CN114264429B - Method and device for testing air leakage of vacuum system, electronic equipment and storage medium - Google Patents
Method and device for testing air leakage of vacuum system, electronic equipment and storage medium Download PDFInfo
- Publication number
- CN114264429B CN114264429B CN202111328529.2A CN202111328529A CN114264429B CN 114264429 B CN114264429 B CN 114264429B CN 202111328529 A CN202111328529 A CN 202111328529A CN 114264429 B CN114264429 B CN 114264429B
- Authority
- CN
- China
- Prior art keywords
- vacuum system
- time
- preset
- workpiece
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 47
- 238000012360 testing method Methods 0.000 title claims abstract description 42
- 238000003860 storage Methods 0.000 title claims abstract description 12
- 238000012545 processing Methods 0.000 claims description 18
- 230000008569 process Effects 0.000 claims description 9
- 238000004590 computer program Methods 0.000 claims description 6
- 238000000231 atomic layer deposition Methods 0.000 claims description 5
- 238000010998 test method Methods 0.000 claims description 5
- 238000005229 chemical vapour deposition Methods 0.000 claims description 4
- 238000005240 physical vapour deposition Methods 0.000 claims description 4
- 230000002950 deficient Effects 0.000 description 9
- 238000005086 pumping Methods 0.000 description 6
- 238000004891 communication Methods 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Abstract
The application belongs to the technical field of vacuum system tightness test, and provides a method and device for testing air leakage of a vacuum system, electronic equipment and a storage medium. The method is used for testing whether the vacuum system leaks or not, and comprises the following steps: after the vacuum system is put into a workpiece, the time required from the start of air suction to the reaching of a preset pressure is acquired and recorded as first time; judging whether the vacuum system leaks air or not according to the first time and the preset time; the preset time is the time required from the start of air suction to the reaching of the preset pressure before the vacuum system is placed in the workpiece. The application can test whether the vacuum system leaks air or not, and when the vacuum system leaks air, a user is reminded to maintain in time, so that the quality of the prepared workpiece is prevented from being influenced by the air leakage of the vacuum system, and the yield is improved.
Description
Technical Field
The application relates to the technical field of vacuum system tightness test, in particular to a method and device for testing air leakage of a vacuum system, electronic equipment and a storage medium.
Background
The vacuum system is widely applied to the semiconductor industry, such as atomic layer deposition, pulse laser deposition, molecular beam epitaxy and the like, and the phenomenon of air leakage easily occurs in the use process of the vacuum system, so that whether the vacuum system leaks is judged at present mainly according to the quality of a produced workpiece, such as whether a film is oxidized or not, but the judgment of whether the vacuum system leaks is made after the workpiece has been produced by adopting the method, and the produced workpiece is defective although the vacuum system leaks is judged, so that the defective rate is high.
In view of the above problems, no effective technical solution is currently available.
Disclosure of Invention
The application aims to provide a method, a device, electronic equipment and a storage medium for testing air leakage of a vacuum system, which can test whether the vacuum system leaks or not, and prompt a user to maintain in time when the vacuum system leaks, so that the quality of a prepared workpiece is prevented from being influenced by production of the workpiece in the state of the vacuum system leaking, and the defective rate is reduced.
In a first aspect, the present application provides a method of testing a vacuum system for leaks, the method comprising the steps of:
after the vacuum system is put into a workpiece, the time required from the start of air suction to the reaching of a preset pressure is acquired and recorded as first time;
Judging whether the vacuum system leaks air or not according to the first time and the preset time;
The preset time is the time required from the beginning of air suction to the reaching of the preset pressure before the vacuum system is put into a workpiece.
The method for testing the air leakage of the vacuum system can judge whether the vacuum system is air-leaked or not, and avoid the influence on the preparation of workpieces caused by air leakage in the using process of the vacuum system.
Optionally, in the method for testing air leakage of a vacuum system according to the present application, the method further includes the steps of:
adjusting the pressure in the vacuum system without the workpiece to the standard atmospheric pressure;
acquiring the time required from the start of air suction to the reaching of a preset pressure before the vacuum system is placed into a workpiece, and obtaining preset time;
The time required from the beginning of the air suction to the reaching of the preset pressure after the vacuum system is put into the workpiece is recorded as the first time, and the method further comprises the following steps:
the pressure in the vacuum system after the workpiece is placed is adjusted to the standard atmospheric pressure.
According to the application, the pressure in the vacuum system which is not placed in the workpiece is adjusted to be the standard atmospheric pressure, and the pressure in the vacuum system which is placed in the workpiece is adjusted to be the standard atmospheric pressure, and then the air suction is started, so that the time recorded each time is the time which is elapsed until the standard atmospheric pressure reaches the preset pressure, and the vacuum system is prevented from being influenced by the external air pressure, and the misjudgment condition is avoided.
Optionally, in the method for testing air leakage of a vacuum system according to the present application, the method further includes the steps of:
and generating corresponding reminding information to remind according to the judging result of whether the vacuum system leaks or not.
After judging that the vacuum system leaks air, the application reminds the user by generating the corresponding reminding information, so that the user can know that the vacuum system is in the air leakage state in time and needs to stop working for maintenance.
Optionally, in the method for testing air leakage of a vacuum system according to the present application, the method further includes the steps of:
And updating the preset time according to a preset period.
Optionally, in the method for testing air leakage of a vacuum system according to the present application, determining whether the vacuum system is air-leaked according to the first time and the preset time includes the following steps:
judging whether the vacuum system leaks air or not according to whether the difference value between the first time and the preset time is within a preset range.
Optionally, in the method for testing air leakage of a vacuum system according to the present application, determining whether the vacuum system is air-leaked according to the first time and the preset time includes the following steps:
and judging whether the vacuum system leaks according to whether the first time and the preset time have a difference value.
In a second aspect, the present application also provides an apparatus for testing a vacuum system for leaks, the apparatus for testing whether the vacuum system leaks, the apparatus comprising:
The acquisition module is used for acquiring the time required from the start of air suction to the reaching of a preset pressure after the vacuum system is placed into a workpiece, and recording the time as first time;
The judging module is used for judging whether the vacuum system leaks air or not according to the first time and the preset time;
The preset time is the time required from the beginning of air suction to the reaching of the preset pressure before the vacuum system is put into a workpiece.
Optionally, the device for testing air leakage of a vacuum system according to the present application further comprises:
And the reminding module is used for generating corresponding reminding information to remind according to the judging result of whether the vacuum system leaks or not.
The device for testing the air leakage of the vacuum system can judge whether the vacuum system is air-leaked or not, avoid the poor quality of the prepared workpiece caused by the preparation of the workpiece in the air-leaked vacuum system, and prompt a user of air leakage of the vacuum system in time for timely maintenance.
In a third aspect, the application provides an electronic device comprising a processor and a memory storing computer readable instructions which, when executed by the processor, perform the steps of the method as provided in the first aspect above.
In a fourth aspect, the present application provides a storage medium having stored thereon a computer program which, when executed by a processor, performs the steps of the method as provided in the first aspect above.
As can be seen from the above, the method, the device, the electronic device and the storage medium for testing the air leakage of the vacuum system provided by the application are characterized in that the time from the start of air suction to the reaching of the preset pressure before the vacuum system is put into a workpiece is obtained, and the time is recorded as the preset time; acquiring the time from the beginning of air suction to the reaching of a preset pressure after the vacuum system is placed in a workpiece, and recording the time as the first time; judging whether the vacuum system leaks air or not according to the first time and the preset time, so that the air leakage in the use process of the vacuum system is avoided, and the workpiece preparation is influenced.
Additional features and advantages of the application will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the application. The objectives and other advantages of the application will be realized and attained by the structure particularly pointed out in the written description and claims thereof as well as the appended drawings.
Drawings
Fig. 1 is a flowchart of a method for testing air leakage of a vacuum system according to an embodiment of the present application.
Fig. 2 is a schematic structural diagram of an apparatus for testing air leakage of a vacuum system according to an embodiment of the present application.
Fig. 3 is a schematic structural diagram of an electronic device according to an embodiment of the present application.
Detailed Description
The following description of the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the application, as presented in the figures, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by a person skilled in the art without making any inventive effort, are intended to be within the scope of the present application.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures. Meanwhile, in the description of the present application, the terms "first", "second", and the like are used only to distinguish the description, and are not to be construed as indicating or implying relative importance.
When the existing vacuum system is used for producing workpieces, quality detection is generally carried out on the workpieces only after production is completed, defective products are screened out, for example, the vacuum system is used for coating, however, in the process of coating by the vacuum system, air leakage possibly occurs in the vacuum system, once the vacuum system leaks air, the quality of a grown film is affected, if the defective products and the defective products are screened out in a unified quality detection mode after production is completed, the number of the defective products is increased, and the cost of growing the film is higher, so that the production cost is greatly increased.
Referring to fig. 1, fig. 1 is a flowchart of a method for testing air leakage of a vacuum system according to an embodiment of the application. The method for testing the air leakage of the vacuum system is used for testing whether the vacuum system leaks or not and comprises the following steps:
S10, after the vacuum system is placed in the workpiece, the time required from the start of air suction to the reaching of the preset pressure is acquired and recorded as the first time.
S20, judging whether the vacuum system leaks according to the first time and the preset time.
The preset time is the time required from the start of air suction to the reaching of the preset pressure before the vacuum system is placed in the workpiece, that is, the preset time can be set in advance, or can be measured before the vacuum system is used for processing and stored in the control equipment of the vacuum system.
Under the default condition, the time required for the vacuum system without the workpiece to reach the preset pressure from the beginning of the air suction and the time required for the vacuum system with the workpiece to reach the preset pressure from the beginning of the air suction should be kept consistent, namely the preset time and the first time should be kept consistent, and whether the vacuum system leaks air or not can be judged by judging whether the preset time and the first time are kept consistent or not.
According to the application, after the vacuum system is placed in a workpiece, the time from the start of air suction to the reaching of the preset pressure is compared with the preset time, so that whether the vacuum system leaks air or not is judged before the workpiece is processed, compared with the case that whether the vacuum system leaks air or not can be judged according to the quality of the workpiece after the workpiece is processed (such as film plating) is finished, the judgment is more timely, and whether the vacuum system leaks air or not is judged before the workpiece is processed, the problem that the quality of the workpiece is poor due to the fact that the workpiece is processed in the leaked vacuum system can be avoided, the defective product rate is reduced, and the production cost is increased. When the vacuum system is vacuumized to a preset pressure, the pumping speed of the vacuum pump is a constant value, so that the influence of different pumping speeds on the pumping time is avoided.
In practical applications, the preset time may be set as default, for example, the preset time of the vacuum system with the configuration parameter a defaults to T (T is measured in advance), and then the preset time may be set as T as long as the vacuum system with the configuration parameter a is satisfied. Of course, the preset time can also be actually measured according to different specific vacuum systems, and it is to be noted that when the preset time is selected to be actually measured according to different specific vacuum systems, before the workpiece is placed, after the workpiece is pumped down from the beginning to reach the preset pressure, a certain time is required to be kept, whether the pressure value change in the vacuum system is within a preset change range or not is observed within a certain time, if the vacuum system is proved to be airtight, the condition that the vacuum system is in an airtight state is avoided, and the situation that the time measured before the workpiece is placed and the time measured after the workpiece is placed are the same is avoided.
For example, in some embodiments, the method of testing for leaks in a vacuum system further comprises the steps of: adjusting the pressure in the vacuum system without the workpiece to the standard atmospheric pressure; acquiring the time required from the start of air suction to the reaching of a preset pressure before the vacuum system is placed in a workpiece, and obtaining preset time; the step of obtaining the time required for the vacuum system to be placed in the workpiece from the beginning of pumping to reaching the preset pressure and recording as the first time further comprises the following steps: the pressure in the vacuum system after the workpiece is placed is adjusted to the standard atmospheric pressure. Namely, the step S10 is preceded by the following steps: adjusting the pressure in the vacuum system without the workpiece to the standard atmospheric pressure; acquiring the time required from the start of air suction at the standard atmospheric pressure to the reaching of the preset pressure before the vacuum system is placed into a workpiece, and obtaining the preset time; the pressure in the vacuum system after the workpiece is put into the vacuum system is adjusted to be standard atmospheric pressure; the S10 step comprises the following steps: after the vacuum system is placed in the workpiece, the time required from the start of pumping from the standard atmospheric pressure to the reaching of the predetermined pressure is obtained and recorded as the first time.
According to the application, the pressure in the vacuum system which is not placed in the workpiece is adjusted to be the standard atmospheric pressure, and the pressure in the vacuum system which is placed in the workpiece is adjusted to be the standard atmospheric pressure, and then the air suction is started, so that the time recorded each time is the time which is elapsed from the standard atmospheric pressure to reach the preset pressure, and when the vacuum system is vacuumized, the starting point of the pressure in the vacuum system is the same, that is, the first time and the preset time are the time which is the time from the standard atmospheric pressure to reach the preset pressure under the condition that the air suction speed is the same, and therefore, the condition that the initial pressure is inconsistent due to the influence of the external air pressure on the vacuum system is avoided, and the judgment result is affected.
In some embodiments, the method further comprises the steps of: s30: and generating corresponding reminding information to remind according to the judging result of whether the vacuum system leaks or not. After detecting the air leakage of the vacuum system, reminding the user through reminding information, so that the user can know that the vacuum system is in the air leakage state in time, and the machine is stopped for maintenance. Specifically, the reminding information can remind the user in a mode of being displayed on a display screen of a control display device of the vacuum system; the reminding information can also be reminded through the mode of playing, for example, a buzzer arranged on the vacuum system sounds to prompt a user, or a loudspeaker arranged on the vacuum system plays the reminding information, for example: the current equipment leaks air, and is stopped for maintenance.
In some embodiments, the method of testing for leaks in a vacuum system further comprises the steps of: and updating the preset time according to the preset period.
The preset period may take, as one period, a time of processing using the vacuum system for a plurality of times or days, for example: the method comprises the steps of measuring preset time before processing by using a vacuum system, wherein the first time recorded in each processing process is compared with the preset time measured in advance, and when the preset time reaches the preset processing times or the preset time period, the preset time is measured again; the preset period may also be a period of time when the vacuum system is used once, that is, the preset time is updated every time the vacuum system is used, that is, the preset time needs to be measured again before the workpiece is placed every time. Although the time required for updating the preset time once when the vacuum system is used once is prolonged, compared with the time required for updating the preset time once after the vacuum system is used for a period of time, the vacuum system can ensure that each processing is performed in a strict sealing environment, thereby ensuring the quality of processed workpieces and being suitable for processing equipment with very strict requirements on the sealing environment. In some embodiments, determining whether the vacuum system is leaking based on the first time and the preset time includes the steps of: and judging whether the vacuum system leaks air or not according to whether the difference value between the first time and the preset time is within a preset range. That is, when judging whether the vacuum system leaks air, if the difference between the first time and the preset time is within the preset range, the vacuum system is judged to be airtight, and the judging mode is applicable to the vacuum system with the preset time updated according to the preset period.
In other embodiments, determining whether the vacuum system is leaking based on the first time and the predetermined time includes the steps of: and judging whether the vacuum system leaks according to whether the difference exists between the first time and the preset time. That is, when judging whether the vacuum system leaks air, if the first time is different from the preset time, the vacuum system is judged to leak air, and the judging mode is suitable for the vacuum system in which the preset time is measured once before each processing.
As can be seen from the above, the method for testing air leakage of a vacuum system according to the embodiment of the present application obtains the time required from the start of air suction to the reaching of a predetermined pressure after the vacuum system is placed in a workpiece, and records the time as a first time; judging whether the vacuum system leaks air or not according to the first time and the preset time; therefore, whether the vacuum system leaks air or not is judged, and the air leakage in the use process of the vacuum system is avoided, so that the workpiece preparation is influenced.
Referring to fig. 2, fig. 2 is a schematic structural diagram of a device for testing air leakage of a vacuum system according to an embodiment of the present application, for testing whether the vacuum system is air-leaked, the device for testing air leakage of the vacuum system is integrated in a back-end control apparatus of the vacuum system in a computer program form, and the device for testing air leakage of the vacuum system includes: an acquisition module 201 and a judgment module 202.
Wherein, the acquisition module 201 is used for acquiring the time required from the start of pumping to the reaching of the preset pressure after the vacuum system is put into the workpiece, and recording the time as the first time. In this embodiment, the device for acquiring the pressure in the vacuum system is a vacuum gauge, the device for recording the first time is a timer, when the vacuum system starts to exhaust, the vacuum gauge measures the pressure in the vacuum system in real time, the measured signal is transmitted to the vacuum gauge to display the vacuum degree in the vacuum system through amplification treatment until the displayed vacuum degree is equal to the preset pressure, the vacuum system stops to exhaust, and the timer records the time from when the vacuum system starts to exhaust to when the vacuum system stops to exhaust; of course, the device for acquiring the pressure in the vacuum system can also be other vacuum sensors which can measure the pressure in the vacuum system, such as a hot cathode tube; the timer may be any other device capable of counting time, and the above is only an embodiment of the present application and should not be limited thereto.
The judging module 202 is configured to judge whether the vacuum system leaks according to the first time and the preset time. If the first time recorded by the timer is not different from the preset time or the difference is within the preset range after the vacuum system starts to work, judging that the vacuum system is airtight.
In some embodiments, the apparatus for testing for leaks in a vacuum system further comprises: a reminder module 203. The reminding module 203 is configured to generate corresponding reminding information to remind according to a judging result of whether the vacuum system leaks. If the vacuum system leaks, the user is reminded of the vacuum system to leak and maintain in time. Specifically, the corresponding reminding information is generated to remind the user in a mode of being displayed on a display screen of a control display device of the vacuum system; the reminding information can also be reminded through the mode of playing, for example, a buzzer arranged on the vacuum system sounds to prompt a user, or a loudspeaker arranged on the vacuum system plays the reminding information, for example: the current equipment leaks air, and is stopped for maintenance.
In some embodiments, the apparatus for testing for leaks in a vacuum system further comprises: the air pressure adjusting module and the time obtaining module. The air pressure adjusting module is used for adjusting the pressure in the vacuum system without the workpiece to be standard atmospheric pressure and adjusting the pressure in the vacuum system after the workpiece is placed to be standard atmospheric pressure. Specifically, the air pressure adjusting module can be used for exhausting the vacuum system through the vacuum pump, deflating the vacuum system through the valve, and adjusting the pressure in the vacuum system to a required pressure, such as standard atmospheric pressure or preset pressure, through the mutual matching of the vacuum pump and the valve. The time acquisition module is used for acquiring the time required from the start of air suction to the reaching of the preset pressure, namely the preset time before the vacuum system is placed into the workpiece. Specifically, the time acquisition module may be a timer or other devices capable of performing time recording.
In some embodiments, the apparatus for testing for leaks in a vacuum system further comprises: and the time updating module is used for updating the preset time according to the preset period. Specifically, when the preset period is reached, a new preset time T1 is input through a control panel of a control device of the vacuum system to replace the original preset time T.
In some preferred embodiments, the method of testing for vacuum system leaks described above is performed using the apparatus for testing for vacuum system leaks.
As can be seen from the above, the device for testing air leakage of the vacuum system according to the embodiment of the present application obtains the time required from the start of air suction to the reaching of the predetermined pressure after the vacuum system is placed in the workpiece, and records the time as the first time; judging whether the vacuum system leaks air or not according to the first time and the preset time; generating corresponding reminding information to remind according to the judging result of whether the vacuum system leaks; therefore, whether the vacuum system leaks air or not is judged, air leakage in the use process of the vacuum system is avoided, the workpiece preparation is influenced, a user can be timely reminded of maintaining the vacuum system, and the vacuum system is prevented from continuously working in an air leakage state, so that the defective rate of the workpiece is improved.
Referring to fig. 3, fig. 3 is a schematic structural diagram of an electronic device 3 according to an embodiment of the present application, where the electronic device 3 provided by the present application includes: processor 301 and memory 302, the processor 301 and memory 302 being interconnected and in communication with each other by a communication bus 303 and/or other form of connection mechanism (not shown), the memory 302 storing a computer program executable by the processor 301, the processor 301 executing the computer program when the computing device is running to perform the method in any of the alternative implementations of the above embodiments to carry out the following functions: after the vacuum system is put into a workpiece, the time required from the start of air suction to the reaching of a preset pressure is acquired and recorded as first time; judging whether the vacuum system leaks according to the first time and the preset time.
An embodiment of the present application provides a storage medium having stored thereon a computer program which, when executed by a processor, performs the method of any of the alternative implementations of the above embodiments to implement the following functions: after the vacuum system is put into a workpiece, the time required from the start of air suction to the reaching of a preset pressure is acquired and recorded as first time; judging whether the vacuum system leaks according to the first time and the preset time. The storage medium may be implemented by any type of volatile or non-volatile memory device or combination thereof, such as static random access memory (Static Random Access Memory, SRAM), electrically erasable programmable read-only memory (ELECTRICALLY ERASABLE PROGRAMMABLE READ-only memory, EEPROM), erasable programmable read-only memory (Erasable Programmable Read Only Memory, EPROM), programmable read-only memory (PROM), read-only memory (ROM), magnetic memory, flash memory, magnetic disk, or optical disk.
In summary, the method, the device, the electronic equipment and the storage medium for testing the air leakage of the vacuum system judge whether the vacuum system leaks according to the first time and the preset time, thereby reminding a user to repair the vacuum system in time. The method, the device, the electronic equipment and the storage medium for testing the air leakage of the vacuum system can be used for testing whether the high vacuum equipment such as Physical Vapor Deposition (PVD), chemical Vapor Deposition (CVD), atomic Layer Deposition (ALD) and the like leaks air or not, and a strict sealing environment is provided for film growth, so that the growth quality of the film in the high vacuum cavity is ensured.
In the embodiments provided in the present application, it should be understood that the disclosed apparatus and method may be implemented in other manners. The above-described apparatus embodiments are merely illustrative, for example, the division of units is merely a logical function division, and there may be other manners of division in actual implementation, and for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some communication interface, device or unit indirect coupling or communication connection, which may be in electrical, mechanical or other form.
Further, the units described as separate units may or may not be physically separate, and units displayed as units may or may not be physical units, may be located in one place, or may be distributed over a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
Furthermore, functional modules in various embodiments of the present application may be integrated together to form a single portion, or each module may exist alone, or two or more modules may be integrated to form a single portion.
In this document, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions.
The above description is only an example of the present application and is not intended to limit the scope of the present application, and various modifications and variations will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.
Claims (8)
1. A method for testing vacuum system leaks for vacuum systems of physical vapor deposition, chemical vapor deposition and atomic layer deposition high vacuum equipment, the method comprising the steps of:
adjusting the pressure in the vacuum system without the workpiece to the standard atmospheric pressure;
acquiring the time required from the start of air suction to the reaching of a preset pressure before the vacuum system is placed into a workpiece, and obtaining preset time;
The pressure in the vacuum system after the workpiece is put into the vacuum system is adjusted to be standard atmospheric pressure;
after the vacuum system is put into a workpiece, the time required from the start of air suction to the reaching of a preset pressure is acquired and recorded as first time;
judging whether the vacuum system leaks air or not according to the first time and the preset time;
Updating the preset time according to a preset period; the preset period is that the time of processing at least one time or more days by using the vacuum system is taken as one period, the preset time is measured before processing by using the vacuum system, in the processing process, the first time recorded each time is compared with the measured preset time before processing by using the vacuum system, and when the preset time reaches the preset processing times or reaches the preset time period, the preset time is measured again.
2. The method of testing for leaks in a vacuum system of claim 1, further comprising the steps of:
and generating corresponding reminding information to remind according to the judging result of whether the vacuum system leaks or not.
3. The method of claim 1, wherein the step of determining whether the vacuum system is leaking based on the first time and a predetermined time comprises the steps of:
judging whether the vacuum system leaks air or not according to whether the difference value between the first time and the preset time is within a preset range.
4. The method of claim 1, wherein the step of determining whether the vacuum system is leaking based on the first time and a predetermined time comprises the steps of:
and judging whether the vacuum system leaks according to whether the first time and the preset time have a difference value.
5. An apparatus for testing vacuum system leaks for vacuum systems of physical vapor deposition, chemical vapor deposition and atomic layer deposition high vacuum equipment, the apparatus comprising:
The air pressure adjusting module is used for adjusting the pressure in the vacuum system without the workpiece to be standard atmospheric pressure and adjusting the pressure in the vacuum system after the workpiece is placed to be standard atmospheric pressure;
The time acquisition module is used for acquiring the time required from the start of air suction to the reaching of a preset pressure, namely the preset time, before the vacuum system is placed into the workpiece;
The acquisition module is used for acquiring the time required from the start of air suction to the reaching of a preset pressure after the vacuum system is placed into a workpiece, and recording the time as first time;
The judging module is used for judging whether the vacuum system leaks air or not according to the first time and the preset time;
the time updating module is used for updating the preset time according to a preset period;
The preset period is that the time of processing at least one time or more days by using the vacuum system is taken as one period, the preset time is measured before processing by using the vacuum system, in the processing process, the first time recorded each time is compared with the measured preset time before processing by using the vacuum system, and when the preset time reaches the preset processing times or reaches the preset time period, the preset time is measured again.
6. The apparatus for testing for leaks in a vacuum system of claim 5, further comprising:
And the reminding module is used for generating corresponding reminding information to remind according to the judging result of whether the vacuum system leaks or not.
7. An electronic device comprising a processor and a memory storing computer readable instructions which, when executed by the processor, perform the steps of the method of any of claims 1-4.
8. A storage medium having stored thereon a computer program which, when executed by a processor, performs the steps of the method according to any of claims 1-4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111328529.2A CN114264429B (en) | 2021-11-10 | Method and device for testing air leakage of vacuum system, electronic equipment and storage medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111328529.2A CN114264429B (en) | 2021-11-10 | Method and device for testing air leakage of vacuum system, electronic equipment and storage medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114264429A CN114264429A (en) | 2022-04-01 |
| CN114264429B true CN114264429B (en) | 2024-04-19 |
Family
ID=
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0282131A (en) * | 1988-09-19 | 1990-03-22 | Ulvac Corp | Automatic leak testing method |
| KR20050055476A (en) * | 2003-12-08 | 2005-06-13 | 동부아남반도체 주식회사 | Vacuum system of chemical vapour deposition apparatus and method for controlling thereof |
| CN104118420A (en) * | 2014-07-30 | 2014-10-29 | 重庆长安汽车股份有限公司 | Fault diagnosis method for blade electric vehicle vacuum assistance brake system |
| CN104309603A (en) * | 2014-09-30 | 2015-01-28 | 联合汽车电子有限公司 | Method for diagnosing air leakage of vacuum air suction system for providing vacuum degree of brake system |
| CN106644307A (en) * | 2016-12-19 | 2017-05-10 | 广州市真量纯科技有限公司 | Automatic workpiece vacuum degree detection system |
| CN110726508A (en) * | 2019-10-31 | 2020-01-24 | 广东合立鼎峰科技有限公司 | Vacuum degree and vacuum leakage detection method based on automatic evacuation system |
| CN110884477A (en) * | 2018-09-07 | 2020-03-17 | 宝沃汽车（中国）有限公司 | Vacuum system fault detection method and device |
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0282131A (en) * | 1988-09-19 | 1990-03-22 | Ulvac Corp | Automatic leak testing method |
| KR20050055476A (en) * | 2003-12-08 | 2005-06-13 | 동부아남반도체 주식회사 | Vacuum system of chemical vapour deposition apparatus and method for controlling thereof |
| CN104118420A (en) * | 2014-07-30 | 2014-10-29 | 重庆长安汽车股份有限公司 | Fault diagnosis method for blade electric vehicle vacuum assistance brake system |
| CN104309603A (en) * | 2014-09-30 | 2015-01-28 | 联合汽车电子有限公司 | Method for diagnosing air leakage of vacuum air suction system for providing vacuum degree of brake system |
| CN106644307A (en) * | 2016-12-19 | 2017-05-10 | 广州市真量纯科技有限公司 | Automatic workpiece vacuum degree detection system |
| CN110884477A (en) * | 2018-09-07 | 2020-03-17 | 宝沃汽车（中国）有限公司 | Vacuum system fault detection method and device |
| CN110726508A (en) * | 2019-10-31 | 2020-01-24 | 广东合立鼎峰科技有限公司 | Vacuum degree and vacuum leakage detection method based on automatic evacuation system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR20080098332A (en) | Graphical user interface for presenting multivariate fault contributions | |
| CN101243312A (en) | System and method for electronic diagnostics of a process vacuum environment | |
| CN114264429B (en) | Method and device for testing air leakage of vacuum system, electronic equipment and storage medium | |
| CN108344674B (en) | Automatic gas permeability testing system and method based on artificial intelligence | |
| CN108716963A (en) | The performance test methods of pressure sensor | |
| TW201727520A (en) | Wafer point by point analysis and presentation | |
| US20090265027A1 (en) | Server device and program | |
| CN202075102U (en) | Leak detecting device for condenser or evaporator | |
| CN107132569A (en) | Out-of-service time corrects system and method | |
| US20240059441A1 (en) | Vacuum packaging method and vacuum packaging device | |
| CN110513828A (en) | Clarifier strainer state testing method, device, control equipment and clarifier | |
| US20090197354A1 (en) | System and method for monitoring manufacturing process | |
| CN108534869B (en) | method for automatically comparing and correcting station differences of meter correcting machine | |
| CN114264429A (en) | Method and device for testing air leakage of vacuum system, electronic equipment and storage medium | |
| CN104979227B (en) | Semiconductors data collection method and system | |
| CN107990481A (en) | Air-conditioner defrosting control method and device | |
| CN111562072A (en) | Detection method, detection apparatus, and computer-readable storage medium | |
| CA3012379C (en) | Portable recording apparatus to be used for recording inspection result for hydrogen station | |
| CN108459273B (en) | Battery cell delivery test method and device | |
| US7595467B2 (en) | Fault detection system and method for managing the same | |
| EP3833949B1 (en) | Vacuum decay leak detection with correction for interferences | |
| CN211061134U (en) | Leak detection device | |
| CN112378032A (en) | Air conditioner test monitoring device, method and equipment | |
| CN103572222A (en) | Method for determining target material sputtering life | |
| US20020000117A1 (en) | Method for identifying leaks in a sealed package having a liquid therein |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant |