CN114212984A - Repairing method for quartz finished product - Google Patents

Repairing method for quartz finished product Download PDF

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Publication number
CN114212984A
CN114212984A CN202111484272.XA CN202111484272A CN114212984A CN 114212984 A CN114212984 A CN 114212984A CN 202111484272 A CN202111484272 A CN 202111484272A CN 114212984 A CN114212984 A CN 114212984A
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Prior art keywords
quartz
finished product
polishing
hole
grinding
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CN202111484272.XA
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Chinese (zh)
Inventor
陈士斌
刘明伟
钱卫刚
陈士亮
徐军涛
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Lianyungang Pacific Runhui Optoelectronics Technology Co ltd
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Lianyungang Pacific Runhui Optoelectronics Technology Co ltd
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Priority to CN202111484272.XA priority Critical patent/CN114212984A/en
Publication of CN114212984A publication Critical patent/CN114212984A/en
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
    • B24B29/04Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces for rotationally symmetrical workpieces, e.g. ball-, cylinder- or cone-shaped workpieces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
    • B24B29/06Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces for elongated workpieces having uniform cross-section in one main direction
    • B24B29/08Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces for elongated workpieces having uniform cross-section in one main direction the cross-section being circular, e.g. tubes, wires, needles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B25/00Annealing glass products
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/007Other surface treatment of glass not in the form of fibres or filaments by thermal treatment
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0075Cleaning of glass

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Glass Compositions (AREA)

Abstract

The invention provides a repairing method for a quartz finished product, which relates to the field of quartz finished product repairing, and comprises the following steps: opening the wire: opening a gas line on the quartz finished product to form a hole-shaped structure; and (3) polishing of the filler: melting and filling the quartz rod into the hole-shaped structure by using oxyhydrogen flame, and uniformly heating the quartz rod to a red state at a fire compensation position by using the oxyhydrogen flame; annealing: at the annealing temperature, eliminating the residual stress at the gas line fire compensation position; grinding and polishing: and (5) grinding and polishing the fire compensation position of the quartz finished product. The gas line can be eliminated completely, the geometric dimension and the strength of the quartz finished product cannot be reduced, the quartz finished product can meet the use requirements of the fields of the quartz finished products such as semiconductors, photovoltaics and optical fibers, the rejection rate of the quartz finished product is effectively reduced, and the production cost of the quartz finished product is reduced.

Description

Repairing method for quartz finished product
Technical Field
Embodiments of the present disclosure relate generally to the field of quartz product repair, and more particularly, to a repair method for a finished quartz product.
Background
The tube, rod or plate ring structure produced by drawing by using the continuous melting method is mostly provided with gas lines on the finished product produced by drawing due to the self impurities of quartz sand and the limitation of the technical level of a continuous melting furnace.
The existence of the gas line can reduce the strength of the quartz finished product, so that the quartz finished product cannot be used in the fields of quartz products such as semiconductors, photovoltaics and optical fibers, the quartz finished product can only be degraded or scrapped, and the production cost can be greatly improved.
Disclosure of Invention
According to the embodiment of the disclosure, a repairing method for a quartz finished product is provided, so that waste is reduced, cost is reduced, and the utilization rate of a quartz material is improved.
In a first aspect of the present disclosure, a method for repairing a finished quartz product is provided. The repairing method for the quartz finished product comprises the following steps: opening the wire: opening a gas line on the quartz finished product to form a hole-shaped structure; and (3) polishing of the filler: melting and filling the quartz rod into the hole-shaped structure by using oxyhydrogen flame, and uniformly heating the position of the fire patch by using the oxyhydrogen flame to a red state; annealing: at the annealing temperature, eliminating the residual stress at the gas line fire compensation position; grinding and polishing: and (5) grinding and polishing the fire compensation position of the quartz finished product.
The above aspect and any possible implementation manner further provide an implementation manner that, in the wire opening step, an outer gas wire on the quartz finished product is opened by using oxyhydrogen flame to form a hole-shaped structure.
The above aspect and any possible implementation manner further provide an implementation manner, before the outer gas line on the quartz finished product is opened by using oxyhydrogen flame to form the hole-shaped structure, further comprising the following steps: acid washing: pickling the surface of the quartz finished product; preheating by fire throwing: and drying and preheating the surface of the quartz finished product.
The above aspect and any possible implementation further provide an implementation, where the fire throw preheating includes: drying and preheating the surface of a quartz finished product by an oxyhydrogen flame quartz blowtorch to ensure that the flow of hydrogen is 3-5 m3The flow rate of oxygen is 1.5-2.5 m3And h, drying and preheating the surface of the quartz finished product for 1-3 minutes.
The above aspect and any possible implementation manner further provide an implementation manner that the meat gas line and/or the inner gas line on the quartz finished product is opened by using oxyhydrogen flame to form a hole-shaped structure, or the diamond cutter is firstly used for digging to form the hole-shaped structure, and then the position of the hole-shaped structure is pickled.
In the above aspect and any possible implementation manner, an implementation manner is further provided, in the wire opening step, when a diamond cutter is used to dig the meat gas wire and/or the inner gas wire on the quartz finished product to form a hole-shaped structure, and then the position of the hole-shaped structure is pickled, in the filler polishing step, the flame is heated by oxyhydrogen flame at a temperature of 1600-1800 ℃.
In the above aspect and any possible implementation manner, there is further provided an implementation manner, in the step of polishing, a portion of the finished quartz product to be repaired is subjected to a cold polishing treatment using cerium oxide, or is subjected to a rough grinding treatment using a diamond grinding tool and then is subjected to a cold polishing treatment using cerium oxide.
The above aspect and any possible implementation further provide an implementation manner in which the rough finish grinding using the diamond grinding tool includes rough grinding using a diamond grinding tool with a mesh number of 80-120, and finish grinding using a diamond grinding tool with a mesh number of 400-800.
The above aspect and any possible implementation further provides an implementation, wherein the annealing includes: in the annealing process, the blow-in temperature is less than or equal to 800 ℃, the temperature rise time is 60-180 minutes, the annealing temperature is 1100-1200 ℃, the annealing time is 30-120 minutes, and the temperature reduction time is 3-6 hours.
The above aspect and any possible implementation manner further provide an implementation manner, and the method further includes a cleaning step after the grinding and polishing: wiping the quartz finished product by using degreasing fluid, removing the grinding powder and impurities, and then washing the quartz finished product clean by using pure water.
The quartz finished product can be a quartz tube with the outer diameter of 100-800 mm, a quartz rod with the diameter of 10-150 mm, a quartz plate ring with the outer diameter of 100-1000 mm and the like.
The repairing method for the quartz finished product provided by the embodiment of the disclosure can realize the following technical effects:
the method for repairing the quartz finished product can eliminate gas lines completely, and cannot reduce the geometric dimension and strength of the quartz finished product, so that the quartz finished product meets the use requirements of the fields of the quartz finished products such as semiconductors, photovoltaics and optical fibers, the rejection rate of the quartz finished product is effectively reduced, and the production cost of the quartz finished product is reduced.
It should be understood that the statements herein reciting aspects are not intended to limit the critical or essential features of the embodiments of the present disclosure, nor are they intended to limit the scope of the present disclosure. Other features of the present disclosure will become apparent from the following description.
Drawings
The above and other features, advantages and aspects of various embodiments of the present disclosure will become more apparent by referring to the following detailed description when taken in conjunction with the accompanying drawings. In the drawings, like or similar reference characters designate like or similar elements, and wherein:
fig. 1 is a schematic diagram illustrating a repairing method for a quartz product according to an embodiment of the present invention.
Fig. 2 is a schematic diagram illustrating another repairing method for a quartz product according to an embodiment of the present invention.
Detailed Description
To make the objects, technical solutions and advantages of the embodiments of the present disclosure more clear, the technical solutions of the embodiments of the present disclosure will be described clearly and completely with reference to the drawings in the embodiments of the present disclosure, and it is obvious that the described embodiments are some, but not all embodiments of the present disclosure. All other embodiments, which can be derived by a person skilled in the art from the embodiments disclosed herein without making any creative effort, shall fall within the protection scope of the present disclosure.
In addition, the term "and/or" herein is only one kind of association relationship describing an associated object, and means that there may be three kinds of relationships, for example, a and/or B, which may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.
In the following description of the technology, for purposes of explanation, numerous details are set forth in order to provide a thorough understanding of the disclosed embodiments. However, one or more embodiments may be practiced without these details. In other instances, well-known structures and devices may be shown in simplified form in order to simplify the drawing.
The fire patch herein is a fused quartz rod filled hole-like structure using an oxyhydrogen flame.
The fire supplementing position in this text is the position of the hole-shaped structure when the fire is supplemented.
It should be noted that, in the case of no conflict, the embodiments and features in the embodiments of the present disclosure may be combined with each other.
The method for repairing the quartz finished product can eliminate gas lines completely, and cannot reduce the geometric dimension and strength of the quartz finished product, so that the quartz finished product meets the use requirements of the fields of the quartz finished products such as semiconductors, photovoltaics and optical fibers, the rejection rate of the quartz finished product is effectively reduced, and the production cost of the quartz finished product is reduced.
A repairing method for a quartz finished product provided by an embodiment of the present invention is described below with reference to fig. 1.
As shown in fig. 1, a repairing method for a quartz product is provided according to an embodiment of the invention. The repairing method for the quartz finished product comprises the following steps:
s01: opening the wire: and opening the gas line on the quartz finished product to form a hole-shaped structure.
S02: and (3) polishing of the filler: the quartz rod was melted with an oxyhydrogen flame to fill the hole-like structure, and uniformly heated at the position of the flame patch with an oxyhydrogen flame to a reddish state.
S03: annealing: and at the annealing temperature, eliminating the residual stress at the gas line fire compensation position.
S04: grinding and polishing: and (5) grinding and polishing the fire compensation position of the quartz finished product.
The repairing method for the quartz finished product provided by the embodiment of the invention can be applied to quartz finished products such as a quartz tube with the outer diameter of 100-800 mm, a quartz rod with the diameter of 10-150 mm or a quartz plate ring with the outer diameter of 100-1000 mm. The oxyhydrogen flame can be provided by an oxyhydrogen flame welding torch or an oxyhydrogen flame quartz torch.
In some embodiments, the repairing method for the quartz finished product according to the embodiments of the present disclosure is adopted, and a gas line on the quartz finished product is opened to form a hole-shaped structure; melting the quartz rod at a high temperature by oxyhydrogen flame and filling the hole-shaped structure so that no bubble remains at the filling position and no material shortage at the edge; then uniformly heating the fire compensation position by using an oxyhydrogen flame quartz blowtorch, and annealing after the fire compensation position turns red to eliminate residual stress at the gas line fire compensation position; and then, grinding and polishing the fire compensation position of the quartz finished product by a grinding and polishing technology to eliminate the gas line of the quartz finished product.
As an example, the quartz rod for polishing the filler can be a quartz welding rod with the diameter of 3-6 mm.
In some embodiments, in step S01, if an outer gas line appears on the quartz product during the opening process, the quartz product can be opened by using an oxyhydrogen flame to form a hole-shaped structure. If the meat gas line and/or the inner gas line appear on the quartz finished product, the quartz finished product can be opened by oxyhydrogen flame to form a hole-shaped structure, or the inner gas line or the outer gas line can be dug by a diamond grinding tool and then acid-washed.
In the embodiments, if an outer gas line, an inner gas line and a meat gas line appear on the quartz finished product at the same time, the gas lines of the quartz finished product can be completely opened by oxyhydrogen flame to form a hole-shaped structure; the outer gas line can also be opened by an oxyhydrogen flame, and the inner gas line and/or the meat gas line are/is firstly dug by a diamond grinding tool and then pickled by a hydrogen fluoride solution. The mode that adopts flame to open the gas line for the mode that uses diamond grinding apparatus to open outer gas line, can reduce the impurity near quartzy finished product gas line, improve quartzy finished product quality to this kind of mode can save the cost that uses diamond grinding apparatus to open the gas line, and carry out the cost that washs to diamond grinding apparatus. The inner gas line and/or the meat gas line are dug by using a diamond grinding tool, and then are pickled by using a hydrogen fluoride solution, so that the time for polishing the filler can be shortened.
In some embodiments, before the outer gas line on the quartz finished product is opened by using oxyhydrogen flame to form the hole-shaped structure, the method further comprises the following steps:
acid washing: and (5) pickling the surface of the quartz finished product.
Preheating by fire throwing: and drying and preheating the surface of the quartz finished product.
In the embodiments, before the outer gas line is opened by using the oxyhydrogen flame, the quartz surface needs to be pickled, and the surface of the quartz finished product needs to be dried and preheated, so that the outer gas line can be opened by using the oxyhydrogen flame subsequently.
As an example, before the inner gas line and/or the outer gas line on the quartz finished product is opened by using oxyhydrogen flame to form a hole-shaped structure, the steps of pickling and fire-throwing preheating are further included.
In some embodiments, the acid wash comprises: soaking the quartz finished product in 8-12% hydrogen fluoride solution for 30-60 minutes, and then uniformly wiping the surface of the quartz finished product with absolute ethyl alcohol.
In the embodiments, the quartz product can be kept pure and has no watermark crystallization on the surface by soaking the quartz product in a hydrogen fluoride solution to clean the quartz product and then wiping the surface of the quartz product with absolute ethyl alcohol.
In some embodiments, the fire throw preheating comprises: drying and preheating the surface of a quartz finished product by an oxyhydrogen flame quartz blowtorch to ensure that the flow of hydrogen is 3-5 m3The flow rate of oxygen is 1.5-2.5 m3And h, drying and preheating the surface of the quartz finished product for 1-3 minutes.
In the embodiments, the flow rate and the preheating time of oxyhydrogen flame are controlled to achieve the effects of drying the inner surface and the outer surface of the pipe and no water vapor, and subsequent wire opening and filler polishing operations can be facilitated.
In some embodiments, in the wire opening step, when a diamond cutter is used to open the meat gas wire and/or the inner gas wire on the quartz finished product to form a hole-shaped structure, and then the position of the hole-shaped structure is pickled, in the filler polishing step, oxyhydrogen flame at the temperature of 1600-1800 ℃ is used to heat the fire compensation position.
In the embodiments, when the meat gas line and/or the inner gas line are opened by digging a hole with a diamond cutter, the soft fire at 1600-1800 ℃ is selected as the upper fire, so that the oxyhydrogen flame is prevented from blowing the tube to cause fire compensation.
In some embodiments, in the step of grinding and polishing, the repaired part of the quartz product is subjected to cold polishing treatment by using cerium oxide, or is subjected to rough grinding by using a diamond grinding tool, or is subjected to rough grinding by using the diamond grinding tool and then is subjected to cold polishing treatment by using cerium oxide.
In the embodiments, in the step of polishing, the repaired portion of the finished quartz product may be subjected to a cold polishing treatment by using cerium oxide, or may be subjected to a rough grinding treatment by using a diamond grinding tool and then subjected to a cold polishing treatment by using cerium oxide. Specifically, when a quartz finished product, particularly a quartz tube and a quartz plate ring, is polished, cerium oxide can be used for cold polishing in the process of repairing scars outside, and a diamond grinding tool can also be used for coarse and fine grinding; during the inner scar repairing process, cerium oxide can be used for cold polishing treatment, and a diamond grinding tool can be used for coarse and fine grinding. That is, the outer scar repairing process and the inner scar repairing process may be performed by the same process, or may be performed by different processes, for example, the outer scar repairing process is performed by a rough and fine grinding process using a diamond grinding tool, and the inner scar repairing process is performed by a process of cold polishing a tube material using cerium oxide. The quality requirement of the quartz finished product is high, a diamond grinding tool can be used for coarse and fine grinding, and then cerium oxide is used for cold polishing.
As an example, a part of quartz products have requirements on transparency, and the quartz products can be obtained by finely grinding the frosted surface of the quartz finished product and then performing fire polishing and annealing; the transparent surface can also be directly formed by using a cerium oxide cold-polished quartz finished product, so that the cost of fire polishing and annealing is saved.
In some embodiments, the rough finish grinding using the diamond grinding tool comprises the steps of firstly performing rough grinding using the diamond grinding tool with the mesh number of 80-120; and then, finely grinding by using a diamond grinding tool with the mesh number of 400-800.
In the embodiments, the rough finish grinding by using the diamond grinding tool comprises two parts of rough grinding and finish grinding, wherein the rough grinding is to roughly grind away the solder convex part by using the diamond grinding tool with the mesh number of 80-120 step by step, the finish grinding is to finish grind the fire scar by using the diamond grinding tool with the mesh number of 400-800, and the transverse and longitudinal arc surfaces are touched and visually observed by hands, so that the effects of fine and smooth grinding surface, no concave-convex feeling and no scratch at the grinding part are achieved, and the rough finish grinding is to firstly perform rough grinding and then perform finish grinding. Wherein, the diamond abrasive tool can be a diamond abrasive belt.
In some embodiments, step S03, annealing includes: in the annealing process, the blow-in temperature is less than or equal to 800 ℃, the temperature rise time is 60-180 minutes, the annealing temperature is 1100-1200 ℃, the annealing time is 30-120 minutes, and the temperature reduction time is 3-6 hours.
In the embodiments, a vacuum dehydroxylation furnace, a hood-type annealing furnace or a box-type annealing furnace can be used to anneal the quartz product after the filler polishing work is completed, so that the blow-in temperature is less than or equal to 800 ℃, the temperature is raised for 60-180 minutes, the temperature is kept constant and maintained for 30-120 minutes after the annealing temperature reaches 1100-1200 ℃, and then the temperature is lowered for 3-6 hours, so as to eliminate the residual stress of gas line fire compensation at high temperature.
In some embodiments, step S04, after the grinding and polishing, further includes:
s05, cleaning: wiping the quartz finished product by using degreasing fluid, removing the grinding powder and impurities, and then washing the quartz finished product clean by using pure water. Therefore, the repaired quartz product can be conveniently put in storage again and then be subsequently sold and used.
Referring to fig. 2, a method for repairing a quartz product according to the present disclosure will be described below by taking a quartz tube as an example.
Firstly, the mother pipe is taken from a warehouse for inspection, the mother pipe with satisfactory production quality is taken out of the warehouse, and the mother pipe with unsatisfactory production quality enters a repair stage.
If an external gas line exists in the main pipe entering the repair stage, the pipe needs to be cleaned, the pipe can be soaked in 8-12% hydrogen fluoride solution for 30-60 minutes, and then the surface of the large pipe is uniformly wiped by absolute ethyl alcohol, so that the inner surface and the outer surface of the pipe are ensured to be free of water mark crystallization. After cleaning, the main pipe is preheated by fire throwing, and an oxyhydrogen flame quartz blowtorch is turned on to enable the flow of hydrogen to be 3-5 m3The flow rate of oxygen is 1.5-2.5 m3And h, drying and preheating the inner surface and the outer surface of the pipe for 1-3 minutes without water vapor, and uniformly and fully combusting the outer gas line position by using an oxyhydrogen flame welding gun to completely open the gas line.
If the meat gas line and/or the inner gas line exist in the main pipe, the meat gas line and the inner gas line need to be opened, and the opening mode can be an oxyhydrogen flame opening mode or a mode of firstly digging a hole and then pickling. Wherein, the mode of digging holes and pickling firstly needs to use soft fire at 1600-1800 ℃ when firing, so as to prevent oxyhydrogen flame from blowing the pipes to cause fire penetration; the outer gas line, the inner gas line and the meat gas line have no requirement on the cleaning sequence and can be selected automatically according to the operation habit.
After the wire opening is finished, filling, using an oxyhydrogen flame fused quartz rod to fill the excavated or burnt hole-shaped structure, so that no bubble remains at the filling position and no material shortage exists at the edge, and then using an oxyhydrogen flame quartz blowtorch to uniformly fire and remove stress at the fire compensation position.
And then, annealing, namely annealing the quartz finished product which is subjected to the filler polishing work by using a vacuum dehydroxylation furnace or a hood-type annealing furnace or a box-type annealing furnace, so that the blow-in temperature of the quartz finished product is less than or equal to 800 ℃, heating for 60-180 minutes, keeping the constant temperature and maintaining the temperature for 30-120 minutes after the annealing temperature reaches 1100-1200 ℃, and then cooling for 3-6 hours to eliminate the residual stress of gas line fire compensation at high temperature.
And (4) after the annealing is finished, checking the pipe to see whether the inward convex or outward convex phenomenon occurs, and polishing. The method has the advantages that the transparency of the quartz tube is required, the frosted surface of the finished quartz product can be roughly and finely ground, then fire polishing and annealing are carried out, the finished cerium oxide cold polished quartz product can be used for directly forming the transparent surface, the cost of fire polishing and annealing is saved, the requirement on the quality of the quartz tube is high, and the finished quartz product can be firstly used and then the finished cerium oxide cold polished quartz product can be used. The requirement on the transparency of the pipe is not high, the grinding and polishing can be carried out by adopting a rough and accurate grinding process of a diamond grinding tool in the outer scar repairing process and the inner scar repairing process, and the grinding and polishing can also be carried out by adopting two different processes of rough and accurate grinding of a cerium oxide cold-polished pipe and rough and accurate grinding of the diamond grinding tool, for example, the rough and accurate grinding process of the diamond grinding tool is adopted for the outer scar repairing, and the process of the cerium oxide cold-polished pipe is adopted for the inner scar repairing to treat the quartz pipe. Then, cleaning the pipe, wiping the pipe with degreasing fluid, removing the polishing powder and impurities, and washing the quartz finished product clean with pure water.
And checking whether the quality of the quartz tube meets the requirement again, packaging the quartz tube with the qualified production quality and warehousing the quartz tube, and re-working the quartz tube with the unqualified production quality to enter a repairing stage again or scrap the quartz tube.
According to the repairing method of the quartz finished product, provided by the embodiment of the disclosure, through the mode that the oxyhydrogen flame opens the outer gas line and/or the inner gas line and/or the meat gas line, compared with the mode that the gas line is opened by using a diamond grinding tool completely, impurities near the gas line of the quartz finished product can be reduced, the quality of the quartz finished product is improved, and the mode can save the cost required by using the diamond grinding tool to open the gas line and the cost for cleaning the diamond grinding tool. The gas line can be eliminated completely by adopting the repairing mode, the geometric dimension and the strength of the quartz finished product can not be reduced, the quartz finished product can meet the use requirements of the fields of the quartz finished products such as semiconductors, photovoltaics and optical fibers, the rejection rate of the quartz finished product is effectively reduced, and the production cost of the quartz finished product is reduced.
In the description of the present application, the description of the terms "one embodiment," "some embodiments," etc. means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The terms "comprising" and "having," and any variations thereof, in the description and claims of embodiments of the present disclosure, are intended to cover non-exclusive inclusions.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims (10)

1. A method for repairing a finished quartz product, comprising:
opening the wire: opening a gas line on the quartz finished product to form a hole-shaped structure;
and (3) polishing of the filler: melting and filling the quartz rod into the hole-shaped structure by using oxyhydrogen flame, and uniformly heating the quartz rod to a red state at a fire compensation position by using the oxyhydrogen flame;
annealing: at the annealing temperature, eliminating the residual stress at the gas line fire compensation position;
grinding and polishing: and (5) grinding and polishing the fire compensation position of the quartz finished product.
2. The repair method according to claim 1, wherein in the opening step, an outer gas line on the quartz product is opened by using an oxyhydrogen flame to form a hole-like structure.
3. The repair method according to claim 2, further comprising the steps of, before the outer gas line on the quartz product is opened by using an oxyhydrogen flame to form the hole-like structure:
acid washing: pickling the surface of the quartz finished product;
preheating by fire throwing: and drying and preheating the surface of the quartz finished product.
4. The repair method of claim 3, wherein the fire-throwing preheating comprises:
drying and preheating the surface of a quartz finished product by an oxyhydrogen flame quartz blowtorch to ensure that the flow of hydrogen is 3-5 m3The flow rate of oxygen is 1.5-2.5 m3And h, drying and preheating the surface of the quartz finished product for 1-3 minutes.
5. The repair method according to claim 1, wherein in the wire-opening step, the meat gas wire and/or the inner gas wire on the quartz product is opened by using oxyhydrogen flame to form a hole-like structure, or the hole-like structure is formed by first digging the hole-like structure by using a diamond cutter and then acid-washing the position of the hole-like structure.
6. The repairing method according to claim 5, wherein in the wire-opening step, the gas wire and/or the inner gas wire on the quartz product is/are cut by a diamond cutter to form a hole-shaped structure, and then the position of the hole-shaped structure is pickled, and in the filler polishing step, the position of the fire-repaired is heated by oxyhydrogen flame at a temperature of 1600 to 1800 ℃.
7. The repairing method according to any one of claims 1 to 6, wherein in the polishing step, the portion of the quartz product to be repaired is subjected to cold polishing treatment using cerium oxide, or rough lapping is performed using a diamond grinder and then cold polishing treatment using cerium oxide is performed.
8. The repair method according to claim 7, wherein the rough grinding using the diamond grinding tool comprises rough grinding using a diamond grinding tool having a mesh number of 80 to 120, and finish grinding using a diamond grinding tool having a mesh number of 400 to 800.
9. The repair method according to any one of claims 1 to 6, wherein the annealing comprises:
in the annealing process, the blow-in temperature is less than or equal to 800 ℃, the temperature rise time is 60-180 minutes, the annealing temperature is 1100-1200 ℃, the annealing time is 30-120 minutes, and the temperature reduction time is 3-6 hours.
10. The repair method of claim 1, wherein the step of grinding and polishing is further followed by:
cleaning: wiping the quartz finished product by using degreasing fluid, removing the grinding powder and impurities, and then washing the quartz finished product clean by using pure water.
CN202111484272.XA 2021-12-07 2021-12-07 Repairing method for quartz finished product Pending CN114212984A (en)

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