CN114166015A - Semiconductor material heat treatment device for mobile terminal - Google Patents
Semiconductor material heat treatment device for mobile terminal Download PDFInfo
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- CN114166015A CN114166015A CN202111536050.8A CN202111536050A CN114166015A CN 114166015 A CN114166015 A CN 114166015A CN 202111536050 A CN202111536050 A CN 202111536050A CN 114166015 A CN114166015 A CN 114166015A
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- 239000000463 material Substances 0.000 title claims abstract description 29
- 239000004065 semiconductor Substances 0.000 title claims abstract description 26
- 238000010438 heat treatment Methods 0.000 title claims description 21
- 238000007789 sealing Methods 0.000 claims abstract description 37
- 230000005540 biological transmission Effects 0.000 claims description 60
- 238000009434 installation Methods 0.000 claims description 33
- 238000005192 partition Methods 0.000 claims description 21
- 230000008093 supporting effect Effects 0.000 claims description 16
- 230000007246 mechanism Effects 0.000 claims description 9
- 230000003014 reinforcing effect Effects 0.000 claims description 9
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims description 6
- 235000017491 Bambusa tulda Nutrition 0.000 claims description 6
- 241001330002 Bambuseae Species 0.000 claims description 6
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims description 6
- 239000011425 bamboo Substances 0.000 claims description 6
- 230000000712 assembly Effects 0.000 claims description 4
- 238000000429 assembly Methods 0.000 claims description 4
- 238000005245 sintering Methods 0.000 abstract description 15
- 238000000034 method Methods 0.000 abstract description 12
- 230000008569 process Effects 0.000 abstract description 9
- 230000000694 effects Effects 0.000 description 23
- 230000001965 increasing effect Effects 0.000 description 17
- 239000002912 waste gas Substances 0.000 description 12
- 229910021419 crystalline silicon Inorganic materials 0.000 description 6
- 238000005086 pumping Methods 0.000 description 5
- 230000002349 favourable effect Effects 0.000 description 4
- 230000001360 synchronised effect Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 238000005485 electric heating Methods 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/12—Arrangement of devices for charging
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/13—Arrangement of devices for discharging
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a semiconductor material sintering treatment device for a mobile terminal, which comprises a tank body device; the tank body device comprises a tank body, a sealing structure and a tank body, wherein the tank body is provided with a tank body device, the tank body device is provided with a tank body, the tank body device is provided with a plurality of tank bodies, the tank bodies are arranged in the tank body device, the tank bodies are arranged in the tank bodies, and are arranged in the tank bodies, the tank bodies are arranged in the tank bodies, and are arranged on the tank bodies, and are arranged in the tank bodies, the tank bodies are arranged on the tank bodies, and are arranged in the tank bodies, and are arranged on the tank bodies, and are arranged in the tank bodies, and are arranged on the tank bodies, and are arranged in the tank bodies; the inner box structure is a rectangular structure, the inner box structure is embedded in the tank body device, and the lower end position in the inner box structure is slidably provided with the bearing device; the lifting device is of a sliding structure, the bearing device is mounted on the lifting device in a bearing mode, the bearing device sliding to the bearing frame can fix the bearing device through rotating the fixing rod, and the conveying process of the lifting device to the bearing device is safer and more stable.
Description
Technical Field
The invention belongs to the technical field of sintering treatment equipment, and particularly relates to a semiconductor material heat treatment device for a mobile terminal.
Background
With the progress and development of society, the electronic information technology is gradually improved, the number of electronic devices used is gradually increased, intelligent devices such as mobile phones and computers cannot leave chips, the chips are engraved on semiconductor silicon wafers by using a photoetching machine through ultraviolet light, the engraved semiconductor silicon wafers are subjected to chemical treatment, silver plating treatment and other treatment, so that micro semiconductor circuits are formed on the semiconductor silicon wafers, the used semiconductors are made of crystalline silicon, and the crystalline silicon is required to be sintered during manufacturing.
Application No.: the invention discloses an electric heating sintering furnace in the patent of CN201810108129.2, which comprises a furnace body, a circulating barrel, a waste gas pumping device and an air pumping device, wherein the furnace body is provided with a sintering chamber with an electric heating layer inside and a placing layer which is arranged at the bottom end in the furnace body and is provided with a plurality of vent holes and a plurality of hot gas channels; the circulating barrel is utilized to enable waste gas generated by electrically heating and sintering shell mold residual wax in the furnace body to be sent into the furnace body from the hot gas channels for continuous circulating combustion of waste gas, when the pressure of the waste gas detected in the furnace body is high, the waste gas in the furnace body is sucked by the waste gas pumping equipment, the waste gas is sucked, air is supplied by the air pumping equipment to help to combust the waste gas, when a sintering procedure is completed to open a furnace door of the furnace body, the waste gas pumping equipment presses the waste gas back to the hot gas channels and sends the waste gas into the furnace body for combustion, so that the waste gas is completely combusted, and the purpose of environmental protection is achieved.
Based on from above-mentioned known technique discovery, current equipment to crystalline silicon sintering treatment, sealing performance is relatively poor easily takes place to leak in the air replacement of processing treatment in-process, and sealing performance is unstable inadequately, leads to sealed operation too loaded down with trivial details, and the crystalline silicon temperature after the sintering treatment is higher, and the process of unloading is inconvenient and comparatively dangerous.
In view of the above, the present invention provides a semiconductor material heat treatment apparatus for mobile terminals, which is improved in view of the conventional structure and defects, and is expected to achieve the purpose of higher practical value.
Disclosure of Invention
In order to solve the technical problems, the invention provides a semiconductor material heat treatment device for a mobile terminal, which aims to solve the problems that the existing equipment for sintering crystalline silicon is poor in sealing performance, air replacement is easy to leak in the processing and processing process, the sealing performance is not stable enough, the sealing operation is complicated, the temperature of the crystalline silicon after sintering is high, and the discharging process is inconvenient and dangerous.
The invention is used for the purpose and the effect of a semiconductor material heat treatment device of a mobile terminal, and is achieved by the following specific technical means:
a semiconductor material heat treatment device for a mobile terminal comprises a tank body device;
the tank body device comprises a tank body, a sealing structure and a tank body, wherein the tank body is provided with a tank body device, the tank body device is provided with a tank body, the tank body device is provided with a plurality of tank bodies, the tank bodies are arranged in the tank body device, the tank bodies are arranged in the tank bodies, and are arranged in the tank bodies, and are arranged on the tank bodies, and are arranged in the tank bodies, the tank bodies are arranged on the tank bodies, and are arranged in the tank bodies, and are arranged on the tank bodies, and are arranged in the tank bodies, and are arranged on the tank bodies, and are arranged in the tank bodies;
the inner box structure is a rectangular structure, the inner box structure is embedded in the tank body device, and the lower end position in the inner box structure is slidably provided with the bearing device;
the lifting device is of a sliding structure, and a bearing device is arranged on the lifting device in a bearing mode.
Further, jar body device is including:
the installation tank is of a barrel-shaped structure, partition plates are fixed on the inner wall of the installation tank and are arranged in a circumferential array mode, the partition plates form grooves with square inner walls, and the tail end of each group of partition plates is additionally provided with a heating structure;
the bearing columns are of stand column structures and are fixed at two ends of the bottom of the mounting tank.
Further, the sealing structure comprises:
the sealing plate is of a disc-shaped structure, and the left end of the sealing plate is hinged to the front end of the installation tank;
the fastening plates are of a transverse plate structure, are slidably arranged in the sealing plate and are provided with two groups, the exposed parts of the fastening plates are provided with U-shaped openings, and the embedded parts of the fastening plates adopt a tooth row mechanism;
the two groups of transmission teeth are arranged and meshed with each other, each group of transmission teeth are meshed with the fastening plate tooth rows, and the outer ends of each group of transmission teeth are provided with hexagonal grooves;
the protection plate is of a kidney-shaped plate structure and is the same as the two groups of transmission teeth in shape.
Further, the fixed subassembly includes:
the fixed cylinder is of a cylindrical structure, two groups of spiral grooves are formed in the outer wall of the fixed cylinder, the fixed cylinder is provided with two groups, and the fixed cylinder is fixed on the outer wall of the installation tank;
the fastening rod is of a long rod structure, the fastening rod is sleeved in the fixing cylinder, the outer end of the fastening rod is fixed with the disc-shaped block, the outer wall of the fastening rod is provided with a protruding head, the protruding head slides in the spiral groove, and the tail end of the fastening rod is hinged with the swing rod;
the reinforcing piece is of a sheet structure and is wrapped on the outer wall of the fixed cylinder.
Further, the auxiliary structure comprises:
the outer groove plate is of a transverse convex plate structure, and a sliding groove of a transverse structure is formed in the outer groove plate;
the auxiliary rod, auxiliary rod are the transverse bar structure, and the cutting of auxiliary rod outer end is stair structure, is fixed with the handle on the auxiliary rod outer wall.
Further, the external connection structure comprises:
the outer connecting pipe is of a cylindrical structure, the outer connecting pipe and the inner box structure are mutually communicated, the outer connecting pipe directly penetrates through the rear wall of the mounting tank, a fastening nut is additionally arranged at the outer end of the outer connecting pipe, and a tangent plane of a symmetrical structure is arranged at the outer end of the outer connecting pipe;
the inner spring is sleeved and installed on the outer wall of the outer connecting pipe and is located between the inner box structure and the rear wall of the installation tank.
Further, the inner box structure comprises:
the inner barrel is of a rectangular barrel structure, an outer sliding groove is formed in the outer wall of the inner barrel, and the cross section of the inner barrel is of a square structure;
the outer seal is of a square structure, a sealing strip is arranged on the outer end face of the outer seal, and the outer seal is fixed on the inner barrel.
Further, the carrying device comprises:
the bearing plate is of a horizontal long plate structure, and the upper end surface of the bearing plate is divided into two groups of same bearing surfaces;
the bottom plate is fixed on the bottom surface of the bearing plate, and a bottom groove is formed in the bottom of the bottom plate.
Further, the lifting device comprises:
the mounting plate is of a rectangular plate structure, wheels are mounted on the mounting plate, and a mounting groove is formed in the middle of the mounting plate;
the support frames are of a C-shaped frame structure, the support frames are provided with six groups of two types, and the three groups of the first support frames are hinged on the mounting plate;
the bearing frame is of a frame structure, the tail ends of the first type of support frames are connected to the bearing frame, and the bottom of the bearing frame is hinged with the second type of support frames;
the bottom sliding plate is of a long plate structure, the tail ends of the second support frames are connected and installed on the bottom sliding plate, and the bottom sliding plate, the bearing frame and the support frames form a crank sliding block mechanism;
the transmission shafts are of long shaft structures and are arranged in two groups, the transmission shafts are rotatably arranged at the positions of the mounting grooves, and the transmission shafts are mutually screwed with the bottom sliding plate;
the connecting shaft is arranged between the two groups of transmission shafts and is in meshed transmission with the two groups of transmission shafts through the bevel gears;
the fixing rod is of a long shaft structure, the protruding blocks are arranged on the fixing rod, the fixing rod is rotatably mounted on the bearing frame, the outer end of the fixing rod is provided with a hexagonal groove, and four groups of protruding blocks are arranged on the fixing rod.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the tank body device, the square groove formed by the partition plates achieves the effect that the inner tank structure is convenient to install, the heating structure is additionally arranged at the tail end of each group of partition plates, the heating purpose of the partition plates on the inner tank structure is increased by arranging the tail ends of the partition plates into the heating structure, the subsequent sintering process of materials is facilitated, and the bearing column fixed at the bottom of the installation tank is beneficial to the stable supporting effect of the bearing column on the installation tank, so that the installation tank is more stable.
2. In the sealing structure of the invention, the clamping and fixing of the sealing structure and the fixing component are realized through two groups of fastening plates with horizontal structures, the exposed part of the fastening plate is provided with a U-shaped opening, the good fixing of the fastening plate and the fixing component is increased through the U-shaped opening structure exposed by the fastening plate, the mutual synchronous rotation of the transmission teeth is realized through two groups of transmission teeth which are mutually meshed, the effect of simultaneously controlling the two groups of fastening plates when the transmission teeth are rotated is realized through the mutual meshing of the transmission teeth and the fastening plate, the outer end of each group of transmission teeth is provided with a hexagonal groove, the control and adjustment of the transmission teeth are more convenient through arranging the outer end of the transmission teeth as the inwards concave hexagonal groove, in the fixing component, the fastening rod is favorably clamped on the U-shaped groove of the fastening plate through a disc-shaped block on the fastening rod, the outer wall of the fastening rod is provided with a convex head which slides in the spiral groove, through the bulge head of slip in the helicla flute, when having realized rotating the fixed section of thick bamboo, reach and let the anchorage bar press from both sides tightly the mounting plate backward, accomplish the fixed effect of fastening of fixed subassembly to seal structure, the articulated swinging arms of installing in the anchorage bar end is terminal, install at the terminal swinging arms of anchorage bar through articulated, be favorable to realizing applying the effect of bigger torsion when rotating the fixed section of thick bamboo, stair structure through the cutting of auxiliary rod outer end, the effect of auxiliary rod to the supplementary chucking of swinging arms has been increased, the mesh that the swinging arms kick-backed and reset has been avoided, be fixed with the handle on the auxiliary rod outer wall, through fixed handle on the auxiliary rod outer wall, the stable control effect to the auxiliary rod has been increased.
3. In the external connection structure, the external connection pipe is communicated with the inner box structure, so that the replacement of air in the external connection pipe and the inner box structure is facilitated, the subsequent annealing and sintering of materials are facilitated, the external connection pipe is stably fixed by the aid of the nut on the external connection pipe, the problem that the external connection pipe is damaged when the nut is detached after auxiliary fixing is facilitated by the aid of the symmetrical tangent planes formed in the outer wall of the external connection pipe, the stable effect of the inner box structure and the external connection pipe is achieved by the aid of the internal spring additionally arranged on the external connection pipe, the problem that stress of the external connection pipe is concentrated is reduced, and the service life of the external connection pipe is prolonged.
4. In the lifting device, the stable lifting effect of the bearing frame is realized through the crank block mechanism consisting of the bearing frame, the purpose of stably supporting the bearing frame is realized through six groups of supporting frames connected to the bearing frame, the bearing frame is lifted more stably, the bottom sliding plate is controlled to slide after the transmission shaft is rotated through the transmission shaft mutually screwed with the bottom sliding plate, the control on the bottom sliding plate is increased through two groups of transmission shafts with the same structure, the bottom sliding plate slides more stably, the bearing device sliding to the bearing frame can be fixed through rotating the fixing rod, and the conveying process of the bearing device by the lifting device is safer and more stable.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a schematic sectional view of the installation tank of the present invention.
FIG. 3 is a schematic cross-sectional view of the sealing plate of the present invention.
Fig. 4 is a schematic view of the internal structure of the installation tank of the present invention.
Fig. 5 is a schematic structural diagram of the carrying device and the inner box of the present invention.
Fig. 6 is a schematic structural diagram of the carrying device and the lifting device of the present invention.
Fig. 7 is a schematic structural diagram of the lifting device of the invention.
Fig. 8 is a schematic structural view of a transmission shaft and a connecting shaft of the present invention.
Fig. 9 is a schematic view of the present invention at a part enlarged in fig. 2.
In the drawings, the corresponding relationship between the component names and the reference numbers is as follows:
1. a tank means; 101. installing a tank; 102. a load bearing column; 103. a partition plate; 2. a sealing structure; 201. a sealing plate; 202. a fastening plate; 203. a transmission gear; 204. a protection plate; 3. a fixing assembly; 301. a fixed cylinder; 302. a fastening rod; 303. a swing lever; 304. a reinforcing sheet; 4. an auxiliary structure; 401. an outer channel plate; 402. an auxiliary lever; 5. an external connection structure; 501. an external connection pipe; 502. an inner spring; 6. an inner box structure; 601. an inner barrel; 602. sealing the outer opening; 7. a carrying device; 701. a carrier plate; 702. a base plate; 8. a lifting device; 801. mounting a plate; 802. a support frame; 803. a carrier; 804. fixing the rod; 805. a drive shaft; 806. a bottom slide plate; 807. and (7) connecting the shafts.
Detailed Description
Example (b):
as shown in figures 1 to 9:
the invention provides a semiconductor material heat treatment device for a mobile terminal, which comprises a tank body device 1;
seal structure 2, seal structure 2 are perpendicular a set structure, and seal structure 2 articulates and installs in jar front position of body device 1, and jar body device 1 is including: the installation tank 101 is of a barrel-shaped structure, partition plates 103 are fixed on the inner wall of the installation tank 101, the partition plates 103 are arranged in a circumferential array mode, the partition plates 103 form grooves with square inner walls, the effect that the inner box structure 6 is convenient to install is achieved through the square grooves formed by the partition plates 103, the tail end of each group of partition plates 103 is additionally provided with a heating structure, the tail end of each partition plate 103 is set to be the heating structure, the heating purpose of the partition plates 103 on the inner box structure 6 is increased, and the subsequent sintering process on materials is facilitated; the tank body device comprises a bearing column 102, wherein the bearing column 102 is of a stand column structure, the bearing column 102 is fixed at two ends of the bottom of the installation tank 101, the bearing column 102 fixed at the bottom of the installation tank 101 is beneficial to the stable supporting effect of the bearing column 102 on the installation tank 101, so that the installation tank 101 is more stable, fixing assemblies 3 are arranged at the contact positions of a sealing structure 2 and a tank body device 1, the fixing assemblies 3 are arranged into an upper group and a lower group, an auxiliary structure 4 is fixed on the outer wall of the tank body device 1, the auxiliary structure 4 is transversely fixed, and an external structure 5 is arranged at the rear end position of the tank body device 1; the tank body device comprises an inner tank structure 6, wherein the inner tank structure 6 is a rectangular structure, the inner tank structure 6 is embedded in the tank body device 1, and a bearing device 7 slides at the lower end in the inner tank structure 6;
wherein, seal structure 2 includes:
the sealing plate 201 is of a disc-shaped structure, and the left end of the sealing plate 201 is hinged to the front end of the installation tank 101;
the fastening plate 202 is of a transverse plate structure, the fastening plate 202 is slidably mounted in the sealing plate 201, two groups of fastening plates 202 are arranged, clamping and fixing of the sealing structure 2 and the fixing component 3 are achieved through the two groups of fastening plates 202 of the horizontal structure, the exposed part of the fastening plate 202 is provided with a U-shaped opening, good fixing of the fastening plate 202 and the fixing component 3 is increased through the U-shaped opening structure exposed by the fastening plate 202, and the embedded part of the fastening plate 202 adopts a tooth row mechanism;
the transmission teeth 203 are provided with two groups of transmission teeth 203, the two groups of transmission teeth 203 are arranged in a meshed mode, each group of transmission teeth 203 are meshed with the fastening plate 202 in a tooth row, the two groups of transmission teeth 203 meshed with each other are used for achieving synchronous rotation of the transmission teeth 203, the transmission teeth 203 are meshed with the fastening plate 202, when the transmission teeth 203 are rotated, the effect of controlling the two groups of fastening plates 202 is achieved simultaneously, hexagonal grooves are formed in the outer ends of the transmission teeth 203, and the outer ends of the transmission teeth 203 are arranged to be concave hexagonal grooves, so that more convenience is brought to control and adjustment of the transmission teeth 203;
the protection plate 204 is of a kidney-shaped plate structure, the protection plate 204 is identical to the two groups of transmission teeth 203 in shape, and the protection plate 204 is matched with the transmission teeth 203 in shape, so that the effective protection effect of the protection plate 204 on the transmission teeth 203 is achieved.
Wherein, fixed subassembly 3 is including:
the fixing cylinder 301 is of a cylindrical structure, two groups of spiral grooves are formed in the outer wall of the fixing cylinder 301, the fixing cylinder 301 is provided with two groups, the fixing cylinder 301 is fixed on the outer wall of the installation tank 101, and the fixing cylinder 301 is fixed on the outer wall of the installation tank 101 in the circumferential direction and the axial direction;
reinforcing plate 304, reinforcing plate 304 are the sheetlike structure, and reinforcing plate 304 parcel has increased the guard action to fixed section of thick bamboo 301 on the outer wall of fixed section of thick bamboo 301 through the sheetlike reinforcing plate 304 of parcel on the outer wall of fixed section of thick bamboo 301.
Wherein, auxiliary structure 4 includes:
the outer groove plate 401 is of a transverse convex plate structure, and a sliding groove of a transverse structure is formed in the outer groove plate 401;
Wherein, external structure 5 is including:
the outer connecting pipe 501 is of a cylindrical structure, the outer connecting pipe 501 is communicated with the inner box structure 6, replacement of air in the inner box structure 6 by the outer connecting pipe 501 is facilitated, subsequent annealing and sintering of materials are facilitated, the outer connecting pipe 501 directly penetrates through the rear wall of the installation tank 101, a fastening nut is additionally arranged at the outer end of the outer connecting pipe 501, a tangent plane of a symmetrical structure is arranged at the outer end of the outer connecting pipe 501, firm fixation of the outer connecting pipe 501 is increased through a nut on the outer connecting pipe 501, and the problem that the outer connecting pipe 501 is damaged when the nut is disassembled after auxiliary fixation is facilitated;
Wherein, inner box structure 6 is including:
the inner barrel 601, the inner barrel 601 is a rectangular barrel structure, the outer wall of the inner barrel 601 is provided with an outer chute, the inner barrel 601 is stably installed on the installation tank 101 through the outer chute on the outer wall of the inner barrel 601, the inner barrel 601 is installed in a sliding mode through the outer chute, the effect that the inner barrel 601 is convenient to disassemble is achieved, and the section of the inner barrel 601 is of a square structure;
Wherein, load bearing device 7 includes:
the loading plate 701 is of a horizontal long plate structure, the upper end face of the loading plate 701 is divided into two groups of same loading faces, the effect of increasing the loading device 7 to load more materials is realized by the two groups of same loading plates 701 at intervals, the edges of the loading plate 701 are provided with the barrier strips, and the blocking and protection purposes of the loading plate 701 are increased by the barrier strips additionally arranged at the edges of the loading plate 701;
a bottom plate 702, the bottom plate 702 is fixed on the bottom surface of the carrier plate 701, and the bottom of the bottom plate 702 is provided with a bottom groove.
The specific use mode and function of the embodiment are as follows:
when in use, the existing semiconductor materials are mostly single crystal and polycrystalline silicon, the materials need to be annealed, sintered and the like, generally, the materials need to be processed at higher temperature, so that equipment is required to have certain heat insulation property, the partition plate 103 is arranged on the inner wall of the installation tank 101, namely, the heat insulation between the installation tank 101 and the outside is realized, the convenience in installing the inner tank structure 6 is increased, the heating equipment is arranged at the tail end of the partition plate 103, the heating equipment is closer to the inner tank structure 6, the heating purpose of the inner tank structure 6 is better achieved, the arrangement of the two groups of fixing components 3 realizes better fastening of the sealing structure 2, the auxiliary structure 4 has the purpose of assisting in clamping the fixing components 3, in order to avoid the contact of the inside and oxygen during the processing of the semiconductor materials, the air in the inner tank structure 6 can be replaced, the external connection structure 5 is favorable for being connected with an external pipeline, the replacement of the air in the inner box structure 6 is realized, the inner box structure 6 with the outer seal 602 is more favorable for the replacement of the air in the inner box structure 6, and the annealing and sintering processes of the material are more stable.
Second embodiment:
the lifting device 8 is of a sliding structure, and the bearing device 7 is carried on the lifting device 8.
Wherein, elevating gear 8 is including:
the mounting plate 801 is of a rectangular plate structure, wheels are mounted on the mounting plate 801, the effect that the lifting device 8 is convenient to move is achieved through grooves with the wheels, and a mounting groove is formed in the middle of the mounting plate 801;
the supporting frames 802 are C-shaped frame structures, six groups of the supporting frames 802 are arranged, and three groups of the first supporting frames 802 are hinged to the mounting plate 801;
the bearing frame 803 is of a frame structure, the tail ends of the first type of support frames 802 are connected to the bearing frame 803, and the bottom of the bearing frame 803 is hinged with the second type of support frames 802;
the bottom sliding plate 806 and the bottom sliding plate 806 are long plate structures, the tail ends of the second support frames 802 are connected and mounted on the bottom sliding plate 806, the bearing frame 803 and the support frames 802 form a crank block mechanism, the crank block mechanism formed by the bearing frame 803 realizes the stable lifting effect of the bearing frame 803, and the six groups of support frames 802 connected to the bearing frame 803 realize the stable supporting purpose of the bearing frame 803, so that the bearing frame 803 can lift more stably;
the transmission shafts 805 and 805 are in long shaft structures, the transmission shafts 805 are arranged in two groups, the transmission shafts 805 are rotatably installed at the positions of the installation grooves, the transmission shafts 805 and the bottom sliding plate 806 are mutually screwed, sliding control over the bottom sliding plate 806 after the transmission shafts 805 are rotated is realized through the transmission shafts 805 mutually screwed with the bottom sliding plate 806, and the control over the bottom sliding plate 806 is increased through the two groups of transmission shafts 805 with the same structures, so that the sliding of the bottom sliding plate 806 is more stable;
the connecting shaft 807 is arranged between the two groups of transmission shafts 805, and the connecting shaft 807 is in meshed transmission with the two groups of transmission shafts 805 through helical gears;
the fixing rod 804 is a long shaft structure, the fixing rod 804 is provided with a protruding block, the fixing rod 804 is rotatably mounted on the bearing frame 803, the outer end of the fixing rod 804 is provided with a hexagonal groove, the fixing rod 804 is provided with four groups of protruding blocks, and the fixing of the fixing rod 804 to the bearing device 7 is realized by rotating the fixing rod 804 mounted on the bearing frame 803.
The specific use mode and function of the embodiment are as follows:
during the use, the mounting panel 801 that has the wheel can slide wantonly, the unloading position that bears device 7 on corresponding inner box structure 6, under the effect of motor, two sets of transmission shafts 805 can carry out synchronous rotation through connecting axle 807, two sets of transmission shafts 805 of synchronous rotation can drive end slide plate 806 and slide, bear frame 803, support frame 802 and end slide plate 806 constitute slider-crank mechanism, gliding end slide plate 806 can drive and bear frame 803 and go up and down, make and bear frame 803 reach the assigned position, realize the access of bearing device 7, slide to bearing device 7 who bears frame 803, can be through rotating dead lever 804, realize fixing bearing device 7, let elevating gear 8 transport the process safer stable bearing device 7.
The embodiments of the present invention have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the invention in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiment was chosen and described in order to best explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention for various embodiments with various modifications as are suited to the particular use contemplated.
Claims (10)
1. A semiconductor material heat treatment device for a mobile terminal, characterized in that: comprises a tank device (1);
the tank body device comprises a sealing structure (2), wherein the sealing structure (2) is of a vertical disc structure, the sealing structure (2) is hinged to the front end of the tank body device (1), fixing assemblies (3) are arranged at the contact positions of the sealing structure (2) and the tank body device (1), the fixing assemblies (3) are arranged into two groups from top to bottom, an auxiliary structure (4) is fixed on the outer wall of the tank body device (1), the auxiliary structure (4) is transversely fixed, and an external structure (5) is arranged at the rear end of the tank body device (1);
the inner box structure (6) is of a rectangular structure, the inner box structure (6) is embedded in the tank body device (1), and a bearing device (7) is slidably mounted at the lower end in the inner box structure (6);
the lifting device (8) is of a sliding structure, and the bearing device (7) is arranged on the lifting device (8) in a bearing mode.
2. The apparatus for thermally processing a semiconductor material for a mobile terminal according to claim 1, wherein: the tank device (1) comprises:
the installation tank (101), the installation tank (101) is of a barrel-shaped structure, partition plates (103) are fixed on the inner wall of the installation tank, the partition plates (103) are arranged in a circumferential array mode, the partition plates (103) form grooves with square inner walls, and the tail end of each group of partition plates (103) is additionally provided with a heating structure;
the bearing column (102), bearing column (102) are the stand structure, and bearing column (102) are fixed at the both ends of installation jar (101) bottom.
3. The apparatus for thermally processing a semiconductor material for a mobile terminal according to claim 1, wherein: the sealing structure (2) comprises:
the sealing plate (201), the sealing plate (201) is the disc structure, the left end of the sealing plate (201) is hinged and installed at the front end of the installation tank (101);
the fastening plates (202) are of a transverse plate structure, the fastening plates (202) are slidably mounted in the sealing plate (201), two groups of fastening plates (202) are arranged, the exposed parts of the fastening plates (202) are provided with U-shaped openings, and the embedded parts of the fastening plates (202) adopt a tooth row mechanism;
the two groups of the transmission teeth (203) are arranged, the two groups of the transmission teeth (203) are meshed with each other, each group of the transmission teeth (203) are meshed with the tooth row of the fastening plate (202), and the outer end of each group of the transmission teeth (203) is provided with a hexagonal groove;
the protection plate (204), the protection plate (204) are the kidney-shaped plate structure, and the protection plate (204) is the same with the two groups of transmission teeth (203) in shape.
4. The apparatus for thermally processing a semiconductor material for a mobile terminal according to claim 1, wherein: the fixing component (3) comprises:
the fixing cylinder (301), the fixing cylinder (301) is of a cylindrical structure, two groups of spiral grooves are formed in the outer wall of the fixing cylinder (301), two groups of spiral grooves are formed in the fixing cylinder (301), and the fixing cylinder (301) is fixed on the outer wall of the installation tank (101);
the fastening rod (302) is of a long rod structure, the fastening rod (302) is sleeved in the fixing cylinder (301), a disc-shaped block is fixed at the outer end of the fastening rod (302), a protruding head is arranged on the outer wall of the fastening rod (302), the protruding head slides in the spiral groove, and the tail end of the fastening rod (302) is hinged with a swing rod (303);
the reinforcing sheet (304), the reinforcing sheet (304) is the lamellar structure, and reinforcing sheet (304) parcel is on fixed section of thick bamboo (301) outer wall.
5. The apparatus for thermally processing a semiconductor material for a mobile terminal according to claim 1, wherein: the auxiliary structure (4) comprises:
the outer groove plate (401), the outer groove plate (401) is a transverse convex plate structure, and a sliding groove with a transverse structure is formed in the outer groove plate (401);
the auxiliary rod (402) is of a transverse rod structure, the outer end of the auxiliary rod (402) is cut into a stepped structure, and a handle is fixed on the outer wall of the auxiliary rod (402).
6. The apparatus for thermally processing a semiconductor material for a mobile terminal according to claim 1, wherein: the external connection structure (5) comprises:
the outer connecting pipe (501) is of a cylindrical structure, the outer connecting pipe (501) and the inner box structure (6) are communicated with each other, the outer connecting pipe (501) directly penetrates through the rear wall of the installation tank (101), a fastening nut is additionally arranged at the outer end of the outer connecting pipe (501), and a tangent plane of a symmetrical structure is arranged at the outer end of the outer connecting pipe (501);
the inner spring (502), inner spring (502) cup joints and installs on the outer wall of external pipe (501), and inner spring (502) is in the position between inner box structure (6) and the rear wall of installation jar (101).
7. The apparatus for thermally processing a semiconductor material for a mobile terminal according to claim 1, wherein: the inner box structure (6) comprises:
the inner barrel (601), the inner barrel (601) is a rectangular barrel structure, an outer chute is arranged on the outer wall of the inner barrel (601), and the section of the inner barrel (601) is a square structure;
the outer seal (602), outer seal (602) are square structure, and outer terminal surface of outer seal (602) is provided with the sealing strip, and outer seal (602) is fixed on interior bucket (601).
8. The apparatus for thermally processing a semiconductor material for a mobile terminal according to claim 1, wherein: the carrying device (7) comprises:
the bearing plate (701), the bearing plate (701) is the structure of horizontal long slab, the upper end face of the bearing plate (701) is divided into two groups of same bearing faces;
the bottom plate (702), bottom plate (702) are fixed in the bottom surface of loading board (701), and bottom plate (702) bottom is provided with the undercut.
9. The apparatus for thermally processing a semiconductor material for a mobile terminal according to claim 1, wherein: the lifting device (8) comprises:
the mounting plate (801), the mounting plate (801) is of a rectangular plate structure, wheels are mounted on the mounting plate (801), and a mounting groove is formed in the middle of the mounting plate (801);
the supporting frame (802), the supporting frame (802) is a C-shaped frame structure, six groups of two kinds of supporting frames (802) are arranged, and three groups of the first supporting frames (802) are hinged on the mounting plate (801);
the bearing frame (803), the bearing frame (803) is a frame structure, the end of the first kind of supporting frame (802) is connected to the bearing frame (803), the bottom of the bearing frame (803) is hinged with the second kind of supporting frame (802);
the bottom sliding plate (806), the bottom sliding plate (806) is a long plate structure, the tail ends of the second supporting frames (802) are connected and installed on the bottom sliding plate (806), and the bottom sliding plate (806), the bearing frame (803) and the supporting frames (802) form a crank slider mechanism;
the transmission shafts (805) are of long shaft structures, two groups of transmission shafts (805) are arranged, the transmission shafts (805) are rotatably arranged at the positions of the mounting grooves, and the transmission shafts (805) are mutually screwed with the bottom sliding plates (806);
the connecting shaft (807), the connecting shaft (807) is installed between two sets of transmission shafts (805), and the connecting shaft (807) is meshed with the two sets of transmission shafts (805) through bevel gears for transmission.
10. The apparatus for thermally processing a semiconductor material for a mobile terminal according to claim 1, wherein: the lifting device (8) comprises:
the fixing rod (804) is of a long shaft structure, the fixing rod (804) is provided with protruding blocks, the fixing rod (804) is rotatably installed on the bearing frame (803), the outer end of the fixing rod (804) is provided with a hexagonal groove, and the fixing rod (804) is provided with four groups of protruding blocks.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111536050.8A CN114166015A (en) | 2021-12-15 | 2021-12-15 | Semiconductor material heat treatment device for mobile terminal |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111536050.8A CN114166015A (en) | 2021-12-15 | 2021-12-15 | Semiconductor material heat treatment device for mobile terminal |
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| CN114166015A true CN114166015A (en) | 2022-03-11 |
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| CN202111536050.8A Pending CN114166015A (en) | 2021-12-15 | 2021-12-15 | Semiconductor material heat treatment device for mobile terminal |
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