CN114235357B - Dihedral angle reflector folding optical system for full-field sampling detection - Google Patents

Dihedral angle reflector folding optical system for full-field sampling detection Download PDF

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CN114235357B
CN114235357B CN202210174333.0A CN202210174333A CN114235357B CN 114235357 B CN114235357 B CN 114235357B CN 202210174333 A CN202210174333 A CN 202210174333A CN 114235357 B CN114235357 B CN 114235357B
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CN114235357A (en
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梁思远
周威
何姜
武鹏飞
葛建媛
吴昊
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Maolai Nanjing Instrument Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0207Details of measuring devices
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror

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Abstract

The invention discloses a dihedral angle reflector folding optical system for full-field sampling detection, which comprises a first reflector for folding a light beam to be detected out of a piece to be detected, a dihedral angle reflector group for folding the light beam to be detected, which is diverged relative to an optical axis, into a converging light beam relative to the optical axis and is arranged corresponding to a characteristic sampling field point except a central field point, an imaging receiving lens and a camera matched with the imaging receiving lens, wherein the dihedral angle reflector group comprises a second reflector and a third reflector, and an included angle theta between the second reflector and the third reflector22=(θ1030)/2,θ10Is the angle theta between the chief ray of the light beam to be measured and the optical axis Z30Is the included angle between the chief ray of the light beam to be measured after being refracted and the optical axis Z. The dihedral angle reflector module does not introduce chromatic aberration and other aberration when deflecting the angle of the refracted light, and has the advantages of insensitivity to installation and adjustment and low cost.

Description

Dihedral angle reflector folding optical system for full-field sampling detection
Technical Field
The invention relates to an optical system, in particular to a dihedral reflector folding optical system for full-field sampling detection.
Background
The technical scheme for detecting the performance of the complete machine of the AR glasses can be full-view-field coverage or 9 characteristic test points are taken in a full-view-field space according to an ANSI 9 point test method; the full field coverage is generally realized by means of a cone Lens (Conoscope Lens), although the full field coverage can cover the whole field angle, the outer diameter size of the front end of the Lens is larger, and the Lens interferes with AR glasses legs; and according to the ANSI 9 point test method, 9 characteristic test points are taken in the full-field space, 9 camera modules containing lenses are needed to cover each test point, the whole detection equipment is large in size, high in cost and high in installation and debugging difficulty.
Therefore, it is desired to solve the above problems.
Disclosure of Invention
The purpose of the invention is as follows: the invention aims to provide a dihedral mirror folding optical system for full-field sampling detection, which does not introduce chromatic aberration and other aberrations and is insensitive to installation and adjustment.
The technical scheme is as follows: in order to achieve the above object, the present invention discloses a dihedral angle reflector folding optical system for full field sampling detection, comprising a first reflector for folding all light beams to be detected out of a device under test, a dihedral angle reflector set for folding the light beams to be detected diverged relative to an optical axis into converging light beams converging relative to the optical axis and corresponding to characteristic sampling field points except central field points, an imaging receiving lens for receiving all light beams to be detected, and a camera matched with the imaging receiving lens and used for converging all light beams to be detected to form an image, wherein the dihedral angle reflector set comprises a second reflector and a third reflector, and an included angle theta between the second reflector and the third reflector22Satisfies the formula:
θ22=(θ1030)/2,θ10is the angle between the chief ray of the light beam to be measured and the optical axis Z, theta30Is the included angle between the chief ray of the light beam to be measured after being refracted and the optical axis Z.
The focal length f' of the imaging receiving lens and the diameter D of the sub image surface region of each light beam to be detected on the camera target surface meet the formula:
D=2×f´×tan(θ00)
wherein theta is00For each sub-field angle of the beam to be measured.
Preferably, the characteristic sampling field of view points include a central field of view point A and an off-axis field of view point B on the optical axis Z1~B6And off-axis field of view point C1~C2In which the off-axis field of view point B1And off-axis field of view point B3Located in the same section, off-axis field of view point B2And off-axis field of view point B4Located in the same section, off-axis field of view point B5And off-axis field of view point B6Located in the same section, off-axis field of view point C1And off-axis field of view point C2In the same cross section, wherein
Figure 882092DEST_PATH_IMAGE001
α is a component of the characteristic sampling field point angle in the Y direction, and β is a component of the characteristic sampling field point angle in the X direction.
Furthermore, an off-axis field of view point B5Off-axis field of view point B6Off-axis field of view point C1And off-axis field of view point C2The included angle theta between the chief ray of the light beam to be measured after being refracted and the optical axis Z30The value satisfies the formula:
θ30﹣2×θ00>0,
off-axis field of view point B1~B4The included angle theta between the chief ray of the light beam to be measured after being refracted and the optical axis Z30The value satisfies the formula:
tan(θ30)×sin(arc tan(tanα/tanβ))>2×tan(θ00),θ00for each sub-field angle of the beam to be measured.
Preferably, the lower end of the third reflector is at a lateral distance CD from the optical axis Z>OD×tan(θ00),θ00For each sub-field angle of the light beam to be measured, OD represents the axial distance from the exit pupil to be measured to the lower end of the third mirror.
Furthermore, the calculation formula of the lateral distance FC from the center point B of the second reflector to the lower end of the third reflector is as follows:
FC=(OE×tan(θ10)﹣CD)/tan(θ10+2×θ20) OE represents the axial distance from the exit pupil to be measured to the center of the second mirror, and CD represents the vertical distance from the lower end of the third mirror to the optical axis Z.
Further, the angle θ of the second reflector with respect to the optical axis Z20Satisfy 0 °<θ20≤10°。
Preferably, the distance from the center of the first reflector to the upper end of the eye movement range of the lens to be measured is d1,20mm<d1<30mm。
Furthermore, the distance from the center of the first reflector to the center of the dihedral corner reflector set is d2,60mm<d2<100mm。
Go toStep two, the distance d from the central point of the dihedral angle reflector group to the front surface of the imaging receiving lens3,200mm≤d3<300mm。
Has the advantages that: compared with the prior art, the invention has the following remarkable advantages: the dihedral angle reflector set of the invention refracts the light path, and is matched with an imaging receiving lens and a camera to completely cover nine characteristic sampling field points, and the reflector can not introduce chromatic aberration and other aberrations when deflecting the light ray angle, and simultaneously, the dihedral angle reflector set has the advantages of insensitivity to adjustment and low cost.
Drawings
FIG. 1 is a schematic diagram of the system of the present invention;
FIG. 2 is a front view of the system of the present invention;
FIG. 3 is a view of a mirror layout in a test section of the present invention;
FIG. 4 is a schematic view of the angular relationship within a test section of the present invention;
FIG. 5 is a schematic diagram showing the distribution of 9 view points on the target surface of the camera according to the present invention;
FIG. 6 is a front view of the spatial layout of 8 dihedral corner reflectors in accordance with the present invention;
FIG. 7 is an isometric view of the spatial layout of 8 dihedral corner reflectors of the present invention.
Detailed Description
The technical scheme of the invention is further explained by combining the attached drawings.
As shown in fig. 1 and fig. 2, a dihedral corner reflector folding optical system for full-field sampling detection according to the present invention includes a lens to be detected, an eye movement range of the lens to be detected, a first reflector, 8 dihedral corner reflector sets, an image receiving lens, and a camera.
According to ANSI 9 point test, the characteristic sampling view field points in the invention comprise a central view field point A and an off-axis view field point B which are positioned on an optical axis Z1~B6And off-axis field of view point C1~C2In which the off-axis field of view point B1And off-axis field of view point B3Located in the same section, off-axis field of view point B2And off-axis field of view point B4Located in the same cross sectionInner and outer off-axis field of view point B5And off-axis field of view point B6Located in the same section, off-axis field of view point C1And off-axis field of view point C2In the same cross section, wherein
Figure 613288DEST_PATH_IMAGE001
The alpha is a component of the characteristic sampling view field point in the Y direction, and the beta is a component of the characteristic sampling view field point in the X direction; theta10The included angle between the chief ray of the light beam to be measured of the characteristic sampling field point and the optical axis Z.
The first reflector is used for refracting the light beam to be measured out of the piece to be measured, the distance from the center of the first reflector to the upper end of the eye movement range of the lens to be measured is d1, and the distance is 20mm < d1<30 mm. The dihedral angle reflector set is used for converting the light beam to be detected which is diverged relative to the optical axis into a converging light beam relative to the optical axis, the distance from the center of the first reflector to the center point of the dihedral angle reflector set is d2, and the distance is more than 60mm and less than d2 and less than 100 mm. The 8 dihedral angle reflector sets are respectively arranged corresponding to characteristic sampling field points except the central field point, the distance d3 between the central point of the dihedral angle reflector set and the front surface of the imaging receiving lens is 200 mm-3 mm-300 mm. The camera is matched with an imaging receiving lens, the distance from the rear surface of a lens of the imaging receiving lens to a photosensitive chip of the camera is d4, and d4 is determined by the back focal length value of the imaging receiving lens; the focal length f' of the imaging receiving lens and the diameter D of the sub image surface region of each light beam to be detected on the target surface of the camera meet the formula:
D=2×f´×tan(θ00)
wherein theta is00For each sub-field angle of the beam to be measured.
Each dihedral angle reflector group comprises a second reflector and a third reflector, and an included angle theta is formed between the second reflector and the third reflector22=(θ1030)/2,θ10Is the angle between the chief ray of the light beam to be measured and the optical axis Z, theta30Is the included angle between the chief ray of the light beam to be measured after being refracted and the optical axis Z. Wherein the off-axis field of view point B5Off-axis field of view point B6Off-axis field of view point C1And off-axis field of view point C2The included angle theta between the chief ray of the light beam to be measured after being refracted and the optical axis Z30The value satisfies theta30﹣2×θ00>0,
Off-axis field of view point B1~B4The included angle theta between the chief ray of the light beam to be measured after being refracted and the optical axis Z30Value satisfies
tan(θ30)×sin(arc tan(tanα/tanβ))>2×tan(θ00),θ00For each sub-field angle of the beam to be measured.
The transverse distance CD between the lower end of the third reflector and the optical axis Z>OD×tan(θ00),θ00For each sub-field angle of the light beam to be measured, OD represents the axial distance from the exit pupil to be measured to the lower end of the third mirror. The calculation formula of the transverse distance FC from the center point B of the second reflector to the lower end of the third reflector is as follows:
FC=(OE×tan(θ10)﹣CD)/tan(θ10+2×θ20) OE represents the axial distance from the exit pupil to be measured to the center of the second mirror, and CD represents the vertical distance from the lower end of the third mirror to the optical axis Z.
The central field point A on the optical axis Z does not need to pass through the dihedral angle reflector module, and directly passes through the clearance between the dihedral angle reflector module and the optical axis to reach the imaging receiving lens.
Angle theta of the second reflector relative to the optical axis Z20Satisfy 0 °<θ20≤10°。
Example 1
As shown in fig. 1 and fig. 2, for the detection of the whole AR glasses, embodiment 1 includes a lens G01 to be measured, an eye movement range G02 of the lens to be measured, a first reflector G03, glasses legs G04 to be measured, 8 dihedral angle reflectors G05, 1 imaging receiving lens G06, and 1 camera G07.
According to ANSI 9 point test, the characteristic sampling view field points in the invention comprise a central view field point A and an off-axis view field point B which are positioned on an optical axis Z1~B6And off-axis field of view point C1~C2In which the off-axis field of view point B1And off-axis field of view point B3Located in the same section, off-axis field of view point B2And off-axis field of view point B4Located in the same section, off-axis field of view point B5And off-axis field of view point B6Located in the same section, off-axis field of view point C1And off-axis field of view point C2In the same cross section, wherein
Figure 606651DEST_PATH_IMAGE001
Where α is the component of the characteristic sampling field point angle of view in the Y direction, β is the component of the characteristic sampling field point angle of view in the X direction, and θ10The included angle between the chief ray of the light beam to be measured of the characteristic sampling field point and the optical axis Z. Table 1 shows that in the field of view of the AR glasses to be tested, 9 characteristic sampling field-of-view points are taken according to ANSI 9 point test, and the components (β, α) of the projection angles with respect to the X-axis and the Y-axis are a (0 ° ), respectively; b is1、B2、B3、B4(18°,10°),B5、B6(0°,15°),C1、C2(25 °, 0 °); angle theta with respect to the optical axis Z10Respectively A (0 degree); b is1、B2、B3、B4(20.3°);B4、B5(15°);C1、C2(25 °). Generally, once the angle value is determined, the position of the light beam to be measured with the angle in space is uniquely determined.
Table 1 sampling field of view points (ANSI 9 point test sampling points, unit °)
Figure 360981DEST_PATH_IMAGE002
As shown in fig. 1 and 2, 9 feature sampling test points centered on the exit pupil diverge toward the space, and in order to receive all the test points with one camera, divergent light rays need to be deflected by dihedral reflectors arranged at different angles for a fixed angle and then converge toward a common central point, and then the divergent light rays are imaged on a target surface of the camera through a receiving lens; as shown in fig. 5, the distribution of nine test points on the target surface of the camera is shown, and each circle represents the sub-field size of one sampling field point; in order to facilitate data processing of the complete machine sampling points of the AR to be detected by the same camera, the angle of each pair of dihedral angle reflectors is calculated, and nine test points are spaced on the target surface of the camera by taking the on-axis test point as the center and are not overlapped. Because the reflector can not introduce chromatic aberration and other aberration when the refracted light deflects the angle; the invention can be applied to white light spectrum.
The invention can cover nine characteristic sampling view field points by means of the deflection of the light path by the dihedral angle reflector group and the cooperation of an imaging receiving lens and a camera, the sampling view field angle is not limited to the values listed above, meanwhile, the test scheme is not limited to AR glasses complete machine test, and the test scheme can also be applied to complete machine component modules such as optical waveguide films, projection module sampling test or DPA device defect detection.
The first reflector is used for deflecting the light beam to be detected out of the piece to be detected, the first reflector is a 45-degree reflector, the distance from the center of the first reflector to the upper end of the eye movement range of the lens to be detected is d1, the distance between 20mm < d1<30mm, and the distance between d1 and d 3578 is preferably 25 mm. The dihedral angle reflector group is used for converting a light beam to be detected which is diverged relative to an optical axis into a converging light beam relative to the optical axis, the distance from the center of the first reflector to the center point of the dihedral angle reflector group is d2, the distance from the center of the first reflector to the center point of the dihedral angle reflector group is 60mm < d2<100mm, and the distance from the center of the first reflector to the center point of the dihedral angle reflector group is preferably 80 mm. The 8 dihedral angle reflector groups are respectively arranged corresponding to characteristic sampling field points except the central field point, the distance d3 from the central point of the dihedral angle reflector group to the front surface of the imaging receiving lens is d3 which is more than or equal to 200mm and less than 300mm, and d3 is preferably 200 mm. The camera is matched with an imaging receiving lens, the distance from the rear surface of a lens of the imaging receiving lens to a camera photosensitive chip is d4, d4 is determined by the back focal length value of the imaging receiving lens G06, the back focal length value of the imaging receiving lens G06 is 100mm, and d4 is preferably 100 mm; as shown in fig. 5, the diameter D of the sub-image surface area of each light beam to be measured on the target surface of the camera satisfies the formula:
D=2×f´×tan(θ00)=2×100×0.026=5.2mm
wherein theta is00For each sub-field angle, theta, of the beam to be measured00Preferably, the focal length f' of the imaging receiving lens is preferably 100mm at +/-1.5 degrees.
As shown in FIGS. 6 and 7, the layout of dihedral corner reflector modules each including a second reflector and a third reflector at an included angle θ therebetween is shown22=(θ1030)/2,θ10Is the angle theta between the chief ray of the light beam to be measured and the optical axis Z30The included angle between the chief ray of the light beam to be measured after being refracted and the optical axis Z; wherein theta is13=2×θ22,θ1013﹣θ30,θ13The deflection angle of the main ray of the light beam to be measured is only the included angle theta of the two mirrors22It is decided that the mirror module of the present invention is not sensitive to mounting and adjustment.
As shown in fig. 3, for off-axis field of view point C1Corresponding second mirror C101And a third mirror C102; for off-axis field of view point C2Corresponding second mirror C201And a third reflector C202The central field point a, located on the optical axis Z, passes directly through the dihedral mirror assembly. Fig. 4 is a schematic diagram of an angular relationship in a test section, where point 0 is the center of the exit pupil to BE tested, point B is the center point of the second reflecting mirror, point C is the lower end point of the third reflecting mirror, point E is the foot of point B on the optical axis Z, point F is the foot of point C on the BE straight line, and point D is the foot of point C on the optical axis Z.
As shown in FIGS. 4 and 5, to avoid the nine sampling fields of view from overlapping on the camera target surface, the off-axis field of view point B5Off-axis field of view point B6Off-axis field of view point C1And off-axis field of view point C2The included angle theta between the chief ray of the light beam to be measured after being refracted and the optical axis Z30The value satisfies theta30﹣2×θ00>0,
Off-axis field of view point B1~B4The included angle theta between the chief ray of the light beam to be measured after being refracted and the optical axis Z30The value satisfies tan (theta)30)×sin(arc tan(tanα/tanβ))>2×tan(θ00),θ00For each sub-field angle of the beam to be measured.
To avoid spatial interference of the dihedral angles, the lower end of the third mirror is spaced from the optical axis Z by a lateral distance CD>OD×tan(θ00),θ00For each sub-field angle of the light beam to be measured, OD represents the axial distance from the exit pupil to be measured to the lower end of the third mirror. Center point B of the second mirror to the third mirrorThe formula for calculating the lateral distance FC of the lower end of the reflector is as follows:
FC=(OE×tan(θ10)﹣CD)/tan(θ10+2×θ20) OE represents the axial distance from the exit pupil to be measured to the center of the second mirror, and CD represents the vertical distance from the lower end of the third mirror to the optical axis Z.
Angle theta of the second reflector relative to the optical axis Z20Satisfy 0 degree<θ20Is less than or equal to 10 degrees. Specific calculation example 1 as shown in table 2, the unknown quantity is solved according to the known quantity in the table, so that the positions of all dihedral angles in the space can be determined, and the focal length of the imaging receiving lens can be selected to be 100 mm.
TABLE 2
Figure 911042DEST_PATH_IMAGE003

Claims (10)

1. A dihedral mirror folding optical system for full field sampling inspection, comprising: the device comprises a first reflector for refracting all light beams to be detected out of a to-be-detected piece, a dihedral angle reflector group for refracting the light beams to be detected, which are diverged relative to an optical axis, into converging light beams relative to the optical axis and are arranged corresponding to characteristic sampling field points except central field points, an imaging receiving lens for receiving all the light beams to be detected, and a camera matched with the imaging receiving lens and used for converging all the light beams to be detected for imaging, wherein the dihedral angle reflector group comprises a second reflector and a third reflector, and an included angle theta between the second reflector and the third reflector is22Satisfies the formula:
θ22=(θ1030)/2,θ10is the angle between the chief ray of the light beam to be measured and the optical axis Z, theta30Is the included angle between the chief ray of the light beam to be measured after being refracted and the optical axis Z.
2. The dihedral mirror folding optical system for full field sample detection as claimed in claim 1, wherein: the focal length f' of the imaging receiving lens and the diameter D of the sub image surface region of each light beam to be detected on the camera target surface meet the formula:
D=2×f´×tan(θ00)
wherein theta is00For each sub-field angle of the beam to be measured.
3. A dihedral mirror folding optical system for full field sampling detection as claimed in claim 1, wherein: the characteristic sampling field of view points comprise a central field of view point A and an off-axis field of view point B on an optical axis Z1~B6And off-axis field of view point C1~C2In which the off-axis field of view point B1And off-axis field of view point B3Located in the same section, off-axis field of view point B2And off-axis field of view point B4Located in the same section, off-axis field of view point B5And off-axis field of view point B6Located in the same section, off-axis field of view point C1And off-axis field of view point C2In the same cross section, wherein
Figure 605190DEST_PATH_IMAGE001
α is a component of the characteristic sampling field point angle in the Y direction, and β is a component of the characteristic sampling field point angle in the X direction.
4. The dihedral mirror folding optical system for full field sample detection as claimed in claim 3, wherein: the off-axis field of view point B5Off-axis field of view point B6Off-axis field of view point C1And off-axis field of view point C2The included angle theta between the chief ray of the light beam to be measured after being refracted and the optical axis Z30The value satisfies the formula:
θ30﹣2×θ00>0,
the off-axis field of view point B1~B4The included angle theta between the chief ray of the light beam to be measured after being refracted and the optical axis Z30The value satisfies the formula:
tan(θ30)×sin(arc tan(tanα/tanβ))>2×tan(θ00),θ00the sub-field angle of each light beam to be measured; wherein the off-axis field of view point B5And off-axis field of view point B6Is a point where the component of the field angle in the X direction is 0, the off-axis field of view point C1And off-axis field of view point C2Is a point where the component of the field angle in the Y direction is 0, the off-axis field point B1~B4The component of the angle of view in both the X direction and the Y direction is not 0.
5. The dihedral mirror folding optical system for full field sample detection as claimed in claim 4, wherein: the transverse distance CD between the lower end of the third reflector and the optical axis Z>OD×tan(θ00),θ00For each sub-field angle of the light beam to be measured, the OD represents the axial distance from the exit pupil of the object to be measured to the lower end of the third reflector.
6. The dihedral mirror folding optical system for full field sample detection as claimed in claim 5, wherein: the calculation formula of the transverse distance FC from the center point B of the second reflector to the lower end of the third reflector is as follows:
FC=(OE×tan(θ10)﹣CD)/tan(θ10+2×θ20) OE represents the axial distance from the exit pupil of the object to be measured to the center of the second reflector, CD represents the vertical distance from the lower end of the third reflector to the optical axis Z, and theta20The angle of the second mirror with respect to the optical axis Z.
7. The dihedral mirror folding optical system for full field sample detection as claimed in claim 1, wherein: the included angle theta of the second reflector relative to the optical axis Z20Satisfy 0 degree<θ20≤10°。
8. The dihedral mirror folding optical system for full field sample detection as claimed in claim 1, wherein: the distance from the center of the first reflector to the upper end of the eye movement range of the piece to be measured is d1,20mm<d1<30mm。
9. The dihedral mirror of claim 1, for full field sample detectionA catadioptric optical system, characterized by: the distance from the center of the first reflector to the center point of the dihedral angle reflector set is d2,60mm<d2<100mm。
10. The dihedral mirror folding optical system for full field sample detection as claimed in claim 1, wherein: the distance d from the central point of the dihedral angle reflector group to the front surface of the imaging receiving lens3,200mm≤d3<300mm。
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4758729A (en) * 1987-08-28 1988-07-19 Spectra-Physics, Inc. Apparatus and method for measuring the included angle of a reflective cone
CN1499185A (en) * 2002-10-31 2004-05-26 ��ʽ������Э���������� Optical characteristic measurer and optical displacement gage
CN109163887A (en) * 2018-08-28 2019-01-08 北京市辐射中心 Spheroid shape single capillary x-ray lens internal surface shape detection system
CN110657960A (en) * 2019-10-31 2020-01-07 中国科学院长春光学精密机械与物理研究所 Image stabilization precision detection optical path system of large-view-field space astronomical telescope
CN111352252A (en) * 2020-03-16 2020-06-30 浙江棱镜全息科技有限公司 Air imaging mechanism, real image device and interactive system
CN210981524U (en) * 2019-12-25 2020-07-10 江苏盖姆纳米材料科技有限公司 Power measuring device of divergent terahertz radiation source

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4758729A (en) * 1987-08-28 1988-07-19 Spectra-Physics, Inc. Apparatus and method for measuring the included angle of a reflective cone
CN1499185A (en) * 2002-10-31 2004-05-26 ��ʽ������Э���������� Optical characteristic measurer and optical displacement gage
CN109163887A (en) * 2018-08-28 2019-01-08 北京市辐射中心 Spheroid shape single capillary x-ray lens internal surface shape detection system
CN110657960A (en) * 2019-10-31 2020-01-07 中国科学院长春光学精密机械与物理研究所 Image stabilization precision detection optical path system of large-view-field space astronomical telescope
CN210981524U (en) * 2019-12-25 2020-07-10 江苏盖姆纳米材料科技有限公司 Power measuring device of divergent terahertz radiation source
CN111352252A (en) * 2020-03-16 2020-06-30 浙江棱镜全息科技有限公司 Air imaging mechanism, real image device and interactive system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
《新光源在DLP拼接系统中的应用》;施旭 等;《现代显示》;20120531;第36-42页 *

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