CN114019227A - Turntable type microwave power detection system - Google Patents
Turntable type microwave power detection system Download PDFInfo
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- CN114019227A CN114019227A CN202111312297.1A CN202111312297A CN114019227A CN 114019227 A CN114019227 A CN 114019227A CN 202111312297 A CN202111312297 A CN 202111312297A CN 114019227 A CN114019227 A CN 114019227A
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- cantilever beam
- substrate
- microwave power
- detection system
- power detection
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- 238000001514 detection method Methods 0.000 title claims abstract description 20
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 238000012360 testing method Methods 0.000 claims abstract description 15
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 5
- 230000008859 change Effects 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R21/00—Arrangements for measuring electric power or power factor
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses a turntable type microwave power detection system, which comprises: the surface of the substrate is provided with a signal wire, the top of the signal wire is provided with a first cantilever beam, a second cantilever beam and a third cantilever beam, one ends of the first cantilever beam, the second cantilever beam and the third cantilever beam are fixedly connected with the substrate, the test electrodes are arranged on the surface of the substrate, and the number of the test electrodes is three. This carousel formula microwave power detecting system, the in-process that second cantilever beam and third cantilever beam drop-down, test electrode and first cantilever beam, electric capacity between second cantilever beam and the third cantilever beam can change, thereby the staff can be more convenient amplitude of measuring signal power through measuring the change of electric capacity, through first cantilever beam, the length and width proportion's of the different proportions of second cantilever beam and third cantilever beam difference, make first cantilever beam, second cantilever beam and third cantilever beam resonant frequency are different, thereby can detect wideer microwave signal.
Description
Technical Field
The invention relates to the technical field of microwave power detection systems, in particular to a rotary disc type microwave power detection system.
Background
The microwave power detection system is a device for detecting microwave power, can effectively measure the size of the microwave power, and can detect the microwave power by introducing microwaves into a data line of the device when the device is used.
For example, patent cn201610567136.x discloses a high-precision microwave power detection system based on a cantilever beam cascade structure, which uses gallium arsenide as a substrate, and a coplanar waveguide transmission line and four MEMS cantilever beams with different lengths are designed on the substrate: when the microwave power to be measured is small, only the longer MEMS cantilever beam arm is pulled down due to the small electrostatic force.
This prior art solution also presents the following problems when in use:
the microwave signal which is wider can not be detected according to the requirement, so that the equipment can be matched with various suitable detection environments, and the application range of the equipment is wider.
Improvements are needed to address the above issues to meet market demands.
Disclosure of Invention
The invention aims to provide a turntable type microwave power detection system to solve the problems that a wider microwave signal cannot be detected according to requirements, equipment can be matched with various appropriate detection environments, and the application range of the equipment is wider in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: a rotating disk microwave power detection system comprising:
the surface of the substrate is provided with a signal wire, the top of the signal wire is provided with a first cantilever beam, a second cantilever beam and a third cantilever beam, and one ends of the first cantilever beam, the second cantilever beam and the third cantilever beam are fixedly connected with the substrate;
the testing electrodes are arranged on the surface of the substrate, the number of the testing electrodes is three, and the tops of the three testing electrodes are respectively provided with a first cantilever beam, a second cantilever beam and a third cantilever beam.
Preferably, the substrate is made of gallium arsenide, the overlooking section of the joint of the signal line and the substrate is in an inverted U-shaped structure, and the substrate is made of gallium arsenide through the structure.
Preferably, the aspect ratio of the first cantilever beam is 4:1, and the included angles of the joints of the first cantilever beam and the main view cross section of the substrate are perpendicular to each other, and by the structure, the aspect ratio of the first cantilever beam is 4: 1.
Preferably, the aspect ratio of the second cantilever beam is 3:1, and the included angles of the joints of the second cantilever beam and the main view cross section of the substrate are mutually perpendicular, and by the structure, the aspect ratio of the second cantilever beam is 3: 1.
Preferably, the aspect ratio of the third cantilever beam is 2:1, and the included angles of the joints of the third cantilever beam and the main view cross section of the substrate are mutually perpendicular, and by the structure, the aspect ratio of the third cantilever beam is 2: 1.
Compared with the prior art, the invention has the beneficial effects that: the resonant frequencies of the first cantilever beam, the second cantilever beam and the third cantilever beam of the turntable type microwave power detection system are different, so that wider microwave signals can be detected.
Give signal line transmission microwave power, the signal line can produce the effect of electrostatic force this moment, first cantilever beam can be pulled down to electrostatic force, second cantilever beam and third cantilever beam, work as first cantilever beam, the in-process that second cantilever beam and third cantilever beam are pulled down, test electrode and first cantilever beam, electric capacity between second cantilever beam and the third cantilever beam can change, thereby the staff can be more convenient measurement signal power's amplitude through the change of measuring electric capacity, through first cantilever beam, the difference of the length-width ratio of the different proportions of second cantilever beam and third cantilever beam, make first cantilever beam, second cantilever beam and third cantilever beam resonant frequency are different, thereby can detect wideer microwave signal.
Drawings
FIG. 1 is a schematic front view of the present invention;
FIG. 2 is a schematic side view of the present invention;
fig. 3 is a schematic diagram of the principle of the present invention.
In the figure: 1. a substrate; 2. a signal line; 3. a first cantilever beam; 4. a second cantilever beam; 5. a third cantilever beam; 6. and testing the electrode.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: a rotating disk microwave power detection system comprising:
the device comprises a substrate 1, a signal wire 2 is installed on the surface of the substrate 1, a first cantilever beam 3, a second cantilever beam 4 and a third cantilever beam 5 are arranged at the top of the signal wire 2, one ends of the first cantilever beam 3, the second cantilever beam 4 and the third cantilever beam 5 are fixedly connected with the substrate 1, three test electrodes 6 are installed on the surface of the substrate 1, and the tops of the three test electrodes 6 are respectively provided with the first cantilever beam 3, the second cantilever beam 4 and the third cantilever beam 5;
the substrate 1 is made of gallium arsenide materials, the overlooking cross section of the joint of the signal line 2 and the substrate 1 is of an inverted U-shaped structure, the length-width ratio of the first cantilever beam 3 is 4:1, the included angle of the joint of the first cantilever beam 3 and the main view cross section of the substrate 1 is vertical to each other, the length-width ratio of the second cantilever beam 4 is 3:1, the included angle of the joint of the second cantilever beam 4 and the main view cross section of the substrate 1 is vertical to each other, the length-width ratio of the third cantilever beam 5 is 2:1, the included angle of the joint of the third cantilever beam 5 and the main view cross section of the substrate 1 is vertical to each other, microwave power is transmitted to the signal line 2, the signal line 2 can generate electrostatic force, the electrostatic force can pull down the first cantilever beam 3, the second cantilever beam 4 and the third cantilever beam 5, and in the process that the first cantilever beam 3, the second cantilever beam 4 and the third cantilever beam 5 are pulled down, the test electrode 6 and the first cantilever beam 3 are in the process that the first cantilever beam 3, the second cantilever beam 4 and the third cantilever beam 5 are pulled down in the process of pulling down, The electric capacity between second cantilever beam 4 and the third cantilever beam 5 can change to the staff can be more convenient amplitude of measuring signal power through the change of measuring the electric capacity, through the difference of the length and width proportion of first cantilever beam 3, second cantilever beam 4 and the different proportion of third cantilever beam 5, make first cantilever beam 3, second cantilever beam 4 and the different resonant frequency of third cantilever beam 5, thereby can detect wideer microwave signal.
In summary, the following steps: as shown in fig. 1-3, when the turntable type microwave power detection system is used, firstly, microwave power is transmitted to the signal line 2, at this time, the signal line 2 generates electrostatic force, the electrostatic force pulls down the first cantilever beam 3, the second cantilever beam 4 and the third cantilever beam 5, when the first cantilever beam 3, the second cantilever beam 4 and the third cantilever beam 5 are pulled down, capacitances between the test electrode 6 and the first cantilever beam 3, the second cantilever beam 4 and the third cantilever beam 5 are changed, so that a worker can more conveniently measure the amplitude of the signal power by measuring the change of the capacitance, and the resonance frequencies of the first cantilever beam 3, the second cantilever beam 4 and the third cantilever beam 5 are different by the difference of the length-width ratios of the first cantilever beam 3, the second cantilever beam 4 and the third cantilever beam 5 in different ratios, so as to detect a wider microwave signal, this is the characteristic of this carousel formula microwave power detection system.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. A carousel formula microwave power detection system characterized in that includes:
the device comprises a substrate (1), wherein a signal wire (2) is installed on the surface of the substrate (1), a first cantilever beam (3), a second cantilever beam (4) and a third cantilever beam (5) are arranged at the top of the signal wire (2), and one ends of the first cantilever beam (3), the second cantilever beam (4) and the third cantilever beam (5) are fixedly connected with the substrate (1);
the testing electrode (6) is arranged on the surface of the substrate (1), the number of the testing electrodes (6) is three, and the tops of the three testing electrodes (6) are respectively provided with a first cantilever beam (3), a second cantilever beam (4) and a third cantilever beam (5).
2. The turntable type microwave power detection system according to claim 1, wherein the substrate (1) is made of gallium arsenide, and the top-view cross section of the connection between the signal line (2) and the substrate (1) is in an inverted "u" -shaped structure.
3. The rotating disc type microwave power detection system according to claim 1, wherein the length-to-width ratio of the first cantilever beam (3) is 4:1, and the included angles of the joints of the first cantilever beam (3) and the main view cross section of the substrate (1) are perpendicular to each other.
4. The rotating disc type microwave power detection system according to claim 1, wherein the length-width ratio of the second cantilever beam (4) is 3:1, and the included angles of the joints of the second cantilever beam (4) and the main view cross section of the substrate (1) are perpendicular to each other.
5. The rotating disc type microwave power detection system according to claim 1, wherein the length-width ratio of the third cantilever beam (5) is 2:1, and the included angles of the joints of the third cantilever beam (5) and the main view cross section of the substrate (1) are perpendicular to each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111312297.1A CN114019227A (en) | 2021-11-08 | 2021-11-08 | Turntable type microwave power detection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111312297.1A CN114019227A (en) | 2021-11-08 | 2021-11-08 | Turntable type microwave power detection system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114019227A true CN114019227A (en) | 2022-02-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111312297.1A Pending CN114019227A (en) | 2021-11-08 | 2021-11-08 | Turntable type microwave power detection system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114019227A (en) |
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2021
- 2021-11-08 CN CN202111312297.1A patent/CN114019227A/en active Pending
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Application publication date: 20220208 |