CN114076526A - Pressurizing and heating system and method for RHCM - Google Patents
Pressurizing and heating system and method for RHCM Download PDFInfo
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- CN114076526A CN114076526A CN202010849631.6A CN202010849631A CN114076526A CN 114076526 A CN114076526 A CN 114076526A CN 202010849631 A CN202010849631 A CN 202010849631A CN 114076526 A CN114076526 A CN 114076526A
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- switch valve
- pressure
- pipeline
- heating
- rhcm
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28B—STEAM OR VAPOUR CONDENSERS
- F28B5/00—Condensers employing a combination of the methods covered by main groups F28B1/00 and F28B3/00; Other condensers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28B—STEAM OR VAPOUR CONDENSERS
- F28B11/00—Controlling arrangements with features specially adapted for condensers
Abstract
The invention provides a pressurizing and heating system and a pressurizing and heating method for an RHCM, wherein the pressurizing and heating system for the RHCM is applied to a mold and comprises the following components: the device comprises a steam supply device, a pressurization container, a pressurization device and a heating pipeline; the steam supply device is communicated with the pressurized container through a first pipeline, and a first switch valve is arranged on the first pipeline; the pressurizing container is communicated with the heating pipeline through a second pipeline, a second switch valve is arranged on the second pipeline, and the heating pipeline penetrates through the die; the pressurizing device is communicated with the pressurizing container and is used for pressurizing the inside of the pressurizing container. The pressurization heating system and the pressurization heating method for the RHCM can improve the condensation temperature of steam, lead the condensation temperature of the steam to tend to be stable, and have good heating effect on a mold.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of high-speed high-temperature forming technology (RHCM), in particular to a pressurizing and heating system and method for the RHCM.
[ background of the invention ]
In the RHCM technology, steam generated by a steam supply device needs to be introduced into a heating pipeline penetrating through a mold so as to heat the mold. In the prior art, steam generated by the steam supply device directly enters the heating pipeline, and in an actual operation environment, due to the limitation of the performance of the steam supply device, the pressure of steam supply is unstable, and the condensation temperature of the steam can change along with the change of the steam pressure, so that the condensation temperature of the steam is also unstable, and the heating effect on the mold can be influenced.
Therefore, there is a need for improvements in the prior art.
[ summary of the invention ]
The technical problem to be solved by the invention is as follows: in order to solve the problem that the condensation temperature of steam in a heating pipeline is unstable. The present invention provides a pressure and heat system and method for an RHCM to solve the above problems.
The technical scheme for solving the technical problem is as follows: a pressurized heating system for RHCM applied to a mold, comprising:
the device comprises a steam supply device, a pressurization container, a pressurization device and a heating pipeline;
the steam supply device is communicated with the pressurized container through a first pipeline, and a first switch valve is arranged on the first pipeline;
the pressurizing container is communicated with the heating pipeline through a second pipeline, a second switch valve is arranged on the second pipeline, and the heating pipeline penetrates through the die;
the pressurizing device is communicated with the pressurizing container and is used for pressurizing the inside of the pressurizing container.
Preferably, the pressurizing device is a compressed air supply device, the compressed air supply device is communicated with the pressurizing container through a third pipeline, and a third switch valve is arranged on the third pipeline.
Preferably, the heating device further comprises an exhaust pipeline, and the exhaust pipeline is communicated with the heating pipeline; and a fourth switch valve is arranged on the exhaust pipeline.
Preferably, the control device further comprises a controller, wherein the controller controls the on-off of the first switch valve, the second switch valve, the third switch valve and the fourth switch valve;
the pressure container is provided with a pressure sensor, and the controller is electrically connected with the pressure sensor.
Preferably, the pressure of the steam supplied by the steam supply device is 8 Bar;
the pressure of the compressed air supplied by the compressed air supply device is 12 Bar.
The invention also provides a pressure heating method for the RHCM, which comprises the following steps:
a preparation step, wherein the controller controls the first switch valve, the second switch valve, the third switch valve and the fourth switch valve to be closed;
a step of adding steam, wherein the controller controls the first switch valve to be opened, and after a first preset condition is reached, the controller controls the first switch valve to be closed;
a steam pressurization step, wherein the controller controls the third switch valve to be opened, and after a second preset condition is reached, the controller controls the third switch valve to be closed;
and a heating step, wherein the controller controls the second switch valve to be opened.
Preferably, the first predetermined condition is that the pressure sensor detects a pressure in the pressurised container equal to 8 Bar;
the second predetermined condition is that the pressure sensor detects a pressure within the pressurised container equal to 12 Bar.
Preferably, after the heating step, a gas exhausting step is further included, and the controller controls the second switching valve to be closed and then controls the fourth switching valve to be opened.
The pressurization heating system and the pressurization heating method for the RHCM have the advantages that the condensation temperature of steam can be increased, the condensation temperature of the steam tends to be stable, and the heating effect on a mold is good.
[ description of the drawings ]
Fig. 1 is a schematic diagram of a pressurized heating system for an RHCM of the present invention.
Fig. 2 is a flow chart of a pressure heating method for an RHCM of the present invention.
[ detailed description ] embodiments
To further illustrate the technical means and effects of the present invention, the following detailed description is given with reference to the embodiments of the present invention and the accompanying drawings.
Referring to fig. 1, fig. 1 is a schematic diagram illustrating a pressure heating system for an RHCM according to the present invention. The invention provides a pressurized heating system 100 for RHCM, applied to a mold, comprising:
a steam supply device 1, a pressurized container 2, a pressurizing device and a heating pipeline 4.
The steam supply device 1 communicates with the pressurized container 2 through a first pipe 5, and the first pipe 5 is provided with a first on-off valve 501. The steam supply device 1 here includes, but is not limited to, a steam generator for supplying steam into the pressurized container 2.
The pressurized container 2 is communicated with the heating pipeline 4 through a second pipeline 6, a second switch valve 601 is arranged on the second pipeline 6, and the heating pipeline 4 penetrates through the die. The pressurized container 2 here is a can container.
The pressurizing device is communicated with the pressurizing container 2 and is used for pressurizing the inside of the pressurizing container 2. The pressurizing device is a compressed air supply device 3, the compressed air supply device 3 is communicated with the pressurizing container 2 through a third pipeline 7, and a third switch valve 701 is arranged on the third pipeline 7. The compressed air supply device 3 is a compressed air tank or a compressed air inflator. The compressed air supply device 3 supplies compressed air into the pressurized container 2 to pressurize the pressurized container 2 when the first on-off valve 501 is closed, the second on-off valve 601 is closed, and the third on-off valve 701 is opened.
The operating principle of such a heating-under-pressure system 100 for RHCM is as follows: the first on-off valve 501 is opened, the vapor supply device 1 supplies vapor into the pressurized container 2, and then the first on-off valve 501 is closed. Next, the pressurizing device pressurizes the pressurized container 2, opens the second on-off valve 601 after pressurization, and sends the pressurized vapor to the heating line 4 to heat the mold.
Since the condensation temperature of the vapor increases with the increase in pressure, and the higher the pressure, the smaller the change in the condensation temperature of the vapor per unit change in pressure. The beneficial effects of such a pressurized heating system 100 for RHCM are therefore as follows:
1. this pressurized heating system 100 for RHCM pressurizes the vapor, and as the pressure increases, the condensation temperature of the vapor also increases.
2. The pressurization and heating system 100 for RHCM pressurizes the vapor in the pressurized container 2 to a constant pressure value, and then the vapor enters the heating pipeline 4 from the pressurized container 2, so that the pressure of the vapor in the heating pipeline 4 is stabilized, the condensation temperature of the vapor tends to be stable,
3. since the vapor pressure in the heating line 4 is increased, the range of change in the condensation temperature of the vapor is reduced with a change in the unit pressure, and therefore the condensation temperature of the vapor is also more stable.
In summary, the pressurization heating system 100 for RHCM can increase the condensation temperature of the steam, and make the condensation temperature of the steam tend to be stable, and the heating effect on the mold is good.
Wherein such a pressure heating system 100 for an RHCM further comprises an exhaust line 8, the exhaust line 8 being in communication with the heating line 4. The exhaust line 8 is provided with a fourth switching valve 801. When the fourth switching valve 801 is opened, the steam and air in the heating line 4 can be discharged through the exhaust line 8.
The pressure heating system 100 for RHCM further includes a controller (not shown in the figure) electrically connected to the first, second, third and fourth switching valves 501, 601, 701 and 801 to control the on/off of the first, second, third and fourth switching valves 501, 601, 701 and 801.
The pressurized container 2 is provided with a pressure sensor (not shown in the figure), and the controller is electrically connected with the pressure sensor. The pressure sensor is capable of detecting pressure data within the pressurized container 2, which the controller is capable of reading.
Wherein the pressure of the steam supplied by the steam supply device 1 is 8 Bar. The compressed air supply means 3 supplies compressed air at a pressure of 12 Bar.
Referring to fig. 1 and 2, fig. 1 is a schematic diagram illustrating a pressure heating system for an RHCM according to the present invention. FIG. 2 is a flow chart illustrating a method of the present invention for pressure heating of the RHCM. Based on the above-mentioned pressure heating system 100 for the RHCM, the present invention also provides a pressure heating method for the RHCM, comprising:
s1 preliminary step, the controller controls the first switching valve 501, the second switching valve 601, the third switching valve 701 and the fourth switching valve 801 to close.
And S2, a step of adding steam, wherein the controller controls the first switch valve 501 to be opened, and after a first preset condition is reached, the controller controls the first switch valve 501 to be closed. The first predetermined condition here is that the pressure sensor detects a pressure in the pressurised container 2 equal to 8 Bar. In this step, steam is fed into the pressurized vessel 2, and the pressure in the pressurized vessel 2 is 8 Bar.
In the step of pressurizing steam in S3, the controller controls the third on/off valve 701 to open, and when a second predetermined condition is reached, the controller controls the third on/off valve 701 to close. The second predetermined condition here is that the pressure sensor detects a pressure in the pressurised container 2 equal to 12 Bar. In this step, the compressed air supply means 3 charges the pressurized container 2 with compressed air, raising the pressure in the pressurized container 2 to 12 Bar.
S4 heating step, the controller controls the second on-off valve 601 to open. In this step, the compressed air and the vapor in the pressurized container 2 enter the heating line 4, and the vapor is condensed and releases heat in the heating line 4 to heat the mold.
In the step of discharging S5, the controller first controls the second switch valve 601 to close and then controls the fourth switch valve 801 to open. In this step, the vapour and air in the heating circuit 4 are exhausted through the exhaust line 8.
Since the condensation temperature of the vapor increases with the increase in pressure, and the higher the pressure, the smaller the change in the condensation temperature of the vapor per unit change in pressure. The beneficial effects of this pressure heating method for RHCM are therefore as follows:
1. this pressurized heating method for the RHCM pressurizes the vapor, and as the pressure increases, the condensation temperature of the vapor also increases.
2. The pressurization heating method for the RHCM pressurizes the steam in the pressurization container 2 to a constant pressure value, then the steam enters the heating pipeline 4 from the pressurization container 2, so that the pressure of the steam in the heating pipeline 4 is stable, the condensation temperature of the steam tends to be stable,
3. since the vapor pressure in the heating line 4 is increased, the range of change in the condensation temperature of the vapor is reduced with a change in the unit pressure, and therefore the condensation temperature of the vapor is also more stable.
In conclusion, the pressurization heating method for the RHCM can improve the condensation temperature of steam, enables the condensation temperature of the steam to tend to be stable, and has good heating effect on the mold.
It should be noted that the present invention is not limited to the above embodiments, and any simple modification, equivalent change and modification made to the above embodiments by those skilled in the art based on the technical solution of the present invention fall within the protection scope of the present invention.
Claims (8)
1. A pressurized heating system for RHCM applied to a mold, comprising:
the device comprises a steam supply device, a pressurization container, a pressurization device and a heating pipeline;
the steam supply device is communicated with the pressurized container through a first pipeline, and a first switch valve is arranged on the first pipeline;
the pressurizing container is communicated with the heating pipeline through a second pipeline, a second switch valve is arranged on the second pipeline, and the heating pipeline penetrates through the die;
the pressurizing device is communicated with the pressurizing container and is used for pressurizing the inside of the pressurizing container.
2. A pressure and heat system for an RHCM as claimed in claim 1 wherein:
the pressurizing device is a compressed air supply device which is communicated with the pressurizing container through a third pipeline, and a third switch valve is arranged on the third pipeline.
3. A pressure and heat system for an RHCM as claimed in claim 2 wherein:
the exhaust pipeline is communicated with the heating pipeline; and a fourth switch valve is arranged on the exhaust pipeline.
4. A pressure and heat system for an RHCM as claimed in claim 3 wherein:
the controller controls the first switch valve, the second switch valve, the third switch valve and the fourth switch valve to be switched on and off;
the pressure container is provided with a pressure sensor, and the controller is electrically connected with the pressure sensor.
5. A pressure and heat system for an RHCM as claimed in claim 4 wherein:
the pressure of the steam supplied by the steam supply device is 8 Bar;
the pressure of the compressed air supplied by the compressed air supply device is 12 Bar.
6. A pressure heating method for an RHCM, comprising:
a preparation step, wherein the controller controls the first switch valve, the second switch valve, the third switch valve and the fourth switch valve to be closed;
a step of adding steam, wherein the controller controls the first switch valve to be opened, and after a first preset condition is reached, the controller controls the first switch valve to be closed;
a steam pressurization step, wherein the controller controls the third switch valve to be opened, and after a second preset condition is reached, the controller controls the third switch valve to be closed;
and a heating step, wherein the controller controls the second switch valve to be opened.
7. A pressure heating method for an RHCM as claimed in claim 6 wherein:
the first predetermined condition is that the pressure sensor detects that the pressure in the pressurized container is equal to 8 Bar;
the second predetermined condition is that the pressure sensor detects a pressure within the pressurised container equal to 12 Bar.
8. A pressure heating method for an RHCM as claimed in claim 6 wherein:
the heating step is followed by a gas exhausting step, and the controller controls the second switch valve to be closed and then controls the fourth switch valve to be opened.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010849631.6A CN114076526A (en) | 2020-08-21 | 2020-08-21 | Pressurizing and heating system and method for RHCM |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010849631.6A CN114076526A (en) | 2020-08-21 | 2020-08-21 | Pressurizing and heating system and method for RHCM |
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| Publication Number | Publication Date |
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| CN114076526A true CN114076526A (en) | 2022-02-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010849631.6A Pending CN114076526A (en) | 2020-08-21 | 2020-08-21 | Pressurizing and heating system and method for RHCM |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201685387U (en) * | 2010-08-19 | 2010-12-29 | 浙江卓越金城塑机有限公司 | Mould pressing and steam heating system for foam products |
| CN102481705A (en) * | 2010-08-19 | 2012-05-30 | 三菱重工业株式会社 | Vulcanization system and tire vulcanization method |
| CN110920013A (en) * | 2018-09-19 | 2020-03-27 | 株式会社松井制作所 | Temperature control device |
-
2020
- 2020-08-21 CN CN202010849631.6A patent/CN114076526A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201685387U (en) * | 2010-08-19 | 2010-12-29 | 浙江卓越金城塑机有限公司 | Mould pressing and steam heating system for foam products |
| CN102481705A (en) * | 2010-08-19 | 2012-05-30 | 三菱重工业株式会社 | Vulcanization system and tire vulcanization method |
| CN110920013A (en) * | 2018-09-19 | 2020-03-27 | 株式会社松井制作所 | Temperature control device |
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