CN114262781A - Gas homogenizing mechanism of thermal equipment - Google Patents

Gas homogenizing mechanism of thermal equipment Download PDF

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Publication number
CN114262781A
CN114262781A CN202111611962.7A CN202111611962A CN114262781A CN 114262781 A CN114262781 A CN 114262781A CN 202111611962 A CN202111611962 A CN 202111611962A CN 114262781 A CN114262781 A CN 114262781A
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CN
China
Prior art keywords
quartz
furnace
furnace body
gas
quartz tube
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Pending
Application number
CN202111611962.7A
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Chinese (zh)
Inventor
田杰成
李啸雲
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Hunan Aikewei Intelligent Equipment Co ltd
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Hunan Aikewei Intelligent Equipment Co ltd
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Priority to CN202111611962.7A priority Critical patent/CN114262781A/en
Publication of CN114262781A publication Critical patent/CN114262781A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a gas homogenizing mechanism of thermal equipment, which comprises a furnace body, a furnace wire, a quartz tube, a processed product, a quartz boat, a gas inlet tube orifice and a gas outlet tube orifice, wherein the furnace wire is of a spring-shaped structure, the furnace wire is fixedly arranged on the inner wall of the top of the furnace body and the inner wall of the bottom of the furnace body, the quartz tube penetrates through the middle of the furnace body, the middle of an inner cavity of the quartz tube is movably connected with the quartz boat, the central part of the quartz boat is connected with the processed product, and the top of the quartz tube is connected with the gas inlet tube orifice in a penetrating manner; the problem of the temperature difference from top to bottom that the air current walked from the bottom up and lead to in high temperature process is solved.

Description

Gas homogenizing mechanism of thermal equipment
Technical Field
The invention relates to a gas homogenizing mechanism, in particular to a gas homogenizing mechanism of thermal equipment, and belongs to the technical field of diffusion oxidation annealing furnaces.
Background
Diffusion annealing is also called homogenization annealing, and is a treatment method for keeping the temperature slightly lower than the solidus temperature for a long time. The chemical composition and the microstructure segregation of steel ingots, castings and billets are reduced or eliminated to be uniform. High alloy steels are more commonly used, the diffusion annealing temperature of the steel is higher than Ac3, the annealing temperature is between 1100 ℃ and 1200 ℃, and the annealing time is long and depends on the section thickness of the workpiece. Due to high temperature, long time and high cost. For steel parts, diffusion annealing does not contribute to the improvement of macro-segregation and inclusion distribution thereof. When the steel ingot is forged, rolled and heated after cogging, the heat preservation time is properly prolonged, and the effect of eliminating stress by diffusion annealing can be achieved. Most non-ferrous metals do not undergo a solid state phase change during the heating process of diffusion annealing. The problems of austenite grain refinement and steel oxidation and decarburization need to be correspondingly considered during application.
The diffusion annealing needs to be carried out on the annealing furnace, however, the existing diffusion annealing furnace has some defects:
(1) the gas flow is not uniform, reducing the performance of the process product.
(2) In the heating state of the furnace body, the hot air flow in the quartz tube flows to the upper part, and the temperature uniformity of the cross section (the upper part and the lower part) of a process product is reduced.
Disclosure of Invention
The invention aims to provide an air homogenizing mechanism of thermal equipment to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a thermal engineering equipment's even gas mechanism, includes furnace body, stove silk, quartz capsule, processing product, quartz boat, the mouth of pipe of admitting air and the mouth of pipe of giving vent to anger, the stove silk is spring shape structure, and the fixed inner wall department that sets up in the inner wall department at furnace body top and bottom of stove silk, the quartz capsule runs through the middle part that sets up at the furnace body, the middle part and the quartz boat swing joint in quartz capsule inner chamber, the central point of quartz capsule is connected with the processing product, the top and the mouth of pipe of admitting air through connection of quartz capsule, the mouth of pipe one end of admitting air extends to the top of quartz boat and has seted up even gas hole site, the bottom and the mouth of giving vent to anger through connection of quartz capsule, the mouth of giving vent to anger orificial one end extends to the inside of quartz boat.
As a preferable technical scheme of the invention, one end of the quartz tube is fixedly provided with a furnace door, and the furnace door is made of quartz materials.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention relates to an air homogenizing mechanism of thermal equipment, which can effectively increase the uniformity of airflow contacted with a product, has simple structure, low price, reliable operation and low failure rate, can ensure that the temperature of the upper part and the lower part of a quartz tube is uniform through the flowing of the airflow, and the airflow flows in from a uniform opening of an air inlet pipe orifice and flows out from a position of an air outlet pipe orifice, thereby solving the problem of the uniformity of the airflow in the thermal equipment; the problem of the temperature difference from top to bottom that the air current walked from the bottom up and lead to in high temperature process is solved.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a side cross-sectional structural schematic view of the present invention;
in the figure: 1. a furnace body; 2. furnace wires; 3. a quartz tube; 4. a furnace door; 5. processing the product; 6. a quartz boat; 7. an air inlet pipe orifice; 8. an air outlet pipe orifice; 9. and (5) air homogenizing hole positions.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-2, the present invention provides a technical solution of an air equalizing mechanism of a thermal apparatus:
according to the figure 1-2, including furnace body 1, stove silk 2, quartz capsule 3, processing product 5, quartz boat 6, inlet tube mouth 7 and outlet tube mouth 8, stove silk 2 is the spring shape structure, the fixed inner wall department that sets up at furnace body 1 top and the inner wall department of bottom of stove silk 2, quartz capsule 3 runs through the middle part that sets up at furnace body 1, the middle part and the quartz capsule 6 swing joint of quartz capsule 3 inner chamber, the central point of quartz capsule 6 is connected with processing product 5, the top and the inlet tube mouth 7 through connection of quartz capsule 3, the one end of inlet tube mouth 7 extends to the top of quartz capsule 6 and has seted up even air hole site 9, the bottom and the outlet tube mouth 8 through connection of quartz capsule 3, the one end of outlet tube mouth 8 extends to the inside of quartz capsule 6, the one end fixed mounting of quartz capsule 3 has furnace gate 4, furnace gate 4 is made for quartz material.
When in specific use, the gas homogenizing mechanism of the thermal equipment starts to heat after voltage is applied to a furnace wire 2 in a furnace body 1, a processed product 5 needs to react with certain gas at a certain temperature in a clean environment, as shown in figures 1 and 2, a quartz tube 3 is arranged at the center of the furnace body 1, a furnace door 4 is opened, a quartz boat 6 containing the product 5 is placed at the center of the quartz tube, then the furnace door 4 is closed,
according to the process route of a product, certain pure gas is injected from an air inlet pipe orifice 7, a quartz pipe 3 connected with the air inlet pipe orifice 7 is provided with air-homogenizing hole sites 9 which are uniformly distributed on the upper part of the product, under a heating environment, air flow at the bottom of the quartz pipe 3 flows towards the upper part to drive heat to move towards the upper part, the temperature of the injected air flow is low, the air flow enters the upper part of the quartz pipe 3 through the air-homogenizing hole sites 9 and can counteract most of the heat, the pressure inside the quartz pipe 3 can continuously rise along with the increase of the air flow entering from the air inlet pipe orifice 7 and the heating of a furnace wire 2, when the pressure rises to a certain degree, the air flow can flow from the upper part to the lower part and flows out from an air outlet 8, and the problem of air flow uniformity in thermal equipment is solved; the problem of the temperature difference from top to bottom that the air current walked from the bottom up and lead to in high temperature process is solved.
In the description of the present invention, it is to be understood that the indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings and are only for convenience in describing the present invention and simplifying the description, but are not intended to indicate or imply that the indicated devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the present invention.
In the present invention, unless otherwise explicitly specified or limited, for example, it may be fixedly attached, detachably attached, or integrated; can be mechanically or electrically connected; the terms may be directly connected or indirectly connected through an intermediate, and may be communication between two elements or interaction relationship between two elements, unless otherwise specifically limited, and the specific meaning of the terms in the present invention will be understood by those skilled in the art according to specific situations.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (2)

1. The gas homogenizing mechanism of the thermal equipment comprises a furnace body (1), a furnace wire (2), a quartz tube (3), a processed product (5), a quartz boat (6), a gas inlet pipe orifice (7) and a gas outlet pipe orifice (8), and is characterized in that the furnace wire (2) is of a spring-shaped structure, the furnace wire (2) is fixedly arranged at the inner wall of the top of the furnace body (1) and the inner wall of the bottom of the furnace wire, the quartz tube (3) penetrates through the middle of the furnace body (1), the middle of the inner cavity of the quartz tube (3) is movably connected with the quartz boat (6), the central part of the quartz boat (6) is connected with the processed product (5), the top of the quartz tube (3) is connected with the gas inlet pipe orifice (7) in a penetrating manner, one end of the gas inlet pipe orifice (7) extends to the top of the quartz boat (6) and is provided with a gas homogenizing hole site (9), the bottom of the quartz tube (3) is connected with the gas outlet pipe orifice (8) in a penetrating manner, one end of the gas outlet pipe orifice (8) extends into the quartz boat (6).
2. The air distributing mechanism of the thermal equipment as claimed in claim 1, wherein: one end of the quartz tube (3) is fixedly provided with a furnace door (4), and the furnace door (4) is made of quartz materials.
CN202111611962.7A 2021-12-27 2021-12-27 Gas homogenizing mechanism of thermal equipment Pending CN114262781A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111611962.7A CN114262781A (en) 2021-12-27 2021-12-27 Gas homogenizing mechanism of thermal equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111611962.7A CN114262781A (en) 2021-12-27 2021-12-27 Gas homogenizing mechanism of thermal equipment

Publications (1)

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CN114262781A true CN114262781A (en) 2022-04-01

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CN202111611962.7A Pending CN114262781A (en) 2021-12-27 2021-12-27 Gas homogenizing mechanism of thermal equipment

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116288242A (en) * 2023-03-30 2023-06-23 磐石创新(江苏)电子装备有限公司 Full-automatic horizontal vacuum carbon plating device and application method thereof
CN116288242B (en) * 2023-03-30 2024-10-29 磐石创新(江苏)电子装备有限公司 Full-automatic horizontal vacuum carbon plating device and application method thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202658275U (en) * 2012-04-23 2013-01-09 江苏爱多光伏科技有限公司 Silicon chip diffusion equipment
CN205152399U (en) * 2015-10-21 2016-04-13 青岛金汇源电子有限公司 Quartz tube for diffusion furnace
CN205398771U (en) * 2016-03-03 2016-07-27 徐州中辉光伏科技有限公司 Silicon chip diffusion furnace for solar cell
CN208815087U (en) * 2018-10-09 2019-05-03 湖南艾科威智能装备有限公司 A kind of rapid cooling mechanism for tubular annealing furnace
CN209150054U (en) * 2018-10-23 2019-07-23 湖南艾科威智能装备有限公司 A kind of device promoting oxidation furnace fire door silicon chip film thickness uniformity
CN209374465U (en) * 2018-12-14 2019-09-10 青海水利水电集团共和光伏发电有限公司 A kind of CT normal pressure diffusion furnace apparatus

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202658275U (en) * 2012-04-23 2013-01-09 江苏爱多光伏科技有限公司 Silicon chip diffusion equipment
CN205152399U (en) * 2015-10-21 2016-04-13 青岛金汇源电子有限公司 Quartz tube for diffusion furnace
CN205398771U (en) * 2016-03-03 2016-07-27 徐州中辉光伏科技有限公司 Silicon chip diffusion furnace for solar cell
CN208815087U (en) * 2018-10-09 2019-05-03 湖南艾科威智能装备有限公司 A kind of rapid cooling mechanism for tubular annealing furnace
CN209150054U (en) * 2018-10-23 2019-07-23 湖南艾科威智能装备有限公司 A kind of device promoting oxidation furnace fire door silicon chip film thickness uniformity
CN209374465U (en) * 2018-12-14 2019-09-10 青海水利水电集团共和光伏发电有限公司 A kind of CT normal pressure diffusion furnace apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116288242A (en) * 2023-03-30 2023-06-23 磐石创新(江苏)电子装备有限公司 Full-automatic horizontal vacuum carbon plating device and application method thereof
CN116288242B (en) * 2023-03-30 2024-10-29 磐石创新(江苏)电子装备有限公司 Full-automatic horizontal vacuum carbon plating device and application method thereof

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Application publication date: 20220401