CN114264675A - Defect detection device and method for grid line of solar cell - Google Patents
Defect detection device and method for grid line of solar cell Download PDFInfo
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- CN114264675A CN114264675A CN202210001584.9A CN202210001584A CN114264675A CN 114264675 A CN114264675 A CN 114264675A CN 202210001584 A CN202210001584 A CN 202210001584A CN 114264675 A CN114264675 A CN 114264675A
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Abstract
The invention discloses a defect detection device and a method for a grid line of a solar cell, wherein the defect detection device comprises: the vacuum adsorption device comprises a hollow rectangular base, a vacuum generation device, a vacuum tube, a nut and an adjusting bolt, wherein a group of small holes are formed in the rectangular base, an air exhaust hole is formed in the side face of the rectangular base, the vacuum generation device is connected with the air exhaust hole through the vacuum tube, the small holes are formed in four corners of the rectangular base respectively, an adjusting screw penetrates through the small holes to be connected with the nut, the lower end of the adjusting screw is in contact with the two-dimensional moving device, and the two-dimensional moving device comprises a left-right moving base, a front-back moving base, an x-axis stepping motor, a y-axis stepping motor, a stepping motor driver and a base. Meanwhile, the invention discloses a method for detecting the defects of the grid lines of the solar cell, which can quickly and effectively find the positions of the grid lines with the defects.
Description
Technical Field
The invention relates to the field of solar cell detection, in particular to a defect detection device and method for a solar cell grid line.
Background
As a clean energy source, how to convert solar energy into energy capable of being utilized by human beings and how to improve the utilization rate becomes an important research direction.
The solar cell is a device capable of converting solar energy into electric energy, and with the intensive research on the solar cell, the requirement on the quality of the solar cell is higher and higher.
One of the methods for detecting the quality problems of the solar cell is to detect whether the grid lines in the solar cell have defects. The problem of too thin grid lines caused by printing is one of the main defects of the grid lines, so that the power generation efficiency of a solar cell is reduced, the service life of the solar cell is greatly shortened, but whether the thickness of the grid lines is defective or not can not be directly identified by human eyes, and an electron microscope is needed. At present, an electron microscope is generally used for detecting five points on an artificially randomly selected grid line, but the five points do not sufficiently reflect the quality of the whole solar cell, so that the misjudgment rate is very high.
Disclosure of Invention
Aiming at the technical problems, the invention provides a defect detection device and method for a grid line of a solar cell, which can automatically mark all unqualified positions, thereby improving the quality detection efficiency of the cell and providing a guide for finding problems in a printing process.
In order to achieve the purpose, the technical scheme provided by the invention is as follows:
in a first aspect, the invention provides a defect detection device for a grid line of a solar cell, which comprises a vacuum adsorption device, a two-dimensional moving device, a base, an electron microscope and a data processor, wherein the vacuum adsorption device is arranged on the base;
the vacuum adsorption device comprises a hollow rectangular base, a vacuum generation device, a vacuum tube, a screw cap and an adjusting bolt matched with the screw cap;
the vacuum generating device is connected with the air exhaust hole through the vacuum tube, four corners of the rectangular base are respectively provided with an adjusting hole, an adjusting bolt penetrates through the adjusting hole to be connected with a nut, the lower end of the adjusting bolt is in contact with the two-dimensional moving device, the height of the nut can be controlled by rotating the nut, and therefore the purpose of adjusting the height of any corner of the rectangular base is achieved;
the two-dimensional moving device comprises a left-right moving base, a front-back moving base, an x-axis stepping motor, a y-axis stepping motor, a stepping motor driver and a base;
the back of the front-back moving base is provided with two sliding rods and a rack, the sliding rods and the y-direction rack are both parallel to the short edge of the rectangular base, the sliding rods penetrate through sliding rod holders matched with the sliding rods, the sliding rod holders are installed on the left-right moving base, and a central shaft of the y-axis stepping motor is provided with a gear meshed with the y-direction rack;
the back of the left-right moving base is provided with two sliding rods and an x-direction rack, the sliding rods and the x-direction rack are both parallel to the long edge of the rectangular base, the sliding rods penetrate through sliding rod holders matched with the sliding rods, the sliding rod holders are installed on the base, and a central shaft of the x-axis stepping motor is provided with a gear meshed with the x-direction rack; the stepping motor driver is used for independently driving the x-axis stepping motor and the y-axis stepping motor;
the front-back moving device is placed on the left-right moving device, so that the long edge of the front-back moving device is parallel to the long edge of the left-right moving device, and the rectangular base is placed on the front-back moving base, so that the long edge of the rectangular base is parallel to the long edge of the front-back moving base;
the base is a rectangular support frame which is suspended above a base of the electron microscope and is provided with four supporting legs, and the left-right moving device is placed on the base;
the electron microscope is arranged above the rectangular base and used for acquiring image information of the solar cell fixed on the rectangular base during working;
the data processor is connected with the electron microscope and the stepping motor driver and is used for processing information in the image; the data processor also generates control instructions to control the stepper motor driver.
Preferably, the x-axis stepping motor controls the whole body formed by the left-right moving base, the front-back moving base, the y-axis stepping motor and the rectangular base to move left and right, and the y-axis stepping motor controls the whole body formed by the front-back moving base and the rectangular base to move front and back;
preferably, the x-axis stepping motor controls the left-right moving base, the front-back moving base, the y-axis stepping motor and the rectangular base to integrally move left and right, and the y-axis stepping motor controls the front-back moving base and the rectangular base to integrally move front and back;
preferably, the front-back direction of the rectangular base is a direction parallel to a short side of the rectangular base, and the left-right direction is a direction parallel to a long side of the rectangular base.
Preferably, the rectangular base, the front-back moving base, the left-right moving base and the base are rectangular in plan view.
Preferably, the solar cell is placed on the rectangular base and can cover all the small holes.
On the other hand, the invention also provides a solar cell grid line defect detection method of the defect detection device, which comprises the following steps:
1) adsorbing a solar cell on the rectangular base;
2) the rectangular bases are positioned on the same horizontal plane by adjusting the adjusting bolts;
3) establishing a coordinate system;
4) scanning the grid line, photographing the grid line, judging the moving information of the next step while photographing, judging the width of the grid line, and calibrating and storing the position with possible defects and the position with defects;
5) and further judging the position which possibly has the defect, and calibrating and storing the position of the grid line which is further judged to have the defect.
As a preferred embodiment of the present invention, the step 1) specifically comprises: and opening the vacuum generating device, and placing the solar cell, so that the longer side of the solar cell is parallel to the long side of the rectangular base, and the shorter side of the solar cell is parallel to the short side of the rectangular base.
As a preferred embodiment of the present invention, the step 2) specifically comprises: the x-axis stepping motor and the y-axis stepping motor operate to enable the rectangular base to drive the solar cell to move upwards and rightwards, namely the electron microscope moves downwards and leftwards relative to the rectangular base and moves to the lower left corner of the grid line pattern of the solar cell, at the moment, the electron microscope focuses on the grid line, then the electron microscope moves along the edge of the solar cell and moves to the lower right corner of the grid line pattern of the solar cell, the grid line is focused again, the up-down movement distance of the lens of the electron microscope during focusing is read, if the movement distance is not zero, the lower left corner and the lower right corner of the grid line are not in the same horizontal line at the moment, the adjusting bolt at the lower left corner or the lower right corner of the rectangular base is rotated, the movement is controlled again, the above operations are repeated until the up-down movement distance of the lens of the electron microscope is zero, and the edge below the solar cell is in the same horizontal line, and reading and storing the rotation angles of the stepping motors of the x axis and the y axis in the last movement, converting the movement distances in two directions, knowing the length of the edge by using the pythagorean theorem, and calculating the edge length. On the premise of moving the whole device, whether the long edge of the solar cell is in the same horizontal line or not is detected next time, and only the rotating angles of the x-axis stepping motor and the y-axis stepping motor are required to be obtained and compared with the standard values. After the lower long edge of the solar cell is detected, the upper long edge is detected continuously according to the method, at the moment, whether the rotating angles of the stepping motors of the x axis and the y axis are the same as the rotating angles under the condition that the stepping motors are in the same horizontal line or not is only needed to be seen, and if the rotating angles are not the same, the corresponding adjusting bolts are rotated. And when the detection of the long sides is finished, the short sides are detected by the same method, the last data is stored, and when the detection of the four sides is finished, the solar cell pieces are positioned on the same horizontal plane.
After the solar cells are positioned on the same horizontal plane, the moving distance of the matrix base on the x axis or the y axis can be converted through the rotating angle of the stepping motor corresponding to the long edge of the solar cell:
wherein x is the moving distance,theta is the rotation angle of the stepping motor, theta0The rotation angle of the stepping motor is the rotation angle of the solar cell after the solar cells are positioned on the same horizontal plane, and l is the length of the long edge of the solar cell;
the moving distance of the electron microscope lens can be calculated by the pythagorean theorem:
wherein a is the moving distance of the lens of the electron microscope, d1The distance of movement of the matrix base in the x-axis, d2Is the distance the matrix base moves in the y-axis.
As a preferred embodiment of the present invention, the step 3) specifically comprises: controlling an x-axis stepping motor and a y-axis stepping motor to operate, focusing an electron microscope on two end points of a grid line on the leftmost side of a solar cell, and storing the positions of the two end points, wherein a straight line on which a connecting line of the two end points is located is taken as a y-axis, the upward direction is the positive direction of the y-axis, a straight line which passes through the lower end point and is vertical to the y-axis is taken as an x-axis, the rightward direction is the positive direction of the x-axis, at the moment, the lower end point of a first grid line is the origin (0, 0) of coordinates, and the coordinates of the upper end point are (0, y-axis)1)。
As a preferred embodiment of the present invention, the step 4) specifically comprises: after the coordinate system is established, the x-axis stepping motor and the y-axis stepping motor are started, the electron microscope is aligned to the original point, the rectangular base is controlled to move along the negative direction of the y axis after focusing, the electron microscope takes a picture once when the central shaft of the stepping motor rotates for a certain angle, the grid line pattern is identified through an image processing algorithm, the grid line width w is calculated and compared with a standard value, and meanwhile, how the stepping motor operates on the next step is judged.
Wherein, if the coordinate position y of the central point of the photo satisfies 0 < y1Then, go on in the original direction, if y is 0 or y is y1Controlling the electron microscope to move rightwards relative to the solar cell along the positive direction of the x axis until an end point of the next grid line is found, and then moving along the direction parallel to the y axis until the rightmost grid is scannedThe line is stopped, and the value at which the abscissa (x-axis coordinate value) of the electron microscope is larger than the long side of the solar cell can be used as a stop mark.
The defect judgment method is as follows:
if w>wmaxJudging that the position of the defect does not exist;
if wmin≤w≤wmaxJudging the position possibly having the defect, and calibrating and storing the position coordinate information;
if w < wminJudging the position with the defect and storing the coordinate information of the position;
wherein, wmaxAs the maximum value of the width of the position where a defect may exist, wminIs the minimum of the width of the location where the defect may be present.
As a preferable embodiment of the present invention, the step 5) specifically comprises: establishing a 3D model in the calibrated possible defect position field through the self-carried function of the electron microscope, reading the height h of the lowest point of the section of grid line, comparing the height h with a standard value of the height, and if h is more than or equal to hminJudging that the grid line has no defect, if h is less than hminJudging that the grid line has defects, and storing the position coordinate information, wherein hminIs the minimum value at which the gate line is judged to be free of defects.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1. the defect detection device for the grid line of the solar cell piece can calibrate the position of the solar cell piece, can fully automatically detect the position with the defect and store the position with the defect, thereby greatly reducing the labor cost;
2. the defect detection device for the grid line of the solar cell slice does not depend on a carrying platform system of an electron microscope, so that the defect detection device can be suitable for various microscopes.
3. The defect detection device for the grid line of the solar cell piece is low in manufacturing cost and can be widely used.
4. The defect detection device and method for the grid line of the solar cell piece can scan all grid line positions with defects instead of randomly detecting a plurality of points, enhances the detection accuracy, and provides guidance for finding problems in a printing process, thereby accurately repairing the printing process.
5. According to the defect detection device and method for the grid line of the solar cell, the width of the grid line is detected in a plane, then the height of the grid line position with the possible defect is manually judged through the 3D model generated by the electron microscope, and as the 3D model is established for a long time, the 3D model is not established for each photographing position, but only the 3D model is established for the position with the possible defect, so that the detection time is greatly reduced.
Drawings
Fig. 1 is a front view of a defect detecting apparatus for a grid line of a solar cell in an embodiment of the invention;
fig. 2 is a top view of a rectangular base of a defect detecting device for a grid line of a solar cell in an embodiment of the invention;
fig. 3 is a photographing route diagram of an electron microscope of the method for detecting defects of a grid line of a solar cell in the embodiment of the present invention.
Fig. 4 is a flowchart of a method for detecting defects on a grid line of a solar cell in an embodiment of the present invention.
Wherein the figures include the following reference numerals:
101. a rectangular base; 102. a vacuum generating device; 103. a vacuum tube; 104. a nut; 105. adjusting the bolt; 106. a small hole; 107. an air exhaust hole; 108. moving the base left and right; 109. moving the base back and forth; 110. an x-axis stepper motor; 111. a y-axis stepper motor; 112. a stepper motor driver; 113. a slide bar; 114. a rack; 115. a slide bar holder; 116. a central shaft of the stepping motor; 117. a gear; 118. a base; 119. a base of the electron microscope; 120. a data processor.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is only a part of the embodiment of the present invention, and not a whole embodiment. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the terms "comprises" and "comprising," and any variations thereof, when used in this specification and the appended claims, specify the presence of stated features, integers, steps, operations, elements, and components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and groups thereof.
Referring to fig. 1-2, fig. 1 and 2 show a defect detection apparatus for a grid line of a solar cell according to an exemplary embodiment of the present invention, the defect detection apparatus includes: the device comprises a vacuum adsorption device, a two-dimensional moving device, a base, an electron microscope and a data processor;
the vacuum adsorption device comprises a hollow rectangular base, a vacuum generation device, a vacuum tube, a screw cap and an adjusting bolt matched with the screw cap;
the vacuum generator is characterized in that a plurality of groups of small holes are formed in the hollow rectangular base, an air exhaust hole is formed in the side face of the hollow rectangular base, the vacuum generator is connected with the air exhaust hole through the vacuum tube, adjusting holes are formed in four corners of the rectangular base respectively, adjusting bolts penetrate through the adjusting holes from top to bottom to be connected with nuts, the lower ends of the adjusting bolts are in contact with the two-dimensional moving device, the heights of the nuts can be controlled by rotating the nuts, and therefore the purpose of adjusting the heights of any corners of the rectangular base is achieved.
The two-dimensional moving device comprises a left-right moving base, a front-back moving base, an x-axis stepping motor, a y-axis stepping motor and a stepping motor driver;
the back of the front-back moving base is provided with two sliding rods and a rack, the sliding rods and the rack are both parallel to the short edge of the rectangular base, the sliding rods penetrate through sliding rod holders matched with the sliding rods, the sliding rod holders are installed on the left-right moving base, and a central shaft of the y-axis stepping motor is provided with a gear meshed with the rack;
the back of the left-right moving base is provided with two sliding rods and a rack, the sliding rods and the rack are both parallel to the long edge of the rectangular base, the sliding rods penetrate through sliding rod holders matched with the sliding rods, the sliding rod holders are installed on the base, and a central shaft of the x-axis stepping motor is provided with a gear meshed with the rack; the stepping motor driver is used for independently driving the x-axis stepping motor and the y-axis stepping motor;
the front-back moving device is placed on the left-right moving device, so that the long edge of the front-back moving device is parallel to the long edge of the left-right moving device, and the rectangular base is placed on the front-back moving base, so that the long edge of the rectangular base is parallel to the long edge of the front-back moving base;
the base is a rectangular support frame which is suspended above a base of the electron microscope and is provided with four supporting legs, and the left-right moving device is placed on the base;
the electron microscope is arranged above the rectangular base and used for acquiring image information of the solar cell fixed on the rectangular base during working;
the data processor is connected with the electron microscope and the stepping motor driver and is used for processing information in the image; the data processor also generates control instructions to control the stepper motor driver.
The stepping motor driver is used for independently controlling the central shafts of the x-axis stepping motor and the y-axis stepping motor to operate or stop clockwise or anticlockwise; thereby controlling the front-back moving base and the left-right moving base to move;
the X-axis stepping motor controls the whole body formed by the left-right moving base, the front-back moving base, the Y-axis stepping motor and the rectangular base to move left and right, and the Y-axis stepping motor controls the whole body formed by the front-back moving base and the rectangular base to move front and back;
the front and back direction of the rectangular base is parallel to the short side of the rectangular base, and the left and right direction is parallel to the long side of the rectangular base.
The rectangular base, the front-back moving base, the left-right moving base and the base are rectangular in top view.
The solar cell is placed on the rectangular base and can cover all the small holes.
Referring to fig. 4, a method for detecting a gate line defect of a solar cell according to an exemplary embodiment of the invention is shown, including:
s101, adsorbing a solar cell on the rectangular base;
and opening the vacuum generating device, and placing the solar cell, so that the longer side of the solar cell is parallel to the long side of the rectangular base, and the shorter side of the solar cell is parallel to the short side of the rectangular base.
S102, adjusting the adjusting bolts to enable the rectangular bases to be located on the same horizontal plane;
the x-axis stepping motor and the y-axis stepping motor operate to enable the rectangular base to drive the solar cell to move upwards and rightwards, namely the electron microscope moves downwards and leftwards relative to the rectangular base and moves to the lower left corner of the grid line pattern of the solar cell, at the moment, the electron microscope focuses on the grid line, then the electron microscope moves along the edge of the solar cell and moves to the lower right corner of the grid line pattern of the solar cell, the grid line is focused again, the up-down movement distance of the lens of the electron microscope during focusing is read, if the movement distance is not zero, the lower left corner and the lower right corner of the grid line are not in the same horizontal line at the moment, the adjusting bolt at the lower left corner or the lower right corner of the rectangular base is rotated, the movement is controlled again, the above operations are repeated until the up-down movement distance of the lens of the electron microscope is zero, and the edge below the solar cell is in the same horizontal line, and reading and storing the rotation angles of the stepping motors of the x axis and the y axis in the last movement, converting the movement distances in two directions, knowing the length of the edge by using the pythagorean theorem, and calculating the edge length. On the premise of moving the whole device, whether the long edge of the solar cell is in the same horizontal line or not is detected next time, and only the rotating angles of the x-axis stepping motor and the y-axis stepping motor are required to be obtained and compared with the standard values. After the lower long edge of the solar cell is detected, the upper long edge is detected continuously according to the method, at the moment, whether the rotating angles of the stepping motors of the x axis and the y axis are the same as the rotating angles under the condition that the stepping motors are in the same horizontal line or not is only needed to be seen, and if the rotating angles are not the same, the corresponding adjusting bolts are rotated. And when the detection of the long sides is finished, the short sides are detected by the same method, the last data is stored, and when the detection of the four sides is finished, the solar cell pieces are positioned on the same horizontal plane.
After the solar cells are positioned on the same horizontal plane, the moving distance of the matrix base on the x axis or the y axis can be converted by the rotating angle of the stepping motor corresponding to the long edge of the solar cell, wherein l is 156mm of the long edge of the solar cell, and theta isxThe rotation angle of the shaft stepping motor is 1080 DEG thetayThe rotating angle of the stepping motor of the y axis is 720 degrees; theta0The rotating angle of the stepping motor is 1440 degrees after the solar cell is positioned on the same horizontal plane:
wherein x is the moving distance of the matrix base on the x axis, and the unit is as follows: millimeters (mm), y being the distance the matrix base moves on the y-axis, in units: millimeter (mm):
the moving distance of the electron microscope lens can be calculated by the pythagorean theorem:
wherein, a is the moving distance of the lens of the electron microscope, x is the moving distance of the matrix base on the x axis, y is the moving distance of the matrix base on the y axis, and the unit is millimeter (mm).
S103, establishing a coordinate system;
controlling an x-axis stepping motor and a y-axis stepping motor to operate, focusing an electron microscope on two end points of a grid line on the leftmost side of a solar cell, and storing the positions of the two end points, wherein a straight line on which a connecting line of the two end points is located is taken as a y-axis, the upward direction is a positive direction of the y-axis, a straight line which passes through the lower end point and is vertical to the y-axis is taken as an x-axis, the rightward direction is a positive direction of the x-axis, and the unit of a coordinate system is millimeter (mm). At this time, the lower endpoint of the first grid line is the origin of coordinates (0, 0), and the upper endpoint coordinates are (0, 140.62).
S104, scanning the grid line, photographing the grid line, judging the moving information of the next step while photographing, judging the width of the grid line, and calibrating and storing the position where the defect possibly exists and the position where the defect exists;
after a coordinate system is established, starting an x-axis stepping motor and a y-axis stepping motor to enable an electron microscope to be aligned to an original point, controlling the rectangular base to move along the y-axis in the negative direction after focusing, taking a picture by the electron microscope once when the central shaft of the stepping motor rotates for a certain angle, identifying a grid line pattern through an image processing algorithm, and calculating the width w of the grid line and a standard value w0And comparing, and judging how to operate the stepping motor in the next step.
If the coordinate position y of the central point of the photo satisfies 0 < y < 140.62, the electronic microscope is continuously moved in the original direction, and if y is 0 or y is 140.62, the electronic microscope is controlled to move rightwards relative to the solar cell slice along the positive direction of the x axis until the end point of the next grid line is found, and then the electronic microscope is controlled to move along the direction parallel to the y axis until the rightmost grid line is scanned, and then the electronic microscope is stopped until the transverse coordinate (the coordinate value of the x axis) of the electronic microscope is larger than the value of the long edge of the solar cell slice, namely 156mm is used as a stop sign.
The defect judgment method is as follows:
if w>0.9w0Judging that the position of the defect does not exist;
if 0.7w0≤w≤0.9w0Judging the position possibly having the defect, and calibrating and storing the position coordinate information;
if w is less than 0.7w0Then, it is determined as the position of the defectAnd stores the position coordinate information.
And S105, further judging the position where the defect possibly exists, and calibrating and storing the position of the grid line which is further judged to have the defect.
Establishing a 3D model in the calibrated field with possible defect positions through the self-carried function of the electron microscope, reading the height h of the lowest point of the section of grid line, and comparing the height h with a standard value h of the height0Comparing, if h is more than or equal to 0.7h0Judging that the grid line has no defect, if h is less than 0.7h0And judging that the grid line has defects, and storing the position coordinate information.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (10)
1. A defect detection device for a grid line of a solar cell is characterized by comprising a vacuum adsorption device, a two-dimensional moving device, a base, an electron microscope and a data processor;
the vacuum adsorption device comprises a hollow rectangular base, a vacuum generation device, a vacuum tube, a screw cap and an adjusting bolt matched with the screw cap;
the vacuum generating device is connected with the air exhaust hole through the vacuum tube, four corners of the rectangular base are respectively provided with an adjusting hole, an adjusting bolt penetrates through the adjusting hole to be connected with a nut, the lower end of the adjusting bolt is in contact with the two-dimensional moving device, the height of the nut can be controlled by rotating the nut, and therefore the purpose of adjusting the height of any corner of the rectangular base is achieved;
the two-dimensional moving device comprises a left-right moving base, a front-back moving base, an x-axis stepping motor, a y-axis stepping motor, a stepping motor driver and a base;
the back of the front-back moving base is provided with two sliding rods and a rack, the sliding rods and the y-direction rack are both parallel to the short edge of the rectangular base, the sliding rods penetrate through sliding rod holders matched with the sliding rods, the sliding rod holders are installed on the left-right moving base, and a central shaft of the y-axis stepping motor is provided with a gear meshed with the y-direction rack;
the back of the left-right moving base is provided with two sliding rods and an x-direction rack, the sliding rods and the x-direction rack are both parallel to the long edge of the rectangular base, the sliding rods penetrate through sliding rod holders matched with the sliding rods, the sliding rod holders are installed on the base, and a central shaft of the x-axis stepping motor is provided with a gear meshed with the x-direction rack; the stepping motor driver is used for independently driving the x-axis stepping motor and the y-axis stepping motor;
the front-back moving device is placed on the left-right moving device, so that the long edge of the front-back moving device is parallel to the long edge of the left-right moving device, and the rectangular base is placed on the front-back moving base, so that the long edge of the rectangular base is parallel to the long edge of the front-back moving base;
the left-right moving device is placed on the base;
the electron microscope is arranged above the rectangular base and used for acquiring image information of the solar cell fixed on the rectangular base during working;
the data processor is connected with the electron microscope and the stepping motor driver and is used for processing information in the image; the data processor also generates control instructions to control the stepper motor driver.
2. The apparatus of claim 1, wherein the stepping motor driver is configured to independently control the central axes of the x-axis stepping motor and the y-axis stepping motor to operate or stop clockwise or counterclockwise; thereby controlling the front and rear moving base and the left and right moving base to move.
3. The device for detecting the defects of the grid line of the solar cell piece as claimed in claim 1, wherein the x-axis stepping motor controls the left-right movement of the whole composed of the left-right moving base, the front-back moving base, the y-axis stepping motor and the rectangular base to move left and right, and the y-axis stepping motor controls the front-back moving base, the front-back moving base and the rectangular base to move front and back.
4. The apparatus of claim 1, wherein the front-to-back direction of the rectangular base is parallel to the short side of the rectangular base, and the left-to-right direction is parallel to the long side of the rectangular base.
5. The method for detecting the defects of the grid lines of the solar cell of the defect detection device as claimed in any one of claims 1 to 4, characterized by comprising the following steps:
1) adsorbing a solar cell on the rectangular base;
2) the rectangular bases are positioned on the same horizontal plane by adjusting the adjusting bolts;
3) establishing a coordinate system;
4) scanning the grid line, photographing the grid line, judging the moving information of the next step while photographing, judging the width of the grid line, and calibrating and storing the position with possible defects and the position with defects;
5) and further judging the position which possibly has the defect, and calibrating and storing the position of the grid line which is further judged to have the defect.
6. The method according to claim 5, wherein the step 1) is specifically: and opening the vacuum generating device, and placing the solar cell, so that the longer side of the solar cell is parallel to the long side of the rectangular base, and the shorter side of the solar cell is parallel to the short side of the rectangular base.
7. The method according to claim 5, wherein the step 2) is specifically:
the x-axis stepping motor and the y-axis stepping motor operate to enable the rectangular base to drive the solar cell to move upwards and rightwards, namely the electron microscope moves downwards and leftwards relative to the rectangular base and moves to the lower left corner of the grid line pattern of the solar cell, at the moment, the electron microscope focuses on the grid line, the electron microscope moves along the edge of the solar cell and moves to the lower right corner of the grid line pattern of the solar cell, the grid line is focused again, the up-down movement distance of the lens of the electron microscope during twice focusing before and after reading is read, if the movement distance is not zero, the fact that the lower left corner and the lower right corner of the grid line are not in the same horizontal line at the moment is shown, the adjusting bolt at the lower left corner or the lower right corner of the rectangular base is rotated, the movement is controlled again, the operations are repeated until the up-down movement distance of the lens of the electron microscope is zero, at the moment, the x-axis stepping motor reads and stores the x-axis stepping motor during the last movement, The rotating angle of the y-axis stepping motor is converted into the moving distance in two directions, the length of the side can be known by utilizing the pythagorean theorem, and the side length can be calculated; after the lower long edge of the solar cell is detected, continuously detecting the upper long edge and the two short edges, enabling each edge to be in the same horizontal line, storing rotation angle data of the stepping motor in the x axis and the y axis when each edge is adjusted to be horizontal, and after the four edges are detected, enabling the solar cell to be in the same horizontal plane;
after the solar cells are positioned on the same horizontal plane, the moving distance of the matrix base on the x axis or the y axis can be converted through the rotating angle of the stepping motor corresponding to the long edge of the solar cell:
wherein x is the moving distance, theta is the rotation angle of the stepping motor, and theta0The rotation angle of the stepping motor is the rotation angle of the solar cell after the solar cells are positioned on the same horizontal plane, and l is the length of the long edge of the solar cell;
the moving distance of the electron microscope lens can be calculated by the pythagorean theorem:
wherein a is the moving distance of the lens of the electron microscope, d1The distance of movement of the matrix base in the x-axis, d2Is the distance the matrix base moves in the y-axis.
8. The method according to claim 5, wherein the step 3) is specifically: controlling an x-axis stepping motor and a y-axis stepping motor to operate, focusing an electron microscope on two end points of a grid line on the leftmost side of a solar cell, and storing the positions of the two end points, wherein a straight line on which a connecting line of the two end points is located is taken as a y-axis, the upward direction is the positive direction of the y-axis, a straight line which passes through the lower end point and is vertical to the y-axis is taken as an x-axis, the rightward direction is the positive direction of the x-axis, at the moment, the lower end point of a first grid line is the origin (0, 0) of coordinates, and the coordinates of the upper end point are (0, y-axis)1)。
9. The method according to claim 5, wherein the step 4) is specifically: after a coordinate system is established, starting an x-axis stepping motor and a y-axis stepping motor to enable an electron microscope to be aligned to an original point, controlling the rectangular base to move along the y-axis in a negative direction after focusing is carried out, taking a picture by the electron microscope once when a central shaft of the stepping motor rotates for a certain angle, identifying a grid line pattern through image processing, calculating the width w of a grid line, comparing the width w with a standard value, and meanwhile judging how the stepping motor operates in the next step;
wherein, if the coordinate position y of the central point of the photo satisfies 0 < y1Then, go on in the original direction, if y is 0 or y is y1Controlling the electron microscope to move rightwards relative to the solar cell along the positive direction of the x axis until the end point of the next grid line is found, then moving along the direction parallel to the y axis until the rightmost grid line is scanned, and stopping,
the defect judgment method is as follows:
if w > wmaxJudging that the position of the defect does not exist;
if wmin≤w≤wmaxJudging the position possibly having the defect, and calibrating and storing the position coordinate information;
if w < wminJudging the position with the defect and storing the coordinate information of the position;
wherein, wmaxAs the maximum value of the width of the position where a defect may exist, wminIs the minimum of the width of the location where the defect may be present.
10. The method according to claim 5, wherein the step 5) is specifically: establishing a 3D model in the calibrated possible defect position field through the self-carried function of the electron microscope, reading the height h of the lowest point of the section of grid line, comparing the height h with a standard value of the height, and if h is more than or equal to hminJudging that the grid line has no defect, if h is less than hminJudging that the grid line has defects, and storing the position coordinate information, wherein hminIs the minimum value at which the gate line is judged to be free of defects.
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