CN114193224A - Ultrahigh-precision linear motor machine tool - Google Patents
Ultrahigh-precision linear motor machine tool Download PDFInfo
- Publication number
- CN114193224A CN114193224A CN202111628895.XA CN202111628895A CN114193224A CN 114193224 A CN114193224 A CN 114193224A CN 202111628895 A CN202111628895 A CN 202111628895A CN 114193224 A CN114193224 A CN 114193224A
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- Prior art keywords
- linear motor
- working
- machine tool
- working plate
- frame
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- 230000007246 mechanism Effects 0.000 claims abstract description 23
- 230000001681 protective effect Effects 0.000 claims abstract description 16
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- 239000004065 semiconductor Substances 0.000 abstract description 15
- 239000010438 granite Substances 0.000 abstract description 6
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- 239000011707 mineral Substances 0.000 abstract description 6
- 238000010521 absorption reaction Methods 0.000 abstract description 4
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- 239000000941 radioactive substance Substances 0.000 abstract description 3
- 238000003754 machining Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 3
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- 238000005516 engineering process Methods 0.000 description 2
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- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
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- 238000006243 chemical reaction Methods 0.000 description 1
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- 229920006337 unsaturated polyester resin Polymers 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/08—Protective coverings for parts of machine tools; Splash guards
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/001—Arrangements compensating weight or flexion on parts of the machine
- B23Q11/0017—Arrangements compensating weight or flexion on parts of the machine compensating the weight of vertically moving elements, e.g. by balancing liftable machine parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/20—Automatic control or regulation of feed movement, cutting velocity or position of tool or work before or after the tool acts upon the workpiece
- B23Q15/22—Control or regulation of position of tool or workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/28—Electric drives
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
Abstract
The invention belongs to the technical field of semiconductor processing, and particularly relates to an ultrahigh-precision linear motor machine tool which comprises a working plate, wherein a soft pad is arranged at the bottom of the working plate, a protective shell is arranged on the upper surface of the working plate, an opening and closing door is arranged on the surface of the protective shell, a control panel is arranged on the surface of the opening and closing door, a longitudinal moving mechanism is arranged on the upper surface of the working plate, and a support frame is arranged on one side of the longitudinal moving mechanism. The protective housing can protect the work piece of inside processing, can open or close the door that opens and shuts through grabbing the handle, and the convenience is avoided receiving external factor influence in the course of working to semiconductor workpiece's processing, and can look over the course of working through the observation window, and the device main part all adopts the mineral foundry goods to make, and the mineral foundry goods is also known as artificial granite, and artificial granite is energy-concerving and environment-protective, does not contain radioactive substance, has characteristics such as the compact structure wearability is strong, resistance to compression, anti tear strength height, the water absorption rate is low.
Description
Technical Field
The invention belongs to the technical field of semiconductor processing, and particularly relates to an ultrahigh-precision linear motor machine tool.
Background
Semiconductor technology is a technology for manufacturing devices and integrated circuits using semiconductors as materials, and elements in the periodic table can be roughly classified into three categories, i.e., conductors, semiconductors, and insulators, according to electrical conductivity. The most common semiconductor is silicon, although the semiconductor can also be a compound of two elements, such as gallium arsenide, but compound semiconductors are mostly used in opto-electronic applications.
Most of the existing semiconductor processing machines cannot well isolate external influence when processing, so that adverse influence of external factors on semiconductor processing work is avoided, the quality of finished products is easily reduced, and the ultrahigh-precision linear motor machine tool is provided for solving the problems.
Disclosure of Invention
To solve the problems set forth in the background art described above. The invention provides an ultrahigh-precision linear motor machine tool, which solves the problems that most semiconductor processing machines cannot well isolate external influence during processing, and the quality of finished products is easily reduced due to the adverse influence of external factors on semiconductor processing work.
In order to achieve the purpose, the invention provides the following technical scheme: ultrahigh precision linear electric motor lathe, including the working plate, the bottom of working plate is provided with places the cushion, the upper surface of working plate is provided with the protective housing, the surface of protective housing is provided with the door that opens and shuts, the surface of door that opens and shuts is provided with control panel, the upper surface of working plate is provided with longitudinal movement mechanism, one side of longitudinal movement mechanism is provided with the support frame, the surface of support frame is provided with lateral shifting mechanism, lateral shifting mechanism's surface is provided with three slider guide rails.
Preferably, the upper surface be provided with the work piece, the surface of door that opens and shuts is provided with the handle, one side of handle is provided with the observation window.
Preferably, the longitudinal movement mechanism comprises a first slide rail, a first working frame is connected to the inside of the first slide rail in a sliding manner, a second linear motor is arranged below the first working frame, and the output end of the second linear motor is connected with the first working frame.
Preferably, the transverse moving mechanism comprises a second slide rail, a second working frame is connected to the inside of the second slide rail in a sliding mode, a third linear motor is arranged on one side of the second working frame, and the output end of the third linear motor is connected with the second working frame.
Preferably, the surface of the three sliding block guide rails is provided with a lifting frame, one side of the three sliding block guide rails is provided with a first linear motor, and the output end of the first linear motor is connected with the lifting frame.
Preferably, the upper surface of crane is provided with the counter weight jar, the inside of crane is provided with nodular cast iron.
Preferably, the upper surface of first work frame is provided with blue light tool setting appearance, one side of first work frame is provided with full-automatic servo tool magazine.
Preferably, the length of the working plate is 2050mm, and the width of the working plate is 1700 mm.
Preferably, the length, the width and the working plate of protective housing equal, the appearance of placing the cushion is circular, the quantity of placing the cushion is four, control panel and the inside mechanism electric connection that sets up of protective housing.
Compared with the prior art, the invention has the beneficial effects that: the protective housing can protect the work piece of inside processing, can open or close the door that opens and shuts through grabbing the handle, and the convenience is avoided receiving external factor influence in the course of working to semiconductor workpiece's processing, and can look over the course of working through the observation window, and the device main part all adopts the mineral foundry goods to make, and the mineral foundry goods is also known as artificial granite, and artificial granite is energy-concerving and environment-protective, does not contain radioactive substance, has characteristics such as the compact structure wearability is strong, resistance to compression, anti tear strength height, the water absorption rate is low.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a perspective view of the present invention;
FIG. 2 is a first perspective cross-sectional view of the present invention;
fig. 3 is a second perspective cross-sectional view of the present invention.
In the figure: 1, working plate; 2, an observation window; 3, a handle; 4, opening and closing the door; 5, a protective shell; 6, a working block; 7 a counterweight cylinder; 8, nodular cast iron; 9 a first linear motor; 10, full-automatic servo tool magazine; 11, a blue light tool setting gauge; 12 a first slide rail; 13 a second linear motor; 14, a lifting frame; 15 a first work frame; 16 a second slide rail; 17 a third linear motor; 18 a second work frame; 19 three-slide guide rail.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides the following technical solutions: the ultrahigh-precision linear motor machine tool comprises a working plate 1, a placing cushion is arranged at the bottom of the working plate 1, a protective shell 5 is arranged on the upper surface of the working plate 1, an opening and closing door 4 is arranged on the surface of the protective shell 5, a control panel is arranged on the surface of the opening and closing door 4, a longitudinal moving mechanism is arranged on the upper surface of the working plate 1, a support frame is arranged on one side of the longitudinal moving mechanism, a transverse moving mechanism is arranged on the surface of the support frame, a three-slider guide rail 19 is arranged on the surface of the transverse moving mechanism, the control panel is electrically connected with an internal mechanism, the linear motor is a transmission device which directly converts electric energy into linear motion mechanical energy and does not need any intermediate conversion mechanism, and the linear motor can be regarded as a rotating motor which is cut open along the radial direction and is developed into a plane.
In an aspect of this embodiment, protective housing 5 can protect the work piece of inside processing, can open or close opening and shutting door 4 through grabbing handle 3, and the convenience is to the processing of semiconductor work piece, avoids receiving external factor influence in the course of working, and can look over the course of working through observation window 2, and the device main part all adopts the mineral casting to make, and the mineral casting is also known as artificial granite, and artificial granite is energy-concerving and environment-protective, does not contain radioactive substance, and it adopts natural marble fragment, calcium powder as main raw materials. The unsaturated polyester resin is used as a bonding agent, and is formed by vacuumizing, normal temperature, high pressure, vibration and pouring, has the characteristics of attractive appearance, natural and uniform color patterns, compact structure, strong wear resistance, compression resistance, high anti-dismantling strength, low water absorption and the like, and makes up for the defects of chromatic aberration, holes, cracks, high water absorption and the like of natural stone.
In one aspect of the embodiment, when the first working frame 15 needs to be driven to move longitudinally, the first working frame 15 can be pushed to slide in the first sliding rail 12 through the second linear motor 13, when the second working frame 18 needs to be driven to move transversely, the second working frame 18 can be pushed to slide in the second sliding rail 16 through the third linear motor 17, when the lifting frame 14 needs to be lifted, the lifting frame 14 can be pushed to lift through the first linear motor 9, the burden of lifting can be relieved through the counterweight cylinder 7, and the full-automatic servo tool magazine 10 is accurate in positioning.
In one aspect of this embodiment, in the process of machining a workpiece, the auxiliary time for workpiece loading and unloading, tool adjustment, etc. accounts for a considerable proportion of the machining cycle, wherein tool adjustment is time consuming, labor consuming, and not easy to be accurate, and finally trial cutting is required, at this time, the blue light tool setting gauge 11 can be used to ensure accurate tool measurement, improve machining precision, save time and increase work efficiency, the full-automatic servo tool magazine 10 is a device for providing tool storage and tool changing requirements required in the automatic machining process of a numerical control machine tool, an automatic tool changing mechanism and a tool magazine capable of storing a plurality of tools change the traditional production mode mainly by people, and by means of control of a computer program, various different machining requirements such as milling, drilling, boring, tapping, etc. can be completed, machining time is greatly shortened, and production cost is reduced.
The working principle and the using process of the invention are as follows: after the device is installed, when the first working frame 15 needs to be driven to move longitudinally, the first working frame 15 can be pushed to slide in the first slide rail 12 through the second linear motor 13, when the second working frame 18 needs to be driven to move transversely, the second working frame 18 can be pushed to slide in the second slide rail 16 through the third linear motor 17, when the lifting frame 14 needs to be lifted, the lifting frame 14 can be pushed to lift through the first linear motor 9, the load in lifting can be relieved through the balance weight cylinder 7, the full-automatic servo tool magazine 10 is accurate in positioning, the blue light tool setting instrument 11 ensures accurate tool measurement, the machining precision is improved, and all electric equipment in the device is powered through an external power supply.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. Ultrahigh precision linear electric motor lathe, including working plate (1), its characterized in that: the bottom of working plate (1) is provided with places the cushion, the upper surface of working plate (1) is provided with protective housing (5), the surface of protective housing (5) is provided with door (4) that opens and shuts, the surface of door (4) that opens and shuts is provided with control panel, the upper surface of working plate (1) is provided with longitudinal movement mechanism, one side of longitudinal movement mechanism is provided with the support frame, the surface of support frame is provided with lateral shifting mechanism, lateral shifting mechanism's surface is provided with three slider guide rails (19).
2. The ultra-high precision linear motor machine tool according to claim 1, characterized in that: the upper surface of (5) is provided with work piece (6), the surface of door (4) that opens and shuts is provided with handle (3), one side of handle (3) is provided with observation window (2).
3. The ultra-high precision linear motor machine tool according to claim 1, characterized in that: the longitudinal movement mechanism comprises a first sliding rail (12), a first working frame (15) is connected to the inside of the first sliding rail (12) in a sliding mode, a second linear motor (13) is arranged below the first working frame (15), and the output end of the second linear motor (13) is connected with the first working frame (15).
4. The ultra-high precision linear motor machine tool according to claim 1, characterized in that: the transverse moving mechanism comprises a second sliding rail (16), a second working frame (18) is connected to the inside of the second sliding rail (16) in a sliding mode, a third linear motor (17) is arranged on one side of the second working frame (18), and the output end of the third linear motor (17) is connected with the second working frame (18).
5. The ultra-high precision linear motor machine tool according to claim 1, characterized in that: the surface of the three-slider guide rail (19) is provided with a lifting frame (14), one side of the three-slider guide rail (19) is provided with a first linear motor (9), and the output end of the first linear motor (9) is connected with the lifting frame (14).
6. The ultra-high precision linear motor machine tool according to claim 5, characterized in that: the upper surface of crane (14) is provided with counter weight jar (7), the inside of crane (14) is provided with nodular cast iron (8).
7. The ultra-high precision linear motor machine tool according to claim 3, characterized in that: the upper surface of first work frame (15) is provided with blue light tool setting appearance (11), one side of first work frame (15) is provided with full-automatic servo tool magazine (10).
8. The ultra-high precision linear motor machine tool according to claim 1, characterized in that: the length of working plate (1) is 2050mm, the width of working plate (1) is 1700 mm.
9. The ultra-high precision linear motor machine tool according to claim 1, characterized in that: the length, the width and the working plate (1) of protective housing (5) equal, the appearance of placing the cushion is circular, the quantity of placing the cushion is four, control panel and the inside mechanism electric connection who sets up of protective housing (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111628895.XA CN114193224A (en) | 2021-12-28 | 2021-12-28 | Ultrahigh-precision linear motor machine tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111628895.XA CN114193224A (en) | 2021-12-28 | 2021-12-28 | Ultrahigh-precision linear motor machine tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114193224A true CN114193224A (en) | 2022-03-18 |
Family
ID=80657029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111628895.XA Pending CN114193224A (en) | 2021-12-28 | 2021-12-28 | Ultrahigh-precision linear motor machine tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114193224A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003136363A (en) * | 2001-11-01 | 2003-05-14 | Sumitomo Electric Ind Ltd | Fluid splashing protective cover |
| CN1744966A (en) * | 2003-02-26 | 2006-03-08 | 报国株式会社 | Column moving type machine tool with shield machinery space |
| CN106425675A (en) * | 2016-12-21 | 2017-02-22 | 嘉善津隈精密机械有限公司 | Machining machine tool capable of protecting protective covers against accidental damage |
| CN108466108A (en) * | 2018-03-23 | 2018-08-31 | 东莞市乔锋机械有限公司 | High precision high stability processing center machine |
-
2021
- 2021-12-28 CN CN202111628895.XA patent/CN114193224A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003136363A (en) * | 2001-11-01 | 2003-05-14 | Sumitomo Electric Ind Ltd | Fluid splashing protective cover |
| CN1744966A (en) * | 2003-02-26 | 2006-03-08 | 报国株式会社 | Column moving type machine tool with shield machinery space |
| CN106425675A (en) * | 2016-12-21 | 2017-02-22 | 嘉善津隈精密机械有限公司 | Machining machine tool capable of protecting protective covers against accidental damage |
| CN108466108A (en) * | 2018-03-23 | 2018-08-31 | 东莞市乔锋机械有限公司 | High precision high stability processing center machine |
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Application publication date: 20220318 |