CN114002181A - Terahertz super-surface biosensor integrated with spinning terahertz source - Google Patents
Terahertz super-surface biosensor integrated with spinning terahertz source Download PDFInfo
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- CN114002181A CN114002181A CN202111259481.4A CN202111259481A CN114002181A CN 114002181 A CN114002181 A CN 114002181A CN 202111259481 A CN202111259481 A CN 202111259481A CN 114002181 A CN114002181 A CN 114002181A
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- 238000009987 spinning Methods 0.000 title abstract description 13
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 229910052751 metal Inorganic materials 0.000 claims abstract description 15
- 239000002184 metal Substances 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 claims description 9
- 239000011159 matrix material Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 11
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 238000012360 testing method Methods 0.000 abstract description 7
- 238000005516 engineering process Methods 0.000 abstract description 6
- 230000010354 integration Effects 0.000 abstract description 5
- 230000003287 optical effect Effects 0.000 abstract description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 14
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 7
- 229910052742 iron Inorganic materials 0.000 description 7
- 239000003921 oil Substances 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 229910003446 platinum oxide Inorganic materials 0.000 description 6
- 230000005672 electromagnetic field Effects 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 239000003570 air Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000001328 terahertz time-domain spectroscopy Methods 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- SKJCKYVIQGBWTN-UHFFFAOYSA-N (4-hydroxyphenyl) methanesulfonate Chemical compound CS(=O)(=O)OC1=CC=C(O)C=C1 SKJCKYVIQGBWTN-UHFFFAOYSA-N 0.000 description 2
- 230000005355 Hall effect Effects 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 230000005347 demagnetization Effects 0.000 description 2
- 239000003302 ferromagnetic material Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
- G01N21/3586—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation by Terahertz time domain spectroscopy [THz-TDS]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
Abstract
The invention belongs to the technical field of biosensing, relates to a terahertz biosensing technology, and particularly provides a terahertz super-surface biosensor integrated with a spinning terahertz source, wherein a terahertz source composed of a ferromagnetic layer/a non-ferromagnetic layer and a super-surface metal microstructure are respectively integrated on the upper surface and the lower surface of a substrate, and in the test process, terahertz waves emitted by the terahertz source directly reach the surface of the super-surface metal microstructure without passing through a free space, so that the sensitivity of sensing is effectively improved; meanwhile, the spinning terahertz source is simple in structure, and the problem of optical path calibration of the terahertz source of the photoconductive antenna is solved; due to the integration of the low-cost broadband terahertz source, an additional terahertz source is not needed in the test process, so that the test cost is greatly reduced; in addition, the terahertz signal emitted by the terahertz source is convenient to adjust; in conclusion, the terahertz super-surface biosensor integrated with the spinning terahertz source has the advantages of low cost, easiness in integration, high sensitivity and expandability.
Description
Technical Field
The invention belongs to the technical field of biosensing, relates to a terahertz biosensing technology, and particularly provides a terahertz super-surface biosensor integrated with a spinning terahertz source.
Background
With the development of the industries such as biological pharmacy and medical detection, the demand of a biological sensing technology is very large; as a novel spectrum technology, the terahertz technology has the advantage of being unique in the field of biomedical detection, thereby bringing great application prospect of the terahertz biosensing technology. The terahertz super-surface biosensor becomes a hotspot of extensive research due to the advantages of simple sample configuration, simple measurement process, fast response, high sensitivity, capability of detecting trace analytes and the like, and can be used for detecting cells, biomolecules, proteins, various solutions and the like.
The super surface is a two-dimensional artificial electromagnetic material which is composed of artificially designed sub-wavelength structural units and has extraordinary physical properties which natural materials do not have, and the resonance of the super surface can change the distribution of a local electromagnetic field, so that the super surface is very sensitive to a medium on the surface of the microstructure; a single resonance peak, a double resonance peak and a multi-resonance peak of a super surface are commonly used in a terahertz wave band for sensing and detecting, the resonance modes are different, and the sensing sensitivity is also different. However, the popularization of the ultra-surface terahertz biosensor in practical application is greatly limited due to the reasons of high material cost, high processing cost, high requirement on storage environment, high requirement on a pumping source and the like when the broadband terahertz source is used as a necessary component in the use process of the ultra-surface terahertz biosensor; in addition, in the practical application process, the broadband terahertz source and the sensor are separated, and when the terahertz time-domain spectrometer is used for testing, loss exists before the free-space terahertz waves reach the sensor, so that the sensing efficiency is reduced. However, nonlinear crystal terahertz sources cannot be integrated with sensors; although the terahertz source of the photoconductive antenna can be integrated with the sensor, laser needs to be collimated and focused into a micron-sized antenna gap, and the optical path calibration is difficult, so that the practical application of the integrated sensor is limited.
Disclosure of Invention
The invention aims to solve the problems of practical application of a terahertz super-surface biosensor in the prior art, and provides a terahertz super-surface biosensor integrated with a spinning terahertz source, which has the advantages of low cost, easiness in integration, high sensitivity, expandability and the like.
In order to achieve the purpose, the invention adopts the technical scheme that
A terahertz super-surface biosensor integrated with a spin terahertz source, comprising: the sensor comprises a substrate, a sensing microstructure arranged on the upper surface of the substrate, and a non-ferromagnetic layer and a ferromagnetic layer which are sequentially arranged on the lower surface of the substrate; the ferromagnetic layer and the non-ferromagnetic layer form a terahertz source, the terahertz source generates broadband terahertz waves under the irradiation of femtosecond laser pulses, and the terahertz waves sequentially pass through the substrate and the sensing microstructure.
Further, the ferromagnetic layer is made of iron, cobalt or nickel and has a thickness of 1 to 10nm, and the non-ferromagnetic layer is made of platinum, tungsten or palladium and has a thickness of 1 to 10 nm.
Furthermore, the sensing microstructure is composed of a plurality of metal microstructure units arranged in a matrix manner, and the metal microstructure units adopt a cross structure or a circular ring structure.
The invention has the beneficial effects that:
the invention provides a terahertz super-surface biosensor integrated with a spinning terahertz source, wherein a terahertz source composed of a ferromagnetic layer/a non-ferromagnetic layer and a super-surface metal microstructure are respectively integrated on the upper surface and the lower surface of a substrate, and in the test process, broadband terahertz waves emitted by the terahertz source directly reach the surface of the super-surface metal microstructure without passing through a free space, so that the sensitivity of sensing is effectively improved; meanwhile, the spinning terahertz source is simple in structure, and the problem of optical path calibration of the terahertz source of the photoconductive antenna is solved; due to the integration of the low-cost broadband terahertz source, an additional terahertz source is not needed in the test process, so that the test cost is greatly reduced; in addition, the terahertz signal emitted by the terahertz source is convenient to adjust; in conclusion, the terahertz super-surface biosensor integrated with the spinning terahertz source has the advantages of low cost, easiness in integration, high sensitivity and expandability.
Drawings
Fig. 1 is a schematic structural diagram of a terahertz super-surface biosensor integrated with a spin terahertz source in embodiment 1 of the present invention.
Fig. 2 is a schematic structural diagram of a terahertz time-domain spectroscopy system in embodiment 1 of the present invention.
Fig. 3 is a graph showing transmittance curves for sensing air, water, oil, and alcohol in example 1 of the present invention.
Fig. 4 is a schematic structural diagram of a terahertz super-surface biosensor integrated with a spin terahertz source in embodiment 2 of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Example 1
The embodiment provides a terahertz super-surface biosensor integrated with a spinning terahertz source, which has a structure shown in fig. 1, and adopts a sandwich structure composed of a terahertz source, a substrate and a sensing microstructure, and specifically comprises: the sensor comprises a substrate, a sensing microstructure arranged on the upper surface of the substrate, and a non-ferromagnetic layer and a ferromagnetic layer which are sequentially arranged on the lower surface of the substrate; in more detail:
the substrate is used for supporting a terahertz source (ferromagnetic layer/non-ferromagnetic layer) and a sensing microstructure, the material of the substrate is sapphire, silicon carbide or silicon dioxide, and the silicon dioxide substrate is adopted in the embodiment and has the thickness of 500 micrometers;
the sensing microstructure is used for sensing measurement of a sample and is composed of a plurality of metal microstructure units which are arranged on the upper surface of a substrate in a matrix arrangement; the signals of specific frequency points can pass through the metal microstructure units by material selection and size setting; in the sensing process, a sample to be detected is coated on the surface of the microstructure, the sensing microstructure is very sensitive to a medium on the surface, the dielectric property around the surface of the microstructure is changed by coating the sample, resonance is generated when an electromagnetic field passes through the surface of the microstructure, the electromagnetic field is changed by changing the distribution of a local electromagnetic field through resonance, and the sample identification is realized by calibrating the electromagnetic field change quantity; in practical application, simulation software (CST Microwave Studio or COMSOL Multiphysics) is required to be adopted for prior design according to required frequency points, and in the embodiment, the metal microstructure unit adopts a cross structure: the line width is 15 μm, the length is 100 μm, the thickness is 200nm, the unit interval is 90 μm, the material is gold, and the resonance frequency point of the structure is 0.79 THz;
the terahertz source is used for generating terahertz waves and consists of a non-ferromagnetic layer and a ferromagnetic layer which are sequentially arranged on the lower surface of the substrate, when a femtosecond laser pulse irradiates the ferromagnetic layer/non-ferromagnetic layer double-layer film, the terahertz waves are generated according to the ultra-fast demagnetization and inverse spin Hall effect principles; in practical application, different combinations of ferromagnetic materials and non-ferromagnetic materials are required to be selected according to requirements, and the terahertz signal is regulated and controlled through the thickness of the film.
In the embodiment, a terahertz time-domain spectroscopy system shown in fig. 2 is adopted, and the terahertz super-surface biosensor integrated with the spinning terahertz source is used for measuring air, water, oil and alcohol; wherein, the laser instrument is femto second laser instrument, and laser instrument transmission laser, laser reachs half wave plate after three speculum, then is divided into two bundles of light by the beam splitter: one beam of light is used for detection, and the other beam of light is used for emission of terahertz waves; the laser of a terahertz wave emitting path is modulated after passing through a chopper, the modulated laser is focused by a lens after passing through two reflectors, an integrated terahertz biosensor is positioned at the focus of the lens, a ferromagnetic layer/a non-ferromagnetic layer is excited by the laser, the terahertz wave is emitted due to ultrafast demagnetization and a reverse spin Hall effect, and the terahertz wave passes through a substrate and a sensing microstructure (a cross-shaped metal microstructure) and then is detected by a zinc telluride crystal after being collimated and focused by two off-axis parabolic mirrors; the laser of the detection path reaches the zinc telluride crystal after passing through the delay line; and finally, amplifying the signal detected by the photoelectric balance detector through a phase-locked amplifier to obtain a terahertz time-domain waveform carrying information.
Further, based on the terahertz time-domain spectroscopy system, the specific measurement process in this embodiment is as follows:
1) a time domain spectrum system is built, an iron/platinum/silicon dioxide structure is placed at the focus of a convergent lens, and a terahertz signal generated by the iron/platinum/silicon dioxide structure is measured;
2) an integrated terahertz biosensor (iron/platinum/silicon dioxide/cross-shaped metal microstructure) is placed at the focus of a convergent lens to replace an iron/platinum/silicon dioxide structure, and terahertz signals (air) are measured again;
3) sequentially coating water, oil and alcohol solution on the surfaces of the microstructures of the three integrated terahertz biosensors respectively, and measuring terahertz signals respectively;
4) all the acquired signals are processed by Fourier transform:
the transmittance of the microstructure without coating liquid is obtained by comparing the power signal of the processed iron/platinum/silicon dioxide/cross-shaped metal microstructure with the power signal of the iron/platinum/silicon dioxide, and obvious absorption exists at the existing frequency point which is a resonance frequency point;
respectively calculating the transmittance of the microstructures coated with water, oil and alcohol, wherein the dielectric properties of the surrounding microstructures are changed due to the fact that the microstructures are coated with the water, oil and alcohol, and the resonance frequency points are changed due to the fact that the dielectric properties are different;
according to the change and the offset condition of the resonance frequency point, the identification of three solutions is realized;
as shown in fig. 3, the resonant frequency points of the objects to be measured are different when the objects to be measured are air, water, oil and alcohol, and the resonant peak shifts due to the change of the dielectric properties of the super-surface surrounding environment caused by the different dielectric properties of the different substances.
Example 2
The present embodiment provides a terahertz super-surface biosensor integrated with a spin terahertz source, the structure of which is shown in fig. 4, and the only difference from embodiment 1 is that: the metal microstructure unit adopts a circular ring structure: the outer diameter is 90 μm, the inner diameter is 70 μm, the thickness is 200nm, the unit interval is 100 μm, the material is gold, and the resonance frequency point of the structure is 0.8 THz; the trend of the measurement result change of the terahertz super-surface biosensor integrated with the spinning terahertz source provided by the embodiment on air, water, oil and alcohol is the same as that of a cross structure.
While the invention has been described with reference to specific embodiments, any feature disclosed in this specification may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise; all of the disclosed features, or all of the method or process steps, may be combined in any combination, except mutually exclusive features and/or steps.
Claims (3)
1. A terahertz super-surface biosensor integrated with a spin terahertz source, comprising: the sensor comprises a substrate, a sensing microstructure arranged on the upper surface of the substrate, and a non-ferromagnetic layer and a ferromagnetic layer which are sequentially arranged on the lower surface of the substrate; the ferromagnetic layer and the non-ferromagnetic layer form a terahertz source, the terahertz source generates broadband terahertz waves under the irradiation of femtosecond laser pulses, and the broadband terahertz waves sequentially pass through the substrate and the sensing microstructure.
2. The terahertz superficies biosensor of claim 1 wherein the ferromagnetic layer is made of fe, co or ni material and has a thickness of 1 to 10nm, and the non-ferromagnetic layer is made of pt, w or pd material and has a thickness of 1 to 10 nm.
3. The terahertz super-surface biosensor integrated with a spin terahertz source as claimed in claim 1, wherein the sensing microstructure is composed of a plurality of metal microstructure units arranged in a matrix, and the metal microstructure units are in a cross structure or a circular ring structure.
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