CN114060515B - Vacuum sealing structure - Google Patents
Vacuum sealing structure Download PDFInfo
- Publication number
- CN114060515B CN114060515B CN202111448402.4A CN202111448402A CN114060515B CN 114060515 B CN114060515 B CN 114060515B CN 202111448402 A CN202111448402 A CN 202111448402A CN 114060515 B CN114060515 B CN 114060515B
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- Prior art keywords
- dovetail groove
- sealing
- blind plate
- vacuum
- rubber ring
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- 238000007789 sealing Methods 0.000 title claims abstract description 198
- 239000001307 helium Substances 0.000 claims abstract description 34
- 229910052734 helium Inorganic materials 0.000 claims abstract description 34
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 34
- 238000001514 detection method Methods 0.000 claims abstract description 28
- 238000000034 method Methods 0.000 claims abstract description 20
- 238000001819 mass spectrum Methods 0.000 claims abstract description 13
- 238000009423 ventilation Methods 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 5
- 238000004880 explosion Methods 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000002407 reforming Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Gasket Seals (AREA)
Abstract
The invention discloses a vacuum sealing structure which comprises a sealing blind plate A, a detachable piece A, an O-shaped rubber ring, a screw A, a screw B and a vacuum chamber. The A sealing blind plate is provided with a dovetail-shaped sealing groove, and one or more sunken structures are outwards arranged from the outer side face of the dovetail groove. The detachable piece A is arranged in the subsidence structure of the sealing blind plate A, the thickness of the detachable piece A is the same as the depth of the subsidence step of the sealing blind plate A, the inner side surface of the detachable piece A is an arc-shaped inclined surface, and the detachable piece A coincides with the arc-shaped inclined surface at the outer side of the dovetail groove of the sealing blind plate A and is spliced into an arc-shaped inclined surface at the outer side of the dovetail groove of the whole circle. A detachable piece and the joint surface of the A sealing blind plate are provided with through grooves for helium mass spectrum vacuum sealing detection of the vacuum sealing surface at the bottom of the dovetail groove. The through groove structure of the detachable piece A greatly facilitates helium mass spectrum leakage detection of the dovetail groove vacuum sealing surface; after the detachable part A is removed, the O-shaped rubber ring is taken out very conveniently, and the problems that the O-shaped rubber ring in the dovetail groove is difficult to take out and the O-shaped rubber ring is very easy to damage or even scratch the vacuum sealing surface in the taking-out process are solved.
Description
Technical Field
The invention relates to a vacuum sealing structure, in particular to a dovetail groove (also called a trapezoid groove) vacuum sealing structure, and belongs to the technical field of vacuum.
Background
In the design of the vacuum sealing structure, an O-shaped rubber ring is often placed in the dovetail groove to seal vacuum, and the width of the opening of the dovetail groove is slightly smaller than the diameter of the section of the O-shaped rubber ring, so that the O-shaped rubber ring cannot fall out of the vacuum sealing groove in the process of disassembling and assembling equipment.
The O-shaped rubber ring is pressed into the dovetail groove and is flush with the opening surface of the dovetail groove when in use, the cross section of the O-shaped rubber ring is pressed into a trapezoid with four corners being round corners, after a period of time, the O-shaped rubber ring is subjected to certain permanent deformation, the cross section of the O-shaped rubber ring is close to the cross section of the dovetail groove, at the moment, the O-shaped rubber ring can be taken out difficultly, the O-shaped rubber ring is often damaged to be taken out, and sometimes the vacuum sealing surface at the bottom of the dovetail groove is scratched due to the fact that a sharp tool is used for taking the sealing ring. .
To sum up, the problems of the prior art are: the O-shaped rubber rings in the first dovetail groove and the dovetail groove can not be reused frequently, so that the equipment maintenance cost is high: firstly, the manufacturing cost of the large-size O-shaped rubber ring is high, the diameters of the O-shaped rubber rings for sealing the main vacuum chamber of large-sized vacuum equipment such as a large particle cyclotron are all several meters or even more than ten meters, the O-shaped rubber rings are required to be customized, the customized price is several thousands of yuan to several tens of thousands of yuan, and once the O-shaped rubber rings are disassembled and damaged, the economic loss is large; secondly, the reserve quantity of the spare parts of the O-shaped rubber ring is increased, and the reserve quantity of the spare parts of the O-shaped rubber ring is required to be increased because the spare parts of the O-shaped rubber ring are extremely easy to damage when the O-shaped rubber ring is disassembled in the prior art, so that the cost is increased. Secondly, the O-shaped rubber ring can also bring side effects when being replaced, and because the O-shaped rubber ring in the dovetail groove is difficult to take out, the O-shaped rubber ring is often required to be dug out or picked out by using a metal tool, the process is easy to scratch the vacuum sealing surface at the bottom of the dovetail groove, and the vacuum sealing is air-tight.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a vacuum sealing structure, and aims to solve the problems that the O-shaped rubber ring is difficult to take out, the O-shaped rubber ring is extremely easy to damage in the taking-out process, and even the vacuum sealing surface at the bottom of a dovetail groove is scratched sometimes to cause vacuum sealing leakage, and the maintenance cost of large-scale vacuum equipment is high.
The invention provides the following technical scheme for solving the technical problems:
A vacuum sealing structure comprises a sealing blind plate A, a detachable part A with a vacuum leakage detection ventilation groove, an O-shaped rubber ring used as a vacuum sealing element, a screw A, a screw B and a vacuum chamber; the method is characterized in that: the reverse side of the sealing blind plate A, which is close to the large radius, is provided with a dovetail groove in the peripheral ring, the dovetail groove is provided with an inner side face, an outer side face and a bottom face along the radial direction of the sealing blind plate A, the cross section of the dovetail groove formed by the inner side face, the outer side face and the bottom face is an isosceles trapezoid, the inner side face and the outer side face are the side edges of the isosceles trapezoid of the dovetail groove, and the bottom face is the bottom edge of the isosceles trapezoid of the dovetail groove; the dovetail groove is provided with an opening, the width of the opening is smaller than the width of the bottom surface, the O-shaped rubber ring is arranged in the dovetail groove of the A sealing blind plate, the opening of the dovetail groove is smaller than the diameter of the section of the O-shaped rubber ring, and the O-shaped rubber ring cannot fall out of the dovetail groove when the A sealing blind plate is arranged or operated in any direction; one or more sunken structures are outwards arranged on the outer side surface of the dovetail groove, namely one or more sections of the outer side surface of the dovetail groove are removed, the bottom of the sunken structure is a plane, a threaded hole is formed in the sunken plane and used for connecting and fixing an A detachable piece with a vacuum leakage detection ventilation groove, the A detachable piece is fixedly arranged in the sunken structure of the A sealing blind plate through an A screw, and the A screw penetrates through the A detachable piece and is screwed into the A sealing blind plate to realize fixed connection of the A detachable piece and the A sealing blind plate; and B, the screw is used for connecting and fixing the assembled assembly and the vacuum chamber and compacting the O-shaped rubber ring, so that the vacuum sealing function of the vacuum sealing structure is realized.
The number of the detachable pieces A is the same as that of the sunk structures on the outer side face of the dovetail groove of the sealing blind plate A, and the detachable pieces A are provided with countersunk screw holes or step holes for penetrating the screws A to fixedly connect the detachable pieces A in the sunk structures on the outer side face of the dovetail groove of the sealing blind plate A; the thickness of the detachable piece A is the same as the sinking step depth of the sealing blind plate A; the inner side surface of the detachable piece A is an arc-shaped inclined surface which coincides with the arc-shaped inclined surface on the outer side of the dovetail groove of the sealing blind plate A and has the same size.
A detachable part with a vacuum leak detection vent groove is provided with a through groove on the surface which is attached to the subsidence plane of the A sealing blind plate, the groove is used as a helium channel during helium mass spectrum vacuum leak detection, and helium gas sprayed by leak detection easily reaches the vacuum sealing surface at the bottom of the isosceles trapezoid dovetail groove, so that the vacuum sealing detection of the sealing surface can be conveniently realized.
When the O-shaped rubber ring is required to be taken out, one or more groups of A screws are loosened and taken down, the corresponding A detachable pieces are removed, the outer side part area of the O-shaped rubber ring is exposed, the O-shaped rubber ring is easy to take out, the rubber ring is not damaged and can be repeatedly used, and the bottom sealing surface of the dovetail groove is not scratched in the process of taking out the O-shaped rubber ring.
The vacuum sealing structure also has another structural form, comprising a B sealing blind plate, a B detachable piece, an O-shaped rubber ring used as a vacuum sealing element, a screw A, a screw B and a vacuum chamber, wherein the back surface of the B sealing blind plate is close to a large radius, the peripheral ring is provided with a dovetail groove with an isosceles trapezoid cross section, the dovetail groove is radially provided with an inner side surface, an outer side surface and a bottom surface along the B sealing blind plate, the inner side surface of the dovetail groove of the B sealing blind plate is removed inwards by a certain radius area to form a subsidence plane structure, a threaded hole is arranged on the subsidence plane and used for connecting and fixing the B detachable piece, the B detachable piece is fixedly arranged in the subsidence structure of the B sealing blind plate through the screw A, and the annular outer side surface of the B detachable piece forms the inner side surface of the dovetail groove; the O-shaped rubber ring is arranged in the dovetail groove; and B, the screw is used for connecting and fixing the assembled assembly and the vacuum chamber and compacting the O-shaped rubber ring, so that the vacuum sealing function of the vacuum sealing structure is realized.
The detachable piece B is in a circular ring shape, the outer side surface of the circular ring is an arc-shaped inclined surface, and the arc-shaped inclined surface finally forms the inner side surface of the dovetail groove; the inner diameter of the step of the sinking structure of the ring-shaped inner side surface and the sinking depth of the B sealing blind plate are the same, and the thickness of the ring-shaped inner side surface and the sinking depth of the B sealing blind plate are the same; the detachable piece B is provided with a countersunk screw hole or a step hole for penetrating the screw A and fixedly connecting the screw A in the sinking structure of the sealing blind plate B, and the O-shaped rubber ring is placed in a half dovetail groove which is opened at the inner side of the sealing blind plate B; the detachable piece B is placed in a sinking plane in the dovetail groove of the sealing blind plate B; the screw A is screwed in to realize the fixed connection between the detachable part B and the sealing blind plate B.
The outer arc inclined surface of the detachable piece B is spliced with the B sealing blind plate which lacks the inner side surface of the dovetail groove to form a complete dovetail groove structure, the bottom surface of the dovetail groove is a vacuum sealing surface, and the two side surfaces limit the space position of the O-shaped rubber ring.
When the O-shaped rubber ring is required to be taken out, the screw A is loosened and removed, the detachable piece B is removed, the inner side face of the O-shaped rubber ring is exposed, the O-shaped rubber ring is easy to be taken down, and the O-shaped rubber ring and the bottom vacuum sealing face of the dovetail groove are not damaged in the process.
Advantageous effects of the invention
1. According to the method, the inner side surface or the outer side surface of the dovetail groove of the vacuum sealing structure is completely or partially removed, the removed part is filled by the detachable part B or the detachable part A and forms the complete dovetail groove together with the partially missing dovetail groove, so that the O-shaped rubber ring can be conveniently taken out while the vacuum sealing function of the dovetail groove is met, the O-shaped rubber ring and the vacuum sealing surface at the bottom of the dovetail groove are not damaged in the taking-out process, and the O-shaped rubber ring can be reused. And because the sealing ring is taken by using the detachable piece to replace a sharp tool, the problems that the O-shaped rubber ring is difficult to take out and the bottom vacuum sealing surface of the dovetail groove is easy to damage in the taking-out process are solved.
2. According to the invention, the ventilation duct is designed at the bottom of the detachable part A, the detachable part A is not only a component part forming the outer side surface of the dovetail groove, but also a vacuum leakage detection channel, a helium channel is arranged at the bottom of the detachable part A by utilizing the condition that the bottom of the detachable part A is directly led to a vacuum sealing surface at the bottom of the dovetail groove, the helium channel is directly led to the outer side surface of the dovetail groove close to a bottom surface area, and helium is sprayed from a round corner of the bottom of a sealing ring pressed into a trapezoid cross section, so that the sealing surface at the bottom of the dovetail groove is just detected, and the long-term difficult problem is solved: a bonding area is formed between the outer side surface of the dovetail groove and the deformed O-shaped rubber ring 3 in the traditional method, so that helium gas is not easy to enter the area of the bottom sealing surface of the dovetail groove, and the problem of difficulty in vacuum leak detection of helium mass spectrum is caused.
Drawings
FIG. 1 is a schematic view of explosion disassembly of a dovetail vacuum seal structure A of the present invention;
FIG. 2 is a schematic diagram of a prior art dovetail vacuum seal configuration;
FIG. 2-1 is an enlarged view of a portion of FIG. 2;
FIG. 3 is a schematic view of a dovetail vacuum seal configuration A of the present invention;
FIG. 4 is a top view of the dovetail vacuum seal of the present invention, shown in schematic section line position;
FIG. 4-1 is a cross-sectional view of dovetail vacuum seal configuration A-a of the present invention;
FIG. 4-2 is a sectional view of a dovetail vacuum seal configuration of the present invention taken along line A-B;
FIG. 4-3 is an enlarged view of a portion of the invention of FIG. 4-1;
FIG. 5-1 is a schematic view of a front portion of a dovetail vacuum seal construction of the present invention;
FIG. 5-2 is a schematic illustration of a reverse side portion of a dovetail vacuum seal construction of the present invention;
FIG. 6 is a schematic view of explosion disassembly of part A of the dovetail vacuum seal structure of the present invention;
FIG. 6-1 is an enlarged view of a portion of FIG. 6 of the invention;
FIG. 7 is a schematic view of an A seal blind plate in type A dovetail vacuum seal configuration of the present invention;
FIG. 8-1 is a schematic front view of a removable component of type A of the dovetail vacuum seal of the present invention;
FIG. 8-2 is a schematic view of a reverse side of an A removable component in a dovetail vacuum seal configuration A of the present invention;
FIG. 9-1 is a sectional view of a dovetail vacuum seal of the present invention in section B.
FIG. 9-2 is an enlarged view of a portion of the invention of FIG. 9-1;
FIG. 10-1 is a schematic view of a B-type part of a dovetail vacuum seal structure of the present invention;
FIG. 10-2 is a schematic view of explosion disassembly of a B-type part of the dovetail vacuum seal structure of the present invention.
Reference numerals: 1: a, sealing a blind plate; 1-1: a dovetail groove; a removable piece; 2-1: a vent groove; 3: o-shaped rubber ring, 4: a screw, 5: b screw, 6: a vacuum chamber; 7: b, sealing the blind plate; 8: b a detachable piece; 9: and C, sealing the blind plate.
Detailed Description
The invention is further explained below with reference to the drawings:
Design principle of the invention
1. Design principle of combined dovetail groove. The invention relates to a novel dovetail groove which is formed by reforming a traditional dovetail groove and combining the traditional dovetail groove after reforming, and the novel dovetail groove is of an A-type sealing structure or a B-type sealing structure. The structure A of the invention is that a part of the outer side surface of the dovetail groove is removed, the removed part is embedded into the detachable part A, and the inner side surface of the detachable part A and the outer side surface of the dovetail groove jointly form the outer side surface of the dovetail groove of a whole circle of the A-type sealing structure; the structure B of the invention is that the inner side surface of the dovetail groove is removed integrally, and the annular outer side surface of the annular detachable part B forms the inner side surface of the dovetail groove with the B-shaped sealing structure. The dovetail grooves of the combined structure are adopted as both the A-type structure and the B-type structure, and the combined parts support and depend on each other: the novel dovetail groove depends on the support of a detachable piece, and the O-shaped rubber ring is not easy to take out without the detachable piece; meanwhile, the detachable piece depends on the support of the dovetail groove, and no dovetail groove exists, so that the detachable piece has no need, and a new effect can be generated only after the detachable piece and the detachable piece are combined. Thus, the effect of the dovetail groove and the detachable member after combination is much superior to the effect before combination.
2. Helium channel design principle. Firstly, the helium channel is led to the outer side surface of the dovetail groove, so that vacuum cannot leak, because the vacuum sealing surface of the dovetail groove is the bottom plane of the dovetail groove, and the two side surfaces beside the dovetail groove are used for limiting the space of the O-shaped rubber ring. From the perspective of vacuum, two side surfaces of the dovetail groove are not required to be sealed, only the vacuum sealing surface of the bottom surface is required to seal vacuum, and the maximum air leakage of the two side surfaces is the best, so that vacuum leakage cannot be caused, and therefore, the outer side surface of the dovetail groove, which is led to by the helium channel, cannot leak vacuum and cannot cause vacuum leakage at the position. The second O-shaped rubber ring is embedded into the trapezoid dovetail groove and is pressed and deformed into an isosceles trapezoid with four corners as round corners, the space between the round corners and the bottom corners of the dovetail groove is empty, the helium channel of the detachable A-structure part just sprays helium to the position of the round corners, and if leakage exists on the bottom surface of the dovetail groove, the leakage can be easily detected through helium mass spectrum vacuum leakage detection.
Based on the principle of the invention, the invention designs a vacuum sealing structure.
A vacuum sealing structure is shown in figures 1,3, 4-1, 4-2, 4-3, 5-1, 5-2, 6-1, 7, 8-1 and 8-2, and comprises an A sealing blind plate 1, an A detachable part 2 with a vacuum leakage detection ventilation groove 2-1, an O-shaped rubber ring 3 used as a vacuum sealing element, an A screw 4, a B screw 5 and a vacuum chamber 6; the method is characterized in that: the reverse side of the A sealing blind plate 1, which is close to the large radius, is provided with a dovetail groove 1-1 in the circumference, the dovetail groove 1-1 is provided with an inner side face, an outer side face and a bottom face along the radial direction of the A sealing blind plate 1, the section of the dovetail groove 1-1 formed by the inner side face, the outer side face and the bottom face is an isosceles trapezoid, the inner side face and the outer side face are the side edges of the isosceles trapezoid of the dovetail groove 1-1, and the bottom face is the bottom edge of the isosceles trapezoid of the dovetail groove 1-1; the dovetail groove 1-1 is provided with an opening, the width of the opening is smaller than the width of the bottom surface, the O-shaped rubber ring 3 is arranged in the dovetail groove 1-1 of the A sealing blind plate, the width of the opening of the dovetail groove 1-1 is smaller than the diameter of the section of the O-shaped rubber ring 3, and the O-shaped rubber ring 3 cannot fall out of the dovetail groove 1-1 when the A sealing blind plate 1 is arranged or operated in any direction; one or more sunken structures are outwards arranged on the outer side surface of the dovetail groove 1-1, namely one or more sections of the outer side surface of the dovetail groove 1-1 are removed, the bottom of the sunken structure is a plane, threaded holes are formed in the sunken plane and used for connecting and fixing an A detachable piece 2 with a vacuum leakage detection vent groove 2-1, the A detachable piece 2 is fixedly arranged in the sunken structure of the A sealing blind plate 1 through an A screw 4, and the A screw 4 penetrates through the A detachable piece 2 and is screwed into the A sealing blind plate 1 to realize fixed connection of the A detachable piece 2 and the A sealing blind plate 1; the assembled component is connected and fixed with the vacuum chamber 6 by the screw 5 and the O-shaped rubber ring 3 is pressed tightly, so that the vacuum sealing function of the vacuum sealing structure is realized.
The number of the detachable pieces A2 is the same as that of the sunk structures on the outer side face of the dovetail groove 1-1 of the sealing blind plate A, and the detachable pieces A2 are provided with countersunk screw holes or stepped holes for penetrating the screws A4 to fixedly connect the detachable pieces A with the sunk structures on the outer side face of the dovetail groove 1-1 of the sealing blind plate A; the thickness of the detachable piece (2) is the same as the sinking step depth of the sealing blind plate (1); the inner side surface of the detachable piece (2) is an arc-shaped inclined surface which is coincident with the arc-shaped inclined surface on the outer side of the dovetail groove (1-1) of the sealing blind plate (1) and has the same size.
As shown in fig. 8-1 and 8-2, the surface, which is attached to the sinking plane of the sealing blind plate 1, of the detachable piece a2 with the vacuum leak detection ventilation groove 2-1 is provided with the ventilation groove 2-1, and the groove is used as a helium channel during helium mass spectrum vacuum leak detection, so that helium sprayed by leak detection can easily reach the bottom vacuum sealing surface of the isosceles trapezoid dovetail groove 1-1, and vacuum seal detection on the sealing surface can be conveniently realized.
As shown in FIG. 6, when the O-shaped rubber ring 3 needs to be taken out, one or more groups of A screws 4 are loosened and removed, and the corresponding A detachable piece 2 is removed, so that the outer side part area of the O-shaped rubber ring 3 is exposed, the O-shaped rubber ring 3 is easy to take out, the rubber ring is not damaged and can be repeatedly used, and the process of taking out the O-shaped rubber ring 3 does not scratch the bottom sealing surface of the dovetail groove 1-1.
The vacuum sealing structure also has another structural form, and comprises a B sealing blind plate 7, a B detachable piece 8, an O-shaped rubber ring 3 used as a vacuum sealing element, A screws 4, B screws 5 and a vacuum chamber 6, wherein the reverse surface of the B sealing blind plate 7 is close to a large radius, a dovetail groove 1-1 with an isosceles trapezoid cross section is arranged on the periphery, the dovetail groove 1-1 is provided with an inner side surface, an outer side surface and a bottom surface along the radial direction of the B sealing blind plate 7, the inner side surface of the dovetail groove 1-1 of the B sealing blind plate 7 is removed to form a subsidence plane structure, a threaded hole is arranged on the subsidence plane for connecting and fixing the B detachable piece 8, the B detachable piece 8 is fixedly arranged in the subsidence structure of the B sealing blind plate 7 through the A screws 4, and the annular outer side surface of the B detachable piece 8 forms the inner side surface of the dovetail groove 1-1; the O-shaped rubber ring 3 is arranged in the dovetail groove 1-1; the assembled component is connected and fixed with the vacuum chamber 6 by the screw 5 and the O-shaped rubber ring 3 is pressed tightly, so that the vacuum sealing function of the vacuum sealing structure is realized.
As shown in fig. 10-2, the detachable member 8 is in a circular ring shape, the outer side surface of the circular ring is a circular arc-shaped inclined surface, and the circular arc-shaped inclined surface finally forms the inner side surface of the dovetail groove 1-1; the inner diameter of the step of the sinking structure of the annular inner side surface and the B sealing blind plate 7 is the same, and the annular thickness is the same as the sinking depth of the B sealing blind plate 7; the detachable piece (8) is provided with a countersunk screw hole or a step hole for penetrating the screw (4) and fixedly connecting the screw (4) in the sinking structure of the sealing blind plate (7), and the O-shaped rubber ring (3) is placed in the half dovetail groove (1-1) which is opened at the inner side of the sealing blind plate (7); the detachable piece 8 is placed in the sunk plane in the dovetail groove 1-1 of the sealing blind plate 7B; the screw 4 is screwed in to realize the fixed connection of the detachable piece 8B and the sealing blind plate 7B.
As shown in fig. 10-2, the outer arc inclined surface of the detachable piece (8) and the sealing blind plate (7) of the inner side surface of the missing dovetail groove (1-1) are spliced to form a complete dovetail groove (1-1) structure, the bottom surface of the dovetail groove (1-1) is a vacuum sealing surface, and the two side surfaces limit the space position of the O-shaped rubber ring (3).
When the O-shaped rubber ring 3 needs to be taken out, the screw A4 is loosened and removed, the detachable piece B8 is removed, the inner side surface of the O-shaped rubber ring 3 is exposed, the O-shaped rubber ring 3 is easy to be taken down, and the O-shaped rubber ring 3 and the bottom vacuum sealing surface of the dovetail groove 1-1 are not damaged in the process.
Example 1
By adopting the vacuum sealing structure of the dovetail groove 1-1 (shown in figures 1, 3, 4-1, 4-2, 4-3, 5-1, 5-2, 6-1, 7, 8-1 and 8-2), the invention can conveniently realize the taking-out of the O-shaped rubber ring 3 while meeting the vacuum sealing function of the dovetail groove 1-1, and the process of taking out the O-shaped rubber ring 3 is not easy to damage the O-shaped rubber ring 3 and the vacuum sealing surface at the bottom of the dovetail groove 1-1, thereby being beneficial to the repeated use of the O-shaped rubber ring 3 and the implementation of helium mass spectrum vacuum leak detection on the vacuum sealing surface at the bottom of the dovetail groove. The main process of realizing the functions is as follows:
And (one) a vacuum sealing structure: 5-1, 5-2, 6-1 and 7, the O-shaped rubber ring 3 is placed in the dovetail groove 1-1 of the A sealing blind plate 1; the detachable piece (2) is placed in the sinking plane outside the dovetail groove (1-1) on the inner side of the sealing blind plate (1); the screw A4 is screwed in to realize the fixed connection between the detachable A piece 2 and the sealed blind plate A1, and at the moment, the inner arc inclined surface of the detachable A piece 2 is engaged with the outer surface of the dovetail groove of the sealed blind plate A1 in a facing way to form a whole circle of outer side surface of the dovetail groove. The depth of the dovetail groove is smaller than the diameter of the cross section of the O-shaped rubber ring 3, the width of the opening of the dovetail groove is slightly smaller than the diameter of the cross section of the O-shaped rubber ring 3, the O-shaped rubber ring 3 cannot fall out of the dovetail groove when the A sealing blind plate 1 is placed or operated in any direction, and even if the opening of the dovetail groove is downward, the O-shaped rubber ring 3 cannot fall down due to gravity because the width of the opening of the dovetail groove is slightly smaller than the diameter of the cross section of the O-shaped rubber ring 3.
And (II) assembling the vacuum sealing structure with the vacuum chamber 6: as shown in fig. 1,3, 4-1, 4-2, 4-3, the above assembled assembly is integrally fastened to the vacuum chamber 6, and the B screw 5 is screwed. The screw 5 realizes the firm connection between the sealing blind plate 1 and the vacuum chamber 6, and the pretightening force of the screw presses the O-shaped rubber ring 3 to deform and fill the dovetail groove, so that enough pressure is provided for the O-shaped rubber ring 3 to meet the vacuum sealing performance. The bottom surface of the dovetail groove 1-1 of the sealing blind plate 1 and the plane of the vacuum chamber 6 corresponding to the area of the O-shaped rubber ring 3 are vacuum sealing surfaces. Thus, the vacuum sealing function of the vacuum sealing structure is realized.
And (III) carrying out helium mass spectrum vacuum leak detection by utilizing a vacuum sealing structure: as shown in fig. 3, 4-1, 4-2, 4-3, 5-1, 5-2, 8-1, 8-2, after the vacuum seal related components are assembled, it is often necessary to evacuate the vacuum chamber 6 to perform helium mass spectrum leak detection, typically by accessing the vacuum system to a helium mass spectrum vacuum leak detector, and after evacuating the vacuum chamber 6, spraying helium gas to each vacuum seal position one by one, and if there is a leak point in the seal position, sucking helium gas into the vacuum chamber 6, where the leak detector indicates that the vacuum seal is leaking. If the vacuum sealing surface at the bottom of the dovetail groove has defects such as scratches or foreign matters, the vacuum sealing can leak air, but due to the adopted dovetail groove structure, the O-shaped rubber ring 3 is deformed by pressing and fills the dovetail groove, the cross section of the O-shaped rubber ring is changed into an isosceles trapezoid from a circle after being deformed by pressing, four corners of the trapezoid are rounded corners, and a bonding area is formed between the outer side surface of the dovetail groove and the deformed O-shaped rubber ring 3, so that helium gas is not easy to enter the area of the sealing surface at the bottom of the dovetail groove sometimes, and the vacuum leak detection of helium mass spectrum is difficult.
According to the invention, the through groove is arranged on the surface of the A detachable part 2, which is in sinking joint with the A sealing blind plate 1, helium is sprayed inwards through the through groove during vacuum leak detection of helium mass spectrum, so that helium can easily enter the position of the sealing surface at the position corresponding to the outer side of the sealing surface at the bottom of the dovetail groove of the O-shaped rubber ring 3 pressed into a trapezoid cross section under the condition that the vacuum seal is leaked, and the helium can be easily detected if the vacuum seal is leaked.
And (IV) taking out the rubber ring: as shown in fig. 1, 5-2, 6-1, 7, 8-1 and 8-2, when the O-shaped rubber ring 3 needs to be taken out, one or more groups of a screws 4 are loosened and removed, and the corresponding a detachable piece 2 is removed, the outer side part area of the O-shaped rubber ring 3 is exposed, the O-shaped rubber ring 3 is easily taken out by hands, and the rubber ring is not damaged and can be repeatedly used. In the prior art, as shown in fig. 2, the O-shaped rubber ring 3 which is deformed by pressing after being used for a period of time is difficult to take out, the O-shaped rubber ring 3 is often damaged to take out, and the bottom vacuum sealing surface of the dovetail groove is scratched sometimes because a sharp tool is used for taking out the sealing ring.
Example 2
9-1, 9-2, 10-1 And 10-2, placing the O-shaped rubber ring 3 into a half dovetail groove with the inner side open of the B sealing blind plate 7; the detachable piece 8 is placed in the sunk plane in the dovetail groove of the sealing blind plate 7; the screw 4 is screwed into the groove to realize the fixed connection between the detachable piece 8 and the sealing blind plate 7, and at the moment, the arc inclined surface at the outer side of the detachable piece 8 is spliced with the sealing blind plate 7 which lacks the inner side surface of the dovetail groove to form a complete dovetail groove structure, the bottom surface of the dovetail groove is a vacuum sealing surface, and the two side surfaces limit the space position of the O-shaped rubber ring 3.
9-1, 9-2, 10-1 And 10-2, when the O-shaped rubber ring 3 needs to be taken out, the screw 4 is loosened and removed, the detachable piece 8 is removed, the inner side face of the O-shaped rubber ring 3 is exposed, the O-shaped rubber ring 3 is easily removed, and the O-shaped rubber ring 3 and the vacuum sealing face at the bottom of the dovetail groove are not damaged in the process.
It should be emphasized that the above-described embodiments are merely illustrative of the present invention and are not intended to limit the present invention, for example, the shapes of the seal blind and the dovetail groove may be circular or other, the number of the sinking steps of the seal blind and the number of the removable pieces of the seal blind may be 1 or more, the present invention may be applied to the sealing of the liquid container or the positive pressure sealing, and those skilled in the art can make modifications to the above-described embodiments without creative contribution as needed after reading the present specification, but are protected by the patent laws within the scope of the claims of the present invention.
Claims (6)
1. A vacuum sealing structure comprises a sealing blind plate A, a detachable part A with a vacuum leakage detection ventilation groove, an O-shaped rubber ring used as a vacuum sealing element, a screw A, a screw B and a vacuum chamber; the method is characterized in that: the reverse side of the sealing blind plate A, which is close to the large radius, is provided with a dovetail groove in the peripheral ring, the dovetail groove is provided with an inner side face, an outer side face and a bottom face along the radial direction of the sealing blind plate A, the cross section of the dovetail groove formed by the inner side face, the outer side face and the bottom face is an isosceles trapezoid, the inner side face and the outer side face are the side edges of the isosceles trapezoid of the dovetail groove, and the bottom face is the bottom edge of the isosceles trapezoid of the dovetail groove; the dovetail groove is provided with an opening, the width of the opening is smaller than the width of the bottom surface, the O-shaped rubber ring is arranged in the dovetail groove of the A sealing blind plate, the opening of the dovetail groove is smaller than the diameter of the section of the O-shaped rubber ring, and the O-shaped rubber ring cannot fall out of the dovetail groove when the A sealing blind plate is arranged or operated in any direction; one or more sunken structures are outwards arranged on the outer side surface of the dovetail groove, namely one or more sections of the outer side surface of the dovetail groove are removed, the bottom of the sunken structure is a plane, a threaded hole is formed in the sunken plane and used for connecting and fixing an A detachable piece with a vacuum leakage detection ventilation groove, the A detachable piece is fixedly arranged in the sunken structure of the A sealing blind plate through an A screw, and the A screw penetrates through the A detachable piece and is screwed into the A sealing blind plate to realize fixed connection of the A detachable piece and the A sealing blind plate; b screw connects and fixes the assembled assembly comprising the sealing blind plate A and the detachable piece A with the vacuum chamber and compresses the O-shaped rubber ring, thereby realizing the vacuum sealing function of the vacuum sealing structure;
The number of the detachable pieces A is the same as that of the sunk structures on the outer side face of the dovetail groove of the sealing blind plate A, and the detachable pieces A are provided with countersunk screw holes or step holes for penetrating the screws A to fixedly connect the detachable pieces A in the sunk structures on the outer side face of the dovetail groove of the sealing blind plate A; the thickness of the detachable piece A is the same as the sinking step depth of the sealing blind plate A; the inner side surface of the detachable piece A is an arc-shaped inclined surface which coincides with the arc-shaped inclined surface on the outer side of the dovetail groove of the sealing blind plate A and has the same size;
A detachable part with a vacuum leak detection vent groove is provided with a through groove on the surface which is attached to the subsidence plane of the A sealing blind plate, the groove is used as a helium channel during helium mass spectrum vacuum leak detection, and helium gas sprayed by leak detection easily reaches the vacuum sealing surface at the bottom of the isosceles trapezoid dovetail groove, so that the vacuum sealing detection of the sealing surface can be conveniently realized.
2. A vacuum sealing structure as claimed in claim 1, wherein: when the O-shaped rubber ring is required to be taken out, one or more groups of A screws are loosened and taken down, the corresponding A detachable pieces are removed, the outer side part area of the O-shaped rubber ring is exposed, the O-shaped rubber ring is easy to take out, the rubber ring is not damaged and can be repeatedly used, and the bottom sealing surface of the dovetail groove is not scratched in the process of taking out the O-shaped rubber ring.
3. A vacuum sealing structure for an annular detachable member based on the vacuum sealing structure according to any one of claims 1 to 2, characterized in that: the vacuum sealing structure comprises a B sealing blind plate, a B detachable piece, an O-shaped rubber ring used as a vacuum sealing element, a screw A, a screw B and a vacuum chamber, wherein the reverse side of the B sealing blind plate, which is close to a large radius, is circumferentially provided with a dovetail groove with an isosceles trapezoid cross section, the dovetail groove is radially provided with an inner side surface, an outer side surface and a bottom surface along the B sealing blind plate, the inner side surface of the dovetail groove of the B sealing blind plate is removed inwards by a certain radius area to form a sinking plane structure, a threaded hole is formed in the sinking plane and used for connecting and fixing the B detachable piece, the B detachable piece is fixedly arranged in the sinking structure of the B sealing blind plate through the screw A, and the annular outer side surface of the B detachable piece forms the inner side surface of the dovetail groove; the O-shaped rubber ring is arranged in the dovetail groove; and the assembled assembly comprising the B sealing blind plate and the B detachable piece is connected and fixed with the vacuum chamber by the B screw and tightly presses the O-shaped rubber ring, so that the vacuum sealing function of the vacuum sealing structure is realized.
4. A toroidal removable vacuum seal as claimed in claim 3, wherein: the detachable piece B is in a circular ring shape, the outer side surface of the circular ring is an arc-shaped inclined surface, and the arc-shaped inclined surface finally forms the inner side surface of the dovetail groove; the inner diameter of the step of the sinking structure of the ring-shaped inner side surface and the sinking depth of the B sealing blind plate are the same, and the thickness of the ring-shaped inner side surface and the sinking depth of the B sealing blind plate are the same; the detachable piece B is provided with a countersunk screw hole or a step hole for penetrating the screw A and fixedly connecting the screw A in the sinking structure of the sealing blind plate B, and the O-shaped rubber ring is placed in a half dovetail groove which is opened at the inner side of the sealing blind plate B; the detachable piece B is placed in a sinking plane in the dovetail groove of the sealing blind plate B; the screw A is screwed in to realize the fixed connection between the detachable part B and the sealing blind plate B.
5. A toroidal removable vacuum seal as claimed in claim 3, wherein: the outer arc inclined surface of the detachable piece B is spliced with the B sealing blind plate which lacks the inner side surface of the dovetail groove to form a complete dovetail groove structure, the bottom surface of the dovetail groove is a vacuum sealing surface, and the two side surfaces limit the space position of the O-shaped rubber ring.
6. A toroidal removable vacuum seal as claimed in claim 3, wherein: when the O-shaped rubber ring is required to be taken out, the screw A is loosened and removed, the detachable piece B is removed, the inner side face of the O-shaped rubber ring is exposed, the O-shaped rubber ring is easy to be taken down, and the O-shaped rubber ring and the bottom vacuum sealing face of the dovetail groove are not damaged in the process.
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| GB690725A (en) * | 1950-12-19 | 1953-04-29 | Happich Gmbh Gebr | Improvements in rigid moulding strips and their attachment |
| CN201552305U (en) * | 2009-12-18 | 2010-08-18 | 辽宁西格马数控机床有限公司 | Horizontal numerically-controlled-lathe sliding door seal |
| CN102678954A (en) * | 2012-05-17 | 2012-09-19 | 东莞宏威数码机械有限公司 | Single-surface sealed and two-way pressure bearing vacuum gate valve device |
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