CN114200569A - Broadband response soft X-ray polarizer and preparation method thereof - Google Patents
Broadband response soft X-ray polarizer and preparation method thereof Download PDFInfo
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- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
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- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3033—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state in the form of a thin sheet or foil, e.g. Polaroid
- G02B5/3041—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state in the form of a thin sheet or foil, e.g. Polaroid comprising multiple thin layers, e.g. multilayer stacks
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Abstract
The invention discloses a broadband response soft X-ray polarizer and a preparation method thereof, relating to the technical field of precision optical systems, wherein the soft X-ray polarizer is a polarizer with a non-periodic multilayer film structure; the soft X-ray polarizer includes a substrate and a film layer sequence disposed on the substrate; the film layer sequence comprises a plurality of film layers which are arranged in a non-periodic manner, namely a first film layer and a second film layer, wherein the first film layer and the second film layer are alternately arranged; the thickness of each first film layer and the thickness of each second film layer are determined by derivation through an Igor numerical algorithm. The invention is used for realizing wide-spectrum soft X-ray wave band polarization and polarization detection.
Description
Technical Field
The invention relates to the technical field of precise optical systems, in particular to a broadband response soft X-ray polarizer and a preparation method thereof.
Background
Extreme ultraviolet band and soft X ray band rely on the polarization property of light source can carry out a large amount of basic scientific research, such as Faraday optical rotation effect, magneto-optical Kerr effect, magnetic domain imaging and the like. Especially, in the soft X-ray wave band, 3d absorption edges of main magnetic metal elements and rare earth elements exist, and B, C, O and N1 s absorption edges contained in the magnetic material exist, so that the physical properties of various magnetic materials can be obtained through polarization measurement, and the method has important significance for ultrashort pulse laser and large-capacity magneto-optical storage devices.
Common polarization experiments, including imaging systems consisting of a circular polarizer and a high-resolution soft X-ray scanning microscope, which are based on the magnetic circular dichroism effect, can perform magnetic domain studies for realizing the spatial resolution of tens of nanometers on a magnetic film. In addition, the dichroism of the magnetic circle and the Faraday effect can be used for quantitative measurement of circularly polarized light; for example, the biological tissue is used for carrying out dichroism analysis on the absorption characteristics of different polarized light, so that the measurement of the biological macromolecular structure can be realized. The soft X-ray resonance magnetic scattering can be used for sensor analysis of magneto-optical materials and diamagnetic materials, and the X-ray absorption fine structure spectrum can be expanded by depending on single spin and multiple scattering separation magnetism, so that the structure of the nano material can be analyzed.
The degree of polarization and the device polarization rate of the light source need to be accurately calibrated in a surrounding polarization experiment. In addition, the effect of the polarization characteristics of the light source also needs to be considered in calibrating the polarization at non-normal and non-grazing incidence optics. Therefore, a precise polarizer for soft X-ray development is of great significance. The multilayer film polaroid can meet the polarization degree requirement of a main soft X-ray experiment, and meanwhile, the multilayer film circular polaroid and the phase shifter can replace an expensive elliptical polarization oscillator, so that the conversion from linearly polarized light to circularly polarized light and the mutual conversion between left-handed circularly polarized light and right-handed circularly polarized light are realized, and the application range of linearly polarized light synchronous radiation is greatly expanded.
The periodic multilayer film based on Bragg reflection can realize high reflectivity and high polarization degree, but has narrow bandwidth, and can meet the requirements of diffraction maximization, collimation and focusing under different energies only by continuously changing the angle and the position of a target light source with wide energy spectrum. To improve such polarizers, Kortright et al propose a laterally graded multilayer film instead of a single periodic film, which can achieve a range of polarization modulation by varying the different positions of the light spots. However, this solution requires precise control of the thickness of the multilayer film and requires a high process. In addition, the transverse gradient multilayer film also needs to change the mechanical position continuously in use, and must rely on a precise mechanical structure.
Disclosure of Invention
The invention aims to provide a broadband response soft X-ray polarizer and a preparation method thereof, so as to realize polarization and analysis of a wide-spectrum soft X-ray waveband.
In order to achieve the purpose, the invention provides the following scheme:
a broadband response soft X-ray polarizer that is a non-periodic multilayer film structured polarizer; the soft X-ray polarizer includes a substrate and a film layer sequence disposed on the substrate; the film layer sequence comprises a plurality of film layers which are arranged in a non-periodic manner, namely a first film layer and a second film layer, wherein the first film layer and the second film layer are alternately arranged; the thickness of each first film layer and the thickness of each second film layer are determined by derivation through an Igor numerical algorithm.
Optionally, the material of the film layer sequence is La/B4C; wherein the first film layer is a La absorption layer, and the second film layer is B4And C, layer.
Optionally, the central incident angle of the soft X-ray polarizer is a brewster angle corresponding to the film layer sequence.
Optionally, the application wavelength bands of the soft X-ray polarizer are 6.6nm-8.6nm and 6.6nm-9.6 nm.
Optionally, a Ti layer is further disposed between the substrate and the film layer sequence.
A method of making a broadband responsive soft X-ray polarizer, comprising:
determining the thickness of each film layer in the film layer sequence through an Igor numerical algorithm and a Levenberg-Marquardt algorithm, and further determining the distribution interval of the film layer sequence;
and depositing the film layer sequence on a substrate according to the distribution interval of the film layer sequence to further obtain the soft X-ray polarizer.
Optionally, the thickness of each membrane layer in the membrane layer sequence determined by the Igor numerical algorithm and the Levenberg-Marquardt algorithm specifically includes:
determining the initial value of the thickness of each film layer by adopting an Igor numerical algorithm;
the final value of each film thickness was determined using the Levenberg-Marquardt algorithm.
Optionally, the thickness of each membrane layer in the membrane layer sequence determined by the Igor numerical algorithm and the Levenberg-Marquardt algorithm specifically includes:
according to
Determining the initial value of the thickness of each film layer;
wherein z is the position of each film interface; z is a radical of2j+2Is the position of the 2j +2 film interface, j represents the number of film layers, Γ is the ratio of the periodic thickness of the first film, λ is the incident soft X-ray wavelength, q is the scattering transfer vector, q' is the derivative of q, κ1Is the real part of the incident wave vector; the first film layer is a La absorption layer;
according to
Calculating a flat response value;
adjusting the thickness of each film layer based on the flat response value, and further determining the final value of the thickness of each film layer;
wherein R iss0Calculated reflectance for s-polarized light, RsIs the target reflectivity of s-polarized light, and n is the number of discrete wavelengths selected in the wave band; MF is a flat response value; lambda [ alpha ]iThe ith soft X-ray wavelength.
Optionally, the method further includes:
calibrating the thickness of the prepared soft X-ray polarizer by utilizing grazing incidence X-ray reflection GIXR, and drawing a speed curve; the velocity profile is used for the preparation of the soft X-ray polarizer;
characterizing the interface width of the prepared soft X-ray polarizer by using GIXRR, and performing fitting calculation on the interface width by using a Debye-Waller factor to obtain a calculation curve;
and combining the rate curve and the calculation curve to optimize the deposition rate of the film layer sequence and the thickness of each film layer.
Optionally, in a grazing incidence X-ray reflection test, the X-ray light source is a Cu-K α line, the wavelength is 0.154nm, and the test mode is a θ -2 θ linkage scanning mode.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
compared with the prior art, the novel soft X-ray broadband polarizer provided by the invention directly meets the application requirement of a wide-spectrum light source, does not need to provide rotation and offset by means of a mechanical structure, and realizes simplification and high efficiency of soft X-ray experimental equipment.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a schematic diagram of the construction of a broadband responsive soft X-ray polarizer of the present invention;
FIG. 2 is a flow chart of a method for making a broadband responsive soft X-ray polarizer in accordance with the present invention;
FIG. 3 is a graphical representation of the reflectivity and polarizability of the output s-ray wavelength spectrum of a broadband response soft X-ray polarizer of the present invention;
fig. 4 is a schematic of the reflectivity and polarizability of the output angle spectrum of a broadband responsive soft X-ray polarizer of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a broadband response soft X-ray polarizer and a preparation method thereof, which are applied to polarization and polarization detection of soft X-ray wave bands.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Example one
The broadband response soft X-ray polarizer described in this embodiment is a polarizer with an aperiodic multilayer film structure; as shown in fig. 1, the soft X-ray polarizer comprises a substrate and a film layer sequence disposed on said substrate; the film layer sequence comprises a plurality of film layers which are arranged in a non-periodic manner, namely a first film layer and a second film layer, wherein the first film layer and the second film layer are alternately arranged; the thickness of each first film layer and the thickness of each second film layer are determined by derivation through an Igor numerical algorithm.
As a preferred embodiment, La/B is selected as the film material in this embodiment4C material combination, namely the material of the film layer sequence is La/B4C; wherein the first film layer is a La absorption layer, and the second film layer is B4And C, layer.
As a preferred embodiment, the soft X-ray polarizer described in this example is applied in the wavelength bands of 6.6nm to 8.6nm (187.9eV to 144.2eV) and 6.6nm to 9.6nm (187.9eV to 129.2 eV).
As a preferred embodiment, the central incident angle of the soft X-ray polarizer in this embodiment is the brewster angle corresponding to the film layer sequence.
As a preferred embodiment, a Ti layer is further disposed between the substrate and the film layer sequence.
The distribution of each film layer in the film layer sequence is determined by adopting the following method:
(1) the membrane layer sequence is deduced by adopting an Igor numerical algorithm, and the iterative formula is shown as (1);
wherein z is the position of each film interface, Γ is the ratio of the periodic thickness of the absorbing layer La, λ is the wavelength of incident soft X-rays, q is the scattering transfer vector, κ1Is the real part of the incident wave vector.
Setting the reflectivity of the target interval as a constant can generate a group of film sequences satisfying the broadband response.
Optimizing by adopting a Levenberg-Marquardt algorithm, wherein an optimization function is shown as (2);
wherein R iss0Calculated reflectance for s-polarized light, RsFor s-polarized light target reflectivity, n is the number of discrete wavelengths selected in the band.
Example two
As shown in fig. 2, this embodiment provides a method for preparing a broadband response soft X-ray polarizer described in the first embodiment, including:
step 100: and determining the thickness of each film layer in the film layer sequence through an Igor numerical algorithm and a Levenberg-Marquardt algorithm, and further determining the distribution interval of the film layer sequence.
Step 200: and depositing the film layer sequence on a substrate according to the distribution interval of the film layer sequence to further obtain the soft X-ray polarizer.
Wherein, step 100 specifically comprises:
and determining the initial value of the thickness of each film layer by adopting an Igor numerical algorithm.
The final value of each film thickness was determined using the Levenberg-Marquardt algorithm.
Further comprising:
according to
Determining the initial value of the thickness of each film layer;
wherein z is the position of each film interface; z is a radical of2j+2Is the position of the 2j +2 film interface, j represents the number of film layers, Γ is the ratio of the periodic thickness of the first film, λ is the incident soft X-ray wavelength, q is the scattering transfer vector, q' is the derivative of q, κ1Is the real part of the incident wave vector; the first film layer is a La absorption layer;
according to
Calculating a flat response value;
adjusting the thickness of each film layer based on the flat response value, and further determining the final value of the thickness of each film layer;
wherein R iss0Calculated reflectance for s-polarized light, RsIs the target reflectivity of s-polarized light, and n is the number of discrete wavelengths selected in the wave band; MF is a flat response value; lambda [ alpha ]iThe ith soft X-ray wavelength.
As a preferred embodiment, the preparation method described in this embodiment further includes:
the sample (i.e. the prepared soft X-ray polarizer) was thickness-calibrated using grazing incidence X-ray reflectance (GIXRR) and rate-plotted for aperiodic sample preparation.
And characterizing the interface width of the sample by using GIXRR, and performing fitting calculation on the interface width by using a Debye-Waller factor to obtain a calculation curve.
The deposition rate and the thickness of each film layer of the film layer sequence were optimized by testing the aperiodic samples with GIXRR, combining the rate curve with the calculated curve, and the effect of the finally prepared samples is shown in fig. 3 and 4.
The X-ray source in the X-ray reflection test is a Cu-Kalpha line, the wavelength is 0.154nm, and the test mode is a theta-2 theta linkage scanning mode.
As a preferred embodiment, the preparation method described in this embodiment further includes:
before preparation, the background vacuum of the chamber needs to be lower than 5.0 multiplied by 10-5Pa to avoid oxidation of La.
During preparation, a layer of Ti is plated on the substrate as a priming coat to improve the adhesive force of the film and prevent La from reacting with impurities of the substrate.
The invention is illustrated by the following specific application.
Application one
The method of the invention is used for designing the wide-energy-spectrum soft X-ray polarizer working at 6.6nm-8.6nm aiming at the application of the soft X-ray polarizer, and the material is La/B4C。
The design scheme of the non-periodic multilayer film is adopted, and the film thickness interval is 1.8nm-3.8 nm.
Preparing a non-periodic multilayer film sample, wherein the film thickness is distributed between 1.8nm and 3.8nm, calibrating the thickness of the sample by using GIXRR, and performing linear fitting, wherein the film thickness error is less than 1%.
The average reflectance of s-polarized light was calculated to be 7.8% ± 0.2%, and the polarizability P: 99.9 +/-0.04.
The average reflectivity of s-polarized light is measured to be 3.8% + -0.5%, and the polarizability P: 99.9 +/-0.04.
The average reflectance of s-polarized light was found to be 3.3% ± 0.84% in the range of 38.7 ° to 54.6 ° of the s-polarized light angle spectrum.
Application two
The method of the invention is used for designing the wide-energy-spectrum soft X-ray polarizer working at 6.6nm-9.6nm aiming at the application of the soft X-ray polarizer, and the material is La/B4C。
The design scheme of the non-periodic multilayer film is adopted, and the film thickness interval is 1.2nm-5.7 nm.
Preparing a non-periodic multilayer film sample, wherein the film thickness is distributed between 1.2nm and 5.7nm, calibrating the thickness of the sample by using GIXRR, and performing linear fitting, wherein the film thickness error is less than 1%;
calculating the average reflectivity of s-polarized light to be 6.9 +/-0.2% and the polarizability to be 99.9 +/-0.09;
actually measuring the average reflectivity of s-polarized light to be 3.4 +/-0.5 percent and the polarizability to be 99.8 +/-0.17;
the measured s-polarized light angle spectrum is 33.5 degrees to 54.5 degrees to obtain a relatively flat s-polarized light reflectivity curve, and the average reflectivity is 2.3% +/-0.72%.
The invention relates to a broadband polarizer for soft X-rays, which adopts an aperiodic multilayer film structure and adopts La/B4C is used as a basic membrane system, the initial value of a wide-spectrum membrane layer is calculated by an Igor numerical algorithm for membrane layer distribution, and then the initial value is optimized and realized by a Levenberg-Marquardt algorithm, wherein an optimization function is set as a flat response function in a wide-spectrum region. The central angle of incidence is set at the brewster angle to satisfy high polarizability. According to the test results of the wide spectrum design of 6.6nm-8.6nm and the wide spectrum design of 6.6nm-9.6nm, the average polarizability is higher than 99. Compared with the prior art, the novel soft X-ray broadband polarizer provided by the invention directly meets the application requirement of a wide-spectrum light source, does not need to provide rotation and offset by means of a mechanical structure, and realizes simplification and high efficiency of soft X-ray experimental equipment.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (10)
1. A broadband response soft X-ray polarizer, wherein the soft X-ray polarizer is a polarizer of an aperiodic multilayer film structure; the soft X-ray polarizer includes a substrate and a film layer sequence disposed on the substrate; the film layer sequence comprises a plurality of film layers which are arranged in a non-periodic manner, namely a first film layer and a second film layer, wherein the first film layer and the second film layer are alternately arranged; the thickness of each first film layer and the thickness of each second film layer are determined by derivation through an Igor numerical algorithm.
2. A broadband response soft X-ray polarizer according to claim 1 wherein the film layer sequence is La/B4C; wherein the first film layer is a La absorption layer, and the second film layer is B4And C, layer.
3. A broadband-responsive soft X-ray polarizer as recited in claim 1, wherein the soft X-ray polarizer has a center angle of incidence that is brewster's angle for the film-layer sequence.
4. A broadband response soft X-ray polarizer according to claim 1, wherein the application wavelength bands of the soft X-ray polarizer are 6.6nm-8.6nm and 6.6nm-9.6 nm.
5. A broadband response soft X-ray polarizer according to claim 1 wherein a Ti layer is further disposed between the substrate and the film layer sequence.
6. A method of making a broadband-responsive soft X-ray polarizer according to any of claims 1 to 5, comprising:
determining the thickness of each film layer in the film layer sequence through an Igor numerical algorithm and a Levenberg-Marquardt algorithm, and further determining the distribution interval of the film layer sequence;
and depositing the film layer sequence on a substrate according to the distribution interval of the film layer sequence to further obtain the soft X-ray polarizer.
7. The method for preparing a broadband response soft X-ray polarizer according to claim 6, wherein the thickness of each film layer in the film layer sequence determined by the Igor numerical algorithm and the Levenberg-Marquardt algorithm specifically comprises:
determining the initial value of the thickness of each film layer by adopting an Igor numerical algorithm;
the final value of each film thickness was determined using the Levenberg-Marquardt algorithm.
8. The method for preparing a broadband response soft X-ray polarizer according to claim 7, wherein the thickness of each film layer in the film layer sequence determined by Igor numerical algorithm and Levenberg-Marquardt algorithm specifically comprises:
according to
Determining the initial value of the thickness of each film layer;
wherein z is the position of each film interface; z is a radical of2j+2Is the position of the 2j +2 film interface, j represents the number of film layers, Γ is the ratio of the periodic thickness of the first film, λ is the incident soft X-ray wavelength, q is the scattering transfer vector, q' is the derivative of q, κ1Is the real part of the incident wave vector; the first film layer is a La absorption layer;
according to
Calculating a flat response value;
adjusting the thickness of each film layer based on the flat response value, and further determining the final value of the thickness of each film layer;
wherein R iss0Calculated reflectance for s-polarized light, RsIs the target reflectivity of s-polarized light, and n is the number of discrete wavelengths selected in the wave band; MF is a flat response value; lambda [ alpha ]iThe ith soft X-ray wavelength.
9. The method of claim 7, further comprising:
calibrating the thickness of the prepared soft X-ray polarizer by utilizing grazing incidence X-ray reflection GIXR, and drawing a speed curve; the velocity profile is used for the preparation of the soft X-ray polarizer;
characterizing the interface width of the prepared soft X-ray polarizer by using GIXRR, and performing fitting calculation on the interface width by using a Debye-Waller factor to obtain a calculation curve;
and combining the rate curve and the calculation curve to optimize the deposition rate of the film layer sequence and the thickness of each film layer.
10. The method of claim 9, wherein in grazing incidence X-ray reflectance testing, the X-ray source is Cu-ka line, the wavelength is 0.154nm, and the test mode is a theta-2 theta linked scan mode.
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Application publication date: 20220318 |