CN114149001B - Self-assembled carbon nano tube array preparation, transfer and orientation determination method for terahertz - Google Patents

Abstract

The invention discloses a method for preparing, transferring and determining orientation of a self-assembled carbon nano tube array for terahertz. The method prepares the high-density carbon nanotube array on the filter membrane by a vacuum filtration device, and can realize the preparation of the horizontally arranged directional arranged carbon nanotube film by combining the assistance of the gold electrode, wherein the conducting direction of the gold electrode is the arrangement direction of the carbon nanotubes. The method can prepare the carbon nanotube array (directional/non-directional arrangement) with the nano-scale thickness, realizes the rapid transfer of the carbon nanotube array in a simple and environment-friendly mode, and simultaneously determines the orientation of the directional arrangement carbon nanotubes by a rapid and nondestructive method, thereby having higher application value in the field of preparation of terahertz devices based on the carbon nanotubes.

Description

Preparation, transfer and orientation determination of self-assembled carbon nanotube arrays for terahertz

technical field

The invention relates to a method for preparing and processing carbon nanotubes in the field of self-assembled carbon nanotube arrays, in particular to a method for preparing, transferring and measuring orientation of self-assembled carbon nanotube arrays for terahertz.

Background technique

Carbon nanotubes are one-dimensional nanomaterials with high electrical conductivity, which exhibit unique photoelectric effects and are widely used in the preparation of terahertz optoelectronic devices, such as photodetectors, polarizers, and absorbers.

Compared with the preparation of carbon nanotubes by vapor deposition, self-assembled carbon nanotube technology can obtain carbon nanotubes with high purity, single chirality and nanometer thickness, which can better exert the photoelectric performance of carbon nanotubes. At present, for self-assembled carbon nanotube films, the transfer method is chemical wet etching, which uses the principle that the filter membrane is soluble in chloroform and the target substrate and carbon nanotubes are insoluble in chloroform, so as to realize the transfer of self-assembled carbon nanotubes to the target substrate. transfer. The organic solvent chloroform that this method uses has certain toxicity to human body, is a kind of environment unfriendly reagent, simultaneously chloroform dissolves filter membrane and needs certain time, usually whole transfer step takes 20 minutes; Swelling occurs, so the transfer of carbon nanotubes to polydimethylsiloxanes and flexible substrates that swell with chloroform cannot be achieved by this method; wet transfer is also due to van der Waals binding of carbon nanotubes to the target substrate The carbon nanotubes are not compact, resulting in voids and inhomogeneity in the transferred carbon nanotubes; in addition, for the alignment of carbon nanotubes, the current methods to obtain the arrangement direction of carbon nanotubes mainly include Raman spectroscopy, terahertz spectroscopy and scanning electron microscopy. , but these methods are cumbersome and damage the sample.

Contents of the invention

The purpose of the present invention is to realize the preparation of carbon nanotube arrays through self-assembly technology, overcome the shortcomings of existing wet transfer self-assembled carbon nanotubes, and propose a method of self-assembled carbon nanotube arrays through a green, friendly, simple and fast method The method can be transferred to a flexible substrate, and at the same time, the arrangement direction of aligned carbon nanotubes can be determined by a simple, fast and non-destructive method, and then terahertz functional devices can be prepared.

The invention realizes the self-assembly of carbon nanotubes, overcomes the swelling phenomenon of organic solvents and flexible substrates, and transfers uniform and void-free self-assembled carbon nanotube arrays to flexible substrates in a shorter time through a green and friendly method. Rapid and non-destructive method for determining the alignment direction of aligned carbon nanotubes.

Technical scheme of the present invention is:

1. A preparation device for self-assembled carbon nanotube arrays for terahertz:

The device includes a glass bottle, a vacuum pump, a vacuum bottle, a rubber stopper, a connecting pipe, a filter membrane, and a catheter; the glass bottle is placed above the vacuum bottle, the bottom of the glass bottle is opened, and the opening is connected to the inside of the vacuum bottle through the connecting pipe, and the connecting pipe is connected to the glass A filter element is arranged at the opening connection at the bottom of the bottle, and a filter membrane is arranged on the filter element, and a carbon nanotube solution is arranged on the filter membrane, and the vacuum bottle and the vacuum pump are connected through a catheter; Fill the rubber stopper.

It also includes a pair of gold electrodes and an adjustable power supply, a pair of gold electrodes are arranged at intervals on the filter membrane, and the pair of gold electrodes are respectively connected to two ends of the adjustable power supply through wires.

The output voltage of the adjustable power supply is adjustable.

The connection direction of the pair of gold electrodes is parallel to the direction of the nanoscale grooves in the filter membrane.

The glass bottle is used to place the carbon nanotube solution.

The connecting pipe includes an upper disc body and a lower tube body, the disc body is embedded in the opening at the bottom of the glass bottle, the filter elements and filter membranes are stacked on the surface of the disc body from bottom to top, and the upper end of the tube body is concentrically connected to the disc In the central through hole of the body, the lower end of the tube body extends into the vacuum bottle.

The pore diameter of the filter membrane is smaller than the length of a single carbon nanotube. The filter membrane is specifically WhatmanNuclepore Track-Etched membrane, the model is 111106 product or series or model.

2. A method for preparing a self-assembled carbon nanotube array for terahertz, the preparation method comprising:

For non-aligned carbon nanotubes, using the device, usually the filter membrane soaked in deionized water is covered on the connecting pipe; the carbon nanotube solution is added to the glass bottle, and then the vacuum pump is opened, and the glass bottle The non-carbon nanotube substances in the carbon nanotube solution flow into the vacuum bottle, and the carbon nanotube array is gradually deposited on the filter membrane. After no liquid flows into the vacuum bottle, the suction filtration is stopped for a period of time, and self-assembled carbon nanotubes are obtained on the filter membrane. array.

For the aligned carbon nanotubes arranged horizontally, the device is used to cover the filter membrane soaked in deionized water on the connecting pipe, and a pair of gold electrodes are fixed on the filter membrane, and the gap between the pair of gold electrodes is The connection direction is parallel to the direction of the nanoscale groove on the filter membrane, and a pair of gold electrodes are electrically connected to both ends of the adjustable power supply with a wire; the carbon nanotube solution is added to the glass bottle, the adjustable power supply is turned on and the voltage is set. The array of aligned carbon nanotubes is gradually deposited on the filter membrane. When the volume of the solution in the glass bottle is 10%-20% of the added volume, the vacuum pump is turned on again, and the non-carbon nanotube substances in the carbon nanotube solution in the glass bottle Flowing into the vacuum bottle, the carbon nanotube array continues to be gradually deposited on the filter membrane, and the suction filtration is stopped for a period of time after no liquid flows into the vacuum bottle, and the self-assembled carbon nanotube array is obtained on the filter membrane.

The present invention is only aimed at preparing aligned carbon nanotubes arranged horizontally, but not directed at preparing aligned carbon nanotubes aligned vertically.

In the present invention, gold electrodes are arranged on the filter membrane, and the deposition position of carbon nanotubes is controlled through voltage arrangement and nanoscale groove guidance on the membrane, thereby realizing the effect/result of directional arrangement of carbon nanotubes.

3. A self-assembled carbon nanotube array transfer method for terahertz:

The transfer methods described are:

Remove the filter membrane and the self-assembled carbon nanotube array on the filter membrane, and cover the self-assembled carbon nanotube array attached to the filter membrane on the target flexible substrate in parallel and upside down, so that the self-assembled carbon nanotube array directly contacts The surface of the target flexible substrate; then drop the solvent from the top of the filter membrane, use a tool to apply a uniform pressure of 2-10N to the filter membrane and downward, change the energy release rate, after applying pressure for 5s-20s, tear off the filter membrane, Then transfer the self-assembled carbon nanotube array to the target flexible substrate to realize the transfer, and this process can be realized by mechanical automation.

The invention realizes the conversion from the filter membrane to the target flexible substrate after adding water embossing to the carbon nanotube array prepared by self-assembly for the first time, and realizes the effect/advantage of green environmental protection and rapid transfer.

Described solvent is pure water, ethanol or other water solvents.

The target flexible substrate includes dielectric materials such as polydimethylsiloxane, polyimide, polyvinyl chloride, and polyethylene terephthalate.

4. Orientation determination method of self-assembled carbon nanotube arrays for terahertz:

For the aligned carbon nanotubes arranged horizontally, the orientation direction of the aligned carbon nanotubes is consistent with the connection direction between a pair of gold electrodes, that is, it is aligned with the direction of the nanoscale grooves on the filter membrane, and the direction of the grooves in the specific implementation Observe the markers through a microscope. The alignment direction of the aligned carbon nanotubes is taken as the direction of the connection line between a pair of gold electrodes or the direction of the nanoscale grooves on the filter membrane.

The carbon nanotubes in the self-assembled carbon nanotube array are one of single-walled carbon nanotubes and multi-walled carbon nanotubes, or a combination of two types of carbon nanotubes.

Self-assembled carbon nanotube arrays have thicknesses as low as 150 nm and as high as 2 μm.

After the carbon nanotubes are transferred to the target substrate, they are further processed into terahertz functional devices.

The innovative scheme of the invention includes a method for preparing the self-assembled carbon nanotube array, a method for transferring the self-assembled carbon nanotube array and a method for determining the orientation of the self-assembled carbon nanotube array.

The method of the present invention prepares a high-density carbon nanotube array on the filter membrane through a vacuum filtration device, and the preparation of an aligned (horizontal) carbon nanotube film can be realized with the aid of a gold electrode, and the conduction direction of the gold electrode is the carbon nanotube alignment direction.

The present invention can prepare carbon nanotube arrays (orientation/non-orientation arrangement) with nanoscale thickness, realize the rapid transfer of carbon nanotube arrays in a simple, green and environment-friendly way, and measure the orientation of orientation arrangement carbon nanotubes by a fast and nondestructive method at the same time, It has high application value in the field of preparation of terahertz devices based on carbon nanotubes.

Advantage of the present invention and beneficial effect are:

1. The present invention realizes the self-assembly of carbon nanotube arrays through vacuum filtration, and simultaneously realizes the self-assembly of aligned carbon nanotubes with the aid of gold electrodes.

2. In the present invention, the arrangement direction of aligned carbon nanotubes can be obtained through the conduction direction of the gold electrode, which is a fast, simple and non-destructive way to obtain the degree of orientation.

3. The present invention can realize the transfer of self-assembled carbon nanotubes to the target flexible substrate by simply adding water and pressing to increase the energy release rate between carbon nanotubes and the target substrate, which overcomes the chemical wet transfer of self-assembled carbon nanotubes The problems of unfriendly environment, poor membrane uniformity, long operation time, and incompatibility with flexible substrates of high molecular polymers avoid the harm of dangerous reagents (chloroform) to the human body.

4. The present invention can realize nanoscale self-assembled carbon nanotube arrays, the thickness of which can be as low as 150nm, breaking through the technical bottleneck that the direct growth of carbon nanotubes can only transfer micron-scale arrays.

5. The uniformity of the self-assembled carbon nanotubes transferred by the present invention is higher than that of the self-assembled carbon nanotubes transferred by the wet etching method, and the transferred film is complete without voids.

6. The carbon nanotube array transferred to the target substrate of the present invention can be used to prepare terahertz functional devices.

Description of drawings

Figure 1 is a schematic diagram of the self-assembly of non-aligned carbon nanotubes;

Figure 2 is a schematic diagram of the self-assembly of aligned (horizontal) carbon nanotubes;

Fig. 3 is the optical photo of self-assembled carbon nanotube film;

Fig. 4 is the scanning electron micrograph of filter membrane groove;

Figure 5 is a scanning electron micrograph of a self-assembled carbon nanotube film, including (a) non-aligned carbon nanotubes and (b) aligned carbon nanotubes (horizontal arrangement);

Fig. 6 is a flowchart of transfer of self-assembled carbon nanotubes to flexible substrates by adding water;

Figure 7 is an optical photo of self-assembled carbon nanotubes transferred to polydimethylsiloxane flexible substrate;

Figure 8 is an optical photo of self-assembled carbon nanotubes transferred to a polyvinyl chloride flexible substrate;

Figure 9 is a physical picture of a terahertz absorber with a structure of carbon nanotubes-polydimethylsiloxane-gold

In the figure: glass bottle (1), catheter (2), vacuum pump (3), vacuum bottle (4), rubber stopper (5), connecting pipe fittings (6), filter membrane (7), carbon nanotube solution (8) , gold electrode (9), gold electrode (15), wire (16), adjustable power supply (17), wire (18).

Detailed ways

In the specific implementation process, the self-assembled carbon nanotube array preparation, transfer and orientation determination method of the present invention uses vacuum filtration to prepare the self-assembled carbon nanotube array, and at the same time uses gold electrodes to assist in realizing the alignment of carbon nanotubes. The conduction direction of the gold electrode and the groove direction of the filter membrane are the arrangement directions of the carbon nanotubes. Cover the self-assembled carbon nanotube array attached to the filter membrane on the target flexible substrate in parallel, drop the solvent from above, apply uniform pressure manually or with tools, tear off the filter membrane manually or with tools, and the self-assembled carbon The nanotube arrays are then transferred to a flexible substrate.

Below, the present invention is further described in detail through examples and accompanying drawings.

Example 1

As shown in Figure 1, the device of concrete implementation comprises glass bottle 1, conduit 2, vacuum pump 3, vacuum bottle 4, rubber stopper 5, connecting pipe fitting 6, filter membrane 7, carbon nanotube solution 8; Glass bottle 1 is placed in vacuum bottle Above 4, the bottom of the glass bottle 1 is open, and the opening is connected to the inside of the vacuum bottle 4 through the connecting pipe 6. The connecting pipe 6 is arranged at the connection with the bottom opening of the glass bottle 1. The filter element is covered with a filter membrane 7, the vacuum bottle 4 and the vacuum pump. 3; rubber plug 5 is filled in the pipeline connecting pipe fitting 6.

The connecting tube 6 includes an upper disc body and a lower tube body. The disc body is embedded in the opening at the bottom of the glass bottle 1. The filter elements and filter membranes 7 are stacked on the surface of the disc body from bottom to top, and the upper end of the tube body is concentrically connected to the disc. In the central through hole of the body, the lower end of the tube body extends into the vacuum bottle 4.

The filter membrane is a polycarbonate membrane with a pore size of 200nm, and the filter membrane 7 soaked with deionized water is covered on the connecting pipe 6; the prepared concentration is 421ug/mL carbon nanotube solution 6mL is added to the glass bottle 1, and then the vacuum pump 3 open, the pressure in the vacuum bottle 4 is lower than the pressure in the glass bottle 1, so that the material in the glass bottle 1 is extracted into the vacuum bottle 4, and the non-carbon nanotube substances in the carbon nanotube solution in the glass bottle 1 flow into the vacuum bottle 4 , the carbon nanotube array is gradually deposited on the polycarbonate filter membrane 7, and the suction filtration is stopped 1 hour after no liquid flows into the vacuum bottle 4, and self-assembled on the filter membrane 7 is prepared to obtain a self-assembled carbon nanotube with non-aligned carbon nanotubes. Tube array, the self-assembled carbon nanotube array is shown in Figure 3 as a film with a thickness of 2021nm, and the scanning electron microscope results are shown in Figure 5(a).

Example 2

As shown in Figure 2, the device of concrete implementation comprises glass bottle 1, vacuum pump 3, vacuum bottle 4, rubber stopper 5, connecting pipe fitting 6, filter membrane 7; Glass bottle 1 is placed on the top of vacuum bottle 4, glass bottle 1 bottom opening , the opening is connected to the inside of the vacuum bottle 4 through the connecting pipe fitting 6, the connecting pipe fitting 6 is arranged with a filter element at the connection with the bottom opening of the glass bottle 1, the filter element is covered with a filter membrane 7, and the vacuum bottle 4 and the vacuum pump 3 are connected; the pipeline of the connecting pipe fitting 6 Inner packing rubber stopper 5.

The connecting tube 6 includes an upper disc body and a lower tube body. The disc body is embedded in the opening at the bottom of the glass bottle 1. The filter elements and filter membranes 7 are stacked on the surface of the disc body from bottom to top, and the upper end of the tube body is concentrically connected to the disc. In the central through hole of the body, the lower end of the tube body extends into the vacuum bottle 4.

It also includes a pair of gold electrodes 9, 15 and an adjustable power supply 17, a pair of gold electrodes 9, 15 are arranged at intervals on the filter membrane 7, and a pair of gold electrodes 9, 15 are respectively connected to the adjustable power supply 17 through wires 16, 18 The direction of the pair of gold electrodes 9 and 15 is parallel to the direction of the nanoscale grooves in the filter membrane 7 .

The filter membrane is a polycarbonate membrane with a pore size of 200nm. The filter membrane 7 soaked with deionized water is covered on the connecting pipe 6, and a pair of gold electrodes 9 and 15 are fixed on the filter membrane 7 in parallel, and a pair of gold electrodes The direction of the line between 9 and 15 is parallel to the direction of the nanoscale groove on the filter membrane 7, and the direction of the groove is observed and marked through a microscope, as shown in FIG. 4 is a scanning electron microscope image of the groove of the filter membrane. , a pair of gold electrodes 9,15 are electrically connected to the two ends of the adjustable power supply 17 with wires 16,18;

Prepare 20 mL of a carbon nanotube solution with a concentration of 10 ug/mL, add the carbon nanotube solution into the glass bottle 1, turn on the adjustable power supply 17 and set the voltage, so that the array of aligned carbon nanotubes is gradually deposited and grown on the filter membrane 7, when the glass When the volume of the solution in the bottle 1 is 1ml, turn on the vacuum pump 11 again, the pressure in the vacuum bottle 4 is lower than the pressure in the glass bottle 1, so that the substance in the glass bottle 1 is extracted into the vacuum bottle 4, and the carbon nanotube solution in the glass bottle 1 The non-carbon nanotube substances in the flow into the vacuum bottle 4, the carbon nanotube array continues to be deposited on the filter membrane 7 gradually, and the suction filtration is stopped 1 hour after no liquid flows into the vacuum bottle 4, and the self-assembled preparation on the filter membrane 7 has obtained The self-assembled carbon nanotube array of aligned carbon nanotubes arranged horizontally, the self-assembled carbon nanotube array is shown in Figure 3 as a film with a thickness of 146nm, and the scanning electron microscope results are shown in Figure 5(b).

Example 3

As shown in Figure 6, the obtained self-assembled carbon nanotube arrays were covered in parallel downwards on the polydimethylsiloxane flexible substrate, and the polycarbonate filter membrane adhered to it was facing upwards, 10uL of ultrapure water was added dropwise, and Apply a force of 5N uniformly vertically to the surface of the self-assembled carbon nanotube array. After 10s, use tweezers to uncover the polycarbonate filter membrane along one side of the film to realize self-assembled carbon nanotubes from polycarbonate film to polydimethylsiloxane Transfer of flexible substrates.

The result of transferring 2cm×2cm self-assembled carbon nanotubes to polydimethylsiloxane flexible substrate is shown in Figure 7, and the transferred film is uniform and complete.

A 200nm gold layer was sputtered on the side of the polydimethylsiloxane not in contact with the carbon nanotube array to prepare a flexible terahertz absorber, as shown in FIG. 9 .

Example 4

Cover the self-assembled carbon nanotubes prepared by the method of Example 3 of the present invention in parallel downwards on the flexible surface of polyvinyl chloride, with the polycarbonate filter membrane adhering to it facing up, add 10uL of ultrapure water dropwise, and vertically A force of 2N was applied to the tube, and after 2s, the polycarbonate filter membrane was uncovered along one side of the film with tweezers to realize the transfer of self-assembled carbon nanometers from the polycarbonate film to the flexible polyvinyl chloride substrate.

Figure 8 shows the result of transferring 1cm×1.2cm self-assembled carbon nanotubes to the flexible polyvinyl chloride substrate, and the transferred film is uniform and complete.

In the present invention, the transfer of self-assembled carbon nanotubes to the target flexible substrate can be realized by increasing the energy release rate between carbon nanotubes and the target substrate by simply adding water and pressing the method, which overcomes the environmental problems of chemical wet transfer of self-assembled carbon nanotubes. Friendly, poor film uniformity, long operating time, and incompatibility with polymer flexible substrates, nanoscale self-assembled carbon nanotube arrays can be realized, and the thickness can be as low as 150nm, breaking through the direct growth of carbon nanotubes. The technical bottleneck of transferring micron-scale carbon nanotube arrays can obtain self-assembled carbon nanotubes whose uniformity is higher than that transferred by wet etching method, and the transferred film is complete and void-free.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any minor modifications, equivalent replacements and improvements made to the above embodiments according to the technical essence of the present invention shall be included in the present invention. within the protection scope of the technical solution.

Claims (8)

1. A self-assembled carbon nanotube array preparation device for terahertz is characterized in that,

the device comprises a glass bottle (1), a vacuum pump (3), a vacuum bottle (4), a rubber plug (5), a connecting pipe fitting (6), a filter membrane (7) and a catheter (2); the glass bottle (1) is arranged above the vacuum bottle (4), the bottom of the glass bottle (1) is provided with an opening, the opening is communicated to the inside of the vacuum bottle (4) through a connecting pipe fitting (6), a filter element is arranged at the joint of the connecting pipe fitting (6) and the bottom opening of the glass bottle (1), a filter membrane (7) is covered on the filter element, a carbon nano tube solution (8) is covered on the filter membrane, and the vacuum bottle (4) is communicated with the vacuum pump (3) through a guide pipe (2); the pipeline of the connecting pipe fitting (6) is connected with the vacuum bottle (4) through a rubber plug (5);

the filter membrane (7) is provided with a pair of gold electrodes (9, 15) at intervals, the pair of gold electrodes (9, 15) are respectively connected to two ends of the adjustable power supply (17) after being connected with wires (16, 18);

the filter membrane (7) is provided with a nanoscale groove.

2. The device for preparing a terahertz self-assembled carbon nanotube array according to claim 1, wherein: the output voltage of the adjustable power supply (17) is adjustable.

3. The device for preparing a terahertz self-assembled carbon nanotube array according to claim 1, wherein: the connecting line direction of the pair of gold electrodes (9, 15) is parallel to the nano-scale groove direction in the filter membrane (7).

4. The device for preparing a terahertz self-assembled carbon nanotube array according to claim 1, wherein: the connecting pipe fitting (6) comprises a tray body positioned at the upper part and a pipe body positioned at the lower part, wherein the tray body is embedded in an opening at the bottom end of the glass bottle (1), the surface of the tray body is provided with a filter element and a filter membrane (7) in a stacking way from bottom to top, the upper end of the pipe body is concentrically connected into a central through hole of the tray body, and the lower end of the pipe body extends into the vacuum bottle (4).

5. The method for preparing the self-assembled carbon nano tube array for terahertz applied to the device of claim 1, which is characterized by comprising the following steps: for the horizontally arranged directional carbon nanotubes, the device of claim 2 is adopted, a filter membrane (7) soaked by deionized water is covered on a connecting pipe fitting (6), a pair of gold electrodes (9, 15) are fixed on the filter membrane (7), the connecting line direction between the pair of gold electrodes (9, 15) is parallel to the nano-scale groove direction on the filter membrane (7), and the pair of gold electrodes (9, 15) are electrically connected with two ends of an adjustable power supply (17) by leads (16, 18); adding a carbon nano tube solution into a glass bottle (1), opening an adjustable power supply (17) and setting voltage to enable the carbon nano tube array to be deposited on a filter membrane (7) gradually in an oriented arrangement mode, when the volume of the solution in the glass bottle (1) is 10-20% of the added volume, opening a vacuum pump (11), enabling non-carbon nano tube substances in the carbon nano tube solution in the glass bottle (1) to flow into a vacuum bottle (4), enabling the carbon nano tube array to continue to be deposited on the filter membrane (7) gradually, stopping suction filtration for a period of time after no liquid flows into the vacuum bottle (4), and obtaining the self-assembled carbon nano tube array on the filter membrane (7).

6. The transfer method of the self-assembled carbon nano tube array for terahertz is characterized by comprising the following steps of: the self-assembled carbon nano tube array attached to the filter membrane is covered on the target flexible substrate in a parallel and upside down mode, so that the self-assembled carbon nano tube array is in direct contact with the surface of the target flexible substrate; and then dropwise adding a solvent from the upper part of the filter membrane to the lower part of the filter membrane, applying uniform pressure to the filter membrane for 2-10N, and tearing off the filter membrane after applying the pressure for 5-20 s, so as to transfer the self-assembled carbon nano tube array onto a target flexible substrate to realize transfer.

7. The method for transferring a terahertz self-assembled carbon nanotube array according to claim 6, wherein the target flexible substrate comprises polydimethylsiloxane, polyimide, polyvinyl chloride, and polyethylene terephthalate dielectric materials.

8. The method for measuring orientation of the self-assembled carbon nanotube array for terahertz prepared by the preparation method of claim 5 is characterized in that for the horizontally arranged and oriented carbon nanotubes, the direction of a connecting line between a pair of gold electrodes or the direction of a nanoscale groove on the filter membrane is used as the orientation direction of the oriented carbon nanotubes.

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