CN114088118A - Positive and negative rotation method MEMS gyroscope calibration compensation method - Google Patents
Positive and negative rotation method MEMS gyroscope calibration compensation method Download PDFInfo
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Abstract
The invention provides a calibration compensation method of an MEMS gyroscope by a forward and reverse rotation method, which can ensure that the calibrated MEMS gyroscope has very high precision. Firstly, establishing a static error model expression of the MEMS gyroscope; placing the turntable at a vertical upward position, fixing the MIMU on the turntable, and measuring error angles alpha and beta between the turntable and the MIMU; when the input value of the rotating speed of the rotary table is omega, the output expressions of the y-axis gyroscope and the z-axis gyroscope can be obtained when the rotation is respectively performed forward rotation and reverse rotation; forward rotation and reverse rotation are carried out on each measured 3 groups of data, and the measurement results of forward rotation and reverse rotation are added to obtain the zero offset of the MEMS gyroscope; subtracting the positive and negative rotation measurement results to calculate all parameters in the static error model of the MEMS gyroscope, obtain an error equation of the MEMS gyroscope and finish the calibration of the gyroscope; and finally, carrying out experimental inspection on the turntable, and showing that the calibrated MEMS gyroscope has very high precision.
Description
Technical Field
The invention relates to the technical field of micro-mechanical inertia measurement, in particular to a calibration compensation method for an MEMS gyroscope by a positive and negative rotation method.
Background
With the development of micro-electromechanical system (MEMS) technology, Micro Inertial Measurement Units (MIMUs) are increasingly applied to various fields such as measurement and navigation by virtue of their advantages of small size, low power consumption and strong overload resistance. Compared with a measuring unit formed by a high-precision inertial sensor such as a laser gyroscope, a fiber-optic gyroscope and the like, the gyroscope in the MIMU has larger drift and cannot sense the rotation angular velocity of the earth. And the calibration of the inertial device error determines the accuracy of the system. Therefore, how to calibrate the MIMU inertia device quickly and accurately is always a key technology for MIMU integration and application.
Error compensation of MEMS inertial devices is an important means to improve their accuracy. Many leading research institutes of MEMS technology focus on the study of MEMS gyroscope and accelerometer error modeling and error compensation methods. For example, the MEMS Laboratory of the university of California in the United states has conducted an in-depth analysis of the errors caused by the manufacturing process, and some compensation methods have been proposed. When compensating errors of the MEMS inertial device and the IMU, establishing error models of zero offset, zero offset instability, scale factor errors, misalignment angles, random noise and the like to identify model parameters, and then compensating. However, the calibration of the input values in forward rotation and reverse rotation is not considered at the same time, which results in low precision of the MEMS gyroscope calibrated by the conventional calibration compensation method.
Disclosure of Invention
In view of this, the invention provides a calibration compensation method for a forward-reverse rotation method MEMS gyroscope, which can make the precision of the calibrated MEMS gyroscope very high.
The technical scheme for realizing the invention is as follows:
a calibration compensation method for a forward and reverse rotation method MEMS gyroscope comprises the following steps:
step one, establishing a static error calibration model of the MEMS gyroscope according to a mathematical model of a zero point error, a scale factor error and an installation error of the MIMU;
secondly, the rotary table is arranged at a vertically upward position, the MIMU is fixed on the rotary table, and then the error angle between the rotary table and the MIMU is measured;
respectively carrying out forward rotation and reverse rotation when the rotating speed input value of the rotary table is omega to obtain output expressions of the y-axis gyroscope and the z-axis gyroscope; forward rotation and reverse rotation are carried out on each measured 3 groups of data, and the measurement results of the forward rotation and the reverse rotation are added to obtain the zero offset of the MEMS gyroscope; and subtracting the positive and negative rotation measurement results to obtain all parameters in the static error model of the MEMS gyroscope, obtaining an error equation of the MEMS gyroscope and completing the calibration of the gyroscope.
In the first step, a static error model of the MEMS gyroscope is as follows:
in the formula, Wo＝[Wx Wy Wz]TIs the gyroscope output value; b isg＝[Bgx Bgy Bgz]TZero drift for the gyroscope; sgx，Sgy，SgzIs the scale factor coefficient; kgx1，Kgx2，Kgy1，Kgy2，Kgz1，Kgz2Is a mounting error coefficient; omega ═ omegax ωy ωz]TIs the gyroscope input value.
When the rotating speed input value of the rotary table is omega, forward rotation and reverse rotation are respectively carried out, and output expressions of the y-axis gyroscope and the z-axis gyroscope are obtained as follows:
Wy+＝Bgy+Kgy1ω-Sgyωα+Kgy2ωβ
Wy-＝Bgy-Kgy1ω+Sgyωα-Kgy2ωβ
Wz+＝Bgz+Kgz1ω-Kgz2ωα+Sgzωβ
Wz-＝Bgz-Kgz1ω+Kgz2ωα-Sgzωβ。
wherein, the zero bias of the MEMS gyroscope is as follows:
wherein, Kgy2And Kgz2Is approximately 0, SgyAnd SgzIs approximately 1, Kgy1And Kgz1The values of (A) are:
values of the remaining parameters:
wherein, still include the following step:
step four, calibrating the MEMS gyroscope based on the physical experiment;
and fifthly, checking the calibration result of the MEMS gyroscope by using the turntable.
Has the advantages that:
firstly, establishing a static error model expression of an MEMS gyroscope; placing the turntable at a vertical upward position, fixing the MIMU on the turntable, and measuring error angles alpha and beta between the turntable and the MIMU; when the input value of the rotating speed of the rotary table is omega, the output expressions of the y-axis gyroscope and the z-axis gyroscope can be obtained when the rotation is respectively performed forward rotation and reverse rotation; forward rotation and reverse rotation are carried out on each set of 3 groups of data, the measurement results of forward rotation and reverse rotation are added, zero offset of the MEMS gyroscope can be obtained, the measurement results of forward rotation and reverse rotation are subtracted, all parameters in a static error model of the MEMS gyroscope can be calculated, an error equation of the MEMS gyroscope is obtained, and the calibration of the gyroscope is completed; and finally, carrying out experimental inspection on the turntable, and showing that the calibrated MEMS gyroscope has very high precision.
Drawings
FIG. 1 is a flow chart of the overall implementation of the present invention.
FIG. 2 is a diagram of an experimental MIMU of the present invention.
FIG. 3 shows the output of the MEMS gyroscope of the present invention.
Detailed Description
The invention is described in detail below by way of example with reference to the accompanying drawings.
The forward and reverse rotation method of the invention is a method which respectively rotates the turntable forwards and backwards at a fixed rotation speed and eliminates redundant parameters according to the established error model so as to calculate the error model, and the calibrated MEMS gyroscope has high precision. Fig. 1 shows a general execution flow chart of the present invention, and the present invention designs a calibration compensation method for a forward and reverse rotation MEMS gyroscope, which includes the following steps:
step one, establishing a static error model of the MEMS gyroscope according to a mathematical model of the zero point error, the scale factor error and the installation error of the MIMU:
in the formula, Wo＝[Wx Wy Wz]TIs the gyroscope output value; b isg＝[Bgx Bgy Bgz]TZero drift for the gyroscope; sgx，Sgy，SgzIs the scale factor coefficient; kgx1，Kgx2，Kgy1，Kgy2，Kgz1，Kgz2Is a mounting error coefficient; omega ═ omegax ωy ωz]TIs the gyroscope input value.
And step two, placing the rotary table at a vertical upward position, fixing the MIMU on the rotary table, and then measuring error angles alpha and beta between the rotary table and the MIMU. Then when the turntable speed input value is ω ═ ω 00]TThe actual input to the gyroscope is shown below.
ωi＝[ω -ωα ωβ]T
Step three, when the rotating speed input value of the turntable is omega, respectively carrying out forward rotation and reverse rotation, obtaining the output of the y-axis gyroscope and the z-axis gyroscope as follows:
Wy+＝Bgy+Kgy1ω-Sgyωα+Kgy2ωβ
Wy-＝Bgy-Kgy1ω+Sgyωα-Kgy2ωβ
Wz+＝Bgz+Kgz1ω-Kgz2ωα+Sgzωβ
Wz-＝Bgz-Kgz1ω+Kgz2ωα-Sgzωβ
if the forward rotation and the reverse rotation respectively measure 3 groups of data, the measurement results of the forward rotation and the reverse rotation are added, and the zero offset of the MEMS gyroscope can be obtained:
because the mounting error and the scale factor error are small, the following assumptions are made in the intermediate calculation process: will be K in the formulagy2And Kgz2Is approximately 0, SgyAnd SgzApproximately 1, then K can be found by subtracting the positive and negative rotation measurementsgy1And Kgz1The values of (A) are:
the positive and negative rotation measurements are subtracted to obtain the value of the remaining parameter:
therefore, all parameters in the static error model of the MEMS gyroscope are calculated, and the calibration of the gyroscope is completed.
And step four, calibrating the MEMS gyroscope based on the physical experiment.
The MIMU calibrated for the experiment consists of one MEMS triaxial accelerometer and two uniaxial MEMS gyroscopes, the structure of which is shown in fig. 2.
The turntable and the MIMU are held in a state where the mounting error between the two is measured, i.e., the turntable is vertically upward at this time. The turntable was controlled to rotate at rotational speeds of ± 360 °/s, ± 1080 °/s and ± 2160 °/s for 1 minute or more, respectively, and the output values of the MEMS gyroscope were collected at a sampling frequency of 200Hz, and the results are shown in fig. 3.
As can be seen in fig. 3, the y, z axis gyro exhibits significant sinusoidal fluctuations due to coupling with x axis roll information. With the increase of the rotating speed of the turntable, the absolute value of the data output by the y-axis gyroscope and the z-axis gyroscope is larger and larger, which is caused by the installation error between the MIMU and the turntable, and the influence is more obvious when the rotating speed is larger, so that the compensation of the error has an important role.
A stable section of data is selected from the measurement results to obtain an average value, and the obtained results are shown in Table 1. Table 1 shows the gyroscope outputs for forward and reverse rotation at fixed rotational speeds.
Then, substituting the data in table 1 into the static error model of the MEMS gyroscope, each parameter in the static error model of the MEMS gyroscope can be calculated, and the error equation is obtained as:
and step five, utilizing the rotary table to check the calibration result of the accelerometer, keeping the rotary table in a vertical and upward state in order to ensure that the mounting error angle of the MIMU and the rotary table is kept unchanged, and acquiring the output values of the gyroscope when the rotating speed of the rotary table is +720 degrees/s, +/-1440 degrees/s and +/-1800 degrees/s respectively. Then, the calibration results are written into the control unit of the MIMU, and the output values of the gyroscope are measured under the same conditions, and the results obtained by comparing the two are shown in table 2. Table 2 shows the MEMS gyroscope output values before and after calibration.
As can be seen from table 2, the calibrated MEMS gyroscope output values are very accurate. The maximum values for the y-axis and z-axis outputs prior to calibration were-6.8678 deg./s and-13.0737 deg./s, respectively. However, after calibration, the output became-0.089/s and-0.0421/s. Therefore, the experiment has a high accuracy for the calibration of the MIMU, and in actual measurement, the influence of its deterministic error can be disregarded for the compensated MEMS gyroscope.
TABLE 1 Forward and reverse rotating gyroscope output at fixed rotation speed
TABLE 2 MEMS Gyroscope output values before and after calibration
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. A calibration compensation method for a forward and reverse rotation MEMS gyroscope is characterized by comprising the following steps:
step one, establishing a static error calibration model of the MEMS gyroscope according to a mathematical model of a zero point error, a scale factor error and an installation error of the MIMU;
secondly, the rotary table is arranged at a vertically upward position, the MIMU is fixed on the rotary table, and then the error angle between the rotary table and the MIMU is measured;
respectively carrying out forward rotation and reverse rotation when the rotating speed input value of the rotary table is omega to obtain output expressions of the y-axis gyroscope and the z-axis gyroscope; forward rotation and reverse rotation are carried out on each measured 3 groups of data, and the measurement results of the forward rotation and the reverse rotation are added to obtain the zero offset of the MEMS gyroscope; and subtracting the positive and negative rotation measurement results to obtain all parameters in the static error model of the MEMS gyroscope, obtaining an error equation of the MEMS gyroscope and completing the calibration of the gyroscope.
2. The calibration compensation method for the MEMS gyroscope according to the positive and negative rotation method of claim 1, wherein in the first step, the static error model of the MEMS gyroscope is as follows:
in the formula, Wo＝[Wx Wy Wz]TIs the gyroscope output value; b isg＝[Bgx Bgy Bgz]TZero drift for the gyroscope; sgx，Sgy，SgzIs the scale factor coefficient; kgx1，Kgx2，Kgy1，Kgy2，Kgz1，Kgz2Is a mounting error coefficient; omega ═ omegax ωy ωz]TIs the gyroscope input value.
3. The calibration compensation method of the forward-reverse rotation method MEMS gyroscope of claim 2, wherein when the input value of the rotation speed of the turntable is ω, forward rotation and reverse rotation are respectively performed, and the output expressions of the y-axis gyroscope and the z-axis gyroscope are obtained as follows:
Wy+＝Bgy+Kgy1ω-Sgyωα+Kgy2ωβ
Wy-＝Bgy-Kgy1ω+Sgyωα-Kgy2ωβ
Wz+＝Bgz+Kgz1ω-Kgz2ωα+Sgzωβ
Wz-＝Bgz-Kgz1ω+Kgz2ωα-Sgzωβ。
4. the calibration compensation method of the MEMS gyroscope by the positive and negative rotation method as claimed in claim 3, wherein the zero offset of the MEMS gyroscope is as follows:
5. the calibration compensation method for MEMS gyroscope according to any one of claims 3 or 4, wherein K isgy2And Kgz2Is approximately 0, SgyAnd SgzIs approximately 1, Kgy1And Kgz1The values of (A) are:
values of the remaining parameters:
6. the calibration compensation method for the MEMS gyroscope by the positive and negative rotation method according to any one of claims 1 to 4, characterized by further comprising the following steps:
step four, calibrating the MEMS gyroscope based on the physical experiment;
and fifthly, checking the calibration result of the MEMS gyroscope by using the turntable.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103196462A (en) * | 2013-02-28 | 2013-07-10 | 南京航空航天大学 | Compensation method for error calibration of MEMS gyroscope in MIMU |
| WO2013131471A1 (en) * | 2012-03-06 | 2013-09-12 | 武汉大学 | Quick calibration method for inertial measurement unit |
| CN104101363A (en) * | 2014-07-28 | 2014-10-15 | 中国电子科技集团公司第二十六研究所 | Gyroscope dynamic calibration method for measuring rotary carrier transversal posture |
| CN108132060A (en) * | 2017-11-17 | 2018-06-08 | 北京计算机技术及应用研究所 | A kind of systematic calibration method of Strapdown Inertial Navigation System without benchmark |
| CN108458725A (en) * | 2017-11-17 | 2018-08-28 | 北京计算机技术及应用研究所 | Systematic calibration method on Strapdown Inertial Navigation System swaying base |
| CN108534800A (en) * | 2018-03-09 | 2018-09-14 | 中国科学院长春光学精密机械与物理研究所 | A kind of MEMS-IMU warm population parameter calibration compensation method entirely |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013131471A1 (en) * | 2012-03-06 | 2013-09-12 | 武汉大学 | Quick calibration method for inertial measurement unit |
| CN103196462A (en) * | 2013-02-28 | 2013-07-10 | 南京航空航天大学 | Compensation method for error calibration of MEMS gyroscope in MIMU |
| CN104101363A (en) * | 2014-07-28 | 2014-10-15 | 中国电子科技集团公司第二十六研究所 | Gyroscope dynamic calibration method for measuring rotary carrier transversal posture |
| CN108132060A (en) * | 2017-11-17 | 2018-06-08 | 北京计算机技术及应用研究所 | A kind of systematic calibration method of Strapdown Inertial Navigation System without benchmark |
| CN108458725A (en) * | 2017-11-17 | 2018-08-28 | 北京计算机技术及应用研究所 | Systematic calibration method on Strapdown Inertial Navigation System swaying base |
| CN108534800A (en) * | 2018-03-09 | 2018-09-14 | 中国科学院长春光学精密机械与物理研究所 | A kind of MEMS-IMU warm population parameter calibration compensation method entirely |
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