CN114275730B - Magnetic vibrator coupling resonance type micro-nano weighing device and preparation method thereof - Google Patents
Magnetic vibrator coupling resonance type micro-nano weighing device and preparation method thereof Download PDFInfo
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Abstract
The invention provides a magnetic vibrator coupling resonance type micro-nano weighing device and a preparation method thereof, which belong to the technical field of micro-nano electronic functional devices, wherein the device comprises a monocrystalline substrate, a short circuit coplanar waveguide and a resonator, wherein the short circuit coplanar waveguide and the resonator are positioned on the monocrystalline substrate, and the resonator is positioned between a central zone and a grounding zone of the short circuit coplanar waveguide; the resonator comprises an upper layer of piezomagnetic film and a lower layer of magnetic film, wherein the magnetic damping coefficient of the magnetic film is lower than 10 ‑3 . Preferably, the magnetic film is a yttrium iron garnet film, and the single crystal substrate is [111]]Gadolinium gallium garnet single crystal substrate with crystal orientation. Compared with the traditional cantilever beam mechanical vibration resonance frequency test method, the method has the advantages of low requirement on the vacuum degree of the measurement environment, low cost and high test sensitivity in the microwave frequency band; resonating using magnetic thin films with low ferroresonance linewidthsThe whole absorption bandwidth of the device is narrowed, which is favorable for extracting absorption peak signals.
Description
Technical Field
The invention belongs to the technical field of micro-nano electronic functional devices, and particularly relates to a magnetic vibrator coupling resonance type micro-nano weighing device and a preparation method thereof.
Background
Objects with the size and quality in the micro-nano level in nature enter the field of view of people due to the development of micro-nano processing technology and quantum technology. There have been many studies on measuring the mass of a minute object using the resonance frequency shift of a resonator, but most of them are resonators constructed based on a micromechanical system. The idea is generally to place a tiny object on the cantilever Liang Jianduan and apply an ac voltage between the cantilever and the bottom electrode to cause mechanical vibration of the cantilever. When the external alternating voltage frequency is the same as the natural frequency of the cantilever, the vibration amplitude of the cantilever is maximum. When an object to be measured is added to the cantilever Liang Jianduan, the natural frequency of the whole is shifted, so that the measured resonance frequency is shifted. The greatest disadvantage of resonators based on cantilever mechanical vibrations is the great environmental impact, and the measured results under vacuum and normal atmospheric pressure are in and out. The method has the advantages that the measurement of extremely small mass can be realized, and the mass of one proton can be measured under extremely high vacuum degree.
In the research of magnetic materials, the magnetostriction effect and the piezomagnetic effect are bridges connecting the magnetic energy and the mechanical energy of the materials. The magnetostriction effect means that the magnetized magnetic material is deformed in relation to the direction of magnetization. The piezomagnetic effect refers to the change of the magnetization state of a magnetic material after stress application. The stress is widely applied in the aspect of magnetic property adjustment, and researches show that the internal stress of the magnetic film can change the coercive force and the internal anisotropic field of the magnetic film.
When an electromagnetic signal is externally applied, the magnetic moment inside the magnetic material absorbs electromagnetic field energy and precesses around the effective field, so that a ferromagnetic resonance phenomenon occurs. When the frequency of the microwave field is the same as the precession frequency of the magnetic moment of the material, the microwave absorption energy is the highest, so that the magnitude of the resonance frequency is measured.
Based on the above, the invention provides a device for testing micro-nano quality by utilizing the piezomagnetic effect and the ferromagnetic resonance phenomenon.
Disclosure of Invention
Aiming at the problem that the mechanical vibration of the cantilever beam is greatly affected by the vacuum degree in the prior art, the invention provides the magnetic vibrator coupling resonance type micro-nano weighing device and the preparation method thereof, and an object to be measured generates a piezomagnetic effect due to the gravity action, influences the coupling process of the magnetic moment and electromagnetic waves in a magnetic material, further changes the resonance frequency, realizes accurate measurement of the weight of the object to be measured, and has no strict requirement on the vacuum degree of the measuring environment.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
the magnetic vibrator coupling resonance type micro-nano weighing device is characterized by comprising a monocrystalline substrate, a short-circuit coplanar waveguide and a resonator, wherein the short-circuit coplanar waveguide and the resonator are positioned on the monocrystalline substrate, and the resonator is positioned between a central zone and a grounding zone of the short-circuit coplanar waveguide; the resonator is of a double-layer film structure and comprises an upper layer of piezomagnetic film and a lower layer of magnetic film with low ferromagnetic resonance line width; the magnetic damping coefficient of the magnetic film is lower than 10 -3 。
Further, to avoid the influence of subsequent drop liquid samples on the short-circuited coplanar waveguide, the resonator is spaced from the short-circuited coplanar waveguide by at least 200 μm.
Further, the thickness of the magnetic thin film is 5nm to 5 μm.
Further, the magnetic film is a Yttrium Iron Garnet (YIG) film, and is a magnetic material with the minimum magnetic moment precession damping coefficient under room temperature and normal pressure, which are found by current researches.
Further, the thickness of the piezomagnetic film is 100 nm-5 μm.
Further, the piezomagnetic film is a 3d group transition element alloy (TbFe 2 、SmFe 2 FeGa, tbDyFe, coFeB, etc.) film, ferrite material (CoFe 2 O 4 、NiFe 2 O 4 Etc.) films or organic magnetic composite films. The magnetostriction coefficient of the material is large, and the stress can cause great change of the magnetic property of the material. The ferrite material has larger resistivity, and can avoid the failure of devices caused by Joule heat generated by eddy current in an electromagnetic field.
Further, the single crystal substrate has a loss tangent of not more than 10 -3 Is a low microwave loss substrate of (1).
Further, the single crystal substrate is a [111] crystal orientation Gadolinium Gallium Garnet (GGG) single crystal substrate.
Further, the thickness of the short-circuit coplanar waveguide is 200 nm-2 μm.
Further, the working frequency of the magnetic vibrator coupling resonance type micro-nano weighing device is 2 GHz-20 GHz.
Further, the mass range of the magnetic vibrator coupling resonance type micro-nano weighing device which can be tested is below 1 mug, and the mass range is related to the precision of a measuring instrument and the performance of a piezomagnetic film.
The preparation method of the magnetic vibrator coupling resonance type micro-nano weighing device is characterized by comprising the following steps of:
step 1: magnetic thin films are grown on a monocrystalline substrate by magnetron sputtering, liquid phase epitaxy or laser pulse deposition;
step 2: growing a piezomagnetic film on the magnetic film obtained in the step 1 by adopting laser pulse deposition, chemical vapor deposition or magnetron sputtering;
step 3: obtaining the structure of the resonator through photoetching or etching;
step 4: obtaining a structural pattern of the short-circuit coplanar waveguide on the monocrystalline substrate provided with the resonator through alignment photoetching, so that the resonator is positioned between a central zone and a grounding zone of the short-circuit coplanar waveguide, and then preparing the short-circuit coplanar waveguide through magnetron sputtering or evaporation;
step 5: and (5) cleaning and drying to prepare the magnetic vibrator coupling resonance type micro-nano weighing device.
The working principle of the magnetic vibrator coupling resonance type micro-nano weighing device provided by the invention is as follows:
when the microwave is transmitted by the short-circuit coplanar waveguide, the microwave field excites the inside of the resonator to generate magnetic moment precession, and under a certain frequency, the energy of the resonator for absorbing the microwave reaches the maximum, and the ferromagnetic resonance phenomenon occurs, and the frequency is the resonance frequency. Then when the object to be measured is adsorbed on the surface of the resonator, the gravity of the object to be measured makes the piezomagnetic film subjected to the stress, the internal magnetic property is changed, and then the magnetic coupling between the piezomagnetic film and the magnetic film causes the change of the whole magnetic property of the resonator, thereby affecting the magnetic moment precession in the resonator and changing the resonance frequency. And finally, measuring the movement of the front and back resonance frequencies of the object to be detected, and calculating to obtain the mass of the object to be detected.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention provides a magnetic vibrator coupling resonance type micro-nano weighing device which can be used for accurately weighing an object with the quality of nanogram level; compared with the traditional cantilever beam mechanical vibration resonance frequency test method, the method is based on the full electromagnetic method test, has low requirement on the vacuum degree of the measurement environment, reduces the cost, and has higher test sensitivity in the microwave frequency band;
2. for the resonator, the magnetic film with low ferromagnetic resonance line width is arranged on the lower layer of the piezomagnetic film, so that the whole absorption bandwidth of the resonator is narrowed, the absorption peak signal is extracted, and the measurement accuracy is improved.
Drawings
Fig. 1 is a schematic structural diagram of a magnetic vibrator coupling resonance micro-nano weighing device according to embodiment 1 of the present invention;
fig. 2 is a flowchart of a preparation of a magnetic vibrator coupling resonance type micro-nano weighing device according to embodiment 1 of the present invention;
fig. 3 is a graph of test results of a micro-nano weighing device with coupled resonator of a magnetic vibrator according to embodiment 1 of the present invention;
fig. 4 is a graph comparing test data and fitting data of the micro-nano weighing device with the magnetic vibrator coupling resonance type proposed in the embodiment 1 of the present invention.
Detailed Description
For a detailed description of the technical route of the present invention, the following examples are presented. It should be noted that the following examples are only for aiding in describing the technical route of the present invention, and are only exemplary and not intended to limit the scope of the present invention.
The technical scheme of the invention is described in detail below with reference to the accompanying drawings and examples.
Example 1
The embodiment provides a magnetic vibrator coupling resonance type micro-nano weighing device, the structure of which is shown in figure 1, the micro-nano weighing device comprises a [111] crystal orientation gadolinium gallium garnet single crystal substrate, a short circuit coplanar waveguide and a resonator, wherein the short circuit coplanar waveguide and the resonator are positioned on the gadolinium gallium garnet single crystal substrate, and the resonator is positioned between a central zone and a grounding zone of the short circuit coplanar waveguide; the resonator is of a double-layer film structure and comprises an upper Cobalt Ferrite (CFO) film and a lower yttrium iron garnet magnetic film;
wherein the thickness of the cobalt ferrite film is 1 μm; the thickness of the yttrium iron garnet magnetic film is 1 mu m; the whole structure of the resonator is cylindrical, and the diameter is 1mm; the material of the short-circuit coplanar waveguide is gold, the thickness is 2 mu m, the characteristic impedance of the short-circuit coplanar waveguide is 50ohm, the widths of the center band and the grounding band are 50 mu m, and the width of the short-circuit end waveguide is 70 mu m.
The embodiment also provides a preparation method of the magnetic vibrator coupling resonance type micro-nano weighing device, the preparation flow Cheng Ru is shown in fig. 2, and the preparation method comprises the following steps:
step 1: the yttrium iron garnet Dan Cixing film with the thickness of 1 mu m is grown on the gadolinium gallium garnet single crystal substrate by adopting a liquid phase epitaxy technology, and the method specifically comprises the following steps:
fe with purity higher than 99.99wt% is selected 2 O 3 And Y 2 O 3 Melting at 1000deg.C, adding to Bi 2 O 3 Fully stirring the mixture in a solvent to obtain a liquid phase growth melt; putting the cleaned gadolinium gallium garnet single crystal substrate into a liquid phase growth melt, carrying out thermal insulation growth at 900 ℃, and taking out after the growth is finished, thus obtaining a yttrium iron garnet magnetic film which is grown by liquid phase epitaxy;
step 2: and (2) growing a cobalt ferrite film with the thickness of 1 mu m on the yttrium iron garnet magnetic film obtained in the step (1) by adopting a laser pulse deposition method, wherein the method comprises the following steps of:
putting the gadolinium gallium garnet single crystal substrate with the yttrium iron garnet Dan Cixing film obtained in the step 1 into a laser pulse deposition device, and at 10 -6 Heating to 600 ℃ under Pa vacuum degree, and introducing oxygen pressure to 20Pa; then a laser light source is started to evaporate the cobalt-iron target, the laser frequency is 10Hz, and the energy is 300mJ; after the growth is finished, closing a laser and an oxygen source, and taking out after the temperature is reduced to room temperature to obtain a cobalt ferrite film;
step 3: obtaining the structure of the resonator on the surface of the sample obtained in the step 2 through photoetching, and sending the sample subjected to photoetching into a magnetron sputtering chamber, wherein the vacuum degree is lower than 10 -4 Under Pa and argon gas of 0.33Pa, a direct current power supply is started, the sputtering power is 30W, chromium/gold/chromium/gold mask layers are sequentially grown on the surface of the sample, the growth time of chromium and gold is respectively 200s and 400s, and the sample is taken out after the growth is finished;
step 4: placing concentrated phosphoric acid into a beaker, starting a heating plate to heat to 110 ℃, adding the sample obtained in the step 3 into the beaker, preserving heat for 30min, taking out the sample, washing with deionized water, drying, removing chromium and gold by using corrosive liquid, and cleaning and drying to obtain a resonator pattern on the surface of the sample;
step 5: obtaining a structural pattern of a short-circuit coplanar waveguide on a gadolinium gallium garnet single crystal substrate provided with a resonator through alignment photoetching, enabling the resonator to be positioned between a central zone and a grounding zone of the short-circuit coplanar waveguide, and growing a gold film with the thickness of 2 mu m through magnetron sputtering to finally obtain the short-circuit coplanar waveguide; the magnetic control sputtering comprises the following specific processes:
gadolinium gallium garnet single crystal substrate with structural pattern of road coplanar waveguide is placed in sputtering chamber, vacuum degree is guaranteed at 10 -5 Sputtering a gold target with argon (Ar) under Pa, setting the sputtering power to be 20W, the working air pressure to be 0.3Pa, the argon flow to be 15sccm, and the sputtering time to be 600s, closing a power supply and a baffle plate of the gold target after the sputtering is completed, and taking out after the temperature is reduced to room temperature to obtain a short-circuit coplanar waveguide;
step 6: and (5) cleaning and drying to prepare the magnetic vibrator coupling resonance type micro-nano weighing device.
The weighing test is performed on the magnetic vibrator coupling resonance type micro-nano weighing device obtained in the embodiment, specifically:
a probe is pricked at a signal input port of the short-circuit coplanar waveguide, the other end of the probe is connected with a vector analysis network, a magnetic field is applied to a magnetic vibrator coupling resonance type micro-nano weighing device, S11 parameters are tested, and test results show that an absorption peak with an absorption amplitude greater than 20dB is arranged in a frequency range of 2 GHz-8 GHz, and the absorption peak is used as a comparison group, and the corresponding resonance frequency is 4.63GHz as a reference resonance frequency f 0 That is, when the mass of the sample to be measured is 0 as shown in fig. 4, the variation of the resonance frequency is 0; then the probe is taken down, and the magnetic field is turned off;
and then obtaining the mass of the sample to be detected through the product of the density and the volume, taking the sample to be detected with the known mass of 5 mug, 10 mug, 15 mug and 20 mug respectively, sequentially carrying out quality test, dripping the sample to be detected on the surface of the resonant cavity, pricking a probe, starting a magnetic field, and detecting the S11 parameter to find that an absorption peak with the absorption amplitude larger than 20dB exists in the frequency range of 2 GHz-8 GHz. As shown in fig. 3, the absorption peaks of the samples to be measured, which are known to have a mass of 10 μg (sample 1) and 20 μg (sample 2), respectively, are significantly shifted compared to the control group to which the samples to be measured were not dropped; calculating the resonance frequency f corresponding to each absorption peak of the sample to be detected x Reference resonance frequency f compared to control group 0 The variation Δf=f of (a) x -f 0 For example, the variation Δf of the sample 1 and the sample 2 is 0.319GHz and 0.5559GHz, and as shown in fig. 4, the fitting data satisfy a linear relationship, and it is known that the sensitivity (i.e., the slope of the fitting data) of the magnetic-resonance-type micro-nano weighing device obtained in this embodiment is 0.03GHz/μg, so that the movement Δf of the resonance frequency relative to the reference resonance frequency can reflect the mass of the sample to be measured after the sample to be measured is dripped on the obtained device. Wherein, the mass x of the sample to be measured is:
example 2
The embodiment provides a magnetic vibrator coupling resonance type micro-nano weighing device, which comprises a [111] crystal orientation gadolinium gallium garnet single crystal substrate, a short circuit coplanar waveguide and a resonator, wherein the short circuit coplanar waveguide and the resonator are positioned on the gadolinium gallium garnet single crystal substrate, and the resonator is positioned between a central zone and a grounding zone of the short circuit coplanar waveguide; the resonator is of a double-layer film structure and comprises an upper FeGa alloy film and a lower yttrium iron garnet magnetic film;
wherein, the thickness of the FeGa alloy film is 1 mu m; the thickness of the yttrium iron garnet magnetic film is 1 mu m; the whole structure of the resonator is cylindrical, and the diameter is 1mm; the material of the short-circuit coplanar waveguide is gold, the thickness is 2 mu m, the characteristic impedance of the short-circuit coplanar waveguide is 50ohm, the widths of the center band and the grounding band are 50 mu m, and the width of the short-circuit end waveguide is 70 mu m.
The embodiment also provides a preparation method of the magnetic vibrator coupling resonance type micro-nano weighing device, which comprises the following steps:
step 1: growing a yttrium iron garnet magnetic thin film having a thickness of 1 μm on a gadolinium gallium garnet single crystal substrate in the same manner as in step 1 of example 1;
step 2: and (2) growing a FeGa alloy film with the thickness of 1 mu m on the yttrium iron garnet magnetic film obtained in the step (1) by adopting a Molecular Beam Epitaxy (MBE) method, wherein the FeGa alloy film comprises the following specific steps:
putting the gadolinium gallium garnet single crystal substrate with the yttrium iron garnet Dan Cixing film obtained in the step 1 into an epitaxial chamber, and placing the gadolinium gallium garnet single crystal substrate in a range of 10 -8 Heating the gadolinium gallium garnet single crystal substrate to 375 ℃ at a heating rate of 1 ℃/min under a vacuum environment below Pa, preserving heat for 60min, and removing the surface adsorption gas; then heating Fe source and Ga source, controlling evaporation rate, and gas flow rate to be 1.5X10 respectively 13 Fe atoms/(cm) 2 X s) and 0.5 x 10 13 Ga atoms/(cm) 2 X s); opening a Fe source baffle and a Ga source baffle, opening a substrate baffle after the flow of the evaporating gas is stable, and closing the substrate baffle after depositing for 30 min; closing a Fe source baffle and a Ga source baffle, slowly cooling the sample to room temperature, and taking out the sample to obtain a FeGa alloy film;
step 3: the structure of the resonator was obtained in the same manner as in steps 3, 4 in example 1;
step 4: a short-circuited coplanar waveguide with a thickness of 2 μm was produced in the same manner as in step 5 of example 1;
step 5: and (5) cleaning and drying to prepare the magnetic vibrator coupling resonance type micro-nano weighing device.
Example 3
The embodiment provides a magnetic vibrator coupling resonance type micro-nano weighing device, which comprises [111]]The gadolinium gallium garnet single crystal substrate with the crystal orientation, the short-circuit coplanar waveguide and the resonator are positioned on the gadolinium gallium garnet single crystal substrate, and the resonator is positioned between a central zone and a grounding zone of the short-circuit coplanar waveguide; the resonator has a double-layer film structure and comprises upper Fe layer 30 Co 70 An alloy film and an underlying yttrium iron garnet magnetic film;
wherein Fe is 30 Co 70 The thickness of the alloy film is 1 mu m; the thickness of the yttrium iron garnet magnetic film is 1 mu m; the whole structure of the resonator is cylindrical, and the diameter is 1mm; the material of the short-circuit coplanar waveguide is gold, the thickness is 2 mu m, the characteristic impedance of the short-circuit coplanar waveguide is 50ohm, the widths of the center band and the grounding band are 50 mu m, and the width of the short-circuit end waveguide is 70 mu m.
The embodiment also provides a preparation method of the magnetic vibrator coupling resonance type micro-nano weighing device, which comprises the following steps:
step 1: the pulse laser deposition technology is adopted to grow the yttrium iron garnet magnetic film with the thickness of 1 mu m on the gadolinium gallium garnet single crystal substrate, and the method specifically comprises the following steps:
placing the cleaned gadolinium gallium garnet single crystal substrate in a laser pulse deposition device at 10 -6 Heating to 750 ℃ under Pa vacuum degree, and introducing oxygen pressure to 5Pa; then, starting a laser light source to evaporate the yttrium iron garnet Dan Bacai, wherein the laser wavelength is 248nm, the laser frequency is 5Hz, and the energy is 300mJ; growing to obtain a yttrium iron garnet Dan Cixing film;
step 2: growing a cobalt-iron alloy film with the thickness of 1 mu m on the yttrium iron garnet magnetic film obtained in the step 1 by adopting magnetron sputtering, wherein a sputtering target isFe 30 Co 70 An alloy;
step 3: the structure of the resonator was obtained in the same manner as in steps 3, 4 in example 1;
step 4: a short-circuited coplanar waveguide with a thickness of 2 μm was produced in the same manner as in step 5 of example 1;
step 5: and (5) cleaning and drying to prepare the magnetic vibrator coupling resonance type micro-nano weighing device.
Example 4
The embodiment provides a magnetic vibrator coupling resonance type micro-nano weighing device, which comprises a [111] crystal orientation gadolinium gallium garnet single crystal substrate, a short circuit coplanar waveguide and a resonator, wherein the short circuit coplanar waveguide and the resonator are positioned on the gadolinium gallium garnet single crystal substrate, and the resonator is positioned between a central zone and a grounding zone of the short circuit coplanar waveguide; the resonator is of a double-layer film structure and comprises an upper cobalt-iron-boron (CoFeB) alloy film and a lower yttrium-iron garnet magnetic film;
wherein the thickness of the cobalt-iron-boron alloy film is 1 mu m; the thickness of the yttrium iron garnet magnetic film is 1 mu m; the whole structure of the resonator is cylindrical, and the diameter is 1mm; the material of the short-circuit coplanar waveguide is gold, the thickness is 2 mu m, the characteristic impedance of the short-circuit coplanar waveguide is 50ohm, the widths of the center band and the grounding band are 50 mu m, and the width of the short-circuit end waveguide is 70 mu m.
The embodiment also provides a preparation method of the magnetic vibrator coupling resonance type micro-nano weighing device, and compared with the embodiment 3, the preparation method is different in that: adjusting the sputtering target material of the magnetron sputtering in the step 2 into a cobalt-iron-boron alloy material; the remaining steps are the same.
Example 5
The embodiment provides a magnetic vibrator coupling resonance type micro-nano weighing device, which comprises a [111] crystal orientation gadolinium gallium garnet single crystal substrate, a short circuit coplanar waveguide and a resonator, wherein the short circuit coplanar waveguide and the resonator are positioned on the gadolinium gallium garnet single crystal substrate, and the resonator is positioned between a central zone and a grounding zone of the short circuit coplanar waveguide; the resonator is of a double-layer film structure and comprises an upper samarium-iron (SmFe) alloy film and a lower yttrium-iron garnet magnetic film;
the thickness of the samarium-iron alloy film is 1 mu m, the magnetostriction coefficient of the samarium-iron alloy material is larger, and the samarium-iron alloy film has more excellent response to external stress; the thickness of the yttrium iron garnet magnetic film is 1 mu m; the whole structure of the resonator is cylindrical, and the diameter is 1mm; the material of the short-circuit coplanar waveguide is gold, the thickness is 2 mu m, the characteristic impedance of the short-circuit coplanar waveguide is 50ohm, the widths of the center band and the grounding band are 50 mu m, and the width of the short-circuit end waveguide is 70 mu m.
The embodiment also provides a preparation method of the magnetic vibrator coupling resonance type micro-nano weighing device, and compared with the embodiment 3, the preparation method is different in that: adjusting the sputtering target material of the magnetron sputtering in the step 2 into a samarium-iron alloy material; the remaining steps are the same.
Example 6
The embodiment provides a magnetic vibrator coupling resonance type micro-nano weighing device, which comprises a [111] crystal orientation gadolinium gallium garnet single crystal substrate, a short circuit coplanar waveguide and a resonator, wherein the short circuit coplanar waveguide and the resonator are positioned on the gadolinium gallium garnet single crystal substrate, and the resonator is positioned between a central zone and a grounding zone of the short circuit coplanar waveguide; the resonator is of a double-layer film structure and comprises an upper terbium dysprosium iron (TbDyFe) nanoparticle film and a lower yttrium iron garnet magnetic film;
wherein, the thickness of the Tb Dy-Fe nano particle film is 1 μm; the thickness of the yttrium iron garnet magnetic film is 1 mu m; the whole structure of the resonator is cylindrical, and the diameter is 1mm; the material of the short-circuit coplanar waveguide is gold, the thickness is 2 mu m, the characteristic impedance of the short-circuit coplanar waveguide is 50ohm, the widths of the center band and the grounding band are 50 mu m, and the width of the short-circuit end waveguide is 70 mu m.
The embodiment also provides a preparation method of the magnetic vibrator coupling resonance type micro-nano weighing device, which comprises the following steps:
step 1: growing a yttrium iron garnet magnetic thin film having a thickness of 1 μm on a gadolinium gallium garnet single crystal substrate in the same manner as in step 1 of example 1;
step 2: the Tb Dy-Fe nano-particle film with the thickness of 1 μm grows on the yttrium iron garnet magnetic film obtained in the step 1, which is specifically as follows:
a Polydimethylsiloxane (PDMS) precursor and a curing agent are mixed according to a mass ratio of 10:1 mechanically stirring uniformly under the room temperature condition to obtain a polydimethylsiloxane solution; adding 8.0g terbium dysprosium iron alloy nano particles with the diameter of 0.1-5 mu m into 11.0g polydimethylsiloxane solution, mechanically stirring and uniformly mixing to obtain a mixture; coating the mixture on the surface of the yttrium iron garnet Dan Cixing film in the step 1 by using a spin coating method, putting the mixture into a vacuum glove box for 12 hours to degas, and finally putting the mixture into a baking box at 100 ℃ to be cured into a film to obtain a terbium dysprosium iron nanoparticle film;
step 3: obtaining the structure of the resonator through ion etching;
step 4: a short-circuited coplanar waveguide with a thickness of 2 μm was produced in the same manner as in step 5 of example 1;
step 5: and (5) cleaning and drying to prepare the magnetic vibrator coupling resonance type micro-nano weighing device.
The above examples illustrate the invention in detail. These examples are not limiting of the invention, which is not limited to these examples. All additions, subtractions, substitutions, and variations made by the relevant researchers within the spirit and scope of the present invention are within the scope of the present patent.
Claims (3)
1. The magnetic vibrator coupling resonance type micro-nano weighing device is characterized by comprising a monocrystalline substrate, a short-circuit coplanar waveguide and a resonator, wherein the short-circuit coplanar waveguide and the resonator are positioned on the monocrystalline substrate, and the resonator is positioned between a central zone and a grounding zone of the short-circuit coplanar waveguide; the single crystal substrate is [111]]A gadolinium gallium garnet single crystal substrate with a crystal orientation; the thickness of the short-circuit coplanar waveguide is 200 nm-2 mu m; the resonator comprises an upper layer of piezomagnetic film and a lower layer of magnetic film; the magnetic damping coefficient of the magnetic film is lower than 10 -3 Specifically, the thickness of the yttrium iron garnet film is 5 nm-5 mu m; the piezomagnetic film is a 3d group transition element alloy film, a ferrite material film or an organic magnetic composite material film, and the thickness is 100 nm-5 mu m; the working frequency of the magnetic vibrator coupling resonance type micro-nano weighing device is 2 GHz-20 GHz;
when the microwave is transmitted by the short-circuit coplanar waveguide, the microwave field excites the inside of the resonator to generate magnetic moment precession, and under a certain frequency, the energy of the resonator for absorbing the microwave reaches the maximum, and a ferromagnetic resonance phenomenon occurs, wherein the frequency is the resonance frequency; then when the object to be measured is adsorbed on the surface of the resonator, the gravity of the object to be measured causes the piezomagnetic film to be stressed, the internal magnetic property of the piezomagnetic film is changed, and then the magnetic coupling between the piezomagnetic film and the magnetic film causes the change of the whole magnetic property of the resonator, thereby affecting the magnetic moment precession in the resonator and changing the resonance frequency; and finally, measuring the movement of the front and back resonance frequencies of the object to be detected, and calculating to obtain the mass of the object to be detected.
2. The magnetic vibrator coupled resonance micro-nano weighing device of claim 1, wherein said single crystal substrate has a loss tangent of not more than 10 -3 。
3. A method for manufacturing a magnetic vibrator coupling resonance type micro-nano weighing device as claimed in claim 1 or 2, comprising the steps of:
step 1: magnetic thin films are grown on a monocrystalline substrate by magnetron sputtering, liquid phase epitaxy or laser pulse deposition;
step 2: growing a piezomagnetic film on the magnetic film obtained in the step 1 by adopting laser pulse deposition, chemical vapor deposition or magnetron sputtering;
step 3: obtaining the structure of the resonator through photoetching or etching;
step 4: obtaining a structural pattern of the short-circuit coplanar waveguide on the monocrystalline substrate provided with the resonator through alignment photoetching, so that the resonator is positioned between a central zone and a grounding zone of the short-circuit coplanar waveguide, and then preparing the short-circuit coplanar waveguide through magnetron sputtering or evaporation;
step 5: and (5) cleaning and drying to prepare the magnetic vibrator coupling resonance type micro-nano weighing device.
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