CN113990735A - Excimer lamp and processing method - Google Patents
Excimer lamp and processing method Download PDFInfo
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- CN113990735A CN113990735A CN202111381019.1A CN202111381019A CN113990735A CN 113990735 A CN113990735 A CN 113990735A CN 202111381019 A CN202111381019 A CN 202111381019A CN 113990735 A CN113990735 A CN 113990735A
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- 238000003672 processing method Methods 0.000 title abstract description 6
- 239000011521 glass Substances 0.000 claims abstract description 237
- 238000007789 sealing Methods 0.000 claims abstract description 61
- 230000001681 protective effect Effects 0.000 claims abstract description 17
- 239000000463 material Substances 0.000 claims abstract description 9
- 239000007787 solid Substances 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000002844 melting Methods 0.000 claims description 7
- 230000008018 melting Effects 0.000 claims description 7
- 239000013013 elastic material Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 238000007664 blowing Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000012780 transparent material Substances 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 241000973497 Siphonognathus argyrophanes Species 0.000 claims 3
- 230000000694 effects Effects 0.000 abstract description 11
- 230000008901 benefit Effects 0.000 abstract description 4
- 238000009413 insulation Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 20
- 238000009423 ventilation Methods 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 4
- 229910052801 chlorine Inorganic materials 0.000 description 4
- 229920002379 silicone rubber Polymers 0.000 description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 3
- 239000004926 polymethyl methacrylate Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000005355 lead glass Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 239000004636 vulcanized rubber Substances 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
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- Manufacturing & Machinery (AREA)
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- Plasma & Fusion (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Abstract
The invention discloses an excimer lamp and a processing method thereof, and the excimer lamp comprises an outer glass tube, wherein two inner glass tubes are arranged in the outer glass tube, a solid area is arranged at the joint of the two inner glass tubes, electrodes are inserted in the inner glass tubes, one end of each electrode is fixedly provided with a second connecting column, one end of each second connecting column is welded with a sealing sheet, one end of each sealing sheet is welded with a first connecting column, one end of each outer glass tube is provided with an outer sealing area, each sealing sheet is fixed at the central part of the outer sealing area, the inner glass tube is in a closed state, and protective gas is filled in the inner glass tube. The invention has the advantages that the inner glass tube is sleeved outside the electrode to increase the insulation effect, so that the distance between the traditional net columns is favorably shortened, the volume of the whole device is further reduced, the material consumption is less, the processing is convenient, and the technical effects of small volume and wider application range are achieved.
Description
Technical Field
The invention relates to the technical field of excimer lamps, in particular to an excimer lamp and a processing method thereof.
Background
The excimer light source is commonly called excimer lamp, and is similar to the structure of common illuminating lamp, and the excimer lamp also has filament and shell, but is different from the principle that the common illuminating lamp emits light by current heat effect, the excimer lamp of dielectric barrier discharge uses high voltage applied on the filament to puncture the gas in the shell so as to emit light by discharge,ultraviolet rays are generated in this process. Besides dielectric barrier discharge, the material can be made into excimer radiation light source by electrodeless discharge such as microwave discharge, and its working substance is Xe2(172nm)，Kr2(146nm) or Ar2(126nm), wherein Xe2The efficiency of the excimer light source is the highest, and the light energy conversion efficiency is more than 50%. 60-watt Xe2 excimer large-area flat lighting systems of 58X 68cm have been produced, and the advantage of the highly toxic mercury element in such lamps, in particular, is of great environmental protection.
In the structure of the existing excimer lamp, two layers of concentric net columns are arranged in the lamp tube, the bottom ends of the two layers of columnar nets are respectively connected with one conductive column, inert gas is filled in the tube to improve the insulation effect, the gas in the tube is punctured through the discharge of the two layers of net columns to discharge, and the volume of the lamp tube is greatly increased due to the adoption of the two layers of net columns, so that the application occasion of the excimer lamp is limited.
Disclosure of Invention
The invention discloses an excimer lamp and a processing method thereof, aiming at solving the technical problem that the application occasions of the excimer lamp are limited because the volume of a lamp tube is greatly increased by adopting two layers of net posts in the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme:
an excimer lamp comprises an outer glass tube, wherein two inner glass tubes are arranged in the outer glass tube, a solid area is arranged at the joint of the two inner glass tubes, electrodes are inserted in the inner glass tubes, a second connecting column is fixedly installed at one end of each electrode, a sealing sheet is welded at one end of each second connecting column, a first connecting column is welded at one end of each sealing sheet, a third connecting column is welded at one end of each first connecting column, an outer sealing area is arranged at one end of each outer glass tube, the sealing sheets are fixed at the central position of the outer sealing area, the inner glass tubes are in a closed state, protective gas is filled in the inner glass tubes, and the outer glass tubes and the inner glass tubes are made of transparent materials;
in the scheme, the traditional net post is replaced by the linear electrode, and the inner glass tube is sleeved outside the electrode to increase the insulation effect, so that the distance between the traditional net posts is favorably shortened; in addition, the inner glass tube is matched with the electrode, and when in discharge, the discharge can be carried out on the inner wall of the inner glass tube in a net form, so that the generated ultraviolet ray light is more uniform; the inner glass tube and the outer glass tube are of a communicated structure, so that heat generated by the electrode in the inner glass tube is conveniently dissipated outwards, the temperature of the electrode is favorably reduced, the service life of the device is favorably prolonged, and the application range of the device is expanded by reducing the size of the device.
In a preferred scheme, the first connecting column and the second connecting column are metal conductors made of the same material, and the first connecting column and the second connecting column are convenient to play a role in supporting the electrodes and connecting the outer glass tube.
In a preferred scheme, the outer glass tube and the inner glass tube are made of organic glass, the organic glass is polymethyl methacrylate, the organic glass has the advantages of high transparency, low price, easiness in machining, nonflammability, self-extinguishing property and the like, meanwhile, the melting point of the organic glass is low, the organic glass is convenient to machine and shape, and compared with common glass, the organic glass is lower in ultraviolet ray filtering capacity, and ultraviolet rays generated by a lamp body can conveniently penetrate through the outer glass tube.
In a preferred scheme, the pipe orifices of the inner glass tubes are all sleeved with clamping rings, the clamping rings are made of elastic materials, the clamping rings can be made of vulcanized rubber, and the arranged clamping rings can avoid part damage caused by collision between the pipe orifices of the inner glass tubes and the inner walls of the outer glass tubes; because the collision between the organic glass can send comparatively crisp sound, and the snap ring that adopts elastic material separates the mouth of pipe of interior glass pipe and outer glass pipe to this realization reduces the effect that the collision produced the noise.
In a preferable scheme, a transparent and elastic ring pad is fixedly installed on the inner wall of one end, far away from the outer sealing area, of the outer glass tube, the specific ring pad can be made of silicon rubber, the silicon rubber has transparency and good elasticity, and the arranged ring pad is used for reducing collision between one end, close to the inner sealing, of the inner glass tube and the inner wall of the outer glass tube.
A method for processing an excimer lamp comprises the following steps:
s1: the inner glass tubes are welded, the initial state of the inner glass tubes is a bottomless tube shape, so that before the inner glass tubes are used, one ends of the two inner glass tubes need to be aligned, and the ends of the two inner glass tubes need to be welded into a whole in a hot melting mode; the organic glass is adopted, so that the processing mode is simpler, and the production cost is lower; the organic glass has excellent arc resistance, and the surface of the organic glass cannot generate carbonized conductive paths and arc tracks under the action of electric arcs, so that the organic glass is favorable for maintaining good appearance;
s2: putting the welded inner glass tube into an outer glass tube, so that the opening of the inner glass tube is in the same direction as the opening of the outer glass tube;
s3: inserting a conductive component into an inner glass tube such that a sealing tab in the conductive component is located at an outer sealing area of the outer glass tube and an electrode in the conductive component is not located at the outer sealing area; the conductive assembly is formed by sequentially connecting a first connecting column, a second connecting column and an electrode in series;
s4: blowing air flow to the outer glass tube for preheating, and then heating and sealing the outer glass tube by using pliers;
s5: one end of the outer glass tube is provided with an inflation inlet, protective gas is filled into the outer glass tube through the inflation inlet, the inflation inlet is closed after inflation is finished, and a closed structure is formed inside the outer glass tube again; the shielding gas may be chlorine.
In a preferred embodiment, in the step S4, the outer glass tube is preheated by a drying air flow at 50-60 ℃ to avoid the organic glass from being locally and suddenly heated to crack, and then the mouth of the outer glass tube is clamped by pliers to clamp the mouth of the outer glass tube towards the middle, when the outer glass tube is clamped, the tube opening of the outer glass tube can overflow to two sides of the high-temperature clamp, and the tube wall of the outer glass tube overflowing to the side edge is extruded towards the middle, so that the tube opening of the outer glass tube is sealed and an outer sealing area is formed, because the four sides extrude towards the middle, the thickness of the arc convex structure formed at the four peripheral corners of the outer sealing area is larger, the glass tube outer glass tube is not easy to damage during collision, so that the anti-collision performance of the device in the transportation process can be effectively improved through the outer convex structure, and the temperature of the tube opening of the welded outer glass tube is the same as that of the welded inner glass tube.
In a preferable scheme, in the step S5, the portion of the sealed inflation port protruding outward is heated and pressed into the outer glass tube, so that the distance between the end of the inflation port and the central axis of the outer glass tube is not greater than the radius of the outer glass tube, thereby preventing the inflation port from protruding outward and being easily hooked with the outside.
According to the excimer lamp, the excimer lamp comprises an outer glass tube, two inner glass tubes are arranged in the outer glass tube, a solid area is arranged at the joint of the two inner glass tubes, electrodes are inserted into the inner glass tubes, a second connecting column is fixedly mounted at one end of each electrode, a sealing sheet is welded at one end of each second connecting column, a first connecting column is welded at one end of each sealing sheet, an outer sealing area is arranged at one end of each outer glass tube, the sealing sheets are fixed at the central position of the outer sealing area, the inner glass tubes are in a closed state, and protective gas is filled in the inner glass tubes. According to the invention, the traditional net post is replaced by the spiral electrode, and the inner glass tube is sleeved outside the electrode to increase the insulation effect, so that the distance between the traditional net posts is favorably shortened.
Drawings
Fig. 1 is a cross-sectional view of an excimer lamp according to the present invention.
Fig. 2 is a schematic diagram of an overall structure of an excimer lamp according to the present invention.
FIG. 3 is a schematic diagram of an electrode structure of an excimer lamp according to the present invention.
FIG. 4 is a schematic diagram of a snap ring structure of an excimer lamp according to the present invention.
Fig. 5 is a partial cross-sectional structural view of an excimer lamp according to the present invention.
FIG. 6 is a flow chart of a method for manufacturing an excimer lamp according to the present invention.
FIG. 7 is a sectional view of a ventilation opening of an excimer lamp according to the present invention.
Fig. 8 is a schematic view of a conductive lead structure according to an embodiment of the invention.
In the figure: 1. an outer glass tube; 2. an outer seal area; 3. a first connecting column; 5. an inner glass tube; 6. a second connecting column; 7. a sealing sheet; 8. a solid area; 9. an electrode; 10. a snap ring; 11. a ring pad; 12. a ventilation port; 13. and (4) sealing the plug.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
The excimer lamp and the processing method disclosed by the invention are mainly applied to the prior art which adopts two layers of net posts, so that the volume of a lamp tube is greatly increased, and the application occasions of the excimer lamp are limited.
Referring to fig. 1 and 2, an excimer lamp comprises an outer glass tube 1, two inner glass tubes 5 are arranged in the outer glass tube 1, a solid area 8 is arranged at the joint of the two inner glass tubes 5, electrodes 9 are inserted in the inner glass tubes 5, one ends of the electrodes 9 are fixedly provided with second connecting columns 6, one ends of the second connecting columns 6 are welded with sealing sheets 7, one ends of the sealing sheets 7 are welded with first connecting columns 3, one end of the outer glass tube 1 is provided with an outer sealing area 2, the sealing sheets 7 are fixed at the central part of the outer sealing area 2, the inner glass tube 5 is in a closed state, protective gas is filled in the inner glass tube 5, the outer glass tube 1 and the inner glass tube 5 are made of transparent materials, and the electrodes 9 are linear; in the scheme, the traditional net post is replaced by the linear metal wire electrode 9, the inner glass tube 5 is sleeved outside the electrode 9, the insulating effect is increased through the inner glass tube 5, so that the distance between the traditional net posts is favorably shortened, the volume of the whole device is reduced due to the reduction of the distance and the volume between the two electrodes 9, the volume of a lamp body is reduced, and the application occasion is enlarged; the material consumption is less, the processing is convenient, and the volume is small, so that the mass production is realized; in addition, the inner glass tube 5 is matched with the electrode 9, and when in discharge, the discharge can be carried out at the inner net in a net shape, so that the generated ultraviolet ray light is more uniform; the inner glass tube 5 and the outer glass tube 1 are in a communicated structure, so that heat generated by the electrode 9 in the inner glass tube 5 is conveniently dissipated outwards, the temperature of the electrode 9 is favorably reduced, and the service life of the device is favorably prolonged; compare in the net post structure among traditional excimer lamp, electrode 9's in this scheme is small, and the during operation heat production is also less relatively, further prolongs the life of device.
The first connecting column 3 and the second connecting column 6 are metal conductors made of the same material, and the first connecting column 3 and the second connecting column 6 with proper hardness are convenient to play roles of supporting the electrode 9 and connecting the outer glass tube 1.
The organic glass, namely polymethyl methacrylate, has the advantages of high transparency, low price, easiness in machining, non-flammability, self-extinguishing property and the like, meanwhile, the melting point of the organic glass is low, the organic glass is convenient to machine and shape, and compared with common glass, the organic glass has lower filtering capacity on ultraviolet rays, and the ultraviolet rays generated by the lamp body can conveniently penetrate through the outer glass tube 1, so that in an optimal implementation mode, the selected materials of the outer glass tube 1 and the inner glass tube 5 are organic glass.
Since the inner glass tube 5 is placed in the outer glass tube 1 and is not fixed, collision can occur between the inner glass tube 5 and the inner glass tube, referring to fig. 3 and 4, in a preferred embodiment, the tube orifices of the inner glass tube 5 are all sleeved with clamping rings 10, the clamping rings 10 are made of elastic materials, the specific clamping rings 10 can be made of vulcanized rubber materials, and the arranged clamping rings 10 can avoid damage to components caused by collision between the tube orifices of the inner glass tube 5 and the inner wall of the outer glass tube 1; because the collision between the organic glass can send out comparatively crisp sound, and the snap ring 10 adopting the elastic material separates the pipe orifice of the inner glass tube 5 from the outer glass tube 1, thereby realizing the effect of reducing the noise generated by the collision.
Referring to fig. 5, in a preferred embodiment, a transparent and elastic ring pad 11 is fixedly installed on the inner wall of one end of the outer glass tube 1 away from the outer sealing area 2, the ring pad 11 may be made of silicon rubber, the silicon rubber has transparency and good elasticity, and the ring pad 11 is arranged to reduce the collision between the sealed end of the inner glass tube 5 and the inner wall of the outer glass tube 1.
The glass transition temperature of the polymethyl methacrylate reaches 104 ℃, but the highest continuous use temperature is changed between 65 ℃ and 95 ℃ along with different working conditions, the thermal deformation temperature is about 96 ℃ and 1.18MPa, the Vicat softening point is about 113 ℃, and the softening temperature of common glass is about 500 ℃, so that the processing mode is simpler and the production cost is lower by adopting the organic glass; the organic glass has excellent arc resistance, and the surface of the organic glass does not generate carbonized conductive paths and arc tracks under the action of electric arcs, thereby being beneficial to maintaining good appearance.
Referring to fig. 6, a method for manufacturing an excimer lamp includes the following steps:
s1: the inner glass tubes 5 are welded, and the initial state of the inner glass tubes 5 is a bottomless tube shape, so that before the glass tube is used, one ends of the two inner glass tubes 5 need to be aligned and the ends of the two inner glass tubes 5 need to be welded into a whole in a hot melting mode;
s2: placing the welded inner glass tube 5 into the outer glass tube 1, so that the opening of the inner glass tube 5 is in the same direction as the opening of the outer glass tube 1;
s3: inserting the conductive component into the inner glass tube 5 such that the sealing sheet 7 in the conductive component is located at the outer sealing area 2 of the outer glass tube 1 and the electrode 9 in the conductive component is not located at the outer sealing area 2; the first connecting column 3, the second connecting column 6 and the electrode 9 are connected in series in sequence;
s4: the method comprises the steps of blowing air flow to an outer glass tube 1 for preheating, and then heating and sealing the outer glass tube 1 by using pliers, wherein the outer glass tube 1 is preheated by using drying air flow at 50-60 ℃, the preheating is to avoid the phenomenon that the local part of organic glass is suddenly heated and cracked, then the mouth of the outer glass tube 1 is clamped by using pliers, the mouth of the outer glass tube 1 is clamped towards the middle, when the mouth of the outer glass tube 1 is clamped, the mouth of the outer glass tube 1 overflows towards two sides of a high-temperature clamp, at the moment, the tube wall of the outer glass tube 1 overflowing towards the side edge is extruded towards the middle, so that the mouth of the outer glass tube 1 is sealed and forms an outer sealing area 2, and the four sides of the outer sealing area 2 are extruded towards the middle to form an arc-shaped convex structure with larger thickness, so that the convex structure is not easy to damage during collision, and the convex structure can effectively improve the anti-collision performance of the device in the transportation process, the pipe orifice temperature of the outer glass tube 1 is the same as the temperature when the inner glass tube 5 is welded;
s5: one end of the outer glass tube 1 is provided with an inflation inlet, protective gas is filled into the outer glass tube 1 through the inflation inlet, the inflation inlet is closed after inflation is finished, and a closed structure is formed inside the outer glass tube 1 again; the protective gas can be chlorine, wherein, the part of the sealed inflation inlet protruding outwards is heated and pressed towards the inside of the outer glass tube 1, so that the distance between the end of the inflation inlet and the central axis of the outer glass tube 1 is not more than the radius of the outer glass tube 1, and the phenomenon that the inflation inlet protrudes outwards and is easily hooked with the outside is avoided.
In a preferred embodiment, in step S1, the two welded inner glass tubes 5 are U-shaped, and the joint of the two inner glass tubes 5 is a solid structure, so as to avoid the electric discharge phenomenon in the two inner glass tubes 5 and enhance the isolation effect between the two electrodes 9.
In a preferred embodiment, the length of the outer sealing area 2 is the same as the diameter of the outer glass tube 1, thereby being beneficial to avoiding hanging buckles between the outer glass tube 1 and the outside and facilitating transportation and installation.
Referring to fig. 7, in a preferred embodiment, a ventilation opening 12 is provided on the outer wall of one end of the outer glass tube 1, the ventilation opening 12 extends to the side far away from the outer glass tube 1, a sealing plug 13 is inserted into the ventilation opening 12, for example, the protective gas filled in the outer glass tube 1 before is chlorine, but when the work occasion changes, argon gas is used as the protective gas at present, if the ventilation opening 12 is not provided, a complete device needs to be changed, at this time, much cost is needed, and after the ventilation opening 12 is provided, a worker pulls the sealing plug 13 to extract the existing protective gas chlorine in the outer glass tube 1, fills new protective gas argon gas again, and then tightly plugs the sealing plug 13, so that the change of the protective gas can be completed, and the change cost is reduced without changing the whole device.
Ordinary glass is not crystal, so a fixed melting point is not provided, but the glass has a softening point, the softening point of lead glass is 500 ℃, the softening point of quartz glass is 1600 ℃, wherein the lead glass is lower in price, and the temperature resistance of the quartz glass is better, therefore, in a preferred embodiment, the inner glass tube 5 and the outer glass tube 1 both adopt quartz glass, the welding of one end of the two inner glass tubes 5 is completed before the inner glass tube 1 is placed, after the inner glass tube 5 is placed into the outer glass tube 1, the end of the inner glass tube 5 communicated with the outer glass tube 1 is subjected to high-temperature sealing at a temperature of not less than 1600 ℃ to form an outer sealing area 2, so that an independent space is formed inside the inner glass tube 5, at the moment, the outer glass tube 1 and the inner glass tube 5 are fixedly installed, at the moment, when the inner glass tube 5 and the outer glass tube 1 are melted at a high temperature, the high-temperature environment causes the gas in the glass tube to expand and overflow, after the sealing and cooling, the inner glass tube 5 is in a state close to vacuum, so that the problem that ozone is generated by ionization when a large amount of air exists in the inner glass tube 5 is solved, after the outer sealing area 2 is formed, protective gas is added between the outer glass tube 1 and the inner glass tube 5 from the ventilation port 12, so that ultraviolet light is generated when the two electrodes 9 are electrified and ionized, if a lamp is manufactured by organic glass, the melting temperature of the lamp is not enough to remove the internal air, the interior of the lamp can be firstly vacuumized through the ventilation port 12, and then the protective gas is added.
Referring to fig. 8, in a preferred embodiment, the first connecting column 3 and the sealing sheet 7 are eliminated, one end of the second connecting column 6 is extended to the outside of the outer sealing region 2, and after the first connecting column 3 and the sealing sheet 7 are eliminated, the second connecting column 6 is used as a conductive pin, so that the whole device has a simpler structure, the processing steps are simpler, the production cost is reduced, and the production efficiency is improved. Furthermore, the electrode 9 directly extends to the external power supply without using the connecting column 6 for switching, so that the structure is simpler and more convenient, and the method is suitable for large-scale 1 rapid mass production.
The working principle is as follows: when the device is used, the first connecting column 3 is connected into an external circuit, the first connecting column 3, the second connecting column 6, the sealing sheet 7 and the electrodes 9 are connected in series to form a conductor, the two electrodes 9 are not contacted, the protective gas in the outer glass tube 1 and the inner glass tube 5 play an insulating role, at the moment, under the action of an external circuit ballast, high voltage is generated at the electrodes 9 and high-voltage discharge is generated, and then ultraviolet light is generated at the motor 9, because the traditional net column is replaced by the straight metal wire-shaped electrodes 9 in the scheme, and the inner glass tube 5 is sleeved outside the electrodes 9 to increase the insulating effect, the distance between the traditional net columns is favorably shortened, the volume of the whole device is reduced due to the fact that the distance and the volume between the two electrodes 9 are shortened, the materials are fewer, the processing is convenient, and the volume is small in mass production; in addition, the inner glass tube 5 and the electrode 9 are matched with each other, and when in discharge, the discharge can be carried out at the inner net in a net shape, so that the generated ultraviolet ray light is more uniform.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (10)
1. An excimer lamp comprises an outer glass tube (1), and is characterized in that two inner glass tubes (5) are arranged in the outer glass tube (1), a solid area (8) is arranged at the joint of the two inner glass tubes (5), electrodes (9) are inserted into the inner glass tubes (5), one end of each electrode (9) is fixedly provided with a second connecting column (6), one end of the second connecting column (6) is welded with a sealing sheet (7), one end of the sealing sheet (7) is welded with the first connecting column (3), one end of the outer glass tube (1) is provided with an outer sealing area (2), the sealing sheet (7) is fixed at the central part of the outer sealing area (2), the inner glass tube (5) is in a closed state, protective gas is filled in the inner glass tube (5), the outer glass tube (1) and the inner glass tube (5) are made of transparent materials.
2. An excimer lamp as claimed in claim 1, wherein the first connecting stud (3) and the second connecting stud (6) are metal conductors of the same material.
3. An excimer lamp as claimed in claim 1, wherein the outer glass tube (1) and the inner glass tube (5) are made of organic glass.
4. The excimer lamp as claimed in claim 1, wherein the mouth of the inner glass tube (5) is sleeved with a snap ring (10), and the snap ring (10) is made of elastic material.
5. An excimer lamp as claimed in any one of claims 1 to 4, wherein a transparent and elastic ring pad (11) is fixedly mounted on the inner wall of one end of the outer glass tube (1) away from the outer sealing area (2).
6. A process for producing an excimer lamp as claimed in claim 1, comprising the steps of:
s1: welding the two inner glass tubes (5), aligning one ends of the two inner glass tubes (5) and welding the ends of the two inner glass tubes (5) into a whole in a hot melting mode;
s2: placing the welded inner glass tube (5) into the outer glass tube (1) so that the opening of the inner glass tube (5) and the opening of the outer glass tube (1) are in the same direction;
s3: inserting a conductive component into the inner glass tube (5) such that the sealing tab (7) in the conductive component is located at the outer sealing region (2) of the outer glass tube (1) and the electrode (9) in the conductive component is not located at the outer sealing region (2); the conductive component is formed by sequentially connecting the first connecting column (3), the second connecting column (6) and the electrode (9) in series;
s4: blowing air flow to the outer glass tube (1) for preheating, and then heating and sealing the outer glass tube (1) by using pliers;
s5: and arranging an inflation inlet at one end of the outer glass tube (1), filling protective gas into the outer glass tube (1) through the inflation inlet, sealing the inflation inlet after inflation is finished, and forming a closed structure in the outer glass tube (1) again.
7. The method as claimed in claim 6, wherein in said step S1, the two welded inner glass tubes (5) are U-shaped, and the joint of the two inner glass tubes (5) is solid.
8. The method as claimed in claim 6, wherein in step S4, the outer glass tube (1) is preheated by a dry air flow at 50-60 ℃, then the tube mouth of the outer glass tube (1) is clamped by pliers, the tube mouth of the outer glass tube (1) is clamped towards the middle, and the tube wall of the outer glass tube (1) overflowing to the side is pressed towards the middle, so that the tube mouth of the outer glass tube (1) is sealed and the outer sealing area (2) is formed.
9. A method of manufacturing an excimer lamp as claimed in claim 6, wherein the length of the outer seal area (2) is the same as the diameter of the outer glass tube (1).
10. The method as claimed in any one of claims 6 to 9, wherein in step S5, the portion of the sealed gas filling port protruding outward is heated and pressed into the outer glass tube (1) so that the distance between the end of the gas filling port and the central axis of the outer glass tube (1) is not greater than the radius of the outer glass tube (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111381019.1A CN113990735A (en) | 2021-11-20 | 2021-11-20 | Excimer lamp and processing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111381019.1A CN113990735A (en) | 2021-11-20 | 2021-11-20 | Excimer lamp and processing method |
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| Publication Number | Publication Date |
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| CN113990735A true CN113990735A (en) | 2022-01-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202111381019.1A Pending CN113990735A (en) | 2021-11-20 | 2021-11-20 | Excimer lamp and processing method |
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| CN (1) | CN113990735A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11191396A (en) * | 1997-12-26 | 1999-07-13 | Quark Systems Kk | Excimer lamp and excimer emission device |
| JP2006202603A (en) * | 2005-01-20 | 2006-08-03 | Quark Systems Co Ltd | Excimer lamp |
| CN101093782A (en) * | 2007-07-16 | 2007-12-26 | 宋宝山 | Sodium lamp in low pressure |
| CN201233864Y (en) * | 2008-07-18 | 2009-05-06 | 詹云翔 | Sterilizing ultraviolet lamp for refrigerator and freezer |
| CN216250632U (en) * | 2021-11-20 | 2022-04-08 | 广东星普节能光电有限公司 | Excimer lamp |
-
2021
- 2021-11-20 CN CN202111381019.1A patent/CN113990735A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11191396A (en) * | 1997-12-26 | 1999-07-13 | Quark Systems Kk | Excimer lamp and excimer emission device |
| JP2006202603A (en) * | 2005-01-20 | 2006-08-03 | Quark Systems Co Ltd | Excimer lamp |
| CN101093782A (en) * | 2007-07-16 | 2007-12-26 | 宋宝山 | Sodium lamp in low pressure |
| CN201233864Y (en) * | 2008-07-18 | 2009-05-06 | 詹云翔 | Sterilizing ultraviolet lamp for refrigerator and freezer |
| CN216250632U (en) * | 2021-11-20 | 2022-04-08 | 广东星普节能光电有限公司 | Excimer lamp |
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