CN114001635B - MEMS microwave sensor for icing detection and detection method thereof - Google Patents

MEMS microwave sensor for icing detection and detection method thereof Download PDF

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CN114001635B
CN114001635B CN202111206449.XA CN202111206449A CN114001635B CN 114001635 B CN114001635 B CN 114001635B CN 202111206449 A CN202111206449 A CN 202111206449A CN 114001635 B CN114001635 B CN 114001635B
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icing
ring
interdigital
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complementary
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CN114001635A (en
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谢建兵
温俊杰
苑伟政
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Northwestern Polytechnical University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/001—Constructional details of gauge heads
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
    • Y02A90/10—Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation

Abstract

The invention discloses the field of MEMS microwave sensors for icing detection, and belongs to the technical field of sensors. The sensor mainly comprises a bottom metal microstrip transmission line 2, a medium substrate 3, a top complementary interdigital open resonant ring 4 and a metal reference surface 5, wherein the complementary interdigital open resonant ring can more effectively excite the resonant ring due to the existence of an interdigital structure under the action of an alternating electric field along the axial direction of the resonant ring, the inner part of the complementary interdigital open resonant ring is a region with the maximum electric field intensity, a sample to be measured is placed in the region, and the sensitivity of the sensor to icing conditions can be maximized. The invention is expected to meet the urgent demands of the industries such as aviation, wind power generation and the like at home and abroad on the icing sensor with low cost, small volume and good batch production consistency.

Description

MEMS microwave sensor for icing detection and detection method thereof
Technical Field
The invention belongs to the technical field of sensors, and particularly relates to the field of MEMS microwave sensors for icing detection.
Background
Icing is a significant challenge to many industries, both in nature and in human production practice. In the wind power generation industry, icing can change the external shape and aerodynamic performance of the blade, increase the resistance of the blade, reduce the lift force and influence the operability and stability of the whole machine; in the aviation transportation industry, the icing of an aircraft can influence all working states of the aircraft, all aspects of an aircraft detection system and the like, and the stability, aerodynamic characteristics and take-off and landing characteristics of the aircraft can be influenced by the icing; in the high-speed motor train unit train industry, the high-speed motor train unit train is extremely easy to cause the bogie and the brake clamp to freeze in the running process, even cause the train to turn to difficulty and brake failure when serious, and ice cubes are easy to fall off when the ice is excessively thick, so that accidents are caused.
The sensors that have been proposed to be applied to the above industry for icing detection can be roughly classified into 2 types.
1. Direct measurement. The direct measurement is a detection mode that the sensor is directly contacted with the icing surface, and a typical direct measurement sensor mainly comprises (1) a balance bridge type, wherein two heating resistance wires form a Wheatstone bridge, and icing is detected through the temperature difference of the resistance caused by icing. (2) Obstacle type ice is detected by using a rotating body which rotates all the time to collide with the ice surface. (3) The main component is a vibrating tube which stretches back and forth under a magnetic field, and when icing occurs, the vibration frequency and the amplitude of the vibrating tube can be changed so as to detect the icing.
2. Indirectly reflective. The indirect reflection type is a mode of transmitting a signal and representing icing conditions by detecting changes of the signal, and typical indirect reflection type sensors mainly comprise (1) an infrared energy reflection type and mainly detect icing by detecting heat release during icing through an infrared wave detector. (2) The ultrasonic echo type ultrasonic wave is manufactured according to the principle that part of the ultrasonic wave is reflected in two media with different propagation speeds. (3) When ice is attached to the surface of the machine body, the reflection and scattering phenomena of light emitted by the sensor are transmitted back to the sensor to detect ice.
In recent years, a novel microwave sensor using a split-ring resonant ring design has been used for monitoring solid, liquid and gas materials, and the microwave sensor operates by using electromagnetic waves interacted between an input signal and an object to be detected, and detects and calculates electromagnetic parameters related to the input signal, and then uses the electromagnetic parameters to represent the amount to be detected. Benjamin Wiltshire, et al, university of british columbia, canada have attempted to use split resonator rings in icing detection (Bw a, km B, kg B, et al, robust and sensitive frost and ice detection via planar microwave resonator sensor-science direct [ J ]. Sensors and Actuators B: chemical, 301.) and the results of the experiments show that split resonator rings can rapidly detect water to ice changes, but that the experiments fail to detect icing thickness.
Among the above sensors, the conventional direct measurement sensor is often high in use requirement, unstable and easy to damage; the traditional indirect reflection type sensor is easy to interfere, has small application range and complex process algorithm, and is difficult to give thickness information. The novel microwave sensor using the split resonant ring design is advantageous in icing detection, but is only concentrated in an experimental stage, and little research is conducted in the aspects of innovation and optimization of a sensor structure.
Disclosure of Invention
Aiming at the defects of the prior art and the latest requirements in the industry, the invention provides an MEMS microwave sensor for icing detection and a detection method thereof.
The MEMS microwave sensor for icing detection mainly comprises a bottom metal microstrip transmission line 2, a medium substrate 3, a top complementary interdigital open resonator ring 4 and a metal reference surface 5;
one surface of the medium substrate 3 is a metal layer, the center position of the metal layer is provided with a top layer complementary interdigital open resonant ring 4 with a hollow structure, and the rest is the metal reference surface 5;
the other surface of the medium substrate 3 is provided with the bottom metal microstrip transmission line 2; which is parallel to the long side direction of the medium substrate 3 and is arranged in the center of the medium substrate 3; the basic size is determined by the impedance of the feeder line, the thickness of the dielectric base and the relative dielectric constant, so that impedance matching with the detection transmission line is realized;
the bottom metal microstrip transmission line 2 is welded with a female connector of the radio frequency coaxial connector 1 through a connector pin;
further, the thickness of the medium substrate 3 is 0.3mm to 2mm, and the medium substrate is made of one of FR4, rogers RO4003, rogers RO3003, rogers RO4350 and Rogers RO5880 type plates.
The top layer complementary interdigital open resonant ring is used for improving the resonant characteristic of the microwave circuit by etching an annular structure on a metal reference surface;
the top layer complementary interdigital open resonant ring consists of an outer ring and an inner ring;
the outer ring of the top layer complementary interdigital open resonator ring is a single open ring which is open to one side of the long side of the medium substrate, and the open outer ring is one of a circle, an ellipse and a polygon;
the inner ring of the top-layer complementary interdigital open resonant ring is a semi-ring structure arranged in the outer ring, and the semi-ring structure is a semi-ring structure of a ring in a circular shape, an elliptical shape or a polygonal shape which is the same as the open outer ring in shape;
a gap is arranged between the inner ring and the outer ring of the top-layer complementary interdigital open-ended resonant ring, the open positions of the inner ring and the outer ring are opposite, and the centers of the two rings are positioned on the same straight line;
furthermore, an interdigital structure is arranged between the outer ring and the inner ring of the top layer complementary interdigital open resonator ring, the index of the open outer ring is 2-10, and the index of the open inner ring is 1-9;
furthermore, the length of the opening of the outer ring of the top interdigital split resonant ring is 1-6 mm, the linewidth of the outer ring is 0.5-2 mm, the linewidth of the inner ring is 0.5-2 mm, and the intersection of the inner ring and the outer ring interdigital is 0.5-1.5 mm;
the detection method of the MEMS microwave sensor for icing detection specifically comprises the following steps:
step 1: establishing an icing state model;
step 1-1: connecting coaxial connectors 1 at two ends of a microstrip transmission line 2 with a vector network analyzer through a feeder line, transmitting microwave signals on the microstrip transmission line 2, and measuring and recording resonance frequency points and corresponding amplitude values on a forward transmission coefficient S21 under the condition that an icing microwave sensor is empty;
the microwave sensor may be equivalently a resonant circuit consisting of an inductance L and a capacitance C, and the resonant frequency of one equivalent resonant circuit may be expressed as:
step 1-2: the liquid water to be measured is placed on the complementary interdigital open resonant ring 4, and as the water has different dielectric properties under the two conditions of liquid state and solid state, the specific characteristics are dielectric constant and loss tangent angle, and the capacitance C of the sensor generates proportional change along with the change of the dielectric constant epsilon of the object to be measured: ε.gtc.
The electromagnetic field distribution of the complementary interdigital open resonator ring 4 is changed during icing, thereby causing the change of the resonant frequency and amplitude of the sensor;
at this time, firstly, finding the frequency range most sensitive to the icing condition and recording the frequency range as an icing condition sensitive area, and then respectively measuring and recording the resonance frequency point and the corresponding amplitude value on the forward transmission coefficient S21 of the complementary interdigital open-ended resonance ring 4 under the condition of loading the tested liquid water and ice;
step 1-3: recording and storing according to the recorded resonance frequency and amplitude of the empty load, the loaded liquid water and the loaded ice, and constructing an icing state model;
step 2: establishing an icing thickness model;
step 2-1: when liquid water is placed on the complementary interdigital split ring 4 and has frozen, the electromagnetic field distribution of the complementary interdigital split ring 4 changes due to the change in the frozen thickness, and thus the sensor resonant frequency and amplitude will change. At this time, firstly, finding the frequency range most sensitive to the icing thickness and recording the frequency range as an icing thickness sensitive area, and then measuring the resonance frequency point and the corresponding amplitude value on the forward transmission coefficient S21 of the complementary interdigital open-ended resonant ring 4 under the condition that the icing thickness of the measured liquid changes;
step 2-2: performing data fitting according to the forward transmission coefficient resonant frequency point model and the frequency domain resonant frequency point offset model, and constructing an icing thickness model;
step 3: detecting icing state and icing thickness;
step 3-1: installing the MEMS microwave sensor for icing detection into an environment to be detected and scanning a resonance frequency point and a corresponding amplitude value on a forward transmission coefficient S21 of the sensor;
step 3-2: scanning an icing state sensitive area, comparing the currently obtained resonant frequency and corresponding amplitude with a stored icing state model, executing the step 3-3 if the state is not icing, and continuing to execute the step 3-1 if the state is icing;
step 3-3: and scanning an icing thickness sensitive area, introducing the currently obtained resonant frequency and corresponding amplitude into an icing thickness model, and calculating to obtain the current icing thickness.
Compared with the prior art, the invention has the following technical advantages:
1. the MEMS microwave sensor for icing detection provided by the invention adopts a planar design, is thinner, can be flush-mounted on the surface of an airplane, can be flush-mounted on narrow areas such as wind blades and the like, and has wider application fields;
2. the MEMS microwave sensor for icing detection provided by the invention adopts a microwave transmission measurement mode, and has the advantages of simple measurement algorithm, small interference and low energy consumption;
3. the structural parameters of the interdigital open resonant ring of the MEMS microwave sensor for icing detection are much smaller than the corresponding resonant wavelength, so that the defect of overlarge volume of the traditional microwave sensor is avoided;
4. according to the reference surface structure of the etching complementary interdigital open resonant ring of the MEMS microwave sensor for icing detection, which is provided by the invention, because the inner ring and the outer ring of two different structures are mutually coupled and provided with a plurality of resonant frequencies, the MEMS microwave sensor for icing detection provided by the invention is provided with an independent icing state sensitive area and an icing thickness sensitive area;
5. according to the MEMS microwave sensor for icing detection, the complementary interdigital open resonant ring obtained by utilizing the dual principle and the bar Bi Nie principle can excite the resonant ring more effectively under the action of an alternating electric field along the axial direction of the resonant ring due to the existence of the interdigital structure, the inner part of the complementary interdigital open resonant ring is the area with the maximum electric field intensity, and a sample to be detected is placed in the area, so that the sensitivity of the sensor to icing conditions can be maximized.
Drawings
Fig. 1 is a schematic diagram of a front structure of a MEMS microwave sensor for icing detection according to the present invention.
Fig. 2 is a schematic diagram of a back structure of a MEMS microwave sensor for icing detection according to the present invention.
FIG. 3 is a schematic diagram of a top-level complementary interdigital open resonator ring structure of a MEMS microwave sensor for icing detection.
Fig. 4 is a schematic diagram of icing detection using an embodiment of a MEMS microwave sensor for icing detection provided by the present invention.
FIG. 5 is a graph of resonance frequencies of icing condition and thickness sensitive zones simulated by an embodiment of the present invention.
FIG. 6 is a graph of the relationship between the sensor resonant frequency and the three states of liquid water, no load and icing obtained by simulation in the embodiment of the invention.
FIG. 7 is a graph of liquid icing thickness versus sensor resonant frequency simulated by an embodiment of the present invention.
In the drawings, like reference numerals are used to designate like elements or structures.
Reference numerals: a coaxial connector with a characteristic impedance of 50 ohms, a 2-50 ohm microstrip transmission line, a 3-dielectric substrate, a 4-complementary interdigital open resonant ring, a 5-metal reference surface, a 41-outer ring, a 42-outer ring interdigital, a 43-outer ring gap, a 44-inner ring and a 45-inner ring interdigital.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clear, the following describes embodiments of the present invention by way of specific examples. It is to be understood that the invention may be embodied or practiced in other various specific embodiments and is not limited to the specific details. In addition, the technical features mentioned in the following embodiments and the illustrations provided merely illustrate the basic idea of the invention, and the technical features mentioned can be combined with one another without conflict.
Fig. 1 and fig. 2 show schematic structural diagrams of a MEMS microwave sensor for icing detection according to the present invention, where the MEMS microwave sensor includes a coaxial connector 1 with characteristic impedance of 50 ohms, a microstrip transmission line 2 with characteristic impedance of 50 ohms, a dielectric substrate 3, a complementary interdigital open resonator ring 4, and a metal reference surface 5, the coaxial connector 1 with characteristic impedance of 50 ohms is respectively connected to two ends of the microstrip transmission line 2 with characteristic impedance of 50 ohms, and the microstrip transmission line 2 with characteristic impedance of 50 ohms and the metal reference surface 5 are respectively located on a bottom layer and a top layer of the dielectric substrate 3. The length of the 50 ohm microstrip transmission line 2 is 40mm, the width is 2.9mm, the thickness is 0.035mm, and impedance matching with characteristic impedance of 50 ohms can be realized. The dielectric substrate 3 had a length of 40mm, a width of 20mm, a thickness of 1.6mm, a relative dielectric constant of 4.4, and a tangent loss value of 0.22. The complementary interdigital open resonator ring 4 is a hollow annular structure etched on the metal reference surface 5, and the metal reference surface 5 has a length of 40mm, a width of 20mm and a thickness of 0.035mm.
FIG. 3 is a block diagram of a complementary interdigital split ring provided by the present invention. The complementary interdigital open resonator ring 4 is an annular hollow interdigital-like structure etched on the metal reference surface 5. The outer ring 41 is formed by extending a circle with a radius of 6.5mm by 1.5mm along the central line, and the width of the outer ring 41 is 1mm; the outer ring interdigital 42 is a half elliptic ring formed by tangent of a half ellipse with a large radius of 2.5mm and a ratio of 2.6 and a half ellipse with a large radius of 1.5mm and a ratio of 4.3; the length of the outer ring slit 43 is 1mm and the width is 1mm; the inner ring 44 is formed by vertically extending a semicircle with a radius of 4.5mm by 1.5mm, and the width of the inner ring 44 is 1mm; the inner ring finger 45 is rectangular with a length of 5.5mm and a width of 1mm intersecting the inner ring.
FIG. 4 is a schematic diagram of icing detection using an embodiment of the present invention;
FIG. 5 is a schematic diagram of icing condition and thickness sensitive zones simulated by an embodiment of the present invention;
the invention provides a detection method of an MEMS microwave sensor for icing detection, which specifically comprises the following steps:
step 1: establishing an icing state model;
step 1-1: connecting coaxial connectors 1 at two ends of a microstrip transmission line 2 with a vector network analyzer through a feeder line, transmitting microwave signals on the microstrip transmission line 2, and measuring and recording resonance frequency points on a forward transmission coefficient S21 under the condition that an icing microwave sensor is empty;
the microwave sensor may be equivalently a resonant circuit consisting of an inductance L and a capacitance C, and the resonant frequency of one equivalent resonant circuit may be expressed as:
step 1-2: the liquid water to be measured is placed on the complementary interdigital open resonant ring 4, and the liquid water has different dielectric properties under the two conditions of liquid state and solid state, and is specifically embodied as a dielectric constant and a loss tangent angle, so that when the dielectric constant of an object to be measured changes, the capacitance of the sensor changes:
the electromagnetic field distribution of the complementary interdigital open resonator ring 4 is caused to change during icing, thereby causing the sensor resonant frequency to change;
at this time, firstly, finding the frequency range most sensitive to the icing condition and recording the frequency range as an icing condition sensitive area, and then respectively measuring and recording resonance frequency points on a forward transmission coefficient S21 of the complementary interdigital open resonance ring 4 under the condition of loading the tested liquid water and ice;
FIG. 6 is a graph showing the relationship between the three states of liquid water, no load and icing and the resonance frequency of the sensor, which are obtained through simulation in the embodiment of the invention. As can be seen from the simulation diagram, the resonance frequency of the sensor is 4.16GHz in no-load state, the resonance frequency of the sensor is 3.56GHz in icing state, the resonance is almost absent in liquid state, and the icing state sensitive area is 3.56GHz-4.16GHz.
Step 1-3: recording and storing according to the recorded resonance frequency and amplitude of the empty load, the loaded liquid water and the loaded ice, and constructing an icing state model;
step 2: establishing an icing thickness model;
step 2-1: when liquid water is placed on the complementary interdigital split ring 4 and has frozen, the electromagnetic field distribution of the complementary interdigital split ring 4 changes due to the change in the frozen thickness, and thus the sensor resonant frequency and amplitude will change. At this time, firstly, finding the frequency range most sensitive to the icing thickness and recording the frequency range as an icing thickness sensitive area, and then measuring the resonance frequency point and the corresponding amplitude value on the forward transmission coefficient S21 of the complementary interdigital open-ended resonant ring 4 under the condition that the icing thickness of the measured liquid changes;
FIG. 7 is a graph of simulated liquid icing thickness versus sensor resonant frequency for an embodiment of the present invention. From the simulation graph, when the object to be measured is in an icing state, the resonant frequency of the sensor shifts from 5.71GHz to 5.06GHz when the icing thickness changes from 1mm to 10mm, the frequency offset is 0.65GHz, the maximum frequency offset per unit thickness reaches 0.11GHz, the average sensitivity is 0.065GHz/mm, and the icing thickness sensitive area is 5.06GHz-5.71GHz.
Step 2-2: according to the liquid icing thickness and sensor resonant frequency relation obtained through simulation in the embodiment of the invention, the mathematical relation between icing thickness h and frequency f can be obtained by digitally fitting the icing thickness and sensor resonant frequency relation by using computer software:
f＝-0.001107×h 3 +0.01788×h 2 -0.1458×h+5.835
h＝finverse(-0.001107×f 3 +0.01788×f 2 -0.1458×f+5.835)
step 3: detecting icing state and icing thickness;
step 3-1: installing the MEMS microwave sensor for icing detection into an environment to be detected and scanning a resonance frequency point and a corresponding amplitude value on a forward transmission coefficient S21 of the sensor;
step 3-2: scanning an icing state sensitive area of 3.56GHz-4.16GHz, comparing the currently obtained resonant frequency and corresponding amplitude with a stored icing state model, executing the step 3-3 if the icing state is not frozen, and continuing to execute the step 3-1 if the icing state is not frozen;
under a certain detection environment, the resonant frequency f is 3.562GHz, and the icing frequency of the corresponding icing state model is 3.56GHz, so that the icing is judged;
the resonance frequency f is 4.148GHz, the corresponding icing state model idle frequency is 4.16GHz, and the icing is judged to be not performed;
step 3-3: and 5.06GHz-5.71GHz of an icing thickness sensitive area is scanned, the currently obtained resonant frequency and the corresponding amplitude are led into an icing thickness model, and the current icing thickness is calculated.
Under a certain detection environment, the resonant frequency f is 5.632GHz, the corresponding thickness h is 1.844mm, and the relative error between the thickness h and the actual thickness 1.9mm is 2.9%;
the resonance frequency f is 5.364GHz, the corresponding thickness h is 6.0151mm, and the relative error between the thickness h and the actual thickness 6.0mm is 0.02%;
the foregoing embodiments are merely illustrative of the technical solutions of the present invention, and it will be readily understood by those skilled in the art that the foregoing embodiments are merely preferred embodiments of the present invention, and the present invention is not limited to the foregoing embodiments, but is also not limited to the foregoing embodiments, and modifications and equivalent substitutions are made within the principles of the technical solutions of the present invention, so long as they meet the requirements of the method of the present invention, and are intended to be covered by the scope of the present invention.

Claims (2)

1. The MEMS microwave sensor for icing detection is characterized by mainly comprising a bottom metal microstrip transmission line (2), a dielectric substrate (3), a top complementary interdigital open resonant ring (4) and a metal reference surface (5);
one surface of the medium substrate (3) is a metal layer, the center position of the metal layer is provided with a top layer complementary interdigital open resonant ring (4) with a hollowed-out structure, and the rest is the metal reference surface (5);
the other surface of the dielectric substrate 3) is provided with the bottom metal microstrip transmission line (2); which is parallel to the long side direction of the medium substrate 3) and is arranged in the center of the medium substrate 3; the basic size of the detection transmission line realizes the impedance matching between the detection transmission line and the detection transmission line;
the bottom metal microstrip transmission line (2) is welded with a female connector of the radio frequency coaxial connector (1) through a connector needle;
the top layer complementary interdigital open resonant ring is used for improving the resonant characteristic of the microwave circuit by etching an annular structure on a metal reference surface;
the top layer complementary interdigital open resonant ring consists of an outer ring and an inner ring;
the outer ring of the top layer complementary interdigital open resonator ring is a single open ring which is open to one side of the long side of the medium substrate, and the open outer ring is one of a circle, an ellipse and a polygon;
the inner ring of the top-layer complementary interdigital open resonant ring is a semi-ring structure arranged in the outer ring, and the semi-ring structure is a semi-ring structure in a circular shape, an elliptical shape and a polygonal shape which are the same as the open outer ring in shape;
a gap is arranged between the inner ring and the outer ring of the top-layer complementary interdigital open-ended resonant ring, the open positions of the inner ring and the outer ring are opposite, and the centers of the two rings are positioned on the same straight line;
an interdigital structure is arranged between the outer ring and the inner ring of the top layer complementary interdigital open resonator ring, the index of the open outer ring is 2-10, and the index of the open inner ring is 1-9;
the length of the outer ring opening of the top layer complementary interdigital opening resonant ring is 1 mm-6 mm, the outer ring linewidth is 0.5-2 mm, the inner ring linewidth is 0.5-2 mm, and the intersection of the inner ring interdigital and the outer ring interdigital is 0.5-1.5 mm.
2. A method of icing detection based on a MEMS microwave sensor as claimed in claim 1, comprising the steps of:
step 1: establishing an icing condition model:
step 1-1: coaxial connectors (1) at two ends of a microstrip transmission line (2) are connected with a vector network analyzer through a feeder line, so that microwave signals are transmitted on the microstrip transmission line (2), and resonance frequency points and corresponding amplitude values on a forward transmission coefficient S21 under the condition that an icing microwave sensor is unloaded are measured and recorded;
the microwave sensor may be equivalently a resonant circuit consisting of an inductance L and a capacitance C, and the resonant frequency of one equivalent resonant circuit may be expressed as:
step 1-2: the liquid water to be measured is placed on the complementary interdigital open resonant ring (4), and as the water has different dielectric properties under the two conditions of liquid state and solid state, the specific characteristics are dielectric constant and loss tangent angle, and the capacitance C of the sensor generates proportional change along with the change of the dielectric constant epsilon of an object to be measured: ε.c.;
the electromagnetic field distribution of the complementary interdigital open resonator ring 4 is changed during icing, thereby causing the change of the resonant frequency and amplitude of the sensor;
at the moment, firstly, a frequency range which is most sensitive to icing conditions is found and recorded as an icing condition sensitive area, and then resonance frequency points and corresponding amplitude values on a forward transmission coefficient S21 of the complementary interdigital open-ended resonance ring (4) are respectively measured and recorded under the condition of loading the tested liquid water and ice;
step 1-3: recording and storing according to the recorded resonance frequency and amplitude of the empty load, the loaded liquid water and the loaded ice, and constructing an icing state model;
step 2: establishing an icing thickness model:
step 2-1: when liquid water is placed on the complementary interdigital open resonant ring (4) and is frozen, the electromagnetic field distribution of the complementary interdigital open resonant ring (4) is changed due to the change of the frozen thickness, so that the change of the resonant frequency and amplitude of the sensor is caused; at the moment, firstly, a frequency range which is most sensitive to the icing thickness is found and recorded as an icing thickness sensitive area, and then, a resonance frequency point and a corresponding amplitude value on a forward transmission coefficient S21 are measured under the condition that the icing thickness of the measured liquid of the complementary interdigital open-ended resonant ring (4) changes;
step 2-2: performing data fitting according to the forward transmission coefficient resonant frequency point model and the frequency domain resonant frequency point offset model, and constructing an icing thickness model;
step 3: detection of icing conditions and icing thickness:
step 3-1: installing the MEMS microwave sensor for icing detection into an environment to be detected and scanning a resonance frequency point and a corresponding amplitude value on a forward transmission coefficient S21 of the sensor;
step 3-2: scanning an icing state sensitive area, comparing the currently obtained resonant frequency and corresponding amplitude with a stored icing state model, executing the step 3-3 if the state is not icing, and continuing to execute the step 3-1 if the state is icing;
step 3-3: and scanning an icing thickness sensitive area, introducing the currently obtained resonant frequency and corresponding amplitude into an icing thickness model, and calculating to obtain the current icing thickness.
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