CN114093737A

CN114093737A - Atmospheric pressure environment maintaining structure, scanning electron microscope and atmospheric pressure environment maintaining method

Info

Publication number: CN114093737A
Application number: CN202111567071.6A
Authority: CN
Inventors: 刘其武
Original assignee: Kyky Technology Co ltd
Current assignee: Kyky Technology Co ltd
Priority date: 2021-12-20
Filing date: 2021-12-20
Publication date: 2022-02-25

Abstract

The application discloses atmospheric pressure environment maintains structure, scanning electron microscope and atmospheric pressure environment and maintains method is applied to the studio that has the demand of target atmospheric pressure in the room, including: the penetrating piece penetrates through a penetrating hole communicated with the indoor space of the working chamber and can move in the penetrating hole, the control end of the penetrating piece for controlling displacement is positioned outdoors, and the bearing end of the penetrating piece for bearing a sample is positioned indoors; and the sealing component is arranged between the penetrating piece and the through hole so as to seal and isolate the working chamber from the outside. The application provides a structure and method are maintained to atmospheric pressure environment, and the staff can remove the sample in the studio in external operation, has guaranteed simultaneously that the removal in-process specific atmospheric pressure environment keeps keeping apart with external environment all the time, ensures that the required specific atmospheric pressure environment of work is effectively maintained for a long time in the studio, improves the operating efficiency, simple and convenient operation.

Description

Atmospheric pressure environment maintaining structure, scanning electron microscope and atmospheric pressure environment maintaining method

Technical Field

The application relates to the technical field of sealing, in particular to a structure for maintaining an air pressure environment, and further relates to a scanning electron microscope with the structure for maintaining the air pressure environment, and a method for maintaining the air pressure environment.

Background

In the working process, various processes or certain types of operations have special requirements on the air pressure environment, work in the specific air pressure environment is required, and the stability of the air pressure environment has an important influence on the accuracy of the operation result. Therefore, in many types of equipment, especially equipment that needs to perform some part of work in a high vacuum environment, the requirement for sealing and isolating the air pressure environment is high.

The implemented object (i.e. the sample) enters and exits the specific air pressure environment (i.e. the air pressure working chamber) or moves in the air pressure working chamber, and needs external interference, if the air pressure working chamber is communicated with the outside or the communication time is long in the moving process, the specific air pressure environment in the air pressure working chamber is damaged, so that the specific air pressure state needs to be restored again to continue to be unfolded for work, the time and the labor are consumed, and the working efficiency is reduced.

Therefore, how to maintain a specific air pressure environment in the working chamber when moving the sample becomes a technical problem that those skilled in the art are continuously studying.

Disclosure of Invention

In view of this, the present application provides a pneumatic environment maintaining structure and a pneumatic environment maintaining method, in which a worker can move a sample in a working chamber through an external operation, and simultaneously, it is ensured that a specific pneumatic environment is always isolated from an external environment during a moving process, a specific pneumatic environment required for a long-term effective maintenance work in the working chamber is ensured, and operation efficiency is improved, and operation is simple and convenient. The application also provides a scanning electron microscope with the above-mentioned atmospheric pressure environment maintaining structure.

In order to achieve the above purpose, the present application provides the following technical solutions: a pneumatic environment maintaining structure is applied to a working chamber with target air pressure requirement in the chamber, and comprises: the penetrating piece penetrates through a penetrating hole communicated with the indoor space of the working chamber and can move in the penetrating hole, the control end of the penetrating piece for controlling displacement is positioned outdoors, and the bearing end of the penetrating piece for bearing a sample is positioned indoors; and the sealing component is arranged between the penetrating piece and the penetrating hole so as to seal and isolate the working chamber from the outside.

Optionally, the sealing component includes a sealing ring sealing a gap between the through hole and the through piece.

Optionally, the penetrating part is configured as a penetrating rod which can slidably penetrate through the penetrating hole, and the sealing component further includes a sealing protective sleeve which seals a gap between the penetrating hole and the penetrating rod and is sleeved on the penetrating rod.

Optionally, the sample chamber is used for taking and placing a sample, the sample chamber is communicated with the working chamber through a transmission channel for the sample to enter and exit, and the sample chamber and the transmission channel are both located in the moving range of the bearing end.

Optionally, the device further comprises a sealing and isolating assembly for conducting or sealing the conveying channel.

Optionally, the sliding device further comprises a sliding channel which is formed outside the working chamber and used for the through rod to slide, and the sliding channel is communicated with the through hole and is connected with the outer wall of the working chamber in a sealing manner.

Optionally, the device further comprises a through seat arranged on the outer wall of the working chamber, and the through hole is arranged on the through seat and communicated with the conveying channel on the wall of the working chamber.

A scanning electron microscope comprises a working chamber and an air pressure environment maintaining structure applied to the working chamber, and is characterized in that the working chamber is the working chamber, and the air pressure environment maintaining structure is the air pressure environment maintaining structure.

A pneumatic environment maintaining method, adapted to the pneumatic environment maintaining structure as described above, the method comprising the steps of: setting the gap between the penetrating piece and the through hole, and calculating to obtain the compression amount C of the sealing ring; obtaining a sealing ring according to the compression amount C of the sealing ring; the sealing ring is arranged in a gap between the through piece and the through hole to realize moving sealing between the through piece and the through hole.

Optionally, the break-through piece is set to the through rod with set up the cover between the through hole and establish sealed protective sheath on the through rod, sealed protective sheath the setting in sealing washer and aperture includes following step: determining the gap amount delta 1 between the inner diameter D1 of the sealing protection sleeve and the diameter D1 of the through rod, the gap amount delta 2 between the large diameter D2 of the through hole and the outer diameter D2 of the sealing protection sleeve, and the sum of the delta 1 and the delta 2 is the total gap amount delta; determining the compression amount C of the sealing ring according to the multiple of the total clearance amount delta, setting the diameter dx of the sealing ring according to the compression amount C of the sealing ring and the set sealing compression ratio, and setting the sealing compression ratio within the range of 8-20%; d1, D2, D1 and D2 are determined, and the small diameter D0 of the through hole is determined according to the formula D0 ≧ D1+ C.

According to the technical scheme, the air pressure environment maintaining structure comprises a penetrating piece which penetrates into a penetrating hole of the working chamber and is movably arranged, one end of the penetrating piece penetrates into the working chamber to bear a sample, the other end of the penetrating piece is a control end and is located outdoors, the penetrating piece is controlled to move the indoor sample under the condition that the working chamber is prevented from being opened, the opening and closing operation requirements on the working chamber are reduced, and the damage degree to the indoor environment is reduced; meanwhile, the gap between the through piece and the through hole of the working chamber is sealed through the sealing part, so that the moving sealing function is realized, and the air pressure leakage cannot be formed at the through hole in the moving process of the through piece; therefore, by the air pressure environment maintaining structure, the effect that the indoor isolation state of the working chamber can be always maintained with the outside under the condition that the target object is transferred indoors is achieved, the air pressure state and the air pressure environment required in the working chamber are effectively maintained, the duration and the state of the working requirement of the device in the link are improved, the working efficiency is improved, and the working operation of workers is convenient to carry out simply, conveniently and efficiently.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, it is obvious that the drawings in the following description are only embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.

FIG. 1 is a schematic cross-sectional view of a first application of a barometric environment maintenance configuration in an embodiment of the present disclosure;

FIG. 2 is a schematic cross-sectional view of a second application of a barometric environment maintenance configuration in accordance with an embodiment of the present invention;

FIG. 3 is a schematic view of the external connections of the pressure maintaining structure of FIG. 2;

FIG. 4 is a schematic exploded view of a structure for maintaining a pressure environment according to an embodiment of the present invention;

FIG. 5 is a schematic view of an embodiment of a pneumatic environment maintaining structure at a first angle;

FIG. 6 is a schematic view of an embodiment of a pneumatic environment maintaining structure at a second angle;

fig. 7 is a sectional view of a pneumatic environment maintaining structure according to an embodiment of the present invention.

In fig. 1-7:

1-working chamber, 11-transmission channel, 2-penetrating rod, 21-control end, 22-bearing end, 3-sealing protective sleeve, 4-sealing ring, 5-penetrating seat, 51-penetrating hole, 52-butt shaft body, 6-sample chamber, 7-connecting seat, 71-sliding channel and 8-sealing element.

Detailed Description

The application provides a structure and a method for maintaining an atmospheric pressure environment, a worker can move a sample in a working chamber through external operation, and meanwhile, the specific atmospheric pressure environment and the external environment are always kept isolated in the object moving process, so that the specific atmospheric pressure environment required by the work in the working chamber is effectively maintained for a long time, the work efficiency is improved, and the operation is simple and convenient. The application also provides a scanning electron microscope with the above-mentioned atmospheric pressure environment maintaining structure.

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

As shown in fig. 1-7, the present application provides an air pressure environment maintaining structure, which is applied to a working chamber 1 with a target air pressure requirement, and includes a through-hole 51 disposed on a wall of the working chamber 1 and communicating with an indoor space of the working chamber 1, and is capable of moving in the through-hole 51, a control end 21 of the through-hole for controlling a displacement of the through-hole is located outdoors, and a carrying end 22 of the through-hole for carrying a sample is located indoors, so that the through-hole can be controlled to move outside the working chamber 1, and the through-hole can drive the sample on the carrying end 22 to move indoors to complete a position change of the sample, so that the working chamber 1 does not need to be opened to move the sample, and the indoor air pressure environment is not damaged; meanwhile, the sealing component is arranged between the penetrating piece and the through hole 51, and a gap between the penetrating piece and the through hole 51 is sealed, so that the gap is effectively sealed in the moving process of the penetrating piece, air pressure leakage cannot be formed at the through hole 51, and the working chamber 1 is kept sealed and isolated from the outside.

With such arrangement, the pneumatic environment maintaining structure provided by the embodiment can realize the movement of the indoor sample by controlling the penetrating piece under the condition of avoiding opening the working chamber 1, thereby reducing the opening and closing operation requirements on the working chamber 1 and reducing the damage degree to the indoor environment; meanwhile, the gap between the through piece and the through hole 51 of the working chamber 1 is sealed through the sealing part, so that the moving sealing function is realized, and the air pressure leakage at the through hole 51 can not be formed in the moving process of the through piece; therefore, the air pressure environment maintaining structure of the embodiment achieves the effect that the indoor space of the working chamber 1 can be always kept in an isolated state with the outside under the condition that the sample is transferred indoors, effectively maintains the required air pressure state and air pressure environment in the working chamber 1, improves the duration and state of the working requirement of equipment for maintaining the link, improves the working efficiency, and is convenient for the working operation of workers to be carried out simply, conveniently and efficiently.

The atmospheric pressure environment of above-mentioned embodiment maintains the structure, has the sealed break-through of break-through and removes the function, can realize the removal of indoor sample under the condition of avoiding opening studio 1 through controlling the break-through, has realized carrying out under the condition of indoor transfer to the sample, can maintain the effect of isolated state with the external world in studio 1 is indoor all the time. Further, this embodiment also provides in the operation of getting and putting the sample, reduces the implementation structure to the air pressure destruction degree in studio 1 to can further maintain required atmospheric pressure state and atmospheric pressure environment in studio 1, improve equipment and maintain the length of time and the state of this link work demand, improve the operating efficiency.

In this embodiment, as shown in fig. 2 and fig. 3, the atmospheric pressure environment maintaining structure further includes a sample chamber 6 for taking and placing a sample, the sample chamber 6 is provided with a sample port for the sample to enter and exit and a chamber door for communicating or sealing the sample port, meanwhile, the sample chamber 6 is communicated with the working chamber 1 through a transmission channel 11 for the sample to enter and exit, the sample chamber 6 and the transmission channel 11 are both located in a moving range of the penetrating piece carrying end 22, and the carrying end 22 can drive the sample to move between the two chambers through the transmission channel 11, so as to realize the transfer of the sample between the two chambers. The passage opening 51 is provided in the chamber wall of the working chamber 1 or in the chamber wall of the sample chamber 6, i.e. the passage can be connected to the working chamber 1 or to the sample chamber 6. Further, a sealing and isolating assembly for conducting or sealing the transfer passage 11 is disposed between the two chambers.

When a specific air pressure is preset in the working chamber 1, the sealed isolation component seals the transmission channel 11, the working chamber 1 is isolated from the outside, and the required air pressure can be maintained, and the air pressure in the sample chamber 6 can be preset to be the same as that in the working chamber 1 or can be a preset air pressure environment between the outside atmosphere and the air pressure in the working chamber 1. When it is desired to introduce a sample, maintain the seal to the transfer channel 11, open the sample chamber 6, introduce the sample into the sample chamber 6 and place it on the carrying end 22 of the feedthrough, after closing the sample port of the sample chamber 6, open the transfer channel 11, move the sample through the feedthrough into the working chamber 1, and then quickly move the feedthrough out of the working chamber 1 and close the transfer channel 11. When the sample in the working chamber 1 needs to be taken out, the sample port is maintained to be closed firstly, then the conveying channel 11 is opened, the sample is rapidly moved out of the working chamber 1 through the penetrating piece, then the conveying channel 11 is rapidly closed, then the sample port is opened, and the sample port is taken out and then closed again. With such a configuration, in the process of taking and placing the sample, the opening and closing time of the working chamber 1 is reduced to the greatest extent, and since the air pressure in the sample chamber 6 is close to the air pressure in the working chamber 1, when the working chamber 1 is opened, the destructiveness to the air pressure in the working chamber 1 is also reduced, so that the air pressure environment maintaining structure provided by the embodiment realizes that, in the process of taking and placing the sample with the destructiveness to the indoor air pressure being great in the prior art, the function of significantly reducing the destructiveness to the indoor air pressure in the working chamber 1 can be realized, the working chamber 1 can be quickly recovered to the required working environment, the working efficiency of the working procedure performed in the working chamber 1 is improved, especially when the working chamber 1 needs a high vacuum environment, because the recovery speed of the high vacuum environment is slow, if the working chamber 1 is opened for a long time, the working procedure performing efficiency in the working chamber 1 can be seriously influenced, the air pressure environment maintaining structure provided by the embodiment is applied to the sealing isolation of the working chamber 1 with high vacuum requirement, the indoor high vacuum environment maintaining effect can be obviously and effectively improved, and the working efficiency is improved.

Meanwhile, no matter the penetrating piece is movably connected to the sample chamber 6 or the working chamber 1, the penetrating piece has a movable sealing function due to good sealing between the penetrating piece and the through hole 51, so that the indoor air pressure cannot be damaged, and the structure performance is excellent.

Whether the feedthrough is applied on a separate working chamber 1 or in a working condition with both sample chamber 6 and working chamber 1, the sealing means may in particular comprise a sealing gasket, laid around the through-hole 51 and circumferentially wrapped around the feedthrough. Alternatively, as shown in fig. 1 and fig. 2, in the present embodiment, the sealing component includes a sealing ring 4 for sealing a gap between the through hole 51 and the penetrating member, and the sealing ring 4 may be sleeved on the penetrating member or embedded on an inner wall of the through hole 51; the sealing ring 4 is used for sealing, no butt joint or splicing gap exists in the circumferential direction, the sealing effect is better guaranteed due to the integrally formed structure, the penetrating piece can be directly sleeved with the sealing ring, and the sealing ring is more convenient to implement. If, in the preferred embodiment that sealing means includes sealing washer 4, sealing washer 4 cover is established on the break-through and is filled in and establish through-hole 51, so set up, only need guarantee sealing washer 4 and through-hole 51 closely cooperate in size can guarantee good sealed effect, and compare in with sealing washer 4 embedded on the pore wall, this mode need not to set up the recess that holds sealing washer 4 on the pore wall, avoids loaded down with trivial details course of working, the shaping of the structure of being more convenient for.

The penetrating piece can be a rod or other types, can slide and move in the through hole 51 when being a rod, can be of other types of structures such as a plate or a ball, can slide or can be hinged, and can be set according to specific conditions.

For ensuring the smooth displacement of sample in studio 1, guarantee to keep the normal removal of break-through piece in through-hole 51 simultaneously under the sealed circumstances, in the embodiment, the break-through piece sets up to the break-through pole 2 that slidable wore to establish in through-hole 51, the one end of break-through pole 2 is located outdoors and forms the aforesaid and controls end 21, the other end passes through-hole 51 and is located studio 1 indoor and forms the aforesaid and bear end 22, be used for bearing and driving the sample displacement, so, push-and-pull is carried out to break-through pole 2, can carry out the displacement and then realize the sample and adjust in indoor position, not only be convenient for operation and control, the execution is also steady smooth and easy. The control end 21 may be provided with an operating handle for being held by a worker, and the bearing end 22 may be provided with a bearing member for bearing a sample, wherein the bearing member is specifically set according to specific application requirements.

Meanwhile, the sealing component comprises a sealing ring 4 sleeved on the through rod 2, and also comprises a sealing protective sleeve 3 which is used for sealing a gap between the through hole 51 and the through rod 2 and sleeved on the through rod 2, and the sealing protective sleeve 3 and the sealing ring 4 are arranged along the axial direction of the through rod 2; the inner and outer diameters of the sealing protective sleeve 3 and the sealing ring 4 are respectively matched with the outer diameter of the through rod 2 and the inner diameter of the through hole 51. Due to the arrangement, on one hand, the sealing protective sleeve 3 and the sealing ring 4 jointly seal the gap between the through rod 2 and the through part, and the sealing effect is improved; on the other hand, sealed protective sheath 3 has axial length, sealed protective sheath 3 provides the leakproofness removal space that has axial length for the break-through pole 2 of removal, in other words, when break-through pole 2 carries out the ascending slip of axial, the clearance in displacement route has obtained the effective sealing that has the length nature guarantee in the axial, sealed effect has both been ensured, and simultaneously, guarantee that break-through pole 2 can normally slide again, the prior art has been solved, the break-through piece leads to sealed insecure easily under the operating mode of frequent removal, cause unable formation effective sealing and make the atmospheric pressure environment receive the problem of destruction.

The through hole 51 may be a through hole directly formed in the wall of the working chamber 1, and the parts such as the seal ring 4, the seal protection sleeve 3, and the through rod 2 are directly connected to the through hole 51 to be processed on the working chamber 1, but if the equipment having the working chamber 1 is large in size or is not suitable to be frequently turned over or moved, it is inconvenient to perform processing operations such as connection and sealing cooperation between each part and the through hole 51. Therefore, the present application provides another embodiment, in which the air pressure environment maintaining structure further includes a penetrating seat 5, a through hole penetrating along the thickness direction is provided on the chamber wall of the working chamber 1, and may also be a transmission channel 11, and the penetrating hole 51 hermetically fitted with the penetrating rod 2 is provided on the penetrating seat 5, the penetrating seat 5 is connected to the outer wall of the working chamber 1, the penetrating hole 51 is communicated with the through hole on the chamber wall of the working chamber 1, i.e., the transmission channel 11, and meanwhile, the penetrating seat 5 is hermetically connected with the outer wall to prevent air pressure leakage; the penetrating rod 2 penetrates through the penetrating hole 51 and then penetrates through the conveying channel 11 to extend into the working chamber 1, and the sealing protective sleeve 3 and the sealing ring 4 are both arranged in the penetrating hole 51 on the penetrating seat 5. So set up, need not sealed between the transfer passage 11 on wearing to lead to pole 2 and the studio 1, also can guarantee to remove in-process sealed studio 1, then, wear to lead to pole 2, sealed protective sheath 3 and sealing washer 4 and all be connected with break-through seat 5, these parts have constituted the main part that atmospheric pressure environment maintained the structure basically, after the main part preparation is accomplished, will wear to lead to seat 5 lug connection to studio 1 wall on, can be in order to accomplish the application that atmospheric pressure environment maintained the structure. The implementation structure has the following beneficial effects: on the first hand, the connection between the parts is convenient, the processing and the manufacturing are convenient, the damage to the working chamber 1 is avoided, and the production cost is reduced; in the second aspect, the maintenance, overhaul or replacement of each part is facilitated, and the longer service life for ensuring effective sealing is easier to maintain; in the third aspect, the implementation main body of the air pressure environment maintaining structure is independently arranged with the working chamber 1, is not restricted by implementation objects, can be matched and applied to the sealing of chambers of various structures on various devices, and is flexible and convenient in application and implementation.

The penetrating seat 5 and the outer wall of the working chamber 1 need to be connected in a sealing manner to prevent air pressure leakage from the joint of the penetrating seat 5 and the outer wall of the working chamber 1, so as shown in fig. 1 and 6, a sealing element 8 is arranged between one side of the penetrating seat 5, which is used for being connected with the outer wall of the working chamber 1, and the sealing element 8 is integrally annular and arranged around a through hole of the working chamber 1, and specifically can be a sealing rubber gasket or a sealing ring.

The penetrating seat 5 can be in a plate shape and is attached to the outer wall of the working chamber 1, and the sealing element 8 is embedded in the penetrating seat 5 or the outer wall of the working chamber 1. One side of wearing seat 5 and being connected of studio 1 can also be provided with and be used for penetrating the butt joint axis body 52 in the 1 through-hole of studio, and butt joint axis body 52 protrusion is used for the terminal surface of being connected with the outer wall laminating in wearing seat 5, and the external diameter matches with the internal diameter of the 1 through-hole of studio, and simultaneously, through-hole 51 is seted up on butt joint axis body 52. Due to the arrangement, on one hand, the connection of the through seat 5 is convenient to position, the through hole 51 is simply and conveniently aligned with the through hole of the working chamber 1, and on the other hand, the coaxiality of the through hole 51 and the through hole of the working chamber 1 is improved; on the other hand, the axial length of the through hole 51 is extended, and the sealing performance and the sealing effect are improved.

The penetrating seat 5 and the working chamber 1 may be detachably connected by a fastener or a snap-fit connection structure, or may be fixedly connected by adhesion or welding.

The through hole 51 may be a straight hole with a constant diameter, or, as shown in fig. 7, is in a step hole shape, and includes a coarse hole section with a large diameter D2 and a fine hole section with a small diameter D0, the sealing protective sleeve 3 and the sealing ring 4 are both disposed in the coarse hole section, and the fine hole section is closer to the working chamber 1 than the coarse hole section. The fine-pored section is directly fitted with the through-rod 2. So set up, pore section can form one and block the step, and sealing washer 4 offsets with this the step of blocking with the axial tip of sealed protective sheath 3, can prevent to receive the removal friction influence of break-over pole 2, and sealing washer 4 can produce axial displacement with sealed protective sheath 3 and influence sealed effect.

The sealing protective sleeve 3 and the sealing ring 4 are matched, so that effective sealing of a moving gap in the axial sliding process of the penetrating rod 2 is guaranteed, and the indoor environment can maintain the specific air pressure required by work. However, if the penetrating rod 2 deviates, is inclined and has radial displacement, the sealing protective sleeve 3 and the sealing ring 4 are extruded, so that the sealing is easy to lose efficacy temporarily, and when the situation is frequent, the sealing protective sleeve 3 and the sealing ring 4 are damaged, so that the sealing is lost efficacy for a long time, and the structure cannot be used continuously. Therefore, in order to solve the problem, ensure the smooth sliding of the penetrating rod 2, and reduce the deviation and skew of the penetrating rod 2, in this embodiment, as shown in fig. 1 and 3, the air pressure environment maintaining structure further includes a sliding channel 71 formed outside the working chamber 1 and allowing the penetrating rod 2 to slide, and the sliding channel 71 is communicated with the penetrating hole 51 and hermetically connected with the outer wall of the working chamber 1. In a preferred embodiment, the cross section of the sliding channel 71 is circular, extends in a constant diameter, and is coaxially arranged with the through hole 51. Therefore, the penetrating rod 2 slides in the sliding channel 71 and is constrained by the sliding channel 71, so that the penetrating rod 2 is ensured to maintain higher coaxiality with the penetrating hole 51 in the moving process, even when the penetrating rod is impacted or operated improperly as desired by radial force, the penetrating rod can be prevented from skewing or deviating, adverse consequences such as sealing failure or extrusion on a sealing part are prevented, the structural stability and the safety are obviously improved, the service performance is enhanced, the problem of sealing failure is solved to a large extent, the sealing effect and the long-term effectiveness are ensured and improved, and the service life is prolonged.

The sliding channel 71 is formed on the connecting seat 7, and if the through hole 51 is directly formed on the working chamber 1, the connecting seat 7 is directly connected with the outer wall of the working chamber 1 in a sealing manner, and sealing can be realized by arranging a sealing ring arranged around the conveying channel 11 between the connecting seat 7 and the working chamber; if the through hole 51 sets up on wearing to lead to seat 5, connecting seat 7 is connected with the one side of wearing to lead to seat 5 that keeps away from studio 1, can be through fastener or block type connection structure can dismantle the connection, also can be through mode such as bonding or welding and carry out non-detachable fixed connection.

On the basis of the above atmospheric pressure environment maintaining structure, the present application further provides a scanning electron microscope, including a working chamber 1 and an atmospheric pressure environment maintaining structure applied to the working chamber 1, where the working chamber 1 is the above working chamber 1, and the atmospheric pressure environment maintaining structure is the above atmospheric pressure environment maintaining structure.

Since the scanning electron microscope has the working chamber 1 and the working chamber 1 is provided with the above-mentioned air pressure environment maintaining structure, please refer to the above-mentioned contents for the beneficial effects brought by the air pressure environment maintaining structure of the scanning electron microscope, which will not be described herein again.

An embodiment of the present application further provides a method for maintaining an atmospheric pressure environment, which is suitable for the above-mentioned atmospheric pressure environment maintaining structure, and the method includes the following steps: setting the gap between the penetrating piece and the through hole 51, and calculating to obtain the compression amount C of the sealing ring; determining a sealing ring 4 according to the compression amount C of the sealing ring; the sealing ring 4 is arranged in the gap between the feedthrough and the through-opening 51 in order to achieve a moving seal between the feedthrough and the through-opening 51. The method specifically provides a step for obtaining the sealing ring 4, the compression amount C of the sealing ring is set through the gap amount, the proper sealing ring 4 is selected or manufactured according to the compression amount C (the manufacturing process and the technology are the prior art), the sealing ring 4 can effectively seal the gap between the penetrating piece and the through hole 51, the situation that the penetrating piece cannot move due to poor sealing or over-tight sealing is avoided, and the use performance is ensured. The method for maintaining an atmospheric pressure environment enables the atmospheric pressure environment maintaining structure to be applied with high performance, and the beneficial effects brought by the method are referred to the above contents and are not repeated herein.

The feedthrough can be embodied as a feedthrough rod 2, the advantageous effects of the feedthrough rod 2 being already explained above and not repeated here. Set up the cover and establish the sealed protective sheath 3 on wearing through rod 2 between wearing through rod 2 and wearing hole 51, sealed protective sheath 3 forms duplicate protection with sealing washer 4, has also ensured on sealed good basis, and the wearing through rod 2 can normally be removed, and the concrete derivation process of this beneficial effect is unanimous with the corresponding department in the above-mentioned, and this is no longer repeated here.

The through hole 51 is step hole form, including the gross porosity section that has major diameter D2 and the pore section that has minor diameter D0, sealed protective sheath 3 all sets up in the gross porosity section of through hole 51 with sealing washer 4, and the pore section is more close to studio 1 in the gross porosity section relatively. The fine-pored section is directly fitted with the through-rod 2.

The size setting of the sealing protective sleeve 3 and the sealing ring 4 and the setting of the through hole 51 corresponding to the large aperture specifically comprise the following steps: determining the gap amount delta 1 between the inner diameter D1 of the sealing protection sleeve 3 and the diameter D1 of the through rod 2, the gap amount delta 2 between the large diameter D2 of the through hole 51 and the outer diameter D2 of the sealing protection sleeve 3, and the sum of the delta 1 and the delta 2 is the total gap amount delta; determining the compression amount C of the sealing ring according to the multiple of the total clearance amount delta, setting the diameter dx of the sealing ring 4 according to the compression amount C of the sealing ring and the set sealing compression ratio, and setting the sealing compression ratio in the range of 8-20%; d1, D2, D1 and D2 are determined, and the small diameter D0 of the through hole 51 is determined according to the formula D0 ≧ D1+ C. In the method, firstly, the gap amount between the sealing protective sleeve 3 and the through rod 2 and the through hole 51 is determined, because the sealing protective sleeve 3 has a longer axial length compared with the sealing ring 4, and the sealing degree of the gap between the sealing protective sleeve 3 and the rod and the hole is the primary parameter for ensuring the moving seal of the through rod 2, therefore, the gap amount between the sealing protective sleeve 3 and the rod and the hole is firstly determined, and then the sealing ring 4 is set according to the gap amount, so that the method is more reasonable and has better sealing performance; the compression amount C of the sealing ring 4 is not the sum of delta 1 and delta 2, namely the total clearance amount delta between the sealing protective sleeve 3 and the rod and the hole, but is a multiple of the total clearance amount delta, so that the sealing ring 4 is more tightly matched with the rod and the hole in size compared with the sealing protective sleeve 3, the sealing performance and the sealing effect are further improved, and the guarantee on the tightness and the durability of sealing is improved; after setting for the linear relation of fit size, can set for the size of through-hole 51 and break-through pole 2 according to actual demand, can extend multiple specification, have higher practicality and application convenience.

Wherein the compression amount C of the seal ring 4 may be 3 to 4 times the total gap amount Δ. So set up, have suitable inseparable degree, can not lead to the fact the card to the removal of wearing to lead to the pole and pause, can not cause sealed untight yet.

The components, devices referred to in this application are meant as illustrative examples only and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the drawings. These components, devices may be connected, arranged, configured in any manner, as will be appreciated by those skilled in the art. Words such as "including," "comprising," "having," and the like are open-ended words that mean "including, but not limited to," and are used interchangeably therewith. The words "or" and "as used herein mean, and are used interchangeably with, the word" and/or, "unless the context clearly dictates otherwise. The word "such as" is used herein to mean, and is used interchangeably with, the phrase "such as but not limited to".

It should also be noted that in the apparatus of the present application, the components may be disassembled and/or reassembled. These decompositions and/or recombinations are to be considered as equivalents of the present application.

The previous description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other aspects without departing from the scope of the application. Thus, the present application is not intended to be limited to the aspects shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

The foregoing description has been presented for purposes of illustration and description. Furthermore, the description is not intended to limit embodiments of the application to the form disclosed herein. While a number of example aspects and embodiments have been discussed above, those of skill in the art will recognize certain variations, modifications, alterations, additions and sub-combinations thereof.

The above description is only exemplary of the present application and should not be taken as limiting the present application, as any modifications, equivalents and the like that are within the spirit and principle of the present application should be included in the scope of the present application.

Claims

1. A structure for maintaining an atmospheric pressure environment is applied to a working chamber (1) with a target atmospheric pressure requirement in the chamber, and is characterized by comprising:

the penetrating piece penetrates through a penetrating hole (51) communicated with the indoor space of the working chamber (1) and can move in the penetrating hole (51), a control end (21) of the penetrating piece for controlling displacement is located outdoors, and a bearing end (22) for bearing a sample is located indoors;

and a sealing component arranged between the penetrating piece and the penetrating hole (51) so as to seal the working chamber (1) from the outside.

2. A pneumatic environment maintaining arrangement according to claim 1, wherein said sealing means comprises a sealing ring (4) sealing a gap between said through hole (51) and said feedthrough.

3. A pneumatic environment maintaining structure as claimed in claim 1 or 2, wherein said feedthrough is configured as a feedthrough rod (2) slidably inserted into said feedthrough hole (51), said sealing means further comprising a sealing boot (3) sealing the gap between said feedthrough hole (51) and said feedthrough rod (2) and fitting over said feedthrough rod (2).

4. The structure for maintaining a barometric environment according to claim 1, further comprising a sample chamber (6) for taking and placing a sample, wherein the sample chamber (6) is communicated with the working chamber (1) through a transfer passage (11) for the sample to enter and exit, and the sample chamber (6) and the transfer passage (11) are both located in a moving range of the carrying end (22).

5. A pneumatic environment maintaining structure as claimed in claim 4, further comprising a sealing and isolating assembly for conducting or sealing said transfer channel (11).

6. A pneumatic environment maintaining structure as claimed in claim 3, further comprising a sliding channel (71) formed outside said working chamber (1) and allowing said through rod (2) to slide, said sliding channel (71) communicating with said through hole (51) and being sealingly connected to the outer wall of said working chamber (1).

7. A pneumatic environment maintaining structure as claimed in claim 1, characterized in that it further comprises a through seat (5) provided on the outer wall of said working chamber (1), said through hole (51) being provided on said through seat (5) and communicating with a delivery channel (11) provided on the wall of said working chamber (1).

8. A scanning electron microscope comprising a working chamber (1) and a pneumatic environment maintaining structure applied to the working chamber (1), wherein the working chamber (1) is the working chamber (1) according to any one of claims 1 to 7, and the pneumatic environment maintaining structure is the pneumatic environment maintaining structure according to any one of claims 1 to 7.

9. A pneumatic environment maintaining method applied to the pneumatic environment maintaining structure of any one of claims 1 to 7, the method comprising the steps of:

setting the gap between the penetrating piece and the through hole (51), and calculating to obtain the compression amount C of the sealing ring;

determining a sealing ring (4) according to the compression amount C of the sealing ring;

the sealing ring (4) is arranged in a gap between the feedthrough and the through-opening (51) in order to achieve a moving seal between the feedthrough and the through-opening (51).

10. The method for maintaining a pneumatic environment according to claim 9, wherein the feedthrough is a feedthrough rod (2), a sealing sheath (3) disposed on the feedthrough rod (2) is disposed between the feedthrough rod (2) and the feedthrough hole (51), and the steps of disposing the sealing sheath (3), the sealing ring (4) and the bore diameter are as follows:

determining the clearance quantity delta 1 between the inner diameter D1 of the sealing protection sleeve (3) and the diameter D1 of the through rod (2), the clearance quantity delta 2 between the large diameter D2 of the through hole (51) and the outer diameter D2 of the sealing protection sleeve (3), and the sum of the delta 1 and the delta 2 is the total clearance quantity delta;

determining the compression amount C of the sealing ring according to the multiple of the total clearance amount delta, setting the diameter dx of the sealing ring (4) according to the compression amount C of the sealing ring and the set sealing compression ratio, and setting the sealing compression ratio within the range of 8-20%;

d1, D2, D1 and D2 are determined, and the small diameter D0 of the through hole (51) is determined according to the formula D0 ≧ D1+ C.