CN114273193A - Matching layer with acoustic impedance changing in uniform gradient and ultrasonic transducer - Google Patents

Matching layer with acoustic impedance changing in uniform gradient and ultrasonic transducer Download PDF

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Publication number
CN114273193A
CN114273193A CN202111616985.7A CN202111616985A CN114273193A CN 114273193 A CN114273193 A CN 114273193A CN 202111616985 A CN202111616985 A CN 202111616985A CN 114273193 A CN114273193 A CN 114273193A
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acoustic impedance
matching layer
structures
gradient
cone
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CN202111616985.7A
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Chinese (zh)
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张�浩
刘晓晓
曾涛
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Shanghai Institute of Materials
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Shanghai Institute of Materials
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Abstract

The invention relates to a matching layer with acoustic impedance changing in a uniform gradient mode and an ultrasonic transducer. The matching layer with the acoustic impedance changing in uniform gradient comprises a shell, cone structures and a filling material, wherein one or more cone structures are arranged in the shell, the filling material is filled in gaps between the cone structures and the shell, and the acoustic impedance is distributed in gradient gradual change from one end of the matching layer to the other end of the matching layer along the height direction of the cone structures. Compared with the traditional uniform matching layer material, the matching layer provided by the invention has non-uniform material density, the acoustic impedance of the material is in uniform gradient change, and the acoustic impedance of the matching layer is changed from the uniform gradient gradual change of the acoustic impedance of the piezoelectric ceramic plate to the acoustic impedance of an acting medium.

Description

Matching layer with acoustic impedance changing in uniform gradient and ultrasonic transducer
Technical Field
The invention belongs to the field of ultrasonic transducer design, and particularly relates to a matching layer with uniform and gradient acoustic impedance change and an ultrasonic transducer.
Background
The ultrasonic wave is a sound wave with the frequency higher than 20KHz, has good directivity and strong reflection capability, is easy to obtain more concentrated sound energy, has a longer propagation distance in water than in air, and can be used in the fields of distance measurement, speed measurement, cleaning, welding, stone breaking, sterilization, disinfection and the like. With the continuous expansion of the application range of ultrasound, such as the application in chemical, nuclear physics, biology, medicine, communication technology, material testing, material processing and other technical fields, higher and higher requirements are put forward on the measurement precision, measurement range, ultrasound power and the like of ultrasound.
The reason for the present obstacles to the widespread use of ultrasound in technology, scientific experiments, etc. is due to the lack of ultrasound transducers that are suitable for use and that are robust, structurally sound, economical and durable. Ultrasonic transducers have historically been a key component of various ultrasound applications, and have been the focus of research.
The ultrasonic transducers can be classified into piezoelectric ultrasonic transducers, magnetostrictive ultrasonic transducers, electric ultrasonic transducers, electromagnetic ultrasonic transducers, and the like (li bo, houxin, yandan qing, wangxinlong, research on matching layers of high-end ultrasonic transducers [ J ]. university of Nanjing (science of Nature), 2015,51(S1): 78-81.). The piezoelectric ultrasonic transducer realizes the mutual conversion of electric energy and sound energy by utilizing the piezoelectric effect or inverse piezoelectric effect of a piezoelectric material. It is composed of a back lining, a circuit board, a piezoelectric ceramic piece and a matching layer. The matching layer can match acoustic impedance of piezoelectric materials of the transducer with impedance of a medium to be measured, improve utilization rate of sound energy, expand bandwidth of the transducer, protect surfaces of piezoelectric ceramics and the transducer and prevent the piezoelectric ceramics and the transducer from being damaged in a working environment. The good matching layer design can enable the sound wave energy to be transmitted between the medium to be measured (such as water 1.5MRayl) and the piezoelectric material (35MRayl) with high efficiency, reduce distortion and simultaneously widen the bandwidth of the transducer. Conversely, the electro-acoustic conversion efficiency of the transducer will be affected, affecting the ultrasonic energy. Therefore, the design of the matching layer is one of the keys of the transducer design.
Chinese patent CN110270493A discloses an ultrasonic transducer, an acoustic impedance matching layer and a method for manufacturing the same. The acoustic impedance matching layer comprises magnetic particles coated with a low-density material layer and an adhesive, wherein the magnetic particles coated with the low-density material layer are distributed in the adhesive in a gradient mode according to different acoustic impedances of the magnetic particles, so that the acoustic impedance of the matching layer is distributed in a gradient gradual mode from one end of the matching layer to the other end of the matching layer.
The commonly used matching layer technology at present is to paste one or more layers of matching layer materials with certain characteristic impedance on the radiation surface of the transducer, although the impedance difference between the medium to be measured and the piezoelectric material can be made up by continuously increasing the number of the matching layer, the bandwidth of the transducer is widened, but the following problems still exist:
1) impedance mismatch still exists between the matching layers, so that energy loss is caused;
2) the frequency of the high-frequency ultrasonic transducer is high, the thickness of a matching layer calculated according to a theory is small, the processing precision is difficult to control, and the cost is high;
3) because the transmitted wave is a pulse wave and contains various frequency components, the wavelength difference in the matching layer is large, the theoretical thickness obtained according to theoretical calculation is different, and the thickness of the matching layer with fixed thickness inevitably causes different losses of the sound waves with different frequency components in the matching layer, thereby causing the problem of signal integrity.
Disclosure of Invention
Aiming at the technical problem of a matching layer of an ultrasonic transducer in the prior art, the invention provides the matching layer with uniform and gradient acoustic impedance change and the ultrasonic transducer.
Compared with the traditional uniform matching layer material, the matching layer provided by the invention has non-uniform material density, the acoustic impedance of the material is in uniform gradient change, and the acoustic impedance of the matching layer is changed from the uniform gradient gradual change of the acoustic impedance of the piezoelectric ceramic plate to the acoustic impedance of an acting medium.
The purpose of the invention can be realized by the following technical scheme:
the invention firstly provides a matching layer with uniform and gradient acoustic impedance, which comprises a shell, cone structures and a filling material, wherein one or more cone structures are arranged in the shell, the filling material is filled in gaps between the cone structures and the shell, and the acoustic impedance is distributed in a gradient and gradual change manner from one end to the other end of the matching layer along the height direction of the cone structures.
In an embodiment of the present invention, a cone structure may be disposed in the housing, and in this case, the angle and the size of the cone structure need to be designed, and the cone angle varies in a range of 0 to 180 degrees, so that the acoustic impedance is gradually distributed in a gradient manner from one end of the matching layer to the other end of the matching layer.
In one embodiment of the present invention, a plurality of cone structures are disposed in the housing, the plurality of cone structures are uniformly distributed in the housing, and the filling material is filled in gaps between the cone structures and the housing and gaps between different cone structures. In the implementation of the technical scheme of the invention, the situation that a plurality of cone structures are arranged in the shell is preferably adopted, and the situation that the acoustic impedance is distributed in a gradient and gradual change mode from one end of the matching layer to the other end of the matching layer is easier to realize.
In an embodiment of the present invention, when the plurality of cone structures are disposed in the housing, the plurality of cone structures are spaced apart from each other or are closely arranged, and when the plurality of cone structures are closely arranged, the acoustic impedance is more effectively distributed in a gradient manner from one end of the matching layer to the other end of the matching layer.
In one embodiment of the present invention, the cone structure is disposed on the housing in a manner including: the bottom of the cone structure is connected to the bottom of the shell, or the top of the cone structure is connected to the bottom of the shell. Preferably, the bottom of the cone structure is connected to the bottom of the shell, so that the structure is stable and easy to manufacture, and the top of the cone structure is connected to the bottom of the shell, which can also meet the effect, but the structure is poor in stability and difficult to manufacture.
In one embodiment of the present invention, the size of the cross section of the pyramidal structure is gradually changed along the height direction of the pyramidal structure, and the pyramidal structure is selected from a cone, a pyramid or a laterally-placed triangular prism structure.
The shape of the rivet-like structure can also be selected, and the basic requirement for the cone structure is that its cross-sectional size is graded along its height. The cone is a three-dimensional figure obtained by rotating for a circle by taking a right-angle side of a right-angle triangle as an axis, and the pyramid comprises a triangular pyramid, a rectangular pyramid, a pentagonal pyramid, a hexagonal pyramid and the like.
In one embodiment of the invention, the shell is of a structure with one open end, so that the arrangement is favorable for conveniently filling the filling material into the shell, and the filling material can be directly contacted with the functional material of the ultrasonic transducer when the matching layer is used for the ultrasonic transducer.
In one embodiment of the invention, the cross-section of the housing is preferably selected to be rectangular or circular in shape.
In one embodiment of the invention, the cone structure is a unitary structure with the housing.
In one embodiment of the present invention, the cone structure and the shell are made of the same material.
In one embodiment of the present invention, the cone structure is made of one material selected from epoxy resin, epoxy resin composite material, rubber or plastic, and preferably epoxy resin. In the invention, the cone structure material is a material with acoustic impedance close to that of the medium to be measured. For example, the medium to be measured is water, and the acoustic impedance of water is 1.5MRayl, so an epoxy resin (e.g., E51 epoxy resin) with an acoustic impedance of 2.8MRayl may be selected for the cone structure.
In an embodiment of the present invention, the cone angle of the cone structure and the distribution density of the cone structure are determined by the required gradient magnitude of the acoustic impedance change, and the smaller the acoustic impedance gradient change is, the smaller the cone structure angle is, the denser the cone structure distribution is, and the cone angle change range is 0 to 180 degrees.
In one embodiment of the present invention, the filling material is a material having an acoustic impedance close to that of the functional material, the acoustic impedance close is between 80% and 120% of the acoustic impedance of the functional material, and the functional material is a functional material in the structure of the ultrasonic transducer when the matching layer is used for the ultrasonic transducer.
In one embodiment of the invention, the filler material is selected to be the same as the functional material in the ultrasound transducer structure. The functional material in the ultrasonic transducer structure can be selected from piezoelectric ceramic materials, piezoelectric ceramic composite materials, piezoelectric single crystal materials and piezoelectric single crystal composite materials, so that the filling material is selected from piezoelectric ceramic powder, piezoelectric ceramic composite material powder, piezoelectric single crystal powder or piezoelectric single crystal composite material powder.
In one embodiment of the present invention, the piezoelectric ceramic is preferably lead zirconate titanate (PZT), and the acoustic impedance of conventional PZT materials is 30 MRayl.
The invention also provides an ultrasonic transducer which comprises the matching layer with the acoustic impedance being changed in a uniform gradient manner.
In one embodiment of the present invention, the ultrasonic transducer includes a matching layer, a functional material and a backing, the backing is located on one side of the functional material, the matching layer is located on another layer of the functional material, the matching layer is a matching layer with uniform gradient change of acoustic impedance, and the filling material is directly contacted with the functional material of the ultrasonic transducer. The functional material in the ultrasonic transducer structure can be selected from piezoelectric ceramic materials, piezoelectric ceramic composite materials, piezoelectric single crystal composite materials and the like.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1. based on the structural design of the application, the density of the material of the matching layer is non-uniform, the acoustic impedance is distributed in a uniform gradient gradual change mode, and the acoustic impedance of the matching layer is changed into the acoustic impedance of an acting medium in a uniform gradient gradual change mode through the acoustic impedance of the piezoelectric ceramic plate.
2. Based on the structural design of the application, the acoustic impedance change gradient in the matching layer is determined by the size and the shape of the cone structure and the setting density of the cone structure, and different acoustic impedance change gradient requirements can be met.
Drawings
FIG. 1 is a schematic perspective view of a matching layer having a uniform gradient of acoustic impedance in example 1;
fig. 2 is a schematic perspective view of an ultrasonic transducer according to embodiment 1;
fig. 3 is a schematic front view of an ultrasonic transducer in embodiment 1;
FIG. 4 is a schematic perspective view of a matching layer having a uniform gradient of acoustic impedance in example 2;
fig. 5 is a schematic perspective view of an ultrasonic transducer in embodiment 2.
Detailed Description
The invention is described in detail below with reference to the figures and specific embodiments.
It should be noted that all the directional indicators (such as up, down, left, right, front, and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the movement situation, etc. in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indicator is changed accordingly.
In addition, the descriptions related to "first", "second", etc. in the present invention are only for descriptive purposes and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "connected," "secured," and the like are to be construed broadly, and for example, "secured" may be a fixed connection, a removable connection, or an integral part; may be directly connected or indirectly connected through an intermediate, unless otherwise specifically limited. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In addition, the technical solutions in the embodiments of the present invention may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination of technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
Example 1
Referring to fig. 1 to 3, the present embodiment provides a matching layer with uniform and gradient acoustic impedance, where the matching layer includes a shell 11, cone structures 12 and a filling material 13, one or more cone structures 12 are disposed in the shell 11, and the filling material 13 is filled in a gap between the cone structures 12 and the shell 11, and the acoustic impedance is gradually distributed from one end of the matching layer to the other end of the matching layer along a height direction of the cone structures 12.
In this embodiment, a plurality of cone structures 12 are disposed in the housing 11, the plurality of cone structures 12 are uniformly distributed and closely arranged in the housing 11, and the filling material 13 is filled in a gap between the cone structures 12 and the housing 11 and a gap between different cone structures 12. This makes it easier to achieve a graded acoustic impedance profile from one end of the matching layer to the other.
In this embodiment, the cone structure 12 is disposed on the housing 11 in the following manner: the bottom of the cone structure 12 is connected to the bottom of the shell 11, so that the structure is stable and easy to manufacture.
In this embodiment, the size of the cross section of the cone structure 12 is gradually changed along the height direction, and the cone structure 12 is selected from a cone. The cone is a three-dimensional figure obtained by rotating a circle by taking a right-angle side of a right-angle triangle as an axis, and the angle of the cone is set to be 60 degrees in the embodiment.
In this embodiment, the housing 11 has a structure with an open end, so that the filling material 13 can be conveniently filled into the housing 11, and it can be ensured that the filling material 13 can be directly contacted with the functional material 2 of the ultrasonic transducer when the matching layer is used for the ultrasonic transducer.
In this embodiment, the cross-section of the housing 11 is selected to be circular.
In this embodiment, the cone structure 12 and the housing 11 are an integral structure.
In this embodiment, the cone structure 12 and the shell 11 are made of the same material.
In this embodiment, the cone structure 12 is made of a material selected from epoxy resin (e.g., E51 epoxy resin) with an acoustic impedance of 2.8 MRayl.
In this embodiment, the filling material 13 is made of piezoelectric ceramic powder, specifically, lead zirconate titanate (PZT), and has an acoustic impedance of 30 MRayl.
The present embodiment further provides an ultrasonic transducer, where the ultrasonic transducer includes a matching layer 1, a functional material 2, and a backing 3, the backing 3 is located on one side of the functional material 2, the matching layer 1 is located on another layer of the functional material 2, the matching layer 1 is a matching layer with uniform and gradient acoustic impedance, and the filling material 13 directly contacts with the functional material 2 of the ultrasonic transducer, that is, when the matching layer 1 is used in the present embodiment, the matching layer is placed upside down on the functional material 2, where the functional material 2 of the ultrasonic transducer is specifically lead zirconate titanate (PZT), and the acoustic impedance is 30 MRayl.
In this example, the filling material 13 was lead zirconate titanate (PZT), the acoustic impedance of the PZT material was 30MRayl, the cone structure was made of E51 epoxy resin having an acoustic impedance of 2.8MRayl, the medium to be measured was water, and the acoustic impedance of water was 1.5MRayl, so that the acoustic impedance gradient was 30MRayl to 1.5 MRayl.
Example 2
Referring to fig. 4 to 5, in the present embodiment, the cross section of the housing 11 is selected to be rectangular, unlike embodiment 1.
Referring to fig. 4-5, unlike embodiment 1, in this embodiment, the pyramid-shaped structure 12 is selected to be a side-placed triangular prism-shaped structure.
Example 3
Unlike embodiment 1, in this embodiment, a cone structure 12 is disposed in the housing 11, and in this case, the angle and the size of the cone structure 12 need to be designed so that the acoustic impedance is gradually graded from one end of the matching layer to the other end.
Example 4
Different from embodiment 1, in this embodiment, a plurality of cone structures 12 are disposed in the housing 11, the plurality of cone structures 12 are uniformly distributed and spaced in the housing 11, and the filling material 13 is filled in the gap between the cone structures 12 and the housing 11 and the gap between different cone structures 12.
Example 5
Unlike embodiment 1, in this embodiment, the cone structure 12 is disposed on the housing 11 in such a manner that the top of the cone structure 12 is connected to the bottom of the housing 11. In this case, although the effect can be satisfied, the structural stability is poor and the manufacturing difficulty is high.
Example 6
Unlike example 1, in the present embodiment, the pyramid structure 12 is selected from a pyramid structure, which includes a triangular pyramid, a rectangular pyramid, a pentagonal pyramid, a hexagonal pyramid, and the like.
In the above embodiment, the taper angle of the pyramidal structure 12 and the distribution density of the pyramidal structure 12 are determined by the required gradient magnitude of the acoustic impedance change, and the smaller the acoustic impedance gradient change is, the smaller the angle of the pyramidal structure 12 is, the denser the distribution of the pyramidal structure 12 is.
The embodiments described above are described to facilitate an understanding and use of the invention by those skilled in the art. It will be readily apparent to those skilled in the art that various modifications to these embodiments may be made, and the generic principles described herein may be applied to other embodiments without the use of the inventive faculty. Therefore, the present invention is not limited to the above embodiments, and those skilled in the art should make improvements and modifications within the scope of the present invention based on the disclosure of the present invention.

Claims (10)

1. The matching layer with the acoustic impedance being changed in uniform gradient is characterized by comprising a shell (11), one or more cone structures (12) and a filling material (13), wherein the shell (11) is internally provided with the one or more cone structures (12), the filling material (13) is filled in a gap between the cone structures (12) and the shell (11), and the acoustic impedance is distributed in gradient gradual change from one end of the matching layer to the other end of the matching layer along the height direction of the cone structures (12).
2. A matching layer of uniform gradient of acoustic impedance according to claim 1, wherein a plurality of cone structures (12) are provided in the housing (11), the plurality of cone structures (12) being uniformly distributed in the housing (11), the filling material (13) being filled in the gaps between the cone structures (12) and the housing (11) and between different cone structures (12).
3. A matching layer with uniform gradient of acoustic impedance according to claim 2, wherein when a plurality of cone structures (12) are provided in the housing (11), the plurality of cone structures (12) are spaced apart or closely arranged.
4. A matching layer with uniform and graded acoustic impedance according to claim 1, wherein the cross-sectional size of the pyramidal structures (12) is graded along the height of the pyramidal structures (12), and the pyramidal structures (12) are selected from the group consisting of cones, pyramids and laterally placed triangular prism structures.
5. A matching layer of uniform gradient acoustic impedance according to claim 1, wherein said housing (11) is open-ended.
6. A matching layer with uniform gradient of acoustic impedance according to claim 1, wherein the pyramidal structure (12) is made of a material selected from one of epoxy, epoxy composite, rubber or plastic.
7. The matching layer of uniform gradient of acoustic impedance as set forth in claim 1, wherein the taper angle of said tapered structures (12) and the density of distribution of said tapered structures (12) are determined by the magnitude of the gradient of acoustic impedance change required, and wherein the smaller the change of the gradient of acoustic impedance, the smaller the angle of said tapered structures (12) and the denser the distribution of said tapered structures (12).
8. The matching layer with uniform gradient of acoustic impedance as claimed in claim 1, wherein the filling material (13) is made of a material with acoustic impedance close to that of the functional material, the acoustic impedance close is between 80% and 120% of the acoustic impedance of the functional material, and the functional material is the functional material (2) in the structure of the ultrasonic transducer when the matching layer is used for the ultrasonic transducer.
9. An ultrasonic transducer comprising a matching layer of uniform gradient of acoustic impedance as defined in any one of claims 1 to 8.
10. An ultrasonic transducer according to claim 9, characterized in that the ultrasonic transducer comprises a matching layer (1), a functional material (2) and a backing (3), the backing (3) being located on one side of the functional material (2), the matching layer (1) being located on another layer of the functional material (2), the filler material (13) being in direct contact with the functional material (2) of the ultrasonic transducer.
CN202111616985.7A 2021-12-27 2021-12-27 Matching layer with acoustic impedance changing in uniform gradient and ultrasonic transducer Pending CN114273193A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006174992A (en) * 2004-12-22 2006-07-06 Matsushita Electric Ind Co Ltd Ultrasonic probe
CN103796149A (en) * 2014-02-14 2014-05-14 南京大学 Manufacturing method for wedge-shaped acoustic matching layer
CN106209011A (en) * 2016-08-01 2016-12-07 陕西师范大学 Acoustic impedance match device and method based on piezoelectric effect
JP2019135824A (en) * 2018-02-05 2019-08-15 コニカミノルタ株式会社 Acoustic matching layer, ultrasonic wave probe, and method for manufacturing acoustic matching layer
CN112040382A (en) * 2020-08-10 2020-12-04 上海船舶电子设备研究所(中国船舶重工集团公司第七二六研究所) High-bandwidth underwater acoustic transducer based on acoustic impedance gradient matching layer

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006174992A (en) * 2004-12-22 2006-07-06 Matsushita Electric Ind Co Ltd Ultrasonic probe
CN103796149A (en) * 2014-02-14 2014-05-14 南京大学 Manufacturing method for wedge-shaped acoustic matching layer
CN106209011A (en) * 2016-08-01 2016-12-07 陕西师范大学 Acoustic impedance match device and method based on piezoelectric effect
JP2019135824A (en) * 2018-02-05 2019-08-15 コニカミノルタ株式会社 Acoustic matching layer, ultrasonic wave probe, and method for manufacturing acoustic matching layer
CN112040382A (en) * 2020-08-10 2020-12-04 上海船舶电子设备研究所(中国船舶重工集团公司第七二六研究所) High-bandwidth underwater acoustic transducer based on acoustic impedance gradient matching layer

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