CN114232092A - Germanium polycrystal preparation device - Google Patents
Germanium polycrystal preparation device Download PDFInfo
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- CN114232092A CN114232092A CN202111639509.7A CN202111639509A CN114232092A CN 114232092 A CN114232092 A CN 114232092A CN 202111639509 A CN202111639509 A CN 202111639509A CN 114232092 A CN114232092 A CN 114232092A
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- Prior art keywords
- graphite boat
- germanium
- quartz tube
- support
- tube
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- 229910052732 germanium Inorganic materials 0.000 title claims abstract description 59
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 title claims abstract description 59
- 238000002360 preparation method Methods 0.000 title claims abstract description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 89
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 89
- 239000010439 graphite Substances 0.000 claims abstract description 89
- 239000010453 quartz Substances 0.000 claims abstract description 65
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 65
- 230000007246 mechanism Effects 0.000 claims abstract description 45
- 239000007789 gas Substances 0.000 claims abstract description 43
- 238000010438 heat treatment Methods 0.000 claims abstract description 32
- 238000004857 zone melting Methods 0.000 claims abstract description 29
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 claims abstract description 19
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 14
- 239000001257 hydrogen Substances 0.000 claims abstract description 13
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 13
- 230000008569 process Effects 0.000 claims abstract description 13
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000010926 purge Methods 0.000 claims abstract description 8
- 238000007599 discharging Methods 0.000 claims abstract description 4
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 230000000295 complement effect Effects 0.000 claims description 6
- 238000009826 distribution Methods 0.000 abstract description 6
- 150000002431 hydrogen Chemical class 0.000 abstract 1
- 239000012535 impurity Substances 0.000 description 21
- 238000005192 partition Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 230000009467 reduction Effects 0.000 description 8
- 238000005204 segregation Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000000746 purification Methods 0.000 description 5
- 230000006698 induction Effects 0.000 description 4
- 238000011946 reduction process Methods 0.000 description 4
- 238000000605 extraction Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/08—Germanium
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/08—Production of homogeneous polycrystalline material with defined structure from liquids by zone-melting
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a germanium polycrystal preparation device, which comprises a graphite boat, a quartz tube, an air inlet tube, an exhaust tube, a first heating mechanism, a second heating mechanism, a moving mechanism and a support piece; the graphite boat is used for containing germanium oxide; the quartz tube is used for accommodating a graphite boat for accommodating germanium oxide; the gas inlet pipe and the gas outlet pipe are arranged at two axial ends of the quartz tube, the gas inlet pipe is used for introducing purging gas or hydrogen, and the gas outlet pipe is used for discharging the introduced purging gas or hydrogen; the first heating mechanism is used for heating at least a part of the quartz tube corresponding to the whole graphite boat so as to reduce germanium oxide in the graphite boat into germanium polycrystal in the process of enabling hydrogen to flow in the quartz tube through the gas inlet tube and the gas outlet tube; the second heating mechanism is connected with the moving mechanism, the moving mechanism can move in a reciprocating mode, and the moving mechanism is used for driving the second heating mechanism to conduct zone melting; the support is used for being accommodated in the quartz tube and supporting the graphite boat so that the graphite boat is centrally positioned in the quartz tube. This improves the uniformity of the temperature field distribution.
Description
Technical Field
The disclosure relates to the field of material preparation, and more particularly to a germanium polycrystal preparation device.
Background
In the preparation process of germanium polycrystal, because of the requirement of reducing germanium oxide into germanium polycrystal, the upper part of a container for containing germanium oxide is opened, which causes the difference between the gas space above the container and the gas space below the container, and the difference between the gas spaces above and below the container can influence the uniformity of temperature field distribution in the reduction process, thereby influencing impurity segregation and zone-melting purity extraction.
Disclosure of Invention
In view of the problems in the background art, it is an object of the present disclosure to provide a germanium polycrystal production apparatus capable of at least improving uniformity of temperature field distribution during reduction.
Thus, in some embodiments, a germanium polycrystal production apparatus includes a graphite boat, a quartz tube, an intake pipe, an exhaust pipe, a first heating mechanism, a second heating mechanism, a moving mechanism, and a support; the graphite boat is used for containing germanium oxide; the quartz tube is used for accommodating a graphite boat for accommodating germanium oxide; the gas inlet pipe and the gas outlet pipe are arranged at two axial ends of the quartz tube, the gas inlet pipe is used for introducing purging gas or hydrogen into the closed quartz tube, and the gas outlet pipe is used for discharging the purging gas or hydrogen introduced into the closed quartz tube; the first heating mechanism is used for heating at least a part of the quartz tube corresponding to the whole graphite boat so as to reduce germanium oxide in the graphite boat into germanium polycrystal in the process of enabling hydrogen to flow in the quartz tube through the gas inlet tube and the gas outlet tube; the second heating mechanism is connected with the moving mechanism, the moving mechanism can reciprocate from the head end of the graphite boat close to the air inlet pipe to the tail end of the graphite boat close to the exhaust pipe, and the moving mechanism is used for driving the second heating mechanism to move from the head end of the graphite boat close to the air inlet pipe to the tail end of the graphite boat close to the exhaust pipe along the axial direction of the quartz tube so as to perform zone melting of germanium polycrystal; the support is used for being accommodated in the quartz tube and supporting the graphite boat so that the graphite boat is centrally positioned in the quartz tube.
In some embodiments, the support supports the graphite boat along its entire length.
In some embodiments, the supports are two and support the head end and the tail end of the graphite boat, respectively.
In some embodiments, the inner surface of the support facing the graphite boat is topographically complementary to the outer surface of the graphite boat.
In some embodiments, the inner surface of the support is formed with an inner flow passage that passes axially therethrough and opens onto the inner surface.
In some embodiments, the inner flow passage is a plurality of inner flow passages, and the plurality of inner flow passages are axisymmetrical with respect to a vertical symmetry axis of the support on a projection plane in the axial direction.
In some embodiments, the outer surface of the support facing the quartz tube is complementary in shape to the inner surface of the quartz tube.
In some embodiments, the outer surface of the support member is formed with an outer flow passage that is axially through and opens onto the outer surface.
In some embodiments, the outer flow passage is a plurality of outer flow passages, and the plurality of outer flow passages are axisymmetrical with respect to a vertical symmetry axis of the support on a projection plane in the axial direction.
In some embodiments, the thermal conductivity of the support at the trailing end of the graphite boat is lower than the thermal conductivity of the support at the leading end of the graphite boat.
The beneficial effects of this disclosure are as follows: in the germanium polycrystal preparation apparatus of the present disclosure, the support member is used to be received in the quartz tube and support the graphite boat so that the graphite boat is centrally located in the quartz tube, so that the difference in the gas spaces above and below is reduced, and thus the uniformity of the temperature field distribution in the reduction and zone-melting processes (since zone-melting and reduction are performed in the graphite boat received in the quartz tube) can be improved, providing the impurity segregation effect and the zone-melting purification degree.
Drawings
FIG. 1 is a schematic view of an embodiment of an apparatus for preparing a germanium poly according to the present disclosure, wherein germanium oxide and the germanium poly are both shown in dashed lines.
FIG. 2 is a perspective view of a support of the germanium polycrystal preparation apparatus of FIG. 1.
FIG. 3 is a schematic diagram of another embodiment of an apparatus for preparing a germanium poly according to the present disclosure, wherein both germanium oxide and germanium poly are shown in dashed lines.
FIG. 4 is a perspective view of a support of the germanium polycrystal preparation apparatus of FIG. 2.
Wherein the reference numerals are as follows:
second heating mechanism of 100 germanium polycrystal preparation device 6
1 graphite boat 7 moving mechanism
11 head end 8 support
12 inner surface of tail end 81
13 partition 82 inside flow passage
14 outer surface of the impurity receiving groove 83
15 upper surface 84 outside flow passage
2 vertical symmetry line of quartz tube L
D axial 9A first flange
3 air inlet pipe 9B second flange
4 exhaust pipe 10 base
5 first heating mechanism
Detailed Description
The accompanying drawings illustrate embodiments of the present disclosure and it is to be understood that the disclosed embodiments are merely examples of the disclosure, which can be embodied in various forms, and therefore, specific details disclosed herein are not to be interpreted as limiting, but merely as a basis for the claims and as a representative basis for teaching one skilled in the art to variously employ the present disclosure.
Referring to fig. 1 to 4, a germanium polycrystal production apparatus 100 includes a graphite boat 1, a quartz tube 2, an inlet tube 3, an outlet tube 4, a first heating mechanism 5, a second heating mechanism 6, a moving mechanism 7, and a support member 8.
The graphite boat 1 is used for containing germanium oxide; the quartz tube 2 is used for accommodating a graphite boat 1 for containing germanium oxide; the gas inlet pipe 3 and the gas outlet pipe 4 are arranged at two ends of the quartz pipe 2 in the axial direction D, the gas inlet pipe 3 is used for introducing purging gas or hydrogen into the closed quartz pipe 2, and the gas outlet pipe 4 is used for discharging the purging gas or hydrogen introduced into the closed quartz pipe 2; the first heating mechanism 5 is used for heating at least a part of the quartz tube 2 corresponding to the whole graphite boat 1 so as to reduce germanium oxide in the graphite boat 1 into germanium polycrystal in the process of flowing hydrogen in the quartz tube 2 through the gas inlet tube 3 and the gas outlet tube 4; the second heating mechanism 6 is connected to the moving mechanism 7, the moving mechanism 7 can reciprocate from the head end 11 of the graphite boat 1 close to the air inlet pipe 3 to the tail end T of the graphite boat 1 close to the exhaust pipe 4, and the moving mechanism 7 is used for driving the second heating mechanism 6 to move from the head end 11 of the graphite boat 1 close to the air inlet pipe 3 to the tail end T of the graphite boat 1 close to the exhaust pipe 4 along the axial direction D of the quartz tube 2 so as to perform zone melting of the germanium polycrystal; the support 8 is for being housed inside the quartz tube 2 and supporting the graphite boat 1 so that the graphite boat 1 is centrally located in the quartz tube 2.
Compared with the method that the reduction and the zone melting of the germanium polycrystal are separately carried out, in the germanium polycrystal preparation device 100 disclosed by the invention, the reduction and the zone melting of the germanium polycrystal are carried out in the graphite boat 1 accommodated in the quartz tube 2, so that the process and the equipment are simplified, the preparation efficiency is improved, and the introduction of external impurities is reduced. Note that, in the operation of the germanium polycrystal production apparatus 100 of the present disclosure, the float-zone purification may be performed after the completion of the hydrogen reduction of germanium oxide, and the number of float-zone purifications may be determined depending on the purity limit of the actual purification.
In the preparation process of germanium polycrystal, because of the requirement of reducing germanium oxide into germanium polycrystal, the upper part of the graphite boat 1 is opened, which causes the difference between the gas space above the graphite boat 1 and the gas space below the graphite boat 1, and the difference of the gas spaces above and below can influence the uniformity of temperature field distribution in the reduction process, thereby influencing impurity segregation and zone-melting purity improvement. In the germanium polycrystal production apparatus 100 of the present disclosure, the support member 8 is used to be housed inside the quartz tube 2 and to support the graphite boat 1 so that the graphite boat 1 is centrally located in the quartz tube 2, so that such difference in gas space above and below is reduced, and thus it is possible to improve the uniformity of temperature field distribution in the reduction and zone-melting processes (since zone-melting and reduction are performed in the graphite boat 1 housed inside the quartz tube 2), providing an impurity segregation effect and a zone-melting extraction purity.
In the preparation process of the germanium polycrystal, the graphite of the graphite boat 1 can adsorb impurities, so that the purity of the germanium polycrystal can be improved in both the reduction process and the zone-melting process. The higher the purity of the graphite boat 1, the better, but the graphite boat 1 of an appropriate purity is selected in consideration of cost.
In one example, referring to fig. 1, the graphite boat 1 is further provided with a partition wall 13 and an impurity housing recess 14 at the tail 12, the height of the partition wall 13 being lower than the upper surface 15 of the graphite boat 1. In the zone-melting process, when zone-melting is carried out to the tail part 12, the tailing of zone-melting germanium polycrystal with high impurity content flows into the accommodating groove 14, so that the impurity concentration difference between the middle germanium polycrystal in the graphite boat 1 and the germanium polycrystal close to the tail part 12 is reduced, the next zone-melting impurity segregation is better, the purity of the middle germanium polycrystal is higher (one part can be cut off from the head and the tail of the finally used germanium polycrystal product), the zone-melting germanium polycrystal in the zone-melting process is prevented from flowing onto the quartz tube 2 at the tail part 12, and if the zone-melting germanium polycrystal flow channel quartz tube 2 is cooled after the zone-melting process, the quartz boat 1 can be cracked due to thermal shrinkage and cold expansion of germanium.
In one example, the first heating mechanism 5 is an induction coil heating mechanism using an alternating current. The alternating magnetic field that induction coil heating mechanism produced can make germanium oxide form the vortex to heat and melt, this kind of vortex forms strong stirring effect, thereby can accelerate the reduction process, in addition, also can strengthen the ability of adsorbing the impurity of graphite boat 1.
Likewise, in one example, the second heating mechanism 6 is an induction coil heating mechanism that employs alternating current. The alternating magnetic field that induction coil heating mechanism produced can make germanium polycrystal form the vortex to carry out zone-melting, this kind of vortex forms strong stirring effect, thereby can accelerate zone-melting efficiency, be favorable to the segregation of zone-melting, and then improve the purification degree of zone-melting, likewise, also can strengthen graphite boat 1's the ability of adsorbing the impurity.
As shown in fig. 1 and 2, in one example, the support 8 supports the graphite boat 1 along the entire length of the graphite boat 1.
As shown in fig. 3 and 4, in another example, the number of the supports 8 is two and the supports 8 support the head end 11 and the tail end 12 of the graphite boat 1, respectively. The examples of fig. 3 and 4 are more effective in reducing the aforementioned difference in the gas spaces above and below than the examples of fig. 1 and 2.
In order to better support the graphite boat 1 and to minimize the influence of contact variations between the contact surfaces of the support 8 and the graphite boat 1 on the temperature field, it is preferred that the inner surface 81 of the support 8 facing the graphite boat 1 is topographically complementary to the outer surface of the graphite boat 1.
In order to further reduce the difference in the above-described upper and lower gas spaces, as shown in fig. 2 and 4, the inner surface 81 of the support 8 is formed with an inner flow passage 82 that penetrates in the axial direction D and opens at the inner surface 81.
The number of the inner flow passages 82 is not limited. Specifically, the inner flow passage 82 is plural, and the plural inner flow passages 82 are axisymmetrical with respect to the vertical symmetry line L of the support member 8 on the projection plane in the axial direction D. The mode of axial symmetry relative to the vertical symmetry line L of the support member 8 is adopted, so that the influence of the layout of the inner side flow channel 82 on the temperature field is further ensured to be symmetrical relative to the vertical symmetry line L, and the uniformity of the temperature field in the graphite boat 1 is further improved.
Likewise, in order to better support the graphite boat 1 and minimize the influence of contact variations between the contact surfaces of the support 8 and the quartz tube 2 on the temperature field, the outer surface 83 of the support 8 facing the support 8 is complementary in shape to the inner surface of the quartz tube 2.
Likewise, in one example, as shown in fig. 2 and 4, the outer surface 83 of the support 8 is formed with an outer flow passage 84 that penetrates in the axial direction D and opens on the outer surface 83.
The number of the outside flow passages 84 is not limited. Specifically, the outer flow passages 84 are plural, and the plural outer flow passages 84 are axisymmetrical with respect to the vertical symmetry line L of the support 8 on the projection plane in the axial direction D. The mode of axial symmetry relative to the vertical symmetry line L of the support member 8 is adopted to further ensure that the influence of the layout of the outer side flow channel 84 on the temperature field is symmetrical relative to the vertical symmetry line L, thereby improving the uniformity of the temperature field in the graphite boat 1. Of course, the outboard flow channel 84 and the inboard flow channel 82 may be used in combination to provide even better results.
In the examples of fig. 3 and 4, it is preferred that the thermal conductivity of the support 8 at the trailing end 11 of the graphite boat 1 is lower than the thermal conductivity of the support 8 at the leading end 11 of the graphite boat 1. In this way, especially in combination with the partition wall 13 and the impurity accommodating groove 14, during the zone-melting process, the germanium material in the portion inside the impurity accommodating groove 14 behind the partition wall 13 is cooled first, the impurities in the germanium material in the portion cooled first are adsorbed toward the position cooled first, and then collected into the impurity accommodating groove 14, due to the isolation effect of the partition wall 13, the impurities of the germanium material in front of the partition wall 13 in the next zone-melting process become lower, the middle portion of the germanium material can segregate more impurities to the impurity accommodating groove 14 behind the partition wall 13, and thus the impurities in the portion of the prepared germanium polycrystal in front of the partition wall 13 except the partition wall 13 are greatly reduced.
The material of the supporting member 8 may be any suitable material. Preferably, the material of the support 8 is quartz. That is, the change in contact between the contact surfaces of the support 8 and the quartz tube 2 does not affect the temperature field by the difference in material, thereby improving the uniformity of the temperature field.
The encapsulation of the quartz tube 2 at both ends in the axial direction D may take various forms. In one example, referring to fig. 1 and 3, the germanium polycrystal preparation apparatus 100 further comprises a first flange 9A and a second flange 9B, the first flange 9A being detachably and sealingly assembled to one end of the quartz tube 2 near the head end 11 of the graphite boat 1; the second flange 9B is detachably assembled at one end of the quartz tube 2 close to the tail end 12 of the graphite boat 1 in a sealing way; the gas inlet pipe 3 is arranged on the first flange 9A and communicated with the inside of the quartz pipe 2; the exhaust pipe 4 is provided in the second flange 9B and communicates with the inside of the quartz tube 2. By adopting the assembled seal, the quartz tube 2 can be repeatedly used, and the cost is reduced.
Referring to fig. 1 and 3, the germanium polycrystal preparation apparatus 100 further comprises a base 10, and the base 10 supports the quartz tube 2 such that an end of the quartz tube 2 near a head end 11 of the graphite boat 1 is lower than an end of the quartz tube 2 near a tail end 12 of the graphite boat 1.
The above detailed description is used to describe a number of exemplary embodiments, but is not intended to limit the combinations explicitly disclosed herein. Thus, unless otherwise specified, various features disclosed herein can be combined together to form a number of additional combinations that are not shown for the sake of brevity.
Claims (10)
1. A germanium polycrystal preparation device (100) is characterized by comprising a graphite boat (1), a quartz tube (2), an air inlet tube (3), an air outlet tube (4), a first heating mechanism (5), a second heating mechanism (6), a moving mechanism (7) and a support piece (8);
the graphite boat (1) is used for containing germanium oxide;
the quartz tube (2) is used for accommodating a graphite boat (1) for containing germanium oxide;
the gas inlet pipe (3) and the gas outlet pipe (4) are arranged at two ends of the quartz pipe (2) in the axial direction (D), the gas inlet pipe (3) is used for introducing purging gas or hydrogen into the closed quartz pipe (2), and the gas outlet pipe (4) is used for discharging the purging gas or hydrogen introduced into the closed quartz pipe (2);
the first heating mechanism (5) is used for heating at least a part of the quartz tube (2) corresponding to the whole graphite boat (1) so as to reduce germanium oxide in the graphite boat (1) into germanium polycrystal in the process of flowing hydrogen in the quartz tube (2) through the gas inlet tube (3) and the gas outlet tube (4);
the second heating mechanism (6) is connected with the moving mechanism (7),
the moving mechanism (7) can reciprocate from the head end (11) of the graphite boat (1) close to the air inlet pipe (3) to the tail end (T) of the graphite boat (1) close to the exhaust pipe (4), and the moving mechanism (7) is used for driving the second heating mechanism (6) to move from the head end (11) of the graphite boat (1) close to the air inlet pipe (3) to the tail end (T) of the graphite boat (1) close to the exhaust pipe (4) along the axial direction (D) of the quartz tube (2) so as to perform zone melting of germanium polycrystal;
the support (8) is used for being accommodated in the quartz tube (2) and supporting the graphite boat (1) so that the graphite boat (1) is centrally positioned in the quartz tube (2).
2. The apparatus (100) for producing a germanium polycrystal according to claim 1, wherein the support (8) supports the graphite boat (1) along the entire length of the graphite boat (1).
3. The apparatus (100) for producing a germanium polycrystal according to claim 1, wherein the number of the supports (8) is two and the supports (8) support the head end (11) and the tail end (12) of the graphite boat (1), respectively.
4. The apparatus (100) for producing a germanium polycrystal according to claim 2 or 3,
the inner surface (81) of the support (8) facing the graphite boat (1) is complementary in shape to the outer surface of the graphite boat (1).
5. The apparatus (100) for producing a germanium polycrystal according to claim 4, wherein the inner surface (81) of the support (8) is formed with an inner flow channel (82) which is perforated in the axial direction (D) and which opens at the inner surface (81).
6. The germanium polycrystal production apparatus (100) according to claim 5, wherein the inner flow path (82) is plural, and the plural inner flow paths (82) are axisymmetrical with respect to a vertical symmetry line (L) of the support member (8) on a projection plane in the axial direction (D).
7. A germanium polycrystal preparation apparatus (100) according to claim 2 or 3, characterized in that the outer surface (83) of the support (8) facing the quartz tube (2) is complementary in shape to the inner surface of the quartz tube (2).
8. The germanium polycrystal production apparatus (100) according to claim 7, wherein the outer surface (83) of the support (8) is formed with an outer flow channel (84) which is penetrated in the axial direction (D) and opened on the outer surface (83).
9. The germanium polycrystal production apparatus (100) according to claim 8, wherein the outer flow channel (84) is plural, and the plural outer flow channels (84) are axisymmetrical with respect to a vertical symmetry line (L) of the support member (8) on a projection plane in the axial direction (D).
10. The apparatus (100) for producing a germanium polycrystal according to claim 3,
the thermal conductivity of the support (8) at the tail end (11) of the graphite boat (1) is lower than the thermal conductivity of the support (8) at the head end (11) of the graphite boat (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111639509.7A CN114232092A (en) | 2021-12-29 | 2021-12-29 | Germanium polycrystal preparation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111639509.7A CN114232092A (en) | 2021-12-29 | 2021-12-29 | Germanium polycrystal preparation device |
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| CN114232092A true CN114232092A (en) | 2022-03-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111639509.7A Pending CN114232092A (en) | 2021-12-29 | 2021-12-29 | Germanium polycrystal preparation device |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB908373A (en) * | 1954-05-18 | 1962-10-17 | Siemens Ag | Improvements in or relating to processes and apparatus for producing semi-conductor substances of very high purity |
| US20080066676A1 (en) * | 2006-09-19 | 2008-03-20 | General Electric Company | Heating apparatus with enhanced thermal uniformity and method for making thereof |
| CN202164385U (en) * | 2011-06-30 | 2012-03-14 | 白尔隽 | High-purity germanium polycrystalline preparing zone melting furnace |
| CN208440296U (en) * | 2018-02-12 | 2019-01-29 | 包头市宏博特科技有限责任公司 | The horizontal atmosphere synthetic furnace of low temperature |
| CN214612849U (en) * | 2021-04-20 | 2021-11-05 | 云南驰宏国际锗业有限公司 | Device for purifying germanium polycrystal |
-
2021
- 2021-12-29 CN CN202111639509.7A patent/CN114232092A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB908373A (en) * | 1954-05-18 | 1962-10-17 | Siemens Ag | Improvements in or relating to processes and apparatus for producing semi-conductor substances of very high purity |
| US20080066676A1 (en) * | 2006-09-19 | 2008-03-20 | General Electric Company | Heating apparatus with enhanced thermal uniformity and method for making thereof |
| CN202164385U (en) * | 2011-06-30 | 2012-03-14 | 白尔隽 | High-purity germanium polycrystalline preparing zone melting furnace |
| CN208440296U (en) * | 2018-02-12 | 2019-01-29 | 包头市宏博特科技有限责任公司 | The horizontal atmosphere synthetic furnace of low temperature |
| CN214612849U (en) * | 2021-04-20 | 2021-11-05 | 云南驰宏国际锗业有限公司 | Device for purifying germanium polycrystal |
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Application publication date: 20220325 |