CN114293188A - Multi-coating vibration-damping structure cutter pad and preparation method thereof - Google Patents
Multi-coating vibration-damping structure cutter pad and preparation method thereof Download PDFInfo
- Publication number
- CN114293188A CN114293188A CN202111657004.3A CN202111657004A CN114293188A CN 114293188 A CN114293188 A CN 114293188A CN 202111657004 A CN202111657004 A CN 202111657004A CN 114293188 A CN114293188 A CN 114293188A
- Authority
- CN
- China
- Prior art keywords
- layer
- substrate
- coating
- vibration
- cucnx
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 title claims abstract description 85
- 238000000576 coating method Methods 0.000 title claims abstract description 85
- 238000013016 damping Methods 0.000 title claims abstract description 41
- 238000002360 preparation method Methods 0.000 title claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 65
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 21
- 239000010936 titanium Substances 0.000 claims abstract description 21
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 21
- 238000005520 cutting process Methods 0.000 claims abstract description 18
- 238000003754 machining Methods 0.000 claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 claims abstract description 9
- 239000000956 alloy Substances 0.000 claims abstract description 4
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 4
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 4
- 238000004140 cleaning Methods 0.000 claims description 33
- 239000010949 copper Substances 0.000 claims description 33
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 20
- 229910052786 argon Inorganic materials 0.000 claims description 17
- 238000007514 turning Methods 0.000 claims description 16
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 13
- 230000008569 process Effects 0.000 claims description 13
- 238000005137 deposition process Methods 0.000 claims description 10
- 238000011065 in-situ storage Methods 0.000 claims description 8
- 239000002114 nanocomposite Substances 0.000 claims description 8
- 238000012360 testing method Methods 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 7
- 239000007789 gas Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 229910021645 metal ion Inorganic materials 0.000 claims description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 6
- 238000005299 abrasion Methods 0.000 claims description 6
- 230000001133 acceleration Effects 0.000 claims description 6
- -1 argon ions Chemical class 0.000 claims description 6
- 238000012512 characterization method Methods 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 6
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 6
- 238000005316 response function Methods 0.000 claims description 6
- 238000005488 sandblasting Methods 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 5
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000003599 detergent Substances 0.000 claims description 3
- 239000012153 distilled water Substances 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 3
- 230000002045 lasting effect Effects 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000001020 plasma etching Methods 0.000 claims description 3
- 230000002441 reversible effect Effects 0.000 claims description 3
- 238000005201 scrubbing Methods 0.000 claims description 3
- 230000003595 spectral effect Effects 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 230000003746 surface roughness Effects 0.000 claims description 3
- 239000013077 target material Substances 0.000 claims description 3
- 230000007704 transition Effects 0.000 claims description 3
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
- 239000012300 argon atmosphere Substances 0.000 claims description 2
- 239000004519 grease Substances 0.000 claims description 2
- 230000009467 reduction Effects 0.000 abstract description 9
- 239000013078 crystal Substances 0.000 abstract description 2
- 230000002401 inhibitory effect Effects 0.000 abstract description 2
- 230000001629 suppression Effects 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 244000137852 Petrea volubilis Species 0.000 description 1
- 238000002083 X-ray spectrum Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000009763 wire-cut EDM Methods 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a knife pad with a multi-element coating vibration reduction structure and a manufacturing method thereof, and relates to the technical field of machining vibration reduction. The knife pad with the multi-element multi-layer coating vibration attenuation structure comprises a substrate, wherein the substrate is made of superfine crystal hard alloy which takes WC as a base and Co and Ni as binding phases; the vibration-damping tool pad is characterized in that a pre-titanium layer is arranged on the substrate, a plurality of Cu layers and CuCNx layers are sequentially arranged above the pre-titanium layer in a staggered mode, the Cu layers and the CuCNx layers form a vibration-damping coating of the tool pad, and a CrN layer is arranged on the surface of the CuCNx layer on the top layer. The cutter pad with the coating vibration reduction structure can play a role in dissipating vibration energy and inhibiting vibration, and the Cr-CrN coating structure with high strength and high hardness on the outer layer can ensure the rigidity and the wear resistance of the cutter pad and prolong the service life of the cutter pad. The damping shim settles the damping structure in the cutting blade department of vibration source, and the controllability of vibration suppression is stronger, and the preparation cost of shim is low, and it is convenient to change, easily promotes.
Description
Technical Field
The invention relates to the technical field of machining vibration reduction, in particular to a knife pad with a multi-element multi-layer coating vibration reduction structure and a manufacturing method thereof.
Background
Ensuring the machining efficiency and the stability of the machining process is important for the cutting machining of mechanical parts, and one of the key elements influencing the efficiency and the stability of the machining process depends on the cutting performance of the used cutter. During the cutting process, the local contact area of the cutting edge and the workpiece material forms high temperature and high stress load, and further the cutter is severely abraded and vibrated under the action of force thermal impact, so that the quality of the processed surface is deteriorated. The severe abrasion of the cutting tool causes the increase of the fraction defective of parts, and an additional post-treatment process or even secondary processing is required, so that the time consumption and the cost in enterprise production are increased, and the processing beat and the production efficiency are seriously influenced. In addition, worn tools that cannot be replaced in a timely manner can lead to tool breakage, with the potential for serious consequences to the tool holder system, the workpiece, and the machine tool structural components, and even safety accidents.
Cutting vibration is difficult to avoid in the machining process, and the precision prediction difficulty of cutter abrasion and cutter failure caused by vibration is extremely high. Therefore, the vibration damping of the cutting machining system is improved, the negative effect caused by cutting vibration is kept at the minimum level, and the method has important significance for prolonging the service life of the cutter and improving the surface quality of parts. Currently, there is a lack of a general damping scheme in the field of machining, and damping schemes for specific applications (such as thin-walled structural machining) are limited in process application range. In addition, the vibration damping scheme of the existing machining process mainly solves the problem of vibration of a machining system, and most of the vibration damping scheme is to perform vibration damping treatment on a cutter bar or a cutter rest; the vibration reduction simulation can prevent violent vibration and flutter, but can effectively inhibit or slow down vibration only in a low-frequency range, and has limited effect in a wide-frequency-domain excitation range.
Disclosure of Invention
The invention aims to provide a multi-element multi-layer coating vibration reduction structure cutter pad and a manufacturing method thereof, which can effectively inhibit or slow down vibration in a low-frequency range and a wide-frequency-range excitation range, reduce severe abrasion and vibration of a cutter under the action of force and heat impact and prolong the service life of the cutter.
In order to achieve the purpose, the invention provides the following technical scheme: a multi-element multi-layer coating vibration-damping structure knife pad comprises a substrate, wherein the substrate is made of ultra-fine grain hard alloy which takes WC as a base and takes Co and Ni as binding phases; the cutter pad is characterized in that a pre-titanium layer is arranged on the substrate, multiple Cu layers and CuCNx layers are sequentially arranged on the pre-titanium layer in a staggered mode, the multiple Cu layers and the CuCNx layers form a vibration reduction structure of the cutter pad, and a CrN layer is arranged on the surface of the CuCNx layer on the top layer.
Preferably, a Cr layer transition layer is disposed between the CuCNx layer and the CrN layer of the top layer.
A method for manufacturing a knife pad with a multi-element multi-layer coating vibration-damping structure comprises the following steps,
the first step, the mechanical cleaning of the substrate,
mechanically cleaning the surface of the substrate by a sand blasting process, cleaning all impurities such as grease, dirt, oxide skin and the like on the surface of the substrate, and simultaneously enabling the surface to have certain roughness so as to improve the adhesive force between the pre-titanium layer and the substrate, so that the surface roughness of the substrate reaches Sa 2.5 mu m and Sz 60-100 mu m;
the second step, the chemical cleaning of the substrate,
scrubbing with alkaline detergent, washing with distilled water, ultrasonic cleaning with isopropanol and acetone for 30 min, and drying with hot air;
thirdly, cleaning the substrate by in-situ high-pressure argon plasma,
applying a bias pulse of-600V, 350kHz, through high energy positive argon ions (Ar) on the substrate+) Bombarding and carrying out plasma etching on the surface of the substrate to remove oxides on the surface of the substrate;
fourthly, cleaning the substrate by low-pressure high-energy pulse magnetron sputtering metal ion plasma,
applying bias pulses of-600V and 350kHz on the substrate, and in an argon environment, attracting high-energy positively-charged sputtering titanium and argon ion flows to the substrate by negative bias, finally leading the high-energy ion bombardment on the surface of the substrate, cleaning the substrate and forming a pre-titanium layer;
the fifth step, preparing a Cu layer and a CuCNx layer,
the Cu layer and the CuCNx layer multi-element nano composite damping coating are prepared by combining a high-power double-cathode pulse magnetron sputtering deposition process with a plasma enhanced chemical vapor deposition system. The used target material is a copper target, copper atoms are sputtered in a gas environment formed by mixing active nitrogen, acetylene and argon, sputtered metal atoms are ionized due to high-energy collision between electrons and gas ions, molecules and high-energy free radicals, so that a composite material is formed and deposited on a substrate, a vacuum chamber is pumped to the background pressure of 0.03Pa, a Cu layer and a CuCNx layer are deposited at the ambient temperature, in the whole deposition process of a Cu layer and a CuCNx layer coating, 100V forward and reverse pulses lasting for 20 mu s are applied to a cathode when a main pulse after 10 mu s is finished, and the Cu layer and the CuCNx layer form a vibration damping structure of a cutter pad;
sixthly, cleaning the gasket,
cleaning the gasket after the deposition of the multi-layer coating Cu layer and the CuCNx layer by using in-situ high-pressure argon plasma and low-pressure high-energy pulse magnetron sputtering metal ion plasma, and cleaning impurities on the gasket;
the seventh step, preparation of CrN layer and Cr layer,
preparing a CrN layer and a Cr layer of the coating by combining a high-power double-cathode pulse magnetron sputtering deposition process with a plasma enhanced chemical vapor deposition system;
and the eighth step, the characterization of the coating,
characterizing the prepared multi-component multi-layer coating vibration attenuation structure shim according to a coating characteristic characterization method of the multi-component multi-layer coating vibration attenuation structure shim;
the ninth step, the turning test,
the method comprises the steps of carrying out modal testing on the prepared multi-element multi-layer coating vibration attenuation structure cutter pad, measuring a frequency response function and acceleration in a time domain of each cutting stroke by using an accelerometer in the machining process, converting the frequency response function and the acceleration into power spectral density through fast Fourier transform, obtaining modal parameters of the coating cutter pad, detecting the abrasion and service life conditions of a turning blade before and after the coating cutter pad is applied by using a cutter detector, and measuring and evaluating the roughness of the turning surface before and after the coating cutter pad is applied by using a confocal microscope.
Compared with the prior art, the invention has the beneficial effects that:
1. the multi-element multilayer coating vibration-damping structure cutter pad can be suitable for different processing occasions using indexable cutters in the field of machining, such as turning, milling, boring, drilling and the like, and compared with the existing common cutter bar and cutter rest vibration-damping structure, the vibration-damping cutter pad structure provided by the invention has better universality and interchangeability, is flexible and convenient to use and has low preparation cost; meanwhile, the knife pad with the multi-element multi-layer coating vibration attenuation structure is characterized in that the damping mechanism is arranged at the position, close to the cutting blade of the vibration source, of the knife pad, compared with vibration attenuation treatment at the positions of the knife bar and the knife rest, the vibration attenuation knife pad is closer to the vibration source, vibration control at the source is achieved, the vibration inhibition effect is better, the controllability is stronger, the quality of the processed surface can be effectively guaranteed, and the service life of a cutter can be effectively prolonged; the knife pad with the multi-element multi-layer coating vibration reduction structure has the function of inhibiting vibration, can reduce the risk of collision of a knife bar/knife rest when a blade is damaged, relieves the direct impact of force and heat load in the cutting process, and resists the high-level shear compression stress in the cutting process; the nano composite damping coating material Cu layer and the CuCNx layer of the knife pad with the multi-layer coating vibration attenuation structure can play a role in dissipating vibration energy; the outermost Cr layer and the outermost CrN layer which are made of the multilayer coating materials have the characteristics of high strength and high hardness, and the requirements on high rigidity and the cutting machining precision after the blade is installed can be met. In addition, the CrN layer at the outermost part of the shim has excellent wear resistance, so that the coating in the shim can be protected, and the service life of the shim is prolonged.
Drawings
FIG. 1 is a schematic structural view of a multi-element multi-layer coating vibration-damping shim according to the present invention;
FIG. 2 is a diagram of the usage of the multi-component multi-layer coating damping shim according to the present invention.
In the figure:
1-multi-component multi-layer coating vibration-damping shim, 11-substrate, 12-pre-titanium layer, 13-Cu layer, 14-CuCNx layer, 15-Cr layer, 16-CrN layer,
2-turning a blade and 3-turning a cutter rod.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, the multi-element multi-layer coating vibration-damping structure shim comprises a substrate 11, wherein the substrate 11 is made of an ultra-fine grain hard alloy which takes WC as a base and takes Co and Ni as a binding phase, so that the overall high rigidity characteristic of the shim is ensured; the vibration-damping structure of the cutter pad is characterized in that a pre-titanium layer 12 is arranged on the substrate 11, a plurality of Cu layers 13 and CuCNx layers 14 are sequentially arranged above the pre-titanium layer 12 in a staggered mode, and the plurality of Cu layers 13 and the CuCNx layers 14 form the vibration-damping structure of the cutter pad; for better bonding with the CuCNx layer, the surface of the CuCNx layer 14 at the top layer is provided with a CrN layer 16; and a Cr layer 15 transition layer is arranged between the CuCNx layer 14 and the CrN layer 16 on the top layer.
Particularly, the multi-element multi-layer coating vibration damping structure shim is a vibration damping structure which can dissipate cutting vibration between a cutter rod and a cutting blade of an indexable cutter used in turning, milling, boring, drilling and the like in the field of machining. Taking a turning tool as an example (as shown in fig. 2), the multi-layer coating vibration-damping shim 1 is installed between a turning insert 2 and a turning tool rod 3.
In order to meet the requirements of universality and interchangeability, the dimension of the knife pad 1 with the multielement multilayer coating damping structure is consistent with the dimension of a standard knife pad, and the base material of the knife pad and the multielement multilayer coating structure outside the base are designed as shown in figure 1.
A method for manufacturing a knife pad with a multi-element multi-layer coating vibration-damping structure comprises the following steps,
the first step, the mechanical cleaning of the substrate 11,
before the multilayer coating deposition synthesis process starts, the substrate 11 (i.e. the ultra-fine grain cemented carbide shim) is first subjected to mechanical cleaning, and the surface of the substrate 11 is mechanically cleaned by a sand blasting process (glass beads with a diameter of 100-. After the sand blasting is finished, firstly, the sand blasting rust removal part is comprehensively inspected, secondly, the surface of the substrate 11 is subjected to roughness inspection, the part which is difficult to spray is mainly inspected, and the hand touch is strictly forbidden during the inspection. After sand blasting and rust removal, the surface roughness of the matrix should reach Sa 2.5 mu m and Sz 60-100 mu m.
The second step, the chemical cleaning of the substrate 11,
scrubbing with alkaline detergent, washing with distilled water, ultrasonic cleaning with isopropanol and acetone for 30 min, and drying with hot air;
thirdly, cleaning the substrate (11) by in-situ high-pressure argon plasma,
applying a bias pulse of-600V, 350kHz on the substrate (11) and passing high-energy positive argon ions Ar+Bombarding and plasma etching the surface of said substrate (11), such sputter cleaning using energetic gas ions being very effective for removing oxides and other contaminants from the substrate surface.
Fourthly, cleaning the substrate (11) by low-pressure high-energy pulse magnetron sputtering metal ion plasma,
applying a bias pulse of-600V, 350kHz on said substrate (11), in an argon atmosphere, a negative bias attracting the high-energy positively charged sputtered titanium and argon ion streams to the substrate, eventually resulting in high-energy ion bombardment of the substrate surface, which not only cleans the substrate, but also produces low-energy implantation of high-energy ions, promotes the formation of a gradient interface between the substrate and the coating, cleans said substrate (11) and forms a pre-titanium layer 12; increasing the adhesion between the coating and the substrate. The process parameters for plasma cleaning and pre-titanium layer are shown in table 1. The in-situ high-pressure argon plasma cleaning and the low-pressure high-energy pulse magnetron sputtering metal ion plasma cleaning belong to a pretreatment process for preparing a Cu: CuCNx multi-element multilayer nano composite damping coating, and no element component is introduced into the coating. The pre-titanium layer treatment is carried out before the Cu: CuCNx multi-element multi-layer nano composite damping coating is prepared, the bonding capability of the coating and the gasket substrate can be enhanced, and the purity of the pre-titanium layer titanium target is 99.99%.
A fifth step, preparation of the Cu layer 13 and the CuCNx layer 14,
the Cu layer 13 and the CuCNx layer 14 multielement nano composite damping coating are prepared by combining a high-power double-cathode pulse magnetron sputtering deposition process with a plasma enhanced chemical vapor deposition system. The target material is a copper target, copper atoms are sputtered in a gas environment formed by mixing active nitrogen, acetylene and argon, sputtered metal atoms are ionized due to high-energy collision between electrons and gas ions, molecules and high-energy free radicals, so that a composite material is formed and deposited on the substrate 11, a vacuum chamber is pumped to the background pressure of 0.03Pa, the Cu layer 13 and the CuCNx layer 14 are deposited at the ambient temperature, external heat is not required to be applied to the substrate (the process parameters of the multilayer coating Cu: CuCNx deposition synthesis process are shown in Table 2), during the whole deposition process of the Cu layer 13 and the CuCNx layer 14 coating, 100V forward and reverse pulses lasting for 20 mu s are applied to a cathode when a main pulse after 10 mu s is ended, and the Cu layer 13 and the CuCNx layer 14 form a vibration damping structure of a cutter pad.
Sixthly, cleaning the gasket,
and cleaning the gasket after the deposition of the multi-layer coating Cu layer 13 and the CuCNx layer 14 by using in-situ high-pressure argon plasma and low-pressure high-energy pulse magnetron sputtering metal ion plasma, and cleaning impurities on the gasket.
The seventh step, preparation of a CrN layer 16 and a Cr layer 15,
the coating CrN layer 16 and the Cr layer 15 are prepared by a high-power double-cathode pulse magnetron sputtering deposition process combined with a plasma enhanced chemical vapor deposition system (the process parameters of the multilayer coating Cr: CrN deposition synthesis process are shown in Table 3).
And the eighth step, the characterization of the coating,
characterizing the prepared multi-component multi-layer coating vibration attenuation structure shim according to a coating characteristic characterization method of the multi-component multi-layer coating vibration attenuation structure shim; observing the surface appearance of the deposited cutter pad coating by using a confocal microscope, and ensuring that the surface appearance of the multilayer nano composite coating is uniform and has no obvious geometric defects; observing and analyzing the microstructure of the glass by using an Inlens probe of a scanning electron microscope; for the lamination distribution condition of the multi-element nano composite coating, the cross section imaging characteristics need to be observed, the deposited cutter pad is transversely cut by using wire cut electrical discharge machining, then the cutter pad is embedded in epoxy resin to be made into an embedded piece and is mechanically polished, and final polishing is carried out from coarse sand paper to diamond and silicon dioxide nano particles during polishing; the polished insert is used for confocal microscope observation, the coating is required to be uniformly distributed, and the thickness of each layer and the design standard error are within 0.01 mu m; analyzing the element composition of each coating material by using an in-situ energy dispersion X-ray spectrum analyzer provided with a Si (Li) crystal detector, and carrying out X-ray detection in 3 different position areas in each coating in order to ensure the accuracy of a test result; the surface and cross-sectional microhardness of the coating material was measured by a Vickers microhardness tester, for which the maximum load applied was 10N and the holding time was 10s at a maximum indentation depth of 20. + -.2. mu.m. For cross-sectional microhardness measurements, the maximum applied load was 0.25N, and the retention time was the same at a maximum indentation depth of 2. + -. 0.3. mu.m. In order to ensure the accuracy of the microhardness value test, the average value analysis is respectively carried out at 5 different positions when the microhardness of the surface and the cross section is tested.
The ninth step, the turning test,
the method comprises the steps of carrying out modal testing on the prepared multi-element multi-layer coating vibration attenuation structure cutter pad, measuring a frequency response function and acceleration in a time domain of each cutting stroke (from the time when a blade plows into a workpiece to the time when the blade cuts out the workpiece) by using an accelerometer in a machining process, converting the frequency response function and the acceleration into power spectral density by fast Fourier transform to obtain modal parameters of the coating cutter pad, detecting the abrasion and service life conditions of a turning blade before and after the coating cutter pad is applied by using a cutter detector, and measuring and evaluating the roughness of the turning surface before and after the coating cutter pad is applied by using a confocal microscope.
TABLE 1 plasma cleaning and Pre-Titaning Process parameters
TABLE 2 Multi-layer coating Cu, CuCNxDeposition process parameters of
TABLE 3 Process parameters for the deposition preparation of Cr, CrN of the multilayer coating
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (3)
1. The utility model provides a many first multilayer coating damping structure shim which characterized in that: the material of the substrate (11) is selected from WC as a base and Co and Ni as a binding phase, and the substrate is made of ultrafine grain hard alloy; the tool pad is characterized in that a pre-titanium layer (12) is arranged on the substrate (11), multiple layers of Cu layers (13) and CuCNx layers (14) are sequentially arranged on the pre-titanium layer (12) in a staggered mode, the multiple layers of Cu layers (13) and CuCNx layers (14) form a vibration damping coating of the tool pad, and a CrN layer (16) is arranged on the surface of the CuCNx layer (14) on the top layer.
2. The multi-element multi-layer coating vibration damping structure shim according to claim 1, wherein: and a Cr layer (15) transition layer is arranged between the CuCNx layer (14) and the CrN layer (16) on the top layer.
3. The method for manufacturing the multi-element multi-layer coating vibration damping structure cutter pad according to claim 2, wherein: comprises the following steps of (a) carrying out,
a first step, mechanical cleaning of the substrate (11),
mechanically cleaning the surface of the substrate (11) by a sand blasting process, cleaning all impurities such as grease, dirt, oxide skin and the like on the surface of the substrate (11), and meanwhile enabling the surface to have certain roughness to improve the adhesive force between the pre-titanium layer (12) and the substrate (11), so that the surface roughness of the substrate (11) reaches Sa 2.5 mu m and Sz is 60-100 mu m;
a second step, chemical cleaning of the substrate (11),
scrubbing with alkaline detergent, washing with distilled water, ultrasonic cleaning with isopropanol and acetone for 30 min, and drying with hot air;
thirdly, cleaning the substrate (11) by in-situ high-pressure argon plasma,
applying a bias pulse of-600V, 350kHz on said substrate (11) by passing high energy positive argon ions (Ar)+) Bombarding and carrying out plasma etching on the surface of the substrate (11) to remove oxides on the surface of the substrate (11);
fourthly, cleaning the substrate (11) by low-pressure high-energy pulse magnetron sputtering metal ion plasma,
applying a bias pulse of-600V and 350kHz on the substrate (11), in an argon atmosphere, attracting the high-energy positively-charged sputtered titanium and argon ion flow to the substrate by negative bias, finally leading to the bombardment of high-energy ions on the surface of the substrate, cleaning the substrate (11) and forming a pre-titanium layer (12);
a fifth step of preparing a Cu layer (13) and a CuCNx layer (14),
the multielement multilayer nano composite damping coating of the Cu layer (13) and the CuCNx layer (14) is prepared by combining a high-power double-cathode pulse magnetron sputtering deposition process with a plasma enhanced chemical vapor deposition system. The target material is a copper target, copper atoms are sputtered in a gas environment formed by mixing active nitrogen, acetylene and argon, sputtered metal atoms are ionized due to high-energy collision between electrons and gas ions, molecules and high-energy free radicals, so that a composite material is formed and deposited on a substrate (11), a vacuum chamber is pumped to the background pressure of 0.03Pa, a Cu layer (13) and a CuCNx layer (14) are deposited at the ambient temperature, a 100V forward and reverse pulse lasting for 20 mu s is applied to a cathode when a main pulse after 10 mu s is ended in the whole deposition process of the Cu layer (13) and the CuCNx layer (14), and the Cu layer (13) and the CuCNx layer (14) form a coating of a cutter pad;
sixthly, cleaning the gasket,
cleaning the gasket after the deposition of the multi-layer coating Cu layer (13) and the CuCNx layer (14) by using in-situ high-pressure argon plasma and low-pressure high-energy pulse magnetron sputtering metal ion plasma, and cleaning impurities on the gasket;
the seventh step, preparation of a CrN layer (16) and a Cr layer (15),
preparing a CrN layer (16) and a Cr layer (15) of the coating by combining a high-power double-cathode pulse magnetron sputtering deposition process and a plasma enhanced chemical vapor deposition system;
and the eighth step, the characterization of the coating,
characterizing the prepared multi-component multi-layer coating vibration attenuation structure shim according to a coating characteristic characterization method of the multi-component multi-layer coating vibration attenuation structure shim;
the ninth step, the turning test,
the method comprises the steps of carrying out modal testing on the prepared multi-element multi-layer coating vibration attenuation structure cutter pad, measuring a frequency response function and acceleration in a time domain of each cutting stroke by using an accelerometer in the machining process, converting the frequency response function and the acceleration into power spectral density through fast Fourier transform, obtaining modal parameters of the coating cutter pad, detecting the abrasion and service life conditions of a turning blade before and after the coating cutter pad is applied by using a cutter detector, and measuring and evaluating the roughness of the turning surface before and after the coating cutter pad is applied by using a confocal microscope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111657004.3A CN114293188A (en) | 2021-12-30 | 2021-12-30 | Multi-coating vibration-damping structure cutter pad and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111657004.3A CN114293188A (en) | 2021-12-30 | 2021-12-30 | Multi-coating vibration-damping structure cutter pad and preparation method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114293188A true CN114293188A (en) | 2022-04-08 |
Family
ID=80973564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111657004.3A Pending CN114293188A (en) | 2021-12-30 | 2021-12-30 | Multi-coating vibration-damping structure cutter pad and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114293188A (en) |
Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1380164A (en) * | 1972-01-27 | 1975-01-08 | Brush Switchgear | Electroplating |
| CA2885593A1 (en) * | 2006-05-17 | 2007-11-29 | G & H Technologies Llc | Wear resistant coating |
| CN101198447A (en) * | 2005-06-14 | 2008-06-11 | 吉莱特公司 | Razor blades |
| CN101883652A (en) * | 2007-10-01 | 2010-11-10 | 默克纳公司 | A new product and method for its manufacture within material processing |
| CN102345095A (en) * | 2010-08-04 | 2012-02-08 | 鸿富锦精密工业（深圳）有限公司 | Coating, coated member with coating, and preparation method of coated member |
| CN203018814U (en) * | 2012-11-16 | 2013-06-26 | 常州华锋精密工具有限公司 | Crude and refined milling cutter with surface coating |
| CN104928638A (en) * | 2015-05-21 | 2015-09-23 | 广东工业大学 | AlCrSiN-based multilayer nanometer composite cutter coating layer and preparation method thereof |
| CN107486579A (en) * | 2017-08-30 | 2017-12-19 | 大连远东工具有限公司 | A kind of cutting tool with diversity function coating and preparation method thereof |
| CN107779833A (en) * | 2017-11-07 | 2018-03-09 | 重庆大学 | A kind of composite film coating technique |
| CN108323020A (en) * | 2018-02-02 | 2018-07-24 | 廊坊市高瓷新材料科技有限公司 | The production method of ceramic aluminum substrate |
| CN108950548A (en) * | 2018-08-10 | 2018-12-07 | 成都极星等离子科技有限公司 | Chromium-nitridation chromium composite coat and its application in nano combined cutter |
| CN109913836A (en) * | 2019-04-11 | 2019-06-21 | 湖南工学院 | A kind of method that MF reactive magnetron sputtering prepares TiSiN coating |
| CN111850469A (en) * | 2020-07-20 | 2020-10-30 | 中国科学院兰州化学物理研究所 | DLC resistive electrode in-situ preparation method for large-area microstructure gas detector |
| US20200376565A1 (en) * | 2019-05-31 | 2020-12-03 | Qingdao university of technology | Electrocaloric assisted internal cooling texture turning tool and nanofluid minimal quantity lubrication intelligent working system |
| CN112870456A (en) * | 2021-01-13 | 2021-06-01 | 深圳清华大学研究院 | Cardiovascular implantation instrument wear-resistant coating and preparation method thereof |
-
2021
- 2021-12-30 CN CN202111657004.3A patent/CN114293188A/en active Pending
Patent Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1380164A (en) * | 1972-01-27 | 1975-01-08 | Brush Switchgear | Electroplating |
| CN101198447A (en) * | 2005-06-14 | 2008-06-11 | 吉莱特公司 | Razor blades |
| CA2885593A1 (en) * | 2006-05-17 | 2007-11-29 | G & H Technologies Llc | Wear resistant coating |
| CN101883652A (en) * | 2007-10-01 | 2010-11-10 | 默克纳公司 | A new product and method for its manufacture within material processing |
| US20120121349A1 (en) * | 2007-10-01 | 2012-05-17 | Ragnhild Mihic | New product and method for its manufacture within material processing |
| CN102345095A (en) * | 2010-08-04 | 2012-02-08 | 鸿富锦精密工业（深圳）有限公司 | Coating, coated member with coating, and preparation method of coated member |
| CN203018814U (en) * | 2012-11-16 | 2013-06-26 | 常州华锋精密工具有限公司 | Crude and refined milling cutter with surface coating |
| CN104928638A (en) * | 2015-05-21 | 2015-09-23 | 广东工业大学 | AlCrSiN-based multilayer nanometer composite cutter coating layer and preparation method thereof |
| CN107486579A (en) * | 2017-08-30 | 2017-12-19 | 大连远东工具有限公司 | A kind of cutting tool with diversity function coating and preparation method thereof |
| CN107779833A (en) * | 2017-11-07 | 2018-03-09 | 重庆大学 | A kind of composite film coating technique |
| CN108323020A (en) * | 2018-02-02 | 2018-07-24 | 廊坊市高瓷新材料科技有限公司 | The production method of ceramic aluminum substrate |
| CN108950548A (en) * | 2018-08-10 | 2018-12-07 | 成都极星等离子科技有限公司 | Chromium-nitridation chromium composite coat and its application in nano combined cutter |
| CN109913836A (en) * | 2019-04-11 | 2019-06-21 | 湖南工学院 | A kind of method that MF reactive magnetron sputtering prepares TiSiN coating |
| US20200376565A1 (en) * | 2019-05-31 | 2020-12-03 | Qingdao university of technology | Electrocaloric assisted internal cooling texture turning tool and nanofluid minimal quantity lubrication intelligent working system |
| CN111850469A (en) * | 2020-07-20 | 2020-10-30 | 中国科学院兰州化学物理研究所 | DLC resistive electrode in-situ preparation method for large-area microstructure gas detector |
| CN112870456A (en) * | 2021-01-13 | 2021-06-01 | 深圳清华大学研究院 | Cardiovascular implantation instrument wear-resistant coating and preparation method thereof |
Non-Patent Citations (2)
| Title |
|---|
| FU, Q: ""High dynamic stiffness mechanical structures with nanostructured composite coatings deposited by high power impulse magnetron sputtering"", 《CARBON》, vol. 98, pages 25 * |
| 李沐山: "《世界硬质合金技术进展》", pages: 543 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Huang et al. | Effects of elastic modulus mismatch between coating and substrate on the friction and wear properties of TiN and TiAlN coating systems | |
| Vereschaka et al. | Nano-scale multilayered composite coatings for cutting tools operating under heavy cutting conditions | |
| Bouzakis et al. | Adaption of graded Cr/CrN-interlayer thickness to cemented carbide substrates' roughness for improving the adhesion of HPPMS PVD films and the cutting performance | |
| US7097922B2 (en) | Multi-layered superhard nanocomposite coatings | |
| Lin et al. | Structural, mechanical, and sand erosion properties of TiN/Zr/ZrN multilayer coatings | |
| JP2009006470A (en) | Dlc coated tool | |
| Xie et al. | Influence of Si content on structure and mechanical properties of TiAlSiN coatings deposited by multi-plasma immersion ion implantation and deposition | |
| Alves et al. | Improvement of coating adhesion on cemented carbide tools by plasma etching | |
| Kumar et al. | Characterization of HiPIMS and DCMS deposited TiAlN coatings and machining performance evaluation in high speed dry machining of low and high carbon steel | |
| Huang et al. | Effect of nitrogen flow rate on the microstructure, mechanical and tribological properties of CrAlTiN coatings prepared by arc ion plating | |
| Mouralova et al. | Quality of surface and subsurface layers after WEDM aluminum alloy 7475-T7351 including analysis of TEM lamella | |
| Chen et al. | Structural toughness and interfacial effects of multilayer TiN erosion-resistant coatings based on high strain rate repeated impact loads | |
| KR20140065447A (en) | Coated cutting tool | |
| CN103732785B (en) | Cathodic arc deposition | |
| CN114293188A (en) | Multi-coating vibration-damping structure cutter pad and preparation method thereof | |
| Poursaiedi et al. | Effect of coating surface finishing on fatigue behavior of C450 steel CAPVD coated with (Ti, Cr) N | |
| Sordetti et al. | Influence of the surface finishing on the wear behaviour of cemented carbides worked by Electrical Discharge Machining | |
| Meijer et al. | Modification of Surface and Sub-Surface Conditions of Cemented Carbide by Pressurized Air Wet Abrasive Jet Machining for PVD Coatings | |
| CN106148904A (en) | A kind of nano-stack CrN plated film and its preparation method and application | |
| Wu et al. | Fretting wear behavior of Ti/TiN multilayer film on uranium surface under various displacement amplitudes | |
| Wang et al. | Effect of pulsed electromagnetic frequency on the microstructure, wear and solid erosion resistance of CrAlN coatings deposited by arc ion plating | |
| Sharma et al. | Solid particle erosion of aluminium nitride thin film deposited by radio frequency magnetron sputtering technique on AA6061 | |
| Mativenga et al. | Micro tooling design and manufacturing | |
| Tian et al. | Optimization of structure and properties of hydrogen-containing DLC films by pulse auxiliary anode duty ratio | |
| Totik | Investigation of the adhesion of NbN coatings deposited by pulsed dc reactive magnetron sputtering using scratch tests |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |