CN114136444A - Broadband detector spectral responsivity calibration device based on low-temperature radiometer - Google Patents
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Abstract
The invention belongs to the field of optical metering test, and discloses a broadband detector spectral responsivity calibration device based on a low-temperature radiometer, which comprises a monochromatic radiation source system, a multi-light-path switching system, a vacuum comparison channel, a low-temperature radiometer system, a vacuum detector cabin, a detection system containing a transmission standard detector and a detector to be tested, and a computer provided with a measurement module; monochromatic light output by the monochromatic light source system enters a vacuum comparison channel through the multi-light-path switching system and is respectively received by the low-temperature radiometer, the transmission standard detector and the detector to be detected; and the output signals of the low-temperature radiometer, the transfer standard detector and the detector to be detected are sent to a computer for processing, and the calibration results of the spectral responsivity of the transfer standard detector and the detector to be detected are obtained. The invention solves the problem of accurate calibration of the spectral responsivity of the detector, has the spectral range of 115 nm-20 mu m, and has the characteristics of high measurement accuracy, wide spectral range, good repeatability and wide application prospect.
Description
Technical Field
The invention belongs to the technical field of optical measurement and test, relates to an optical calibration device, and particularly relates to a detector spectral responsivity calibration device which takes a low-temperature radiometer as a reference and combines a vacuum technology, a multi-light-path switching technology and a precision detection technology.
Background
Optical metrology is the most fundamental component of overall optical metrology. The application range is very wide, and the optical fiber laser relates to the specialties of luminosity, spectral luminosity, infrared radiation, low-light night vision, laser power, energy and the like. The metering of these parameters plays a tremendous role in modern war. The core of optical radiation measurement is measurement test of radiation characteristics of a radiation source and detection characteristics of a radiation detector. Thus, the highest standard for radiation measurement is the standard radiation source and the standard detector. In order to increase the measurement level of optical radiation, many developed countries invest a lot of money and develop new methods for optical radiation measurement.
In 1980, the U.S. national standards institute first conducted a research work on a light radiation dose transmission system based on a low-temperature radiometer at a monochromatic wavelength of 632.8nm with a measurement uncertainty of 0.05%, and then, in britain, germany, france, japan, hungary, and the like, conducted a research on this technique successively. In the united kingdom, a radiation standard is established on the basis of a low-temperature radiometer, so that the uncertainty of the radiation standard is reduced from a few thousandths to one ten thousandth, and the whole radiometric level is improved by one order of magnitude. Due to the development of the cryoradiometer technology, the optical radiometry has advanced a great deal, reaching the lowest uncertainty that has not been possible before. Therefore, the low-temperature radiometer is gradually becoming the benchmark of luminosity, spectrophotometry, spectral radiance and laser power, energy measurement, and has been used as the highest standard of photometry and radiometry by many national standard laboratories.
The spectral responsivity is one of important technical parameters of the detector, and with the development of detection technology, the requirements on the detector are higher and higher, and generally, only the relative spectral responsivity of the detector needs to be known, but in order to solve the problem of radiation magnitude transfer, the absolute spectral responsivity of the detector needs to be measured, so that the accurate measurement of the spectral responsivity of the detector is very necessary.
At present, there are two methods for calibrating the absolute spectral responsivity of a detector by using a low-temperature radiometer, one of which is to calibrate the absolute spectral responsivity of the detector at a specific wavelength, for example, a He-Ne laser is selected to calibrate the absolute spectral responsivity of the detector 632.8nm by using the low-temperature radiometer, and then the relative spectral responsivity of the detector in a full wave band is calibrated on a relative spectral responsivity device, so that the absolute spectral responsivity of the detector can be obtained according to the absolute spectral responsivity of a known point and the relative spectral responsivity of the detector; secondly, the absolute spectral response of the detector is calibrated by using a low-temperature radiometer on a plurality of laser wavelengths, and then the absolute spectral responsivity of other wavelengths can be obtained by interpolation. For example, volume 25 of optics journal, at stage 5, a paper entitled "high precision light radiation absolute calibration study of visible near infrared (488 nm-944 nm) based cryoradiometer" describes the second approach. However, the two measurement methods are limited by the wavelength of the laser, and cannot realize the calibration of the absolute spectral responsivity of the broadband detector and the calibration of the absolute spectral responsivity of the detector by the low-temperature radiometer under the continuous wavelength condition, so that the measurement accuracy is reduced.
Disclosure of Invention
Objects of the invention
The purpose of the invention is: aiming at the problem that the absolute spectral responsivity of a broadband detector in the prior art cannot be accurately measured, the calibration device based on the absolute spectral responsivity of the broadband detector is provided, specifically, the calibration device takes the low-temperature radiometer as a reference and combines a vacuum technology, a multi-light-path switching technology and a precision detection technology, so that the absolute spectral responsivity of the broadband detector is calibrated.
(II) technical scheme
In order to solve the technical problem, the invention provides a broadband detector absolute spectral responsivity calibration device based on a low-temperature radiometer, which comprises a monochromatic light source system, a multi-light-path switching system, a vacuum comparison channel, a low-temperature radiometer system, a vacuum detector cabin, a detection system containing a transmission standard detector and a detector to be measured and a computer provided with a measurement software package; vacuum ultraviolet to long-wave infrared monochromatic light with instability less than 0.1% output by the monochromatic light source system enters a vacuum comparison channel through the multi-light-path switching system and is received by the low-temperature radiometer, a transmission standard detector of the detection system and a detector to be detected respectively, and the detection system is placed in a vacuum detector cabin; the outputs of the low-temperature radiometer, the transmission standard detector and the detector to be detected are sent to a computer; the computer processes the received signal correspondingly, and finally gives the calibration result of the spectral responsivity of the transmission standard detector and the detector to be tested.
The monochromatic light source system comprises a monochromatic light source system comprising a laser group and a power stabilizing instrument, a light source group and a monochromator, a multi-light-path switching system, a vacuum comparison channel, a low-temperature radiometer system, a vacuum detector cabin, a detection system, an arc-shaped track controlled by a motor and a computer provided with a measurement software package.
The light source group and the monochromator consist of a deuterium lamp, a vacuum ultraviolet-ultraviolet monochromator, a tungsten ribbon lamp, a silicon-carbon rod and a visible-infrared monochromator; the multi-light path switching system consists of a Brewster vacuum window, a flange vacuum window, a flat glass vacuum window and a light path switching mechanism and is connected with the vacuum comparison channel through a flange; one end of the vacuum comparison channel is connected with the low-temperature radiometer system through a flange, and the other end of the vacuum comparison channel is connected with the vacuum detector cabin through a flange; the detection system consists of a transmission standard detector and a bracket thereof, a detector to be detected and a bracket thereof and a one-dimensional electric translation platform, and is arranged in the vacuum detector cabin; the low-temperature radiometer system and the vacuum detector cabin are arranged on the arc-shaped track, and move into and out of a light path in the vacuum comparison channel on the arc-shaped track controlled by the motor; the laser emitted by the laser group in the monochromatic light source system is subjected to power stabilization through the power stabilizer and then enters the vacuum comparison channel through the Brewster window of the multi-light-path switching system; monochromatic light emitted by a deuterium lamp and a vacuum ultraviolet-ultraviolet monochromator in the monochromatic light source system enters the vacuum comparison channel through a flange vacuum window of the multi-light-path switching system; monochromatic light emitted by a tungsten strip lamp, a silicon carbide rod and a visible-infrared monochromator in the monochromatic light source system enters the vacuum comparison channel through a flat glass vacuum window of the multi-light-path switching system; the measurement software comprises a hardware control module, a signal acquisition module, a calculation module, a storage module and an output module: the hardware control module is used for controlling the arc track motor to rotate and controlling the one-dimensional electric translation table to move; the signal acquisition module is used for acquiring measurement signals output by the low-temperature radiometer, the transmission standard detector and the detector to be detected according to an acquisition button command received by the function button group and displaying the measurement signals in the signal acquisition display column in real time; the calculation module is used for calculating the absolute spectral responsivity of the transmission standard detector and the detector to be detected according to the data acquired by the signal acquisition module:
Rtransfer of(λ)＝VTransfer of(λ)/P(λ) (1)
RTo be measured(λ)＝VTo be measured(λ)RTransfer of(λ)/VTransfer of(λ) (2)
Wherein R isTransfer of(λ) is the absolute spectral responsivity, V, of the transfer standard detectorTransfer of(lambda) is the output signal of the transmission standard detector when the wavelength of the incident monochromatic light is lambda, P (lambda) is the power value measured by the low-temperature radiometer when the wavelength of the incident monochromatic light is lambda, RTo be measured(lambda) is the absolute spectral responsivity, V, of the detector under testTo be measured(lambda) is an output signal of the detector to be detected when the wavelength of the incident monochromatic light is lambda; then, calculating the average value of the N times of measurement results, taking the average value as the absolute spectral responsivity measurement result of the transmission standard detector and the detector to be measured, and simultaneously calculating the uncertainty of the measurement results, wherein N is 1, 2, … … and N, and N is more than or equal to 6; sending the measurement result and the uncertainty into the test result display column for display; the function of the storage module is to store the original data in the form of text file according to the storage button command received by the function button groupAnd storing the measurement result; the output module is used for calling the data in the storage module according to the printing button command received by the function button group to output the measurement data and the final measurement result in a printing mode.
(III) advantageous effects
The broadband detector spectral responsivity calibration device based on the low-temperature radiometer, which is provided by the technical scheme, has the following overall technical effects:
(1) the invention realizes the calibration of the absolute spectral responsivity of the wide spectral range detector by taking the low-temperature radiometer as the reference and combining the vacuum technology, the multi-light-path switching technology and the precision detection technology, thereby solving the problem of accurate calibration of the spectral responsivity of the wide spectral range detector, covering the spectral range of 115nm to 20 mu m, and having the characteristics of high measurement precision, wide spectral range and good repeatability.
(2) The invention enables the low-temperature radiometer, the transmission standard detector and the detector to be measured to be in the same measurement condition by designing the multi-light-path switching system and the vacuum comparison channel, and simultaneously meets the measurement requirements of linearly polarized light and non-polarized light. In addition, the low-temperature radiometer can be used for calibrating a transmission standard detector and a transmission standard detector to a detector to be detected step by step on the same device, and magnitude transmission can be carried out.
(3) The transfer standard detector adopts three-piece reflection type trap detectors and a pyroelectric detector with a reflection hemisphere. The total reflectivity of the trap detector is very low, and the photoelectric conversion efficiency and the responsivity are obviously improved compared with those of a single detector, so that the trap detector is used for vacuum ultraviolet to near infrared wave bands; compared with the common pyroelectric detector, the pyroelectric detector with the reflecting hemisphere has the characteristics of high responsivity and no spectral selectivity, and is used for near infrared to infrared bands.
Drawings
FIG. 1 is a block diagram of a calibration device for spectral responsivity of a broadband detector based on a low-temperature radiometer.
Fig. 2 is a schematic diagram of the multi-optical path switching system shown in fig. 1.
FIG. 3 is a schematic diagram of the vacuum comparison channel shown in FIG. 1.
FIG. 4 is a schematic diagram of the composition of the transmission level detector shown in FIG. 1.
Fig. 5 is a schematic view of the pyroelectric detector shown in fig. 1.
Detailed Description
In order to make the objects, contents and advantages of the present invention clearer, the following detailed description of the embodiments of the present invention will be made in conjunction with the accompanying drawings and examples.
As shown in fig. 1, the calibration apparatus for spectral responsivity of a broadband detector based on a low-temperature radiometer of the present invention includes a monochromatic radiation source system 1, a multi-optical path switching system 2, a vacuum comparison channel 3, a low-temperature radiometer system 4, a detection system 5, a vacuum detector chamber 6, and a computer 7; monochromatic radiation source system 1 sends monochromatic beam, and gets into multi-light-path switching system 2, multi-light-path switching system 2 selects monochromatic beam of one wave band among laser, visible-infrared, ultraviolet to get into vacuum comparison channel 3, vacuum comparison channel 3 switches low temperature radiometer system 4, detection system 5 to vacuum detector cabin 6 respectively, carry out monochromatic power measurement through low temperature radiometer system 4, carry out monochromatic signal detection through detection system 5, the computer receives the measurement result of low temperature radiometer system 4 and detection system 5, carries out spectral responsivity calculation.
The monochromatic radiation source system 1 is a monochromatic light source for calibrating absolute spectral responsivity of the wide spectral range detector, and comprises a laser group, a power stabilizer, a deuterium lamp, a vacuum ultraviolet-ultraviolet monochromator, a tungsten ribbon lamp, a silicon carbide rod and a visible-infrared monochromator; the laser group outputs laser, forms a stable laser beam after passing through the power stabilizer and enters the multi-light-path switching system 2, the deuterium lamp forms a monochromatic beam of a vacuum ultraviolet-ultraviolet waveband after passing through the vacuum ultraviolet-ultraviolet monochromator and enters the multi-light-path switching system 2, and the tungsten band lamp and the silicon carbide rod form a monochromatic beam of a visible-infrared waveband after passing through the visible-infrared monochromator and enter the multi-light-path switching system 2.
Wherein, the laser group comprises an argon krypton ion laser, a helium neon laser and a YAG laser, and the stability is superior to 2.5%. The power stabilizer is an LPS-II type laser power stabilizer, realizes the stability of laser intensity, has the applicable wavelength range of 350nm to 1100nm, and can ensure that the stability of laser power is better than 0.01 percent. The deuterium lamp is 150W power lamp from Macphoson corporation, the power stability is better than 0.1%, and the spectral range is 115nm to 400 nm. The vacuum ultraviolet-ultraviolet monochromator is an 234/302 type monochromator of Macphoson company, the spectrum range is 115nm to 400nm, the maximum allowable error of the wavelength is +/-0.1 nm, and the spectral resolution is 0.1nm (313.1 nm). The spectral range of the tungsten band lamp and the silicon carbide rod covers 400nm to 20 mu m, and the power stability is better than 0.5 percent. The visible-infrared monochromator is a monochromator of Acton company in America, the spectral range is 400nm to 20 mu m, the maximum allowable error of the wavelength is +/-10 nm, and the spectral resolution is 10 nm.
As shown in FIG. 2, the multi-optical path switching system 2 includes a Brewster vacuum window 2-1, a flange vacuum window 2-2, a flat glass vacuum window 2-3, an optical path switching mechanism 2-4, and a vacuum chamber 2-5. The Brewster vacuum window 2-1 is used for inputting laser output by the laser group, the Brewster vacuum window 2-1 is an optical glass sheet which is formed by grinding and polishing and has two surfaces which are parallel to each other, and the quartz Brewster window is selected in the embodiment; the flange vacuum window 2-2 is directly connected with the vacuum ultraviolet-ultraviolet monochromator through a flange and is used for inputting vacuum ultraviolet-ultraviolet monochromatic light; the flat glass vacuum window 2-3 is used for inputting visible-infrared monochromatic light, the visible-near infrared band window is quartz glass, and the infrared band window is zinc sulfide glass; the flange vacuum window 2-2 is opposite to the flat glass vacuum window 2-3 and is vertical to the Brewster vacuum window 2-1; the light path switching mechanism 2-4 is positioned between the flange vacuum window 2-2 and the flat glass vacuum window 2-3; the optical path switching mechanism 2-4 comprises a rotary import console, a plane rotary console, an ultrahigh vacuum cabin penetrating structure and a plane reflector, the rotary import console controls the plane reflector to ascend or descend, the plane rotary console controls the plane reflector to rotate left and right, the ultrahigh vacuum cabin penetrating structure ensures that connectors of the rotary import console and the plane rotary console at the outside do not generate air leakage, and the optical path switching mechanism 2-4 realizes the rapid switching of three optical paths in a vacuum environment by adjusting the angle and the height of the plane reflector; a plane mirror is controlled to rise by controlling a rotary lead-in console in the optical path switching mechanism 2-4, and monochromatic light passing through a Brewster vacuum window 2-1 enters a vacuum comparison channel; the plane reflecting mirror is controlled to descend by controlling a rotary leading-in console in the optical path switching mechanism 2-4, and the plane reflecting mirror is controlled to rotate 45 degrees to the left by controlling a plane rotary console in the optical path switching mechanism 2-4, and monochromatic light passing through a flange vacuum window 2-2 enters a vacuum comparison channel; the plane reflecting mirror is controlled to descend by controlling the rotary leading-in console in the optical path switching mechanism 2-4, and the plane reflecting mirror is controlled to rotate 45 degrees towards the right by controlling the plane rotary console in the optical path switching mechanism 2-4, and monochromatic light passing through the flat glass vacuum window 2-3 enters the vacuum comparison channel.
According to the figure 3, the vacuum comparison channel 3 is installed on a circular arc track, a first end 3-1 of the vacuum comparison channel is connected with an outlet of a vacuum chamber 2-5 of the multi-light path switching system 2 through a corrugated pipe and a flange, a second end 3-2 of the vacuum comparison channel is connected with the low-temperature radiometer system 4 through a corrugated pipe and a flange, and a third end 3-3 of the vacuum comparison channel is connected with the vacuum detector cabin 6 through a corrugated pipe and a flange. The vacuum comparison channel 3 is made of stainless steel materials, a first end 3-1 connected with the multi-light-path switching system 2 is in the shape of a hollow cylinder with the outer diameter of 100mm and the inner diameter of 98mm, a second end 3-2 connected with the low-temperature radiometer system 4 is in the shape of a hollow cylinder with the outer diameter of 60mm and the inner diameter of 58mm, a third end 3-3 connected with the vacuum detector cabin 6 is in the shape of a hollow cylinder with the outer diameter of 60mm and the inner diameter of 58mm, the three cylinders are connected through a stainless steel connector 3-4, and angles among the first end 3-1, the second end 3-2, the third end 3-3, the third end 3-2 and the first end 3-1 are 1500, 600 and 1500 respectively.
The low-temperature radiometer system 4 comprises a low-temperature radiometer host, a precise temperature measuring bridge, a precise current source, a digital voltmeter, a mechanical pump, a molecular pump and a control system, and the working principle of the low-temperature radiometer system 4 is an electric substitution principle and is used for accurately measuring the power of monochromatic light.
The detection system 5 comprises a transfer standard detector trap detector 5-1 and a support thereof, a pyroelectric detector 5-2 with a reflecting hemisphere and a support thereof, a detector to be detected 5-3 and a support thereof, and a one-dimensional electric translation table 5-4, wherein the transfer standard detector trap detector 5-1, the pyroelectric detector 5-2 with the reflecting hemisphere, and the detector to be detected 5-3 are all arranged on the one-dimensional electric translation table 5-4 through the support. According to the illustration in fig. 4, the trap detector 5-1 includes a first detector sleeve 5-1-4 and a first photodiode 5-1-1, a second photodiode 5-1-2, and a third photodiode 5-1-3 installed therein, the first detector sleeve 5-1-4 is provided with an incident light inlet, an incident plane of the first photodiode 5-1-1 is arranged to be inclined at 45 ° with respect to a horizontal light entering from the incident light inlet, an incident plane of the second photodiode 5-1-2 and an incident plane of the first photodiode 5-1-1 are perpendicular to each other, incident angles are equal and 450, the third photodiode 5-1-3 is located at an opposite side of the incident plane of the second photodiode 5-1-2, the third photodiode 5-1-3 has an incident angle of 00, thus ensuring that the detector is insensitive to the polarization state of the incident light.
According to FIG. 5, the pyroelectric detector 5-2 with a reflective hemisphere includes a second detector sleeve 5-2-3 and a pyroelectric detector 5-2-1 installed inside the second detector sleeve, the reflective hemisphere 5-2-2 with an opening, the detection surface of the pyroelectric detector 5-2-1 and the circular bottom surface of the reflective hemisphere 5-2-2 are both arranged at an inclination of 450 degrees with the horizontal direction, the pyroelectric detector 5-2-1 is installed at the center of the sphere of the reflective hemisphere 5-2-2, the center of the pyroelectric detector 5-2-1 is located on the central axis of the opening of the reflective hemisphere 5-2-2, the opening of the reflective hemisphere 5-2-2 is coaxial with the opening of the second detector sleeve 5-2-3, the diameter of the opening of the reflective hemisphere 5-2-2 is 3mm, the inner surface is plated with gold, so that light reflected by the surface of the pyroelectric detector 5-2-1 is reflected back to the surface of the pyroelectric detector 5-2-1 again through the reflecting hemisphere 5-2-2, and no spectral selectivity is realized.
The vacuum detector cabin 6 is made of stainless steel materials, is in the shape of a vertical hollow cylinder with the outer diameter of 400mm, the inner diameter of 395mm and the height of 400mm, is provided with an opening at the upper end, and is provided with an observation window, and the thickness of an upper cover plate is 12 mm. Three flanges are welded on the side wall of the vacuum detector cabin 6, one of the flanges is connected with the vacuum comparison channel 3 to enable the light path to be in a vacuum environment, the other flange is connected with the molecular pump and used for vacuumizing the vacuum detector cabin 6, and an inflation valve is arranged on the other flange and used for inflating air into the cabin when the vacuum detector cabin 6 is opened.
The computer 7 is provided with a data acquisition card and a measuring module. The measuring module comprises a hardware control module, a signal acquisition module, a calculation module, a storage module and an output module.
The hardware control module is used for controlling the arc track motor under the vacuum comparison channel 3 to rotate and controlling the one-dimensional electric translation table 5-4 to move.
The signal acquisition module is used for acquiring measurement signals output by the low-temperature radiometer 4, the transmission standard detectors 5-1 and 5-2 and the detector to be measured 5-3 according to an acquisition button command received by the function button group and displaying the measurement signals in a signal acquisition display column in real time.
The calculation module is used for calculating and transmitting the absolute spectral responsivity of the standard detectors 5-1 and 5-2 and the detector to be detected 5-3 according to the data acquired by the signal acquisition module:
Rtransfer of(λ)＝VTransfer of(λ)/P(λ) (1)
RTo be measured(λ)＝VTo be measured(λ)RTransfer of(λ)/VTransfer of(λ) (2)
Wherein R isTransfer of(lambda) is the absolute spectral responsivity, V, of the transfer standard detectors 5-1 and 5-2Transfer of(lambda) is the output signal of the transmission standard detectors 5-1 and 5-2 when the wavelength of the incident monochromatic light is lambda, P (lambda) is the power value measured by the low-temperature radiometer 4 when the wavelength of the incident monochromatic light is lambda, RTo be measured(lambda) is the absolute spectral responsivity, V, of the detector 5-3 to be measuredTo be measured(lambda) is an output signal of the detector 5-3 to be detected when the wavelength of the incident monochromatic light is lambda; then, calculating the average value of the N times of measurement results, taking the average value as the absolute spectral responsivity measurement result of the transmission standard detectors 5-1 and 5-2 and the detector to be measured 5-3, and simultaneously calculating the uncertainty of the measurement results, wherein N is 1, 2, … … and N, and N is more than or equal to 6; and sending the measurement result and the uncertainty into the test result display column for display.
The storage module stores the original data and the measurement result by using a memory, the original data and the measurement result are stored in a text file form, and a user can further process the original data and the measurement result in Excel or Matlab software.
The output module is used for calling the data in the storage module and printing the measurement data and the measurement result in a data form.
According to the technical scheme, the calibration device for the spectral responsivity of the broadband detector disclosed by the invention has the advantages that the calibration of the absolute spectral responsivity of the broadband detector is realized by taking the low-temperature radiometer as the reference and combining the vacuum technology, the multi-light-path switching technology and the precision detection technology, the spectral range of the calibration device covers 115nm to 20 mu m, and a reliable basis can be provided for the development of the broadband detector.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (10)
1. A broadband detector spectral responsivity calibration device based on a low-temperature radiometer is characterized by comprising: the device comprises a monochromatic radiation source system (1), a multi-light-path switching system (2), a vacuum comparison channel (3), a low-temperature radiometer system (4), a detection system (5), a vacuum detector cabin (6) and a computer (7); monochromatic radiation source system (1) sends monochromatic beam, get into multi-light-path switching system (2), multi-light-path switching system (2) select the monochromatic beam of one of them wave band in laser, visible-infrared, the ultraviolet and get into vacuum comparison passageway (3), vacuum comparison passageway (3) switch over low temperature radiometer system (4), detecting system (5) respectively to in vacuum detector cabin (6), carry out monochromatic light power measurement through low temperature radiometer system (4), carry out monochromatic light signal detection through detecting system (5), the computer receives the measuring result of low temperature radiometer system (4) and detecting system (5), carry out spectral responsivity calculation.
2. The device for calibrating the spectral responsivity of a broadband detector based on a cryogenic radiometer according to claim 1, characterized in that said monochromatic radiation source system (1) comprises a laser set, a power stabilizer, a deuterium lamp, a vacuum ultraviolet-ultraviolet monochromator, a tungsten band lamp and a silicon carbide rod, a visible-infrared monochromator; the laser group outputs laser, forms stable laser beams after passing through the power stabilizer and enters the multi-light-path switching system (2), the deuterium lamp forms monochromatic beams of vacuum ultraviolet-ultraviolet bands after passing through the vacuum ultraviolet-ultraviolet monochromator and enters the multi-light-path switching system (2), and the tungsten band lamp and the silicon carbide rod form monochromatic beams of visible-infrared bands after passing through the visible-infrared monochromator and enter the multi-light-path switching system (2).
3. The device for calibrating the spectral responsivity of a broadband probe based on a low temperature radiometer of claim 2, wherein said laser group comprises an argon krypton ion laser, a helium neon laser, a YAG laser; the power stabilizer is an LPS-II type laser power stabilizer, the applicable wavelength range is 350nm to 1100nm, the deuterium lamp is a deuterium lamp with power of 150W of Macphoson company, the spectral range is 115nm to 400nm, the vacuum ultraviolet-ultraviolet monochromator is an 234/302 type monochromator with power of Macphoson company, the spectral range is 115nm to 400nm, the spectral range of the tungsten strip lamp and the silicon carbon rod covers 400nm to 20 mu m, the visible-infrared monochromator is a monochromator with power of 400nm to 20 mu m of Acton company.
4. The device for calibrating the spectral responsivity of a broadband detector based on a cryoradiometer according to claim 3, wherein the multi-optical path switching system (2) comprises a Brewster vacuum window (2-1), a flange vacuum window (2-2), a plate glass vacuum window (2-3), an optical path switching mechanism (2-4) and a vacuum chamber (2-5); the Brewster vacuum window (2-1) is used for inputting laser output by the laser group, and the Brewster vacuum window (2-1) is an optical glass sheet which is formed by grinding and polishing and has two surfaces which are parallel to each other; the flange vacuum window (2-2) is connected with the vacuum ultraviolet-ultraviolet monochromator through a flange and is used for inputting vacuum ultraviolet-ultraviolet monochromatic light; the flat glass vacuum window (2-3) is used for inputting visible-infrared monochromatic light, the visible-near infrared band window is made of quartz glass, and the infrared band window is made of zinc sulfide glass; the flange vacuum window (2-2) is opposite to the flat glass vacuum window (2-3) and is vertical to the Brewster vacuum window (2-1); the light path switching mechanism (2-4) is positioned between the flange vacuum window (2-2) and the flat glass vacuum window (2-3); the optical path switching mechanism (2-4) comprises a rotary import control console, a plane rotary control console, an ultrahigh vacuum cabin penetrating structure and a plane reflector, the rotary import control console controls the plane reflector to ascend or descend, the plane rotary control console controls the plane reflector to rotate left and right, and the optical path switching mechanism (2-4) realizes the rapid switching of three optical paths in a vacuum environment by adjusting the angle and the height of the plane reflector; a plane mirror is controlled to rise by controlling a rotary lead-in console in the optical path switching mechanism (2-4), and monochromatic light passing through a Brewster vacuum window (2-1) enters a vacuum comparison channel (3); the plane reflecting mirror is controlled to descend by controlling a rotary leading-in control console in the optical path switching mechanism (2-4), the plane rotary control console in the optical path switching mechanism (2-4) is controlled to rotate 45 degrees to the left, and monochromatic light passing through the flange vacuum window (2-2) enters the vacuum comparison channel (3); the plane reflecting mirror is controlled to descend by controlling the rotary leading-in control console in the light path switching mechanism (2-4), the plane rotary control console in the light path switching mechanism (2-4) is controlled to rotate 45 degrees towards the right side, and monochromatic light passing through the flat glass vacuum window (2-3) enters the vacuum comparison channel (3).
5. The broadband detector spectral responsivity calibration device based on the low-temperature radiometer according to claim 4, wherein the vacuum comparison channel (3) is installed on a circular arc orbit, a first end (3-1) of the vacuum comparison channel is connected with an outlet of a vacuum chamber (2-5) of the multi-light path switching system (2) through a corrugated pipe and a flange, a second end (3-2) of the vacuum comparison channel is connected with the low-temperature radiometer system (4) through a corrugated pipe and a flange, and a third end (3-3) of the vacuum comparison channel is connected with the vacuum detector chamber (6) through a corrugated pipe and a flange; the first end (3-1), the second end (3-2) and the third end (3-3) are hollow cylinders, the three hollow cylinders are formed on the periphery of the stainless steel connector (3-4), and the angles between the first end (3-1) and the second end (3-2), between the second end (3-2) and the third end (3-3), and between the third end (3-3) and the first end (3-1) are 150 degrees respectively0、600、1500。
6. The broadband detector spectral responsivity calibration device based on the low-temperature radiometer as claimed in claim 5, wherein the detection system (5) comprises a transfer standard detector trap detector (5-1) and a support thereof, a pyroelectric detector (5-2) with a reflecting hemisphere and a support thereof, a detector to be tested (5-3) and a support thereof, and a one-dimensional electric translation stage (5-4), wherein the transfer standard detector trap detector (5-1), the pyroelectric detector (5-2) with the reflecting hemisphere, and the detector to be tested (5-3) are all mounted on the one-dimensional electric translation stage (5-4) through supports.
7. The broadband detector spectral responsivity calibration device based on the low-temperature radiometer as claimed in claim 6, wherein the trap detector (5-1) comprises a first detector sleeve (5-1-4) and a first photodiode (5-1-1), a second photodiode (5-1-2) and a third photodiode (5-1-3) installed inside the first detector sleeve, an incident light inlet is formed on the first detector sleeve (5-1-4), an incident plane of the first photodiode (5-1-1) is arranged to be inclined at 45 degrees with respect to a horizontal light entering from the incident light inlet, an incident plane of the second photodiode (5-1-2) and an incident plane of the first photodiode (5-1-1) are perpendicular to each other, incident angles are equal and all 450The third photodiode (5-1-3) is located on the opposite side of the incident surface of the second photodiode (5-1-2), and the incident angle of the third photodiode (5-1-3) is 00。
8. The broadband detector spectral responsivity calibration device based on the low-temperature radiometer according to claim 7, wherein the pyroelectric detector (5-2) with the reflecting hemisphere comprises a second detector sleeve (5-2-3) and a pyroelectric detector (5-2-1) installed in the second detector sleeve, the reflecting hemisphere (5-2-2) with an opening, the detection surface of the pyroelectric detector (5-2-1) and the circular bottom surface of the reflecting hemisphere (5-2-2) form 45 degrees with the horizontal direction0The pyroelectric detector (5-2-1) is arranged in an inclined way, the pyroelectric detector (5-2-1) is arranged at the spherical center of the reflecting hemisphere (5-2-2), the center of the pyroelectric detector (5-2-1) is positioned on the central shaft of the opening of the reflecting hemisphere (5-2-2), and the opening of the reflecting hemisphere (5-2-2) is connected with the opening of the reflecting hemisphere (5-2-2)The opening of the second detector sleeve (5-2-3) is coaxial, the diameter of the opening of the reflecting hemisphere (5-2-2) is 3mm, and the inner surface of the second detector sleeve is plated with gold, so that light reflected by the surface of the pyroelectric detector (5-2-1) is reflected back to the surface of the pyroelectric detector (5-2-1) again through the reflecting hemisphere (5-2-2), and no spectral selectivity is realized.
9. The device for calibrating the spectral responsivity of a broadband detector based on a low-temperature radiometer according to claim 8, wherein the vacuum detector chamber (6) is made of stainless steel material, and is shaped as a vertical hollow cylinder with an open upper end, and the upper cover plate is provided with an observation window; three flanges are welded on the side wall of the vacuum detector cabin (6), one of the flanges is connected with the vacuum comparison channel (3) to enable the light path to be in a vacuum environment, the other flange is connected with the molecular pump and used for vacuumizing the vacuum detector cabin (6), and the other flange is provided with an inflation valve and used for inflating air into the vacuum detector cabin (6) when the vacuum detector cabin is opened.
10. The device for calibrating the spectral responsivity of the broadband detector based on the low-temperature radiometer according to claim 9, wherein the computer (7) is equipped with a data acquisition card and a measurement module; the measuring module comprises a hardware control module, a signal acquisition module, a calculation module, a storage module and an output module;
a hardware control module controls a circular arc track motor under the vacuum comparison channel (3) to rotate and controls the one-dimensional electric translation table (5-4) to move;
the signal acquisition module acquires measurement signals output by the low-temperature radiometer (4), the transmission standard detector and the detector to be measured according to an acquisition button command received by the function button group, and displays the measurement signals in a signal acquisition display column in real time;
the calculation module calculates the absolute spectral responsivity of the transmission standard detectors 5-1 and 5-2 and the detector to be detected 5-3 according to the data acquired by the signal acquisition module:
Rtransfer of(λ)＝VTransfer of(λ)/P(λ) (1)
RTo be measured(λ)＝VTo be measured(λ)RTransfer of(λ)/VTransfer of(λ) (2)
Wherein R isTransfer of(λ) is the absolute spectral responsivity, V, of the transfer standard detectorTransfer of(lambda) is the output signal of the transmission standard detector when the wavelength of the incident monochromatic light is lambda, P (lambda) is the power value measured by the low-temperature radiometer 4 when the wavelength of the incident monochromatic light is lambda, RTo be measured(lambda) is the absolute spectral responsivity, V, of the detector under testTo be measured(lambda) is an output signal of the detector to be detected when the wavelength of the incident monochromatic light is lambda; then, calculating the average value of the N times of measurement results, taking the average value as the absolute spectral responsivity measurement result of the transmission standard detector and the detector to be measured, and simultaneously calculating the uncertainty of the measurement results, wherein N is 1, 2, … … and N, and N is more than or equal to 6; sending the measurement result and the uncertainty into the test result display column for display;
the storage module stores the original data and the measurement result by using a memory, the original data and the measurement result are stored in a text file form, and a user can further process the original data and the measurement result in Excel or Matlab software;
the output module is used for calling the data in the storage module and printing the measurement data and the measurement result in a data form.
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