CN114136526A - Three-dimensional force touch sensor based on magnetostrictive inverse effect - Google Patents
Three-dimensional force touch sensor based on magnetostrictive inverse effect Download PDFInfo
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- CN114136526A CN114136526A CN202111431897.XA CN202111431897A CN114136526A CN 114136526 A CN114136526 A CN 114136526A CN 202111431897 A CN202111431897 A CN 202111431897A CN 114136526 A CN114136526 A CN 114136526A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/169—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using magnetic means
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Abstract
The application discloses a three-dimensional force touch sensor based on a magnetostrictive reverse effect, which comprises a contact, a small permanent magnet, an inner magnetic field detection element, an outer magnetic field detection element, magnetostrictive metal, a sensor base and a bias magnetic field permanent magnet; the contact is used for receiving pressure; one end of the magnetostrictive metal is movably connected with the contact, and the other end of the magnetostrictive metal is fixedly connected with the sensor base and is in contact with the external magnetic field detection element; the bias magnetic field permanent magnet is used for providing a bias magnetic field to the fixed end of the magnetostrictive metal; the small permanent magnet is fixedly connected with the bottom of the contact and used for providing a bias magnetic field for the movable end of the magnetostrictive metal and changing a space magnetic field at the bottom of the contact along with the movement of the contact; the internal magnetic field detection element is used for detecting the force bearing direction of the contact by detecting the magnetic field change caused by the small permanent magnet; the external magnetic field detection element is used for detecting the stress of the contact by detecting the change of the internal magnetic field of the magnetostrictive metal. The manufacturing process and the assembly flow are simple, and the price is low.
Description
Technical Field
The application belongs to the technical field of touch sensors, and particularly relates to a three-dimensional force touch sensor based on a magnetostrictive inverse effect.
Background
The three-dimensional force touch sensor plays a vital role in the precision and intelligence of high-end electromechanical equipment such as robots, high-precision machine tools and the like. Current tactile sensors are mainly classified into resistive, capacitive, piezoelectric, etc. according to the sensing principle, but the capacitive type generally requires additional signal amplification and processing circuits. The piezoresistive sensor has lower measurement resolution. The piezoelectric sensor cannot keep the output voltage stable and cannot measure the static force. And the sensor has the advantages of complex preparation process, high price and high assembly difficulty.
Disclosure of Invention
The application provides a three-dimensional force touch sensor based on magnetostriction reverse effect, pressure that the sensor received causes the magnetostriction material to produce deformation, leads to the material internal magnetic field to change, detects the change in magnetic field through the hall element, turns into voltage signal output with magnetic field change, establishes the conversion relation of power-voltage, realizes that the sensor precision is high, can measure advantages such as dynamic and static force, simple structure.
In order to achieve the above purpose, the present application provides the following solutions:
a three-dimensional force touch sensor based on a magnetostrictive reverse effect comprises a contact, a small permanent magnet, an internal magnetic field detection element, an external magnetic field detection element, magnetostrictive metal, a sensor base and a bias magnetic field permanent magnet;
the contact is used for receiving pressure;
one end of the magnetostrictive metal is movably connected with the contact, and the other end of the magnetostrictive metal is fixedly connected with the sensor base and is in contact with the external magnetic field detection element;
the bias magnetic field permanent magnet is used for providing a bias magnetic field for the fixed end of the magnetostrictive metal;
the small permanent magnet is fixedly connected with the bottom of the contact and used for providing a bias magnetic field for the movable end of the magnetostrictive metal, and the small permanent magnet is also used for changing a space magnetic field at the bottom of the contact along with the movement of the contact;
the inner magnetic field detection element is used for detecting the movement direction of the contact by detecting the change of the space magnetic field at the bottom of the contact;
the external magnetic field detection element is used for detecting the stress magnitude of the contact by detecting the change of the internal magnetic field of the magnetostrictive metal;
the miniature permanent magnet and the internal magnetic field detection element are positioned inside the contact;
the external magnetic field detection element and the bias magnetic field permanent magnet are fixedly connected with the sensor base.
Optionally, the internal magnetic field detection element and the external magnetic field detection element are both hall elements.
Optionally, the side surface of the contact is provided with a through hole in each of four mutually perpendicular directions;
and the movable end of the magnetostrictive metal is movably connected with the contact through the through hole.
Optionally, the magnetostrictive metal is iron gallium wire.
Optionally, the number of the iron gallium wires is four;
the four iron gallium wires are movably connected with the contact through one through hole respectively, and the four iron gallium wires are perpendicular to each other.
Optionally, the three-dimensional force touch sensor is calibrated by polar coordinates.
Optionally, the internal magnetic field detection element and the external magnetic field detection element both convert the detected magnetic field change into a voltage signal.
Optionally, the voltage signal is transmitted to a computer through a data acquisition card or an oscilloscope, so as to obtain the magnitude and the direction of the three-dimensional force received by the contact.
The beneficial effect of this application does:
the application discloses a three-dimensional force touch sensor based on a magnetostrictive inverse effect, which can convert the received pressure into a voltage signal, detect the magnitude and the direction of a contact force through the difference of output voltages of different channels so as to realize the purpose of detecting the contact three-dimensional force, has good precision, and can distinguish that the minimum force can reach 0.01N; the manufacturing process and the assembly flow are simple, compared with the sensor which needs photoetching and is prepared in an ultra-clean environment, the manufacturing condition and the manufacturing process are simple, and the sensor can be even manufactured by hand as long as the existing iron gallium wire exists; the price is cheap, and this technical scheme can adopt base and the hall chip and the rubidium magnet of low price that 3D printed, reduces the cost of manufacture by a wide margin.
Drawings
In order to more clearly illustrate the technical solution of the present application, the drawings needed to be used in the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for a person skilled in the art to obtain other drawings without any inventive exercise.
FIG. 1 is a schematic structural diagram of a three-dimensional force touch sensor based on the inverse magnetostrictive effect according to an embodiment of the present application;
fig. 2 is a disassembled schematic view of a three-dimensional force tactile sensor structure based on the inverse magnetostrictive effect according to an embodiment of the present application;
FIG. 3 is a schematic diagram illustrating an operation principle of a three-dimensional force touch sensor based on a magnetostrictive inverse effect according to an embodiment of the present application;
fig. 4 shows the results of experiment 1 in the present example when θ is 0 °,
a schematic diagram of the output characteristics of the sensor when different forces are applied;
fig. 5 shows the difference between r and θ in experiment 2 in the example of the present application when r is 1.5N and θ is 50 °
A schematic of the output characteristics of the time sensor;
fig. 6 shows that r is 1.5N and θ is 50 ° in experiment 2 in the example of the present application
The output voltage schematic diagram of the outer layer Hall element;
fig. 7 is a graph showing the dynamic characteristics of the outer hall element at 1Hz in experiment 2 in the example of the present application.
Description of the reference numerals
1. A contact; 2. a small permanent magnet; 3. an inner layer Hall element; 4. iron gallium wire; 5. a sensor base; 6. a bias magnetic field permanent magnet; 7. and an outer Hall element.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In order to make the aforementioned objects, features and advantages of the present application more comprehensible, the present application is described in further detail with reference to the accompanying drawings and the detailed description.
As shown in fig. 1 to 3, a three-dimensional force tactile sensor based on a magnetostrictive reverse effect according to an embodiment of the present application includes a contact 1, a small permanent magnet 2, an internal magnetic field detection element, an external magnetic field detection element, magnetostrictive metals, a sensor base 5, and a bias magnetic field permanent magnet 6.
Wherein the contact 1 is intended to receive pressure. The side surfaces of the contact 1 have a through hole in each of four directions perpendicular to each other.
In the embodiment, in order to ensure higher precision, the magnetostrictive metal adopts the iron gallium wires 4, four iron gallium wires 4 are used in total corresponding to four through holes on the side surface of the contact, one end of each iron gallium wire 4 is inserted into each through hole to be movably connected with the contact, and the other end of each iron gallium wire 4 is fixedly connected with the sensor base 5 and is in contact with the external magnetic field detection element fixed on the outer wall of the sensor base 5;
the bias magnetic field permanent magnet 6 is fixedly connected with the sensor base 5 and used for providing a uniform bias magnetic field for the fixed end of the iron gallium wire 4.
The small permanent magnet 2 is fixedly connected with the bottom of the contact 1, the polarity of the upper end of the small permanent magnet is the same as that of the inner side of the bias magnetic field permanent magnet 6, and the small permanent magnet and the bias magnetic field permanent magnet 6 are matched to provide a more uniform bias magnetic field for the iron gallium wire 4. When the contact 1 is stressed, the small permanent magnet 2 moves along with the contact, and the space magnetic field at the bottom of the contact 1 changes along with the movement of the small permanent magnet 2. The change of the space magnetic field is detected, and the forced movement direction of the contact can be reflected.
The inner magnetic field detection element is fixed on the inner wall of the lower layer of the sensor base 5 and used for detecting the stress direction of the contact 1 by detecting the magnetic field change of the small permanent magnet 2; the external magnetic field detection element is used for detecting the stress of the contact 1 by detecting the change of the internal magnetic field of the iron gallium wire 4, can be fixed on the sensor base 5 by glue, is in contact with the fixed end of the iron gallium wire 4 and keeps relatively static, and the sensitivity of detection signals is improved. In the present embodiment, in order to ensure higher accuracy, both the internal magnetic field detection element and the external magnetic field detection element are hall elements, which are respectively labeled as an inner layer hall element 3 and an outer layer hall element 7.
The operation principle of the three-dimensional force tactile sensor of the embodiment is expressed as follows:
the sensor is calibrated by polar coordinates and can be subjected to unknown three-dimensional forces in different directions and different sizes. When the contact 1 is subjected to three-dimensional forces with different directions and different magnitudes, the position change of the contact 1 drives the position change of the small permanent magnet 2 at the bottom of the contact 1, meanwhile, the pressure on the contact 1 is transmitted to the iron gallium wires 4, and the four iron gallium wires 4 deform to different degrees, namely, the force part in fig. 3.
According to different forces, the deformation degrees of the four iron gallium wires 4 are different, the magnetic field inside the iron gallium wires 4 under the bias magnetic field is changed differently due to the inverse magnetostriction effect, and meanwhile, the magnetic field in the bottom space of the contact 1 is changed due to the position change of the small permanent magnet 2 at the bottom of the contact 1, namely, the magnetic part in fig. 3.
The Hall element detects the change of the magnetic field, and the output voltage of the Hall element also changes, wherein the inner layer Hall element 3 detects the change of the magnetic field of the bottom space of the contact 1, outputs a corresponding voltage signal and represents the direction of the acting force; the outer hall element 7 detects the change of the magnetic field inside the iron gallium filament 4, outputs a corresponding voltage signal, and represents the magnitude of the acting force, namely the 'electric' part in fig. 3.
To this end, the "force-magnetic-electric" conversion process is completed. 8 voltage signals are collected into a computer through an oscilloscope or a data acquisition card, and the size and the direction of the three-dimensional force applied to the contact 1 are solved according to a corresponding algorithm.
To verify the performance of the three-dimensional force tactile sensor in this embodiment, three specific experiments are performed below.
Experiment 1: the sensor actually outputs a voltage curve under the action of 0-2N vertical static force, and the main purpose is to research the sensitivity of the sensor to the force in the vertical direction and determine the correction coefficient of each outer layer Hall element in a sensor decoupling algorithm.
Building an experiment platform: the packaged sensor shown in fig. 1-2 is fixed on an angle table, a loading machine is used for applying pressure to a sensing unit, an initial voltage is provided for the sensor through a direct current stabilized voltage supply, and the output voltage of the sensor is collected through a data acquisition card and displayed in a computer.
Experimental procedures and results: the sensor is fixed on an angle table after being assembled, the angle table adjusts the angle theta to be 0 degree,
8 output ports of the sensor are connected to a DH-8303 type data acquisition card, the acquisition card is connected with a computer, and data is read by the computer. The VCC and GND ports of the sensor are connected with a DC stabilized voltage power supply, the VCC port is connected with 3V DC voltage, and the GND port is grounded. The load machine is adopted to apply force to the sensing unit, and the voltage signal displayed in the computer is recorded, so that the result is shown in figure 4, the linearity of the visible sensor is good, the static force of 0-2N can be measured, and the correction coefficients are 0.42, 0.31, 0.11 and 0.16 respectively.
The software or protocol involved in the present invention is well known in the art.
Experiment 2: the sensor differs in that r is 1.5N, theta is 50 deg
The actual output voltage curve under the action of static force mainly aims at researching the linearity of the sensor to the force in the horizontal direction.
Building an experiment platform: the packaged sensor shown in fig. 1-2 is fixed on an angle table, a loading machine is used for applying pressure to a sensing unit, an initial voltage is provided for the sensor through a direct current stabilized voltage supply, and the output voltage of the sensor is collected through a data acquisition card and displayed in a computer.
Experimental procedures and results: the sensor is fixed on an angle table after being assembled, the angle table adjusts the angle theta to be 50 degrees,
8 output ports of the sensor are connected to a DH-8303 type data acquisition card, the acquisition card is connected with a computer, and data is read by the computer. The VCC and GND ports of the sensor are connected with a DC stabilized voltage power supply, the VCC port is connected with 3V DC voltage, and the GND port is grounded. The loading machine is adopted to apply a fixed 1.5N force to the sensing unit, the phi angle is adjusted, data is recorded every 10 degrees, and voltage signals displayed in the computer are recorded, so that the results are shown in fig. 5 and 6, the shape of a sine curve can be obviously seen, and the linearity of the sensor to the horizontal force is good.
The software or protocol involved in the present invention is well known in the art.
Experiment 3: the actual output voltage curve of the sensor under the action of 1Hz vertical dynamic force mainly aims at researching the dynamic measurement performance of the sensor.
Building an experiment platform: the experimental platform comprises a vibration exciter, a signal generator, a power amplifier, a direct-current stabilized voltage power supply, a data acquisition card and a computer. A power amplifier is used for amplifying a 1Hz sinusoidal signal output by a signal generator and transmitting the signal to a vibration exciter to enable the vibration exciter to generate a dynamic force with the amplitude of 1N and the frequency of 1Hz, a direct current stabilized voltage power supply supplies power to a sensor, and an output signal of the sensor is transmitted to a computer for display through a data acquisition card.
Experimental procedures and results: after the sensor is assembled, the sensor is fixed on an angle table, and the angle table adjusts the angle theta to be 0 DEG and phi to be 0 deg. The output port of the outer layer Hall element 1 of the sensor is connected to a DH-8303 type data acquisition card, the acquisition card is connected with a computer, and data is read by the computer. The VCC and GND ports of the sensor are connected with a DC stabilized voltage power supply, the VCC port is connected with 3V DC voltage, and the GND port is grounded. A power amplifier is used for amplifying a 1Hz sinusoidal signal output by a signal generator and transmitting the signal to a vibration exciter, the vibration exciter applies a dynamic force with the frequency of 1Hz and the amplitude of 1N to the sensor, a voltage signal displayed in a computer is recorded, and the result is shown in figure 7.
The software or protocol involved in the present invention is well known in the art.
The invention has the characteristics of simple structure, simple manufacturing and assembling process, high measurement precision and capability of measuring dynamic force and static force. The single-channel sensitivity is as high as 40mV/N, the linearity is good in the vertical direction and the horizontal direction, and the output characteristic is good under the dynamic force of 1 Hz. The manipulator is assembled on the manipulator, the three-dimensional force sensing capability can be given to the manipulator, simple tasks such as shape recognition, rigidity detection and texture recognition can be completed, complex tasks such as holding pose detection, object gravity center detection and optimal grabbing posture judgment can be performed, and more intelligent touch sensing capability is given to the manipulator.
The above-described embodiments are merely illustrative of the preferred embodiments of the present application, and do not limit the scope of the present application, and various modifications and improvements made to the technical solutions of the present application by those skilled in the art without departing from the spirit of the present application should fall within the protection scope defined by the claims of the present application.
Claims (8)
1. A three-dimensional force touch sensor based on a magnetostrictive reverse effect is characterized by comprising a contact, a small permanent magnet, an internal magnetic field detection element, an external magnetic field detection element, magnetostrictive metal, a sensor base and a bias magnetic field permanent magnet;
the contact is used for receiving pressure;
one end of the magnetostrictive metal is movably connected with the contact, and the other end of the magnetostrictive metal is fixedly connected with the sensor base and is in contact with the external magnetic field detection element;
the bias magnetic field permanent magnet is used for providing a bias magnetic field for the fixed end of the magnetostrictive metal;
the small permanent magnet is fixedly connected with the bottom of the contact and used for providing a bias magnetic field for the movable end of the magnetostrictive metal, and the small permanent magnet is also used for changing a space magnetic field at the bottom of the contact along with the movement of the contact;
the inner magnetic field detection element is used for detecting the movement direction of the contact by detecting the change of the space magnetic field at the bottom of the contact;
the external magnetic field detection element is used for detecting the stress magnitude of the contact by detecting the change of the internal magnetic field of the magnetostrictive metal;
the miniature permanent magnet and the internal magnetic field detection element are positioned inside the contact;
the external magnetic field detection element and the bias magnetic field permanent magnet are fixedly connected with the sensor base.
2. The magnetostrictive inverse effect-based three-dimensional force tactile sensor according to claim 1, characterized in that the internal magnetic field detection element and the external magnetic field detection element are both hall elements.
3. The three-dimensional force tactile sensor based on the magnetostrictive inverse effect according to claim 1, wherein the side surface of the contact has a through hole in each of four directions perpendicular to each other;
and the movable end of the magnetostrictive metal is movably connected with the contact through the through hole.
4. The magnetostrictive inverse-effect-based three-dimensional force tactile sensor according to claim 3, characterized in that the magnetostrictive metal is a wire of iron gallium.
5. The magnetostrictive inverse-effect-based three-dimensional force tactile sensor according to claim 4, characterized in that the number of the iron gallium wires is four;
the four iron gallium wires are movably connected with the contact through one through hole respectively, and the four iron gallium wires are perpendicular to each other.
6. The three-dimensional force touch sensor based on the magnetostrictive inverse effect according to any one of claims 1-5, characterized in that the three-dimensional force touch sensor is calibrated by polar coordinates.
7. The inverse magnetostrictive effect-based three-dimensional force tactile sensor according to claim 6, wherein the internal magnetic field detection element and the external magnetic field detection element both convert the detected magnetic field change into a voltage signal.
8. The three-dimensional force touch sensor based on the inverse magnetostrictive effect according to claim 7, wherein the magnitude and direction of the three-dimensional force received by the contact are obtained by transmitting the voltage signal to a computer through a data acquisition card or an oscilloscope.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114964597A (en) * | 2022-07-27 | 2022-08-30 | 南京航空航天大学 | Six-dimensional force/torque sensor based on inverse magnetostriction effect |
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- 2021-11-29 CN CN202111431897.XA patent/CN114136526A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114964597A (en) * | 2022-07-27 | 2022-08-30 | 南京航空航天大学 | Six-dimensional force/torque sensor based on inverse magnetostriction effect |
| CN114964597B (en) * | 2022-07-27 | 2022-11-08 | 南京航空航天大学 | Six-dimensional force/torque sensor based on inverse magnetostriction effect |
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