CN114160514B - Method for cleaning inner wall of furnace tube - Google Patents

Method for cleaning inner wall of furnace tube Download PDF

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Publication number
CN114160514B
CN114160514B CN202111226514.5A CN202111226514A CN114160514B CN 114160514 B CN114160514 B CN 114160514B CN 202111226514 A CN202111226514 A CN 202111226514A CN 114160514 B CN114160514 B CN 114160514B
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CN
China
Prior art keywords
cleaning
furnace tube
furnace
pipe
wall
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CN202111226514.5A
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Chinese (zh)
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CN114160514A (en
Inventor
钱诚
李刚
霍召军
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Wuxi Aelsystem Intelligent Equipment Co ltd
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Wuxi Aelsystem Intelligent Equipment Co ltd
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Priority to CN202111226514.5A priority Critical patent/CN114160514B/en
Publication of CN114160514A publication Critical patent/CN114160514A/en
Priority to PCT/CN2022/109016 priority patent/WO2023065765A1/en
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Publication of CN114160514B publication Critical patent/CN114160514B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/02Cleaning pipes or tubes or systems of pipes or tubes
    • B08B9/027Cleaning the internal surfaces; Removal of blockages
    • B08B9/032Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
    • B08B9/0321Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2209/00Details of machines or methods for cleaning hollow articles
    • B08B2209/02Details of apparatuses or methods for cleaning pipes or tubes
    • B08B2209/027Details of apparatuses or methods for cleaning pipes or tubes for cleaning the internal surfaces
    • B08B2209/032Details of apparatuses or methods for cleaning pipes or tubes for cleaning the internal surfaces by the mechanical action of a moving fluid

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning In General (AREA)

Abstract

The application relates to a method for cleaning the inner wall of a furnace tube, wherein the furnace tube is vertically arranged without rotation and complex movement mechanisms, so that the furnace tube is prevented from being damaged; the space at the top of the furnace tube is filled with the cleaning liquid, so that the problems that the lifting height of the lifting cleaning assembly is limited and the inner wall at the top of the furnace tube is difficult to clean are solved, the inner wall at the top of the furnace tube can be cleaned, and the cleaning effect is improved.

Description

Method for cleaning inner wall of furnace tube
Technical Field
The application belongs to the technical field of furnace tube cleaning equipment, and particularly relates to a method for cleaning the inner wall of a furnace tube.
Background
Chinese patent document CN208853393U discloses a vertical furnace tube cleaning mechanism, which uses a fixed nozzle to clean the interior of the furnace tube. However, in order to improve the cleaning effect, the height of the inner nozzle is inevitably required to be matched with the inner height of the furnace tube, which results in that the furnace tube needs to be lifted to a high height to be placed on the supporting seat with the inner cleaning tube when the furnace tube is assembled. Meanwhile, the nozzle of the inner cleaning pipe is fixed, and if the nozzle does not rotate or the furnace pipe does not rotate, cleaning liquid sprayed by the nozzle only can fixedly wash a specific area.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in order to solve the defects in the prior art, the method for cleaning the inner wall of the furnace tube has a good cleaning effect.
The technical scheme adopted by the invention for solving the technical problems is as follows:
a method for cleaning the inner wall of a furnace tube comprises the following steps:
s1: placing the furnace tube on the support frame in a vertical mode, and aligning the furnace tube with the U-shaped tube;
s2: a U-shaped pipe with a furnace pipe cleaning nozzle at the tail end penetrates through the support frame and extends into the furnace pipe from an opening at the bottom of the furnace pipe through the lifting cleaning assembly, the furnace pipe cleaning nozzle sprays cleaning liquid and drives the U-shaped pipe to drive the furnace pipe cleaning nozzle to rise in the furnace pipe, and a flexible baffle is further arranged on the U-shaped pipe;
s3: when the U-shaped pipe rises to the top end, the flexible baffle delays the outflow of the cleaning solution, so that the space from the flexible baffle to the top of the furnace pipe can be filled with the cleaning solution for a period of time;
s4: the lifting cleaning assembly drives the U-shaped pipe to drive the furnace tube cleaning nozzle to descend in the furnace tube, and when the furnace tube cleaning nozzle descends to the lowest end, the cleaning liquid is closed to complete cleaning.
Preferably, in the furnace tube inner wall cleaning method of the present invention, the flexible baffle includes: a rigid disk in the middle, and a flexible edge at the edge of the rigid disk.
Preferably, in the furnace tube inner wall cleaning method, the flexible edge has openings arranged along the radial direction.
Preferably, in the method for cleaning the inner wall of the furnace tube of the present invention, the furnace tube cleaning nozzle includes:
a pipe body having a hollow passage in the middle;
the cover body is covered on the top of the pipe body;
the rotating body is limited by the cover body and is fixed at the top of the pipe body;
the end of the top of the pipe body is provided with a limbers leading to the side wall, a hollow runner communicated with the limbers is arranged in the middle of the rotator, the top of the rotator is an inclined plane, a top nozzle is arranged on the inclined plane, a side nozzle is arranged on the side surface of the rotator, the top nozzle and the side nozzle are not coplanar with a vertical surface of a central axis of the rotator, a cleaning liquid flows through the hollow passageway of the pipe body, the limbers and the runner of the rotator, and the cleaning liquid can drive the rotator to rotate when sprayed out from the top nozzle and the side nozzle.
Preferably, in the method for cleaning the inner wall of the furnace tube, the flow channel is hemispherical.
Preferably, in the method for cleaning the inner wall of the furnace tube, an included angle between the top surface of the rotating body and a vertical plane of the central axis of the rotating body is 30-60 °.
Preferably, in the method for cleaning the inner wall of the furnace tube, the side surface of the rotating body is further provided with a sliding block, and the position of the sliding block can be adjusted to shield part of the side nozzles so as to adjust the water spraying amount of the side nozzles.
In the method for cleaning the inner wall of the furnace tube according to the present invention, the sliding block further comprises a boost groove, an opening of the boost groove is located on a side surface of the sliding block, and the position of the sliding block is adjusted to eject part or all of the liquid in the side nozzle holes from the boost groove to adjust the rotation speed of the rotating body.
The invention has the beneficial effects that:
according to the method for cleaning the inner wall of the furnace tube, the furnace tube is vertically arranged, rotation is not needed, a complex movement mechanism is not needed, and the furnace tube is prevented from being damaged; the space at the top of the furnace tube is filled with the cleaning liquid, so that the problems that the lifting height of the lifting cleaning assembly is limited and the inner wall at the top of the furnace tube is difficult to clean are solved, the inner wall at the top of the furnace tube can be cleaned, and the cleaning effect is improved.
Drawings
The technical solution of the present application is further explained below with reference to the drawings and the embodiments.
FIG. 1 is a schematic structural diagram of one embodiment of a furnace tube cleaning nozzle in example 1 of the present application;
FIG. 2 is a cross-sectional view of the furnace tube cleaning nozzle of FIG. 1;
FIG. 3 is a schematic structural diagram of another embodiment of the furnace cleaning nozzle of example 1 of the present application;
FIG. 4 is a schematic structural diagram of a furnace tube cleaning apparatus according to embodiment 2 of the present application;
FIG. 5 is a schematic view of the construction of the elevating cleaning assembly according to embodiment 2 of the present application;
FIG. 6 is a view showing the position of the flexible flapper when the lifting and washing unit of embodiment 2 of the present application is raised to the topmost position;
FIG. 7 is a schematic structural view of a flexible baffle according to embodiment 2 of the present application; the reference numbers in the figures are:
1. a pipe body;
2. a rotating body;
3. a cover body;
6. a support frame;
7. a frame;
8. lifting the cleaning assembly;
9. a furnace tube;
11. a water through hole;
20. a flow channel;
21. a top spout;
22. a side spout;
23. a slider;
24. a boosting groove;
81. a lifting drive member;
82 A U-shaped tube;
83. a flexible baffle;
831. a rigid tray body;
832. a flexible edge;
833. and (4) opening.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be considered limiting of the scope of the present application. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate a number of the indicated technical features. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the invention, the meaning of "a plurality" is two or more unless otherwise specified.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art through specific situations.
The technical solutions of the present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
Example 1
The present embodiment provides a furnace tube cleaning nozzle, as shown in fig. 1 and 2, including:
the middle of the pipe body 1 is provided with a hollow channel;
the cover body 3 is covered on the top of the pipe body 1;
the rotating body 2 is limited by the cover body 3 and fixed on the top of the pipe body 1;
the end of the top of the pipe body 1 is provided with a limber hole 11 leading to the side wall, a hollow runner 20 communicated with the limber hole 11 is arranged in the middle of the rotator 2, the top of the rotator 2 is an inclined plane, a top nozzle 21 is arranged on the inclined plane, a side nozzle 22 is arranged on the side surface of the rotator 2, the communication channels of the top nozzle 21 and the side nozzle 22 and the runner 20 are not coplanar with the vertical surface of the central axis of the rotator 2, and cleaning liquid flows through the hollow channel of the pipe body 1, the limber hole 11 and the runner 20 of the rotator 2 and can drive the rotator 2 to rotate when sprayed out from the top nozzle 21 and the side nozzle 22.
Further, the flow passage 20 has a hemispherical shape. The hemispherical flow passage 20 can store a certain amount of cleaning liquid to achieve the effect of increasing the ejection pressure of the top nozzle 21 and the side nozzle 22.
Further, the angle between the top surface of the rotating body 2 and the vertical plane of the central axis of the rotating body 2 is 30-60 °, such as 30 °, 40 °, 50 °, 60 °, etc.
Further, as shown in fig. 3, the rotating body 2 is further provided with a sliding block 23 on the side surface, and a part of the side nozzle 22 can be shielded by adjusting the position of the sliding block 23, so as to adjust the water spraying amount of the side nozzle 22.
Furthermore, the slide block 23 is provided with a boost groove 24, the boost groove 24 is opened on the side surface of the slide block 23, and the position of the slide block 23 is adjusted so that part or all of the liquid in the side nozzle holes 22 can be ejected from the boost groove 24 to adjust the rotation speed of the rotating body 2.
In the furnace tube cleaning nozzle of the present embodiment, the cleaning liquid can rotate the rotating body 2 when the cleaning liquid flows through the hollow passage of the tube body 1, the water passage 11, and the flow passage 20 of the rotating body 2 and is ejected from the top nozzle 21 and the side nozzle 22. The rotation of the rotating body 2 is completed without additional power equipment, and the cleaning liquid sprayed from the top nozzles 21 and the side nozzles 22 improves the spraying range of the cleaning liquid and improves the cleaning effect.
Example 2
The present embodiment provides a furnace tube cleaning apparatus, as shown in fig. 4, including:
a frame 7;
the supporting frame 6 is positioned in the frame 7 and used for supporting the furnace tube 9 so that the furnace tube 9 is vertically and fixedly arranged, and the opening of the furnace tube 9 is positioned at the bottom;
the lifting cleaning assembly 8 is used for extending into the furnace tube 9 to clean the interior of the furnace tube 9;
the lifting cleaning assembly 8 comprises a lifting driving member 81, a U-shaped tube 82, and a furnace tube cleaning nozzle as described in embodiment 1 disposed at the end of the U-shaped tube 82;
the U-shaped pipe 82 can penetrate through the support frame 6 (the support frame 6 is of a hollow structure) and extend into the furnace tube 9 from the opening at the bottom of the furnace tube, and the lifting driving piece 81 drives the U-shaped pipe 82 to drive the furnace tube cleaning nozzle to do lifting motion in the furnace tube 9.
Further, a flexible baffle 83 is further arranged on the U-shaped pipe 82, and when the U-shaped pipe 82 is lifted to the topmost end, the flexible baffle 83 is used for delaying the outflow of the cleaning liquid so that the space from the flexible baffle 83 to the top of the furnace tube 9 can be filled with the cleaning liquid. Because the nozzle can not directly wash the inner wall of the top of the furnace tube, the flexible baffle 83 is arranged to delay the flow of the cleaning solution, so that when the flexible baffle 83 reaches the top of the furnace tube 9, the cleaning solution flexible baffle 83 delaying the flow speed can fill the space at the top of the furnace tube 9 with the cleaning solution (as long as the inflow speed of the cleaning solution is greater than the outflow speed of the cleaning solution from the flexible baffle 83, the cleaning solution can be filled in a certain time), and thus the top of the furnace tube 9 is washed. The flexible baffle 83 can be filled with the cleaning liquid and deform when continuously filling the cleaning liquid to discharge redundant cleaning liquid (equivalent to a one-way valve), and in addition, the existence of the flexible baffle 83 can also enable the cleaning liquid to flow down along the edge of the flexible baffle 83 to wash the inner wall of the furnace tube.
The flexible barrier 83, as shown in fig. 7, includes: a rigid central tray 831, and a flexible rim 832 at the edge of the rigid tray 831. The flexible rim 832 has radially disposed openings 833. If the amount of cleaning fluid is too great, this may deform the flexible edge 832 under pressure to allow cleaning fluid to flow therefrom. The openings 833 can increase the deformability of the flexible edge 832, making the flexible edge 832 more susceptible to deformation.
Example 3
The present embodiment provides a method for cleaning an inner wall of a furnace tube, using the furnace tube cleaning apparatus of embodiment 2, including the following steps:
s1: placing the furnace tube on the support frame in a vertical manner, and aligning the furnace tube with the U-shaped tube 82;
s2: a U-shaped pipe 82 with a furnace pipe cleaning nozzle at the tail end passes through the support frame 6 and extends into the furnace pipe 9 from an opening at the bottom of the furnace pipe through the lifting cleaning assembly 8, the furnace pipe cleaning nozzle sprays cleaning liquid and drives the U-shaped pipe 82 to drive the furnace pipe cleaning nozzle to rise in the furnace pipe 9, and a flexible baffle 83 is further arranged on the U-shaped pipe 82;
s3: when the U-shaped pipe 82 is lifted to the topmost end, the flowing-out of the cleaning liquid is delayed by the flexible baffle 83, so that the space from the flexible baffle 83 to the top of the furnace pipe 9 can be filled with the cleaning liquid for a period of time;
s4: the lifting cleaning assembly 8 drives the U-shaped pipe 82 to drive the furnace tube cleaning nozzle to descend in the furnace tube 9, and when the furnace tube cleaning nozzle descends to the lowest end, the cleaning liquid is closed to complete cleaning.
The structure of the furnace tube cleaning nozzle is as described in the embodiments.
The embodiment has the following advantages:
1, the furnace tube is vertically arranged without rotation and complex movement mechanisms, so that the furnace tube is prevented from being damaged;
2, the space at the top of the furnace tube 9 is filled with the cleaning liquid, so that the problems that the lifting height of the lifting cleaning assembly 8 is limited and the inner wall at the top of the furnace tube 9 is difficult to clean are solved, the inner wall at the top of the furnace tube 9 can be cleaned, and the cleaning effect is improved.
In light of the foregoing description of the preferred embodiments according to the present application, it is to be understood that various changes and modifications may be made without departing from the spirit and scope of the invention. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of the claims.

Claims (8)

1. A method for cleaning the inner wall of a furnace tube is characterized by comprising the following steps:
s1: placing the furnace tube on the support frame in a vertical manner, and aligning the furnace tube with the U-shaped tube (82);
s2: a U-shaped pipe (82) with a furnace pipe cleaning nozzle at the tail end penetrates through a support frame (6) and extends into a furnace pipe (9) from an opening at the bottom of the furnace pipe through a lifting cleaning assembly (8), the furnace pipe cleaning nozzle sprays cleaning liquid and drives the U-shaped pipe (82) to drive the furnace pipe cleaning nozzle to rise in the furnace pipe (9), and a flexible baffle (83) is further arranged on the U-shaped pipe (82);
s3: when the U-shaped pipe (82) is lifted to the topmost end, the flowing-out of the cleaning liquid is delayed through the flexible baffle (83), so that the space from the flexible baffle (83) to the top of the furnace pipe (9) can be filled with the cleaning liquid for a period of time;
s4: the lifting cleaning assembly (8) drives the U-shaped pipe (82) to drive the furnace pipe cleaning nozzle to descend in the furnace pipe (9), and when the furnace pipe cleaning nozzle descends to the lowest end, the cleaning liquid is closed to complete cleaning.
2. The furnace tube inner wall cleaning method according to claim 1, wherein the flexible baffle (83) comprises: a rigid central tray (831), and a flexible rim (832) at the edge of the rigid tray (831).
3. The furnace tube inner wall cleaning method according to claim 2, characterized in that the flexible rim (832) has radially arranged openings (833).
4. The method of claim 1, wherein the furnace tube cleaning nozzle comprises:
the pipe body (1) is provided with a hollow channel in the middle;
the cover body (3) is covered on the top of the pipe body (1);
the rotating body (2) is limited by the cover body (3) and is fixed on the top of the pipe body (1);
body (1) top end has limbers (11) that lead to the lateral wall, hollow runner (20) with limbers (11) intercommunication have in the middle of rotator (2), rotator (2) top is the inclined plane that inclines, has seted up top spout (21) on the inclined plane, lateral part spout (22) have been seted up to the side of rotator (2), the perpendicular coplane of the intercommunication passageway of top spout (21) and lateral part spout (22) and runner (20) and the axis of rotator (2) is not, and the runner (20) of hollow channel, limbers (11), rotator (2) of body (1) are flowed through to the washing liquid, can drive when spouting from top spout (21) and lateral part spout (22) rotator (2) are rotatory.
5. The method for cleaning the inner wall of the furnace tube in accordance with claim 4, wherein the flow channel (20) has a hemispherical shape.
6. The furnace tube inner wall cleaning method according to claim 4, wherein the included angle between the top surface of the rotating body (2) and the vertical plane of the central axis of the rotating body (2) is 30-60 °.
7. The furnace tube inner wall cleaning method according to claim 4, wherein the rotating body (2) is further provided with a sliding block (23) on the side surface, and the sliding block (23) is adjusted to shield part of the side nozzles (22) so as to adjust the water spraying amount of the side nozzles (22).
8. The furnace tube inner wall cleaning method according to claim 7, wherein the sliding block (23) is further provided with a boosting groove (24), the opening of the boosting groove (24) is located at the side surface of the sliding block (23), and the position of the sliding block (23) is adjusted to eject part or all of the liquid of the side nozzles (22) from the boosting groove (24) so as to adjust the rotation speed of the rotating body (2).
CN202111226514.5A 2021-10-21 2021-10-21 Method for cleaning inner wall of furnace tube Active CN114160514B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN202111226514.5A CN114160514B (en) 2021-10-21 2021-10-21 Method for cleaning inner wall of furnace tube
PCT/CN2022/109016 WO2023065765A1 (en) 2021-10-21 2022-07-29 Method and device for cleaning inner wall of furnace tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111226514.5A CN114160514B (en) 2021-10-21 2021-10-21 Method for cleaning inner wall of furnace tube

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CN114160514A CN114160514A (en) 2022-03-11
CN114160514B true CN114160514B (en) 2022-10-18

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023065765A1 (en) * 2021-10-21 2023-04-27 江苏亚电科技有限公司 Method and device for cleaning inner wall of furnace tube

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1045488A (en) * 1996-07-30 1998-02-17 Super Silicon Kenkyusho:Kk Cleaning device for inner wall of pulling chamber
CN206009377U (en) * 2016-06-23 2017-03-15 建水乌月山泉有限责任公司 Empty barrel cleaner for inner wall
CN208853393U (en) * 2018-08-17 2019-05-14 无锡亚电智能装备有限公司 A kind of vertical furnace tube wiper mechanism
CN111912216A (en) * 2020-06-24 2020-11-10 中国科学院微电子研究所 Drying mechanism and quartz tube cleaning device with same
CN112642817A (en) * 2020-11-30 2021-04-13 成都冠禹科技有限公司 A test tube self-cleaning equipment for clinical laboratory and uropoiesis surgery
CN112808720A (en) * 2020-12-24 2021-05-18 北京北方华创微电子装备有限公司 Furnace tube cleaning device and furnace tube cleaning equipment
CN213728330U (en) * 2020-11-18 2021-07-20 四川久远环保装备有限公司 Vertical pipeline high pressure sprays belt cleaning device
CN213944244U (en) * 2019-12-30 2021-08-13 苏州亚信华电子科技有限公司 Cleaning equipment for quartz tube
CN113500070A (en) * 2021-09-10 2021-10-15 智程半导体设备科技(昆山)有限公司 Quartz tube cleaning device and cleaning method

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1045488A (en) * 1996-07-30 1998-02-17 Super Silicon Kenkyusho:Kk Cleaning device for inner wall of pulling chamber
CN206009377U (en) * 2016-06-23 2017-03-15 建水乌月山泉有限责任公司 Empty barrel cleaner for inner wall
CN208853393U (en) * 2018-08-17 2019-05-14 无锡亚电智能装备有限公司 A kind of vertical furnace tube wiper mechanism
CN213944244U (en) * 2019-12-30 2021-08-13 苏州亚信华电子科技有限公司 Cleaning equipment for quartz tube
CN111912216A (en) * 2020-06-24 2020-11-10 中国科学院微电子研究所 Drying mechanism and quartz tube cleaning device with same
CN213728330U (en) * 2020-11-18 2021-07-20 四川久远环保装备有限公司 Vertical pipeline high pressure sprays belt cleaning device
CN112642817A (en) * 2020-11-30 2021-04-13 成都冠禹科技有限公司 A test tube self-cleaning equipment for clinical laboratory and uropoiesis surgery
CN112808720A (en) * 2020-12-24 2021-05-18 北京北方华创微电子装备有限公司 Furnace tube cleaning device and furnace tube cleaning equipment
CN113500070A (en) * 2021-09-10 2021-10-15 智程半导体设备科技(昆山)有限公司 Quartz tube cleaning device and cleaning method

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