CN114235642A

CN114235642A - Substrate surface droplet contact angle measurement system

Info

Publication number: CN114235642A
Application number: CN202110032086.6A
Authority: CN
Inventors: 许睿晙
Original assignee: Fine Solution Co ltd
Current assignee: Fine Solution Co ltd
Priority date: 2020-09-05
Filing date: 2021-01-11
Publication date: 2022-03-25
Also published as: KR102339560B1

Abstract

The invention discloses a measuring system for the contact angle of liquid drops on the surface of a base material, which comprises: a stage for supporting a substrate; a droplet supplier for allowing the droplet to be dropped on the surface of the substrate; a mobile terminal moving up and down along the side surface of the table and shooting the side of the base material and the liquid drop to generate a liquid drop contact image; and a contact angle generation application program which is loaded on the mobile terminal and generates a contact angle from the liquid drop contact image and displays the contact angle on the mobile terminal.

Description

Substrate surface droplet contact angle measurement system

[ technical field ] A method for producing a semiconductor device

The invention relates to a contact angle measuring system, in particular to a system for measuring the contact angle of a liquid drop on the surface of a substrate with a processed surface.

[ background of the invention ]

The contact angle (contact angle) refers to the angle at which a liquid forms thermodynamic equilibrium on the surface of a solid. The atoms or electrons on the surface of the solid have much higher energy than the atoms or electrons in the interior of the solid. When a liquid contacts such a solid surface, this excess energy is attenuated by an action of a force.

When the liquid contacts the solid surface, the gas on the solid surface is pushed out, and the free energy changes at the interface between the liquid and the solid. The surface energy of a solid interacts with the interfacial tension of the solid and liquid to form a droplet having a curved surface on the surface of the solid that the liquid contacts, resulting in a contact angle between the solid and the liquid.

By applying the principle of action between the solid and the liquid and measuring the contact angle between the solid surface and the liquid, the surface energy of the solid can be indirectly measured.

Korean patent registration No. 1064348 (surface energy control device by measuring contact angle in real time and method thereof), korean patent registration No. 1110329 (contact angle measuring module, surface energy measuring device provided with the same, and surface energy measuring method using the same), korean patent registration No. 1110330 (contact angle measuring module and surface energy measuring device provided with the same), and the like have been proposed as prior art, and a system and method for measuring contact angle of liquid droplet on solid surface have been proposed.

However, in the conventional contact angle measuring system, the arrangement space of the measurement object is separately provided, and the space is limited, so that it is difficult to measure the contact angle on the upper surface of the base material such as a glass substrate having a large area.

Further, the conventional contact angle measuring system is configured such that an imaging device for imaging a contact area between a substrate and a liquid droplet is integrated, and the measuring device is large in scale and high in purchase cost, so that it is not easy to purchase the conventional contact angle measuring system in a field such as training or practice, and even if the conventional contact angle measuring system is purchased, the surface treatment state of the substrate as a treatment object cannot be checked in real time, and the training effect cannot be improved.

[ Prior patent documents ]

1. Korean patent registration No. 1064348: a surface energy control device and method by measuring a contact angle in real time;

2. korean patent registration No. 1110329: a contact angle measuring module, a surface energy measuring apparatus having the same, and a surface energy measuring method using the same;

3. korean patent registration No. 1110330: a contact angle measuring module and a surface energy measuring device having the same are provided.

[ summary of the invention ]

[ problem ] to provide a method for producing a semiconductor device

In order to solve the problems existing in the prior art, the invention provides:

first, the contact angle is measured directly on a substrate placed on a stage without separating the sample from the substrate;

secondly, the contact angle can be measured by using a mobile terminal carried by a user, namely a smart phone, without independently preparing shooting equipment for shooting a substrate or a sample, so that the user does not need to bear extra cost and can also measure the contact angle;

and thirdly, the measuring system of the contact angle of the liquid drop on the surface of the substrate is convenient to apply in a surface treatment training course so as to improve the training effect.

[ technical solution ] A

To achieve the above object, the system for measuring a contact angle of a liquid droplet on a surface of a substrate according to the present invention may include a stage, a liquid droplet supplier, a mobile terminal, a contact angle generating application program, and the like.

The table may support a substrate.

The droplet supplier may drop droplets onto the substrate surface.

The mobile terminal can move up and down along the side surface of the table and shoot the side of the base material and the liquid drop to generate a liquid drop contact image.

The contact angle generation application program is loaded on the mobile terminal, and generates a contact angle from the liquid drop contact image and displays the contact angle on the mobile terminal.

In the system for measuring a contact angle of a droplet on a surface of a substrate of the present invention, the droplet supplying unit may supply 10 μ l or less of a droplet.

In the system for measuring a contact angle of a droplet on a surface of a substrate of the present invention, a syringe having a capacity of 1ml or less may be used as the droplet supplying unit.

In the system for measuring a contact angle of a droplet on the surface of a substrate of the present invention, the stage may have a vertical side surface.

In the substrate surface droplet contact angle measuring system of the present invention, the vertical side surface of the table may be formed in conformity with the direction of gravity.

In the system for measuring a contact angle of a droplet on a surface of a substrate according to the present invention, the contact angle generation application may perform the steps of: cutting a side image including the whole liquid drop and the boundary area of the liquid drop and the base material; extracting a maximum outline of the droplet from the side image; a step of generating a quadrangle having the surface of the base material as one side while surrounding the contour; and generating a contact angle according to the width and the height of the quadrangle and the contour radius.

In the system for measuring a contact angle of a droplet on a surface of a substrate according to the present invention, the contact angle generation application further executes: a step of adjusting the level in the droplet contact image before cutting the side image.

In the system for measuring the contact angle of the liquid drop on the surface of the base material, the contact angle generation application program comprises a QR code identification part, and the QR code is automatically operated when being identified.

[ PROBLEMS ] the present invention

The system for measuring the contact angle of the liquid droplet on the surface of the substrate according to the present invention has an advantageous effect in that the side of the substrate and the liquid droplet can be photographed by using a camera of a smart phone, which is a mobile terminal carried by a user, and the contact angle can be measured by using a side image obtained thereby, and the contact angle can be measured with respect to the substrate placed on a stage without separating a sample from the substrate, thereby confirming the surface treatment state of the substrate in real time. The method for shooting by using the smart phone and immediately confirming the scene is particularly suitable for situations needing display, such as school practice scenes, and the like, and can greatly improve the training effect;

the mobile terminal carried by the user, namely the camera of the smart phone, can be used, so that other shooting equipment is not required to be equipped for shooting the substrate or the sample, and measuring equipment is not required to be purchased for measuring the contact angle, and the cost required by measuring the contact angle is greatly saved.

[ description of the drawings ]

FIG. 1 is a block diagram of a substrate surface drop contact angle measurement system of the present invention;

FIG. 2 is a flow chart illustrating a method of using the substrate surface drop contact angle measurement system of the present invention;

FIG. 3 is a flow chart illustrating the process of generating a contact angle by a contact angle generation application in a substrate surface droplet contact angle measurement system of the present invention;

fig. 4 is a flowchart illustrating a process of calculating a contact angle (θ) according to the width (W) and height (H) of a quadrangle and the radius (R) of the contour of the quadrangle of the present invention.

[ notation ] to show

110: a table; 120: a liquid droplet supplier;

121: a droplet; 130: a mobile terminal;

131: a camera module; 200: a substrate.

[ detailed description ] embodiments

The present invention will be described in detail below with reference to the accompanying drawings.

FIG. 1 is a block diagram of a substrate surface drop contact angle measurement system of the present invention.

As shown in fig. 1, the substrate surface droplet contact angle measuring system of the present invention comprises: a table (110), a droplet supplier (120), a mobile terminal (130), a contact angle generation application program (not shown), and the like.

The table (110) supports the substrate (200), and the upper portion may have a horizontal surface. Here, the base material (200) may be a substrate having a surface treated, or the like, and may be a part of the substrate having a surface treated, such as a sample, as the case may be.

The side of the table (110) may have a vertical surface. The side vertical surfaces may be arranged side by side with the direction of gravity.

The droplet supplier (120) can supply droplets (121) to the surface of the substrate (200). The droplet supplier (120) can supply droplets (121) of 10 μ l or less. Here, the reason why the size of the droplet 121 is limited to 10 μ l or less is that when the size of the droplet 121 exceeds 10 μ l, the shape of the droplet 121 is changed by the influence of gravity.

Table 1 below shows the degree of deformation (deformation ratio,%) of the shape of the droplet (121) according to the size of the droplet (121).

[ TABLE 1 ]

The deformation ratio in table 1 above is a result of calculating the degree of the shape spreading out to the horizontal direction by gravity according to "[ (horizontal diameter)/(radius × 2) ] × 100".

As shown in Table 1 above, when the droplet (121) had a size of 10. mu.l, the deformation ratio was 0.6%, and it was confirmed that the deformation ratio was negligible. Therefore, in the present invention, the size of the droplet 121 is limited to 10. mu.l or less, and this limitation of the size of the droplet 121 has technical significance.

The droplet supplier (120) is a disposable syringe. The disposable syringe may include: an injection needle for discharging a droplet (121); a container body for containing liquid; a pressurizing part which is combined with the body and pressurizes the liquid towards the direction of the injection needle, etc. The droplet supplier (120) can use water as the droplets (121).

When a disposable syringe is used as the droplet supplying unit (120), a disposable syringe having a capacity of 1ml or less can be used. In this case, the disposable syringe can drop 6 to 7 μ l of water droplets on the surface of the substrate (200). The water drops freely drop from the end of the injection needle and stick to the surface of the substrate (200).

The mobile terminal (130) can photograph the side of the base material (200) and the liquid drop (121) to generate a liquid drop contact image. The mobile terminal (130) can move up and down along the side of the table (110). In this case, the side of the table (110) forms a vertical surface, and the vertical surface is preferably formed side by side with the vertical direction.

The mobile terminal (130) includes a camera module (131), a display unit, a control unit, and the like.

The camera module (131) may include a lens portion, an image sensor, and the like.

The control unit can display the captured image generated by the camera module (131) on the display unit in real time. At this time, the control section may display the horizontal reference line together with the photographed image. The user can manually adjust the level, and through the feedback circuit which is arranged in the smart phone and applies the gyroscope function, the user can manually adjust the level while looking at the horizontal reference line until the horizontal error is below 3 degrees. The control unit generates a droplet contact image from the captured image upon receiving an imaging command from the outside. The photographing command is generated by the user clicking a photographing button. The drop contact image may include more than one entirety of the drop (121) and a boundary region between the substrate (200) and the drop (121).

The contact angle generation application program is installed in the mobile terminal (130), generates a contact angle from a droplet contact image, and displays the contact angle on the display unit of the mobile terminal (130).

The contact angle generation application program analyzes the droplet contact image to generate a contact angle of a droplet (121) that lands on the surface of the substrate (200).

The contact angle generation application may include a QR code recognition portion. After the QR code is recognized by the QR code recognition portion, the contact angle generation application may automatically run. The QR code may be attached to a table (110), a surface treatment device, a training teaching material, and the like. The QR code may be matched with a unique number of the table (110), a surface treatment device, a training material, or the like. When the contact angle generation application program displays the contact angle, the inherent number of the table (110), the surface treatment device, the training material, and the like may be displayed together.

FIG. 2 is a flow chart illustrating a method of using the substrate surface droplet contact angle measurement system of the present invention.

First, in step (S110), a QR code attached to a table (110) or the like is photographed and recognized by a camera module (131) of a mobile terminal (130)

In step (S120), after the QR code is recognized, the control unit of the mobile terminal (130) may operate the contact angle generation application.

In step (S130), the user may move the mobile terminal (130) up and down along the vertical side surface of the table (110). The mobile terminal (130) moves from the lower side to the upper side along the vertical side of the table (110) in the state that the camera part is located in the direction of the table (110). In this case, the mobile terminal (130) incorporates a gyro sensor, an acceleration sensor, and the like for the purpose of leveling or measurement, and preferably moves in a vertical direction that coincides with the direction of gravity in order to flexibly use the sensor for leveling.

In the step (S140), when the mobile terminal (130) reaches the boundary between the base material (200) and the droplet (121), the mobile terminal (130) manually or automatically photographs the droplet (121) and the side of the base material (200) through the camera module (131). When shooting is carried out manually, the mobile terminal (130) displays the shot image on the display part in real time, and a user can look at the shot image and the horizontal reference line and click the shooting button at the best position. When automatically shooting, the mobile terminal (130) can automatically operate shooting when the liquid drop (121) and the horizontal straight line which is the surface of the base material (200) contacting the liquid drop (121) are identified by the whole camera module. Horizontal line recognition is a method that can take all line segments on a perceptual image and analyze the coordinates of the pixels forming the line segments. The overall recognition of the droplet (121) may be performed by storing the outline of the droplet (121), matching the outline, or recognizing that a circular or elliptical object is recognized in the upper direction.

In step (S150), the mobile terminal (130) may generate a droplet contact image including at least one entire droplet (121) and a boundary region of the liquid (121) and the substrate (200). The droplet contact image may be generated by the function of the mobile terminal (130) itself or by a contact angle generation application.

In step (S160), the contact angle generation application may generate a contact angle. After the contact image of the liquid drop is processed by the contact angle generation application program, the contact angle generation between the base material (200) and the liquid drop (121) is calculated by a preset calculation program.

In step (S170), the contact angle generation application may display the generated contact angle on the display unit. When the contact angle generation application displays the contact angle, the contact angle may be displayed together with a portion of the image on which the droplet is in contact. Further, the contact angle generation application may also generate a display of the two lines that form the contact angle together. The contact angle generation application program may display the unique number of the table (110), that is, the unique number of the surface treatment device, together with the contact angle.

Fig. 3 is a flow chart illustrating the process of generating a contact angle by a contact angle generation application in a substrate surface droplet contact angle measurement system of the present invention.

First, in step (S161), to analyze the droplet contact image, a step of selecting an adjustment level as needed may be performed. The horizontal line in the drop contact image is the reference line for calculating the contact angle and can be adjusted to be in the same plane as the surface of the substrate (200). The horizontal adjustment may include horizontal line identification, horizontal rotation angle adjustment, and the like.

In step (S162), in order to extract a part of the droplet contact image as an analysis object to generate a contact angle, image cropping may be performed. The analysis object includes: at least one intact droplet (121), a boundary region between the droplet (121) and the substrate (200).

In step (S163), the outline of the droplet (121) may be extracted in the clipped droplet contact image. The contour may be a circular shape as a whole, but may be an elliptical shape, and therefore, in this step, the contour may be set to a maximum contour, that is, a contour having a maximum radius. The maximum profile is presented as a circle with a radius (R), but may present an incomplete circular form while the underside is in contact with the substrate (200) to form a plane.

In the step (S164), a quadrangle surrounding the extracted contour while having the surface of the base material (200) as one side may be generated. A quadrilateral is generally long and wide (width, W) in the horizontal direction and short and wide (height, H) in the vertical direction.

In step (S165), the contact angle (θ) may be calculated from the radius (R) of the maximum profile and the width (W) and height (H) of the quadrangle. Fig. 4 shows an example of a process of calculating the contact angle (θ) from the width (W) and height (H) of the quadrangle and the radius (R) of the profile. Here, m is the tangential inclination of the point where the outline of the droplet (121) meets the plane of the substrate (200).

The above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified or changed; all other embodiments obtained without inventive step are within the scope of the present invention.

Claims

1. A substrate surface liquid contact angle measurement system, comprising:

a stage for supporting a substrate;

a droplet supplier for allowing droplets to be dropped onto the surface of the substrate;

a mobile terminal moving up and down along the side of the table and shooting the side of the base material and the liquid drop so as to generate a liquid drop contact image;

and a contact angle generation application program which is loaded on the mobile terminal and generates a contact angle from the liquid drop contact image and displays the contact angle on the mobile terminal.

2. The substrate surface liquid contact angle measurement system of claim 1,

the droplet supplier supplies droplets of 10 μ l or less.

3. The substrate surface liquid contact angle measurement system of claim 2,

the drop supplier is a syringe having a capacity of 1ml or less.

4. The substrate surface liquid contact angle measurement system of claim 1,

the table has vertical sides.

5. The substrate surface liquid contact angle measurement system of claim 4,

the vertical side of the table is consistent with the gravity direction.

6. A substrate surface droplet contact angle measurement system according to any one of claims 1 to 5,

the contact angle generation application includes: a step of cutting a side image including the entire droplet and a boundary region between the droplet and the substrate; extracting a maximum outline of the droplet from the side image; a step of generating a quadrangle having the surface of the base material as one side while surrounding the contour; and generating a contact angle according to the width and the height of the quadrangle and the contour radius.

7. The substrate surface liquid contact angle measurement system of claim 6,

the contact angle generation application further performs: a step of adjusting the level in the droplet contact image before cutting the side image.

8. The substrate surface liquid contact angle measurement system of claim 6,

the contact angle generation application program includes a QR code recognition unit, and automatically operates when the QR code is recognized.