CN114180830B - Coated glass, preparation method thereof, method for preparing microchannel plate by using coated glass and microchannel plate - Google Patents

Coated glass, preparation method thereof, method for preparing microchannel plate by using coated glass and microchannel plate Download PDF

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Publication number
CN114180830B
CN114180830B CN202111393050.7A CN202111393050A CN114180830B CN 114180830 B CN114180830 B CN 114180830B CN 202111393050 A CN202111393050 A CN 202111393050A CN 114180830 B CN114180830 B CN 114180830B
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glass
microchannel plate
edge
temperature
covering
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CN114180830A (en
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薄铁柱
刘辉
黄永刚
王云
刘娟
张洋
蔡华
曹振博
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China Building Materials Academy CBMA
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China Building Materials Academy CBMA
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/076Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/102Glass compositions containing silica with 40% to 90% silica, by weight containing lead
    • C03C3/105Glass compositions containing silica with 40% to 90% silica, by weight containing lead containing aluminium
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/02Other methods of shaping glass by casting molten glass, e.g. injection moulding
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00Re-forming shaped glass
    • C03B23/0013Re-forming shaped glass by pressing
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/02Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor
    • C03B37/025Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor from reheated softened tubes, rods, fibres or filaments, e.g. drawing fibres from preforms
    • C03B37/027Fibres composed of different sorts of glass, e.g. glass optical fibres
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B5/00Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
    • C03B5/16Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
    • C03B5/235Heating the glass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04Electron multipliers
    • H01J43/06Electrode arrangements
    • H01J43/18Electrode arrangements using essentially more than one dynode
    • H01J43/24Dynodes having potential gradient along their surfaces
    • H01J43/246Microchannel plates [MCP]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/12Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
    • H01J9/125Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes of secondary emission electrodes

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Glass Compositions (AREA)

Abstract

The invention relates to a piece of edge-covering glass, a preparation method thereof, a method for preparing a microchannel plate by using the same and the microchannel plate, wherein the piece of edge-covering glass comprises the following components in percentage by mass: siO (SiO) 2 :40~45%;Al 2 O 3 :4~6%;PbO:18~22%;ZrO 2 :4~5%;TiO 2 :3~4%;BaO:5~6%;Bi 2 O 3 :7~8%;K 2 O:3 to 4 percent; and Na (Na) 2 O: 6-8%; the expansion coefficient of the edge-coated glass provided by the invention is 70-80 multiplied by 10 ‑7 The softening temperature is 700-720 ℃, the chemical stability is 1 level, the crystallization resistance temperature reaches 850 ℃, and the glass can be accurately matched with the performance of the microchannel plate cladding glass. By adopting the design of the binding glass component, the melting technology and the integral binding technology, the deformation of the microchannel plate can be effectively controlled, and the problem of deformation of the microchannel plate with the thickness of 0.20-0.25 mm is solved.

Description

Coated glass, preparation method thereof, method for preparing microchannel plate by using coated glass and microchannel plate
Technical Field
The invention relates to the technical field of microchannel plates, in particular to edge-coated glass, a preparation method thereof, a method for preparing a microchannel plate by using the edge-coated glass and the microchannel plate.
Background
The micro-channel plate has the advantages of small volume, light weight, high resolution, high gain, low noise, low use voltage and the like, and has irreplaceable functions in the technical fields of low-light night vision, space detection, nuclear detection, ultraviolet early warning, medical images and other military and civil photoelectron. Gain and resolution are key core indicators of the microchannel plate, and higher gain and higher resolution are always targets for microchannel plate developers to pursue continuously. Reducing the pore size is the most straightforward and effective way to increase the resolution of the microchannel plate. On one hand, the spatial resolution of imaging can be directly improved by reducing the aperture of the micro-channel plate, so that the detection and identification of weak signals are facilitated; on the other hand, the aperture reduction can increase the number of micropores in the same effective area, reduce the volume resistance, thereby shortening the compensation time of escaping electrons and improving the time resolution of the microchannel plate. Therefore, exploring the lower pore size limit of glass-based microchannel plates, preparing ultra-small pore size microchannel plates has been a hotspot problem in research in this field.
In order to maintain the electron multiplication properties of the microchannel plate, the thickness of the microchannel plate must be reduced while the pore diameter is reduced to meet the optimal aspect ratio, since the electron multiplication properties of the microchannel plate are independent of the absolute value of the single channel diameter and length, and are related to the ratio of length to diameter (aspect ratio). The relationship between the gain maximum value of the micro-channel plate and the length-diameter ratio and the working voltage is proposed by the weya et al, and the relationship u=22α is pointed out that the working voltage and the length-diameter ratio satisfy at the gain maximum value of the micro-channel plate. It can be seen that obtaining maximum gain requires that the microchannel plate thickness meet the optimal aspect ratio. However, the mechanical strength of the microchannel plate is seriously reduced to a certain extent, the microchannel plate is extremely easy to damage during operation and treatment, and the manufacturing difficulty is increased, so that the relatively proper length-diameter ratio parameter is selected as much as possible while the manufacturing difficulty of the process is balanced, and the optimal length-diameter ratio parameter is close to the optimal length-diameter ratio, so that the relatively satisfactory gain of the microchannel plate is obtained. Jin Ge in the study of the double-sided polishing process of the microchannel plate, it is pointed out that when the thickness of the microchannel plate with the aperture of 6 μm is 0.30-0.33 mm, the probability of deformation is extremely high after hydrogen reduction, in order to solve the problem of deformation of the microchannel plate with the aperture of 6 μm, other performances are sacrificed in the manufacturing process, and specific process improvement is specially carried out, so that the problem of deformation is solved to a certain extent, but when the thickness is close to the lower limit of 0.30mm, the probability of deformation is still extremely high. The deformation of the microchannel plate not only affects the mechanical strength, but also deteriorates the resolution and uniformity of the two-dimensional electronic image of the microchannel plate. In the coupling process with CCD, the coupling efficiency is reduced by 10% -20%.
Therefore, with the continuous improvement of the requirements of the device on resolution, imaging definition, detection signal limit and the like, the problem that the performance of the microchannel plate cannot meet the use requirements of the device is more and more remarkable, and especially the problem of reliability caused by the deformation of the microporous array and the reduction of strength due to the reduction of the thickness limited by the length-diameter ratio becomes a key for limiting the performance improvement of the microchannel plate.
Disclosure of Invention
The invention mainly aims to provide edge-covering glass, a preparation method thereof, a method for preparing a microchannel plate by using the edge-covering glass and the microchannel plate, and aims to solve the technical problems of improving the edge-covering strength and the deformation resistance of the edge-covering glass so as to prepare an ultrathin microchannel plate.
The aim and the technical problems of the invention are realized by adopting the following technical proposal. The invention provides edge-covering glass which comprises the following components in percentage by mass:
SiO 2 :40~45%;
Al 2 O 3 :4~6%;
PbO:18~22%;
ZrO 2 :4~5%;
TiO 2 :3~4%;
BaO:5~6%;
Bi 2 O 3 :7~8%;
K 2 o:3 to 4 percent; and
Na 2 O:6~8%。
the aim and the technical problems of the invention can be further realized by adopting the following technical measures.
Preferably, the aforementioned coated glass, wherein the expansion coefficient of the coated glass is 70 to 80×10 -7 The softening temperature is 700-720 ℃, the chemical stability is 1 grade, and the crystallization resistance temperature is 850 ℃.
The aim of the invention and the technical problems are also achieved by adopting the following technical proposal. The invention provides a preparation method of edge-covering glass, which comprises the following steps:
uniformly mixing all components of the edge-coated glass to obtain a glass batch; wherein, each component of the edge-covering glass comprises the following components in percentage by mass: siO (SiO) 2 :40~45%;Al 2 O 3 :4~6%;PbO:18~22%;ZrO 2 :4~5%;TiO 2 :3~4%;BaO:5~6%;Bi 2 O 3 :7~8%;K 2 O:3 to 4 percent; and Na (Na) 2 O:6~8%;
And (3) carrying out high-temperature melting and clarification on the glass batch, and carrying out casting molding and precision annealing to obtain the edge-covered glass.
The aim and the technical problems of the invention can be further realized by adopting the following technical measures.
Preferably, the method for preparing the edge-coated glass, wherein the glass batch is melted and clarified at high temperature comprises the following steps:
feeding the glass batch at 1000-1100 ℃;
and (3) heating to 1480-1550 ℃ to carry out high-temperature melting and clarification, wherein the high-temperature melting and clarification time is 4.0-5.0 h.
Preferably, the method for preparing the edge-coated glass includes: cooling the molten and clarified glass liquid to 1000-1100 ℃, and then casting and forming at 450-480 ℃;
the precision annealing includes: and (3) carrying out precision annealing on the formed glass at the temperature of 450-500 ℃ for 4-5 h.
The aim of the invention and the technical problems are also achieved by adopting the following technical proposal. The invention provides a preparation method of a microchannel plate, which comprises the following steps:
processing the edge-coated glass into an edge-coated glass tube with a regular dodecagon cross section, and sealing one end of the edge-coated glass tube;
carrying out excircle processing on the edge-covered glass tube with one sealed end to obtain an edge-covered glass structure with a round outer wall cross section and a regular dodecagon inner wall cross section;
and arranging multifilaments of core glass and sheath glass of the microchannel plate in the edge-covering glass structure, performing melt-press forming to obtain a blank plate of the microchannel plate, and performing aftertreatment to obtain the microchannel plate.
The aim and the technical problems of the invention can be further realized by adopting the following technical measures.
Preferably, the preparation method of the microchannel plate comprises the following steps:
making core glass into a core glass rod, making sheath glass into a sheath glass tube, embedding the sheath glass tube on the core glass rod, and drawing the sheath glass tube by monofilaments and multifilaments to obtain multifilaments; wherein the core material glass is borate core glass; the cladding glass is high-lead silicate glass.
Preferably, in the method for preparing a microchannel plate, the cross section of the multifilament is regular hexagon, and the relationship between the side length a of the regular dodecagon and the side length b of the regular hexagon is as follows: a=nb+c, wherein n is an integer greater than 5, and c is 0.05 to 0.1mm.
Preferably, in the preparation method of the microchannel plate, the temperature of the melt-press molding is 600-630 ℃, the pressure is 2-3 MPa, and the time is 40-50 min.
The aim of the invention and the technical problems are also achieved by adopting the following technical proposal. According to the microchannel plate provided by the invention, the microchannel plate is prepared by the preparation method of any one of the microchannel plates, the microchannel plate has a circular structure, the outer diameter of the microchannel plate is 20-30mm, the thickness of the microchannel plate is 0.20-0.25 mm, the flatness is less than or equal to 15 mu m, and the opening area ratio is more than 60%. .
By means of the technical scheme, the coated glass and the preparation method thereof, the method for preparing the microchannel plate by using the coated glass and the microchannel plate have at least the following advantages:
1. the binding glass provided by the invention has stronger binding strength and deformation resistance through the design of the components and the content thereof, and can be used for preparing ultrathin microchannel plates. The microchannel plate prepared by adopting the coated glass has good deformation resistance on the premise of being very thin (0.20-0.25 mm).
2. The expansion coefficient of the edge-coated glass provided by the invention is 70-80 multiplied by 10 -7 The softening temperature is 700-720 ℃, the chemical stability is 1 level, the crystallization resistance temperature reaches 850 ℃, and the glass can be accurately matched with the performance of the microchannel plate cladding glass.
3. The glass melting method provided by the invention can obtain the edge-covered glass material with uniform structure and low internal defects, and further improve the strength and deformation resistance of the edge-covered glass;
4. by adopting the integral edge-covering technology, the microchannel plate blank with high structural strength can be prepared.
5. By implementing the high-strength anti-deformation edging glass component design, the fusion technology and the integral edging technology, the deformation of the microchannel plate can be effectively controlled, and the problem of deformation of the microchannel plate with the thickness of 0.20-0.25 mm is solved.
The foregoing description is only an overview of the present invention, and is intended to provide a better understanding of the present invention, as it is embodied in the following description, with reference to the preferred embodiments of the present invention and the accompanying drawings.
Drawings
FIG. 1 is a schematic diagram of a microchannel plate edge-wrapping structure according to an embodiment of the present invention;
fig. 2 shows a schematic view of an air-melting structure of a microchannel plate according to an embodiment of the invention.
Detailed Description
In order to further describe the technical means and effects adopted by the invention to achieve the preset aim, the following description refers to the attached drawings and the preferred embodiments, wherein the coated glass and the preparation method thereof, the method for preparing the microchannel plate by using the coated glass and the microchannel plate, and the specific implementation, structure, characteristics and effects thereof are described in detail below. In the following description, different "an embodiment" or "an embodiment" do not necessarily refer to the same embodiment. Furthermore, the particular features, structures, or characteristics of one or more embodiments may be combined in any suitable manner.
The invention provides edge-covering glass, which comprises the following components in percentage by mass:
SiO 2 :40~45%;
Al 2 O 3 :4~6%;
PbO:18~22%;
ZrO 2 :4~5%;
TiO 2 :3~4%;
BaO:5~6%;
Bi 2 O 3 :7~8%;
K 2 o:3 to 4 percent; and
Na 2 O:6~8%。
the edge glass of the present embodiment is formed by simultaneously introducing ZrO 2 And TiO 2 And the content of the two is controlled to be 7-9%, so that the strength of the glass is improved.
The binding glass of the embodiment is high-strength and deformation-resistant binding glass, can be used for preparing ultrathin micro-channel plates, and has good deformation resistance even if the micro-channel plates are very thin (0.20-0.25 mm).
Further, the composition comprises the following components in percentage by mass:
SiO 2 :43.5%;
Al 2 O 3 :5.0%;
PbO:19.5%;
ZrO 2 :4.0%;
TiO 2 :3.5%;
BaO:5.0%;
Bi 2 O 3 :7.5%;
K 2 o:4.0%; and
Na 2 O:8.0%。
in the present embodiment, siO 2 -PbO-Bi 2 O 3 The glass system is a glass system commonly used for microchannel plate cladding, and in order to realize accurate matching with the performance of the microchannel plate cladding, the edge-covered glass designed by the invention adopts SiO 2 -PbO-Bi 2 O 3 The composition is designed and adjusted to obtain high strength, deformation resistant coated glass based on the base glass system. Wherein:
SiO 2 the glass is formed into oxide, is a basic skeleton of a glass structure, is a main component of the edge-covering glass, and has poor chemical stability and low strength when the content is lower than 40.0 percent; when the content exceeds 45%, the high-temperature viscosity of the glass increases, so that the thermal expansion coefficient of the glass increases, and the performance of the glass is not matched with that of the cladding glass. Thus, the first and second substrates are bonded together,SiO 2 the content of (2) is 40.0% -45.0%.
The proper amount of PbO is added into the glass, so that the effect of reducing the melting temperature of the glass can be achieved, but when the content is too high, the grid of the glass can be damaged, and the strength and the chemical stability of the glass are reduced. Therefore, the PbO content is preferably 18.0 to 22.0%.
Bi 2 O 3 Is fluxing agent of glass, and a proper amount of Bi is added into the glass 2 O 3 Can improve the glass forming property and the thermal processing property of the glass, but when Bi 2 O 3 When the content is too high, the strength of the glass may be lowered. Therefore, bi 2 O 3 The content is preferably 7.0 to 8.0 percent.
Al 2 O 3 Is a network intermediate oxide, and Al is added into a glass system in a certain proportion 2 O 3 Due to Al 3+ The glass has larger volume and can enter a glass network, so that the stability of the framework is enhanced, free oxygen in the glass is consumed, and the strength and chemical stability of the glass can be improved. But when Al 2 O 3 When the content is too high, the high-temperature viscosity of the glass can be obviously increased, so that the melting temperature of the glass is increased. Thus, al 2 O 3 The content is 4.0-6.0%.
ZrO 2 And TiO 2 The ionic radius of the glass is larger, and the ionic coordination number is high, so that the glass cannot enter a network and is positioned in a network gap, and the components with large ionic radius are added into the glass, so that the glass structure becomes compact, and the improvement of the strength and chemical stability of the glass is facilitated. However, when the content is too high, the viscosity of the glass increases sharply, which is disadvantageous for melting the glass. Thus, zrO 2 The content of (2) is 4.0-5.0%, tiO 2 The content of (3.0-4.0%).
BaO is a network exosome oxide and is a cosolvent of glass, and proper amount of BaO is added into the glass to improve the glass forming property and the hot working property of the glass, but the content is too high, so that the glass is unstable and the glass is split. Therefore, the BaO content is 5.0% -6.0%.
K 2 O and Na 2 O is an oxide of an external glass networkThe glass is easy to migrate and diffuse in the glass, the high-temperature viscosity of the glass can be reduced, the glass is easy to fuse, and the thermal expansion coefficient of the glass can be changed and regulated. However, too high a content of the two may decrease the chemical stability and strength of the glass. Thus, K is 2 O:3.0%~4.0%,Na 2 O:6.0%~8.0%。
The invention also provides a preparation method of the edge-coated glass, which comprises the following steps:
(1) Accurately weighing the glass components, placing the glass components in a mixer for mixing, and fully and uniformly mixing the components to form a glass batch;
(2) Heating the glass melting furnace to 1000-1100 ℃, and after the temperature is stable, uniformly adding the fully mixed batch into a high-purity alumina crucible for 2-3 times;
(3) Raising the temperature of the melting furnace to 1480-1550 ℃ for high-temperature melting and clarification of glass, wherein the clarification time is 4.0-5.0 h; in the clarification process, continuously stirring the glass liquid to remove bubbles in the glass liquid, and homogenizing the components;
(4) The temperature of molten and clarified glass liquid is reduced to 1000-1100 ℃, and then the molten and clarified glass liquid is slowly poured into a die with the temperature of 450-480 ℃ for molding; in this step, a glass rod is preferably formed.
(5) And (3) placing the formed glass in a high-precision annealing furnace for precise annealing at the temperature of 450-500 ℃ for 4-5 hours to eliminate residual stress in the glass and improve the strength of the glass.
Further, the expansion coefficient of the prepared edge-coated glass is 70 to 80 multiplied by 10 by adopting the glass formula and the melting technology -7 The softening temperature is 700-720 ℃, the chemical stability is 1 level, the crystallization resistance temperature reaches 850 ℃, the temperature is accurately matched with the glass performance of the microchannel plate cladding, and the MCP structure strength is effectively enhanced.
The preparation method of the microchannel plate provided by one embodiment of the invention adopts the integral edging technology of the edging glass, as shown in fig. 1, and specifically comprises the following steps:
(1) Processing the edge-coated glass into an edge-coated glass tube, shaping the edge-coated glass tube as shown in a of fig. 1 to obtain an edge-coated glass tube with a regular dodecagon cross section, and sealing one end of the edge-coated glass tube;
specifically, the edge-covered glass tube is placed in a regular dodecagon mold, and after heating and softening, the edge-covered glass tube is shaped to obtain an edge-covered glass tube with a regular dodecagon cross section, as shown in b in fig. 1; heating one end of the edge-covered glass tube by utilizing oxyhydrogen flame to melt and soften the edge-covered glass tube, and sealing the bottom; one end of the obtained edge-wrapped glass tube is sealed, and the other end is opened.
(2) Carrying out excircle processing on the edge-covered glass tube with one sealed end to obtain an edge-covered glass structure with a round outer wall cross section and a regular dodecagon inner wall cross section;
the method specifically comprises the following steps: placing the regular dodecagon-shaped edge-wrapped glass tube obtained in the step (1) on an outer circle grinding machine for rounding to obtain an edge-wrapped glass structure, wherein the cross section of the outer wall of the edge-wrapped glass structure is circular, and the cross section of the inner wall of the edge-wrapped glass structure is regular dodecagon as shown in c in fig. 1;
(3) Arranging multifilaments of core glass and cladding glass of the microchannel plate in the edge-covered glass structure obtained in the step (2), carrying out melt-press forming to obtain a blank plate of the microchannel plate, and carrying out aftertreatment to obtain the microchannel plate;
the preparation method of the multifilament of the core material glass and the sheath material glass of the microchannel plate comprises the following steps: making core glass into a core glass rod, making sheath glass into a sheath glass tube, embedding the sheath glass tube on the core glass rod, and drawing the sheath glass tube by monofilaments and multifilaments to obtain multifilaments; wherein the core material glass is borate core glass; the cladding glass is high-lead silicate glass.
Specifically, the multifilaments of the core glass and the sheath glass of the microchannel plate are precisely arranged in the edge glass structure obtained in the step (2) through the open end of the glass tube, which corresponds to the regular arrangement of the multifilaments, and the structure shown in d in fig. 1 is obtained.
In some embodiments, the multifilament yarn has a regular hexagonal cross section; the relationship between the side length a of the regular dodecagon of the edge-covered glass tube and the side length b of the regular hexagon is as follows: a=nb+c, where n is an integer greater than 5, and c=0.05 to 0.1mm.
(4) Placing the structure obtained in the step (3) in a vacuum air melting and pressing furnace for melting and pressing forming, wherein the melting and pressing temperature is 600-630 ℃, the pressure is 2-3 MPa, and the melting and pressing time is 40-50 min; the micro-channel plate blank is obtained, the vacuum pumping is carried out by adopting a mechanical pump and a molecular pump, and the vacuum degree is superior to 10 -4 Pa, as shown in FIG. 2, 1 is a micro-channel plate blank, 2 is a vacuum melting furnace, and the micro-channel plate is obtained through post-treatment.
In this step, the post-processing includes: slicing, chamfering, grinding and polishing, and physicochemical treatment.
In this step, the microchannel plate blank comprises a sheath glass, a core glass, and a cover glass.
Further, embedding a skin glass tube on a core glass rod, drawing by using monofilaments and multifilament, arranging the multifilament in a binding glass structure regularly, melting and pressing to obtain Mao Piduan, and slicing, chamfering, grinding and polishing the blank section to obtain a blank plate; wherein, the blank plate comprises a piece of skin glass, a piece of core glass and a piece of edge glass.
Another embodiment of the invention provides a micro-channel plate which is of a circular structure, the outer diameter of the micro-channel plate is 20-30mm, preferably 25mm, the thickness of the micro-channel plate is 0.20-0.25 mm, the flatness is less than or equal to 15 mu m, and the opening area ratio is more than 60%.
The invention will be further described with reference to specific examples, which are not to be construed as limiting the scope of the invention, but rather as falling within the scope of the invention, since numerous insubstantial modifications and adaptations of the invention will now occur to those skilled in the art in light of the foregoing disclosure.
In the following examples of the present invention, unless otherwise indicated, all components referred to are commercially available products known to those skilled in the art, and unless otherwise indicated, all methods referred to are conventional.
In the following examples, the opening area ratio was measured by an optical microscope and the formula was: open area ratio=0.906× (D/D) 2 Wherein d represents the aperture of the microchannel plate,d represents the center distance of the microchannel plates.
Example 1
The preparation method of the coated glass comprises the following steps:
(1) Precisely weighing the components according to the formula (in mass percent) in the embodiment 1 of the table 1, putting the components into a mixer for mixing, and fully and uniformly mixing the components to form a glass batch;
(2) Heating a glass melting furnace to 1000 ℃, and uniformly adding the fully mixed batch into a high-purity alumina crucible for 3 times after the temperature is stable;
(3) Raising the temperature of the melting furnace to 1480 ℃ for high-temperature melting and clarification of glass, wherein the clarification time is 5.0h; in the clarification process, continuously stirring the glass liquid to remove bubbles in the glass liquid, and homogenizing the components;
(4) The temperature of molten and clarified glass liquid is reduced to 1000 ℃, and then the molten and clarified glass liquid is slowly poured into a mould with the temperature of 450 ℃ for molding;
(5) And (3) placing the formed glass in a high-precision annealing furnace for precision annealing at the annealing temperature of 450 ℃ for 5 hours to obtain the edge-covered glass.
The performance of the coated glass was measured by GB/T7962-2010 optical glass test method and is shown in Table 1.
Example 2
The preparation method of the coated glass comprises the following steps:
(1) Precisely weighing the components according to the formula (in mass percent) in the embodiment 2 of the table 1, putting the components into a mixer for mixing, and fully and uniformly mixing the components to form a glass batch;
(2) Heating a glass melting furnace to 1100 ℃, and after the temperature is stable, uniformly adding the fully mixed batch into a high-purity alumina crucible for 2 times;
(3) Raising the temperature of the melting furnace to 1550 ℃, and carrying out high-temperature melting and clarification of glass, wherein the clarification time is 4.0h; in the clarification process, continuously stirring the glass liquid to remove bubbles in the glass liquid, and homogenizing the components;
(4) The temperature of molten and clarified glass liquid is reduced to 1100 ℃, and then the molten and clarified glass liquid is slowly poured into a mould with the temperature of 480 ℃ for molding;
(5) And (3) placing the formed glass in a high-precision annealing furnace for precision annealing at 500 ℃ for 4 hours to obtain the edge-covered glass.
The performance of the coated glass was measured using the GB/T7962-2010 optical glass test method and is shown in Table 1.
Example 3
The preparation method of the coated glass comprises the following steps:
(1) Precisely weighing the components according to the formula (in mass percent) in the embodiment 3 of the table 1, putting the components into a mixer for mixing, and fully and uniformly mixing the components to form a glass batch;
(2) Heating a glass melting furnace to 1050 ℃, and after the temperature is stable, uniformly adding the fully mixed batch into a high-purity alumina crucible for 2 times;
(3) Raising the temperature of the melting furnace to 1500 ℃, and carrying out high-temperature melting and clarification of glass, wherein the clarification time is 4.5h; in the clarification process, continuously stirring the glass liquid to remove bubbles in the glass liquid, and homogenizing the components;
(4) The temperature of molten and clarified glass liquid is reduced to 1050 ℃, and then the molten and clarified glass liquid is slowly poured into a mould with the temperature of 460 ℃ for molding;
(5) And (3) placing the formed glass in a high-precision annealing furnace for precision annealing at 480 ℃ for 4.5 hours to obtain the edge-covered glass.
The performance of the coated glass was measured using the GB/T7962-2010 optical glass test method and is shown in Table 1.
Example 4
The preparation method of the coated glass comprises the following steps:
(1) Precisely weighing the components according to the formula (in mass percent) in the example 4 of the table 1, putting the components into a mixer for mixing, and fully and uniformly mixing the components to form a glass batch;
(2) Heating a glass melting furnace to 1000 ℃, and uniformly adding the fully mixed batch into a high-purity alumina crucible for 3 times after the temperature is stable;
(3) Raising the temperature of the melting furnace to 1480 ℃ for high-temperature melting and clarification of glass, wherein the clarification time is 5.0h; in the clarification process, continuously stirring the glass liquid to remove bubbles in the glass liquid, and homogenizing the components;
(4) The temperature of molten and clarified glass liquid is reduced to 1000 ℃, and then the molten and clarified glass liquid is slowly poured into a mould with the temperature of 450 ℃ for molding;
(5) And (3) placing the formed glass in a high-precision annealing furnace for precision annealing at the annealing temperature of 450 ℃ for 5 hours to obtain the edge-covered glass.
GB/T7962-2010 optical glass test method detects the performance of the edge-coated glass, and the performance is shown in Table 1.
Comparative example 1
A preparation method of a coated glass, each component was precisely weighed according to the formulation (in mass percent) in comparative example 1 of Table 1, and the procedure was the same as in example 1 except that the content of each component was different.
The performance of the coated glass was measured by GB/T7962-2010 optical glass test method and is shown in Table 1.
Comparative example 2
A preparation method of a coated glass, each component was precisely weighed according to the formulation (in mass percent) in comparative example 2 of Table 1, and the procedure was the same as in example 1 except that the content of each component was different.
The performance of the coated glass was measured by GB/T7962-2010 optical glass test method and is shown in Table 1.
Comparative example 3
A preparation method of a coated glass, each component was precisely weighed according to the formulation (in mass percent) in comparative example 3 of Table 1, and the procedure was the same as in example 1 except that the content of each component was different.
The performance of the coated glass was measured by GB/T7962-2010 optical glass test method and is shown in Table 1.
As can be seen from Table 1, the coated glass prepared in examples 1 to 4 had an expansion coefficient of 70 to 80X 10 -7 The softening temperature is 700-720 ℃, the chemical stability is 1 grade, and the crystallization resistance temperature is 850 ℃. The glass coated with the glass prepared in comparative examples 1 to 3 was crystallized and phase separated, and was not glass. ZrO in comparative example 1 2 And TiO 2 The glass has low elastic modulus and poor strength without addition; comparative example 2 in which ZrO was added only 2 Without addition of TiO 2 Comparative example 3 where only TiO was added 2 Without addition of ZrO 2 Crystallization, phase separation and no glass formation occur. ZrO (ZrO) 2 And TiO 2 The case where the addition amount is large (both are more than 9.0%): glass cannot be formed, ceramic is formed, and phase separation is serious.
Example 5
The preparation method of the microchannel plate adopts an integral package Bian Fa and specifically comprises the following steps:
(1) Processing the edge-coated glass of the embodiment 1 into an edge-coated glass tube, placing the edge-coated glass tube into a regular dodecagon mold for shaping, and sealing the bottom;
(2) Placing the regular dodecagon-shaped edge-wrapped glass tube obtained in the step (1) on an outer circle grinding machine for outer circle processing;
(3) Accurately arranging multifilaments of the microchannel plate core glass and the cladding glass in the edge-covered glass tube obtained in the step (2) through one end of the glass tube opening;
(4) Placing the structure obtained in the step (3) in a vacuum air melting and pressing furnace for melting and pressing forming, wherein the melting and pressing temperature is 630 ℃, the pressure is 3MPa, and the melting and pressing time is 50min; and (3) obtaining a microchannel plate blank, cutting the obtained microchannel plate blank into thin slices with the thickness of 0.20mm, chamfering, grinding and polishing, and performing physical and chemical treatment to obtain the microchannel plate, wherein the opening area ratio of the microchannel plate obtained in the embodiment is larger than 60 percent through detection.
The flatness of the micro-channel plate is less than or equal to 15 mu m by using a laser interferometer, which shows that the micro-channel plate still has good deformation resistance when the thickness is 0.20 mm.
In the foregoing embodiments, the descriptions of the embodiments are emphasized, and for parts of one embodiment that are not described in detail, reference may be made to related descriptions of other embodiments.
The present invention is not limited to the above-mentioned embodiments, but is intended to be limited to the following embodiments, and any modifications, equivalents and modifications can be made to the above-mentioned embodiments without departing from the scope of the invention.

Claims (9)

1. The preparation method of the microchannel plate is characterized by comprising the following steps of:
processing the edge-covering glass into an edge-covering glass tube, shaping to obtain an edge-covering glass tube with a regular dodecagon cross section, and sealing one end of the edge-covering glass tube;
carrying out excircle processing on the edge-covered glass tube with one sealed end to obtain an edge-covered glass structure with a round outer wall cross section and a regular dodecagon inner wall cross section;
arranging multifilament of core material glass and cladding material glass of the microchannel plate in the edge-covering glass structure, carrying out melt-pressing forming to obtain a blank plate of the microchannel plate, and carrying out aftertreatment to obtain the microchannel plate;
the edge-covering glass comprises the following components in percentage by mass:
SiO 2 :40~45%;
Al 2 O 3 :4~6%;
PbO:18~22%;
ZrO 2 :4~5%;
TiO 2 :3~4%;
BaO:5~6%;
Bi 2 O 3 :7~8%;
K 2 o:3 to 4 percent; and
Na 2 O:6~8%。
2. the method of manufacturing a microchannel plate according to claim 1, wherein the method of manufacturing multifilaments of core glass and sheath glass of the microchannel plate comprises:
making core glass into a core glass rod, making sheath glass into a sheath glass tube, embedding the sheath glass tube on the core glass rod, and drawing the sheath glass tube by monofilaments and multifilaments to obtain multifilaments; wherein the core material glass is borate core glass; the cladding glass is high-lead silicate glass.
3. The method for preparing a microchannel plate according to claim 1 or 2, wherein the cross section of the multifilament is regular hexagon, and the relationship between the side length a of the regular dodecagon and the side length b of the regular hexagon is as follows: a=nb+c, wherein n is an integer greater than 5, and c is 0.05 to 0.1mm.
4. The method for preparing a microchannel plate according to claim 1, wherein the temperature of the melt-press molding is 600-630 ℃, the pressure is 2-3 MPa, and the time is 40-50 min.
5. The method for manufacturing a micro-channel plate according to claim 1, wherein the expansion coefficient of the coated glass is 70-80 x 10 -7 The softening temperature is 700-720 ℃, the chemical stability is 1 grade, and the crystallization resistance temperature is 850 ℃.
6. The method for manufacturing a microchannel plate according to claim 1, wherein the method for manufacturing the coated glass comprises the steps of:
uniformly mixing all components of the edge-coated glass to obtain a glass compoundMixing materials; wherein, each component of the edge-covering glass comprises the following components in percentage by mass: siO (SiO) 2 :40~45%;Al 2 O 3 :4~6%;PbO:18~22%;ZrO 2 :4~5%;TiO 2 :3~4%;BaO:5~6%;Bi 2 O 3 :7~8%;K 2 O:3 to 4 percent; and Na (Na) 2 O:6~8%;
And (3) carrying out high-temperature melting and clarification on the glass batch, and carrying out casting molding and precision annealing to obtain the edge-covered glass.
7. The method of manufacturing a microchannel plate as set forth in claim 6, wherein the high temperature melting and refining of the glass batch comprises:
feeding the glass batch at 1000-1100 ℃;
and (3) heating to 1480-1550 ℃ to carry out high-temperature melting and clarification, wherein the high-temperature melting and clarification time is 4.0-5.0 h.
8. The method for preparing a micro-channel plate according to claim 6, wherein,
the casting molding comprises the following steps: cooling the molten and clarified glass liquid to 1000-1100 ℃, and then casting and forming at 450-480 ℃;
the precision annealing includes: and (3) carrying out precision annealing on the formed glass at the temperature of 450-500 ℃ for 4-5 h.
9. The microchannel plate is characterized in that the microchannel plate is prepared by the preparation method of the microchannel plate as claimed in any one of claims 1 to 8, the microchannel plate has a circular structure, the outer diameter of the microchannel plate is 20 to 30mm, the thickness of the microchannel plate is 0.20 to 0.25mm, the flatness is less than or equal to 15 mu m, and the opening area ratio is more than 60%.
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