CN114279699A - Ultrahigh vacuum pneumatic valve fault detection system and method - Google Patents
Ultrahigh vacuum pneumatic valve fault detection system and method Download PDFInfo
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Abstract
The invention relates to a fault detection system and method for an ultrahigh vacuum pneumatic valve, which comprises the following steps: an EPICS layer at the uppermost layer, a control layer in the middle and a device layer at the bottom; the device layer is provided with an ultrahigh vacuum valve and a multi-channel sensor of vibration acceleration, voltage, air pressure and temperature to be monitored on a beam line station; the control layer comprises a data acquisition system module and an input/output controller IOC; the EPICS layer comprises a database, a data analysis module, a data processing module, a system rule module, an OPI and a state display and alarm module; and (3) establishing a Channel Access mechanism of Channel Access (CA) on a TCP/IP protocol by the OPI and the IOC of the EPICS layer according to a client-server model, realizing the real-time dynamic database sharing of the IOC of the control layer, and carrying out online analysis on the data by utilizing the real-time database. The vibration waveform and the opening and closing time of the switching motion of the ultrahigh vacuum pneumatic valve are adopted to pre-judge the performance health state of the valve body and give a trend graph of the state of the valve body, so that the operation and maintenance level of the critical equipment of the beam line is improved.
Description
Technical Field
The invention relates to a fault detection system and method for an ultrahigh vacuum pneumatic valve, belonging to the ultrahigh vacuum and valve fault diagnosis and detection technology.
Background
In the synchrotron radiation device, the two ends of a light beam line distributed along the outer side of an electronic storage ring are respectively connected with the storage ring and a user experiment station which are bridges and ligaments of the storage ring and the user experiment station. The safety state of the beam line station equipment is an important guarantee for normal experiment of the experiment station and safe operation of the storage ring. The vacuum system of the beam line station is communicated with the storage ring vacuum system, in order to prevent the beam line station from exposing the atmosphere and influencing the normal operation of the storage ring, when vacuum leakage occurs at a certain position of the line station, the line station and the storage ring are effectively isolated, the vacuum of a leakage source and other sections of the line station are isolated, according to the length and the actual requirements of the line station, each beam line station comprises 3-10 ultrahigh vacuum pneumatic gate valves used for cutting off or switching on the air flow of a beam line vacuum pipeline, the ultrahigh vacuum pneumatic valve is an ultrahigh vacuum standard pneumatic valve of 10.8 series DN63 of Switzerland VAT company, the air leakage rate is less than 1 x 10-9mbar L.s-1, and the closing and opening time is 1 s. As shown in fig. 1, the main working principle of the valve is to use compressed air as power, change the direction of the air path through an electromagnetic directional valve, and push a cylinder piston to drive a valve plate to move up and down, thereby realizing the opening or closing of the valve and realizing the air flow isolation of different sections of vacuum pipelines of the beam line station. When the light beam line station is used for light experiments, the ultrahigh vacuum valve can be driven to open by the voltage of 220 or 24V loaded on the electromagnetic directional valve and the air pressure of 0.6MPa, and the valve is closed when the light is used up or the controlled vacuum point difference of the valve interlocking is controlled.
In actual beam line operation, the working condition of the ultrahigh vacuum pneumatic valve that the air pressure or the voltage does not meet the requirements occurs, and the valve cannot be opened or closed effectively. If this condition cannot be detected in time, the normal operation of the entire beam line and thus the storage ring will be affected in the event of a vacuum leak. In addition, various factors such as overheating and old damage of an electromagnetic coil in the electromagnetic reversing valve on the side surface of the ultrahigh vacuum valve top cause the valve to be incapable of acting, and are most likely to occurIs detected. For the failure of the valve body, the black box is a black box at present, a set of quick and effective method for carrying out failure alarm and early warning on the black box is not provided, generally, the components are directly replaced after a large problem occurs, then the vacuum is recovered, long time is needed, and the light supply time of the light beam line and user experiments are seriously influenced. In the light source in the country of the preliminary investigation, the monitoring of the wire harness control system is mostly limited to the monitoring of the vacuum degree and the valve position[1-4]The monitoring of the comprehensive state of the ultrahigh vacuum pneumatic valve is very little.
Generally speaking, mechanisms such as comprehensive monitoring, fault alarming and early warning of multiple states of the ultra-high vacuum valve of the optical beam line are relatively lacked at present. Any fault of the ultrahigh vacuum valve needs to be diagnosed and maintained afterwards, which wastes time and labor and affects the light efficiency of the beam line and the satisfaction degree of users.
Researchers at Beijing satellite environmental engineering research institute carry out displacement and sound-based monitoring method research on the high vacuum valve ZBS-800, and carry out fault early warning on the state of the valve. The method requires that the displacement sensor is arranged on the inner wall of the valve seat, and the installation requirement is strict, so that the surfaces of a laser emitter and a receiving element of the sensor are parallel to the surface of a sealing valve plate of the valve, and the fixation reliability between the sensor and the valve seat is also required. And the online super high vacuum valve on the light beam line is all in sealed super vacuum pipeline, can't install displacement sensor, even newly-built line station also need avoid as far as possible to install the sensor at the disk seat inner wall, can cause vacuum pollution on the one hand, on the other hand also inconvenient later stage maintain change sensor etc..
And the Japanese Spring-8 synchrotron radiation related beam line starts to simulate the beam line vacuum blasting atmosphere to generate shock waves, and the closing time of the fast valve FCS and the ultrahigh vacuum valve PV is monitored to design a safer beam line system. The main method is to insert a vacuum element, so that the propagation time of the shock wave is effectively delayed, the propagation of the shock wave is delayed before the fast valve FCS is completely isolated, and the good performance of the fast valve FCS system is realized. The method is used for maximizing the performance of the equipment, improving the reliability of the beam line equipment and ensuring the safety of the beam line. But requires early intervention, appropriate for the initial stages of beam line design, and it is difficult to re-insert the vacuum elements for each beam line that is already running online.
The performance monitoring, fault diagnosis and fault early warning of the online equipment are effective methods for reducing fatigue use of the equipment and prolonging service life, and are judgment bases for converting operation and maintenance concepts from after maintenance to before maintenance.
Disclosure of Invention
The invention solves the problems: the fault detection system and the fault detection method for the ultrahigh vacuum pneumatic valve overcome the defects of online monitoring and rapid fault diagnosis of the ultrahigh vacuum valve of a beam line in the prior art, under the condition of normal light utilization experiments of a beam line station, the detection system can be installed at the top end of the ultrahigh vacuum valve or the side surface of an electromagnetic reversing valve of the ultrahigh vacuum valve, various parameters of the ultrahigh vacuum gate valve including working environment, working conditions, switch closing time and vibration acceleration waveform of a switch are monitored in real time, the working and performance states of the ultrahigh vacuum valve are rapidly judged through analysis and characteristic extraction of data, and the purpose of rapidly alarming conventional faults of the ultrahigh vacuum valve at a local or remote terminal is achieved. Meanwhile, based on the established full-period ultrahigh vacuum valve multi-parameter database, the vibration waveform and the opening and closing time of the switching motion of the ultrahigh vacuum pneumatic valve are adopted to pre-judge the performance health state of the valve body and give a trend graph of the state of the valve body, so that the operation and maintenance level of the key equipment of the beam line is improved.
The technical scheme of the invention is as follows: detection system of ultrahigh vacuum valve includes: the system comprises an EPICS layer, a control layer and an equipment layer, wherein the equipment layer at the bottom layer is ultrahigh vacuum valve equipment on a beam line station and multi-channel sensor signals of vibration, voltage, air pressure and temperature of the ultrahigh vacuum valve equipment;
the control layer comprises a data acquisition system module and an input/output controller IOC; the data acquisition system module comprises a multi-channel sensor signal input module for vibration acceleration, voltage, air pressure and temperature of the valve, an A/D conversion, an isolation circuit, a Micro Control Unit (MCU) and a state display and communication module; the input module collects signals of a plurality of sensors of the ultrahigh vacuum valve, the signals are conditioned and converted by A/D and are sent to the MCU through the SPI, and the MCU analyzes and processes digital signals after A/D conversion and transmits the digital signals to the IOC through the isolation circuit; the IOC stores vibration acceleration, voltage, air pressure, temperature state information and alarm information of the ultrahigh vacuum valve in the opening and closing process into a real-time database, and data records of the IOC comprise vibration waveform records, working condition voltage and air pressure records, temperature and humidity records of a working environment and alarm records of the ultrahigh vacuum gate valve in different positions of a beam line station in the opening and closing process; data in the IOC database can be shared, and any computer of the OPI or the client can be accessed;
the EPICS layer is the top layer of the system and is a system software platform and comprises a database, a data analysis module, a data processing module, a system rule module, an OPI and a state display and alarm module. The OPI and IOC of the EPICS layer establish a Channel Access mechanism of Channel Access (CA) on a TCP/IP protocol according to a client-server model, so that real-time dynamic database sharing of the control layer IOC is realized, and the data is analyzed on line by utilizing the real-time database. The data analysis module is used for generating a judgment rule of system fault diagnosis after the vibration acceleration data of the database are transformed and subjected to characteristic analysis, designing a system rule for judging the fault state of the equipment by combining engineering experience, storing the rule in a special system rule module, and feeding back the latest system rule read from the system rule module to the data processing module; the data processing module is used for processing the acquired data according to the acquired rule, extracting the state of the corresponding valve, mainly extracting the characteristic of the valve switching time by monitoring the vibration signal of the ultrahigh vacuum valve in the motion process, establishing a beam line ultrahigh vacuum valve intrinsic switching time characteristic database and monitoring the full-cycle data of the service life of the ultrahigh vacuum valves of different types; according to the characteristics of vibration acceleration signals in the valve switch motion process and the change of the switch time, the health trend of the online valve is quickly judged, certain early warning is given, and the trend early warning of the valve body performance health state is realized; after data processing, transmitting the acquired state and alarm information of the ultrahigh vacuum valve to a user interface OPI through a local area network, checking and analyzing real-time data and historical data information related to the corresponding fault by a user, and visually displaying the information in a chart or curve form so as to facilitate operators to confirm the validity of related fault alarm and early warning information and further analyze and process the information; the OPI and state display and alarm module can alarm and display conventional faults of the ultrahigh vacuum gate valve on the optical beam line in time, wherein the conventional faults comprise abnormal working voltage, abnormal air pressure, damage to an electromagnetic coil and the like of the valve; the method is characterized in that timely conventional fault alarming is carried out on insufficient air pressure, insufficient voltage and solenoid coil aging loss on the OPI, various information on the OPI can be checked on any computer on a local area network, meanwhile, the system rule is properly modified according to the state information of the ultrahigh vacuum valve fed back by the OPI, and fault data which are not in the rule are added into the system rule under the condition of misjudgment or missing judgment, so that the judgment rule is continuously perfected and updated, and effective fault judgment and early warning are realized.
The invention discloses a fault detection method for an ultrahigh vacuum pneumatic valve, which comprises the following steps:
firstly, monitoring various signals of vibration, voltage, air pressure and temperature on line by an ultrahigh vacuum valve on an optical beam line so as to obtain comprehensive data information of the state of the ultrahigh vacuum valve;
secondly, conditioning and A/D conversion are carried out on various acquired signals in a data acquisition module, the signals are sent to an MCU through an SPI interface, and the MCU analyzes and processes digital signals after A/D conversion and transmits the digital signals to an IOC through an isolation circuit; the IOC stores vibration acceleration, voltage, air pressure, temperature state information and alarm information of the ultrahigh vacuum valve in the opening and closing process into a real-time database, and establishes a comprehensive state database of the ultrahigh vacuum gate valve and a valve intrinsic opening and closing time characteristic database under the architecture of an Experimental Physics and Industrial Control System (EPICS) to realize monitoring of full-cycle data of service lives of different types of ultrahigh vacuum valves; the database comprises various data records, mainly including vibration waveform records, working condition voltage and air pressure records, temperature and humidity records of a working environment and alarm records of the ultrahigh vacuum gate valve opening and closing process at different positions of the beam line station; meanwhile, the data in the database can be shared and can be accessed on any computer on the local area network;
and thirdly, performing online analysis processing on the data by using a database. The method realizes the online function of timely alarming for the conventional fault of the ultrahigh vacuum valve, researches the relationship between the vibration signal characteristics of the opening and closing process of the ultrahigh vacuum valve and the fault of the body of the ultrahigh vacuum valve and the relationship between the valve opening and closing time and the fault and service life of the body, and establishes a fault diagnosis and alarm mechanism of the ultrahigh vacuum valve, so that the fault diagnosis of the ultrahigh vacuum valve of the key equipment of the beam line is more efficient, the alarm is more timely, and the operation and maintenance capacity of the beam line is improved. The data analysis is used for generating a judgment rule for system fault diagnosis after the vibration acceleration data of the database are transformed and subjected to characteristic analysis, designing a system rule for judging the fault state of the equipment by combining engineering experience, and feeding back the latest system rule to the data processing module; the data processing module is used for processing the acquired data according to the acquired rule, extracting the state of the corresponding valve, mainly extracting the characteristic of the valve switching time by monitoring the vibration signal of the ultrahigh vacuum valve in the motion process, establishing a beam line ultrahigh vacuum valve intrinsic switching time characteristic database and monitoring the full-cycle data of the service life of the ultrahigh vacuum valves of different types; according to the characteristics of vibration acceleration signals in the valve switch motion process and the change of the switch time, the health trend of the online valve is quickly judged, certain early warning is given, and the trend early warning of the valve body performance health state is realized; after data processing, transmitting the acquired state and alarm information of the ultrahigh vacuum valve to a user interface OPI through a local area network, checking and analyzing real-time data and historical data information related to the corresponding fault by a user, and visually displaying the information in a chart or curve form so as to facilitate operators to confirm the validity of related fault alarm and early warning information and further analyze and process the information; the OPI and state display and alarm module can alarm and display conventional faults of the ultrahigh vacuum gate valve on the optical beam line in time, wherein the conventional faults comprise abnormal working voltage, abnormal air pressure, damage to an electromagnetic coil and the like of the valve; the method is characterized in that timely conventional fault alarming is carried out on insufficient air pressure, insufficient voltage and solenoid coil aging loss on the OPI, various information on the OPI can be checked on any computer on a local area network, meanwhile, the system rule is properly modified according to the state information of the ultrahigh vacuum valve fed back by the OPI, and fault data which are not in the rule are added into the system rule under the condition of misjudgment or missing judgment, so that the judgment rule is continuously perfected and updated, and effective fault judgment and early warning are realized.
The working condition of the ultrahigh vacuum pneumatic valve is monitored on line: and timely alarming when the voltage, the air pressure and the temperature reach the conventional faults. The vibration acceleration data waveform of the opening and closing of the ultrahigh vacuum pneumatic valve is monitored on line and compared with original data (early normal data), for example, under the same air pressure and voltage, the valve opening and closing time is obviously longer than normal time or set threshold time, the abnormal performance of the valve body can be predicted, and the vacuum valve can be repaired or replaced in time. On the other hand, the valve can be initially checked, the built off-line system is utilized to measure relevant parameters such as the opening and closing action time and the vibration acceleration of the valve movement process before the valve is used for constructing the ultrahigh vacuum valve purchased by a new beam line, the measured vibration acceleration is compared with the technical index parameters, whether the measured vibration acceleration meets the requirements or not is judged, and the defects of performance state detection of the imported ultrahigh vacuum valve are overcome. Furthermore, a beam line ultrahigh vacuum valve intrinsic switch time characteristic database can be established to monitor the full-period data of the service lives of different types of ultrahigh vacuum valves.
Under the condition of normal light use experiments of a beam line station, various parameters of the ultrahigh vacuum valve including working environment, working conditions, switch closing time and vibration waveform of the switch are monitored, certain analysis and characteristic extraction are carried out on data, the working and performance states of the ultrahigh vacuum valve are quickly judged, the conventional fault quick alarm of the ultrahigh vacuum valve is achieved, a full-period ultrahigh vacuum valve multi-parameter database is established, basic diagnosis and prejudgment on the performance state of a valve body are preliminarily attempted by using the vibration waveform of valve switching motion and the opening and closing time, and therefore the operation and maintenance level of critical equipment of the beam line is improved.
In order to improve the operation and maintenance level of the ultrahigh vacuum pneumatic valve of the beam line key equipment, the working and performance states of the ultrahigh vacuum valve are quickly judged by monitoring various parameters of the ultrahigh vacuum valve, including the working environment, the working condition, the switch closing time and the vibration waveform of a switch, and analyzing data and extracting characteristics. Meanwhile, a multi-parameter database of the ultrahigh vacuum pneumatic valve in the whole period can be established, and the state of the valve body is pre-judged by adopting the vibration waveform and the opening and closing time of the switching motion of the ultrahigh vacuum pneumatic valve. 1. Rapid alarm of conventional faults; 2. the trend early warning of the valve body performance health state; 3. performing initial valve inspection, measuring the opening and closing action time and the vibration acceleration of the valve in the valve movement process before using the ultrahigh vacuum valve purchased by constructing a new beam line, comparing the measured vibration acceleration with technical index parameters, and quickly judging whether the valve opening and closing time index meets the requirement; 4. and establishing a beam line ultrahigh vacuum valve intrinsic switch time characteristic database, and monitoring the full-cycle data of the service lives of the ultrahigh vacuum valves of different types.
Compared with the prior art, the invention has the advantages that:
(1) rapid alarm of routine failure. Is lacking at present. The technology monitors the voltage, the air pressure, the temperature and the like of the ultrahigh vacuum valve on line in real time, and can carry out timely fault alarm on insufficient air pressure, insufficient voltage and damage of the electromagnetic coil.
(2) And (4) early warning the trend of the valve body performance health state. The existing ultrahigh vacuum valve is lack of monitoring of the online comprehensive state of the beam line ultrahigh vacuum valve, state trend early warning and the like. The method comprises the steps of extracting the characteristics of valve switching time through monitoring vibration signals of the ultrahigh vacuum valve in the movement process, rapidly judging the health trend of the online valve according to the change of the valve switching time, and giving certain early warning.
(3) And (4) performing initial valve inspection, measuring the opening and closing action time and the vibration acceleration of the valve movement process before use of the ultrahigh vacuum valve purchased by constructing a new optical beam line, comparing the measured vibration acceleration with technical index parameters, and quickly judging whether the valve opening and closing time index meets the requirement. The technology can effectively measure the switching time, thereby comparing with technical index parameters, quickly judging whether the valve switching time index meets the requirements, and simultaneously distinguishing the difference between valves of the same model.
(4) And establishing a beam line ultrahigh vacuum valve intrinsic switch time characteristic database, and monitoring the full-cycle data of the service lives of the ultrahigh vacuum valves of different types. The prior art cannot establish an ultrahigh vacuum valve state database due to the lack of corresponding detection means. The technology can collect the vibration acceleration of the ultrahigh vacuum valve in the motion process on line for a long time and extract and establish a characteristic database of the valve opening and closing time, thereby realizing the full-period data monitoring of the service life of the ultrahigh vacuum valves of different types.
Drawings
FIG. 1 is a schematic view of a valve structure;
FIG. 2 is a schematic view of the valve closure internal structure;
FIG. 3 is a schematic view of the open interior of the valve;
FIG. 4 is a block diagram of the ultra-high vacuum pneumatic valve detection system of the present invention.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and examples.
The structural composition of the ultra-high vacuum valve shown in fig. 1 mainly comprises a valve position indicator 1, an electromagnetic directional valve 2 for driving the valve to move, and a gate plate 3 for driving the valve to move. As shown in fig. 2 and 3, the internal structure of the ultra-high vacuum valve mainly comprises 1 door, 2 counter plates, 3 leaf springs, 4 pairs of balls, 5 ball claws, 6 valve seals and 7 spring stoppers. The main working principle of the device is that compressed air is used as power, 220 or 24V voltage and 0.6MPa air pressure are loaded on an electromagnetic directional valve, the direction of an air path is changed through the electromagnetic directional valve, and a cylinder piston is pushed to drive a valve plate to move up and down, so that the valve is opened or closed, and the air flow isolation of different sections of a vacuum pipeline of a beam line station is realized. After the electromagnetic directional valve 2 in the figure 1 is connected with gas, the power is supplied, so that the gas path of the electromagnetic directional valve is changed, a cylinder piston of the electromagnetic directional valve is pushed to move upwards, a spring stop block from 1 door to 7 doors in the figure 2 is acted, and a valve plate is driven to move upwards under the action, so that the position state in the figure 3 is achieved; after the power failure of the electromagnetic directional valve 2 in fig. 1, the gas circuit of the electromagnetic directional valve 2 is changed again, the cylinder piston of the electromagnetic directional valve is pushed to move downwards, the spring stop blocks from 1 door to 7 in fig. 3 are acted, and the valve plate is driven to move downwards under the action, so that the position state in fig. 2 is achieved.
As shown in FIG. 4, the detection system of the ultra-high vacuum valve of the present invention comprises three layers, namely an EPICS layer, a control layer and an equipment layer, wherein the bottom equipment layer is mainly the ultra-high vacuum valve equipment on a beam line station and a plurality of sensor signals of vibration, voltage, air pressure and temperature which need to be monitored;
the control layer includes: a data acquisition system module and an input/output controller IOC; the data acquisition system module comprises a multi-channel sensor signal input module for vibration acceleration, voltage, air pressure and temperature of the valve, an A/D conversion, an isolation circuit, a Micro Control Unit (MCU) and a state display and communication module; the input module collects signals of a plurality of sensors of the ultrahigh vacuum valve, the signals are conditioned and converted by A/D and are sent to the MCU through the SPI, and the MCU analyzes and processes digital signals after A/D conversion and transmits the digital signals to the IOC through the isolation circuit; the IOC stores vibration acceleration, voltage, air pressure, temperature state information and alarm information of the ultrahigh vacuum valve in the opening and closing process into a real-time database, and data records of the IOC comprise vibration waveform records, working condition voltage and air pressure records, temperature and humidity records of a working environment and alarm records of the ultrahigh vacuum gate valve in different positions of a beam line station in the opening and closing process; data in the IOC database can be shared and can be accessed on an OPI on an EPICS layer or any computer of a client;
and the EPICS layer is a system software platform of EPICS and comprises a database, a data analysis module, a data processing module, a system rule module, an OPI and a state display and alarm module. And (3) establishing a Channel Access mechanism of Channel Access (CA) on a TCP/IP protocol by the OPI and the IOC of the EPICS layer according to a client-server model, realizing the real-time dynamic database sharing of the IOC of the control layer, and carrying out online analysis on the data by utilizing the real-time database. The data analysis module is used for generating a judgment rule of system fault diagnosis after the vibration acceleration data of the database are transformed and subjected to characteristic analysis, designing a system rule for judging the fault state of the equipment by combining engineering experience, storing the rule in a special system rule module, and feeding back the latest system rule read from the system rule module to the data processing module; the data processing module is used for processing the acquired data according to the acquired rule, extracting the state of the corresponding valve, mainly extracting the characteristic of the valve switching time by monitoring the vibration signal of the ultrahigh vacuum valve in the motion process, establishing a beam line ultrahigh vacuum valve intrinsic switching time characteristic database and monitoring the full-cycle data of the service life of the ultrahigh vacuum valves of different types; according to the characteristics of vibration acceleration signals in the valve switch motion process and the change of the switch time, the health trend of the online valve is quickly judged, certain early warning is given, and the trend early warning of the valve body performance health state is realized; after data processing, transmitting the acquired state and alarm information of the ultrahigh vacuum valve to a user interface OPI through a local area network, checking and analyzing real-time data and historical data information related to the corresponding fault by a user, and visually displaying the information in a chart or curve form so as to facilitate operators to confirm the validity of related fault alarm and early warning information and further analyze and process the information; the OPI and state display and alarm module can alarm and display conventional faults of the ultrahigh vacuum gate valve on the optical beam line in time, wherein the conventional faults comprise abnormal working voltage, abnormal air pressure, damage to an electromagnetic coil and the like of the valve; the method is characterized in that timely conventional fault alarming is carried out on insufficient air pressure, insufficient voltage and solenoid coil aging loss on the OPI, various information on the OPI can be checked on any computer on a local area network, meanwhile, the system rule is properly modified according to the state information of the ultrahigh vacuum valve fed back by the OPI, and fault data which are not in the rule are added into the system rule under the condition of misjudgment or missing judgment, so that the judgment rule is continuously perfected and updated, and effective fault judgment and early warning are realized.
The detection method of the invention is concretely realized as follows:
(1) and acquiring data of the voltage signal, the air pressure signal, the temperature and the vibration acceleration signal in the opening and closing process of the ultrahigh vacuum valve.
(2) And processing and recording various acquired data.
(3) And a comprehensive state database of the valve is established under the EPICS platform, so that remote sharing of data is realized. The data analysis center can analyze the data, generate a judgment rule of system fault diagnosis, adjust the system rule according to the actual equipment state information and the OPI feedback information, and the data processing center processes the data according to the acquired rule.
(4) The alarm can be timely and effectively carried out when the conventional fault of the ultrahigh vacuum valve occurs.
(5) And establishing a beam line ultrahigh vacuum valve intrinsic switch time characteristic database, and monitoring the full-cycle data of the service lives of the ultrahigh vacuum valves of different types.
(6) The relation between the vibration acceleration signal characteristics of the ultrahigh vacuum valve in the opening and closing process and the body fault of the ultrahigh vacuum valve, the relation between the valve opening and closing time and the body fault and service life and the like are researched.
Although particular embodiments of the present invention have been described above, it will be appreciated by those skilled in the art that these are merely examples and that many variations or modifications may be made to these embodiments without departing from the principles and implementations of the invention, the scope of which is therefore defined by the appended claims.
Claims (2)
1. An ultrahigh vacuum pneumatic valve fault detection system, comprising: an EPICS layer at the uppermost layer, a control layer in the middle and a device layer at the bottom;
the device layer is provided with an ultrahigh vacuum valve and a multi-channel sensor of vibration acceleration, voltage, air pressure and temperature to be monitored on the beam line station;
the control layer comprises a data acquisition system module and an input/output controller IOC; the data acquisition system module comprises a multi-channel sensor signal input module, an A/D conversion, an isolation circuit, a Micro Control Unit (MCU) and a state display and communication module; the input module collects signals of the ultrahigh vacuum valve multi-path sensor, the signals are sent to the MCU through the SPI interface after being conditioned and A/D converted, and the MCU analyzes and processes digital signals after A/D conversion and transmits the digital signals to the IOC through the isolation circuit; the IOC stores the state information of vibration acceleration, voltage, air pressure and temperature of the ultrahigh vacuum valve in the opening and closing process into a real-time database, and the data records of the IOC comprise vibration waveform records, working condition voltage and air pressure records, working environment temperature records and alarm records of the ultrahigh vacuum gate valve in different positions of a beam line station in the opening and closing process; data in the IOC database can be shared, and can be accessed on any computer of an operator interface (OPI) or an operator interface on an EPICS layer or a client;
the EPICS layer is a system software platform of EPICS and comprises a database, a data analysis module, a data processing module, a system rule module, an OPI and a state display and alarm module; the OPI and the IOC of the EPICS layer establish a Channel Access mechanism of Channel Access (CA) on a TCP/IP protocol according to a client-server model, so that the real-time dynamic database sharing of the IOC of the control layer is realized, and the data is analyzed on line by utilizing the real-time database;
the data analysis module is used for generating a judgment rule of system fault diagnosis after the vibration acceleration data of the database are transformed and subjected to characteristic analysis, designing a system rule for judging the fault state of the equipment by combining engineering experience, storing the rule in a special system rule module, and simultaneously feeding back the latest system rule read from the system rule module to the data processing module;
the system rule module stores the judgment rule generated by the data analysis module and the set latest fault state judgment rule;
the data processing module is used for processing the acquired data according to the acquired rule, extracting the state of the corresponding valve, mainly extracting the characteristic of the valve switching time by monitoring the vibration signal of the ultrahigh vacuum valve in the motion process, establishing a beam line ultrahigh vacuum valve intrinsic switching time characteristic database and monitoring the full-cycle data of the service life of the ultrahigh vacuum valves of different types; according to the characteristics of vibration acceleration signals in the valve switch motion process and the change of the switch time, the health trend of the online valve is quickly judged, certain early warning is given, and the trend early warning of the valve body performance health state is realized; after data processing, transmitting the acquired state and alarm information of the ultrahigh vacuum valve to a user interface OPI through a local area network, checking and analyzing real-time data and historical data information related to the corresponding fault by a user, and visually displaying the information in a chart or curve form so as to facilitate operators to confirm the validity of related fault alarm and early warning information and further analyze and process the information;
the OPI and state display and alarm module can alarm and display conventional faults of the ultrahigh vacuum gate valve on the optical beam line in time, wherein the conventional faults comprise abnormal working voltage and air pressure of the valve and damage of an electromagnetic coil; the method is characterized in that timely conventional fault alarming is carried out on insufficient air pressure, insufficient voltage and solenoid coil aging loss on the OPI, various information on the OPI can be checked on any computer on a local area network, meanwhile, the system rule is properly modified according to the state information of the ultrahigh vacuum valve fed back by the OPI, and fault data which are not in the rule are added into the system rule under the condition of misjudgment or missing judgment, so that the judgment rule is continuously perfected and updated, and effective fault judgment and early warning are realized.
2. The ultrahigh vacuum pneumatic valve fault detection method is characterized by comprising the following steps of:
firstly, monitoring various signals of vibration, voltage, air pressure and temperature on line by an ultrahigh vacuum valve on an optical beam line so as to obtain comprehensive data information of the state of the ultrahigh vacuum valve;
secondly, conditioning and A/D conversion are carried out on various acquired signals in a data acquisition module, the signals are sent to an MCU through an SPI interface, and the MCU analyzes and processes digital signals after A/D conversion and transmits the digital signals to an IOC through an isolation circuit; the IOC stores vibration acceleration, voltage, air pressure, temperature state information and alarm information of the ultrahigh vacuum valve in the opening and closing process into a real-time database, and establishes a comprehensive state database of the ultrahigh vacuum gate valve and a valve intrinsic opening and closing time characteristic database under the architecture of an Experimental Physics and Industrial Control System (EPICS) to realize monitoring of full-cycle data of service lives of different types of ultrahigh vacuum valves; the database comprises various data records, mainly including vibration waveform records, working condition voltage and air pressure records, temperature and humidity records of a working environment and alarm records of the ultrahigh vacuum gate valve opening and closing process at different positions of the beam line station; meanwhile, the data in the database can be shared and can be accessed on any computer on the local area network;
and thirdly, performing online analysis processing on the data by using a database. The method has the advantages that the online function of timely alarming for the conventional faults of the ultrahigh vacuum valve is realized, the relation between the vibration signal characteristics of the opening and closing process of the ultrahigh vacuum valve and the body fault of the ultrahigh vacuum valve and the relation between the valve opening and closing time and the body fault and service life of the ultrahigh vacuum valve are determined, and the fault diagnosis and alarm mechanism of the ultrahigh vacuum valve is established, so that the fault diagnosis of the ultrahigh vacuum valve of the key equipment of the beam line is more efficient, the alarming is more timely, and the operation and maintenance capacity of the beam line is improved; the data analysis is to generate a judgment rule of system fault diagnosis after the vibration acceleration data of the database is transformed and subjected to characteristic analysis, the system rule of judging the fault state of the equipment is designed by combining engineering experience, the acquired system rule is fed back to the data processing, the data processing is used for processing the acquired data according to the acquired rule, the state of the corresponding valve is extracted, the characteristic of the valve switching time is extracted mainly by monitoring a vibration signal of the ultrahigh vacuum valve in the motion process, the health trend of the online valve is quickly judged according to the change of the valve switching time, early warning is given, and the trend early warning of the valve body performance health state is realized; after data processing, the acquired state and alarm information of the ultrahigh vacuum valve are transmitted to a user interface OPI through a local area network, a user checks and analyzes real-time data and historical data information related to corresponding faults so as to facilitate operators to confirm the validity of related fault alarm and early warning information, further analysis and processing are carried out, timely conventional fault alarm is carried out on insufficient air pressure, insufficient voltage and electromagnetic coil ageing on the OPI, meanwhile, according to the state information of the ultrahigh vacuum valve fed back by the OPI, appropriate modification is carried out on system rules, and under the condition of misjudgment or missing judgment, fault data which are not in the rules are added into the system rules, so that the judgment rules are continuously perfected, and effective fault judgment and early warning are realized.
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