present invention;

FIG. 6 is a schematic perspective view of a triple linkage mechanism according to an embodiment of the present invention;

FIG. 7 is a schematic view showing an assembling structure of a pulley according to a third embodiment of the present invention;

fig. 8 is a bottom view of a linkage mechanism according to a third embodiment of the present invention.

In the figure: 1. an operation table; 2. sliding the ram; 3. sinking the spring into the groove; 4. a vibration mechanism; 5. a buffer spring; 6. a rectangular orifice; 7. a groove-shaped guide plate; 8. a swivel hinge mount; 9. an arched frame; 10. a platen mechanism; 11. an arcuate compression bar; 12. an exhaust fan; 13. a hose; 14. a PC circuit board; 15. pressing rubber blocks; 16. a groove-shaped slide rail; 17. a top beam rail; 18. a trench; 19. a slider; 20. a guide barrel; 21. a drive motor; 22. a tamping rod; 23. an umbrella-shaped frame; 24. a scarp wheel; 25. a support rod; 26. a compression spring; 27. an anti-skid supporting block; 28. a steering table; 29. a gear; 30. a transmission rod; 31. a reduction motor; 32. a conveyor belt; 33. a belt pulley; 34. and (4) a guide wheel.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.

Example 1

Referring to fig. 1-4, a cleaning device for integrated circuit processing, comprising an operating platform 1 which is a flat square tube structure as a whole, a rectangular orifice 6 is opened in the middle of the upper surface of the operating platform 1, the position of the rectangular orifice 6 is larger than the area of all PC circuit boards 14 to be operated, so as to ensure that the PC circuit boards 14 are completely suspended in the middle of the rectangular orifice 6, lifting mechanisms are arranged at the four corners of the rectangular orifice 6 on the top inner wall of the operating platform 1, pressing plate mechanisms 10 are arranged at the four corners of the rectangular orifice 6 on the upper surface of the operating platform 1, a mounting rod is fixed in the middle of the operating platform 1 under the rectangular orifice 6, a vibration mechanism 4 is clamped in the middle of the mounting rod, groove-shaped slide rails 16 which are opened upwards and are parallel to each other are fixed on the upper surface of the operating platform 1 near the two side edges, and sliding blocks 19 are connected in the sliding grooves of the two groove-shaped slide rails 16, the upper surfaces of the two sliding blocks 19 are both fixed with brackets 9, a top beam rail 17 with a downward slot is fixed between the two brackets 9, the lower surface of the top beam rail 17 is connected with an exhaust fan 12 in a sliding way, and the air suction opening of the exhaust fan 12 is sleeved with a flexible pipe 13 which can be extended and contracted, the opening at the bottom end of the flexible pipe 13 is spaced from the surface of the PC circuit board 14, the flexible pipe 13 is a plastic corrugated pipe, its length can be elongated along with the tensile of ripple to can be in the time of the remaining welding slag of clearance PC circuit board 14 surface or piece metal, if the metal particle glues on the surface of PC circuit board 14, only need control the vibrations mechanism 4 start this moment of bottom, strike the lower surface of PC circuit board 14 constantly and make the metal particle of its upper surface compelled to beat, the setting of deuterogamying air exhauster 12 can easily adsorb the metal particle vertically this moment, avoided the metal particle to produce the scraping at the surperficial slip of PC circuit board 14 effectively.

In the invention, the lifting mechanism comprises four groove-shaped guide plates 7 which are centrosymmetric, the openings of all the groove-shaped guide plates 7 are upward, the groove-shaped guide plates 7 are fixed on the top inner wall of the operating platform 1 near the four corners, the groove-shaped guide plates 7 are connected with the sliding ram rods 2 in a sliding way, and the upper surfaces of all the sliding ram rods 2 are provided with spring sinking grooves 3 at the ends close to each other, the bottom of each spring sinking groove 3 is fixed with a buffer spring 5, the top ends of the buffer springs 5 are fixed with anti-skid supporting blocks 27, the anti-skid supporting blocks 27 are made of rubber materials, so that the protruding length of the sliding ram 2 can be adjusted according to the size of the PC circuit board 14 to be operated, thereby abutting the position of the anti-slip support block 27 on the lower surface of the PC circuit board 14 close to the edge, this lifting is very smooth and does not damage the components in the middle of the PC board 14.

The guide wheel grooves are formed in the two ends of the groove-shaped guide plate 7, the guide wheel grooves 34 are formed in the guide wheel grooves at the two ends of the groove-shaped guide plate 7, the lower surface of the sliding ram 2 is provided with the groove 18 with the width matched with the thickness of the guide wheel 34, and therefore when the sliding ram 2 needs to be drawn out in an extending mode in use, the drawing action is smooth, and resistance when the sliding ram 2 is drawn out and pushed is reduced.

Wherein, the clamp plate mechanism 10 is including fixing the articulated seat 8 of gyration that is close to 6 four corners departments in rectangle drill way on the 1 upper surface of operation panel, and the articulated sleeve pipe that has in the middle of articulated seat 8 of gyration, the sleeve pipe is kept away from the one end of articulated seat 8 of gyration and is pegged graft and have bow-shaped depression bar 11, bow-shaped depression bar 11 is kept away from sheathed tube one end and is fixed with rubber briquetting 15, thereby can be when using, when slip ram 2 needs extend, bow-shaped depression bar 11 also can follow the extension, thereby ensure that the contact point position of bow-shaped depression bar 11 and PC circuit board 14 is located anti-skidding tray 27 directly over, it reduces the pressure loss and improves anti-skidding effect to carry out the clamp effect.

Wherein, the orthographic projection of bow-shaped depression bar 11 falls on the central line of slip ram 2, and is provided with axostylus axostyle and torsion spring in the articulated seat of gyration 8 to can provide powerful pushing down force for bow-shaped depression bar 11's tip, ensure can not produce under 4 high-frequency oscillation of vibrations mechanism and drop.

Wherein, the vibration mechanism 4 comprises an outer barrel with a cavity therein and a cylindrical structure as a whole, a compression spring 26 is fixed at the bottom of the outer barrel, a guide barrel 20 with an upward opening is fixed at the top end of the compression spring 26, an installation gap is opened on the outer wall of the circumference of the guide barrel 20, an umbrella-shaped frame 23 is fixed at the top end of the guide barrel 20, a tamping rod 22 is fixed at the top end of the umbrella-shaped frame 23, a driving motor 21 is fixed at the installation gap on the vertical inner wall of the outer barrel, a cliff wheel 24 is fixed at the top end of the output shaft of the driving motor 21, and a resisting rod 25 is fixed on the inner wall of the bottom of the guide barrel 20, so that when the cliff wheel 24 is used, when the resisting rod 25 is pushed by the cliff wheel 24 to slowly descend, the compression spring 26 can slowly store energy, when the cliff wheel 24 runs to the cliff mouth, the pressing of the resisting rod 25 is suddenly lost, and a primary impact is formed by the quick pushing of the lower tamping rod 22 of the compression spring 26, the vibration is formed by reciprocating in the way.

The working principle is as follows: when welding slag or scrap metal remained on the surface of the PC circuit board 14 is cleaned, if metal particles are adhered to the surface of the PC circuit board 14, only the vibration mechanism 4 at the bottom end needs to be controlled to start, the vibration mechanism 4 is controlled to start, only the driving motor 21 needs to be started to drive the scarp wheel 24 to rotate, when the scarp wheel 24 pushes the support rod 25 to slowly descend, the compression spring 26 can slowly store energy, when the scarp wheel 24 runs to a scarp opening, the extrusion on the support rod 25 is suddenly lost, at the moment, the tamping rod 22 is quickly pushed up under the propulsion of the compression spring 26 to form a shock, and the shock is formed by reciprocating; the tamping rod 22 continuously strikes the lower surface of the PC circuit board 14 to enable the metal particles on the upper surface to be forced to jump, and then the metal particles can be easily and vertically adsorbed by matching with the arrangement of the exhaust fan 12, so that the metal particles are effectively prevented from sliding on the surface of the PC circuit board 14 to generate scraping.

Example 2

Referring to fig. 5, a cleaning apparatus for processing an integrated circuit, in this embodiment, compared with embodiment 1, further includes a turning table 28 fixed between the lower surface of each rotary hinged seat 8 and the upper surface of the operating table 1, so that when loading is performed, the four bow-shaped pressing rods 11 can be rotated to a position far away from the rectangular aperture 6, thereby effectively avoiding touching parts on the surface of the PC circuit board 14 when placing, and protecting the integrity of the parts.

Example 2

Referring to fig. 6 to 8, in this embodiment, compared to embodiment 1, the cleaning apparatus for processing an integrated circuit further includes a gear groove formed at one end of a side surface of the groove-shaped guide plate 7 close to the rectangular aperture 6, vertical transmission rods 30 are disposed on side surfaces of a top inner wall of the operating table 1, gears 29 are fixed on circumferential outer walls of the transmission rods 30 at the gear grooves, tooth grooves engaged with the gears 29 are disposed on side surfaces of the sliding ram 2, belt pulleys 33 are fixed at bottom ends of all the transmission rods 30, and the same transmission belt 32 is wound between circumferential outer walls of all the belt pulleys 33.

Wherein, the bottom mounting of one of them transfer line 30 has gear motor 31, and gear motor 31's outer wall passes through the clamp to be fixed on the inner wall of operation panel 1 to can control all slip ram 2 and stretch out and draw back simultaneously through the positive and negative rotation of control gear motor 31 when using, improve the convenience of control and the accurate nature of extension length.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.

Claims

1. A cleaning device for integrated circuit processing comprises an operating platform (1) which is of a flat square tube structure integrally, a rectangular hole (6) is formed in the middle of the upper surface of the operating platform (1), lifting mechanisms are arranged at four corners of the rectangular hole (6) on the inner wall of the top of the operating platform (1), pressing plate mechanisms (10) are arranged at four corners of the rectangular hole (6) on the upper surface of the operating platform (1), the cleaning device is characterized in that an installation rod is fixed under the rectangular hole (6) in the middle of the operating platform (1), a vibration mechanism (4) is clamped in the middle of the installation rod, groove-shaped slide rails (16) with upward openings and parallel to each other are fixed on the edges of two sides of the upper surface of the operating platform (1), slide blocks (19) are connected in sliding grooves of the two groove-shaped slide rails (16) in a sliding manner, a bow-shaped frame (9) is fixed on the upper surfaces of the two slide blocks (19), and a top beam rail (17) with a downward slot is fixed between the two bows (9), the lower surface of the top beam rail (17) is connected with an exhaust fan (12) in a sliding manner, a suction opening of the exhaust fan (12) is sleeved with a hose (13), a distance is reserved between the bottom opening of the hose (13) and the surface of the PC circuit board (14), the hose (13) is a plastic corrugated pipe, and the length of the plastic corrugated pipe can be lengthened along with the stretching of the corrugation.

2. The integrated circuit processing cleaning device according to claim 1, wherein the lifting mechanism comprises four centrosymmetric groove-shaped guide plates (7), the groove-shaped guide plates (7) are fixed on the top inner wall of the operation table (1) near four corners, sliding cantilever rods (2) are connected in the groove-shaped guide plates (7) in a sliding manner, spring sinking grooves (3) are formed in the ends, close to the upper surfaces of all the sliding cantilever rods (2), of the sliding cantilever rods, buffer springs (5) are fixed at the bottoms of the spring sinking grooves (3), and anti-skidding support blocks (27) are fixed at the top ends of the buffer springs (5).

3. The cleaning device for processing the integrated circuit according to claim 2, wherein the bottom end of the groove-shaped guide plate (7) is provided with guide wheel grooves at both ends, guide wheels (34) are arranged in the guide wheel grooves at both ends of the groove-shaped guide plate (7), and the lower surface of the sliding ram (2) is provided with a groove (18) with the width matched with the thickness of the guide wheels (34).

4. The cleaning device for integrated circuit processing as recited in claim 1, wherein the platen mechanism (10) comprises a rotary hinge seat (8) fixed on the upper surface of the operating platform (1) near the four corners of the rectangular hole (6), a sleeve is hinged in the middle of the rotary hinge seat (8), a bow-shaped pressure rod (11) is inserted into one end of the sleeve far away from the rotary hinge seat (8), and a rubber press block (15) is fixed on one end of the bow-shaped pressure rod (11) far away from the sleeve.

5. The cleaning device for processing the integrated circuit according to claim 2, characterized in that the orthographic projection of the bow-shaped pressure lever (11) falls on the central line of the sliding ram (2), and a shaft rod and a torsion spring are arranged in the rotary hinge seat (8).

6. The cleaning device for processing the integrated circuit according to claim 1, wherein the vibration mechanism (4) comprises an outer barrel with a cavity therein and a cylindrical structure as a whole, a compression spring (26) is fixed at the bottom of the outer barrel, a guide barrel (20) with an upward opening is fixed at the top end of the compression spring (26), an installation notch is formed in the outer circumferential wall of the guide barrel (20), an umbrella-shaped frame (23) is fixed at the top end of the guide barrel (20), a tamping rod (22) is fixed at the top end of the umbrella-shaped frame (23), a driving motor (21) is fixed at the installation notch on the inner vertical wall of the outer barrel, a scarp wheel (24) is fixed at the top end of the output shaft of the driving motor (21), and a resisting rod (25) is fixed on the inner bottom wall of the guide barrel (20).

7. Cleaning device for processing integrated circuits according to claim 1, characterized in that a steering table (28) is fixed between the lower surface of each pivoting seat (8) and the upper surface of the operating table (1).

8. The cleaning device for integrated circuit processing as recited in claim 2, wherein a gear groove is formed at one end of the side surface of the groove-shaped guide plate (7) close to the rectangular hole (6), a vertical transmission rod (30) is arranged at the side surface of the gear groove on the top inner wall of the operating platform (1), gears (29) are fixed at the positions of the gear grooves on the circumferential outer walls of the transmission rods (30), tooth grooves meshed with the gears (29) are formed in the side surface of the sliding ram (2), belt pulleys (33) are fixed at the bottom ends of all the transmission rods (30), and the same transmission belt (32) is wound between the circumferential outer walls of all the belt pulleys (33).

9. A cleaning device for processing integrated circuits according to claim 8, characterized in that a speed reduction motor (31) is fixed to the bottom end of one of the driving rods (30), and the outer wall of the speed reduction motor (31) is fixed to the inner wall of the operating table (1) by a clamp.