CN114167822B - Vacuum process control method and device, terminal equipment and storage medium - Google Patents
Vacuum process control method and device, terminal equipment and storage medium Download PDFInfo
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- CN114167822B CN114167822B CN202111304849.4A CN202111304849A CN114167822B CN 114167822 B CN114167822 B CN 114167822B CN 202111304849 A CN202111304849 A CN 202111304849A CN 114167822 B CN114167822 B CN 114167822B
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- 238000000034 method Methods 0.000 title claims abstract description 43
- 238000004886 process control Methods 0.000 title claims abstract description 22
- 238000003860 storage Methods 0.000 title claims abstract description 17
- 238000004088 simulation Methods 0.000 claims abstract description 85
- 239000003990 capacitor Substances 0.000 claims abstract description 69
- 238000004364 calculation method Methods 0.000 claims abstract description 29
- 238000011156 evaluation Methods 0.000 claims abstract description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 11
- 238000004590 computer program Methods 0.000 claims description 23
- 230000008569 process Effects 0.000 claims description 15
- 239000012530 fluid Substances 0.000 claims description 3
- 238000009489 vacuum treatment Methods 0.000 abstract description 14
- 238000004519 manufacturing process Methods 0.000 description 12
- 230000006870 function Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
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- 238000005086 pumping Methods 0.000 description 3
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- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract
The invention discloses a vacuum process control method, a device, terminal equipment and a storage medium, wherein the method comprises the following steps: establishing a finite element simulation model according to the geometric dimension of the interior of the vacuum box and the geometric dimension of the capacitor unit; setting a condition boundary related to a finite element simulation model according to the positions of an air pressure sensor arranged at each oil filling port in the vacuum box, an air pressure sensor arranged at an air outlet of the vacuum box and the positions of an air speed sensor; acquiring sensor data acquired by all air pressure sensors and air speed sensors; setting parameters of each condition boundary according to the sensor data; performing simulation calculation according to the finite element simulation model and the condition boundary to obtain a simulation result; the simulation results include the air pressure and water content inside each capacitor unit; and evaluating the vacuum degree in each capacitor unit according to the simulation result, and judging whether the vacuumizing reaches the standard or not according to the evaluation result. The method can realize the evaluation of the vacuum degree of the capacitor unit and improve the consistency of vacuum treatment.
Description
Technical Field
The present invention relates to the field of manufacturing technologies, and in particular, to a method and apparatus for controlling a vacuum process, a terminal device, and a storage medium.
Background
The high-voltage oil-immersed capacitor is a main reactive compensation device in a power system, and the performance and the service life of the high-voltage oil-immersed capacitor have important significance for the economic and safe operation of a power grid. In the capacitor production process, the vacuum impregnation step is an important process for influencing the capacitor loss, partial discharge and service life. At present, two vacuum processes are generally adopted, namely, single pumping and single injection, namely, independently pumping vacuum and independently injecting impregnant into each capacitor unit; secondly, vacuumizing a plurality of capacitors simultaneously, and injecting impregnant simultaneously. The second process has simple vacuumizing process and low cost, is suitable for mass production, and is widely applied.
When a plurality of capacitors are simultaneously vacuumized, the product is usually placed in a larger vacuum box, and then the vacuum pump is started, so that the air pressure in the vacuum box is gradually reduced. When the vacuum degree reaches the requirement, after a period of time, the air and moisture in the capacitor unit are sufficiently removed, and the impregnating agent starts to be injected. However, since the capacitor units are distributed at different positions in the vacuum box, the air pressure near the capacitor units and the molecular flow rate at high vacuum degree are different in the vacuumizing process, so that the vacuum degree in each capacitor unit is different in the same time. For example, at the same time, the vacuum inside the capacitor unit far from the outlet of the vacuum pump is lower than the vacuum inside the capacitor unit near the outlet of the vacuum pump. In addition, the relationship between the partial discharge level, loss, service life and the like of the capacitor unit and vacuum treatment is great, and the quality of products is seriously affected by insufficient vacuum treatment.
In summary, the existing vacuum process method is difficult to evaluate the internal vacuum degree of the capacitor unit, and consistency and reliability of the capacitor product cannot be ensured.
Disclosure of Invention
The embodiment of the invention provides a vacuum process control method, a device, terminal equipment and a storage medium, which are used for realizing the evaluation of the vacuum degree of a capacitor unit and improving the consistency of vacuum treatment.
In order to solve the above technical problems, an embodiment of the present invention provides a vacuum process control method, including:
establishing a finite element simulation model according to the geometric dimension of the interior of the vacuum box and the geometric dimension of the capacitor unit;
setting a condition boundary related to the finite element simulation model according to the positions of an air pressure sensor arranged at each oil filling port in the vacuum box, an air pressure sensor arranged at an air outlet of the vacuum box and the positions of an air speed sensor;
acquiring sensor data acquired by all air pressure sensors and air speed sensors;
setting parameters of each condition boundary according to the sensor data;
performing simulation calculation according to the finite element simulation model and the condition boundary to obtain a simulation result; wherein the simulation results include air pressure and water content inside each capacitor unit;
and evaluating the vacuum degree in each capacitor unit according to the simulation result, and judging whether the vacuumizing reaches the standard or not according to the evaluation result.
Preferably, the evaluating the vacuum degree inside each capacitor unit according to the simulation result, and judging whether the vacuuming meets the standard according to the evaluation result, includes:
when the air pressure inside each capacitor unit is less than 10pa and the water content is less than 10ppm, it is determined that the evacuation phase is up to standard.
Preferably, the method further comprises:
after a preset time interval, acquiring sensor data acquired by all air pressure sensors and air speed sensors again so as to update the sensor data;
and setting parameters of each condition boundary according to the updated sensor data, and performing simulation calculation again.
Preferably, the time interval is from 5 seconds to 5 minutes.
Preferably, the distance of the grid nodes of the finite element simulation model is not more than 1/5 of the minimum size of the capacitor cells.
Preferably, the finite element simulation model includes a fluid model, a thermodynamic model, and a molecular flow model.
In a second aspect, the present invention provides a vacuum process control apparatus comprising:
the model building module is used for building a finite element simulation model according to the geometric dimension inside the vacuum box and the geometric dimension of the capacitor unit;
the condition boundary setting module is used for setting a condition boundary related to the finite element simulation model according to the position of an air pressure sensor arranged at each oil filling port in the vacuum box, the position of an air pressure sensor arranged at an air outlet of the vacuum box and the position of an air velocity sensor;
the data acquisition module is used for acquiring sensor data acquired by all the air pressure sensors and the air speed sensors;
the parameter setting module is used for setting the parameter of each condition boundary according to the sensor data;
the simulation calculation module is used for performing simulation calculation according to the finite element simulation model and the condition boundary to obtain a simulation result; wherein the simulation results include air pressure and water content inside each capacitor unit;
and the evaluation module is used for evaluating the vacuum degree in each capacitor unit according to the simulation result and judging whether the vacuumizing reaches the standard according to the evaluation result.
Preferably, the apparatus further comprises:
the data updating module is used for acquiring the sensor data acquired by all the air pressure sensors and the air speed sensors again after a preset time interval so as to update the sensor data;
and the parameter updating module is used for setting the parameters of each condition boundary according to the updated sensor data and carrying out simulation calculation again.
In a third aspect, the present invention also provides a terminal device, including a processor, a memory, and a computer program stored in the memory and configured to be executed by the processor, where the processor implements any one of the above vacuum process control methods when executing the computer program.
In a fourth aspect, the present invention further provides a computer readable storage medium, where the computer readable storage medium includes a stored computer program, where when the computer program runs, the computer readable storage medium is controlled to execute the vacuum process control method according to any one of the above methods.
Compared with the prior art, the embodiment of the invention has the following beneficial effects:
according to the invention, through real-time interaction of the finite element simulation model and the sensor data, calculation of the internal vacuum treatment process of the capacitor unit is realized, and a simulation calculation result is obtained, so that the vacuum degree of the capacitor unit is evaluated. The invention can improve the vacuum effect of the capacitor unit, improve the consistency of vacuum treatment, reduce the vacuum treatment time, improve the production efficiency and the product quality and reduce the production cost.
Drawings
FIG. 1 is a flow chart of a vacuum process control method according to a first embodiment of the present invention;
FIG. 2 is a schematic diagram of multiple capacitors being evacuated simultaneously;
fig. 3 is a schematic structural diagram of a vacuum process control apparatus according to a second embodiment of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1, a first embodiment of the present invention provides a vacuum process control method, comprising the steps of:
s11, establishing a finite element simulation model according to the geometric dimension inside the vacuum box and the geometric dimension of the capacitor unit;
s12, setting a condition boundary related to the finite element simulation model according to the positions of an air pressure sensor arranged at each oil filling port in the vacuum box, the positions of an air pressure sensor and an air speed sensor arranged at an air outlet of the vacuum box;
s13, acquiring sensor data acquired by all air pressure sensors and air speed sensors;
s14, setting parameters of each condition boundary according to the sensor data;
s15, performing simulation calculation according to the finite element simulation model and the condition boundary to obtain a simulation result; wherein the simulation results include air pressure and water content inside each capacitor unit;
s16, evaluating the vacuum degree inside each capacitor unit according to the simulation result, and judging whether the vacuumizing reaches the standard or not according to the evaluation result.
In addition, referring to fig. 2, when the vacuum is pumped, the oil filling port in the vacuum tube faces the oil filling port of the capacitor, so that the oil filling port is fixed in position for facilitating arrangement of the oil filling pipe. In practice, it is necessary to arrange a barometric pressure sensor in the vacuum box near each of the oil filling ports. In addition, an air pressure gauge and an air speed sensor are arranged at the air outlet of the vacuum box, so that the vacuum control method provided by the embodiment is conveniently achieved.
In step S11, a finite element simulation model needs to be built according to the geometry inside the vacuum box and the geometry of the capacitor unit. Specifically, a finite element simulation model is built according to the geometric shapes of the space in the vacuum box, the pipeline and the capacitor unit which are practically applied.
Preferably, the distance of the grid nodes of the finite element simulation model is not more than 1/5 of the minimum size of the capacitor cells. When the finite element model is subjected to grid segmentation, the calculation accuracy is seriously affected by overlarge distance among grid nodes, and the distance between the grid nodes is not more than 1/5 of the minimum size of the capacitor unit, so that the accuracy of simulation calculation can be basically ensured to meet the requirement.
Further, the finite element simulation model comprises a fluid model, a thermodynamic model and a molecular flow model, and real-time air pressure, molecular flow and moisture content inside each capacitor unit can be calculated.
In step S12, a condition boundary is set with respect to the finite element simulation model according to the air pressure sensor position of each oil filling port in the vacuum box, the air pressure sensor and the air velocity sensor position of the air outlet of the vacuum box. Specifically, condition boundaries for the simulation calculations, including barometric pressure and temperature, are set at key nodes of all sensor locations. In the implementation, the corresponding air pressure sensor and air speed sensor can be selected according to the actual precision requirement, and the invention is not limited to this.
In steps S13 and S14, sensor data acquired by all air pressure sensors and air velocity sensors are acquired, and parameters of each condition boundary are set according to the sensor data.
In step S15, a simulation calculation is performed according to the finite element simulation model and the condition boundary, so as to obtain a simulation result. Wherein the simulation results include air pressure and water content inside each capacitor unit. Through real-time interaction of finite element simulation and sensor data, calculation of the vacuum treatment process inside the capacitor is realized, so that the vacuum effect of the capacitor unit is improved, meanwhile, blind prolonged vacuum time is avoided, and production cost is reduced.
In step S16, the vacuum degree inside each capacitor unit is evaluated according to the simulation result, and whether the vacuum pumping reaches the standard is determined according to the evaluation result.
Illustratively, the evacuation phase is determined to be up to standard when the air pressure inside each capacitor unit is less than 10pa and the water content is less than 10 ppm. It should be noted that, the specific conditions for reaching the standard of vacuum evacuation are set according to practical applications, and the vacuum evacuation standard in each production process may be different, which is not limited in the present invention.
In a preferred implementation, the method further comprises:
after a preset time interval, acquiring sensor data acquired by all air pressure sensors and air speed sensors again so as to update the sensor data;
and setting parameters of each condition boundary according to the updated sensor data, and performing simulation calculation again.
In an implementation, the actual measurement data may be uploaded to the simulation program in real time to correct the simulation condition boundary. Meanwhile, the pressure, molecular flow, moisture content and the like in the capacitor units are calculated in real time, so that the change of the vacuum degree in different capacitor units along with time can be obtained, and the vacuum treatment results of all the capacitors can be monitored in real time in a quantitative mode.
Illustratively, the time interval is from 5 seconds to 5 minutes. In the initial stage of the vacuum process, the air pressure change is faster, and the finite element simulation model can select a classical thermodynamic model. When using classical thermodynamic models for computation, a shorter time interval is required to ensure that the computation is synchronized with the actual situation. When the vacuum degree is stable step by step, the air pressure in the vacuum box is extremely low, the air and the moisture are mainly embodied in the form of molecular flow, the change is slow, a more precise molecular flow calculation model and a longer time interval can be adopted, and the calculation accuracy is improved.
The existing process flow cannot monitor the air pressure distribution in the vacuum box, so that the control of the vacuum process is not fine, the product dispersibility is high, and the production is not facilitated. In the embodiment, the calculation of the vacuum processing process inside the capacitor unit is realized through real-time interaction of the finite element simulation model and the sensor data, and a simulation calculation result is obtained, so that the vacuum degree of the capacitor unit is evaluated. The invention can improve the vacuum effect of the capacitor unit, improve the consistency of vacuum treatment, reduce the vacuum treatment time, improve the production efficiency and the product quality and reduce the production cost.
Referring to fig. 3, a second embodiment of the present invention provides a vacuum process control apparatus, comprising:
the model building module is used for building a finite element simulation model according to the geometric dimension inside the vacuum box and the geometric dimension of the capacitor unit;
the condition boundary setting module is used for setting a condition boundary related to the finite element simulation model according to the position of an air pressure sensor arranged at each oil filling port in the vacuum box, the position of an air pressure sensor arranged at an air outlet of the vacuum box and the position of an air velocity sensor;
the data acquisition module is used for acquiring sensor data acquired by all the air pressure sensors and the air speed sensors;
the parameter setting module is used for setting the parameter of each condition boundary according to the sensor data;
the simulation calculation module is used for performing simulation calculation according to the finite element simulation model and the condition boundary to obtain a simulation result; wherein the simulation results include air pressure and water content inside each capacitor unit;
and the evaluation module is used for evaluating the vacuum degree in each capacitor unit according to the simulation result and judging whether the vacuumizing reaches the standard according to the evaluation result.
Preferably, the apparatus further comprises:
the data updating module is used for acquiring the sensor data acquired by all the air pressure sensors and the air speed sensors again after a preset time interval so as to update the sensor data;
and the parameter updating module is used for setting the parameters of each condition boundary according to the updated sensor data and carrying out simulation calculation again.
According to the vacuum process control device provided by the embodiment, the calculation of the internal vacuum treatment process of the capacitor unit is realized through real-time interaction of the finite element simulation model and the sensor data, and the simulation calculation result is obtained, so that the vacuum degree of the capacitor unit is evaluated. The invention can improve the vacuum effect of the capacitor unit, improve the consistency of vacuum treatment, reduce the vacuum treatment time, improve the production efficiency and the product quality and reduce the production cost.
The embodiment of the invention also provides terminal equipment. The terminal device includes: a processor, a memory, and a computer program, such as a vacuum process control program, stored in the memory and executable on the processor. The processor, when executing the computer program, implements the steps of the embodiments of the vacuum process control method described above, for example, step S11 shown in fig. 1. Alternatively, the processor, when executing the computer program, performs the functions of the modules/units of the apparatus embodiments described above, such as the evaluation module.
The computer program may be divided into one or more modules/units, which are stored in the memory and executed by the processor to accomplish the present invention, for example. The one or more modules/units may be a series of computer program instruction segments capable of performing the specified functions, which instruction segments are used for describing the execution of the computer program in the terminal device.
The terminal equipment can be a desktop computer, a notebook computer, a palm computer, an intelligent tablet and other computing equipment. The terminal device may include, but is not limited to, a processor, a memory. It will be appreciated by those skilled in the art that the above components are merely examples of terminal devices and do not constitute a limitation of terminal devices, and may include more or fewer components than described above, or may combine certain components, or different components, e.g., the terminal devices may also include input and output devices, network access devices, buses, etc.
The processor may be a central processing unit (Central Processing Unit, CPU), other general purpose processors, digital signal processors (Digital Signal Processor, DSP), application specific integrated circuits (Application Specific Integrated Circuit, ASIC), off-the-shelf programmable gate arrays (Field-Programmable Gate Array, FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, or the like. The general purpose processor may be a microprocessor or the processor may be any conventional processor or the like, which is a control center of the terminal device, and which connects various parts of the entire terminal device using various interfaces and lines.
The memory may be used to store the computer program and/or module, and the processor may implement various functions of the terminal device by running or executing the computer program and/or module stored in the memory and invoking data stored in the memory. The memory may mainly include a storage program area and a storage data area, wherein the storage program area may store an operating system, an application program (such as a sound playing function, an image playing function, etc.) required for at least one function, and the like; the storage data area may store data (such as audio data, phonebook, etc.) created according to the use of the handset, etc. In addition, the memory may include high-speed random access memory, and may also include non-volatile memory, such as a hard disk, memory, plug-in hard disk, smart Media Card (SMC), secure Digital (SD) Card, flash Card (Flash Card), at least one disk storage device, flash memory device, or other volatile solid-state storage device.
Wherein the terminal device integrated modules/units may be stored in a computer readable storage medium if implemented in the form of software functional units and sold or used as stand alone products. Based on such understanding, the present invention may implement all or part of the flow of the method of the above embodiment, or may be implemented by a computer program to instruct related hardware, where the computer program may be stored in a computer readable storage medium, and when the computer program is executed by a processor, the computer program may implement the steps of each of the method embodiments described above. Wherein the computer program comprises computer program code which may be in source code form, object code form, executable file or some intermediate form etc. The computer readable medium may include: any entity or device capable of carrying the computer program code, a recording medium, a U disk, a removable hard disk, a magnetic disk, an optical disk, a computer Memory, a Read-Only Memory (ROM), a random access Memory (RAM, random Access Memory), an electrical carrier signal, a telecommunications signal, a software distribution medium, and so forth. It should be noted that the computer readable medium contains content that can be appropriately scaled according to the requirements of jurisdictions in which such content is subject to legislation and patent practice, such as in certain jurisdictions in which such content is subject to legislation and patent practice, the computer readable medium does not include electrical carrier signals and telecommunication signals.
It should be noted that the above-described apparatus embodiments are merely illustrative, and the units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed over a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment. In addition, in the drawings of the embodiment of the device provided by the invention, the connection relation between the modules represents that the modules have communication connection, and can be specifically implemented as one or more communication buses or signal lines. Those of ordinary skill in the art will understand and implement the present invention without undue burden.
The foregoing embodiments have been provided for the purpose of illustrating the general principles of the present invention, and are not to be construed as limiting the scope of the invention. It should be noted that any modifications, equivalent substitutions, improvements, etc. made by those skilled in the art without departing from the spirit and principles of the present invention are intended to be included in the scope of the present invention.
Claims (10)
1. A method of controlling a vacuum process, comprising:
establishing a finite element simulation model according to the geometric dimension of the interior of the vacuum box and the geometric dimension of the capacitor unit;
setting a condition boundary related to the finite element simulation model according to the positions of an air pressure sensor arranged at each oil filling port in the vacuum box, an air pressure sensor arranged at an air outlet of the vacuum box and the positions of an air speed sensor;
acquiring sensor data acquired by all air pressure sensors and air speed sensors;
setting parameters of each condition boundary according to the sensor data;
performing simulation calculation according to the finite element simulation model and the condition boundary to obtain a simulation result; wherein the simulation results include air pressure and water content inside each capacitor unit;
and evaluating the vacuum degree in each capacitor unit according to the simulation result, and judging whether the vacuumizing reaches the standard or not according to the evaluation result.
2. The method according to claim 1, wherein the step of evaluating the vacuum degree inside each capacitor unit based on the simulation result and judging whether the vacuum is up to the standard based on the evaluation result comprises:
when the air pressure inside each capacitor unit is less than 10pa and the water content is less than 10ppm, it is determined that the evacuation phase is up to standard.
3. The vacuum process control method according to claim 1, further comprising:
after a preset time interval, acquiring sensor data acquired by all air pressure sensors and air speed sensors again so as to update the sensor data;
and setting parameters of each condition boundary according to the updated sensor data, and performing simulation calculation again.
4. A vacuum process control method according to claim 3, wherein the time interval is 5 seconds to 5 minutes.
5. The vacuum process control method according to claim 1, wherein the distance of the finite element simulation model mesh nodes is not more than 1/5 of the minimum size of the capacitor cell.
6. The vacuum process control method of claim 5, wherein the finite element simulation model comprises a fluid model, a thermodynamic model, and a molecular flow model.
7. A vacuum process control apparatus, comprising:
the model building module is used for building a finite element simulation model according to the geometric dimension inside the vacuum box and the geometric dimension of the capacitor unit;
the condition boundary setting module is used for setting a condition boundary related to the finite element simulation model according to the position of an air pressure sensor arranged at each oil filling port in the vacuum box, the position of an air pressure sensor arranged at an air outlet of the vacuum box and the position of an air velocity sensor;
the data acquisition module is used for acquiring sensor data acquired by all the air pressure sensors and the air speed sensors;
the parameter setting module is used for setting the parameter of each condition boundary according to the sensor data;
the simulation calculation module is used for performing simulation calculation according to the finite element simulation model and the condition boundary to obtain a simulation result; wherein the simulation results include air pressure and water content inside each capacitor unit;
and the evaluation module is used for evaluating the vacuum degree in each capacitor unit according to the simulation result and judging whether the vacuumizing reaches the standard according to the evaluation result.
8. The vacuum process control apparatus of claim 7, further comprising:
the data updating module is used for acquiring the sensor data acquired by all the air pressure sensors and the air speed sensors again after a preset time interval so as to update the sensor data;
and the parameter updating module is used for setting the parameters of each condition boundary according to the updated sensor data and carrying out simulation calculation again.
9. A terminal device comprising a processor, a memory and a computer program stored in the memory and configured to be executed by the processor, the processor implementing the vacuum process control method according to any one of claims 1 to 6 when executing the computer program.
10. A computer readable storage medium, characterized in that the computer readable storage medium comprises a stored computer program, wherein the computer program, when run, controls a device in which the computer readable storage medium is located to perform the vacuum process control method according to any one of claims 1 to 6.
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