CN114279699A - Ultrahigh vacuum pneumatic valve fault detection system and method - Google Patents

Abstract

The invention relates to an ultra-high vacuum pneumatic valve fault detection system and method, comprising: an uppermost EPICS layer, a middle control layer, and a bottom equipment layer; multi-channel sensors of vibration acceleration, voltage, air pressure and temperature; control layer includes data acquisition system module and input/output controller IOC; EPICS layer includes database, data analysis module, data processing module, system rule module, OPI and status Display and alarm module; OPI and IOC of the EPICS layer establish a channel access mechanism of Channel Access (CA) on the TCP/IP protocol according to the client-server model, realize the sharing of the real-time dynamic database of the IOC of the control layer, and use the real-time database to Data are analyzed online. The vibration waveform of the switching motion of the ultra-high vacuum pneumatic valve and the opening and closing time are used to predict the performance and health status of the valve body and give the trend diagram of the valve body state, so as to improve the operation and maintenance level of the key equipment of the beam line.

Description

A system and method for fault detection of ultra-high vacuum pneumatic valve

technical field

The invention relates to an ultra-high vacuum pneumatic valve fault detection system and method, belonging to ultra-high vacuum, valve fault diagnosis and detection technology.

Background technique

In the synchrotron radiation device, the two ends of the beam line distributed along the outer side of the electron storage ring are respectively connected to the storage ring and the user experiment station, which is the bridge and link between the two. The safety status of the beamline station equipment is an important guarantee for the normal experiment of the experimental station and the safe operation of the storage ring. The vacuum system of the beamline station is connected with the vacuum system of the storage ring. In order to prevent the beamline station from being exposed to the atmosphere and affecting the normal operation of the storage ring, when a vacuum leak occurs somewhere in the line station, the line station and the storage ring should be effectively isolated to isolate the leakage source. According to the length of the line station and the actual demand, each beamline station contains 3-10 ultra-high vacuum pneumatic gate valves, which are used to cut off or connect the air flow of the beamline vacuum pipeline. The main model of the high vacuum pneumatic valve is the 10.8 series DN63 ultra-high vacuum standard pneumatic valve of the Swiss VAT company. The air leakage rate is less than 1*10-9mbar.L.s-1, and the closing and opening time is 1s. The functional principle and physical diagram of the valve shown in Figure 1, its main working principle is to use compressed air as power, change the direction of the air path through the electromagnetic reversing valve, push the cylinder piston to drive the valve plate to move up and down, so as to realize the opening of the valve Or closed, to achieve airflow isolation for different sections of the vacuum pipeline of the beamline station. When the beamline station is used for light experiment, by loading the electromagnetic reversing valve with 220 or 24V voltage and 0.6MPa air pressure, the ultra-high vacuum valve can be driven to open, and the valve will be closed after the end of the exhaustion or the controlled vacuum point difference of the valve interlock.

In the actual beamline operation, the working conditions of the ultra-high vacuum pneumatic valve did not meet the requirements of air pressure or voltage, and the valve could not be effectively opened or closed. If this situation cannot be found in time, once a vacuum leak occurs, it will affect the normal operation of the entire beamline and even the storage ring. In addition, various factors such as overheating and aging of the electromagnetic coil inside the electromagnetic directional valve on the top side of the ultra-high vacuum valve cause the valve to fail to operate, and it is also the most prone to safety failure. As for the failure of the valve body, it is currently a black box, and there is no fast and effective method to alarm and warn it. Generally, after a major problem occurs, the parts are directly replaced, and then the vacuum is restored, which will cost a lot of money. It takes a long time and seriously affects the light supply time and user experiment of this beamline. In the preliminary investigation of domestic light sources, most of the monitoring of the beamline control system is limited to the monitoring of vacuum degree and valve position ^[1-4] , and there is very little comprehensive state monitoring of this ultra-high vacuum pneumatic valve.

In general, there is a relatively lack of multi-state comprehensive monitoring, fault alarm, early warning and other mechanisms for beamline ultra-high vacuum valves. Any failure of the ultra-high vacuum valve requires post-diagnosis and post-event maintenance, which is time-consuming and labor-intensive, and affects the light efficiency of the beamline and user satisfaction.

Researchers from Beijing Satellite Environmental Engineering Research Institute conducted a research on the monitoring method based on displacement and sound for the high vacuum valve ZBS-800, and gave early warning of the valve status. In this method, the displacement sensor needs to be installed on the inner wall of the valve seat, and the installation requirements are relatively strict. It is necessary to ensure that the surface of the laser transmitter and receiving element of the sensor is parallel to the surface of the valve sealing valve plate, and the reliability of the fixation between the sensor and the valve seat is also required. . However, the ultra-high vacuum valves on the beam line are all in the sealed ultra-vacuum pipeline, and the displacement sensor cannot be installed. Even the newly built line station needs to avoid installing the sensor on the inner wall of the valve seat as much as possible. On the one hand, it will cause vacuum pollution, on the other hand It is also inconvenient to replace sensors in later maintenance.

The Japanese Spring-8 synchrotron radiation beamline began to simulate the vacuum blasting of the beamline to generate shock waves in the atmosphere, and to monitor the closing time of the fast valve FCS and the ultra-high vacuum valve PV to design a safer beamline system. The main method is to insert a vacuum element, which effectively delays the propagation time of the shock wave, delays the shock wave propagation before the fast valve FCS is completely isolated, and realizes the good performance of the fast valve FCS system. This method is to maximize the performance of the equipment, improve the reliability of the beamline equipment, and ensure the safety of the beamline. However, early intervention is required, suitable for the initial stage of beamline design, and it is difficult to insert vacuum elements for each beamline that is already running online.

Performance monitoring, fault diagnosis and fault early warning of online equipment are effective methods to reduce equipment fatigue and improve lifespan. It is also the basis for transforming the concept of operation and maintenance, from post-maintenance to pre-maintenance.

SUMMARY OF THE INVENTION

The technology of the present invention solves the problem: overcomes the deficiencies of the prior art for on-line monitoring and rapid fault diagnosis of beamline ultra-high vacuum valves, and provides an ultra-high vacuum pneumatic valve fault detection system and method. , the detection system can be installed on the top of the ultra-high vacuum valve or the side of the electromagnetic reversing valve to monitor various parameters of the ultra-high vacuum gate valve in real time, including working environment, working conditions, opening and closing time, and vibration of the switch. Acceleration waveform, through the analysis and feature extraction of the data, can quickly judge the working and performance status of the ultra-high vacuum valve, so as to quickly alarm the conventional failure of the ultra-high vacuum valve at the local or remote terminal. At the same time, based on the established full-cycle ultra-high vacuum valve multi-parameter database, the vibration waveform and opening and closing time of the ultra-high vacuum pneumatic valve are used to predict the performance and health status of the valve body, and the trend diagram of the valve body state is given. In this way, the operation and maintenance level of key equipment in the beamline is improved.

The technical solution of the present invention: the detection system of ultra-high vacuum valve, including: EPICS layer, control layer and equipment layer, the bottom equipment layer is the ultra-high vacuum valve device on the beamline station and its vibration, voltage, air pressure to be monitored and temperature multiplex sensor signals;

The control layer includes the data acquisition system module and the input/output controller IOC; the data acquisition system module includes the valve vibration acceleration, voltage, air pressure and temperature multi-channel sensor signal input module, A/D conversion, isolation circuit, micro control unit MCU , status display and communication module; the input module collects the multi-channel sensor signals of the ultra-high vacuum valve, after signal conditioning and A/D conversion, it is sent to the MCU through the SPI interface, and the MCU analyzes and processes the digital signal after A/D conversion. Then, through the isolation circuit, it is transmitted to the IOC; the IOC saves the vibration acceleration, voltage, air pressure, temperature status information and alarm information of the switching process of the ultra-high vacuum valve to the real-time database. The data records of the IOC include different beamline stations. The vibration waveform record of the opening and closing process of the position ultra-high vacuum gate valve, the record of the working condition voltage and air pressure, the temperature and humidity record of the working environment, and the alarm record; the data in the IOC database can be shared, and can be performed on any computer of OPI or the client access;

The EPICS layer is the top layer of the system, which is the system software platform, including database, data analysis module, data processing module, system rule module, OPI and status display and alarm module. Based on the client-server model, the OPI and IOC of the EPICS layer establish a channel access mechanism of Channel Access (CA, channel access) on the TCP/IP protocol to realize the sharing of the real-time dynamic database of the IOC at the control layer, and use the real-time database to perform data processing. Online analysis. The data analysis module transforms and analyzes the vibration and acceleration data in the database to generate judgment rules for system fault diagnosis, and combines engineering experience to design system rules for judging equipment fault states. The latest system rules read by the rule module are fed back to the data processing module; the data processing module processes the acquired data according to the acquired rules, and extracts the state of the corresponding valve, mainly by monitoring the vibration signal during the movement of the ultra-high vacuum valve. , extract the characteristics of valve opening and closing time, establish a beamline ultra-high vacuum valve intrinsic opening and closing time characteristic database, and monitor the full-cycle data of the service life of different types of ultra-high vacuum valves; The change of switching time can quickly judge the health trend of the online valve, and give a certain early warning to realize the trend warning of the valve body performance health status; after data processing, the obtained state and alarm information of the ultra-high vacuum valve are transmitted to the user interface OPI through the local area network Users can view and analyze the real-time data and historical data information corresponding to the fault, and display it visually in the form of charts or curves, so as to facilitate the operator to confirm the validity of the relevant fault alarm and early warning information, and make further analysis and processing; OPI and status display and alarm module, which can timely alarm and display the general faults of ultra-high vacuum gate valves on the beam line, the general faults include abnormal working voltage of the valve, abnormal air pressure, electromagnetic coil damage, etc.; Insufficient voltage, insufficient voltage and electromagnetic coil aging and damage, timely and regular fault alarm, various information on OPI can be viewed on any computer on the local area network, and at the same time according to the status information of the ultra-high vacuum valve fed back by OPI, the system rules Appropriate modifications are made. In the case of misjudgment or omission, the fault data that is not within the rules will be added to the system rules, so as to continuously improve and update the judgment rules, and achieve effective fault judgment and early warning.

The ultra-high vacuum pneumatic valve fault detection method of the present invention comprises the following steps:

The first step is to monitor various signals of vibration, voltage, air pressure and temperature online for the ultra-high vacuum valve on the beamline, so as to obtain comprehensive data information of its state;

In the second step, the collected signals are conditioned and A/D converted in the data acquisition module, and sent to the MCU through the SPI interface. After the MCU analyzes and processes the A/D converted digital signals, it passes through the isolation circuit and transmits it to the MCU. IOC; IOC saves the vibration acceleration, voltage, air pressure, temperature status information and alarm information of the switching process of the ultra-high vacuum valve into the real-time database, and establishes the ultra-high vacuum gate under the experimental physics and industrial control system (EPICS) framework. The comprehensive state database of the valve and the characteristic database of the valve's intrinsic switching time realize the monitoring of the full-cycle data of the service life of different types of ultra-high vacuum valves; the database contains various data records, mainly including ultra-high vacuum gates at different positions of the beam line station The vibration waveform record of the valve switching process, the record of the working condition voltage and air pressure, the temperature and humidity record of the working environment, and the alarm record; at the same time, the data in the database can be shared and can be accessed on any computer on the local area network;

The third step is to use the database to analyze and process the data online. Realize the online function of timely alarming of conventional failures of ultra-high vacuum valves, study the relationship between vibration signal characteristics of ultra-high vacuum valve opening and closing process and its body failure, as well as the relationship between valve switching time and body failure and life, and establish ultra-high vacuum valve The advanced fault diagnosis and alarm mechanism makes the fault diagnosis of the ultra-high vacuum valve, the key equipment of the beamline, more efficient, the alarm is more timely, and the operation and maintenance capability of the beamline is improved. Data analysis transforms and analyzes the vibration acceleration data in the database to generate judgment rules for system fault diagnosis, design system rules for judging equipment fault status based on engineering experience, and feed back the latest system rules to the data processing module; The acquired data is processed according to the acquired rules, and the corresponding valve status is extracted, mainly by monitoring the vibration signal during the movement of the ultra-high vacuum valve, extracting the characteristics of the valve opening and closing time, and establishing the intrinsic opening and closing time of the beamline ultra-high vacuum valve. The feature database monitors the full-cycle data of the service life of different types of ultra-high vacuum valves; according to the characteristics of the vibration acceleration signal during the valve opening and closing movement and combined with the change of the opening and closing time, it can quickly judge the health trend of the online valve, and give a certain early warning to achieve Trend warning of valve body performance and health status; after data processing, the obtained ultra-high vacuum valve status and alarm information are transmitted to the user interface OPI through the local area network. Intuitive display in the form of chart or curve, to facilitate operators to confirm the validity of relevant fault alarm and early warning information, and for further analysis and processing; OPI and status display and alarm modules can monitor the ultra-high vacuum gate valve on the beam line The timely alarm display of conventional faults includes abnormal working voltage of the valve, abnormal air pressure, and damage to the solenoid coil. Various information can be viewed on any computer on the local area network, and at the same time, the system rules can be modified appropriately according to the status information of the ultra-high vacuum valve fed back by OPI. The fault data within the system is added to the system rules, so as to continuously improve and update the judgment rules, and realize effective fault judgment and early warning.

Online monitoring of the working conditions of ultra-high vacuum pneumatic valves: timely alarm when voltage, air pressure, and temperature reach conventional faults. Online monitoring of the vibration acceleration data waveform of the opening and closing of the ultra-high vacuum pneumatic valve, and comparison with the original data (early normal data), for example, under the same air pressure and voltage, the valve opening and closing time is significantly longer than the normal time or the set threshold time , the abnormal performance of the valve body can be predicted, and the vacuum valve can be repaired or replaced in time. On the other hand, the initial valve inspection can be carried out. For the ultra-high vacuum valves purchased from the construction of the new beam line, the offline system is used to measure the relevant parameters such as the switching action time and the vibration acceleration during the valve movement process. The index parameters are compared to determine whether they meet the requirements, which makes up for the lack of our inspection of the performance status of imported ultra-high vacuum valves. Furthermore, a database of intrinsic switching time characteristics of beamline ultra-high vacuum valves can also be established to monitor the full-cycle data of the service life of different types of ultra-high vacuum valves.

Under the normal light use experiment of the beamline station, by monitoring various parameters of the ultra-high vacuum valve, including the working environment, working conditions, opening and closing time, and vibration waveform of the switch, certain analysis and feature extraction of the data can quickly determine the ultra-high vacuum valve. The working and performance status of the vacuum valve can quickly alarm the conventional faults of the ultra-high vacuum valve, and at the same time establish a full-cycle ultra-high vacuum valve multi-parameter database, and initially try to use the vibration waveform of the valve switch movement and the opening and closing time to affect the valve body. There is a basic diagnosis and prediction of performance status, thereby improving the operation and maintenance level of key equipment in the beamline.

In order to improve the operation and maintenance level of the ultra-high vacuum pneumatic valve of the key equipment of the beam line, the present invention monitors various parameters of the ultra-high vacuum valve including the working environment, working conditions, opening and closing time, and vibration waveform of the switch. Feature extraction to quickly judge the working and performance status of ultra-high vacuum valves. At the same time, a full-cycle multi-parameter database of ultra-high vacuum pneumatic valves can be established, and the vibration waveform of the switching motion of ultra-high vacuum pneumatic valves and the opening and closing time of the valve can be used to predict the state of the valve body. 1. Rapid alarm for conventional faults; 2. Trend warning of valve body performance and health status; 3. Preliminary valve inspection, for ultra-high vacuum valves purchased from the construction of new beamlines, the switch action time and valve movement process are monitored before use. Measure the vibration acceleration, compare it with the technical index parameters, and quickly judge whether the valve switching time index meets the requirements; 4. Establish a database of the intrinsic switching time characteristics of the beamline ultra-high vacuum valve, and evaluate the service life of different types of ultra-high vacuum valves. Periodic data are monitored.

The advantages of the present invention compared with the prior art are:

(1) Quick alarm for conventional faults. Lack of existing. This technology monitors the voltage, air pressure, temperature, etc. of the ultra-high vacuum valve in real time online, and can give timely fault alarms for insufficient air pressure, insufficient voltage and the aging of the electromagnetic coil.

(2) Trend warning of valve body performance and health status. There is a lack of online comprehensive status monitoring and status trend warning of beamline ultra-high vacuum valves. By monitoring the vibration signal during the movement of the ultra-high vacuum valve, the characteristics of the valve opening and closing time are extracted, and according to the change of the valve opening and closing time, the health trend of the online valve can be quickly judged, and a certain early warning can be given.

(3) Carry out the initial inspection of the valve. For the ultra-high vacuum valve purchased from the new beam line, measure the switching action time and the vibration acceleration of the valve movement process before use, compare with the technical index parameters, and quickly judge the valve switching time. Whether the indicators meet the requirements. The existing technology only detects whether the leak rate of the valve is qualified, and does not involve the detection of the valve opening and closing time index. At the same time, it is also possible to distinguish differences between valves of the same model.

(4) Establish a database of intrinsic switching time characteristics of beamline ultra-high vacuum valves, and monitor the full-cycle data of the service life of different types of ultra-high vacuum valves. Due to the lack of corresponding detection means in the prior art, it is impossible to establish a state database of ultra-high vacuum valves. This technology can collect the vibration acceleration of the ultra-high vacuum valve online for a long time and extract and establish the characteristic database of the valve switching time, so as to realize the full-cycle data monitoring of the service life of different types of ultra-high vacuum valves.

Description of drawings

Fig. 1 is the structural representation of valve;

Figure 2 is a schematic diagram of the internal structure of the valve closing;

Figure 3 is a schematic diagram of the internal structure of the valve opening;

FIG. 4 is a block diagram of the composition of the ultra-high vacuum pneumatic valve detection system of the present invention.

Detailed ways

The present invention will be described in detail below with reference to the accompanying drawings and embodiments.

As shown in Figure 1, the structure of the ultra-high vacuum valve mainly includes a position indication 1 of the valve, an electromagnetic directional valve 2 for driving the valve movement, and a gate 3 for the movement of the valve body. As shown in Figure 2 and Figure 3, the internal structure of the ultra-high vacuum valve mainly includes 1 door, 2 counter plates, 3 leaf springs, 4 pairs of balls, 5 ball claws, 6 valve seals, and 7 spring stops. Its main working principle is to use compressed air as power, load 220 or 24V voltage and 0.6MPa air pressure on the electromagnetic reversing valve, change the direction of the air path through the electromagnetic reversing valve, and push the cylinder piston to drive the valve plate to move up and down, thereby Realize the opening or closing of the valve, and realize the airflow isolation of different sections of the vacuum pipeline of the beamline station. The electromagnetic reversing valve 2 in Fig. 1 is powered on after being connected to the air, so that the air path changes, and pushes the cylinder piston of the electromagnetic reversing valve to move upward, which has an effect on the spring stops 1 to 7 in Fig. 2. The lower drive valve plate moves upward to reach the position shown in Figure 3; after the power failure of the electromagnetic reversing valve 2 in Figure 1, its gas path changes again, and the cylinder piston of the electromagnetic reversing valve is pushed down to move downward. The door to 7 spring stops act, and under this action, the valve plate is driven to move downward to reach the position shown in FIG. 2 .

As shown in FIG. 4 , the detection system of the ultra-high vacuum valve of the present invention includes three layers: EPICS layer, control layer, and equipment layer. The equipment layer at the bottom is mainly the ultra-high vacuum valve equipment on the beamline station and the equipment that needs to be monitored. Multiplex sensor signals for vibration, voltage, air pressure and temperature;

The control layer includes: data acquisition system module and input/output controller IOC; data acquisition system module includes multi-channel sensor signal input module of valve vibration acceleration, voltage, air pressure and temperature, A/D conversion, isolation circuit, micro-control unit MCU, status display and communication module; the input module collects the signals of the ultra-high vacuum valve multi-channel sensors, after signal conditioning and A/D conversion, it is sent to the MCU through the SPI interface, and the MCU analyzes the digital signals after A/D conversion After processing, it is transmitted to the IOC through the isolation circuit; the IOC saves the vibration acceleration, voltage, air pressure, temperature status information and alarm information of the switching process of the ultra-high vacuum valve to the real-time database, and the data record in the IOC includes the beamline station. The vibration waveform records of the ultra-high vacuum gate valve opening and closing process at different positions, the records of the voltage and air pressure of the working conditions, the temperature and humidity records of the working environment, and the alarm records; the data in the IOC database can be shared, and the OPI on the EPICS layer or the client's can be accessed from any computer;

The EPICS layer is the system software platform of EPICS, including database, data analysis module, data processing module, system rule module, OPI and status display and alarm module. According to the client-server model, the OPI and IOC of the EPICS layer establish the channel access mechanism of Channel Access (CA) on the TCP/IP protocol, realize the sharing of the real-time dynamic database of the IOC of the control layer, and use the real-time database to analyze the data online. The data analysis module transforms and analyzes the vibration and acceleration data in the database to generate judgment rules for system fault diagnosis, and combines engineering experience to design system rules for judging equipment fault states. The latest system rules read by the rule module are fed back to the data processing module; the data processing module processes the acquired data according to the acquired rules, and extracts the state of the corresponding valve, mainly by monitoring the vibration signal during the movement of the ultra-high vacuum valve. , extract the characteristics of valve opening and closing time, establish a beamline ultra-high vacuum valve intrinsic opening and closing time characteristic database, and monitor the full-cycle data of the service life of different types of ultra-high vacuum valves; The change of switching time can quickly judge the health trend of the online valve, and give a certain early warning to realize the trend warning of the valve body performance health status; after data processing, the obtained state and alarm information of the ultra-high vacuum valve are transmitted to the user interface OPI through the local area network Users can view and analyze the real-time data and historical data information corresponding to the fault, and display it visually in the form of charts or curves, so as to facilitate the operator to confirm the validity of the relevant fault alarm and early warning information, and make further analysis and processing; OPI and status display and alarm module, which can timely alarm and display the general faults of ultra-high vacuum gate valves on the beam line, the general faults include abnormal working voltage of the valve, abnormal air pressure, electromagnetic coil damage, etc.; Insufficient voltage, insufficient voltage and electromagnetic coil aging and damage, timely and regular fault alarm, various information on OPI can be viewed on any computer on the local area network, and at the same time according to the status information of the ultra-high vacuum valve fed back by OPI, the system rules Appropriate modifications are made. In the case of misjudgment or omission, the fault data that is not within the rules will be added to the system rules, so as to continuously improve and update the judgment rules, and achieve effective fault judgment and early warning.

The detection method of the present invention is specifically realized as follows:

(1) Data acquisition of the voltage signal, air pressure signal, temperature and vibration acceleration signal of the ultra-high vacuum valve during opening and closing.

(2) Processing and recording of various collected data.

(3) The comprehensive state database of the valve is established under the EPICS platform, which realizes the remote sharing of data. In the data analysis center, the data can be analyzed to generate judgment rules for system fault diagnosis. According to the actual equipment status information and OPI feedback information, the system rules can be adjusted. The data processing center processes the data according to the acquired rules.

(4) Realize timely and effective alarm for conventional failure of ultra-high vacuum valve.

(5) Establish a database of intrinsic switching time characteristics of beamline ultra-high vacuum valves, and monitor the full-cycle data of the service life of different types of ultra-high vacuum valves.

(6) Study the relationship between the characteristics of the vibration acceleration signal during the opening and closing of the ultra-high vacuum valve and its body failure, as well as the relationship between the valve switching time and the body failure and life.

Although the specific implementation method of the present invention has been described above, those skilled in the art should understand that these are only examples, and various changes or modifications can be made to these embodiments without departing from the principles and implementation of the present invention. Therefore, the protection scope of the present invention is defined by the appended claims.

Claims (2)

1. an ultra-high vacuum pneumatic valve fault detection system, is characterized in that, comprises: the EPICS layer of the uppermost layer, the control layer of the middle and the equipment layer of the bottom layer; The equipment layer is equipped with ultra-high vacuum valves and multiplex sensors for vibration acceleration, voltage, air pressure and temperature to be monitored on the beamline station; The control layer includes the data acquisition system module and the input/output controller IOC; the data acquisition system module includes the multi-channel sensor signal input module, A/D conversion, isolation circuit, micro control unit MCU, status display and communication module; The signal of the ultra-high vacuum valve multi-channel sensor is collected, and after signal conditioning and A/D conversion, it is sent to the MCU through the SPI interface. After the MCU analyzes and processes the A/D converted digital signal, it passes through the isolation circuit and transmits it to the IOC. ;IOC saves the state information of vibration acceleration, voltage, air pressure and temperature during the opening and closing process of the ultra-high vacuum valve into a real-time database, and the data record in the IOC includes the vibration of the opening and closing process of the ultra-high vacuum gate valve at different positions of the beamline station Waveform recording, working condition voltage and air pressure recording, working environment temperature recording and alarm recording; data in the IOC database can be shared, and can be performed on the operator interface OPI (Operator Interface) on the EPICS layer or any computer on the client side access; EPICS layer is the system software platform of EPICS, including database, data analysis module, data processing module, system rule module, OPI and status display and alarm module; OPI and IOC of EPICS layer are based on the client-server model, in TCP/IP The channel access mechanism of Channel Access (CA) is established on the protocol to realize the sharing of the real-time dynamic database of the control layer IOC, and use the real-time database to analyze the data online; The data analysis module transforms and analyzes the vibration acceleration data in the database to generate judgment rules for system fault diagnosis, and combines engineering experience to design system rules for judging equipment fault states, and store the rules in a special system rule module. The latest system rules read by the system rules module are fed back to the data processing module; The system rule module stores the judgment rules generated by the data analysis module and the latest fault state judgment rules set; The data processing module processes the acquired data according to the acquired rules and extracts the state of the corresponding valve, mainly by monitoring the vibration signal during the movement of the ultra-high vacuum valve, extracting the characteristics of the valve switching time, and establishing a beamline ultra-high vacuum The valve intrinsic switching time characteristic database monitors the full-cycle data of the service life of different types of ultra-high vacuum valves; according to the characteristics of the vibration acceleration signal during the valve opening and closing movement and combined with the change of the opening and closing time, it can quickly judge the health trend of the online valve and give A certain early warning can realize the trend warning of the performance and health status of the valve body; after data processing, the obtained state and alarm information of the ultra-high vacuum valve are transmitted to the user interface OPI through the local area network, and the user can view and analyze the real-time data related to the corresponding fault. History Data information, and visually display it in the form of charts or curves, so as to facilitate the operator to confirm the validity of the relevant fault alarm and early warning information, and make further analysis and processing; The OPI and status display and alarm module can timely alarm and display the general faults of the ultra-high vacuum gate valve on the beam line, the general faults include abnormal working voltage of the valve, abnormal air pressure and damage to the electromagnetic coil; Insufficient voltage, insufficient voltage and electromagnetic coil aging and damage, timely and regular fault alarm, various information on OPI can be viewed on any computer on the local area network, and at the same time according to the status information of the ultra-high vacuum valve fed back by OPI, the system rules Appropriate modifications are made. In the case of misjudgment or omission, the fault data that is not within the rules will be added to the system rules, so as to continuously improve and update the judgment rules, and achieve effective fault judgment and early warning. 2. an ultra-high vacuum pneumatic valve fault detection method, is characterized in that, comprises the following steps: The first step is to monitor various signals of vibration, voltage, air pressure and temperature online for the ultra-high vacuum valve on the beamline, so as to obtain comprehensive data information of its state; In the second step, the collected signals are conditioned and A/D converted in the data acquisition module, and sent to the MCU through the SPI interface. After the MCU analyzes and processes the A/D converted digital signals, it passes through the isolation circuit and transmits it to the MCU. IOC; IOC saves the vibration acceleration, voltage, air pressure, temperature status information and alarm information of the switching process of the ultra-high vacuum valve into the real-time database, and establishes the ultra-high vacuum gate under the experimental physics and industrial control system (EPICS) framework. The comprehensive state database of the valve and the characteristic database of the valve's intrinsic switching time realize the monitoring of the full-cycle data of the service life of different types of ultra-high vacuum valves; the database contains various data records, mainly including ultra-high vacuum gates at different positions of the beam line station The vibration waveform record of the valve switching process, the record of the working condition voltage and air pressure, the temperature and humidity record of the working environment, and the alarm record; at the same time, the data in the database can be shared and can be accessed on any computer on the local area network; The third step is to use the database to analyze and process the data online. Realize the online function of real-time alarming of conventional faults of the ultra-high vacuum valve, determine the relationship between the vibration signal characteristics of the ultra-high vacuum valve during the opening and closing process and its main body failure, and the relationship between the valve switching time and the main body failure and life, and establish the ultra-high vacuum valve The unique fault diagnosis and alarm mechanism makes the fault diagnosis of the ultra-high vacuum valve of the key equipment of the beamline more efficient, the alarm is more timely, and the operation and maintenance capability of the beamline is improved; the data analysis is to transform and analyze the vibration acceleration data of the database. Generate judgment rules for system fault diagnosis, design system rules for judging equipment fault status based on engineering experience, and feed back the acquired system rules to data processing. Data processing processes the acquired data according to the acquired rules, and extracts the corresponding valve status. Mainly through the monitoring of the vibration signal during the movement of the ultra-high vacuum valve, the characteristics of the valve opening and closing time are extracted, and according to the change of the valve opening and closing time, the health trend of the online valve can be quickly judged, and an early warning can be given to realize the trend warning of the valve body performance health status; After data processing, the obtained state and alarm information of the ultra-high vacuum valve are transmitted to the user interface OPI through the local area network, and the user can view and analyze the real-time data and historical data information related to the corresponding fault, so as to facilitate the operator to confirm the relevant fault alarm and early warning. Check the validity of the information, and make further analysis and processing. On the OPI, timely general fault alarms are made for insufficient air pressure, insufficient voltage and the aging of the solenoid coil. At the same time, according to the status information of the ultra-high vacuum valve fed back by the OPI, the system rules are appropriately carried out. In the case of misjudgment or omission of judgment, the fault data that is not within the rules will be added to the system rules, so as to continuously improve the judgment rules and achieve effective fault judgment and early warning.

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