CN114018840A - Weak measuring device for detecting concentration of micro-channel liquid - Google Patents

Weak measuring device for detecting concentration of micro-channel liquid Download PDF

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Publication number
CN114018840A
CN114018840A CN202111307693.5A CN202111307693A CN114018840A CN 114018840 A CN114018840 A CN 114018840A CN 202111307693 A CN202111307693 A CN 202111307693A CN 114018840 A CN114018840 A CN 114018840A
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China
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liquid
test
arm chip
groove
micro
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林强
史胜南
李东梅
翁超凡
严勇
李德钊
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Zhejiang University of Technology ZJUT
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Zhejiang University of Technology ZJUT
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Priority to CN202111307693.5A priority Critical patent/CN114018840A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts
    • G01N2021/0112Apparatus in one mechanical, optical or electronic block

Abstract

The invention discloses a weak measuring device for detecting the concentration of liquid in a micro-channel. The device comprises a reference arm chip, a test arm chip, an SLD light source, a spectrometer and an optical element. After passing through a Gaussian filter, laser emitted by the SLD light source is divided into horizontal polarized light and vertical polarized light by a front polarization beam splitter prism after passing through a front selection polarizing plate; the horizontal polarized light penetrates through a reference liquid light-transmitting area of the reference arm chip and is reflected to the rear polarization beam splitter prism by the reflector; after being reflected by a reflector, the vertical polarized light passes through a test liquid light-transmitting area of the test arm chip and is incident to a rear polarization beam splitter prism; the rear polarization beam splitter prism couples the two polarization components into a beam of light, which is received by the spectrometer through the rear selective polarizer. The Mach Zehnder interferometer is combined with the micro-channel structure, the change of the concentration of the solution in the micro-channel is detected by comparing the change of the optical refractive index of the solution with different concentrations, and the method is more convenient and accurate than the traditional measuring method.

Description

Weak measuring device for detecting concentration of micro-channel liquid
Technical Field
The invention belongs to the field of on-chip high-precision liquid concentration detection, and particularly relates to a micro-channel liquid concentration weak measurement device by using a Mach-Zehnder interferometer (Mach-Zehnder interferometer).
Background
With the continuous development and progress of scientific technology, the requirements for solution concentration detection and analysis technology are higher and higher in the fields of biomolecule analysis, drug analysis and detection, biological living body component reaction and the like. In the aspects of life science and medical diagnosis, not only high-precision quantitative analysis but also dynamic process observation of some reactions are required, and the researches are not independent of the detection of the biosensor. The sensors can be classified into electrochemical biosensors, optical biosensors, and acoustic biosensors according to the kind of the analysis signal. Among them, the optical-based non-contact, non-destructive, non-labeling and high-sensitivity biosensor is of great significance for the research in the field of biological detection.
The traditional optical biosensor comprises an optical fiber evanescent wave sensor, a Surface Plasmon Resonance (SPR) sensor, a fluorescence quenching sensor, an optical fiber grating sensor and the like, and has the advantages of no electromagnetic interference, acid and alkali corrosion resistance, no need of a reference sensor, probe structure, capability of miniaturization and the like, but the sensors have the problems of complex manufacture and high cost. Besides, other sensors except the grating type optical fiber sensor are all light intensity detection type sensors, and are easily affected by light sources, optical fiber connection loss and the like.
Disclosure of Invention
The invention aims to provide a weak measuring device for detecting the concentration of liquid in a micro-channel, which has the characteristics of high detection precision, short detection time, convenience in observation and the like.
The device comprises a reference arm chip, a test arm chip, an SLD light source, a spectrometer and an optical element; the optical element comprises a Gaussian filter, two selective polarizing plates, two polarization splitting prisms and two reflecting mirrors. The specific settings are as follows:
after passing through a Gaussian filter, the laser emitted by the SLD light source is subjected to front selection through a front selection polarizing film, and the front polarization beam splitter prism divides the front selected laser into horizontal polarized light and vertical polarized light; the horizontally polarized light penetrates through a reference liquid light-transmitting area of the reference arm chip and is reflected to the rear polarization beam splitter prism by the first reflector; after being reflected by the second reflector, the vertically polarized light passes through the test liquid light-transmitting area of the test arm chip and is incident to the rear polarization beam splitter prism; the rear polarization beam splitter prism couples the two polarization components into a beam of light, the rear selection is carried out through the rear selection polaroid, and the emergent light is received by the spectrometer.
The reference arm chip comprises a reference arm chip substrate and a reference arm chip cover plate. A reference liquid micro-channel groove is processed on the reference arm chip substrate and comprises a reference liquid inflow section, a reference liquid slow flow section and a reference liquid outflow section, wherein the reference liquid slow flow section is a snake-shaped channel; the end part of the reference liquid inflow section is provided with a circular reference liquid inflow groove, the end part of the reference liquid outflow section is provided with a circular reference liquid outflow groove, and the middle part of the reference liquid outflow section is locally expanded to form a reference liquid light-transmitting area. The reference arm chip cover plate corresponds to the reference arm chip substrate in shape, two through holes are processed, namely a reference liquid inflow hole and a reference liquid outflow hole, the reference liquid inflow hole corresponds to the reference liquid inflow groove in position and is identical in shape, and the reference liquid outflow hole corresponds to the reference liquid outflow groove in position and is identical in shape. The reference arm chip substrate is tightly combined with the reference arm chip cover plate, the reference liquid inflow hole and the reference liquid outflow groove form a reference liquid injection hole, the reference liquid outflow hole and the reference liquid outflow groove form a reference liquid discharge hole, and the reference liquid micro-channel groove and the reference arm chip cover plate form a reference liquid micro-channel.
The test arm chip comprises a test arm chip substrate and a test arm chip cover plate. A test liquid micro-channel groove and a solvent micro-channel groove are processed on the chip substrate of the test arm; the test solution micro-channel groove comprises a test solution inflow section, a test solution slow flow section and a test solution outflow section, wherein the test solution slow flow section is a snake-shaped channel; the end part of the test liquid inflow section is provided with a circular test liquid inflow groove, the end part of the test liquid outflow section is provided with a circular test liquid outflow groove, and the middle part of the test liquid outflow section is locally expanded to form a test liquid light-transmitting area; one end of the solvent micro-channel groove is provided with a solvent inflow groove, and the other end of the solvent micro-channel groove is intersected with the test solution inflow section of the test solution micro-channel groove. The testing arm chip cover plate corresponds to the testing arm chip substrate in shape, three through holes are processed, namely a testing liquid inflow hole, a solvent inflow hole and a testing liquid outflow hole, the testing liquid inflow hole corresponds to the testing liquid inflow groove in position and is identical in shape, the solvent inflow hole corresponds to the solvent inflow groove in position and is identical in shape, and the testing liquid outflow hole corresponds to the testing liquid outflow groove in position and is identical in shape. The arm chip substrate is tightly combined with the test arm chip cover plate, the test liquid inflow hole and the test liquid inflow groove form a test liquid injection port, the solvent inflow hole and the solvent inflow groove form a solvent injection port, the test liquid outflow hole and the test liquid outflow groove form a test liquid discharge port, the test liquid micro-channel groove and the test arm chip cover plate form a test liquid micro-channel, and the solvent micro-channel groove and the test arm chip cover plate form a solvent micro-channel.
The SLD light source emits laser with the central wavelength of 840 nm.
The reference arm chip substrate and the test arm chip substrate are made of quartz, glass or polydimethylsiloxane.
The reference arm chip cover plate and the test arm chip cover plate are made of polydimethylsiloxane.
The Mach Zehnder interferometer and the micro-channel structure are combined, the weak value amplification principle of quantum weak measurement is utilized, the change of the solution concentration in the micro-channel is detected by comparing the change of the light refractive index of the solution with different concentrations, and the application of the weak measurement detection method in the solution concentration detection is further realized. The micro-channel structure is formed by processing quartz, glass or PDMS (polydimethylsiloxane) which is convenient for micro-nano processing as a substrate material through photoetching and reverse molding, and combining a cover plate and the substrate together by using the PDMS as a cover plate material to form the required micro-channel structure.
In the mach zehnder system, a laser having a central wavelength of 840nm is used as a light source. The light emitted by the light source is pre-selected after being filtered by a gaussian filter. Incident light passes through a front selective polarizer, and after preparation of a front selective state, horizontal polarized light (H) and vertical polarized light (V) are completely separated by a front polarization beam splitter Prism (PBS), wherein H is transmitted by the PBS and then propagates in the horizontal direction, and V is reflected by the PBS and then propagates in the vertical direction. And respectively placing a plane mirror in the two propagation paths for reflection, so that the incident light and the reflected light form a right angle until the incident light and the reflected light are propagated to the rear polarization beam splitter prism for recoupling, coupling the two polarization components into a beam of light for propagation, and performing post-selection by using a second polarizing film. Finally, the emergent light is received by the spectrometer and is subjected to spectral analysis by a computer program.
In order to realize the measurement of the concentration of the solution to be measured, two micro-channel structures are added in the system and are respectively arranged on two arms of the system, wherein one micro-channel structure is used as a reference arm, and the other micro-channel structure is used as a measurement arm. In the measurement, firstly, carrying out primary calibration, introducing a solution with known concentration into a micro-channel structure arranged on a reference arm, introducing two solutions with known concentration and a certain proportion into a micro-channel arranged on a measurement arm for mixing (the liquid level height ensures that light energy passes through water), measuring the change values of the refractive index under different concentrations, and calibrating the relation between the concentration and the change of the refractive index; and then, carrying out second measurement, keeping the reference arm unchanged, introducing a solution with unknown concentration into the measurement arm, obtaining the corresponding change of the refractive index through measurement, comparing the refractive index with the refractive index obtained in calibration measurement, and obtaining the concentration of the solution to be measured through calculation.
According to the invention, the micro-channel structure and the Mach Zehnder weak measurement system are combined, incident light reaches the micro-channel structure through the light path, and when passing through the micro-channel in the micro-channel structure, the optical path difference is generated due to the concentration change in the micro-channel, so that the phase difference is caused, the absorption spectrum change is further caused, and the accurate measurement of the concentration is finally obtained. Compared with the traditional method, the method has the advantages that the concentration detection by using the frequency domain weak measurement system based on the Mach Zehnder interferometer is more convenient to operate and directly observe, and the resolution ratio of the glucose concentration detected by using the weak measurement scheme is better than that of the traditional interference method through comparison of actual experimental data.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic diagram of a reference arm chip of FIG. 1;
FIG. 3 is a schematic diagram of a chip structure of the test arm shown in FIG. 1.
Detailed Description
The present invention is described in detail below with reference to the attached drawings, and it should be noted that the described embodiments are only for understanding the present invention and do not have any limiting effect.
A weak measuring device for detecting the concentration of micro-channel liquid comprises a reference arm chip 1, a test arm chip 2, an SLD light source 3, a spectrometer 4 and an optical element, wherein the optical element comprises a Gaussian filter, two selective polarizing plates, two polarization splitting prisms and two reflecting mirrors. The specific settings are as follows:
the SLD light source 3 emits laser with the central wavelength of 840nm, the laser passes through a Gaussian filter 5 and then is subjected to front selection through a front selection polaroid 6, and a front polarization beam splitter prism 7 divides the laser subjected to front selection into horizontal polarized light and vertical polarized light; the horizontally polarized light passes through the light-transmitting area of the reference arm chip 1 and is reflected to a rear polarization beam splitter prism 9 by a first reflector 8; after being reflected by the second reflecting mirror 10, the vertically polarized light passes through the light-transmitting area of the test arm chip 2 and enters the rear polarization beam splitter prism 9; the rear polarization beam splitter prism 9 couples the two polarization components into a beam of light, the light is selected through the rear selection polarizing film 11, and the emergent light is received by the spectrometer 4 for spectral analysis.
As shown in fig. 1, the reference arm chip 1 includes a reference arm chip base 101 and a reference arm chip cover plate 102. A reference liquid micro-channel groove is processed on the reference arm chip substrate 101, and the reference liquid micro-channel groove includes a reference liquid inflow section 103, a reference liquid slow flow section 104, and a reference liquid outflow section 105, wherein the reference liquid slow flow section 104 is a serpentine channel. The end of the reference liquid inflow section 103 is provided with a circular reference liquid inflow groove 106, the end of the reference liquid outflow section 105 is provided with a circular reference liquid outflow groove 107, and the middle of the reference liquid outflow section 105 is partially expanded to form a reference liquid light transmission area 108. The reference arm chip cover plate 102 corresponds to the reference arm chip substrate 101 in shape, and is provided with two through holes, namely a reference liquid inflow hole 109 and a reference liquid outflow hole 110, wherein the reference liquid inflow hole 109 corresponds to the reference liquid inflow groove 106 in position and has the same shape, and the reference liquid outflow hole 110 corresponds to the reference liquid outflow groove 107 in position and has the same shape. The reference arm chip substrate 101 is tightly combined with the reference arm chip cover plate 102, the reference liquid inflow hole 109 and the reference liquid inflow groove 106 form a reference liquid inflow hole, the reference liquid outflow hole 110 and the reference liquid outflow groove 107 form a reference liquid outflow hole, and the reference liquid microchannel groove and the reference arm chip cover plate form a reference liquid microchannel.
As shown in fig. 2, test arm chip 2 includes a test arm chip base 201 and a test arm chip cover 202. The test arm chip substrate 201 is processed with a test liquid micro flow channel groove and a solvent micro flow channel groove 203. The test solution micro-channel groove comprises a test solution inflow section 204, a test solution slow flow section 205 and a test solution outflow section 206, wherein the test solution slow flow section 205 is a snake-shaped channel; the end part of the test liquid inflow section 204 is provided with a circular test liquid inflow groove 207, the end part of the test liquid outflow section 206 is provided with a circular test liquid outflow groove 208, and the middle part of the test liquid outflow section 206 is locally expanded to form a test liquid light-transmitting area 209; one end of the solvent micro flow channel groove 203 is provided with a solvent inflow groove 210, and the other end is intersected with the test solution inflow section 204 of the test solution micro flow channel groove. The test arm chip cover plate 202 corresponds to the test arm chip substrate 201 in shape, and is provided with three through holes, namely a test solution inlet hole 211, a solvent inlet hole 212 and a test solution outlet hole 213, wherein the test solution inlet hole 211 corresponds to the test solution inlet groove 207 in position and has the same shape, the solvent inlet hole 212 corresponds to the solvent inlet groove 210 in position and has the same shape, and the test solution outlet hole 213 corresponds to the test solution outlet groove 208 in position and has the same shape. The arm chip substrate 201 is tightly bonded to the test arm chip cover 202, the test solution inlet 109 and the test solution inlet 106 form a test solution inlet, the solvent inlet 212 and the solvent inlet 210 form a solvent inlet, the test solution outlet 213 and the test solution outlet 208 form a test solution outlet, the test solution microchannel groove and the test arm chip cover form a test solution microchannel, and the solvent microchannel groove and the test arm chip cover form a solvent microchannel.
The reference arm chip and the test arm chip are prepared as follows:
the micro-channel groove with the same shape is processed on two same substrates and comprises an inflow section, a slow flow section and an outflow section, wherein the slow flow section is a snake-shaped channel. Then, a circular inflow groove is formed at the end of the inflow section, and a circular outflow groove is formed at the end of the outflow section. The depth and the width of the micro-channel groove are both 0.05-0.5 mm, the depth of the inflow groove and the outflow groove is the same as that of the micro-channel groove, and the caliber is 1-10 mm; the middle part of the outflow section is locally expanded to form a light transmission area. The substrate material is selected from quartz, glass or PDMS (polydimethylsiloxane).
One of the substrates was selected as the reference arm chip substrate. And processing a section of micro-channel groove on the other substrate, wherein one end of the section of micro-channel groove is provided with a solvent inflow groove, the other end of the section of micro-channel groove is intersected with the inflow section of the original micro-channel groove, and the substrate is used as a test arm chip substrate.
And two through holes are respectively processed on the two cover plates corresponding to the shape of the substrate and respectively used as an inflow hole and an outflow hole, the inflow hole corresponds to the inflow groove in position and has the same shape, and the outflow hole corresponds to the outflow groove in position and has the same shape. PDMS is selected as the cover plate material.
One of the cover plates is selected as the reference arm chip cover plate. And processing a through hole on the other cover plate as a solvent inflow hole, wherein the solvent inflow hole corresponds to the solvent inflow groove in position and has the same shape as the solvent inflow groove, and the cover plate is used as a test arm chip cover plate.
And tightly combining the reference arm chip substrate and the reference arm chip cover plate together to form a reference arm chip, wherein the reference arm chip is provided with a reference liquid injection port, a reference liquid discharge port, a reference liquid microchannel and a reference liquid light-transmitting area. And tightly combining the substrate of the test arm chip and the cover plate of the test arm chip to form the test arm chip, wherein the test arm chip is provided with a test liquid injection port, a solvent injection port, a test liquid discharge port, a reference liquid microchannel, a solvent microchannel and a reference liquid light-transmitting area.
A frequency domain weak measurement system is built by utilizing a reference arm chip and a test arm chip, and the weak measurement method comprises the following steps:
firstly, calibrating and measuring, specifically: injecting a reference liquid from a reference liquid injection port of the reference arm chip, keeping the injection flow rate constant, discharging the reference liquid from a discharge port through a slow flow section and a light-transmitting area of the microchannel, wherein the reference liquid can be water or a solution with a known concentration, such as NaCl solution; injecting a test solution with the same flow rate as the solution to be tested from a test solution injection port of the test arm chip, keeping the injection flow rate constant, injecting a solvent (such as water for NaCl solution) into the solution to be tested from a solvent injection port, mixing the test solution and the solvent completely, and discharging the mixed solution from a discharge port through a slow flow section and a light-transmitting area of the microchannel; the SLD light source is started, incident light is divided into horizontal polarized light and vertical polarized light through the front polarization beam splitter prism, two beams of light respectively penetrate through a reference liquid light-transmitting area of the reference arm chip and a test liquid light-transmitting area of the test arm chip, different refractive indexes are generated due to different concentrations, an optical path difference is generated, the two beams of light are coupled into one beam of light through the rear polarization beam splitter prism, and finally emergent light passes through the rear selective polarizer and is received by the spectrometer, and a phase difference is caused due to the generated optical path difference; and adjusting the injection speed of the solvent, namely adjusting the concentration of the test solution passing through the light-transmitting area, and recording the spectral information corresponding to each concentration to finish the concentration calibration of the solution to be tested.
Then, concentration measurements were performed: injecting reference liquid from a reference liquid injection port of the reference arm chip, keeping the same injection flow rate, and discharging the reference liquid from a discharge port through a slow flow section and a light-transmitting area of the microchannel; injecting solution to be tested with unknown concentration into the test arm chip at the same injection speed, and discharging the solution to be tested from the discharge port through the slow flow section and the light-transmitting area of the micro-channel; the corresponding refractive index is obtained through measurement, the refractive index obtained during calibration measurement is compared with the refractive index to obtain the change of the refractive index, and the concentration of the unknown solution to be measured is obtained through calculation.

Claims (7)

1. A weak measuring device for micro-channel liquid concentration detection is characterized by comprising a reference arm chip (1), a test arm chip (2), an SLD light source (3), a spectrometer (4) and an optical element; the optical element comprises a Gaussian filter, two selective polarizing plates, two polarization splitting prisms and two reflectors; the specific settings are as follows:
after passing through a Gaussian filter (5), laser emitted by an SLD light source (3) is subjected to front selection through a front selection polarizing film (6), and the front polarization beam splitter prism (7) splits the front selected laser into horizontal polarized light and vertical polarized light; the horizontally polarized light passes through a reference liquid light transmission area of the reference arm chip (1) and is reflected to a rear polarization beam splitter prism (9) by a first reflector (8); after being reflected by a second reflecting mirror (10), the vertically polarized light passes through a test liquid light-transmitting area of the test arm chip (2) and enters a rear polarization beam splitter prism (9); the rear polarization beam splitter prism (9) couples the two polarization components into a beam of light, the rear selection is carried out through the rear selection polaroid (11), and the emergent light is received by the spectrometer (4);
the reference arm chip (1) comprises a reference arm chip substrate (101) and a reference arm chip cover plate (102); a reference liquid micro-channel groove is processed on the reference arm chip substrate (101), and comprises a reference liquid inflow section (103), a reference liquid slow flow section (104) and a reference liquid outflow section (105), wherein the reference liquid slow flow section (104) is a serpentine channel; a circular reference liquid inlet groove (106) is formed in the end portion of the reference liquid inflow section (103), a circular reference liquid outlet groove (107) is formed in the end portion of the reference liquid outlet section (105), and the middle of the reference liquid outlet section (105) is locally expanded to form a reference liquid light transmission area (108); the reference arm chip cover plate (102) corresponds to the reference arm chip substrate (101) in shape, two through holes are processed, namely a reference liquid inflow hole (109) and a reference liquid outflow hole (110), the reference liquid inflow hole (109) corresponds to the reference liquid inflow groove (106) in position and has the same shape, and the reference liquid outflow hole (110) corresponds to the reference liquid outflow groove (107) in position and has the same shape; the reference arm chip substrate (101) is tightly combined with the reference arm chip cover plate (102), the reference liquid inflow hole (109) and the reference liquid inflow groove (106) form a reference liquid injection inlet, the reference liquid outflow hole (110) and the reference liquid outflow groove (107) form a reference liquid discharge outlet, and the reference liquid micro-channel groove and the reference arm chip cover plate form a reference liquid micro-channel;
the test arm chip (2) comprises a test arm chip substrate (201) and a test arm chip cover plate (202); a test liquid micro-channel groove and a solvent micro-channel groove (203) are processed on the test arm chip substrate (201); the test solution micro-channel groove comprises a test solution inflow section (204), a test solution slow flow section (205) and a test solution outflow section (206), wherein the test solution slow flow section (205) is a snake-shaped channel; the end part of the test liquid inflow section (204) is provided with a circular test liquid inflow groove (207), the end part of the test liquid outflow section (206) is provided with a circular test liquid outflow groove (208), and the middle part of the test liquid outflow section (206) is locally expanded to form a test liquid light-transmitting area (209); one end of the solvent micro-channel groove (203) is provided with a solvent inflow groove (210), and the other end is intersected with the test solution inflow section (204) of the test solution micro-channel groove; the testing arm chip cover plate (202) corresponds to the testing arm chip substrate (201) in shape, three through holes are processed, namely a testing liquid inflow hole (211), a solvent inflow hole (212) and a testing liquid outflow hole (213), the testing liquid inflow hole (211) corresponds to the testing liquid inflow groove (207) in position and has the same shape, the solvent inflow hole (212) corresponds to the solvent inflow groove (210) in position and has the same shape, and the testing liquid outflow hole (213) corresponds to the testing liquid outflow groove (208) in position and has the same shape; the arm chip substrate (201) is tightly combined with the test arm chip cover plate (202), the test liquid inflow hole (109) and the test liquid inflow groove (106) form a test liquid injection port, the solvent inflow hole (212) and the solvent inflow groove (210) form a solvent injection port, the test liquid outflow hole (213) and the test liquid outflow groove (208) form a test liquid discharge port, the test liquid micro-channel groove and the test arm chip cover plate form a test liquid micro-channel, and the solvent micro-channel groove and the test arm chip cover plate form a solvent micro-channel.
2. A weak measuring device for microchannel liquid concentration detection as set forth in claim 1, wherein: the SLD light source (3) emits laser with the central wavelength of 840 nm.
3. A weak measuring device for microchannel liquid concentration detection as set forth in claim 1, wherein: the reference arm chip substrate (101) and the test arm chip substrate (201) are made of quartz, glass or polydimethylsiloxane.
4. A weak measuring device for microchannel liquid concentration detection as set forth in claim 1, wherein: the reference arm chip cover plate (102) and the test arm chip cover plate (202) are made of polydimethylsiloxane.
5. A weak measuring device for microchannel liquid concentration detection as set forth in claim 1, wherein: the depth and width of the reference liquid micro-channel groove, the test liquid micro-channel groove and the solvent micro-channel groove are all 0.05-0.5 mm.
6. A weak measuring device for microchannel liquid concentration detection as set forth in claim 1, wherein: the reference liquid inflow groove (106) and the reference liquid outflow groove (107) are the same as the reference liquid micro-channel groove in depth, and the caliber is 1-10 mm.
7. A weak measuring device for microchannel liquid concentration detection as set forth in claim 1, wherein: the test solution flows into the groove (207), the test solution outflow groove (208) and the solvent inflow groove (210), the depths of the test solution micro-channel groove and the solvent micro-channel groove are the same, and the caliber is 1-10 mm.
CN202111307693.5A 2021-11-05 2021-11-05 Weak measuring device for detecting concentration of micro-channel liquid Pending CN114018840A (en)

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