CN114055322B - KDP surface microdefect profiling deliquescence repair device and method - Google Patents

KDP surface microdefect profiling deliquescence repair device and method Download PDF

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CN114055322B
CN114055322B CN202111311595.9A CN202111311595A CN114055322B CN 114055322 B CN114055322 B CN 114055322B CN 202111311595 A CN202111311595 A CN 202111311595A CN 114055322 B CN114055322 B CN 114055322B
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micro
profiling
kdp
polishing head
deliquescence
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CN114055322A (en
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黄帅
李明浩
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Hunan University
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Hunan University
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention provides a KDP surface microdefect profiling deliquescence repairing device and a repairing method, which comprise a machine vision system, a profiling polishing head, a connecting structure, a negative pressure device, a micro water mist channel, a micro cold plasma channel, a negative pressure hole and a KDP crystal of a surface microdefect to be repaired. The invention adopts the profiling polishing head, combines the precise identification and positioning of the micro-defects on the KDP surface and the super-hydrophilic modification of the micro-fine cold plasma, and realizes the profiling deliquescence polishing repair of the micro-defects. The invention has the following beneficial effects: the water medium can be uniformly paved between the profiling polishing head and the area to be repaired, the deliquescence rate and the area are controllable, new defects are prevented from being introduced in the repairing process, and an ideal spherical or Gaussian curved surface can be obtained after micro-defect repairing.

Description

KDP surface microdefect profiling deliquescence repair device and method
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of ultra-precision machining of a KDP surface easy to deliquesce, in particular to a profiling deliquescence repair device and a repair method for a KDP surface micro-defect.
[ background of the invention ]
KDP is the only nonlinear optical material which can be used for laser frequency doubling, electro-optical modulation and photoelectric switching devices in high-energy laser circuit systems at present. Because KDP has the characteristics of softness, brittleness, deliquescence, extreme sensitivity to processing temperature and the like, surface micro-defects are easily generated in the processing and service processes, the optical performance and the service life of KDP are obviously reduced, and finally the KDP is scrapped. The existing method for removing the KDP microdefect and the existing problems are as follows: 1) by using CO 2 Laser melting, femtosecond pulse laser ablation, micro-machining and other methods are used for repairing KDP surface defects, and the results show that the micro-machining has the advantages of good controllability and good performance stability, but the KDP has regular knife marks and is high in roughness; 2) the KDP surface damage point is repaired by a solvent mediated method based on an AFM probe, the internal light intensity of the repaired crystal is close to an ideal surface, but the micro-defect below the micron level can be repaired, the efficiency is low, and the engineering application cannot be realized; 3) the KDP surface micro-defect is etched by the dip pen, the method can avoid introducing defects such as knife marks, subsurface damage and the like, but the deliquesced surface has small-scale ripples, the laser damage threshold value can be reduced, the deliquesced area is not controllable, and an ideal spherical or Gaussian curve surface cannot be obtained.
At present, although the micro-mechanical repair basically meets the actual requirements, defects such as knife mark, thermal stress, subsurface damage and the like still occur in the repair, and the difference between the surface quality of a repair area and the surface quality before damage is large. Due to the intrinsic characteristics of machining, the above-mentioned problems are difficult to completely solve even if process optimization and equipment precision improvement are performed, and therefore a new high-quality and high-efficiency low-damage repair process must be explored. The KDP crystal is easy to deliquesce, a new idea is provided for realizing high-quality repair of micro defects, but the problems of small-scale ripples on the deliquesced surface, low efficiency, uncontrollable deliquesced area and the like cause that the ideal repair curved surface cannot be obtained by the process.
[ summary of the invention ]
The invention aims to disclose a KDP surface microdefect profiling deliquescence repairing device and a repairing method, which can solve the technical problems of small scale ripples on a deliquescence surface, low efficiency, uncontrollable deliquescence area and the like.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a KDP surface microdefect profiling deliquescence repair device comprises a profiling polishing head 8 and a machine vision system 7; a micro water mist channel 5 and a micro cold plasma channel 6 are formed in the middle of the profiling polishing head 8, and a plurality of negative pressure holes 4 are formed in the periphery of the profiling polishing head 8; the negative pressure hole 4 is communicated with a negative pressure device 3;
the machine vision system 7 is used for identifying and positioning micro defects on the surface of the KDP crystal 1;
the micro cold plasma channel 6 is used for introducing micro cold plasma to carry out super-hydrophilic modification on the micro-defects of the KDP crystal 1;
the micro water mist channel 5 is used for introducing micro water mist to deliquesce the micro defects on the surface of the KDP crystal 1 after the super-hydrophilic modification; the negative pressure holes 4 are used to form negative pressure to limit the fine cold plasma and fine water mist spreading area.
In a further improvement, the machine vision system 7 is also used for determining the shape and size of the selected profiling polishing head 8 and the negative pressure value of each negative pressure hole 4 according to the shape and size of the micro-defects on the surface of the KDP crystal 1.
In a further improvement, the profiling polishing head 8 is mounted on the machine tool through the connecting structure 2.
In a further improvement, the microdefects on the surface of the KDP crystal 1 include micro-pits, bumps, cracks, scratches, fractures and burns.
In further improvement, the machine vision system 7 collects microdefect patterns on the surface of the KDP crystal 1 as training data, and a microdefect identification model is constructed by adopting a deep learning method; then, comparing the acquired KDP surface image to be repaired with the micro-defects with training data, constructing the mapping relation between the micro-defect type, the micro-defect scale and the copying polishing head and the repair contour, and assisting in deciding the selection scheme of the shape and the width-depth ratio of the copying polishing head to realize the identification and the positioning of the micro-defects and the selection of the copying polishing head; during repair, after accurate tool setting is realized, micro water mist and micro cold plasma enter the profiling polishing head corresponding to a repair contour through the micro water mist channel and the micro cold plasma channel, and are conveyed to a micro defect to-be-repaired interface of the KDP crystal 1 for repair.
In a further improvement, the obtaining method of the mapping relationship is as follows: firstly, a machine vision system 7 acquires the shape contour of the KDP surface microdefect to be repaired, and the microdefect type is determined; because the depths of the areas to be repaired are different due to different types of defects, a series of profiling polishing heads taking the width-depth ratio as the dividing requirement are designed according to different defect types; after the micro-defect type is determined, a machine vision system is used for fitting to obtain a minimum circumscribed circle of the shape outline of the micro-defect, and finally, spherical and Gaussian curved surface profiling polishing heads with the same specification are selected according to the size of the micro-defect type and the circumscribed circle of the area to be repaired, so that the repairing area of the KDP crystal is minimized.
Further improving, when the width-depth ratio of the KDP surface microdefects to be repaired is between 5 and 10, selecting a spherical profiling polishing head; selecting a Gaussian profiling polishing head when the width-depth ratio of the KDP surface micro-defects to be repaired is more than 10; the parameters of the Gaussian profiling polishing head comprise a maximum diameter, a median diameter and an arc diameter, and the scale range of the micro defects on the KDP surface to be repaired is 10 mu m-2 mm magnitude.
In a further improvement, the fine cold plasma channel 6 is communicated with a fine cold plasma supply device; the micro water mist channel 5 is communicated with a micro water mist supply device; after the micro-fine cold plasma channel 6 carries out real-time super-hydrophilic modification on the KDP surface micro-defect and the profiling polishing head by using the micro-fine cold plasma, the micro-defect interface after the super-hydrophilic modification absorbs micro-water mist, and profiling deliquescence is realized; the moisture content is adjusted and controlled by controlling the supply flow of the micro water mist and the gap between the profiling polishing head and the workpiece, and the trace moisture is limited in a profiling deliquescence area by the negative pressure device, so that controllable profiling deliquescence is realized.
A KDP surface microdefect profiling deliquescence repairing method comprises the following steps:
step one, carrying out pretreatment such as cleaning and wiping on a KDP crystal 1 containing surface microdefect to be repaired, and then fixing the KDP crystal on a machine tool;
secondly, mounting the profiling polishing head 8 on a machine tool through the connecting structure 2, starting a machine vision system 7, accurately identifying and positioning the microdefect on the KDP surface, providing an auxiliary decision for selection of the profiling polishing head according to the defect type, and realizing accurate tool setting by the machine tool;
thirdly, starting a negative pressure device 3, limiting the micro cold plasmas and the micro water mist to spread in an aging area, limiting the micro water mist in an area to be repaired, and absorbing and removing the diffused micro cold plasmas and the micro water mist through negative pressure;
injecting the micro cold plasma into the micro cold plasma channel 6; injecting the micro water mist generated by the micro water mist supply device into the micro water mist channel 5;
and step five, starting the machine tool, and carrying out profiling deliquescence polishing repair on the surface of the KDP to be repaired until the repair process is completed.
And step six, closing all devices, taking out the KDP crystal after the micro-defect repair is finished, and placing the KDP crystal in a dry and dust-free area after the gas jet flow drying post-treatment.
In a further improvement, the micro cold plasma is generated by working gas by means of a low-pressure plasma power supply; the working gas comprising N 2 He and Ar; controlling a low-pressure plasma power supply to generate micro cold plasma with the diameter of 1-500 mu m, and modifying micro defects between the profiling polishing head and the KDP surface into a super-hydrophilic surface in real time.
In the invention, after the super-hydrophilic modification is carried out on the surface micro-defects of KDP by using micro-fine cold plasma, a super-hydrophilic interface adsorbs micro-water mist to realize profiling deliquescence; the adjustment of water content is realized by controlling the supply flow of the micro water mist and the gap between the profiling polishing head and the workpiece, the deliquescence rate is accurately regulated and controlled, the negative pressure device is started, trace water is limited in a profiling deliquescence area, and controllable profiling deliquescence is realized.
The invention has the following beneficial effects: the positioning of micro defects with micrometer to millimeter scale on KDP surface and the tool setting of the profiling polishing head are realized through a machine vision system, the acquired image is processed by adopting a deep learning method, the precise identification of the micro defects is realized, and the selection of the profiling polishing head is determined in an auxiliary manner according to the category and scale of the micro defects. Meanwhile, by utilizing the principle of super-hydrophilic modification of the micro cold plasma, after accurate tool setting, the copying polishing head is aligned with the surface micro-defects of KDP, the micro-defect area is subjected to copying super-hydrophilic modification by the micro cold plasma, the injected micro-water mist is uniformly paved between the copying polishing head and the area to be repaired, the deliquescence rate and the area are controllable, the super-hydrophilic modification area and the micro-water mist paved area are limited, the diffused micro cold plasma and the micro-water mist are subjected to negative pressure absorption through a negative pressure hole on a connecting structure, and an ideal spherical or Gaussian curved surface can be obtained after the micro-defects are repaired.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without inventive efforts, wherein:
fig. 1 is a schematic structural diagram of a profiling deliquescence repair device for KDP surface microdefects;
FIG. 2 is a schematic structural view of a connection structure according to the present invention;
FIG. 3 is a schematic view of the shape of a serialized conformable polishing head of the present invention;
fig. 4 is a process flow of profile deliquescence polishing and KDP surface microdefect repair assisted by cold plasma.
[ detailed description ] A
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, the invention provides a KDP surface microdefect profiling deliquescence repairing device, which comprises a KDP crystal 1 to be repaired containing surface microdefects, a connecting structure 2, a negative pressure device 3, a negative pressure hole 4, a micro water mist channel 5, a micro cold plasma channel 6, a machine vision system 7 and a profiling polishing head 8.
The KDP crystal with the surface micro-defects is fixed on a machine tool, the profiling polishing head is installed on a connecting structure, the connecting structure is installed on the machine tool, the negative pressure device is connected in the negative pressure hole, the machine vision system is used for positioning the micro-defects on the KDP surface and assisting in decision selection and tool setting of the profiling polishing head, and the micro-water mist channel and the micro-cold plasma channel are used for injecting micro-water mist and micro-cold plasma.
The plasma includes but is not limited to N 2 He and Ar.
In the specific embodiment of the connection structure 2, as shown in fig. 2, the upper end of the connection structure 2 is provided with an external thread for connecting to a machine tool, and the lower end of the connection structure 2 is provided with an internal thread for matching with the external thread of the profiling polishing head 8.
With reference to fig. 3, the microdefect repairing experiment aims to design and manufacture a profiling polishing head, characterize repairing quality, efficiency and surface damage after profiling deliquescence polishing, obtain a mapping relation between process parameters and a repairing contour, and master a creating mechanism of the repairing contour. The profiling polishing head takes the width-depth ratio as a division standard, and designs a series of polishing heads as shown in figure 3. In the micro-defect repairing process, the profiling polishing head only needs to rotate at a high speed and slightly feed along the axial direction, a complex motion track is not needed, and the repairing efficiency can be greatly improved.
Referring to fig. 4, in the repairing method provided by the present invention, the microdefect is first identified in a positioning manner, then the microdefect is super-hydrophilically modified by the fine cold plasma, so that the fine water mist is profiled and deliquesced uniformly in the region, then the microdefect is polished and removed by the profiled polishing head after being set, and finally the KDP crystal after being repaired is dried by the gas jet and then placed in a dry and dust-free region.
The invention also provides a repairing method of the profiling deliquescence repairing device for the KDP surface micro-defect, which comprises the following steps:
step one, pretreating KDP (1) containing surface microdefects to be repaired and then fixing the pretreated KDP (1) on a machine tool;
secondly, mounting a profiling polishing head (8) on the internal thread below the connecting structure (2), starting a machine vision system (7), accurately identifying and positioning the micro-defects on the KDP surface, providing an auxiliary decision for selection of the profiling polishing head according to the defect type, and realizing accurate tool setting by a machine tool;
thirdly, starting a negative pressure device (3), limiting the micro cold plasmas and the micro water mist to spread in an aging area, limiting the micro water mist in an area to be repaired, and absorbing and removing the diffused micro cold plasmas and the micro water mist through negative pressure;
step four, adding N 2 Working gases such as He and Ar are injected into the micro cold plasma channel (6) by virtue of a low-pressure plasma power supply to generate micro cold plasma with low macroscopic temperature and high super-hydrophilic modification efficiency; injecting the micro water mist generated by the micro water mist supply device into the micro water mist channel (5);
specifically, parameters such as gas flow, pressure, driving voltage and the like are optimized by adopting a proper plasma driving power supply and a proper discharge structure, micro cold plasma with the diameter of 1-500 mu m is generated, and the micro defects between the profiling polishing head and the KDP surface are modified into the super-hydrophilic surface in real time.
And step five, starting the machine tool, and carrying out profiling deliquescence polishing repair on the surface of the KDP to be repaired until the repair process is completed.
It needs to be further explained that the liquid used by the micro water mist adopts deionized water, the adjustment of the water content is realized by controlling the supply flow of the micro water mist and the gap between the profiling polishing head and the workpiece, the deliquescence rate is accurately regulated and controlled, and the negative pressure device is started to limit trace water in the profiling deliquescence area, so that the controllable profiling deliquescence is realized.
And step six, closing all the devices, taking out the KDP crystal after the micro-defect repair is completed, and placing the KDP crystal in a dry and dust-free area after post-treatment such as gas jet drying.
The invention also provides a repairing method of the KDP surface micro-defect profiling deliquescence repairing device, which is characterized in that the KDP surface to be repaired is modified into the super-hydrophilic surface in real time by utilizing the micro cold plasma, so that micro water mist is uniformly paved and aged in the area, in order to limit the super-hydrophilic modification area and the micro water mist paved and aged area in the area to be repaired, the diffused micro cold plasma and the diffused micro water mist are absorbed and removed through negative pressure, the micro defect on the KDP surface to be repaired is accurately identified and positioned through a machine vision system, and an auxiliary decision is provided for the selection of the profiling polishing head according to the defect type. Thereby solving the problems of small scale ripple on the deliquesced surface, low efficiency, uncontrollable deliquesced area and the like of the traditional deliquescent method.
The invention has the following beneficial effects: the positioning of micro defects with micrometer to millimeter scale on KDP surface and the tool setting of the profiling polishing head are realized through a machine vision system, the acquired image is processed by adopting a deep learning method, the precise identification of the micro defects is realized, and the selection of the profiling polishing head is determined in an auxiliary manner according to the category and scale of the micro defects. Meanwhile, by utilizing the principle of super-hydrophilic modification of the micro cold plasma, after accurate tool setting, the copying polishing head is aligned with the surface micro-defects of KDP, the micro-defect area is subjected to copying super-hydrophilic modification by the micro cold plasma, the injected micro-water mist is uniformly paved between the copying polishing head and the area to be repaired, the deliquescence rate and the area are controllable, the super-hydrophilic modification area and the micro-water mist paved area are limited, the diffused micro cold plasma and the micro-water mist are subjected to negative pressure absorption through a negative pressure hole on a connecting structure, and an ideal spherical or Gaussian curved surface can be obtained after the micro-defects are repaired.
While embodiments of the invention have been described above, it is not intended to be limited to the details shown herein, and to the particular embodiments shown, but it is to be understood that all changes and modifications that come within the spirit and scope of the invention are desired to be protected by the teachings herein.

Claims (7)

1. A KDP surface microdefect profiling deliquescence repair device is characterized by comprising a profiling polishing head (8) and a machine vision system (7); a micro water mist channel (5) and a micro cold plasma channel (6) are formed in the middle of the profiling polishing head (8), and a plurality of negative pressure holes (4) are formed in the periphery of the profiling polishing head (8); the negative pressure hole (4) is communicated with a negative pressure device (3);
the machine vision system (7) is used for identifying and locating microdefects on the surface of the KDP crystal (1);
the micro cold plasma channel (6) is used for introducing micro cold plasma to carry out super-hydrophilic modification on the micro defects of the KDP crystal (1);
the micro water mist channel (5) is used for introducing micro water mist to deliquesce the micro defects on the surface of the KDP crystal (1) subjected to super-hydrophilic modification;
the negative pressure hole (4) is used for forming negative pressure so as to limit the spreading of the micro cold plasma and the micro water mist in the aging area; the machine vision system (7) collects microdefect patterns on the surface of the KDP crystal (1) as training data, and a microdefect identification model is constructed by adopting a deep learning method; then, comparing the acquired KDP surface image to be repaired with the micro-defects with training data, constructing the mapping relation between the micro-defect type, the micro-defect scale and the copying polishing head and the repair contour, and assisting in deciding the selection scheme of the shape and the width-depth ratio of the copying polishing head to realize the identification and the positioning of the micro-defects and the selection of the copying polishing head; during repair, after accurate tool setting is realized, micro water mist and micro cold plasma enter a profiling polishing head corresponding to a repair contour through the micro water mist channel and the micro cold plasma channel, and are conveyed to a micro defect to-be-repaired interface of the KDP crystal (1) for repair.
2. The KDP surface microdefect profiling deliquescence repair device according to claim 1, wherein the machine vision system (7) is further adapted to determine the shape and size of the selected profiling polishing head (8) and the vacuum value of each vacuum hole (4) based on the shape of microdefects on the surface of the KDP crystal (1).
3. The KDP surface microdefect profiling deliquescence repair device according to claim 1, wherein the profiling polishing head (8) is mounted on a machine tool through a connection structure (2).
4. The KDP surface microdefect profiling deliquescence repair device according to claim 1, wherein the microdefects of the KDP crystal (1) surface comprise micro-pits, bumps, cracks, scratches, fractures and burns.
5. The KDP surface microdefect profiling deliquescence repair device of claim 1, wherein the mapping relationship is obtained by: firstly, a machine vision system (7) acquires the shape contour of the KDP surface microdefect to be repaired, and the microdefect type is determined; because the depths of the areas to be repaired are different due to different types of defects, a series of profiling polishing heads taking the width-depth ratio as the dividing requirement are designed according to different defect types; after the micro-defect type is determined, a machine vision system is used for fitting to obtain a minimum circumscribed circle of the shape outline of the micro-defect, and finally, spherical and Gaussian curved surface profiling polishing heads with the same specification are selected according to the size of the micro-defect type and the circumscribed circle of the area to be repaired, so that the repairing area of the KDP crystal is minimized.
6. The profiling deliquescence repair device for the KDP surface microdefects, as claimed in claim 5, wherein when the width-to-depth ratio of the KDP surface microdefects to be repaired is between 5 and 10, a spherical profiling polishing head is selected; selecting a Gaussian profiling polishing head when the width-depth ratio of the KDP surface micro-defects to be repaired is more than 10; the parameters of the Gaussian profiling polishing head comprise a maximum diameter, a median diameter and an arc diameter, and the scale range of the micro defects on the KDP surface to be repaired is 10 mu m-2 mm magnitude.
7. The profiling deliquescence repair device for the KDP surface micro-defects as claimed in claim 1, wherein the fine cold plasma channel (6) is communicated with a fine cold plasma supply device; the micro water mist channel (5) is communicated with a micro water mist supply device; the micro-fine cold plasma channel (6) utilizes the micro-fine cold plasma to carry out real-time super-hydrophilic modification between the KDP surface micro-defect and the profiling polishing head, and the micro-defect interface after the super-hydrophilic modification absorbs micro-water mist to realize profiling deliquescence; the moisture content is adjusted and controlled by controlling the supply flow of the micro water mist and the gap between the profiling polishing head and the workpiece, and the trace moisture is limited in a profiling deliquescence area by the negative pressure device, so that controllable profiling deliquescence is realized.
CN202111311595.9A 2021-11-08 2021-11-08 KDP surface microdefect profiling deliquescence repair device and method Active CN114055322B (en)

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CN102615555B (en) * 2012-04-16 2014-02-05 大连理工大学 Kindle direct publishing (KDP) crystal micro-nano hygroscopic ultraprecision polishing method based on ultrasonic atomization moisture
CN102765044B (en) * 2012-07-30 2015-03-18 中国人民解放军国防科学技术大学 Deterministic local physical deliquescing device capable of being applied to polishing KDP (potassium dihydrogen phosphate) crystal as well as polishing method thereof
RU2550877C2 (en) * 2013-09-23 2015-05-20 федеральное государственное бюджетное научное учреждение "Научно-исследовательский радиофизический институт" Method for growting water-soluble kalium dihydrophosphate (kdp) monocrystals
CN105364640B (en) * 2015-11-19 2017-09-05 浙江工业大学 A kind of chemical mechanical classification composite manufacturing method of micro- semi-ring cavity plate array
CN110666598B (en) * 2019-10-14 2021-08-06 湖南大学 Plasma modified liquid film contact deliquescence polishing device and polishing method
CN112139859A (en) * 2020-09-21 2020-12-29 大连理工大学 Method for anhydrous polishing of KDP crystal

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