CN114185208A - LCOS display and manufacturing method thereof - Google Patents

LCOS display and manufacturing method thereof Download PDF

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Publication number
CN114185208A
CN114185208A CN202111574826.5A CN202111574826A CN114185208A CN 114185208 A CN114185208 A CN 114185208A CN 202111574826 A CN202111574826 A CN 202111574826A CN 114185208 A CN114185208 A CN 114185208A
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layer
conductive
transparent electrode
conductive layer
electrode layer
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CN114185208B (en
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范纯圣
格培文
范世伦
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Omnivision Semiconductor Shanghai Co Ltd
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Omnivision Semiconductor Shanghai Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/134309—Electrodes characterised by their geometrical arrangement
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G02F1/13458—Terminal pads

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Geometry (AREA)
  • Liquid Crystal (AREA)

Abstract

The invention provides an LCOS display and a manufacturing method thereof. The present invention arranges a conductive layer for improving uniformity of display intensity on a silicon substrate, the conductive layer having an impedance smaller than that of a portion of a transparent electrode layer covering a pixel array. Voltage supplied by outside is conducted to the conducting layer, the conducting layer is electrically coupled with the transparent electrode layer, public voltage is conducted from the part of the transparent electrode layer, which is positioned right above the conducting layer, to the part of the transparent electrode layer, which is positioned right above the pixel array, and the conducting distance is reduced; simultaneously, the impedance between the conductive layer and any point on the transparent electrode layer directly above the pixel array is further reduced; the voltage of the transparent electrode layer of the transconductance electric layer is ensured to be spread rapidly, and the uniformity of the display intensity of different areas on the display is improved. The conducting layer is arranged on the silicon substrate, so that the relative position distribution of the conducting layer, the pixel array and the liquid crystal layer is easily realized. The invention is easy to operate, reduces the difficulty of alignment and does not need to be provided with high-precision alignment bonding equipment.

Description

LCOS display and manufacturing method thereof
Technical Field
The invention relates to a liquid crystal display, in particular to an LCOS display and a manufacturing method thereof.
Background
LCOS (Liquid Crystal on Silicon) displays are a reflective Liquid Crystal display device that uses semiconductor Silicon technology to control the Liquid Crystal and thereby "project" color images.
Fig. 1 is a cross-sectional view of an LCOS display. As shown in fig. 1, the LCOS display includes a silicon substrate 01, a liquid crystal layer 03, an ITO electrode 04, and a transparent substrate 05 sequentially located above the silicon substrate 01, and a pixel array 02 is formed in the silicon substrate 01. The ITO electrode 04 serves as a common electrode of the LCOS display, and the voltage controller 07 supplies a common voltage to the ITO electrode 04 through a pad 06 to achieve biasing of the liquid crystal layer 03, the pad 06 being electrically connected to the ITO electrode 04. When the ITO electrode 04 is held at a certain voltage, the electric field across the liquid crystal layer 03 is controlled by the voltage applied across the pixel array 02. The intensity displayed by each pixel on the pixel array 02 depends on the polarization imparted by the liquid crystal layer 03.
Fig. 2 is a schematic view of a part of the elements in the top view of fig. 1. As shown in fig. 1 and 2, the voltage controller 07 supplies a voltage to the ITO electrode 04 through the pad 06, and it is theoretically expected that the voltage is the same throughout the area of the ITO electrode 04, but the ITO electrode 04 is, for example, a rectangular sheet structure, and the liquid crystal layer 03 is, for example, in the display area (dotted frame) such as the point P1The impedance of the ITO electrode 04 between the pad 06 (electrical contact) and the pad is larger than the point P2And the impedance of the ITO electrode 04 between the pads 06, the impedance of the ITO electrode 04 increasing proportionally with the distance from the voltage source (i.e., the pads 06), which in turn means that the voltage response time of the ITO electrode 04 also increases with the distance from the pads 06. Thus, when the voltage controller 07 switches the voltage on the ITO electrode 04 at pad 06, the voltage has not yet transitioned to a new value across the entire pixel array 02, then a different intensity will occur at different locations of the pixel array 02, e.g., the pixel at P1 will be significantly darker than the pixel at P2, and ideally a substantially uniform intensity across the display area. Such intensity variation becomes very noticeable when the ITO electrode 04 of the display device is driven at a high voltage frequency. However, even when the ITO electrode 04 is driven at a low voltage frequency, some intensity variation can be observed. Therefore, the current LCOS displays have the problems of non-uniform display intensity across the display area and non-uniform (varying) intensity. Accordingly, there is a need for an LCOS display device that is capable of uniformly displaying intensity values across its display area.
Disclosure of Invention
The invention aims to provide an LCOS display and a manufacturing method thereof, which improve the intensity uniformity (consistency) of different areas on the display; and the LCOS display is easier to manufacture, the alignment difficulty is reduced, and a high-precision alignment bonding machine does not need to be additionally configured.
The invention provides an LCOS display comprising:
the liquid crystal display panel comprises a silicon substrate and a transparent substrate which are oppositely arranged, wherein a pixel array is formed on the silicon substrate, a transparent electrode layer is formed on the transparent substrate, and a liquid crystal layer is arranged between the pixel array and the transparent electrode layer;
the silicon substrate comprises a display area and a peripheral area surrounding the display area, wherein the display area is provided with a first side in a first direction and a second side in a second direction; the pixel array is positioned in the display area;
and a conductive layer is arranged in the peripheral area of the silicon substrate along the first direction and/or along the second direction, the conductive layer is electrically coupled with the transparent electrode layer, and the impedance of the conductive layer is smaller than that of the part of the transparent electrode layer covering the pixel array.
Further, the first direction and the second direction are perpendicular.
Further, the conducting layer comprises a first conducting layer and a second conducting layer which are arranged at intervals;
the first conductive layer includes a first conductive portion provided along the first direction at a peripheral side region on one side of the display region in the second direction, and extending portions extending from both ends of the first conductive portion in the second direction, respectively;
the second conductive layer includes a second conductive portion provided along the first direction at a peripheral side region on the other side of the display region in the second direction, and extending portions extending from both ends of the second conductive portion in the second direction, respectively.
Further, an external power supply supplies power from two sides of the first conductive layer parallel to the first direction, and simultaneously supplies the same voltage to two sides of the second conductive layer parallel to the first direction.
Further, the display area is rectangular, the conductive layer is single-strip-shaped, the conductive layer is arranged in the peripheral area of any one side of the rectangle, and an external power supply supplies power from two ends of the conductive layer respectively.
Further, the conducting layer comprises a third conducting layer and a fourth conducting layer which are arranged in parallel; the third conducting layer with the fourth conducting layer is located respectively the week side region of the both sides of display area second direction just all follows the first direction sets up, perhaps the third conducting layer with the fourth conducting layer is located respectively the week side region of the both sides of display area first direction just all follows the second direction sets up.
Further, the conductive layer includes a third conductive portion and a fourth conductive portion that are perpendicular to each other and electrically connected; one of the third conductive part and the fourth conductive part is disposed in the first direction, and the other is disposed in the second direction.
Further, the conductive layer includes a conductive portion disposed along the first direction and extension portions extending from both ends of the conductive portion along the second direction, respectively, or the conductive layer includes a conductive portion disposed along the second direction and extension portions extending from both ends of the conductive portion along the first direction, respectively.
Further, the conductive layer is annular and disposed around the pixel array.
Further, the length of the conductive layer along the first direction is greater than the length of the pixel array along the first direction, and/or the length of the conductive layer along the second direction is greater than the length of the pixel array along the second direction.
Further, the ratio of the length of the first side to the length of the second side is at least 5: 1.
Further, the transparent electrode layer is made of ITO, the conductive layer is made of any one of aluminum, silver, chromium or titanium, and the resistivity of each of the conductive layers is smaller than that of the ITO.
Furthermore, the projection of the transparent electrode layer on the silicon substrate completely covers the conductive layer, a conductive adhesive is arranged between the conductive layer and the transparent electrode layer, and the conductive adhesive contains conductive particles.
Further, the conductive adhesive also comprises insulating gap particles.
Furthermore, a bonding pad is arranged on the silicon substrate, and the conducting layer is electrically connected with the bonding pad through a lead.
The invention also provides a manufacturing method of the LCOS display, which comprises the following steps:
providing a transparent substrate, wherein a transparent electrode layer is formed on the transparent substrate;
providing a silicon substrate, wherein a pixel array is formed on the silicon substrate, a liquid crystal layer is formed above the pixel array, the silicon substrate comprises a display area and a peripheral area surrounding the display area, and the display area is provided with a first side in a first direction and a second side in a second direction; the pixel array is positioned in the display area;
forming a conductive layer which is disposed in the first direction and/or the second direction in a peripheral region of the silicon substrate and has an impedance smaller than that of a portion of the transparent electrode layer covering the pixel array;
mounting the transparent substrate on the silicon substrate such that the transparent electrode layer faces the pixel array and the conductive layer is electrically coupled with the transparent electrode layer.
Further, mounting the transparent substrate on the silicon substrate specifically includes:
and placing conductive adhesive in the peripheral side area of the liquid crystal layer above the silicon substrate, and thermally pressing the transparent electrode layer facing the silicon substrate and the liquid crystal layer, wherein the transparent electrode layer and the conductive layer are electrically coupled through the conductive adhesive.
Compared with the prior art, the invention has the following beneficial effects:
the invention provides an LCOS display and a manufacturing method thereof. The present invention provides a conductive layer for improving uniformity of display intensity on a silicon substrate, the conductive layer being provided in the first direction and/or in the second direction in a peripheral region of the silicon substrate, that is, in a peripheral side region of a liquid crystal layer. The impedance of the conductive layer is less than the impedance of the portion of the transparent electrode layer covering the pixel array.
On one hand, the voltage supplied by the voltage controller is conducted to the conducting layer, the conducting layer is electrically coupled with the transparent electrode layer, the common voltage is conducted from the part of the transparent electrode layer, which is positioned right above the conducting layer, to the part of the transparent electrode layer, which is positioned right above the pixel array, and the conducting distance is reduced; simultaneously, the impedance between the conductive layer and any point on the transparent electrode layer directly above the pixel array is further reduced; the voltage of the transparent electrode layer of the transconductance layer is ensured to be spread rapidly, and the intensity uniformity (consistency) of different areas on the display is improved.
On the other hand, the conducting layer is arranged on the silicon substrate, and the conducting layer is easier to be accurately arranged in the peripheral area surrounding the display area, so that the conducting layer is easier to realize the relative position distribution with the pixel array and the liquid crystal layer. If the conductive layer is disposed on the transparent electrode layer, the transparent electrode layer is formed on the transparent substrate, and a high-precision alignment laminator process is needed to precisely align and laminate the transparent substrate with the conductive layer pattern and the silicon substrate (e.g., LCOS wafer), the high-precision alignment laminator is expensive and has relatively high investment. The invention is easy to operate and reduces the difficulty of contraposition.
The LCOS display of the invention can be driven by high voltage frequency on the common electrode transparent electrode layer without sacrificing image quality, so that the common voltage can be rapidly and uniformly determined on the transparent electrode layer.
Drawings
Fig. 1 is a schematic cross-sectional view of an LCOS display.
Fig. 2 is a schematic plan (top) view of the LCOS display of fig. 1.
Fig. 3 is a schematic plan (top) view of an LCOS display according to a first embodiment of the present invention.
Fig. 4 is a schematic cross-sectional view AA' of a first example of the LCOS display of fig. 3.
Fig. 5 is a schematic cross-sectional view along BB' of a first example of the LCOS display of fig. 3.
Fig. 6 is a schematic cross-sectional view AA' of a second example of the LCOS display of fig. 3.
Fig. 7 is a schematic diagram of the voltage controller access of the LCOS display according to the first embodiment of the present invention.
Fig. 8 is a schematic plan (top) view of an LCOS display in accordance with a second embodiment of the present invention.
Fig. 9 is a schematic plan (top) view of an LCOS display in accordance with a third embodiment of the present invention.
Fig. 10 is a schematic plan (top) view of an LCOS display in accordance with a fourth embodiment of the present invention.
Wherein the reference numbers are as follows:
01-a silicon substrate; 02-pixel array; 03-a liquid crystal layer; 04-ITO electrodes; 05-a transparent substrate; 06-a bonding pad; 07-a voltage controller;
11-a silicon substrate; 12-a pixel array; 13-a liquid crystal layer; 14-a transparent electrode layer; 15-a transparent substrate; 16-a pad; 16 a-first pad; 16 b-a second pad; 17-a voltage controller; 18-a conductive layer; 18 a-a first conductive layer; 18 b-a second conductive layer; 18 c-a third conductive layer; 18 d-a fourth conductive layer; 19 a-a first lead; 19 b-a second lead; 19 c-a third lead; 19 d-fourth lead; 18e, 18 f-conductive layer; 19e, 19 f-leads; 20-conductive adhesive; 21-conductive particles; 22-insulating gap particles; 23-a metal layer; 31-incident light; 32-reflected light.
Detailed Description
The embodiment of the invention provides an LCOS display and a manufacturing method thereof. The invention is described in further detail below with reference to the figures and specific examples. The advantages and features of the present invention will become more apparent from the following description. It is to be noted, however, that the drawings are designed in a simplified form and are not to scale, but rather are to be construed in an illustrative and descriptive sense only and not for purposes of limitation.
An embodiment of the present invention provides an LCOS display, including:
the liquid crystal display panel comprises a silicon substrate and a transparent substrate which are oppositely arranged, wherein a pixel array is formed on the silicon substrate, a transparent electrode layer is formed on the transparent substrate, and a liquid crystal layer is arranged between the pixel array and the transparent electrode layer;
the silicon substrate comprises a display area and a peripheral area surrounding the display area, wherein the display area is provided with a first side in a first direction and a second side in a second direction;
and arranging a conductive layer along the first direction and/or along the second direction on the peripheral region of the silicon substrate, wherein the conductive layer is electrically coupled with the transparent electrode layer, and the impedance of the conductive layer is smaller than that of the part of the transparent electrode layer covering the pixel array.
The impedance of the portion of the transparent electrode layer covering the pixel array, that is, the impedance of the portion of the transparent electrode layer directly above the pixel array.
An LCOS display according to an embodiment of the present invention is described in detail below with reference to fig. 3 to 10.
Fig. 3 is a schematic plan (top) view of an LCOS display according to a first embodiment of the present invention. Fig. 4 is a schematic cross-sectional view AA' of a first example of the LCOS display of fig. 3. Fig. 5 is a schematic cross-sectional view along BB' of a first example of the LCOS display of fig. 3.
As shown in fig. 3 to fig. 5, the LCOS display of the present embodiment includes: the display panel comprises a silicon substrate 11 and a transparent substrate 15 which are oppositely arranged, wherein a pixel array 12 is formed on one side of the silicon substrate 11 facing the transparent substrate 15, and the pixel array 12 comprises a plurality of pixels which are arranged in a plurality of columns and a plurality of rows. Specifically, a plurality of display units are formed on the silicon substrate 11, and each display unit includes a pixel array 12. Each display unit includes: a plurality of scan lines, a plurality of data lines, a plurality of active devices (e.g., thin film transistors) electrically connected to the pixel electrodes of the pixel array 12. The silicon substrate 11 includes a display area I having a first side m in a first direction (e.g., X direction) and a second side n in a second direction (e.g., Y direction), and a peripheral area II surrounding the display area I. The plurality of scanning lines, the plurality of data lines, the plurality of active devices and the plurality of pixel electrodes electrically connected with the active devices are mainly formed on the display area I.
A transparent substrate 15, for example, a glass substrate, a transparent electrode layer 14 being formed on the transparent substrate 15, the transparent electrode layer 14 being provided on a surface of the transparent substrate 15 facing the silicon substrate 11; the transparent electrode layer 14 is formed of a thin conductive material, such as ITO, and the boundaries of the transparent electrode layer 14 correspond to the boundaries of the transparent substrate 15. A liquid crystal layer 13 is disposed between the pixel array 12 and the transparent electrode layer 14. A bonding pad 16 is formed on the peripheral side region of the liquid crystal layer 13 on the surface of the silicon substrate 11, and the transparent conductive layer 14 is exposed out of the bonding pad 16, that is, the bonding pad 16 may be disposed on the peripheral region II for leading in or leading out an electrical signal.
A conductive layer 18 is provided in the peripheral region II of the silicon substrate 11 in the first direction and/or in the second direction for improving display intensity uniformity. A conductive adhesive 20 is disposed between the conductive layer 18 and the transparent electrode layer 14, and the conductive layer 18 and the transparent electrode layer 14 are electrically coupled through the conductive adhesive 20. The transparent electrode layer 14 covers the liquid crystal layer 13 and the conductive paste 20. The pixel array 12 defines the size of the display area I, and the liquid crystal layer 13 is located right above the display area I. The conductive layer 18 is located on the peripheral side of the liquid crystal layer 13.
The resistance of the conductive layer 18 is less than the resistance of the portion of the transparent electrode layer 14 that covers the pixel array 12. Specifically, the transparent electrode layer 14 may be formed of an Indium Tin Oxide (ITO) layer on the bottom surface of the transparent substrate 15 and serves as a common electrode of the LCOS display. Illustratively, the material of the transparent electrode layer 14 includes ITO, which is transparent to about 95% of wavelengths in the visible spectrum. The thickness of the conductive material of the transparent electrode layer 14 ranges from 20nm to 60nm to achieve high optical performance. The material of the conductive layer 18 includes any one of aluminum, silver, chromium, or titanium, each of which has a resistivity less than that of the ITO. The resistivity of the conductive layer 18 is less than the resistivity of the transparent electrode layer 14.
During operation of the LCOS display, incident light 31 is polarized to a first predetermined polarization state and enters through the top surface of the transparent substrate 15, passes through the layer transparent electrode layer 14, the second alignment layer (not shown), the liquid crystal layer 13, the first alignment layer (not shown), reaches the pixel mirrors of the pixel array 12 and is reflected, and the reflected light 32 passes through the first alignment layer, the liquid crystal layer 13, the second alignment layer, the transparent electrode layer 14 and the transparent substrate 15 in sequence. The polarization of the light is changed by the liquid crystal layer 13 depending on the electric field applied to the liquid crystal. When the transparent electrode layer 14 is held at a certain voltage, the electric field across the liquid crystal layer 13 is controlled by the voltage applied to the pixel mirror (not shown) of the pixel array 12. The polarization of the incident light is spatially modulated according to the image on the pixel array 12, and is output as a modulated light beam. The modulated beam is then analyzed by an analyzer having a predetermined polarization state to produce a displayable image. The intensity of each pixel display depends on the polarization imparted by the liquid crystal, and is closely related to the voltage applied across the transparent electrode layer 14.
In a particular example, the conductive layer 18 is formed of aluminum (e.g., to save cost), with a line width in the range of 100 μm to 1000 μm, and a thickness in the range of 100nm to 500 nm. In addition to the material type, the impedance depends on other variables, such as length, cross-sectional area, frequency, capacitance, etc. Conductive layer 18 may be formed using any suitable deposition process available in the art (e.g., photolithography, sputtering, chemical vapor deposition, etc.).
Illustratively, the projection of the transparent electrode layer 14 onto the silicon substrate 11 covers the conductive layer 18. A conductive adhesive 20 is disposed between the conductive layer 18 and the transparent electrode layer 14, and the conductive adhesive 20 contains conductive particles 21. The conductive layer 18 and the transparent electrode layer 14 are electrically connected by a conductive adhesive. In other examples, as shown in fig. 6, the conductive paste further includes insulating gap particles 22 therein. The conductive paste 20 is formed on the peripheral region II. The conductive particles 21 are, for example, metal conductive particles. Illustratively, the conductive particles 21 have a particle size of 5 μm to 25 μm. The larger particle size is beneficial to obtaining better conductive effect. The conductive particles 21 are at least one of single metal conductive particles and alloy conductive particles. Wherein, the single metal conductive particles may be at least one of gold particles, silver particles, copper particles and nickel particles, but are not limited thereto; the alloy conductive particles may be at least one of silver-plated copper particles, silver-plated gold particles, silver-plated nickel particles, gold-plated copper particles, and gold-plated nickel particles, but are not limited thereto. The alloy conductive particles have good oxidation resistance and conductivity, and the product is convenient to store and carry, does not influence the physical property of the product, and has high stability and reliability.
A metal layer 23 can be formed in the silicon substrate 11; in this example, the conductive layer 18 and the metal layer 23 are not electrically connected and are independent of each other. The silicon substrate 11 includes a silicon substrate on which an interlayer dielectric layer in which the metal layer 23 is formed may be formed. The material of the metal layer 23 includes: at least one of titanium, titanium-tungsten, aluminum, chromium, silver, and copper. In the display region I, a first alignment layer may be formed between the silicon substrate 11 and the liquid crystal layer 13, and a second alignment layer may be formed between the liquid crystal layer 13 and the transparent electrode layer 14 for promoting the alignment of the liquid crystal in the liquid crystal layer 13 in a desired direction.
The display area I has a first side m in a first direction (e.g., X direction) and a second side n in a second direction (e.g., Y direction); the pixel array 12 defines a display area I, which is illustrated as a rectangle for example. The shape of the boundary of the display area I can be set according to actual requirements without limitation. The first and second directions are intended to define two reference directions and do not therefore define the shape of the display area I. By taking the example that the first direction (for example, the X direction) and the second direction (for example, the Y direction) are perpendicular to each other and the display area I is rectangular, for example, the ratio of the length of the first side to the length of the second side is at least 5:1, which can achieve better effect or more obvious effect. The length of the conductive layer along the first direction is greater than the length of the pixel array along the first direction, and/or the length of the conductive layer along the second direction is greater than the length of the pixel array along the second direction.
As shown in fig. 7, the conductive layer 18 includes spaced apart first and second conductive layers 18a and 18 b. The first conductive layer 18a includes a first conductive portion disposed in a first direction (for example, X direction) at a peripheral side region on one side of the second direction (for example, Y direction) of the display region I, and extending portions extending in the second direction (for example, Y direction) from both ends of the first conductive portion, respectively; the second conductive layer 18b includes a second conductive portion provided along the first direction in a peripheral side region on the other side in the second direction of the display region I, and extending portions extending in the second direction from both ends of the second conductive portion, respectively.
In other examples, the first conductive layer 18a may also include a first conductive portion disposed in parallel to a second direction (e.g., Y direction) in a peripheral side region on one side of the first direction (e.g., X direction) of the display region I, and extending portions extending in the first direction from both ends of the first conductive portion, respectively; the second conductive layer 18b may also include a first conductive portion disposed in parallel with a second direction (e.g., Y direction) in a peripheral side region on the other side of the first direction (e.g., X direction) of the display region I, and extending portions extending from both ends of the first conductive portion in the first direction, respectively.
Specifically, the voltage controller 17 conducts the same voltage V to the first conductive layer 18a and the second conductive layer 18b through the lead wires of high conductivity. For example, the voltage controller 17 may be divided into two paths, the first path is connected from the first pad 16a to the two ends of the first conductive layer 18a along the X direction through the first leads 19a on the left and right sides respectively; the second path is connected from the second pad 16b to both ends of the second conductive layer 18b in the X direction via the second leads 19b on the left and right sides, respectively. The leads (e.g., first lead 19a and second lead 19b) may be redistribution metal lines formed in the silicon substrate 11.
The first conductive layer 18a is conducted to the portion of the transparent electrode layer 14 directly above the first conductive layer 18a through the conductive adhesive 20, the second conductive layer 18b is conducted to the portion of the transparent electrode layer 14 directly above the second conductive layer 18b through the conductive adhesive 20, so that the common voltage is conducted from the portion of the transparent electrode layer 14 directly above the first conductive layer 18a and the portion of the transparent electrode layer 14 directly above the second conductive layer 18b to the portion of the transparent electrode layer 14 directly above the pixel array 12, respectively, by a distance equal to or less than half of the distance between the first conductive layer 18a and the second conductive layer 18b in the second direction (e.g., Y direction), and thus, the first conductive layer 18a and the second conductive layer 18bThe impedance between any of b and any point on the transparent electrode layer 14 directly above the display area I (or pixel array) is further reduced. Moreover, the common voltage is simultaneously conducted from both sides (or upper and lower sides) in the second direction (e.g., the Y direction) across the entire region where the pixel array 12 is located, while the common voltage can also be simultaneously conducted from both sides (or left and right sides) in the first direction (e.g., the X direction) from the respective extension portions of the first conductive layer 18a and the second conductive layer 18 b; thus, it is conducted lengthwise to P from the single-point pad 06 in FIG. 22And P1Compared with the scheme that the conductive layer 18 of the present embodiment includes the first conductive layer 18a and the second conductive layer 18b which are arranged at intervals, the portion of the transparent electrode layer 14 directly above the pixel array 12 can easily and uniformly obtain the common voltage. The transparent electrode layer 14 of the present embodiment can be driven at a higher frequency without suffering from the interference of the intensity unevenness.
Fig. 8 is a schematic plan (top) view of an LCOS display in accordance with a second embodiment of the present invention. As shown in fig. 8, the conductive layer 18 includes a third conductive layer 18c and a fourth conductive layer 18d arranged in parallel. The third conductive layer 18c and the fourth conductive layer 18d are respectively located in peripheral side regions on both sides of the second direction (e.g., Y direction) of the display region I and are both disposed along the first direction (e.g., X direction). In other examples, the third conductive layer 18c and the fourth conductive layer 18d may be respectively located in the peripheral side regions on both sides of the first direction of the display region I and both disposed along the second direction.
Specifically, the voltage controller 17 conducts the same voltage V to the third conductive layer 18c and the fourth conductive layer 18d through the lead wires of high conductivity. For example, the voltage controller 17 may be divided into two paths, the first path is connected from the first pad 16a to the two ends of the third conductive layer 18c along the X direction through the third leads 19c on the left and right sides respectively; the second path is connected from the second pad 16b to the two ends of the fourth conductive layer 18d along the X direction through the fourth leads 19d on the left and right sides, respectively. The leads (e.g., the third lead 19c and the fourth lead 19d) may be redistribution metal lines formed in the silicon substrate 11.
The third conductive layer 18c is conducted to the transparent electrode layer 14 through the conductive adhesive 20 at the second positionA portion directly above the third conductive layer 18c, the fourth conductive layer 18d is conducted to a portion of the transparent electrode layer 14 directly above the fourth conductive layer 18d through the conductive adhesive 20, so that the common voltage is conducted from the portion of the transparent electrode layer 14 directly above the third conductive layer 18c and the portion of the transparent electrode layer 14 directly above the fourth conductive layer 18d to the portion of the transparent electrode layer 14 directly above the pixel array in the second direction (for example, the Y direction), respectively, for a distance equal to or less than half of the pitch between the third conductive layer 18c and the fourth conductive layer 18d in the second direction (for example, the Y direction), and therefore, the impedance between any one of the third conductive layer 18c and the fourth conductive layer 18d and any point on the transparent electrode layer 14 directly above the display region I is further reduced. Also, the common voltage is conducted simultaneously from both sides (or upper and lower sides) in the second direction (e.g., Y direction) across the area in which the entire pixel array 12 in the first direction (e.g., X direction) is located; thus, it is conducted lengthwise to P from the single-point pad 06 in FIG. 22And P1Compared with the scheme that the conductive layer 18 of the present embodiment includes the third conductive layer 18c and the fourth conductive layer 18d arranged in parallel, the portion of the transparent electrode layer 14 directly above the pixel array 12 can easily and uniformly obtain the common voltage. The transparent electrode layer 14 of the present embodiment can be driven at a higher frequency without suffering from the interference of the intensity unevenness. It should be understood that the portion of the transparent electrode layer 14 directly above the pixel array 12 provides a polarized common voltage to the pixel array 12, and therefore, the voltage of the portion of the transparent electrode layer 14 directly above the pixel array 12 is of primary concern.
Fig. 9 is a schematic plan (top) view of an LCOS display in accordance with a third embodiment of the present invention. As shown in fig. 9, the conductive layer 18e includes a third conductive portion and a fourth conductive portion that are perpendicular to each other and electrically connected; one of the third conductive part and the fourth conductive part is disposed in the first direction (e.g., X direction), and the other is disposed in the second direction (e.g., Y direction). The conductive layer 18e is "L-shaped" and is located near both sides of the pixel array 12. The voltage controller 17 conducts a voltage V to both ends of the conductive layer 18e through a lead 19e of high conductivity. The impedance between the conductive layer 18e and any point on the transparent electrode layer 14 directly above the display area I is further reduced. The conductive layer 18e quickly distributes (conducts) the common voltage supplied by the voltage controller 17 along the long side m and the short side n of the display area I. The part of the transparent electrode layer 14 directly above the pixel array 12 is easy to obtain the common voltage more quickly and uniformly, and the uniformity of the display intensity is improved.
Fig. 10 is a schematic plan (top) view of an LCOS display in accordance with a fourth embodiment of the present invention. As shown in fig. 10, the conductive layer 18f includes a conductive portion disposed in the second direction (e.g., Y direction) and extending portions extending from both ends of the conductive portion in the first direction (e.g., X direction), respectively. In other examples, the conductive layer 18 further includes a conductive portion disposed along the first direction and extending portions extending from two ends of the conductive portion along the second direction. The conductive layer 18f is in a right-angle "U-shape" and is located near three sides of the display area I. The impedance between the conductive layer 18f and any point on the transparent electrode layer 14 directly above the display area I is further reduced. The conductive layer 18f distributes the voltage supplied by the voltage controller 17 along the two long sides m and one short side n of the display area I so that the variation of the voltage rapidly spreads across the portion of the transparent electrode layer 14 covering the pixel array 12 due to the impedance reduction therebetween, the portion of the transparent electrode layer 14 directly above the pixel array 12 is easily and quickly acquired with the common voltage more uniformly, and the uniformity of the display intensity of the LCOS display is improved as compared with the prior art (e.g., fig. 2).
In an embodiment, the display area is rectangular, the conductive layer 18 may be single-strip-shaped, the conductive layer 18 is disposed in a peripheral area of any one side of the rectangle, and an external power source supplies power from two ends of the conductive layer 18, respectively. In another embodiment, the conductive layer 18 is annular and disposed around the pixel array 12, and the voltage provided by the voltage controller 17 is conducted along each edge of the transparent electrode layer 14, which enables the voltage to propagate very quickly through the portion of the transparent electrode layer 14 covering the pixel array 12. This in turn enables the LCOS display to display intensity values uniformly across the pixel array 12, even for waveforms provided by the voltage controller 17 that switch voltages at high frequencies.
The conductive layer 18 is in substantially continuous electrical connection with the transparent electrode layer 14, but in other embodiments the conductive layer 18 may be spaced in one direction and the conductive layer 18 and the transparent electrode layer 14 may include a plurality of discrete electrical connections.
The embodiment also provides a method for manufacturing an LCOS display, including:
providing a transparent substrate, wherein a transparent electrode layer is formed on the transparent substrate;
providing a silicon substrate, wherein a pixel array is formed on the silicon substrate, a liquid crystal layer is formed above the pixel array, the silicon substrate comprises a display area and a peripheral area surrounding the display area, and the display area is provided with a first side in a first direction and a second side in a second direction; the pixel array is positioned in the display area;
forming a conductive layer which is disposed in the first direction and/or the second direction in a peripheral region of the silicon substrate and has an impedance smaller than that of a portion of the transparent electrode layer covering the pixel array;
mounting the transparent substrate on the silicon substrate such that the transparent electrode layer faces the pixel array and the conductive layer is electrically coupled with the transparent electrode layer.
Specifically, the conductive layer 18 is formed on the silicon substrate 11, and may be formed by photolithography, vapor deposition, or sputtering. The transparent substrate 15 is mounted on the silicon substrate 11, a pressing manner may be adopted, for example, a conductive adhesive 20 is disposed in a peripheral side region of the liquid crystal layer 13 above the silicon substrate 11, the conductive adhesive 20 includes conductive particles 21, the conductive adhesive 20 is, for example, an anisotropic conductive adhesive, the transparent electrode layer 14 is formed on the transparent substrate 15, the transparent electrode layer 14 is applied to the silicon substrate 11 and the liquid crystal layer 13 by a thermal pressing effect, so that the transparent substrate 15, the transparent electrode layer 14 and the silicon substrate 11 are clamped, and after cooling and curing through the conductive adhesive 20, the upper substrate, the lower substrate and the circuit are bonded to form a display module, and since the conductive adhesive 20 contains the conductive particles 21, after pressing, the transparent electrode layer 14 and the conductive layer 18 are electrically connected through the conductive particles 21 in the conductive adhesive 20. The conductive layer 18 facilitates driving the transparent electrode layer with a high frequency voltage waveform while minimizing intensity variations in the display area of the LCOS display.
When a high frequency voltage waveform (e.g., a voltage frequency greater than or equal to 1.0kHz) is applied to the transparent electrode layer (e.g., the transparent electrode layer has a long to short side ratio greater than or equal to 5: 1), the voltage changes are faster than they can propagate and stabilize across the transparent electrode layer. In order to achieve optimal imaging performance and intensity uniformity throughout the entire display area, it is necessary to minimize the impedance of the transparent electrode layer between the common voltage input and a point on the transparent electrode layer portion. For these same purposes, it is also desirable that the transparent electrode layer have very high optical transparency throughout the visible spectrum.
The ITO electrodes have high resistivity and will have significant resistance variations, especially along their long dimension, without the conductive layer 18 of the present invention. To minimize this impedance variation, the LCOS display includes a conductive layer 18 formed directly on the silicon substrate 11. The conductive layer 18 is elongated compared to the pad 06 in fig. 2 such that it extends along the long side of the transparent electrode layer 14 and is electrically coupled along the long side of the transparent electrode layer 14.
The present invention may deliver a uniform common voltage more quickly across the portion of the transparent electrode layer 14 covering the pixel array 12, which in turn enables the individual intensity values to be displayed more uniformly across the entire pixel array 12. A common voltage waveform is received from the voltage controller 17 and then applied to the transparent electrode layer 14. The conductive layer 18 provides the advantage that the transparent electrode layer 14 can be driven at higher frequencies without suffering from intensity non-uniformity. In summary, the above-described embodiments reduce the voltage signal propagation delay across the transparent electrode layer 14 in both the long and short directions of the LCOS display. Thus, impedance variations between the conductive layer 18 and the different locations of the transparent electrode layer 14 covering the pixel array 12, and non-uniformities in the display intensity values at different locations across the pixel array 14, are minimized. In the case where a high frequency (e.g., > 1.0kHz for LCOS) or low frequency (e.g., <1.0kHz for LCOS) common voltage waveform is applied to the transparent electrode layer 14, the electrically conductive layer 18 of the present invention reduces the intensity variation in the long and short dimensions of the pixel array 12, thereby improving the displayed image.
In summary, the present invention provides an LCOS display and a method for fabricating the same. The present invention provides a conductive layer for improving uniformity of display intensity on a silicon substrate, the conductive layer being provided in the first direction and/or in the second direction in a peripheral region of the silicon substrate, that is, in a peripheral side region of a liquid crystal layer. The impedance of the conductive layer is less than the impedance of the portion of the transparent electrode layer covering the pixel array. On one hand, the voltage supplied by the voltage controller is conducted to the conducting layer, the conducting layer is electrically coupled with the transparent electrode layer, the common voltage is conducted from the part of the transparent electrode layer, which is positioned right above the conducting layer, to the part of the transparent electrode layer, which is positioned right above the pixel array, and the conducting distance is reduced; simultaneously, the impedance between the conductive layer and any point on the transparent electrode layer directly above the pixel array is further reduced; the voltage of the transparent electrode layer of the transconductance layer is ensured to be spread rapidly, and the intensity uniformity (consistency) of different areas on the display is improved. On the other hand, the conducting layer is arranged on the silicon substrate, and the conducting layer is easier to be accurately arranged in the peripheral area surrounding the display area, so that the conducting layer is easier to realize the relative position distribution with the pixel array and the liquid crystal layer. If the conductive layer is disposed on the transparent electrode layer, the transparent electrode layer is formed on the transparent substrate, and a high-precision alignment laminator process is needed to precisely align and laminate the transparent substrate with the conductive layer pattern and the silicon substrate (e.g., LCOS wafer), the high-precision alignment laminator is expensive and has relatively high investment. The invention is easy to operate and reduces the difficulty of contraposition. The LCOS display of the invention can be driven by high voltage frequency on the common electrode transparent electrode layer without sacrificing image quality, so that the common voltage can be rapidly and uniformly determined on the transparent electrode layer.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. For the method disclosed by the embodiment, the description is relatively simple because the method corresponds to the device disclosed by the embodiment, and the relevant points can be referred to the description of the method part.
The above description is only for the purpose of describing the preferred embodiments of the present invention and is not intended to limit the scope of the claims of the present invention, and any person skilled in the art can make possible the variations and modifications of the technical solutions of the present invention using the methods and technical contents disclosed above without departing from the spirit and scope of the present invention, and therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention belong to the protection scope of the technical solutions of the present invention.

Claims (17)

1. An LCOS display, comprising:
the liquid crystal display panel comprises a silicon substrate and a transparent substrate which are oppositely arranged, wherein a pixel array is formed on the silicon substrate, a transparent electrode layer is formed on the transparent substrate, and a liquid crystal layer is arranged between the pixel array and the transparent electrode layer;
the silicon substrate comprises a display area and a peripheral area surrounding the display area, wherein the display area is provided with a first side in a first direction and a second side in a second direction; the pixel array is positioned in the display area;
and a conductive layer is arranged in the peripheral area of the silicon substrate along the first direction and/or along the second direction, the conductive layer is electrically coupled with the transparent electrode layer, and the impedance of the conductive layer is smaller than that of the part of the transparent electrode layer covering the pixel array.
2. The LCOS display of claim 1, wherein said first direction and said second direction are perpendicular.
3. The LCOS display of claim 2, wherein said conductive layer comprises first and second spaced apart conductive layers;
the first conductive layer includes a first conductive portion provided along the first direction at a peripheral side region on one side of the display region in the second direction, and extending portions extending from both ends of the first conductive portion in the second direction, respectively;
the second conductive layer includes a second conductive portion provided along the first direction at a peripheral side region on the other side of the display region in the second direction, and extending portions extending from both ends of the second conductive portion in the second direction, respectively.
4. The LCOS display of claim 3, wherein an external power supply supplies power from each side of said first conductive layer parallel to said first direction and simultaneously supplies the same voltage to each side of said second conductive layer parallel to said first direction.
5. The LCOS display of claim 2, wherein said display area is rectangular, said conductive layer is single-bar shaped, said conductive layer is disposed in a peripheral region of any one side of said rectangle, and an external power supply supplies power from both ends of said conductive layer, respectively.
6. The LCOS display of claim 2, wherein said conductive layers comprise third and fourth conductive layers arranged in parallel; the third conducting layer with the fourth conducting layer is located respectively the week side region of the both sides of display area second direction just all follows the first direction sets up, perhaps the third conducting layer with the fourth conducting layer is located respectively the week side region of the both sides of display area first direction just all follows the second direction sets up.
7. The LCOS display of claim 2, wherein said conductive layer includes a third conductive portion and a fourth conductive portion that are perpendicular to and electrically connected to each other; one of the third conductive part and the fourth conductive part is disposed in the first direction, and the other is disposed in the second direction.
8. The LCOS display of claim 2, wherein said conductive layer comprises a conductive portion disposed along said first direction and an extension portion extending from both ends of said conductive portion along said second direction, respectively, or wherein said conductive layer comprises a conductive portion disposed along said second direction and an extension portion extending from both ends of said conductive portion along said first direction, respectively.
9. The LCOS display of claim 1, wherein said conductive layer is annular and disposed around said pixel array.
10. The LCOS display of any one of claims 1-9, wherein said electrically conductive layer has a length in said first direction which is greater than a length of said pixel array in said first direction, and/or wherein said electrically conductive layer has a length in said second direction which is greater than a length of said pixel array in said second direction.
11. The LCOS display of any one of claims 1-9, wherein the ratio of the length of said first edge to the length of said second edge is at least 5: 1.
12. The LCOS display of any one of claims 1-9, wherein the transparent electrode layer comprises ITO, and the conductive layer comprises any one of aluminum, silver, chromium or titanium, each of which has a resistivity less than that of the ITO.
13. The LCOS display of any one of claims 1-9, wherein a projection of said transparent electrode layer onto said silicon substrate completely covers said conductive layer, and wherein a conductive glue is arranged between said conductive layer and said transparent electrode layer, said conductive glue comprising conductive particles.
14. The LCOS display of claim 13, wherein said conductive paste further includes insulating gap particles therein.
15. The LCOS display of any one of claims 1-9, wherein a pad is provided on said silicon substrate, said conductive layer being electrically connected to said pad by a wire.
16. A method of fabricating an LCOS display, comprising:
providing a transparent substrate, wherein a transparent electrode layer is formed on the transparent substrate;
providing a silicon substrate, wherein a pixel array is formed on the silicon substrate, a liquid crystal layer is formed above the pixel array, the silicon substrate comprises a display area and a peripheral area surrounding the display area, and the display area is provided with a first side in a first direction and a second side in a second direction; the pixel array is positioned in the display area;
forming a conductive layer which is disposed in the first direction and/or the second direction in a peripheral region of the silicon substrate and has an impedance smaller than that of a portion of the transparent electrode layer covering the pixel array;
mounting the transparent substrate on the silicon substrate such that the transparent electrode layer faces the pixel array and the conductive layer is electrically coupled with the transparent electrode layer.
17. The method of fabricating an LCOS display of claim 16, wherein mounting the transparent substrate on the silicon substrate specifically comprises:
and placing conductive adhesive in the peripheral side area of the liquid crystal layer above the silicon substrate, and thermally pressing the transparent electrode layer facing the silicon substrate and the liquid crystal layer, wherein the transparent electrode layer and the conductive layer are electrically coupled through the conductive adhesive.
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