CN114235701A - Real-time detection device for self-calibration of trace gas concentration - Google Patents
Real-time detection device for self-calibration of trace gas concentration Download PDFInfo
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- 238000001514 detection method Methods 0.000 claims abstract description 86
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- 230000008569 process Effects 0.000 claims abstract description 15
- 238000005516 engineering process Methods 0.000 claims abstract description 13
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- 238000005070 sampling Methods 0.000 claims abstract description 12
- 230000007935 neutral effect Effects 0.000 claims abstract description 10
- 238000001228 spectrum Methods 0.000 claims abstract description 7
- 239000007789 gas Substances 0.000 claims description 91
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 229910001220 stainless steel Inorganic materials 0.000 claims description 8
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- 238000002474 experimental method Methods 0.000 claims description 7
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- 238000005259 measurement Methods 0.000 description 8
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Abstract
The invention relates to the technical field of gas detection, and discloses a detection device capable of performing real-time self-calibration on a detection result on the concentration of a trace gas. The trace gas concentration detection device provided by the invention is composed of a DFB laser, a beam splitting sampling plate, a laser wavelength monitoring module, a laser control circuit module, a neutral beam splitter, a collimator, a mode matching lens group, a real-time self-calibration ring-down cavity, a focusing lens, a detector and a data collecting and analyzing processing circuit module. The closed ring-down cavity detection parameters are used for calibrating the open ring-down cavity gas detection parameters in real time, the problems that the existing cavity ring-down spectrum gas detection technology is complex in detection process, cavity parameters need to be measured again when a light source is replaced to detect another gas, and the cavity ring-down parameters cannot be updated in real time according to detection environment changes are solved, and the closed ring-down spectrum gas detection device has the characteristics of simple detection steps, small detection result error and capability of self-calibrating in real time during gas detection.
Description
Technical Field
The invention relates to the technical field of gas detection, in particular to a trace gas concentration detection device capable of performing self calibration in real time.
Background
The method has wide application requirements and higher detection precision requirements on the detection of the gas concentration in the fields of industrial production, social security, resource exploration, medical diagnosis, environmental monitoring and the like. The detection of extremely low gas concentrations compared to background gas is a trace gas detection. The detection method of trace gas concentration has been developed from the initial chemical reaction measurement technology to the laser absorption spectrum detection technology with the highest precision at present. In the laser absorption spectrum detection technology, along with the development of the laser technology and the improvement of the device performance, the device for gas detection is continuously upgraded in the aspects of precision, sensitivity and the like.
At present, the conventional methods for gas detection mainly include electrochemical methods, mass spectrometry, gas chromatography, and thermocatalysis. Although these conventional methods achieve measurement of gas to different degrees, they all perform sampling by a manual method, and the instrument is expensive and complex to operate, and is often used for measuring gas in a laboratory, which is difficult to meet the demand of people for rapid qualitative detection of gas. The laser spectroscopy technology mainly utilizes the interaction of substances and light to achieve the purposes of gas discrimination and detection. The laser spectrum gas detection technology is used for detecting trace gas, has the characteristics of high measurement precision, high detection speed, real-time online monitoring and the like, and is divided into a direct detection technology and an indirect detection technology according to different detection principles. Direct detection techniques are implemented using the light absorption properties of a substance. The indirect detection technology is that according to the energy level transition theorem, laser excites a substance to be detected, so that electrons absorb energy and transition from a ground state to an excited state, and because the excited state has instability, the electrons return to a stable ground state along with energy release, and the process comprises fluorescence, internal energy conversion, vibration relaxation and the like.
The cavity ring-down spectroscopy is an absorption spectroscopy with ring-down time as a measurement parameter, a ring-down curve is formed by exponentially attenuating ring-down cavity transmission light intensity along with time for measurement, the ring-down time is only related to the reflectivity of a ring-down cavity reflector and the absorption of a medium in a ring-down cavity, but is not related to the size of incident light intensity, and the cavity ring-down spectroscopy has the advantages of high sensitivity, high signal-to-noise ratio and high anti-interference capability. In prior art cavity ring down spectroscopy gas detection techniques, cavity ring down experiments are typically performed to determine the basic performance of the detection apparatus prior to gas detection. On the basis of a large amount of cavity ring-down time data, the obtained noise equivalent absorption coefficient is analyzed, and parameters such as the measurement sensitivity, the measurement precision or the detection limit of the detection device to certain gas are obtained by using the data and combining the gas absorption section. This adds steps to the gas detection process, making the detection process cumbersome. Meanwhile, when the detection environment temperature changes, the cavity ring-down parameters cannot be updated in time, so that the detection result error becomes large. When the laser light source is replaced to detect other gases, the cavity ring-down parameters need to be measured again for calibration.
Disclosure of Invention
The invention provides a real-time self-calibration trace gas concentration detection device, which aims to solve the problems that in the existing cavity ring-down spectrum gas detection technology, the gas detection process is complicated, the cavity ring-down parameters need to be measured again when a light source is replaced to detect another gas, and the cavity ring-down parameters cannot be updated in real time according to the detection environment change.
The purpose of the invention is realized by the following technical scheme:
the utility model provides a trace gas concentration detection device that can carry out real-time self calibration to cavity ring down parameter, the device includes DFB laser instrument, beam splitting sampling plate, laser wavelength monitoring module, laser instrument control circuit module, neutral beam splitter, collimater, mode matching lens group, real-time self calibration ring down chamber, focusing lens, detector, data collection and analysis processing circuit module, wherein:
the DFB laser is connected with the laser control circuit module and used as a laser light source to output narrow linewidth laser.
The beam splitting sampling plate samples the laser beam and reflects the sampled laser beam to the laser wavelength monitoring mode.
And the laser wavelength monitoring module monitors the laser wavelength emitted by the laser after receiving the laser beam reflected by the beam splitting sampling plate and feeds a monitoring result back to the laser control circuit module.
The laser control circuit module is used for providing a driving power supply for the DFB laser and adjusting and controlling the laser wavelength of the laser to the driving circuit of the laser according to the signal fed back by the laser wavelength monitoring module.
The neutral beam splitter divides the laser transmitted by the neutral beam splitter into two beams of coherent light, and the two beams of coherent light respectively pass through the collimator to collimate the laser beam and the mode matching lens group to process the laser beam and then irradiate the laser beam to the ring-down cavity.
The real-time self-calibration ring-down cavity is composed of a closed ring-down cavity and an open ring-down cavity which are parallel and adjacent to each other, the closed ring-down cavity and the open ring-down cavity are formed into ring-down cavities with the same parameters by using plano-concave reflectors with the same index, and the leakage rate of the closed ring-down cavity is superior to 1.3 multiplied by 10-10Pa m3The shell is made of stainless steel material, a ring-down cavity formed by the plano-concave reflecting mirror is loaded into the shell, a gas inlet and outlet, a laser beam inlet and outlet and a vacuum gauge interface are formed in the stainless steel shell, nitrogen is filled in the closed ring-down cavity as zero gas or the closed ring-down cavity is vacuumized when gas detection is carried out, the obtained ring-down curve is used as the reference of the ring-down curve obtained by the open cavity, an accurate gas concentration value is obtained, the parameters of the ring-down cavity are obtained without cavity ring-down experiments when the gas detection is carried out in the ring-down cavity, and therefore the number of the ring-down cavity is reducedThe steps during gas detection are adopted, the parameters of the ring-down cavity can be obtained in real time, and the detected gas concentration is accurate.
The focusing lens is respectively positioned behind the closed ring-down cavity and the open ring-down cavity and is used for focusing laser beams transmitted by the closed ring-down cavity and the open ring-down cavity and irradiating the focused laser beams into respective detectors.
The detector is a high-sensitivity photoelectric detector and is respectively used for receiving laser signals transmitted by the closed ring-down cavity and the open ring-down cavity.
The data collecting and analyzing and processing circuit module is used for processing the photoelectric signals obtained by the detector to obtain the attenuation condition of the transmission light intensity of the to-be-detected gas from the ring-down cavity along with time after the to-be-detected gas and the laser beam act, so that the concentration of the to-be-detected gas is obtained.
According to the technical scheme provided by the invention, the cavity ring-down experiment step can be omitted in the gas detection process, the problems that in the existing cavity ring-down spectrum gas detection technology, the gas detection process is complicated, the cavity ring-down parameter needs to be measured again when a light source is replaced to detect another gas, and the cavity ring-down parameter cannot be updated in real time according to the detection environment change are solved, and the cavity ring-down spectrum gas detection method has the beneficial effects that the trace gas detection step is simple, the detection result error is small, and the real-time self-calibration can be carried out on the test ring-down cavity.
The technical scheme provided by the invention can fulfill the aim of detecting the trace gas under different detection environmental conditions.
According to the technical scheme provided by the invention, the trace gas concentration detection device has the advantages that the trace gas detection steps are simple, the detection error value is small, the parameters obtained by the closed ring-down cavity are used for calibrating the parameters obtained by the open ring-down cavity, the parameters obtained by the closed ring-down cavity can be used for calibrating the parameters obtained by the open ring-down cavity in real time in various test environments, the test process is simple, and the detection result error value is small.
Drawings
In order to more clearly show the technical scheme of the real-time self-calibration trace gas concentration detection device provided by the invention, the technical scheme of the invention is visually displayed in the attached figure 1. It is obvious that the drawings are an embodiment of the technical solution of the present invention, and those skilled in the art can obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a real-time self-calibration trace gas concentration detection device according to the present invention.
Detailed Description
The technical solution in the embodiments of the present invention is clearly and completely described below with reference to the drawings in the embodiments of the present invention. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
The following will be described with reference to the accompanying drawings by CO2Or N2The O gas concentration detection apparatus is further described in detail as an example. FIG. 1 shows trace amounts of CO according to the invention2Or N2The structure schematic diagram of an O gas concentration detection device mainly comprises: DFB laser instrument 1, beam splitting sampling panel 2, laser wavelength monitoring mode 3, laser instrument control circuit module 4, neutral beam splitter 5, collimator 6, collimator 7, mode matching lens group 8, mode matching lens group 9, closed ring down chamber 10, open ring down chamber 11, focusing lens 12, focusing lens 13, detector 14, detector 15, data collection and analysis processing circuit module 16, wherein:
the DFB laser 1 has a line width of not more than 2MHz, an output power of not less than 10mW, a temperature tuning rate of 0.1 nm/DEG C, a current tuning rate of 0.01nm/mA, and trace CO2Laser wavelength of 1960nm in gas and trace N2Laser wavelength of 2260nm for O gas with trace CO2Or N2O gas, 1960nm and 2260nm wavelength lasers are used simultaneously.
And the beam splitting sampling plate 2 reflects laser beams with 5% of light power to the laser wavelength monitoring module.
The laser wavelength monitoring module 3 receives the laser reflected by the beam splitting sampling plate 2, and feeds back the wavelength information of the laser to the laser circuit control module 4.
And after receiving the feedback information of the wavelength monitoring module 3, the laser control circuit module 4 tunes the temperature and the current of the laser according to the parameters set in the experiment and controls the output wavelength of the laser.
The neutral beam splitter 5 divides the laser transmitted by the beam splitting sampling plate into two beams of coherent light, and the optical power ratio of the two beams of coherent light is 1: 1.
The collimator 6 and the collimator 7 are used for respectively collimating the two beams of coherent light obtained by the beam splitter.
The mode matching lens group 8 and the mode matching lens group 9 are used for processing the laser beams collimated by the collimator 6 and the collimator 7 respectively, and the coherent light processed by the mode matching lens group is irradiated to the closed ring-down cavity 10 and the open ring-down cavity 11 respectively.
The closed ring-down cavity 10 and the open ring-down cavity 11 are formed by reflectors with reflectivity larger than 99.99%, the parameters of the ring-down cavities are the same, the parameters of the reflectors are the same, the closed ring-down cavity 10 uses a stainless steel shell with low leakage rate as an outer shell of the ring-down cavity, the shell is provided with a gas inlet and outlet, a laser beam inlet and outlet and a vacuum meter interface, the closed ring-down cavity is filled with nitrogen as zero gas or is vacuumized during gas detection, and the ring-down curve obtained by the closed ring-down cavity is used for real-time calibration of the ring-down curve obtained by the open ring-down cavity.
The focusing lens 12 and the focusing lens 13 are convex lenses, and focus the laser beams transmitted by the closed ring-down cavity 10 and the open ring-down cavity 11 to the detector 14 and the detector 15 respectively.
The detector 14 and the detector 15 are InGaAs detectors with adjustable gains, ring-down time measurement is carried out under low gain, installation and adjustment process optimization is carried out under high gain, the detector 14 and the detector 15 transmit laser signals transmitted by a ring-down cavity to the data collecting and analyzing and processing circuit module 16, and the data collecting and analyzing and processing circuit module analyzes and processes the laser signals transmitted by the ring-down cavityTo obtain laser beam and CO2Or N2The attenuation condition of the laser light intensity transmitted by the ring-down cavity along with time after the action of O gas is obtained through the obtained ring-down curve2Or N2Concentration value of O gas.
The foregoing is illustrative of the preferred embodiments of the present invention, and it is to be understood that the scope of the invention is not limited thereto, and that various modifications and alterations can be made by those skilled in the art without departing from the principles of the present invention, which should also be construed as within the scope of the invention.
Claims (6)
1. The device for detecting the concentration of the real-time self-calibration trace gas comprises a DFB laser, a beam splitting sampling plate, a laser wavelength monitoring module, a laser control circuit module, a neutral beam splitter, a collimator, a mode matching lens group, a real-time self-calibration ring-down cavity, a focusing lens, a detector and a data collecting and analyzing and processing circuit module, and is characterized in that the real-time self-calibration ring-down cavity consists of a closed ring-down cavity and an open ring-down cavity which are parallel and adjacent to each other, the closed ring-down cavity and the open ring-down cavity form the ring-down cavity with the same parameters by using a plano-concave reflecting mirror with the same index, wherein the leakage rate of the closed ring-down cavity is superior to 1.3 multiplied by 10-10Pa m3The gas detection method comprises the following steps that a shell is made of stainless steel material, a ring-down cavity formed by a plano-concave reflector is loaded into the shell, a gas inlet and outlet, a laser beam inlet and outlet and a vacuum gauge interface are formed in the stainless steel shell, nitrogen is filled in the ring-down cavity as zero gas or the sealed ring-down cavity is vacuumized when gas detection is carried out, the obtained ring-down curve calibrates a ring-down curve obtained by the open cavity in real time, so that an accurate gas concentration value is obtained, the real-time self-calibration ring-down cavity does not need to carry out a cavity ring-down experiment to obtain parameters when the ring-down cavity detects zero gas when gas detection is carried out, steps during gas detection are reduced, and a gas concentration result detected by the open cavity can be calibrated in real time in the gas detection process, so that a more accurate gas detection concentration is obtained;
the DFB laser is connected with the laser control circuit module and used as a laser light source to output laser with narrow line width;
the beam splitting sampling plate samples the laser beam and reflects the sampled laser beam to a laser wavelength monitoring module;
the laser wavelength monitoring module monitors the laser wavelength emitted by the laser after receiving the laser beam reflected by the beam splitting sampling plate, and feeds back the monitoring result to the laser control circuit module;
the laser control circuit module is used for providing a driving power supply for the DFB laser and adjusting and controlling the laser wavelength of the laser to the driving circuit of the laser according to the signal fed back by the laser wavelength monitoring module;
the neutral beam splitter divides the laser transmitted by the neutral beam splitter into two beams of coherent light, and the two beams of coherent light respectively pass through the collimator to collimate the laser beam and the mode matching lens group to process the laser beam and then irradiate the laser beam to the ring-down cavity;
the focusing lens is respectively positioned behind the closed ring-down cavity and the open ring-down cavity and is used for focusing laser beams transmitted by the closed ring-down cavity and the open ring-down cavity and irradiating the focused laser beams into respective detectors;
the detector is a high-sensitivity photoelectric detector and is respectively used for receiving laser signals transmitted by the closed ring-down cavity and the open ring-down cavity;
the data collecting and analyzing and processing circuit module is used for processing the photoelectric signals obtained by the detector to obtain the attenuation condition of the transmission light intensity of the to-be-detected gas from the ring-down cavity along with time after the to-be-detected gas and the laser beam act, so that the concentration of the to-be-detected gas is obtained;
the detection device for the concentration of the trace gas, which is formed by the technical scheme, can save the step of cavity ring-down experiment in the gas detection process, solves the problems that the gas detection process is complicated, the cavity ring-down parameters need to be measured again when a light source is replaced to detect another gas and the cavity ring-down parameters cannot be updated in real time according to the detection environment change in the existing cavity ring-down spectrum gas detection technology, and has the advantages of simple trace gas detection step, small detection result error and capability of carrying out real-time self-calibration on a test ring-down cavity.
2. The device for detecting the concentration of the real-time self-calibration trace gas as claimed in claim 1, wherein the real-time self-calibration ring-down cavity is composed of a closed ring-down cavity and an open ring-down cavity which are parallel to each other, nitrogen is filled in the closed ring-down cavity as a zero gas or is pumped to a vacuum state in the gas detection process, and parameters obtained by the closed ring-down cavity perform real-time calibration on parameters obtained by gas detection of the open ring-down cavity.
3. The device for detecting the concentration of the real-time self-calibration trace gas as claimed in claim 1, wherein the closed ring-down cavity and the open ring-down cavity are both composed of 2 flat concave high reflectors with reflectivity of 99.99% or more, parameters of the reflectors are the same, parameters of the formed closed ring-down cavity and parameters of the open ring-down cavity are the same, and the closed ring-down cavity is realized by loading the ring-down cavity composed of the high reflectors into a shell made of a low-leakage stainless steel material.
4. The apparatus according to claim 1, wherein the stainless steel housing is used for forming a closed environment for the closed ring down chamber, and the stainless steel housing has a gas inlet and outlet, a laser beam inlet and outlet, and a vacuum gauge interface.
5. The device for detecting the concentration of the real-time self-calibration trace gas as claimed in claim 1, wherein the neutral beam splitter splits a narrow-linewidth laser beam into two coherent beams with optical power of 1:1, and the two beams of laser with the same parameters are respectively irradiated to the closed ring-down cavity and the open ring-down cavity for trace gas detection.
6. The device for detecting the concentration of the real-time self-calibration trace gas as claimed in claim 1, wherein a parallel closed ring-down cavity and an open ring-down cavity with the same ring-down cavity parameters are combined, a cavity ring-down experiment is not needed during gas detection, the open ring-down cavity parameters are calibrated by using the parameters of the closed ring-down cavity, a gas detection step is omitted, and a closed ring-down cavity transmission laser signal and an open ring-down cavity signal are combined to obtain a relatively accurate gas concentration detection result through a data collection and analysis processing circuit module.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116858793A (en) * | 2023-09-04 | 2023-10-10 | 中国原子能科学研究院 | Gas concentration detection device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5528040A (en) * | 1994-11-07 | 1996-06-18 | Trustees Of Princeton University | Ring-down cavity spectroscopy cell using continuous wave excitation for trace species detection |
| US20080111993A1 (en) * | 2006-11-10 | 2008-05-15 | Miller J Houston | Compact near-ir and mid-ir cavity ring down spectroscopy device |
| WO2021007782A1 (en) * | 2019-07-16 | 2021-01-21 | 深圳先进技术研究院 | Cavity ring-down spectrometer system |
| CN112903628A (en) * | 2021-01-25 | 2021-06-04 | 内蒙古光能科技有限公司 | Trace gas detection device in negative pressure state and detection method thereof |
| CN113092412A (en) * | 2021-04-13 | 2021-07-09 | 内蒙古光能科技有限公司 | Multi-component trace gas online detection device and method under negative pressure state |
| CN113659220A (en) * | 2021-08-05 | 2021-11-16 | 中国民航大学 | Lithium battery thermal runaway early warning system and method based on cavity ring-down spectroscopy technology |
-
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- 2021-12-21 CN CN202111570147.0A patent/CN114235701B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5528040A (en) * | 1994-11-07 | 1996-06-18 | Trustees Of Princeton University | Ring-down cavity spectroscopy cell using continuous wave excitation for trace species detection |
| US20080111993A1 (en) * | 2006-11-10 | 2008-05-15 | Miller J Houston | Compact near-ir and mid-ir cavity ring down spectroscopy device |
| WO2021007782A1 (en) * | 2019-07-16 | 2021-01-21 | 深圳先进技术研究院 | Cavity ring-down spectrometer system |
| CN112903628A (en) * | 2021-01-25 | 2021-06-04 | 内蒙古光能科技有限公司 | Trace gas detection device in negative pressure state and detection method thereof |
| CN113092412A (en) * | 2021-04-13 | 2021-07-09 | 内蒙古光能科技有限公司 | Multi-component trace gas online detection device and method under negative pressure state |
| CN113659220A (en) * | 2021-08-05 | 2021-11-16 | 中国民航大学 | Lithium battery thermal runaway early warning system and method based on cavity ring-down spectroscopy technology |
Non-Patent Citations (1)
| Title |
|---|
| 宓云;王晓萍;詹舒越;: "光腔衰荡光谱技术及其应用综述", 光学仪器, no. 05 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116858793A (en) * | 2023-09-04 | 2023-10-10 | 中国原子能科学研究院 | Gas concentration detection device |
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