CN113992181B - Film bulk acoustic wave resonant filter - Google Patents
Film bulk acoustic wave resonant filter Download PDFInfo
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- CN113992181B CN113992181B CN202111614101.4A CN202111614101A CN113992181B CN 113992181 B CN113992181 B CN 113992181B CN 202111614101 A CN202111614101 A CN 202111614101A CN 113992181 B CN113992181 B CN 113992181B
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- 239000000758 substrate Substances 0.000 claims abstract description 31
- 238000010521 absorption reaction Methods 0.000 claims abstract description 21
- 230000007246 mechanism Effects 0.000 claims description 50
- 239000002184 metal Substances 0.000 claims description 43
- 239000010408 film Substances 0.000 claims description 39
- 230000006835 compression Effects 0.000 claims description 33
- 238000007906 compression Methods 0.000 claims description 33
- 230000000712 assembly Effects 0.000 claims description 10
- 238000000429 assembly Methods 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 6
- 238000003780 insertion Methods 0.000 claims description 5
- 230000037431 insertion Effects 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000000741 silica gel Substances 0.000 claims description 3
- 229910002027 silica gel Inorganic materials 0.000 claims description 3
- 239000000428 dust Substances 0.000 abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 5
- 230000005611 electricity Effects 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 230000003071 parasitic effect Effects 0.000 description 2
- 235000019687 Lamb Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02047—Treatment of substrates
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0504—Holders; Supports for bulk acoustic wave devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/564—Monolithic crystal filters implemented with thin-film techniques
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
The invention discloses a film bulk acoustic wave resonant filter which comprises a substrate, wherein the top of the substrate is connected with a covering shell, the bottom of the substrate is connected with a dustproof frame, a water-absorbing sponge layer is arranged on the inner top wall of the covering shell, one side of the covering shell is provided with an air hole, and the surface of the air hole is provided with a dustproof net. The invention provides a film bulk acoustic wave resonance filter, which is characterized in that through the arrangement of a water absorption sponge layer, a dustproof net and air holes, the air in a substrate and a covering shell is circulated, and meanwhile, the external water vapor and dust can be prevented from entering, so that certain influence on the inside is avoided.
Description
Technical Field
The invention relates to the technical field of resonant filters, in particular to a film bulk acoustic wave resonant filter.
Background
The prior patent with application number 202011021256.2 discloses a film bulk acoustic wave resonator filter, which includes "top electrode edge step, top electrode, piezoelectric film, bottom electrode, and insulating support layer with air back cavity. The invention designs a first step, a second step and a third step at the edge of the top electrode for reflecting lamb waves. Through the design of the length, the width and the thickness of each step at the top, the parasitic resonance is best inhibited, and ripples in the phase response of the film bulk acoustic wave resonance filter are effectively eliminated. Through the optimized design, the film bulk acoustic wave resonant filter has high quality factor, high parasitic resonance with low electromechanical coupling coefficient and flat phase response characteristic, so that the invention can be applied to low-noise filters and other radio frequency applications. Therefore, there is a need for a thin film bulk acoustic resonator filter that at least partially solves the problems of the prior art.
Disclosure of Invention
In this summary, concepts in a simplified form are introduced that are further described in the detailed description. This summary of the invention is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter.
In order to achieve the purpose, the invention provides the following technical scheme that the film bulk acoustic wave resonance filter comprises a substrate, wherein the top of the substrate is connected with a covering shell, the bottom of the substrate is connected with a dustproof frame, a water-absorbing sponge layer is arranged on the inner top wall of the covering shell, one side of the covering shell is provided with an air hole, and the surface of the air hole is provided with a dustproof net.
According to the film bulk acoustic wave resonator filter provided by the embodiment of the invention, the bottom of the substrate is provided with the empty groove, the inner side wall of the empty groove is provided with the group of limiting sliding grooves, the limiting sliding grooves are internally connected with the limiting sliding blocks in a sliding manner, the surface of each limiting sliding block is provided with the connecting column, the bottom end of each connecting column is provided with the conductive metal sheet, one side of each conductive metal sheet is provided with the metal connecting sheet, and one side of each metal connecting sheet is provided with the plurality of inserting nails.
According to the film bulk acoustic wave resonator filter provided by the embodiment of the invention, the inner side wall of the limiting chute is provided with the first compression spring, the bottom end of the first compression spring is connected to one side of the limiting slide block, the inner side wall of the hollow groove is provided with the movable groove, the inner bottom wall of the movable groove is provided with the plug-in hole, the top and the bottom of the limiting slide block are both provided with the placing grooves, the inner bottom wall of the placing groove is provided with the second compression spring, the bottom end of the second compression spring is provided with the plug-in rod, and the surface of the plug-in rod penetrates through the interior of the plug-in hole.
According to the film bulk acoustic wave resonator filter provided by the embodiment of the invention, the other side of the conductive metal sheet is connected with the first electrode, the first electrode is positioned at the top of the substrate, the top of the first electrode is provided with the piezoelectric film layer, the top of the piezoelectric film layer is provided with the second electrode, the two sides of the bottom of the substrate are both provided with the fixing holes, the inner side wall of each fixing hole is provided with the first sliding groove, the inner side wall of each first sliding groove is provided with the second sliding groove, the inner side wall of each fixing hole is connected with the fixing pin, the surface of each fixing pin is provided with the sliding block, and the surface of each sliding block is connected with the inside of the corresponding first sliding groove in a sliding manner.
According to the film bulk acoustic wave resonator filter provided by the embodiment of the invention, a group of threaded holes are formed in both sides of the top of the substrate, and fastening bolts are connected to the internal threads of the threaded holes in a threaded manner.
According to the film bulk acoustic wave resonator filter provided by the embodiment of the invention, the two sides of the bottom of the substrate are respectively provided with a group of silica gel pad feet.
According to the film bulk acoustic wave resonator filter provided by the embodiment of the invention, the fixed blocks are arranged on the surface and the back of the dustproof frame, the through holes are formed in one sides of the fixed blocks, and the surfaces of the fixed pins penetrate through the inner parts of the through holes.
According to the film bulk acoustic wave resonant filter provided by the embodiment of the invention, one side of the dustproof frame is provided with the placing groove, and the inner side wall of the placing groove is provided with the sealing gasket.
According to the film bulk acoustic wave resonator filter provided by the embodiment of the invention, a plurality of inner supporting framework mechanisms are arranged between the substrate and the covering shell, each inner supporting framework mechanism comprises two side vertical rods, two transverse bearing assemblies and a plurality of vertical energy absorption mechanisms, the side vertical rods are respectively arranged between the substrate and the covering shell, the end parts of the transverse bearing assemblies are movably connected with the side vertical rods, the plurality of vertical energy absorption mechanisms are arranged between the two transverse bearing assemblies, each transverse bearing assembly comprises a first hinging seat, a transverse rod and an energy absorption pipe mechanism, the transverse rods and the energy absorption pipe mechanisms are respectively arranged in plurality, the energy absorption pipe mechanisms are arranged between the two transverse rods, the transverse rods are hinged with the first hinging seats, the vertical energy absorption mechanisms are movably arranged between the upper transverse rods and the lower transverse rods, and each energy absorption pipe mechanism comprises an upper pipe fitting, a lower pipe fitting and a plurality of energy absorption pipe mechanisms, The tensioning device comprises a lower pipe fitting, two first tensioning springs and two tensioning short rods, wherein two first inner connecting pipes are arranged in the lower pipe fitting, two second inner connecting pipes are arranged in the upper pipe fitting, the first inner connecting pipes are connected with the second inner connecting pipes in an inserted mode, the inner ends of the first tensioning springs are connected with the first inner connecting pipes, the outer ends of the first tensioning springs are connected with the inner ends of the tensioning short rods, and the outer ends of the tensioning short rods are connected with the transverse rods.
According to the film bulk acoustic wave resonator filter provided by the embodiment of the invention, the vertical energy absorption mechanism comprises a flexible rod piece and a plurality of energy absorption blocks, the energy absorption blocks are arranged on the flexible rod piece, the flexible rod piece comprises a second tensioning spring, a flexible pipe, a second hinging seat and a pull-down seat, the second hinging seat is arranged on the transverse rod above, the pull-down seat is arranged on the transverse rod below, the hinging rod is arranged on the second hinging seat, a pull-down rod is arranged in the pull-down seat, the second tensioning spring is arranged in the flexible pipe, the lower end of the flexible pipe penetrates through the transverse rod below, the upper end of the second tensioning spring is connected with the hinging rod, the lower end of the second tensioning spring is connected with the upper end of the pull-down rod, and the energy absorption blocks are arranged outside the flexible pipe.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention provides a film bulk acoustic wave resonance filter, which is characterized in that through the arrangement of a water absorption sponge layer, a dustproof net and air holes, the air in a substrate and a covering shell is circulated, and meanwhile, the external water vapor and dust can be prevented from entering, so that certain influence on the inside is avoided.
2. The invention provides a film bulk acoustic wave resonant filter, which enables a first electrode to be electrified flexibly through the arrangement of a substrate, a hollow groove, a limiting sliding block, a connecting column, a conductive metal sheet, a metal connecting sheet, an inserting nail, a first compression spring, a second compression spring, an inserting rod and an inserting hole.
3. The invention provides a film bulk acoustic wave resonance filter, which is characterized in that through the arrangement of a fixing hole, a first sliding groove, a second sliding groove, a fixing pin, a dustproof frame and a sealing gasket, the dust adsorbed by static electricity generated during the working of a circuit board is blocked, the dust is prevented from being adhered to the surfaces of a conductive metal sheet and a first electrode to influence the receiving strength of signals, meanwhile, the dustproof frame is convenient to detach and mount, and the flexibility is higher.
4. The invention provides a film bulk acoustic wave resonance filter, which is characterized in that through the arrangement of a first electrode, a piezoelectric film layer and a second electrode, the inverse piezoelectric effect of the piezoelectric film layer converts an input high-frequency electric signal into an acoustic signal with a certain frequency when the filter is electrified, resonance can be generated when the propagation distance of the acoustic wave in the piezoelectric film is just an odd multiple of half wavelength, wherein the acoustic wave loss at the resonance frequency is minimum, so that the acoustic signal with the frequency can pass through the piezoelectric film layer, and signals with other frequencies are blocked, and therefore, a signal with a specific frequency is only output at an output end, and the filtering function of the electric signal is realized.
Drawings
FIG. 1 is a perspective view of the structure of the present invention;
FIG. 2 is a schematic view of a first electrode according to the present invention;
FIG. 3 is a schematic structural view of a conductive metal sheet according to the present invention;
FIG. 4 is a schematic view of a first compression spring according to the present invention;
FIG. 5 is a schematic view of the structure of the insertion rod of the present invention;
FIG. 6 is a schematic structural view of a plug hole according to the present invention;
FIG. 7 is a schematic structural view of a dust-proof frame according to the present invention;
FIG. 8 is a schematic view of a dust screen according to the present invention;
FIG. 9 is a schematic structural view of the inner bracing frame mechanism according to the present invention;
FIG. 10 is an enlarged view of the portion A of FIG. 9 according to the present invention;
FIG. 11 is a schematic structural view of an energy absorbing tube mechanism of the present invention;
FIG. 12 is an enlarged view of the structure of portion B of FIG. 9 according to the present invention;
FIG. 13 is a schematic view of the internal structure of the vertical energy absorbing mechanism of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, such as "connected," which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The first embodiment is as follows:
referring to fig. 1-6, an embodiment of the invention provides a film bulk acoustic wave resonator filter, which includes a substrate 1, a cover case 2 and a dustproof frame 3, the top of the substrate 1 is connected with the cover case 2, the bottom of the substrate 1 is connected with the dustproof frame 3, the bottom of the substrate 1 is provided with a hollow groove 25, the inner side wall of the hollow groove 25 is provided with a group of limiting chutes 4, the inner part of each limiting chute 4 is slidably connected with a limiting slider 26, the surface of each limiting slider 26 is provided with a connecting column 27, the bottom end of each connecting column 27 is provided with a conductive metal sheet 5, one side of each conductive metal sheet 5 is provided with a metal connecting sheet 6, one side of each metal connecting sheet 6 is provided with a plurality of inserting nails 7, the inner side wall of each limiting chute 4 is provided with a first compression spring 8, the bottom end of each first compression spring 8 is connected to one side of the corresponding limiting slider 26, the inner side wall of each hollow groove 25 is provided with a movable groove 9, the inner bottom wall of the movable groove 9 is provided with a plug hole 10, the top and the bottom of the limiting slide block 26 are both provided with a placing groove 28, the inner bottom wall of the placing groove 28 is provided with a second compression spring 11, the bottom end of the second compression spring 11 is provided with a plug rod 12, the surface of the plug rod 12 penetrates through the interior of the plug hole 10, and the other side of the conductive metal sheet 5 is connected with a first electrode 13;
the base 1, the empty slot 25, the limit sliding slot 4, the limit sliding block 26, the connecting column 27, the conductive metal sheet 5, the metal connecting sheet 6, the inserting nail 7, the first compression spring 8, the second compression spring 11, the inserting rod 12 and the inserting hole 10 are arranged, when the resonance filter works, a worker pushes the limit sliding block 26 upwards through the limit sliding slot 4 to enable the first compression spring 8 to be extruded, because the top and the bottom of the limit sliding block 26 are both provided with the placing slots 28, the inner side wall of the placing slot 28 is provided with the second compression spring 11, the bottom end of the second compression spring 11 is provided with the inserting rod 12, the second compression spring 11 is in a compressed state at the moment, because the inner side wall of the empty slot 25 is provided with the movable slot 9, the inner bottom wall of the movable slot 9 is provided with the inserting hole 10, and the surface of the inserting rod 12 penetrates through the inside of the inserting hole 10, so that when the limit sliding block 26 slides inside the limit sliding slot 4, until the plugging rod 12 slides into the plugging hole 10, the plugging rod 12 is pushed into the plugging hole 10 by the reverse acting force of the second compression spring 11, so that the limiting slide block 26 is fixed;
because of the surface mounting of spacing slider 26 has spliced pole 27, the bottom of spliced pole 27 is connected with electrically conductive sheetmetal 5, electrically conductive sheetmetal 5 is connected with first electrode 13 this moment, one side because of electrically conductive sheetmetal 5 is provided with metal connection piece 6, one side of metal connection piece 6 is provided with a plurality of grafting nail 7, place the circuit board into the inside of resettlement groove 30 this moment, grafting nail 7 injects the inside of circuit board simultaneously, make the circuit board pass through metal connection piece 6 and electrically conductive sheetmetal 5 transmission for first electrode 13 with the power, through spacing spout 4, spacing slider 26, first compression spring 8, second compression spring 11, peg graft pole 12, electrically conductive sheetmetal 5, the collocation use of metal connection piece 6 and grafting nail 7, make the mode of first electrode 13 circular telegram comparatively nimble.
And the first electrode 13 is positioned on the top of the substrate 1, the piezoelectric film layer 14 is arranged on the top of the first electrode 13, and the second electrode 15 is arranged on the top of the piezoelectric film layer 14.
Example two:
referring to fig. 1, 3 and 7, in an embodiment of the present invention, a film bulk acoustic resonator filter includes a dust-proof frame 3, a first sliding groove 16 and a fixing pin 32, wherein both sides of the bottom of a substrate 1 are respectively provided with a fixing hole 29, an inner side wall of the fixing hole 29 is provided with the first sliding groove 16, an inner side wall of the first sliding groove 16 is provided with a second sliding groove 17, an inner side wall of the fixing hole 29 is connected with the fixing pin 32, a sliding block 31 is installed on a surface of the fixing pin 32, a surface of the sliding block 31 is slidably connected to the inside of the first sliding groove 16, both the surface and the back of the dust-proof frame 3 are provided with a fixing block 19, one side of the fixing block 19 is provided with a through hole, the surface of the fixing pin 32 penetrates through the inside of the through hole, one side of the dust-proof frame 3 is provided with a placement groove 30, and an inner side wall of the placement groove 30 is provided with a sealing pad 20;
the fixing holes 29, the first sliding grooves 16, the second sliding grooves 17, the fixing pins 32, the dustproof frame 3 and the sealing gasket 20 are arranged, when the circuit board works, static electricity can be generated around the circuit board, certain dust can be adhered to the surfaces of the conductive metal sheets 5 and the metal connecting sheets 6 after long-term use, so that part of dust can enter the surface of the first electrode 13 or the surface of the piezoelectric thin film layer 14, signals are weaker when subsequent signals are sent or received, the use of the circuit board is affected, the fixing holes 29 are formed in two sides of the bottom of the substrate 1, the first sliding grooves 16 are formed in the inner side walls of the fixing holes 29, the second sliding grooves 17 are formed in the inner side walls of the first sliding grooves 16, the fixing pins 32 are connected to the inner side walls of the first sliding grooves 16, sliding blocks 31 are mounted on the surfaces of the fixing pins 32, the sliding blocks 31 slide in the first sliding grooves 16, and meanwhile the fixing blocks 19 are mounted on the surfaces and the back of the dustproof frame 3, and the surface of the fixed pin 32 runs through the inside of the fixed block 19, after the fixed pin 32 drives the sliding block 31 to enter the inside of the fixed hole 29, the sliding block 31 slides in the inside of the first sliding groove 16, when the sliding block slides to the inside of the second sliding groove 17, the fixed pin 32 rotates, so that the sliding block 31 slides into the inside of the second sliding groove 17, so that the fixed block 19 is fixed, and further the dustproof frame 3 is fixed, and through the fixed block 19, the fixed pin 32, the fixed hole 29, the first sliding groove 16, the second sliding groove 17, the dustproof frame 3 and the sealing gasket 20, the dust adsorbed by static electricity generated during the work of the circuit board is blocked, the adhesion on the surfaces of the conductive metal sheet 5 and the first electrode 13 is avoided, the signal receiving strength is influenced, meanwhile, the dustproof frame 3 is convenient to detach and install, and has high flexibility.
A set of screw hole has all been seted up to the both sides at basement 1 top, and the inside threaded connection of screw hole has fastening bolt 21, and the both sides of basement 1 bottom all are provided with a set of silica gel pad foot 22, and the interior roof that covers shell 2 is provided with the sponge layer 23 that absorbs water, and the bleeder vent has been seted up to one side that covers shell 2, and the surface of bleeder vent is provided with dust screen 24.
Example three:
referring to fig. 9-13, in an embodiment of the invention, a film bulk acoustic resonator filter is provided, in which a plurality of inner supporting framework mechanisms 18 are disposed between a base 1 and a cover 2, each inner supporting framework mechanism 18 includes two side vertical rods 181, two transverse bearing assemblies and a plurality of vertical energy absorbing mechanisms 183, the side vertical rods 181 are respectively disposed between the base 1 and the cover 2, ends of the transverse bearing assemblies are movably connected to the side vertical rods 181, the plurality of vertical energy absorbing mechanisms 183 are disposed between the two transverse bearing assemblies, each transverse bearing assembly includes a first hinge seat 184, a transverse rod 185 and an energy absorbing pipe mechanism 186, the plurality of transverse rods 185 and the energy absorbing pipe mechanisms 186 are disposed, the energy absorbing pipe mechanism 186 is disposed between the two transverse rods 185, the transverse rod 185 is hinged to the first hinge seat 184, and the vertical energy absorbing mechanisms 183 is movably disposed between the upper and lower transverse rods 185, the energy absorbing tube mechanism 186 includes an upper tube 187, a lower tube 188, two first tensioning springs 189, two tensioning stubs 190, two first inner tubes 191 disposed in the lower tube 188, two second inner tubes 192 disposed in the upper tube 187, the first inner tubes 191 being inserted into the second inner tubes 192, the inner ends of the first tensioning springs 189 being connected to the first inner tubes 191, the outer ends of the first tensioning springs 189 being connected to the inner ends of the tensioning stubs 190, and the outer ends of the tensioning stubs 190 being connected to the cross bars 185.
Specifically, a plurality of inner supporting framework mechanisms 18 are installed between the base 1 and the covering shell 2 and are located around the first electrode 13, when vibration is transmitted to the inside of the base 1, the inner supporting framework mechanisms 18 primarily absorb impact and vibration, each inner supporting framework mechanism 18 comprises two side vertical rods 181, two transverse bearing assemblies and a plurality of vertical energy absorption mechanisms 183, wherein the two side vertical rods 181 are respectively installed on two opposite inner walls between the base 1 and the covering shell 2, namely between the top wall of the base 1 and the inner top wall of the covering shell 2, and it can be understood that the top wall of the base 1 and the inner top wall of the covering shell 2 are respectively provided with end grooves (not shown) corresponding to the ends of the side vertical rods 181; the end parts of the transverse bearing components are movably connected with the side vertical rods 181, the plurality of vertical energy absorbing mechanisms 183 are arranged between the two transverse bearing components, the two transverse bearing components bear the plurality of vertical energy absorbing mechanisms 183, when vibration is transmitted to the inside of the substrate 1, the inner supporting framework mechanism 18 preliminarily absorbs the impact and the vibration, and the transverse bearing components in the inner supporting framework mechanism 18 also preliminarily absorb the impact and the vibration;
the transverse bearing assembly comprises a plurality of first hinge seats 184, transverse rods 185 and energy-absorbing pipe mechanisms 186, wherein the transverse rods 185 and the energy-absorbing pipe mechanisms 186 are respectively arranged, specifically, the energy-absorbing pipe mechanisms 186 are arranged between the two transverse rods 185, the first hinge seats 184 are arranged on the side vertical rods 181, and the transverse rods 185 are hinged with the first hinge seats 184, so that when vibration is transmitted to the inside of the base 1, the transverse rods 185 can drive the vertical energy-absorbing mechanisms 183 to swing horizontally or vertically to absorb the impact; the energy absorbing tube mechanism 186 comprises an upper tube 187, a lower tube 188, two first tensioning springs 189, two tensioning stubs 190, two first inner tubes 191 mounted in the lower tube 188, two second inner tubes 192 mounted in the upper tube 187, such that the upper tube 187 can be mounted on the lower tube 188, the first inner tubes 191 and the second inner tubes 192 can be screwed together, wherein the inner ends of the first tensioning springs 189 are connected to the first inner tubes 191, the outer ends of the first tensioning springs 189 are connected to the inner ends of the tensioning stubs 190, and the outer ends of the tensioning stubs 190 are connected to the transverse bars 185, such that the tensioning stubs 190 can be pulled by the first tensioning springs 189 to move between the upper tube 187 and the lower tube 188, such that the energy absorbing tube mechanism 186 absorbs impacts.
Example four:
referring to fig. 9-13, according to an embodiment of the present invention, the vertical energy absorbing mechanism 183 includes a flexible rod and a plurality of energy absorbing blocks 193, the plurality of energy absorbing blocks 193 are disposed on the flexible rod, the flexible rod includes a second tension spring 194, a flexible tube 195, a second hinge seat 196, and a lower pull seat 197, the second hinge seat 196 is disposed on the upper transverse rod 185, the lower pull seat 197 is disposed on the lower transverse rod 185, a hinge rod is disposed on the second hinge seat 196, a lower pull rod 199 is disposed in the lower pull seat 197, the second tension spring 194 is disposed in the flexible tube 195, a lower end of the flexible tube 195 passes through the lower transverse rod 185, an upper end of the second tension spring 194 is connected to the hinge rod, a lower end of the second tension spring is connected to an upper end of the lower pull rod 199, and the plurality of energy absorbing blocks 193 are disposed outside the flexible tube 195.
Specifically, in order to facilitate the vertical energy absorbing mechanism 183 to swing horizontally or vertically to absorb the impact, the vertical energy absorbing mechanism 183 includes a flexible rod member, a plurality of energy absorbing blocks 193, the plurality of energy absorbing blocks 193 are mounted on the flexible rod member, the plurality of energy absorbing blocks 193 can swing horizontally left and right or up and down on the flexible rod member when the vibration is transmitted to the inside of the base 1, and specifically, the flexible rod member includes a second tension spring 194, a flexible pipe 195, a second hinge seat 196, and a lower tension seat 197, the second hinge seat 196 is mounted on the upper transverse rod 185, the lower tension seat 197 is mounted on the lower transverse rod 185, the second hinge seat 196 is mounted with a hinge rod, the lower tension spring 199 is mounted in the lower tension seat 197, the second tension spring 194 is mounted in the flexible pipe 195, the lower end of the flexible pipe 195 passes through the lower transverse rod 185, and the upper end of the second tension spring 194 is connected to the hinge rod, the lower end is connected with the upper end of the lower pull rod 199, and the plurality of energy absorption blocks 193 are installed outside the flexible pipe 195, so when the plurality of energy absorption blocks 193 horizontally shake left and right, the flexible pipe 195 is shaken left and right by the energy absorption blocks 193, and further the second tensioning spring 194 shakes, and impact is absorbed by the shaking of the energy absorption blocks 193.
In the invention, the working steps of the device are as follows: the device works by matching the substrate 1, the empty groove 25, the limiting sliding groove 4, the limiting sliding block 26, the connecting column 27, the conductive metal sheet 5, the metal connecting sheet 6, the inserting nail 7, the first compression spring 8, the second compression spring 11, the inserting rod 12 and the inserting hole 10;
when the resonant filter works, a worker pushes the limiting slide block 26 upwards through the limiting slide groove 4 to extrude the first compression spring 8, because the top and the bottom of the limiting slide block 26 are both provided with the placing grooves 28, the inner side wall of the placing groove 28 is provided with the second compression spring 11, the bottom end of the second compression spring 11 is provided with the inserting rod 12, at the moment, the second compression spring 11 is in a compressed state, because the inner side wall of the empty groove 25 is provided with the movable groove 9, the inner bottom wall of the movable groove 9 is provided with the inserting hole 10, and the surface of the inserting rod 12 penetrates through the inside of the inserting hole 10, when the limiting slide block 26 slides in the limiting slide groove 4, until the inserting rod 12 slides to the inside of the inserting hole 10, the inserting rod 12 is abutted to the inside of the inserting hole 10 through the reverse acting force of the second compression spring 11, so that the limiting slide block 26 is fixed, because the surface of the limiting slide block 26 is provided with the connecting column 27, the bottom end of the connecting column 27 is connected with a conductive metal sheet 5, at the moment, the conductive metal sheet 5 is connected with the first electrode 13, because one side of the conductive metal sheet 5 is provided with a metal connecting sheet 6, one side of the metal connecting sheet 6 is provided with a plurality of inserting nails 7, at the moment, the circuit board is placed in the placing groove 30, and the inserting nails 7 are inserted into the circuit board, so that the circuit board transmits power to the first electrode 13 through the metal connecting sheet 6 and the metal conductive metal sheet 5, and the first electrode 13 is electrified flexibly through the limiting sliding groove 4, the limiting sliding block 26, the first compression spring 8, the second compression spring 11, the inserting rod 12, the conductive metal sheet 5 and the metal connecting sheet 6 and the inserting nails 7, so that the problem that the circuit board or the first electrode 13 is difficult to detach, maintain and replace after being damaged due to a fixed connection mode is avoided;
through the matching work of the fixing hole 29, the first sliding groove 16, the second sliding groove 17, the fixing pin 32, the dustproof frame 3 and the sealing gasket 20, when the circuit board works, static electricity is generated around the circuit board, certain dust is adhered to the surfaces of the conductive metal sheet 5 and the metal connecting sheet 6 after the circuit board is used for a long time, and therefore part of dust enters the surface of the first electrode 13 or the surface of the piezoelectric thin film layer 14, so that a signal is weak when a subsequent signal is sent or received, and the use of the circuit board is influenced;
fixing holes 29 are formed in two sides of the bottom of the substrate 1, first sliding grooves 16 are formed in inner side walls of the fixing holes 29, second sliding grooves 17 are formed in inner side walls of the first sliding grooves 16, fixing pins 32 are connected to inner side walls of the first sliding grooves 16, sliding blocks 31 are installed on surfaces of the fixing pins 32 and slide in the first sliding grooves 16, fixing blocks 19 are installed on the surfaces and the back of the dustproof frame 3, the surfaces of the fixing pins 32 penetrate through the fixing blocks 19, after the fixing pins 32 drive the sliding blocks 31 to enter the fixing holes 29, the sliding blocks 31 slide in the first sliding grooves 16 and slide in the second sliding grooves 17, the fixing pins 32 are rotated, the sliding blocks 31 slide into the second sliding grooves 17, the fixing blocks 19 are fixed, the dustproof frame 3 is further fixed, and the dustproof frame is fixed through the fixing blocks 19, Fixed pin 32, fixed orifices 29, first sliding tray 16, second sliding tray 17, dustproof frame 3 and the sealed collocation of filling up 20 use for the electrostatic absorption's that the circuit board during operation produced dust obtains blockking, avoids the adhesion on the surface of conductive metal piece 5 and first electrode 13, influence signal's received strength, dustproof frame 3 convenient to detach and installation simultaneously, and the flexibility is higher.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (9)
1. A thin film bulk acoustic resonator filter, comprising: the dust-proof cover comprises a base (1), wherein the top of the base (1) is connected with a cover shell (2), the bottom of the base (1) is connected with a dust-proof frame (3), a water-absorbing sponge layer (23) is arranged on the inner top wall of the cover shell (2), an air hole is formed in one side of the cover shell (2), and a dust-proof net (24) is arranged on the surface of the air hole;
the inner supporting framework mechanisms (18) are arranged between the base (1) and the covering shell (2), each inner supporting framework mechanism (18) comprises two side vertical rods (181), two transverse bearing assemblies and a plurality of vertical energy absorbing mechanisms (183), each side vertical rod (181) is arranged between the base (1) and the covering shell (2), the end parts of the transverse bearing assemblies are movably connected with the side vertical rods (181), the vertical energy absorbing mechanisms (183) are arranged between the two transverse bearing assemblies, each transverse bearing assembly comprises a first hinge seat (184), a transverse rod (185) and an energy absorbing pipe mechanism (186), the transverse rods (185) and the energy absorbing pipe mechanisms (186) are respectively provided with a plurality of energy absorbing pipe mechanisms (186) arranged between the two transverse rods (185), and the transverse rods (185) are hinged with the first hinge seats (184), and the vertical energy absorbing mechanism (183) is movably arranged between an upper transverse bar (185) and a lower transverse bar (185), the energy absorbing pipe mechanism (186) comprises an upper pipe (187), a lower pipe (188), two first tensioning springs (189) and two tensioning short bars (190), two first inner pipes (191) are arranged in the lower pipe (188), two second inner pipes (192) are arranged in the upper pipe (187), the first inner pipes (191) are inserted into the second inner pipes (192), the inner ends of the first tensioning springs (189) are connected with the first inner pipes (191), the outer ends of the first tensioning springs (189) are connected with the inner ends of the tensioning short bars (190), and the outer ends of the tensioning short bars (190) are connected with the transverse bars (185).
2. The film bulk acoustic wave resonator filter according to claim 1, wherein a hollow groove is formed in the bottom of the substrate (1), a set of limiting sliding grooves (4) is formed in the inner side wall of the hollow groove, a limiting sliding block (26) is slidably connected to the inside of each limiting sliding groove (4), a connecting column is arranged on the surface of each limiting sliding block (26), a conductive metal sheet (5) is arranged at the bottom end of each connecting column (27), a metal connecting sheet (6) is arranged on one side of each conductive metal sheet (5), and a plurality of inserting nails (7) are arranged on one side of each metal connecting sheet (6).
3. The film bulk acoustic wave resonator filter according to claim 2, wherein a first compression spring (8) is disposed on an inner side wall of the limiting sliding groove (4), a bottom end of the first compression spring (8) is connected to one side of the limiting sliding block (26), a movable groove (9) is formed in an inner side wall of the empty groove (25), an insertion hole (10) is formed in an inner bottom wall of the movable groove (9), both a top portion and a bottom portion of the limiting sliding block (26) are provided with a placing groove (28), an inner bottom wall of the placing groove (28) is provided with a second compression spring (11), an insertion rod (12) is disposed at a bottom end of the second compression spring (11), and a surface of the insertion rod (12) penetrates through the inside of the insertion hole (10).
4. A thin film bulk acoustic resonator filter according to claim 2, characterized in that the other side of the conductive metal sheet (5) is connected to a first electrode (13), the first electrode (13) is positioned on the top of the substrate (1), the top of the first electrode (13) is provided with a piezoelectric film layer (14), the top of the piezoelectric film layer (14) is provided with a second electrode (15), both sides of the bottom of the substrate (1) are provided with fixing holes (29), a first sliding groove (16) is arranged on the inner side wall of the fixing hole (29), a second sliding groove (17) is arranged on the inner side wall of the first sliding groove (16), the inner side wall of the fixing hole is connected with a fixing pin (32), the surface of the fixing pin (32) is provided with a sliding block (31), and the surface of the sliding block (31) is connected with the inside of the first sliding groove (16) in a sliding way.
5. The film bulk acoustic wave resonator filter according to claim 1, wherein a set of threaded holes are formed on both sides of the top of the substrate (1), and fastening bolts (21) are screwed into the threaded holes.
6. A thin film bulk acoustic resonator filter according to claim 1, characterized in that a set of silica gel feet (22) is provided on both sides of the bottom of the substrate (1).
7. The film bulk acoustic wave resonator filter according to claim 1, wherein the dust-proof frame (3) has fixing blocks (19) on both the front and back surfaces thereof, a through hole is formed in one side of the fixing block (19), and the surface of the fixing pin (32) penetrates through the inside of the through hole.
8. The film bulk acoustic wave resonator filter according to claim 1, wherein a placement groove (30) is formed in one side of the dust-proof frame (3), and a sealing gasket (20) is disposed on an inner side wall of the placement groove (30).
9. The film bulk acoustic wave resonator filter according to claim 1, wherein the vertical energy absorbing mechanism (183) comprises a flexible rod member, a plurality of energy absorbing blocks (193), the plurality of energy absorbing blocks (193) being disposed on the flexible rod member, the flexible rod member comprising a second tension spring (194), a flexible tube (195), a second hinge seat (196), a lower pull seat (197), the second hinge seat (196) being disposed on the upper transverse rod (185), the lower pull seat (197) being disposed on the lower transverse rod (185), the second hinge seat (196) being disposed with a hinge rod, the lower pull seat (197) being disposed with a lower pull rod (199) therein, the second tension spring (194) being disposed in the flexible tube (195), the lower end of the flexible tube (195) passing through the lower transverse rod (185), and the upper end of the second tensioning spring (194) is connected with the hinged rod, the lower end of the second tensioning spring is connected with the upper end of the lower pull rod (199), and the energy absorption blocks (193) are arranged outside the flexible pipe (195).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111614101.4A CN113992181B (en) | 2021-12-28 | 2021-12-28 | Film bulk acoustic wave resonant filter |
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| CN202111614101.4A CN113992181B (en) | 2021-12-28 | 2021-12-28 | Film bulk acoustic wave resonant filter |
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| CN113992181B true CN113992181B (en) | 2022-03-11 |
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| CN112165310A (en) * | 2020-09-25 | 2021-01-01 | 中国科学技术大学 | Film bulk acoustic wave resonant filter |
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| JP2001237560A (en) * | 2000-02-25 | 2001-08-31 | Kyocera Corp | Electronic parts device |
| JP2014197615A (en) * | 2013-03-29 | 2014-10-16 | 日本電波工業株式会社 | Electronic device and manufacturing method of the same |
| CN210986060U (en) * | 2019-11-27 | 2020-07-10 | 常州运达新科技研发有限公司 | Resonator quartz crystal convenient to dismantle and replace |
| CN213243947U (en) * | 2020-09-11 | 2021-05-18 | 苏州凌维康通信科技有限公司 | Filter with anti-interference structure |
| CN212909453U (en) * | 2020-09-27 | 2021-04-06 | 浙江一晶科技股份有限公司 | Built-in electric capacity ceramic resonator |
| CN215269394U (en) * | 2021-01-13 | 2021-12-24 | 徐州沃孚机械制造有限公司 | Multifunctional agricultural machine rack |
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