CN114089725B - Test method and device for control software of chemical mechanical polishing equipment and electronic equipment - Google Patents
Test method and device for control software of chemical mechanical polishing equipment and electronic equipment Download PDFInfo
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Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B23/00—Testing or monitoring of control systems or parts thereof
- G05B23/02—Electric testing or monitoring
- G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
- G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
- G05B23/0256—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults injecting test signals and analyzing monitored process response, e.g. injecting the test signal while interrupting the normal operation of the monitored system; superimposing the test signal onto a control signal during normal operation of the monitored system
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/20—Pc systems
- G05B2219/24—Pc safety
- G05B2219/24065—Real time diagnostics
Abstract
The invention discloses a testing method and device of CMP equipment control software and electronic equipment, wherein the method comprises the following steps: performing functional analysis on a target module of control software to acquire a target function; determining a target test class in the test classes of the target module to test upper-layer functional logic or bottom-layer codes of the control software; generating test cases of target test categories according to the target functions; and testing the target module based on the test case. According to the technical scheme provided by the invention, the functions of each functional module of the CMP control software are analyzed, so that the test cases of the black box test and the white box test which accord with the functions of the modules are correspondingly generated, the function of performing complete test on the CMP control software is realized, and the reliability of the CMP control software is improved.
Description
Technical Field
The invention relates to the technical field of testing of equipment control software, in particular to a testing method and device of chemical mechanical polishing equipment control software and electronic equipment.
Background
The special semiconductor equipment is mainly used for mass automatic production of crystalline silicon and brittle materials, is very high in manufacturability, and has very high process and efficiency requirements in chemical mechanical polishing (Chemical Mechanical Polishing, CMP) equipment of semiconductor wafers. Whether the CMP apparatus is capable of meeting the process and efficiency requirements, the reliability and stability of its control software is critical. For CMP equipment, due to the complex mechanism and the numerous modules, the interaction between the modules is frequent, complex and changeable, and the reliability requirement on control software logic is high. Because of the high process requirements, there are also high demands on the monitoring functions of the system, the ability to handle anomalies and to recover from faults. On a production line, the triggering of any vulnerability may cause an immeasurable loss. Thus, the comprehensiveness of testing for control software is directly related to the stability and reliability of the device, and no complete testing scheme is currently applied to the CMP device control software.
Disclosure of Invention
In view of the above, the embodiment of the invention provides a method, a device and an electronic device for testing control software of a chemical mechanical polishing device, thereby providing a complete test scheme of the control software of the chemical mechanical polishing device.
According to a first aspect, an embodiment of the present invention provides a method for testing control software of a chemical mechanical polishing apparatus, where the method includes: performing functional analysis on a target module of the control software to obtain a target function; determining a target test class in the test classes of the target modules so as to test upper-layer functional logic or bottom-layer codes of the control software; generating a test case of the target test class according to the target function; and testing the target module based on the test case.
Optionally, the test class of the upper layer functional logic includes one or more of operation logic, production processing, monitoring function, and exception handling, and the generating the test case of the target test class according to the target function includes: acquiring the corresponding relation between all interactive keys of the target module and control logic in the target function, and generating a first test case for detecting operation logic of the target module based on the corresponding relation, wherein the control logic comprises enabling logic and non-enabling logic; acquiring a preset signal category sent by the target module when responding to the target function, and generating a second test case for detecting the production and processing based on the preset signal category so as to detect whether an actual signal sent by the target module is consistent with the preset signal category; acquiring an operation parameter and a parameter threshold of the target module, and generating a third test case based on the operation parameter and the parameter threshold to test whether the target module can send an alarm response when the operation parameter exceeds the parameter threshold; and acquiring a protection instruction of power-off operation and water spraying protection action and a re-operation instruction of equipment, generating a fourth test case based on the protection instruction and the re-operation instruction, so as to test whether the target module can send the protection instruction after sending the alarm response and automatically send the re-operation instruction after manually intervening in the chemical mechanical polishing equipment.
Optionally, the test case is a test case for testing system performance, and the testing the target module based on the test case includes: acquiring the execution time of the target module for executing the target function; and analyzing the system performance of the target module on the current running equipment according to a difference test of the preset expected time and the execution time.
Optionally, the test case is a test case for testing an operating pressure test, and the testing the target module based on the test case includes: monitoring the occupation condition of hardware resources of the target module for executing the target function in a preset time; and analyzing the running pressure of the control software based on the hardware resource occupation condition and a preset system performance standard test.
Optionally, the test class of the underlying code includes a resolution capability test, the test case is a test case for testing the resolution capability test, the testing the target module based on the test case includes: and sending a decision instruction to the target module to test whether the target module can convert the decision instruction into a response for executing the target function within a second preset time.
Optionally, the test class of the underlying code includes a code integrity test, the test case is a test case for testing code integrity, the testing the target module based on the test case includes: and performing instrumentation test on the code of the target module to determine the code integrity of the target module and whether the memory leakage exists.
Optionally, the control software further includes a display module, and the method further includes: and judging whether the display module can correctly display the display parameters fed back by other modules.
According to a second aspect, an embodiment of the present invention provides a test apparatus for control software of a chemical mechanical polishing apparatus, the apparatus comprising: the function analysis module is used for carrying out functional analysis on the target module of the control software to obtain a target function; the class analysis module is used for determining a target test class in the test classes of the target module so as to test upper-layer functional logic or bottom-layer codes of the control software; the use case generation module is used for generating test use cases of the target test categories according to the target functions; and the test module is used for testing the target module based on the test case.
According to a third aspect, an embodiment of the present invention provides an electronic device, including:
the system comprises a memory and a processor, wherein the memory and the processor are in communication connection, the memory stores computer instructions, and the processor executes the computer instructions, thereby executing the method in the first aspect or any optional implementation manner of the first aspect.
According to a fourth aspect, embodiments of the present invention provide a computer readable storage medium storing computer instructions for causing the computer to perform the method of the first aspect, or any one of the alternative embodiments of the first aspect.
The technical scheme of the invention has the following advantages:
the embodiment of the invention provides a testing method and device for CMP equipment control software and electronic equipment. The method specifically comprises the following steps: the function of the target module of the control software of the CMP equipment is analyzed, so that test cases of target test categories are generated on the basis of the target function, the control software of the CMP equipment is tested by using the corresponding test cases, the test on the software level is realized, and the reliability and the stability of the control software of the CMP equipment are ensured. The embodiment of the invention tests each module of the control software of the CMP equipment from 8 categories of operation logic, production and processing, monitoring functions, exception handling, system performance, running pressure test, decision capability test and code test, almost covers all functions and bottom code design of the control software, realizes complete test of the control software from two angles of a black box and a white box respectively, and solves the problem that no complete test method and no complete test system exist in the field of the CMP equipment at present. And each test case is generated based on target function analysis of the target module, so that after the control software is upgraded, the test case conforming to the latest function can be adaptively generated, and the self-adaptive capacity of the test method is improved.
In addition, a testing link is added for a display module of the control software, so that the completeness of the testing method of the control software of the CMP equipment provided by the embodiment of the invention is further improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram showing the steps of a method for testing control software of a chemical mechanical polishing apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a test apparatus for controlling software of a chemical mechanical polishing apparatus according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of an electronic device according to an embodiment of the present invention.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention.
The technical features of the different embodiments of the invention described below may be combined with one another as long as they do not conflict with one another.
Referring to fig. 1, a method for testing control software of a chemical mechanical polishing apparatus according to an embodiment of the present invention specifically includes the following steps:
step S101: and carrying out functional analysis on a target module of the control software to obtain a target function. Specifically, a corresponding test case is generated on the basis of fully knowing the requirements of the control software of the CMP equipment, so that the test of the control software of the CMP equipment is accurately and clearly realized. The polishing module is mainly used for controlling the CMP equipment to execute the working steps of polishing the wafer, the cleaning module is mainly used for controlling the CMP equipment to execute the working steps of cleaning the wafer and the equipment, the scheduling module is mainly used for policy configuration of working sequence and time among the modules, the wafer transfer module is used for controlling the CMP equipment to enable the wafer of different paths to be correctly transmitted among the stations, and the display module is used for controlling the display hardware of the CMP equipment to correctly display parameters of the steps.
Step S102: and determining a target test class in the test classes of the target modules so as to test upper-layer functional logic or bottom-layer codes of the control software. Specifically, each module of the control software involves a plurality of functional sub-modules, and in the embodiment of the invention, the test of each test class is performed on each module, so that the complete test of the control software of the CMP equipment can be realized according to the needs of users. The operation logic test is mainly used for testing whether a menu or a key in each software module is added with a correct triggering function, so that the starting and closing of related functions of the control software are accurately triggered; the production and processing test is mainly used for testing whether each module can timely send out a correct control instruction to inform the corresponding processing flow to normally operate in the production and processing process, and testing whether the related parameter configuration is correct before the processing process is started; the monitoring function test is used for testing whether each module of the control software can timely send out alarm response when abnormality occurs; the exception handling test is used for testing whether each module can execute the safety operation in time after sending out the alarm response; and then, the running time and the running effect of the control software on the current equipment are obtained through a system performance test and a running pressure test, so that the complexity of the control software and the hardware configuration of the running equipment can be timely adjusted. In addition to the functional black box test, the embodiment of the invention provides the decision capability test and the code test in the test method, and also carries out white box test on codes of all modules, thereby improving the code integrity and stability.
Step S103: and generating test cases of the target test class according to the target function. Specifically, the corresponding execution steps or custom codes are converted into test cases according to the test requirements of the modules, so that the reliability test of the CMP equipment control software is completed based on the test cases. The problem that the control software of the conventional CMP equipment cannot perform complete test is solved.
Step S104: and testing the target module based on the test case.
Specifically, in one embodiment, step S103 includes the following steps:
step S1031: and acquiring the corresponding relation between all interactive keys of the target module and control logic in the target function, and generating a first test case for detecting the operation logic of the target module based on the corresponding relation, wherein the control logic comprises enabling logic and non-enabling logic. Specifically, the enabling or non-enabling control logic which should be executed by the interaction keys in each target module is read, and the read result is used as a first test case, so that when the control software runs the first test case, whether the corresponding enabling or non-enabling control logic is correctly added to the interaction keys of each target module is detected, for example: and detecting whether an enabling control logic for enabling a cleaning function is added to a cleaning button of the cleaning module.
Step S1032: and acquiring a preset signal category sent by the target module in response to the target function, and generating a second test case for detecting production and processing based on the preset signal category so as to detect whether an actual signal sent by the target module is consistent with the preset signal category. Specifically, when the target module executes the target function, a specific signal is sent out, so that the target function can be executed. And the second test case is used for testing whether the signal sent by the target module for production and processing is consistent with a preset specific signal, so as to judge whether the production and processing functions of the target module are complete.
Step S1033: and acquiring the operation parameters and the parameter threshold of the target module, and generating a third test case based on the operation parameters and the parameter threshold to test whether the target module can send out an alarm response when the operation parameters exceed the parameter threshold. Specifically, the target module generates operating parameters, such as current rotational speed, temperature, etc., according to its own functions during operation. And when the parameter exceeds the parameter threshold, the parameter is abnormal, namely the target module is abnormal. Therefore, based on the basis of whether the test target module can send out the alarm response, a third test case for judging whether the alarm response occurs or not is generated. The normal use of the alarm function of the target module is ensured.
Step S1034: the method comprises the steps of obtaining a protection instruction of power-off operation and water spraying protection action and a re-operation instruction of equipment, generating a fourth test case based on the protection instruction and the re-operation instruction, and testing whether a target module can send the protection instruction after sending an alarm response or not and whether the re-operation instruction can be automatically sent after manually intervening in CMP equipment or not. Specifically, the power-off operation instruction, the instruction of the water spraying protection action and the reset instruction are obtained in advance, and after the target module sends an alarm response, whether the target module sends the related instruction or not is detected so as to start the protection function of the equipment and the reset function after fault processing. Thus completing the exception handling test function of the CMP equipment control software.
Specifically, in an embodiment, the test case is a test case for testing system performance, and the step S104 further includes:
step S1041: and acquiring the execution time of the target module for executing the target function.
Step S1042: and analyzing the system performance of the target module on the current running equipment according to the difference test of the preset expected time and the execution time.
Specifically, by counting the running time of the target module for executing the target function on the running device, the performance of the control software running target module on the hardware device is analyzed. The longer the running time is, the worse the system performance of the software is, so that the control software code logic can be improved according to the preset time index, and the running speed of the control software is increased.
Specifically, in an embodiment, the test case is a test case for testing an operating pressure test, and the step S104 further includes:
step S1043: and monitoring the occupation condition of hardware resources of the target module for executing the target function within a preset time.
Step S1044: and analyzing the operation pressure of the control software based on the occupation condition of the hardware resources and a preset system performance standard test.
Specifically, the test software monitors the occupied data of the internal memory, the cpu, the hard disk and the like of the equipment when the target module of the control software runs, so that the running pressure of the current equipment on the control software is analyzed, and a user can further judge whether certain functions of the control software need to be discarded or upgrade the equipment such as a computer where the control software is located, so that the running pressure of the control software is reduced.
Specifically, in one embodiment, the test case is a test case for testing the decision capability test, and the step S104 further includes:
step S1045: and sending a decision instruction to the target module to test whether the target module can convert the decision instruction into a response for executing the target function within a second preset time. Specifically, in one example, the above black box test for the function of the target module includes a white box test at the code level, and by sending a series of logic decision instructions to the target module, the target module is tested for whether the decision instructions can be correctly resolved and responded to correctly. Therefore, the function of checking all code logics of the target module is realized, and the stability of CMP control software is improved.
Specifically, in an embodiment, the test case is a test case for testing the integrity of the code, and the step S104 further includes:
step S1046: and performing instrumentation test on the code of the target module to determine the code integrity of the target module and whether the memory leakage exists. Specifically, according to the CMP equipment testing method provided by the embodiment of the invention, the code of the target module is subjected to pile insertion test by the preset custom code, so that related information such as call information of functions in the code is recorded, the problem is further improved, the code integrity is improved, and the occurrence of memory leakage is prevented.
Specifically, in one embodiment, the CMP control software further includes a display module, and a method for testing the CMP control software further includes the steps of:
step S105: judging whether the display module can correctly display the display parameters fed back by other modules. Specifically, the integrity of the display function of the control software is tested by testing whether the display module can accurately capture parameters of other modules and display the parameters on the interface of the control software.
By executing the steps, the test method for the control software of the chemical mechanical polishing equipment provided by the embodiment of the invention generates the test cases of the target test types on the basis of the target functions by analyzing the functions of the target modules of the control software of the CMP equipment, and uses the corresponding test cases to test the control software of the CMP equipment, thereby realizing the test on the software level and ensuring the reliability and stability of the control software of the CMP equipment. The embodiment of the invention tests each module of the control software of the CMP equipment from 8 categories of operation logic, production and processing, monitoring functions, exception handling, system performance, running pressure test, decision capability test and code test, almost covers all functions and bottom code design of the control software, realizes complete test of the control software from two angles of a black box and a white box respectively, and solves the problem that no complete test method and no complete test system exist in the field of the CMP equipment at present. And each test case is generated based on target function analysis of the target module, so that after the control software is upgraded, the test case conforming to the latest function can be adaptively generated, and the self-adaptive capacity of the test method is improved.
In addition, a testing link is added for a display module of the control software, so that the completeness of the testing method of the control software of the CMP equipment provided by the embodiment of the invention is further improved.
As shown in fig. 2, the present embodiment further provides a testing apparatus for control software of a chemical mechanical polishing apparatus, where the apparatus includes:
the function analysis module 101 is configured to perform functional analysis on a target module of the control software, and obtain a target function. For details, refer to the related description of step S101 in the above method embodiment, and no further description is given here.
The class analysis module 102 is configured to determine a target test class of the test classes of the target module, so as to test the upper-level functional logic or the bottom-level code of the control software. For details, refer to the related description of step S102 in the above method embodiment, and no further description is given here.
The case generation module 103 is configured to generate a test case of a target test class according to the target function. For details, see the description of step S103 in the above method embodiment, and the details are not repeated here.
And the test module 104 is used for testing the target module based on the test cases. For details, refer to the related description of step S104 in the above method embodiment, and no further description is given here.
The testing device of the CMP equipment control software provided by the embodiment of the present invention is used for executing the testing method of the CMP equipment control software provided by the above embodiment, and its implementation manner is the same as the principle, and details are referred to the related description of the above method embodiment and are not repeated.
Through the cooperation of the components, the testing device for the control software of the chemical mechanical polishing equipment provided by the embodiment of the invention generates the test cases of the target test types on the basis of the target functions by analyzing the functions of the target modules of the control software of the CMP equipment, and tests the control software of the CMP equipment by using the corresponding test cases, so that the testing on the software level is realized, and the reliability and the stability of the control software of the CMP equipment are ensured. The embodiment of the invention tests each module of the control software of the CMP equipment from 8 categories of operation logic, production and processing, monitoring functions, exception handling, system performance, running pressure test, decision capability test and code test, almost covers all functions and bottom code design of the control software, realizes complete test of the control software from two angles of a black box and a white box respectively, and solves the problem that no complete test method and no complete test system exist in the field of the CMP equipment at present. And each test case is generated based on target function analysis of the target module, so that after the control software is upgraded, the test case conforming to the latest function can be adaptively generated, and the self-adaptive capacity of the test method is improved.
In addition, a testing link is added for a display module of the control software, so that the completeness of the testing method of the control software of the chemical mechanical polishing equipment provided by the embodiment of the invention is further improved.
Fig. 3 shows an electronic device according to an embodiment of the invention, the device comprising: the processor 901 and the memory 902 may be connected by a bus or otherwise, for example in fig. 3.
The processor 901 may be a central processing unit (Central Processing Unit, CPU). The processor 901 may also be other general purpose processors, digital signal processors (Digital Signal Processor, DSP), application specific integrated circuits (Application Specific Integrated Circuit, ASIC), field programmable gate arrays (Field-Programmable Gate Array, FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, or a combination thereof.
The memory 902 is used as a non-transitory computer readable storage medium for storing non-transitory software programs, non-transitory computer executable programs, and modules, such as program instructions/modules corresponding to the methods in the method embodiments described above. The processor 901 executes various functional applications of the processor and data processing, i.e., implements the methods in the above-described method embodiments, by running non-transitory software programs, instructions, and modules stored in the memory 902.
The memory 902 may include a storage program area and a storage data area, wherein the storage program area may store an operating system, at least one application program required for a function; the storage data area may store data created by the processor 901, and the like. In addition, the memory 902 may include high-speed random access memory, and may also include non-transitory memory, such as at least one magnetic disk storage device, flash memory device, or other non-transitory solid state storage device. In some embodiments, memory 902 optionally includes memory remotely located relative to processor 901, which may be connected to processor 901 via a network. Examples of such networks include, but are not limited to, the internet, intranets, local area networks, mobile communication networks, and combinations thereof.
One or more modules are stored in the memory 902 that, when executed by the processor 901, perform the methods of the method embodiments described above.
The specific details of the electronic device may be correspondingly understood by referring to the corresponding related descriptions and effects in the above method embodiments, which are not repeated herein.
It will be appreciated by those skilled in the art that implementing all or part of the above-described methods in the embodiments may be implemented by a computer program for instructing relevant hardware, and the implemented program may be stored in a computer readable storage medium, and the program may include the steps of the embodiments of the above-described methods when executed. The storage medium may be a magnetic Disk, an optical Disk, a Read-Only Memory (ROM), a random access Memory (Random Access Memory, RAM), a Flash Memory (Flash Memory), a Hard Disk (HDD), or a Solid State Drive (SSD); the storage medium may also comprise a combination of memories of the kind described above.
Although embodiments of the present invention have been described in connection with the accompanying drawings, various modifications and variations may be made by those skilled in the art without departing from the spirit and scope of the invention, and such modifications and variations are within the scope of the invention as defined by the appended claims.
Claims (9)
1. A method for testing control software of a chemical mechanical polishing apparatus, the method comprising:
performing functional analysis on a target module of the control software to obtain a target function;
determining a target test class in the test classes of the target modules so as to test upper-layer functional logic or bottom-layer codes of the control software;
generating a test case of the target test class according to the target function;
testing the target module based on the test case;
the test class of the upper layer functional logic comprises one or more of operation logic, production processing, monitoring function and exception processing, and the test case of the target test class is generated according to the target function and comprises the following steps:
acquiring the corresponding relation between all interactive keys of the target module and control logic in the target function, and generating a first test case for detecting operation logic of the target module based on the corresponding relation, wherein the control logic comprises enabling logic and non-enabling logic;
acquiring a preset signal category sent by the target module when responding to the target function, and generating a second test case for detecting the production and processing based on the preset signal category so as to detect whether an actual signal sent by the target module is consistent with the preset signal category;
acquiring an operation parameter and a parameter threshold of the target module, and generating a third test case based on the operation parameter and the parameter threshold to test whether the target module can send an alarm response when the operation parameter exceeds the parameter threshold;
and acquiring a protection instruction of power-off operation and water spraying protection action and a re-operation instruction of equipment, generating a fourth test case based on the protection instruction and the re-operation instruction, so as to test whether the target module can send the protection instruction after sending the alarm response and automatically send the re-operation instruction after manually intervening in the chemical mechanical polishing equipment.
2. The method of claim 1, wherein the test case is a test case for testing system performance, the testing the target module based on the test case comprising:
acquiring the execution time of the target module for executing the target function;
and analyzing the system performance of the target module on the current running equipment according to a difference test of the preset expected time and the execution time.
3. The method of claim 2, wherein the test case is a test case for testing an operating pressure test, the testing the target module based on the test case comprising:
monitoring the occupation condition of hardware resources of the target module for executing the target function in a preset time;
and analyzing the running pressure of the control software based on the hardware resource occupation condition and a preset system performance standard test.
4. The method of claim 1, wherein the test class of the underlying code includes a resolution capability test, the test case being a test case for testing the resolution capability test, the testing the target module based on the test case comprising:
and sending a decision instruction to the target module to test whether the target module can convert the decision instruction into a response for executing the target function within a second preset time.
5. The method of claim 1, wherein the test class of the underlying code includes a code integrity test, the test case being a test case for testing code integrity, the testing the target module based on the test case comprising:
and performing instrumentation test on the code of the target module to determine the code integrity of the target module and whether the memory leakage exists.
6. The method of claim 1, wherein the control software further comprises a display module, the method further comprising:
and judging whether the display module can correctly display the display parameters fed back by other modules.
7. A test apparatus for control software of a chemical mechanical polishing apparatus, the apparatus comprising:
the function analysis module is used for carrying out functional analysis on the target module of the control software to obtain a target function;
the class analysis module is used for determining a target test class in the test classes of the target module so as to test upper-layer functional logic or bottom-layer codes of the control software;
the use case generating module is configured to generate a test case of the target test class according to the target function, where the test class of the upper layer functional logic includes one or more of operation logic, production processing, monitoring function, and exception processing, and the generating the test case of the target test class according to the target function includes: acquiring the corresponding relation between all interactive keys of the target module and control logic in the target function, and generating a first test case for detecting operation logic of the target module based on the corresponding relation, wherein the control logic comprises enabling logic and non-enabling logic; acquiring a preset signal category sent by the target module when responding to the target function, and generating a second test case for detecting the production and processing based on the preset signal category so as to detect whether an actual signal sent by the target module is consistent with the preset signal category; acquiring an operation parameter and a parameter threshold of the target module, and generating a third test case based on the operation parameter and the parameter threshold to test whether the target module can send an alarm response when the operation parameter exceeds the parameter threshold; acquiring a protection instruction of power-off operation and water spraying protection action and a re-operation instruction of equipment, generating a fourth test case based on the protection instruction and the re-operation instruction, so as to test whether the target module can send the protection instruction after sending the alarm response and automatically send the re-operation instruction after manually intervening in the chemical mechanical polishing equipment;
and the test module is used for testing the target module based on the test case.
8. An electronic device, comprising:
a memory and a processor in communication with each other, the memory having stored therein computer instructions, the processor executing the computer instructions to perform the method of any of claims 1-6.
9. A computer readable storage medium storing computer instructions for causing the computer to perform the method of any one of claims 1-6.
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