CN114100913B

CN114100913B - Piston type atomization spraying structure of nano-imprinting glue

Info

Publication number: CN114100913B
Application number: CN202210033520.7A
Authority: CN
Inventors: 罗刚
Original assignee: Suzhou New Dimension Micro Nano Technology Co ltd
Current assignee: Suzhou New Dimension Micro Nano Technology Co ltd
Priority date: 2022-01-12
Filing date: 2022-01-12
Publication date: 2023-05-23
Anticipated expiration: 2042-01-12
Also published as: CN114100913A

Abstract

The invention discloses a piston type atomization spraying structure of nano-imprinting glue, which comprises a driving cavity, a spraying cavity and a sample clamp. The drive chamber is for receiving an imprint resist, the drive chamber having a piston interface portion to which a piston is operatively connected. The injection cavity is communicated with the driving cavity, and a plurality of primary injection ports are arranged on the top wall of the injection cavity. The sample clamp is arranged above the spraying cavity, and the surface of the sample clamp is used for clamping a sample to be sprayed with the imprinting glue, wherein the surface is opposite to the primary spraying opening. The imprint resist is capable of being ejected upward from the primary ejection port of the ejection chamber and onto the sample while the piston reciprocates along the piston interface portion. According to the piston type atomization spraying structure of the nano imprinting glue, the imprinting glue can be sprayed out from bottom to top in a micro-jet mode by compressing gas through the piston, so that the spraying mode of the imprinting glue is diversified.

Description

Piston type atomization spraying structure of nano-imprinting glue

Technical Field

The invention relates to a nanoimprint technology, in particular to an atomization spraying structure of nanoimprint glue.

Background

The nanoimprint technology has wide application prospects in the fields of micro-nano photonics and the like, including the fields of AR, VR and the like, the fields of medical treatment, traffic and the like, and the market prospect is self-evident. In the current nano-imprinting, the common gluing technology mainly comprises rotary gluing and micro-jet spraying. The spin coating technology mainly comprises the steps of coating an imprinting glue on the surface of a sample, and then forming a film on the surface of the sample by adopting high-speed rotation. The other type of micro-droplet spraying is to atomize the imprinting glue by adopting a micro-jet technology, and then spray the imprinting glue on the surface of a sample.

The spin coating technique has the disadvantage that the quality of the adhesive film in the adjacent boundary area is poor and the thickness is inconsistent with the thickness in the center under the influence of the boundary condition of the edge of the sample. The disadvantage of the microfluidic technology is that it is difficult to ensure uniformity of the atomized spray film, and secondly, the substrate is usually located below the nozzle of the microfluidic technology, and the imprinting glue of the microfluidic technology is easy to form bubbles when falling onto the substrate, which affects the imprinting accuracy of the product.

The information disclosed in this background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person of ordinary skill in the art.

Disclosure of Invention

The invention aims to provide a piston type atomization spraying structure of nano imprinting glue, which can spray the nano imprinting glue from bottom to top, so that the mode of spraying the nano imprinting glue is diversified, and the piston type atomization spraying structure is suitable for various samples to be sprayed and various spraying scenes.

In order to achieve the above purpose, the embodiment of the invention provides a piston type atomization spraying structure of nano-imprinting glue, which comprises a driving cavity, a spraying cavity and a sample clamp. The drive chamber is for receiving an imprint resist, the drive chamber having a piston interface portion to which a piston is operatively connected. The injection cavity is communicated with the driving cavity, and a plurality of primary injection ports are arranged on the top wall of the injection cavity. The sample clamp is arranged above the spraying cavity, and the surface of the sample clamp is used for clamping a sample to be sprayed with the imprinting glue, wherein the surface is opposite to the primary spraying opening. The imprint resist is capable of being ejected upward from the primary ejection port of the ejection chamber and onto the sample while the piston reciprocates along the piston interface portion.

In one or more embodiments, the drive chamber is filled with a first compressed gas in an operational state. The driving cavity is communicated with the spraying cavity through a communicating pipe.

In one or more embodiments, an air jet is disposed between the primary jet and the sample holder, the air jet having an outlet toward the sample holder for jetting a high velocity air stream.

In one or more embodiments, a cross plate is disposed above the gas lance, and a plurality of secondary injection ports are disposed on the cross plate. The orientation of the cross plate is parallel and opposite to the surface of the sample holder.

In one or more embodiments, a support bar is fixed to the sample holder, and the support bar can be driven to move up and down and/or rotate to drive the sample to move up and down and/or rotate.

In one or more embodiments, the sample holder is provided with an air hole, and the sample is fixed by vacuum suction.

In one or more embodiments, the primary jets are 0.5 to 1.0 millimeters in size and the secondary jets are 20 to 50 microns in diameter.

In one or more embodiments, the piston is provided with a piston drive rod for connection to an external drive system.

The invention further provides a piston type atomization spraying structure of nano-imprinting glue, which comprises a driving cavity, a spraying cavity, an air spraying pipe and a sample clamp. The drive chamber is for containing an imprint resist, the drive chamber having a piston interface portion to which a piston is operatively connected. The spray cavity is communicated with the driving cavity, a baffle is arranged in the spray cavity, a plurality of primary spray openings are arranged on the baffle, and a plurality of secondary spray openings are arranged on the top wall of the spray cavity. A gas lance is disposed between the baffle and the top wall, the gas lance having an outlet toward the sample holder for emitting a high velocity gas stream. A sample holder is disposed above the ejection chamber, the sample holder having a surface for holding a sample to be sprayed with an imprint resist, wherein the surface is opposite the primary ejection port. The imprint resist is capable of being ejected upward from the primary ejection port and the secondary ejection port of the ejection chamber and onto the sample while the piston reciprocates along the piston interface portion.

Compared with the prior art, according to the piston type atomization spraying structure of the nano imprinting glue, the imprinting glue can be sprayed out from bottom to top in a micro-jet mode by compressing gas through the piston, so that the mode of spraying the imprinting glue is diversified, and the piston type atomization spraying structure is suitable for various samples to be sprayed and various spraying scenes. Furthermore, due to the arrangement of the air jet pipe and the secondary jet orifice, the imprinting glue can be further atomized and thinned, so that the spraying is more uniform. In addition, by moving and rotating the sample holder up and down, the imprinting glue can be more uniformly sprayed on various positions of the sample.

Drawings

Fig. 1 is a schematic view of a piston-type atomized spray configuration of a nanoimprint resist according to an embodiment of the present invention.

The main reference numerals illustrate:

1-spraying cavity, 2-driving cavity, 3-communicating pipe, 4-impression compound, 10-piston, 13-sample clamp.

Detailed Description

The following detailed description of embodiments of the invention is, therefore, to be taken in conjunction with the accompanying drawings, and it is to be understood that the scope of the invention is not limited to the specific embodiments.

Throughout the specification and claims, unless explicitly stated otherwise, the term "comprise" or variations thereof such as "comprises" or "comprising", etc. will be understood to include the stated element or component without excluding other elements or components.

As shown in fig. 1, the piston type atomized spray structure of the nano imprinting glue according to an embodiment of the present invention includes a driving chamber 2, a spraying chamber 1 and a sample holder 13. The drive chamber 2 communicates with the ejection chamber 1, and a sample holder 13 is provided above the ejection chamber 1, and the surface of the sample holder is used to hold the sample 12. The sample 12 may be, for example, a nanoimprint template having an imprint pattern. The drive chamber 2 has a piston interface 9. In the working state, the piston 10 reciprocates up and down in the piston interface 9 to compress the gas in the driving chamber 2, and under the action of high pressure generated by compressing the gas, the imprint rubber 4 is ejected from the top of the ejection chamber 1 and is sprayed on the sample 12.

Specifically, in one embodiment, the piston 10 may be provided with a piston driving rod 11. The piston driving rod 10 may be connected to an external driving device (not shown, such as a driving cylinder, etc.). A piston interface 9 is provided in the upper part of the drive chamber 2, the diameter of the piston interface 9 matching the diameter of the piston 10. The piston 10 is in sliding engagement with the piston interface 9. The piston 10 is capable of reciprocating up and down in the piston interface 9 under the drive of an external driving device to compress the gas in the driving chamber 2.

The driving chamber 2 is communicated with the spraying chamber 1. In one embodiment, for example, as shown in fig. 1, the drive chamber 2 may communicate with the ejection chamber 1 through a communication pipe 3 provided near the bottom. Preferably, the ejection chamber 1, the drive chamber 2, and the communication pipe 3 are integrally provided. In operation, the driving chamber 2 is filled with the fluid imprinting glue 2, and a part of imprinting glue 4 flows to the ejection chamber 1 under the action of the communicating pipe 3 until the pressures at both sides of the communicating pipe 3 are balanced. The filling amount of the imprint resist 4 is preferably filled close to the top wall 5 of the ejection chamber 1.

When the filling amount of the imprint glue 2 reaches the required amount, some air is originally present in the driving cavity 2, and the piston can move downwards to compress the air. In order to avoid that the piston 10 is in contact with the imprint fluid during the downward movement, the driving chamber 2 may be filled with compressed gas 8 above the imprint fluid 4. The compressed gas 8 may be, for example, nitrogen. The compressed gas 8 is suitably filled in such a quantity that the height of the imprint resist 4 in the ejection chamber 1 is greater than the height in the drive chamber 2. After a certain amount of compressed gas 8 is filled, the piston compresses the compressed gas 8, so that the impression compound 4 is driven to flow, and the impression compound 4 is conveniently ejected from the top wall 5 of the ejection cavity 1 at a high speed.

The top wall 5 of the ejection chamber 1 is provided with a plurality of primary ejection openings. During the downward movement of the piston 10, the gas inside the drive chamber 2 is compressed and the pressure increases. The pressure is conducted to the ejection chamber 1 through the communication pipe 3, and ejected upward from the plurality of primary ejection ports and toward the surface of the sample 12. The primary jet opening preferably has a size of 0.5 to 1.0 mm

In order to be able to atomize the jet of imprint resist ejected from the primary ejection orifice further, an air lance 7 may be provided above the primary ejection orifice. The gas lance 7 is located between the primary injection port and the sample holder 13. The gas lance is provided with an outlet directed towards the sample holder 13. In the working state, the air jet pipe is filled with high-pressure air, and the high-pressure air is ejected upwards from the outlet so as to break up the imprinting glue jet ejected from the primary ejection port and further atomize, and the atomized air flow is driven to the sample clamp 13. In one embodiment, the pressure of the high pressure gas is between 3MPa and 30 MPa.

In order to uniformly spray the imprinting glue fluid after further scattering and atomization to the sample 12, a transverse plate 6 is also arranged between the air spraying pipe 7 and the sample clamp 13. The orientation of the cross plate 6 is parallel to and opposite to the surface of the sample holder 13 where the sample 12 is fixed, and a plurality of secondary injection openings are uniformly formed on the cross plate 6. In this way, the imprint resist fluid after being further dispersed and atomized can be uniformly sprayed from the plurality of secondary ejection openings onto the surface of the sample 12. The diameter of the secondary ejection opening is preferably 20 to 50 μm. The sample 12 may be between 8mm and 15mm from the secondary nozzle.

In another embodiment, a baffle plate may be provided in the ejection chamber 1, with the primary ejection port provided on the baffle plate and the secondary ejection port provided on the top wall of the ejection chamber.

In order to be able to further spray the atomized imprint resist uniformly onto the surface structure of the sample 13, the primary/secondary ejection port may be approached by rotating or moving the sample up and down. For this purpose, in one embodiment, the sample holder 13 has a support bar 14 fixed thereto. The support bar can be driven to move up and down and/or rotate to drive the sample 13 to move up and down and/or rotate. The sample 12 is hung upside down on the support bar 14 by the sample holder 13. Air holes may be machined into the sample holder 13 to allow the air holes to draw the sample 13 onto the surface of the sample holder 13 in a suction manner.

In short, the integral atomizing spraying structure operates in such a manner that the piston 10 periodically reciprocates to compress air (or compressed gas 8) in the driving chamber 2 to drive the imprint resist 4 into micro atomized droplets from the primary nozzle jet. And further forms an atomizing gas by the gas jet 7, which flows out from the secondary jet orifice to form an atomized gas jet on the surface of the sample 12. The sample 12 may be rotated or translated up and down to make the film more uniform.

As described above, according to the piston-type atomized spraying structure of the nano-imprinting glue according to the embodiment of the invention, the imprinting glue can be sprayed from bottom to top in a micro-jet manner by compressing the gas by the piston, so that the sample to be glued can be placed above the spraying structure, so that larger droplets or bubbles can not be coated on the sample due to gravity drop, and bubble generation is reduced. In addition, the mode of spraying the impression compound becomes diversified, and the method is suitable for various samples to be sprayed and various spraying scenes.

As used herein, a "piston" refers to a variety of mechanisms that can reciprocate within a drive chamber to pressurize imprint resist within the drive chamber. "operatively connected" means that two (or more) components are in interconnecting engagement during operation.

The foregoing descriptions of specific exemplary embodiments of the present invention are presented for purposes of illustration and description. It is not intended to limit the invention to the precise form disclosed, and obviously many modifications and variations are possible in light of the above teaching. The exemplary embodiments were chosen and described in order to explain the specific principles of the invention and its practical application to thereby enable one skilled in the art to make and utilize the invention in various exemplary embodiments and with various modifications as are suited to the particular use contemplated. It is intended that the scope of the invention be defined by the claims and their equivalents.

Claims

1. The utility model provides a piston atomizing spraying structure of nanometer impression gum which characterized in that includes:

a drive chamber for containing an imprint resist, the drive chamber having a piston interface portion to which a piston is operatively connected;

the jet cavity is communicated with the driving cavity, and a plurality of primary jet openings are arranged on the top wall of the jet cavity; and

the sample clamp is arranged above the spraying cavity, the surface of the sample clamp is used for clamping a sample to be sprayed with the imprinting glue, and the surface is opposite to the primary spraying port;

wherein the imprinting glue can be sprayed upwards from the primary spraying opening of the spraying cavity and sprayed onto the sample when the piston reciprocates along the piston interface part, wherein the driving cavity is filled with first compressed gas in the working state, and

the side wall of the driving cavity is communicated with the side wall of the spraying cavity through a communicating pipe.

2. The piston type atomized spray configuration of nanoimprint resist according to claim 1, wherein a gas jet is provided between the primary spray orifice and the sample holder, the gas jet having an outlet toward the sample holder for spraying a high-speed gas stream.

3. The piston type atomized spray structure of nano imprinting glue according to claim 2, wherein a cross plate is arranged above the air spraying pipe, and a plurality of secondary spraying ports are arranged on the cross plate.

4. A piston-type atomized spray configuration of nanoimprint resist as claimed in claim 3, wherein the orientation of the transverse plate is parallel and opposite to the surface of the sample holder.

5. The piston type atomized spray coating structure of nano imprinting glue according to claim 1, wherein a supporting rod is fixed on the sample fixture, and the supporting rod can be driven to move up and down and/or rotate so as to drive the sample to move up and down and/or rotate.

6. The piston type atomized spray coating structure of nano imprinting glue according to claim 1, wherein the sample fixture is provided with air holes, and the sample is fixed by vacuum suction.

7. The piston type atomized spray configuration of nano imprinting glue according to claim 1, wherein a piston driving rod is provided on the piston, and the piston driving rod is used for being connected with an external driving system.

8. The utility model provides a piston atomizing spraying structure of nanometer impression gum which characterized in that includes:

the spraying cavity is communicated with the driving cavity, a baffle is arranged in the spraying cavity, a plurality of primary spraying ports are arranged on the baffle, and a plurality of secondary spraying ports are arranged on the top wall of the spraying cavity;

a gas lance disposed between the baffle and the top wall, the gas lance having an outlet for ejecting a high velocity gas stream; and

the sample clamp is arranged above the spraying cavity, and the surface of the sample clamp is used for clamping a sample to be sprayed with the imprinting glue, wherein the surface is opposite to the primary spraying opening;

the driving cavity is filled with first compressed gas in a working state, and the side wall of the driving cavity is communicated with the side wall of the spraying cavity through a communicating pipe;

the outlet of the air jet pipe faces the sample clamp, and when the piston reciprocates along the piston interface part, the imprinting glue can be ejected upwards from the primary ejection port and the secondary ejection port of the ejection cavity and is sprayed onto the sample.