CN114295068A - Submicron displacement calibration device and method for oil film thickness measurement - Google Patents

Submicron displacement calibration device and method for oil film thickness measurement Download PDF

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Publication number
CN114295068A
CN114295068A CN202111641858.2A CN202111641858A CN114295068A CN 114295068 A CN114295068 A CN 114295068A CN 202111641858 A CN202111641858 A CN 202111641858A CN 114295068 A CN114295068 A CN 114295068A
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platform
film thickness
oil film
grating
ultrasonic
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张锐
李�瑞
孟祥慧
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Shanghai Jiaotong University
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Shanghai Jiaotong University
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Abstract

The invention relates to a submicron displacement calibration device and method for measuring oil film thickness, wherein the device comprises a base, a lower platform, an upper platform, a support upright post, an upper end cover, a ball screw transmission device, a grating measuring device, an ultrasonic measuring device and a servo motor, wherein the lower platform is arranged on the base, the upper platform is positioned above the lower platform, the upper end of the support upright post is connected with the upper end cover, and the lower end of the support upright post is connected with the base after penetrating through the upper platform and the lower platform; the upper end of the ball screw transmission device is connected with the upper end cover, the lower end of the ball screw transmission device penetrates through the upper platform and the lower platform and then is connected with the base, a screw nut of the ball screw transmission device is connected with the upper platform, and the servo motor is in driving connection with the ball screw transmission device; an oil groove is arranged on the lower platform, and the grating measuring device and the ultrasonic measuring device are both arranged on the upper platform. Compared with the prior art, the invention carries out submicron calibration on the measurement result of the ultrasonic sensor through the grating sensor with higher precision, thereby improving the accuracy of the ultrasonic sensor in the engineering machinery measurement.

Description

Submicron displacement calibration device and method for oil film thickness measurement
Technical Field
The invention relates to the technical field of oil film thickness measurement, in particular to a submicron displacement calibration device and method for oil film thickness measurement.
Background
The oil film thickness of the main bearing is an important characterizing parameter for the tribological state of the main bearing. The thickness of the oil film can be accurately measured, and designers can be helped to evaluate the performance of the bearing in the design test stage; in the use process of the engine, the bearing performance abnormity can be found in time, and the occurrence of major accidents is avoided, so that the method has important significance. The thickness of the lubricating oil film can visually display the lubricating state of the friction pair, and a plurality of scholars research the measuring technology of the lubricating oil film. At present, the method for measuring the thickness of the lubricating oil film of the friction pair mainly comprises a resistance method, a capacitance method, an optical method, an ultrasonic method and the like. In practical industrial application, the oil film thickness measuring range of bearings and the like is usually from several micrometers to dozens of micrometers, the oil film thickness is calculated by the ultrasonic sensor according to the measuring principle of the reflectivity, the precision of the oil film thickness measuring method is related to the frequency of an ultrasonic probe and can reach several micrometers, and the industrial application requirements are met.
When the methods are used, particularly before the ultrasonic method is used, input and output parameters of the ultrasonic method need to be calibrated so as to obtain accurate oil film thickness, and in order to ensure the accuracy of a calibration result, a higher-precision measurement method is urgently needed to calibrate the result of the ultrasonic method.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide the submicron displacement calibration device and method for measuring the oil film thickness, which improve the accuracy of the ultrasonic sensor in the actual engineering machinery measurement, and realize the calibration of the measurement result of the ultrasonic method through the displacement measured by the grating sensor with higher precision.
The purpose of the invention can be realized by the following technical scheme:
a submicron displacement calibration device for measuring oil film thickness comprises a base, a lower platform, an upper platform, a support upright post, an upper end cover, a ball screw transmission device, a grating measuring device, an ultrasonic measuring device and a servo motor, wherein the lower platform is arranged on the base, the upper platform is positioned above the lower platform, the upper end of the support upright post is connected with the upper end cover, and the lower end of the support upright post is connected with the base after penetrating through the upper platform and the lower platform; the upper end of the ball screw transmission device is communicated with the upper end cover, the lower end of the ball screw transmission device is communicated with the upper platform and the lower platform and then is connected with the base, a screw nut of the ball screw transmission device is connected with the upper platform, and the servo motor is in driving connection with the ball screw transmission device; the upper surface of lower platform is equipped with the oil groove, grating measuring device and ultrasonic measurement device are all installed on the upper mounting plate, ultrasonic measurement device is used for surveying the oil film thickness in the oil groove, grating measuring device is used for surveying the displacement value of upper mounting plate.
Further, the device also comprises a guide rail sliding block, the guide rail sliding block is arranged on the upper platform, the guide rail sliding block is provided with a sliding rail matched with the supporting upright post, and the supporting upright post is movably connected with the sliding rail.
Further, the ball screw transmission device comprises a ball screw shaft, a screw nut, a fixed bearing and a support bearing, the upper end of the ball screw shaft is connected with the upper end cover through the support bearing, the lower end of the ball screw shaft is connected with the base through the fixed bearing, the screw nut is rotatably connected with the ball screw shaft, the screw nut is fixedly connected with the upper platform, and the servo motor is connected with the ball screw shaft through a coupling in a driving mode.
Further, the side surfaces of the supporting stand columns are hollowed out.
Furthermore, the grating measuring device and the ultrasonic measuring device are both arranged at the same side position on the upper platform.
Further, the grating measuring device comprises a grating reading probe and a grating reading head mounting frame, and the grating reading probe is mounted on the upper platform through the grating reading head mounting frame.
Further, the ultrasonic measuring device comprises an ultrasonic probe and an ultrasonic probe fixing device, and the ultrasonic probe is mounted on the upper platform through the ultrasonic probe fixing device.
Furthermore, the servo motor is further connected with a control platform, and the grating measuring device and the ultrasonic measuring device are connected to the upper computer through the collecting device.
Further, the bottom surface of the upper platform and the top surface of the lower platform are both finish-machined surfaces.
The invention also provides a calibration method of the submicron displacement calibration device for measuring the oil film thickness, which comprises the following steps:
initial state adjustment: the upper platform is driven to descend by the servo motor until the bottom of the upper platform is lowered to the upper part of the lower platform to be completely contacted, and the output result of the grating measuring device is set to be zero as an initial state;
the testing steps are as follows: the servo motor drives the upper platform to rise for a certain distance and then stop, and oil bodies are added into the oil groove of the lower platform until the oil bodies fill the gap between the upper platform and the lower platform; measuring the displacement value of the upper platform movement as an oil film thickness grating measured value through a grating measuring device, and obtaining an oil film thickness ultrasonic measured value through an ultrasonic measuring device;
a calibration step: the upper platform is driven by the servo motor to move downwards gradually according to the set distance, and a plurality of groups of oil film thickness grating measured values and oil film thickness ultrasonic measured values are obtained, so that the output result of the ultrasonic measuring device is calibrated, and the calibrated ultrasonic measuring device is used for measuring the oil film thickness.
Compared with the prior art, the invention has the following advantages:
(1) according to the invention, the oil groove is designed on the lower platform, and lubricating oil fills the oil groove of the lower platform, so that the oil film thickness can be represented by measuring the displacement of the upper platform and the lower platform. The grating sensor and the ultrasonic sensor are arranged at the same side, the measurement displacement result is consistent, submicron calibration can be carried out on the measurement result of the ultrasonic sensor through the grating sensor with higher precision, and the accuracy of the ultrasonic sensor in actual engineering machinery measurement can be improved based on the calibration result.
(2) The invention comprises a servo motor and a control platform, wherein the servo motor is connected with a ball screw, so that the upper platform can be automatically adjusted in displacement, different displacement results can be measured for multiple times, and the accuracy of oil film thickness measurement calibration of the ultrasonic sensor is improved.
Drawings
FIG. 1 is a schematic diagram of an overall structure of a submicron-scale displacement calibration device for oil film thickness measurement according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view of a submicron-scale displacement calibration apparatus for oil film thickness measurement according to an embodiment of the present invention;
FIG. 3 is a schematic view of an installation of a grating reader and an ultrasonic probe according to an embodiment of the present invention;
in the figure, the device comprises a base 1, a base 2, a lower platform 3, an upper platform 4, a support upright post 5, an upper end cover 6, a ball screw shaft 7, a screw nut 8, a guide rail slide block 9, a fixed bearing 10, a support bearing 11, a grating reading head mounting frame 12 and an ultrasonic probe fixing device.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or the orientations or positional relationships that the products of the present invention are conventionally placed in use, and are only used for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
It should be noted that the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
Example 1
The embodiment provides a submicron displacement calibration device for oil film thickness measurement, which comprises a base 1, a lower platform 2, an upper platform 3, a support upright post 4, an upper end cover 5, a ball screw transmission device, a grating measurement device, an ultrasonic measurement device and a servo motor, wherein the lower platform 2 is arranged on the base 1, the upper platform 3 is positioned above the lower platform 2, the upper end of the support upright post 4 is connected with the upper end cover 5, and the lower end of the support upright post is connected with the base 1 after penetrating through the upper platform 3 and the lower platform 2; the upper end of the ball screw transmission device is communicated with the upper end cover 5, the lower end of the ball screw transmission device is communicated with the upper platform 3 and the lower platform 2 and then is connected with the base 1, a screw nut of the ball screw transmission device is connected with the upper platform 3, and a servo motor is in driving connection with the ball screw transmission device; the upper surface of lower platform 2 is equipped with the oil groove, and grating measuring device and ultrasonic measuring device all install on upper mounting plate 3, and ultrasonic measuring device is used for surveying the oil film thickness in the oil groove, and grating measuring device is used for surveying the displacement value of upper mounting plate 3.
The grating sensor is a metering grating manufactured according to the moire fringe principle, is mostly used for displacement measurement and physical quantity related to displacement, and the precision of the grating sensor depends on the space between the gratings, so the precision of the grating sensor can reach submicron level or even tens of nanometers. Therefore, the displacement calibration of submicron order can be carried out on the ultrasonic sensor and the like based on the displacement measurement result of the grating, thereby laying a foundation for the oil film thickness measurement in the industry.
In view of the above, the present embodiment further provides a calibration method using the above oil film thickness measurement submicron displacement calibration apparatus, including the following steps:
initial state adjustment: the upper platform 3 is driven to descend by the servo motor until the bottom of the upper platform 3 is lowered to the upper part of the lower platform 2 to be completely contacted, and the output result of the grating measuring device is set to be zero as an initial state;
the testing steps are as follows: the upper platform 3 is driven by a servo motor to rise for a certain distance and then stop, and oil bodies are added into the oil groove of the lower platform 2 until the oil bodies fill the gap between the upper platform 3 and the lower platform 2; measuring a displacement value of the upper platform 3 by using a grating measuring device as an oil film thickness grating measured value, and obtaining an oil film thickness ultrasonic measured value by using an ultrasonic measuring device;
a calibration step: the upper platform 3 is driven by the servo motor to move downwards gradually according to the set distance, and a plurality of groups of oil film thickness grating measured values and oil film thickness ultrasonic measured values are obtained, so that the output result of the ultrasonic measuring device is calibrated, and the calibrated ultrasonic measuring device is used for measuring the oil film thickness.
As a preferred embodiment, in order to improve the stability of the moving process of the upper platform, the device further comprises a guide rail sliding block 8, the guide rail sliding block 8 is installed on the upper platform 3, the guide rail sliding block 8 is provided with a sliding rail matched with the support upright post 4, and the support upright post 4 is movably connected with the sliding rail.
As a preferred embodiment, the ball screw transmission device includes a ball screw shaft 6, a screw nut 7, a fixed bearing 9 and a support bearing 10, the upper end of the ball screw shaft 6 is connected to the upper end cover 5 through the support bearing 10, the lower end is connected to the base 1 through the fixed bearing 9, the screw nut 7 is rotatably connected to the ball screw shaft 6, the screw nut is fixedly connected to the upper platform 3, and the servo motor is connected to the ball screw shaft 6 through a coupling.
As a preferred embodiment, the side surfaces of the supporting uprights 4 are hollowed out for easy installation and observation of the internal structural conditions.
As a preferred embodiment, in order to improve the accuracy of the measurement, both the grating measuring device and the ultrasonic measuring device are installed at the same side position on the upper platform 3.
As a preferred embodiment, the grating measuring device includes a grating reading probe and a grating reading head mounting frame 11, the grating reading probe is mounted on the upper platform 3 through the grating reading head mounting frame 11, the ultrasonic measuring device includes an ultrasonic probe and an ultrasonic probe fixing device 12, and the ultrasonic probe is mounted on the upper platform 3 through the ultrasonic probe fixing device 12.
In this embodiment, servo motor still is connected with control platform, and grating measuring device and ultrasonic measuring device all pass through collection system and insert the host computer.
As a preferred embodiment, the bottom surface of the upper platform 3 and the top surface of the lower platform 2 are both finished surfaces to ensure that the upper platform is in sufficient contact with the lower platform during use.
The above preferred embodiments can be arbitrarily combined to obtain a more preferred embodiment, and a specific implementation process of a most preferred embodiment will be described below.
As shown in fig. 1 to fig. 3, the submicron-scale displacement calibration device for measuring the thickness of an oil film in the present embodiment is used for calibrating the thickness of the oil film measured by an ultrasonic method, and includes a base 1, a lower platform 2, an upper platform 3, a support column 4, an upper end cover 5, a ball screw transmission device, a guide rail slider 8, a grating measurement device, an ultrasonic measurement device, a grating reading head mounting rack 11, an ultrasonic probe fixing device 12, a servo motor, and a control platform. The grating measuring device comprises a main grating ruler, a grating reading probe, a data transmission line, a switching box and an upper machine, and the ultrasonic measuring device comprises an ultrasonic probe, an acquisition card and the upper machine.
Lower platform 2 passes through bolted connection and installs on base 1, and for holding lubricating oil, 2 upper surfaces of lower platform are provided with the oil groove. Support post 4 passes through bolted connection to be fixed on the base, for the convenience of installation and observation inner structure state, support post 4 side fretwork. The upper end cover 5 is installed on the support upright 4 through bolt connection. The fixed bearing 9 is mounted on the base 1 and the support bearing 10 is mounted in the upper end cap 5. The ball screw shaft 6 is fixed by a fixed bearing 9 and a support bearing 10. The screw nut 7 is mounted on the ball screw shaft 6.
The upper platform 3 is connected with the screw nut 7 through a bolt, the upper platform 3 can move up and down along the ball screw shaft 6 together with the screw nut 7, and for ensuring the moving stability, a guide rail sliding block 8 is arranged between the upper platform 3 and the supporting upright post 4, and in the embodiment, 4 guide rail sliding blocks are arranged at different positions of four corners of the supporting upright post 4.
The grating reading probe is installed on the upper platform 3 through a grating reading head installation frame 11, the main grating ruler is installed on the supporting upright post 4, and the grating reading probe can move up and down along with the upper platform 3, so that the displacement of the upper platform 3 is measured.
The ultrasonic probe is mounted on the upper stage 3 by an ultrasonic probe fixture 12. The ultrasonic probe and the grating reading probe are arranged at the same side position of the upper platform 3 in consideration of the measurement accuracy.
The ball screw shaft 6 is connected to the servo motor through a coupler, and the rotation of the ball screw shaft 6 can be controlled through the control platform, so that the whole movement of the screw nut 7 and the upper platform 3 is driven.
The application method of the embodiment is as follows:
firstly, the servo motor is operated through the control platform, the bottom of the upper platform 3 is lowered to be in full contact with the upper part of the lower platform 2, the output result of the grating sensor is set to be zero, the state at the moment is taken as an initial state, and the corresponding output result of the ultrasonic sensor is recorded through the upper computer. In order to ensure that the bottom of the upper platform 3 and the upper part of the lower platform 2 can be fully contacted, the bottom of the upper platform 3 and the upper part of the lower platform 2 should ensure parallelism and smoothness, and a finish machining mode is adopted.
Subsequently, the servo motor is operated through the control platform, the upper platform 3 is moved upwards for a certain distance, after the stop, lubricating oil is added into an oil groove of the lower platform 2, and the lubricating oil is ensured to be filled in a gap between the upper platform and the lower platform, so that the thickness of the oil film is equal to the displacement value of the movement of the upper platform 3 in the state, the displacement output by the grating sensor in the state is recorded, and the result output by the ultrasonic sensor at the moment is recorded through the upper computer. By repeating the steps, a series of data can be obtained, and the output result of the ultrasonic sensor is calibrated based on the data.
The foregoing detailed description of the preferred embodiments of the invention has been presented. It should be understood that numerous modifications and variations could be devised by those skilled in the art in light of the present teachings without departing from the inventive concepts. Therefore, the technical solutions available to those skilled in the art through logic analysis, reasoning and limited experiments based on the prior art according to the concept of the present invention should be within the scope of protection defined by the claims.

Claims (10)

1. A submicron displacement calibration device for oil film thickness measurement is characterized by comprising a base (1), a lower platform (2), an upper platform (3), a support upright post (4), an upper end cover (5), a ball screw transmission device, a grating measurement device, an ultrasonic measurement device and a servo motor, wherein the lower platform (2) is installed on the base (1), the upper platform (3) is positioned above the lower platform (2), the upper end of the support upright post (4) is connected with the upper end cover (5), and the lower end of the support upright post (4) is connected with the base (1) after penetrating through the upper platform (3) and the lower platform (2); the upper end of the ball screw transmission device is communicated with the upper end cover (5), the lower end of the ball screw transmission device is communicated with the upper platform (3) and the lower platform (2), and then is connected with the base (1), a screw nut of the ball screw transmission device is connected with the upper platform (3), and the servo motor is in driving connection with the ball screw transmission device; the upper surface of lower platform (2) is equipped with the oil groove, grating measuring device and ultrasonic measurement device are all installed on upper mounting plate (3), ultrasonic measurement device is used for surveying the oil film thickness in the oil groove, grating measuring device is used for surveying the displacement value of upper mounting plate (3).
2. The submicron displacement calibration device for oil film thickness measurement according to claim 1, further comprising a guide rail slider (8), wherein the guide rail slider (8) is mounted on the upper platform (3), the guide rail slider (8) is provided with a slide rail matched with the support column (4), and the support column (4) is movably connected with the slide rail.
3. The submicron-scale displacement calibration device for oil film thickness measurement according to claim 1, characterized in that the ball screw transmission device comprises a ball screw shaft (6), a screw nut (7), a fixed bearing (9) and a support bearing (10), the upper end of the ball screw shaft (6) is connected with the upper end cover (5) through the support bearing (10), the lower end of the ball screw shaft is connected with the base (1) through the fixed bearing (9), the screw nut (7) is rotatably connected with the ball screw shaft (6), the screw nut is fixedly connected with the upper platform (3), and the servo motor is connected with the ball screw shaft (6) through a coupling drive.
4. The oil film thickness measurement submicron displacement calibration device according to claim 1, characterized in that the side of the support column (4) is hollowed out.
5. The submicron-scale displacement calibration device for oil film thickness measurement according to claim 1, characterized in that the grating measurement device and the ultrasonic measurement device are both installed at the same side position on the upper platform (3).
6. A submicron-scale displacement calibration device for oil film thickness measurement according to claim 1, characterized in that said grating measurement device comprises a grating reading probe and a grating reading head mounting frame (11), said grating reading probe is mounted on the upper platform (3) through the grating reading head mounting frame (11).
7. The submicron-scale displacement calibration device for oil film thickness measurement according to claim 1, characterized in that the ultrasonic measurement device comprises an ultrasonic probe and an ultrasonic probe fixing device (12), and the ultrasonic probe is mounted on the upper platform (3) through the ultrasonic probe fixing device (12).
8. The submicron displacement calibration device for oil film thickness measurement according to claim 1, characterized in that the servo motor is further connected with a control platform, and the grating measurement device and the ultrasonic measurement device are both connected to an upper computer through a collection device.
9. The oil film thickness measurement submicron displacement calibration device according to claim 1, characterized in that the bottom surface of the upper platform (3) and the top surface of the lower platform (2) are both finish machined surfaces.
10. A calibration method using a submicron-scale displacement calibration device for oil film thickness measurement according to any one of claims 1-9, comprising the steps of:
initial state adjustment: the upper platform (3) is driven to descend by the servo motor until the bottom of the upper platform (3) is lowered to the upper part of the lower platform (2) to be completely contacted, and the output result of the grating measuring device is set to be zero as an initial state;
the testing steps are as follows: the upper platform (3) is driven by a servo motor to rise for a certain distance and then stop, and oil bodies are added into an oil groove of the lower platform (2) until the oil bodies fill the gap between the upper platform (3) and the lower platform (2); measuring the displacement value of the upper platform (3) by using a grating measuring device as the oil film thickness grating measured value, and obtaining an oil film thickness ultrasonic measured value by using an ultrasonic measuring device;
a calibration step: the upper platform (3) is driven by the servo motor to move downwards gradually according to the set distance, and a plurality of groups of oil film thickness grating measured values and oil film thickness ultrasonic measured values are obtained, so that the output result of the ultrasonic measuring device is calibrated, and the calibrated ultrasonic measuring device is used for measuring the oil film thickness.
CN202111641858.2A 2021-12-29 2021-12-29 Submicron displacement calibration device and method for oil film thickness measurement Pending CN114295068A (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050073694A1 (en) * 2003-10-03 2005-04-07 Honeywell International Inc. Means for in-place automated calibration of optically-based thickness sensor
CN103091164A (en) * 2013-01-15 2013-05-08 天津大学 Double-system stretching device applicable to micro-nanometer thin film material
CN107702668A (en) * 2017-11-16 2018-02-16 哈尔滨工程大学 A kind of ultrasound thin oil film demarcation testboard
CN107966120A (en) * 2017-12-07 2018-04-27 青岛理工大学 A kind of caliberating device and its assay method of ultrasonic measurement thickness
CN110142647A (en) * 2019-05-20 2019-08-20 华中科技大学 A kind of hydrostatic slideway steady-state performance real-time measurement apparatus and method
CN213147769U (en) * 2020-10-01 2021-05-07 烟台羿沣传感测控技术有限公司 Detection platform for detecting displacement sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050073694A1 (en) * 2003-10-03 2005-04-07 Honeywell International Inc. Means for in-place automated calibration of optically-based thickness sensor
CN103091164A (en) * 2013-01-15 2013-05-08 天津大学 Double-system stretching device applicable to micro-nanometer thin film material
CN107702668A (en) * 2017-11-16 2018-02-16 哈尔滨工程大学 A kind of ultrasound thin oil film demarcation testboard
CN107966120A (en) * 2017-12-07 2018-04-27 青岛理工大学 A kind of caliberating device and its assay method of ultrasonic measurement thickness
CN110142647A (en) * 2019-05-20 2019-08-20 华中科技大学 A kind of hydrostatic slideway steady-state performance real-time measurement apparatus and method
CN213147769U (en) * 2020-10-01 2021-05-07 烟台羿沣传感测控技术有限公司 Detection platform for detecting displacement sensor

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Application publication date: 20220408