CN114167532A - Diffraction grating waveguide, preparation method thereof and near-to-eye display device - Google Patents
Diffraction grating waveguide, preparation method thereof and near-to-eye display device Download PDFInfo
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- CN114167532A CN114167532A CN202111506563.4A CN202111506563A CN114167532A CN 114167532 A CN114167532 A CN 114167532A CN 202111506563 A CN202111506563 A CN 202111506563A CN 114167532 A CN114167532 A CN 114167532A
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- 238000002360 preparation method Methods 0.000 title claims abstract description 9
- 238000010146 3D printing Methods 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims description 32
- 238000004519 manufacturing process Methods 0.000 claims description 21
- 238000007639 printing Methods 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 238000012986 modification Methods 0.000 claims description 7
- 230000004048 modification Effects 0.000 claims description 7
- 239000002114 nanocomposite Substances 0.000 claims description 7
- 235000019353 potassium silicate Nutrition 0.000 claims description 7
- 239000005350 fused silica glass Substances 0.000 claims description 6
- 239000010410 layer Substances 0.000 description 26
- 230000003287 optical effect Effects 0.000 description 13
- 239000000758 substrate Substances 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 230000003190 augmentative effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 239000011247 coating layer Substances 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000004438 eyesight Effects 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 206010020675 Hypermetropia Diseases 0.000 description 1
- 102100029469 WD repeat and HMG-box DNA-binding protein 1 Human genes 0.000 description 1
- 101710097421 WD repeat and HMG-box DNA-binding protein 1 Proteins 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004305 hyperopia Effects 0.000 description 1
- 201000006318 hyperopia Diseases 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
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- 239000013307 optical fiber Substances 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
- G02B27/017—Head mounted
- G02B27/0172—Head mounted characterised by optical features
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4205—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
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Abstract
The disclosure relates to a diffraction grating waveguide, a preparation method thereof and near-to-eye display equipment, wherein the preparation method comprises the following steps: acquiring the structural shape and parameters of a prefabricated diffraction grating waveguide; modeling according to the structural shape and parameters of the diffraction grating waveguide to generate a three-dimensional grating waveguide structural model; slicing the three-dimensional grating waveguide structure model layer by layer, and determining slice cross section information of each layer; and sequentially reading the information of the cross section of each layer from bottom to top through a 3D printer, and performing 3D printing through a micro-nozzle to prepare the diffraction grating waveguide.
Description
Technical Field
The disclosure relates to the technical field of near-eye display, in particular to a diffraction grating waveguide, a preparation method thereof and near-eye display equipment.
Background
Near-eye display devices have evolved rapidly as virtual reality and augmented reality technologies have become recognized and accepted. The near-to-eye display in the augmented reality technology can superimpose a virtual image onto a real scene, and simultaneously has perspective characteristic, so that the normal observation of the real scene is not influenced.
The near-eye display in the augmented reality technology mainly comprises a prism, a free-form surface, a diffraction grating waveguide and the like. The prism mode has a small angle of view and a large thickness, and cannot meet the large-scale industrial requirement; the free-form surface mode can realize a larger field angle, but the processing and design difficulty of the curved surface is large, the volume is heavy, and the light weight and portability can not be realized; the diffraction grating waveguide mode is to utilize diffraction of the grating to realize the incidence, turning and emergence of light, utilize the total reflection principle to realize the light transmission, conduct the image of the micro display to the human eye, and then see the virtual image, because the diffraction grating waveguide adopts the total reflection principle the same as the optical fiber technology, the diffraction grating waveguide display element can be made as light and thin as transparent as the ordinary glasses lens, and have bigger display area and field angle, is convenient for integrate and miniaturize, light-weighted, have wide application prospect.
The traditional grating processing technology mainly comprises a holographic interference exposure method, a focused ion beam processing method, an electron beam exposure method and a nano-imprinting method. The holographic interference exposure method can prepare large-area gratings on a glass substrate, but has poor repeatability and low efficiency; the processing precision of the focused ion beam processing method and the electron beam exposure method is high, but the diffraction grating processing with batch and large area can not be carried out, the efficiency is low, and the price is high; the nano-imprinting method requires that an imprinting template is prepared through electron beam exposure and the like, and then the pattern of the imprinting template is transferred to a waveguide substrate, so that the near-eye display diffraction grating waveguide is obtained, and the preparation of the imprinting template is still expensive and low in efficiency.
Disclosure of Invention
To overcome the problems in the related art, the present disclosure provides a diffraction grating waveguide, a method of manufacturing the same, and a near-eye display device.
According to a first aspect of the embodiments of the present disclosure, there is provided a method for manufacturing a diffraction grating waveguide, including:
acquiring the structural shape and parameters of a prefabricated diffraction grating waveguide;
modeling according to the structural shape and parameters of the diffraction grating waveguide to generate a three-dimensional grating waveguide structural model;
slicing the three-dimensional grating waveguide structure model layer by layer, and determining slice cross section information of each layer;
and sequentially reading the information of the cross section of each layer from bottom to top through a 3D printer, and performing 3D printing through a micro-nozzle to prepare the diffraction grating waveguide.
In one embodiment, preferably, the slice cross-section information of each layer is sequentially read from bottom to top by a 3D printer, and 3D printing is performed by a micro-nozzle, including:
sequentially reading the section cross section information of each layer from bottom to top through a 3D printer;
and controlling a micro-nozzle of the 3D printer to coat and cool the liquid glass layer by layer from bottom to top according to the section cross section information of each layer.
In one embodiment, preferably, the liquid glass comprises fused silica nanocomposites.
In one embodiment, preferably, the prefabricated diffraction grating waveguide comprises an incident grating, a turning grating and an exit grating, the incident grating, the turning grating and the exit grating are one-dimensional gratings, the grating structure comprises a rectangular grating, an inclined grating, a blazed grating and a holographic grating, and the shape, the size and the size of the grating area are optimally set according to requirements.
In one embodiment, preferably, the prefabricated diffraction grating waveguide comprises an incident grating and a two-dimensional exit grating, the grating structure of the two-dimensional exit grating comprises a cylindrical grating and a holographic grating, and the shape, the size and the size of the grating area are optimally set according to requirements.
In one embodiment, preferably, the method further comprises:
receiving an input parameter modification command for the three-dimensional grating waveguide structure model, and modifying the three-dimensional grating waveguide structure model according to the parameter modification command.
In one embodiment, preferably, the method further comprises:
receiving an input set slicing precision;
and slicing the three-dimensional grating waveguide structure model layer by layer according to the slicing precision.
In one embodiment, preferably, the method further comprises:
a printing method of receiving an input setting;
and controlling the 3D printer to print according to the printing method.
According to a second aspect of the embodiments of the present disclosure, there is provided a diffraction grating waveguide, which is manufactured by the method for manufacturing a diffraction grating waveguide according to any one of the embodiments of the first aspect.
According to a third aspect of embodiments of the present disclosure, there is provided a near-eye display device comprising the diffraction grating waveguide of any one of the embodiments of the second aspect.
The technical scheme provided by the embodiment of the disclosure can have the following beneficial effects:
the embodiment of the invention provides a novel method for preparing a diffraction grating waveguide of a near-eye display, which solves the problems of high difficulty, low yield, poor repeatability and incapability of large-scale production of the existing diffraction grating waveguide, and thus, the high-precision large-scale preparation of the diffraction grating waveguide is realized.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and together with the description, serve to explain the principles of the disclosure.
Figure 1 is a schematic diagram of a prior art diffraction grating waveguide structure.
Figure 2 is a schematic diagram of another prior art diffraction grating waveguide structure.
FIG. 3 is a flow chart illustrating a method of fabricating a diffraction grating waveguide according to an exemplary embodiment.
FIG. 4 is a schematic diagram illustrating a method of fabricating a diffraction grating waveguide according to an exemplary embodiment.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The implementations described in the exemplary embodiments below are not intended to represent all implementations consistent with the present disclosure. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the present disclosure, as detailed in the appended claims.
The current diffraction grating waveguide structure is shown in fig. 1 and 2, and the whole structure is composed of an optical substrate and a grating on the surface of the optical substrate. The optical substrate is generally a planar structure, and the material of the optical substrate may be optical materials such as optical glass, optical plastic, etc., the main optical surfaces of the optical substrate are two surfaces parallel to each other, the grating is located on one of the surfaces of the optical substrate, and there are usually three grating regions: an incident grating 112, a turning grating 114 and an exit grating 116; or two grating regions: an entrance grating 212 and a two-dimensional exit grating 214. The working principle of the grating waveguide structure 100 is: light with image information emitted by the projection system is projected on the incident grating 112, and the incident grating 112 can diffract to generate two diffracted lights of +1 order diffracted light and-1 order diffracted light. When the diffracted light satisfies the total reflection condition of the optical substrate, i.e., the incident angle to the optical surface is larger than the critical angle of total reflection of the optical substrate, the light beam is totally reflected and nearly transmitted without loss in the optical substrate. The-1 st order diffracted light beam is transmitted toward the turning grating 114, when entering the area of the turning grating 114, due to the diffraction effect of the turning grating 114, a series of diffracted lights transmitted toward the exit grating 116 are generated while continuing to be transmitted, the diffracted lights are transmitted to the exit grating 116, and after being diffracted by the exit grating 116, the exiting diffracted lights enter the human eye to be perceived. The working principle of the grating waveguide structure 200: light with image information emitted by the projection system is projected onto the incident grating 212, and the incident grating 212 is diffracted to generate-1 st order diffracted light towards the two-dimensional exit grating 214. When the-1 st order diffracted light is transmitted to the area of the two-dimensional exit grating 214, the two-dimensional exit grating 214 diffracts to generate a series of exit diffracted lights, and the exit diffracted lights enter human eyes to be perceived.
The incident grating 112, the turning grating 114, the emergent grating 116 and the incident grating 212 are generally one-dimensional gratings, the grating structure may be rectangular grating, inclined grating, blazed grating, holographic grating, etc., and the shape, size and size of the grating region may be optimized according to the requirement. The emergent grating 214 is a two-dimensional grating, the grating structure can be a cylindrical grating, a holographic grating, etc., and the shape, size and size of the grating area can also be optimized according to the requirement.
The grating waveguide structures 100 and 200 may be fabricated by 3D printing techniques, as shown in fig. 3, the fabrication method including:
step S301, obtaining the structural shape and parameters of a prefabricated diffraction grating waveguide;
step S302, modeling is carried out according to the structural shape and parameters of the diffraction grating waveguide so as to generate a three-dimensional grating waveguide structural model;
step S303, carrying out layer-by-layer slicing processing on the three-dimensional grating waveguide structure model, and determining slice cross section information of each layer;
and S304, sequentially reading the information of the cross sections of the slices of each layer from bottom to top through a 3D printer, and performing 3D printing through a micro-nozzle to prepare and finish the diffraction grating waveguide.
In one embodiment, preferably, the slice cross-section information of each layer is sequentially read from bottom to top by a 3D printer, and 3D printing is performed by a micro-nozzle, including:
sequentially reading the section cross section information of each layer from bottom to top through a 3D printer;
and controlling a micro-nozzle of the 3D printer to coat and cool the liquid glass layer by layer from bottom to top according to the section cross section information of each layer.
In one embodiment, preferably, the liquid glass comprises fused silica nanocomposites.
Specifically, after the structural shapes and parameters of the incident grating 112, the turning grating 114, the emergent grating 116 or the incident grating 212 and the two-dimensional emergent grating 214 are designed, the three-dimensional grating waveguide structural model is modeled by computer software such as SolidWorks and AutoCAD, and then is divided into section sections layer by layer, namely slices, and finally is led into a 3D printer to be printed layer by layer. When printing, the 3D printer firstly reads the section cross section information of the model, the quartz nano composite material is heated and melted into free flowing liquid (namely 'liquid glass') by the heater, the micro-nozzle is filled with the fused quartz nano composite material and moves in a plane, the fused quartz nano composite material is coated according to the section cross section, the coating layer is cooled to finish the manufacture of a layer of section graph, then the 3D printer reads the next section cross section information of the model again and guides the micro-nozzle to move in the plane continuously, the fused quartz nano composite material is coated on the formed structure according to the shape of the section cross section of the slice, the coating layer is cooled to finish the manufacture of the next section graph, and the steps are repeated in a circulating way until the manufacture of the whole three-dimensional grating waveguide structure model is finished.
In one embodiment, preferably, the prefabricated diffraction grating waveguide comprises an incident grating, a turning grating and an exit grating, the incident grating, the turning grating and the exit grating are one-dimensional gratings, the grating structure comprises a rectangular grating, an inclined grating, a blazed grating and a holographic grating, and the shape, the size and the size of the grating area are optimally set according to requirements.
In one embodiment, preferably, the prefabricated diffraction grating waveguide comprises an incident grating and a two-dimensional exit grating, the grating structure of the two-dimensional exit grating comprises a cylindrical grating and a holographic grating, and the shape, the size and the size of the grating area are optimally set according to requirements.
As shown in fig. 1 and fig. 2, when the incident grating 112, the turning grating 114, the exit grating 116 and the incident grating 212 are one-dimensional grating structures, and the two-dimensional exit grating 214 is a periodic structure with a regular shape, the 3D printing precision of the grating waveguide structures 100 and 200 is mainly the manufacturing precision of the grating and the periodic structure, so that while the printing precision is ensured, the slicing precision of the grating region and the periodic structure region only needs to be increased, as shown in fig. 4, which can increase the 3D printing speed of the grating waveguide structure.
In one embodiment, preferably, the method further comprises:
receiving an input parameter modification command for the three-dimensional grating waveguide structure model, and modifying the three-dimensional grating waveguide structure model according to the parameter modification command.
By using computer software to modify the parameters of the three-dimensional model such as size, shape and the like, the personalized customization of the grating waveguide structure of the AR glasses can be realized, the procedures such as the design and manufacture of the traditional process mold are omitted, the cost is saved, and the vision correction function can be integrated on the grating waveguide structure, so that the grating waveguide structure is adapted to myopia and hypermetropia patients without wearing vision correction glasses.
In one embodiment, preferably, the method further comprises:
receiving an input set slicing precision;
and slicing the three-dimensional grating waveguide structure model layer by layer according to the slicing precision.
In one embodiment, preferably, the method further comprises:
a printing method of receiving an input setting;
and controlling the 3D printer to print according to the printing method.
According to a second aspect of the embodiments of the present disclosure, there is provided a diffraction grating waveguide, which is manufactured by the method for manufacturing a diffraction grating waveguide according to any one of the embodiments of the first aspect.
According to a third aspect of embodiments of the present disclosure, there is provided a near-eye display device comprising the diffraction grating waveguide of any one of the embodiments of the second aspect.
The grating waveguide structure manufactured based on the 3D printing technology can be printed by using a 3D printer only by manufacturing a three-dimensional model of the structure by using computer software by designers, setting slicing precision and selecting a printing method according to needs. Compared with the traditional method for manufacturing the grating waveguide sheet of the AR glasses, the manufacturing period of the grating waveguide structure based on 3D printing is greatly shortened, and the manufacturing process is simpler.
It is further understood that the use of "a plurality" in this disclosure means two or more, as other terms are analogous. "and/or" describes the association relationship of the associated objects, meaning that there may be three relationships, e.g., a and/or B, which may mean: a exists alone, A and B exist simultaneously, and B exists alone. The character "/" generally indicates that the former and latter associated objects are in an "or" relationship. The singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
It will be further understood that the terms "first," "second," and the like are used to describe various information and that such information should not be limited by these terms. These terms are only used to distinguish one type of information from another and do not denote a particular order or importance. Indeed, the terms "first," "second," and the like are fully interchangeable. For example, first information may also be referred to as second information, and similarly, second information may also be referred to as first information, without departing from the scope of the present disclosure.
It is further to be understood that while operations are depicted in the drawings in a particular order, this is not to be understood as requiring that such operations be performed in the particular order shown or in serial order, or that all illustrated operations be performed, to achieve desirable results. In certain environments, multitasking and parallel processing may be advantageous.
Other embodiments of the disclosure will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure disclosed herein. This application is intended to cover any variations, uses, or adaptations of the disclosure following, in general, the principles of the disclosure and including such departures from the present disclosure as come within known or customary practice within the art to which the disclosure pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the disclosure being indicated by the following claims.
It will be understood that the present disclosure is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.
Claims (10)
1. A method of making a diffraction grating waveguide, comprising:
acquiring the structural shape and parameters of a prefabricated diffraction grating waveguide;
modeling according to the structural shape and parameters of the diffraction grating waveguide to generate a three-dimensional grating waveguide structural model;
slicing the three-dimensional grating waveguide structure model layer by layer, and determining slice cross section information of each layer;
and sequentially reading the information of the cross section of each layer from bottom to top through a 3D printer, and performing 3D printing through a micro-nozzle to prepare the diffraction grating waveguide.
2. The preparation method of claim 1, wherein the slice cross-section information of each layer is read from bottom to top by a 3D printer, and 3D printing is performed by a micro-nozzle, and the preparation method comprises the following steps:
sequentially reading the section cross section information of each layer from bottom to top through a 3D printer;
and controlling a micro-nozzle of the 3D printer to coat and cool the liquid glass layer by layer from bottom to top according to the section cross section information of each layer.
3. A method of making according to claim 1, wherein the liquid glass comprises fused silica nanocomposites.
4. The manufacturing method according to claim 1, wherein the pre-manufactured diffraction grating waveguide comprises an incident grating, a turning grating and an exit grating, the incident grating, the turning grating and the exit grating are one-dimensional gratings, the grating structure comprises a rectangular grating, an inclined grating, a blazed grating and a holographic grating, and the shape, size and size of the grating region are optimally set according to requirements.
5. The manufacturing method according to claim 1, wherein the prefabricated diffraction grating waveguide comprises an incident grating and a two-dimensional exit grating, the grating structure of the two-dimensional exit grating comprises a cylindrical grating and a holographic grating, and the shape, size and size of the grating region are optimally set according to requirements.
6. The method of claim 1, further comprising:
receiving an input parameter modification command for the three-dimensional grating waveguide structure model, and modifying the three-dimensional grating waveguide structure model according to the parameter modification command.
7. The method of claim 1, further comprising:
receiving an input set slicing precision;
and slicing the three-dimensional grating waveguide structure model layer by layer according to the slicing precision.
8. The method of claim 1, further comprising:
a printing method of receiving an input setting;
and controlling the 3D printer to print according to the printing method.
9. A diffraction grating waveguide produced by the method for producing a diffraction grating waveguide according to any one of claims 1 to 8.
10. A near-eye display device, comprising:
the diffraction grating waveguide of claim 9.
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Inventor after: Cui Haitao Inventor after: Li Yan Inventor after: Li Xing Inventor before: Cui Haitao Inventor before: Li Huihui Inventor before: Li Yan Inventor before: Li Xing Inventor before: Wang Jian |