CN113990734A - Transverse time-of-flight cluster mass selector and method of use - Google Patents
Transverse time-of-flight cluster mass selector and method of use Download PDFInfo
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Abstract
The invention discloses a transverse flight time cluster mass selector and a use method thereof.A pair of parallel plate electrodes is adopted to replace a complex structure of three groups of electrodes of a cluster ion forward deflection area, a free flight area and a reverse deflection area in the current universal cluster flight time mass selector, so that the structure of the selector is greatly simplified. The cluster quality selected by the selector has a simple linear relation with the amplitude of the acceleration and deceleration pulse voltage applied to the parallel plate electrode, so that the cluster quality can be simply selected by adjusting the amplitude of the pulse voltage, the debugging and the operation of the selector are visual, simple and easy, the mass resolution is constant, and the calibration is rapid. By properly setting the temporal logic of the voltage pulses, a high throughput of 50% can be achieved for cluster mass selection. In addition, the electric field distribution structure restrains ions from converging towards the axis, and compared with the electric field distribution configuration of the current general cluster flight time mass selector, which causes ion divergence, the electric field distribution structure is more favorable for improving beam quality.
Description
Technical Field
The invention belongs to the technical field of atomic molecular physics and nano science, and relates to a device widely applied to cluster physical and chemical property research and cluster beam controllable deposition, in particular to a transverse flight time cluster mass selector and a using method thereof.
Background
The size selection of cluster beams and the real-time measurement of the size distribution of clusters are very critical in the processes of cluster basic research and cluster beam deposition preparation of cluster assembled nano-structure materials and devices, and are indispensable components in various cluster beam systems.
The size selection of cluster beams can be divided into two categories, namely neutral clusters and ionized clusters. The size selection of the neutral cluster mainly adopts a gas dynamic lens, a runner splitter and the like, and the device for selecting the size of the ionized cluster mainly comprises a quadrupole mass filter, a time-of-flight mass selector and a differential mobility analyzer. Quadrupole mass filters have a limited mass selection range and typically only achieve size selection for small clusters of less than several thousand atomic masses. The differential mobility analyzer cannot realize cluster size selection resolution with atomic precision, and is generally used for size selection of large-size clusters (nanoparticles) with diameters of more than 1 nanometer. The time-of-flight mass selector can realize the size selection of atom precision from a single atom to clusters with large atomic mass number of more than 10 ten thousand, has large size selection range and high size selection precision, and is generally adopted in cluster research and cluster deposition application.
Time of flight mass spectrometry (TOF-MS) and mass selection are key components in cluster size and size distribution measurement, physical and chemical property research and single-size cluster beam acquisition and deposition devices, and have wide application in the aspects of atomic molecular physics and nano science basic research, nano particle lattice vapor deposition and the like. The TOF-MS consists of an ion source, a field-free drift tube and a detection area. Ions are generated in the ionization region and accelerated out of the source region into the field-free drift tube. The velocity of the ions in the field-free drift space is a function of the charge-to-mass ratio Q/M, so that when they pass through the drift tube to the detection region, time separation is achieved by Q/M. If the generated ions are all single charges, the mass spectrum can be obtained according to the ion flight spectrum. The initial position and initial kinetic energy distribution of the ions in the ionization region are the primary factors affecting the resolution of mass spectrometry measurements. In 1955, Wiley and Mcraren used a dual field ion source [ Wiley, W.C, Mcraren, I.H., Time-of-Flight Mass Spectrometers with Improved Resolution, Rev.Sci.Instrum,1955,26: 1150-.
The principle of time-of-flight mass spectrometry is also used for size selection of cluster ions. In 1999, von Issendorff and Palmer [ B.von Issendorff, R.E.Palmer, A new high transmission infinite range mass selector for cluster and nanoparticle beams, Rev.Sci.Instrum,1999,70: 4497-. A pair of acceleration and deceleration pulse electric fields is introduced in the direction perpendicular to the flight direction of the cluster beam to enable the cluster to transversely fly in the direction perpendicular to the flight direction of the original beam, the cluster enters a field-free flight area after being accelerated in an acceleration area and then enters a deceleration area for deceleration after being subjected to uniform-speed flight, and only the cluster meeting the quality selection condition can recover the flight parallel to the flight direction of the original beam in the deceleration area by controlling the time logic between the acceleration pulse and the deceleration pulse, so that the cluster can be selected. The mass selector can keep high mass selection resolution and can keep about 50% of ion passing rate. This lateral time-of-flight mass selector is heavily used in current cluster research, particularly controlled size cluster beam deposition. However, the mass selector has a more complex electrode structure, higher requirements on the cluster beam quality and higher construction cost; the functional relation between the cluster quality and the pulse period of the acceleration and deceleration electric field is complex, and the influence factors are many, so that the adjustment and calibration are difficult and the use is inconvenient. And the cluster ions tend to diverge off-axis in the flight path due to the electric field distribution structure, so that the cluster beam quality is reduced after selection.
Disclosure of Invention
The technical problem to be solved is as follows: the cluster (nano particle) beam has wide application in the aspects of basic research of nano science, preparation of nano structure materials and the like. In the above studies and applications, control of the size and size distribution of clusters is an essential requirement. Clusters generated by existing cluster beam sources have a wide size distribution, and in many cases, it is necessary to obtain clusters of a single size by a mass (size) selector. Therefore, cluster mass selectors have a wide range of needs in the precision measurement of cluster properties and the controlled deposition of cluster beam currents. The invention provides a novel transverse flight time cluster mass selector composed of a pair of parallel plate electrodes and a using method thereof, which are used for replacing the current universal cluster flight time mass selector composed of three groups of electrodes, namely a cluster ion forward deflection area, a free flight area and a reverse deflection area, so that the structure of the mass selector is greatly simplified, and the selected cluster mass and the amplitude of acceleration and deceleration pulse voltage applied to the parallel plate electrodes have a simple linear relation, so that the mass selector is easy to debug and operate, the mass resolution is constant, the calibration is rapid, and the ion passing rate is high. And the electric field distribution structure restrains ions from converging towards the axis, which is beneficial to improving the beam quality.
The technical scheme is as follows: the transverse flight time cluster mass selector comprises parallel plate electrodes 1 and parallel plate electrodes 2 which are parallel to each other, an inlet slit plate and an outlet slit plate which are arranged in parallel, wherein the parallel plate electrodes are perpendicular to and attached to the slit plates; the parallel plate electrode 1 and the parallel plate electrode 2 are respectively externally connected with a high-voltage pulse power supply, an inlet slit is formed at one end of the inlet slit plate close to the parallel plate electrode 1, and an outlet slit is formed at one end of the outlet slit plate close to the parallel plate electrode 2; the high-voltage pulse power supply outputs high-voltage pulses V to the two electrodes1、V2All are square waves with the same period, and one period contains synchronous t0-t1、t1-t2、t2-t3Three potential states, wherein: t is t0-t1Time period, V1、V2All the potentials of (a) and (b) are kept at zero; t is t1-t2Time period, V1Is an amplitude potential, V2Is at zero potential; t is t2-t3Time period, V1Is at zero potential, V2Is an amplitude potential; the selector is disposed within the vacuum chamber.
Preferably, the parallel plate electrode and the slit plate are made of stainless steel or aluminum, and are electrically insulated from each other.
Preferably, the parallel plate electrode is a rectangular flat plate with a length of 100mm-1000mm, a width of 50mm-200mm, a thickness of 2mm-10mm, and a distance between the inner surfaces of the two parallel plate electrodes of 50mm-500 mm.
Preferably, the width of the two slit plates is consistent with the width of the parallel plate electrodes, the length of the two slit plates is consistent with the distance between the outer surfaces of the two parallel plate electrodes, and the thickness of the two slit plates is 0.5mm-3 mm.
Preferably, the entrance slit and the exit slit are bar-shaped with the same size and are parallel to the parallel plate electrode, the slit length is 10mm-50mm, and the width is 2mm-10 mm.
Preferably, the distance between the centerline of the entrance slit and the parallel plate electrode 1, and the distance between the centerline of the exit slit and the parallel plate electrode 2 are equal.
Preferably, the distance between the center line of the entrance slit and the center line of the exit slit is 45mm-495mm, and the distance between the slit center line and the corresponding parallel plate electrode is not less than 1/2 and not more than 40mm of the slit width.
Preferably, the high voltage pulse V1、V2All the periods of (a) are 3 mu s-1000 mu s, wherein t is0-t1The time period is 30-50 percent, t1-t2Time period and t2-t3The time periods are equal.
Preferably, the high voltage pulse V1、V2The voltage pulse amplitudes are equal, and the amplitude is 100V-5000V.
A method of using any of the above transverse time-of-flight cluster mass selectors, the method comprising the steps of:
s1, placing the transverse flight time cluster mass selector in a vacuum cavity, connecting a cluster source externally, and vacuumizing the device to 1 × 10-4-1×10-5Pa vacuum degree;
s2, operating a cluster source to generate a cluster beam, and enabling the cluster beam to enter the cluster mass selector through the entrance slit;
s3, starting the high-voltage pulse power supply, selecting the pulse period and t0-t1The time period accounts for the percentage, and synchronous high-voltage square wave pulses V are output to the parallel plate electrode 1 and the parallel plate electrode 21、V2The cluster flies along a transverse flight path;
and S4, adjusting the amplitude of the pulse voltage according to the cluster quality to be selected, and obtaining the selected cluster with the preset quality from the outlet slit. The selected cluster mass and the pulse voltage amplitude have the following linear relationship:
M＝eV/(2dH)Δt2wherein M is the mass of the cluster, e is the electron charge, V is the pulse voltage amplitude, d is the distance between the inner surfaces of the two parallel plate electrodes, H is the distance between the center lines of the inlet slit and the outlet slit, and Δ t is t1-t2The length of time of the time period. According to the selected high-voltage pulse period and t0-t1The length of the time period, Δ t, is determined, and therefore, a table or a curve of the correspondence between the mass of the selected cluster and the amplitude of the pulse voltage can be calculated according to the above formula, and the table or the curve is used for selecting the cluster by adjusting the amplitude of the voltage. Because the cluster quality and the pulse voltage amplitude are in a linear relation, the voltage corresponding to other qualities can be simply estimated by only memorizing the voltage corresponding to a specific quality in actual operation.
The working principle of the transverse flight time cluster mass selector is as follows: under a constant electric field, all the charged particles of mass travel along the same flight path between parallel electrodes, and therefore, the mass separation of the charged particles cannot be achieved by a constant transverse electric field. However, the time required for charged particles of different masses to fly through a defined path is related to their mass. This allows the actual flight path of the charged particle between the parallel plate electrodes to be related to its mass under a pulsed electric field having a defined pulse width. As shown in FIG. 1, a pulse voltage V is applied to a parallel plate electrode 11Applying a pulse voltage V to the parallel plate electrode 22At t0-t1In the time period, the potential difference between the two polar plates is zero, and cluster ions fly in parallel to the electrode plane after entering the parallel plate electrode area from the entrance slit at t1-t2Time period, V1Higher than V2The positively charged clusters will undergo transverse acceleration flight perpendicular to the plane of the electrodes. At t2-t3Time period, V1Below V2The positively charged clusters will fly with a lateral deceleration perpendicular to the plane of the electrodes and at t at the end of the pulse period3At which time its transverse flight speed is reduced to zero, and then remains in flight parallel to the plane of the electrode during the initial phase of the next pulse cycle, and finally either exits the exit slit or is deposited onto the exit slit plate or electrode 2 surface. Since different masses of clusters have different lateral flight accelerations, their lateral flight distances are different in the same time of flight, which results in different masses of clusters at t2After which the flight paths thereof no longer coincide. At t1-t3The transverse flight distance of the charged clusters in the time period is proportional to the ratio V/m of the pulse voltage amplitude to the mass of the pulse voltage amplitude. Wherein, the cluster with larger mass flies along the path 2, the cluster with smaller mass flies along the path 3, only the cluster with moderate mass can fly along the path 1, and at t1-t3The distance of its lateral flight in time is exactly equal to the lateral distance between the entrance slit and the exit slit and can thus be selected through the exit slit. Due to a given transverse time of flight t1-t3Clusters with the same V/m ratio have the same lateral flight distance, so that under fixed pulse time logic, linear selection of cluster mass can be achieved simply by varying the pulse voltage amplitude. At t0-t1Clusters that meet the selection criteria (mass) that enter the entrance slit during the time period can be selected through the exit slit. Wherein, as shown in FIG. 2, at t0Clusters entering the entrance slit at time t0-t1Since there is no electric field between the electrode 1 and the electrode 2 in the time period of (a), the transverse velocity is kept to be zero and is unchanged along the original flight direction from t1At the beginning of the time, is subjected to a voltage V applied to the plate 11The electric field generated is laterally accelerated and deflected toward the pole plate 2 from t2At the beginning of the moment, is subjected to a voltage V applied to the plate 22Is decelerated by the action of the generated electric field, at t3The moment the transverse velocity returns to zero, flying along path 1 through the exit slit; at t1The clusters that are momentarily entering the entrance slit are subjected to a voltage V across the plate 1 as soon as they enter the slit1The electric field generated is laterally accelerated and deflected toward the pole plate 2 from t2At the beginning of the moment, is subjected to a voltage V applied to the plate 22Is decelerated by the action of the generated electric field, at t3At that moment, the transverse velocity returns to zero, and the aircraft continues to fly along the center line of the outlet slit at the initial stage of the next pulse period and finally flies out through the outlet slit, thereby forming a flying path 2. At t1Clusters that enter the entrance slit after the moment are only V-affected1Partial acceleration of the pulse voltage, but by V2Full deceleration of the pulsed voltage, resulting in a voltage at t3Near the moment the transverse velocity becomes negative and thus flies along the path 3 without passing through the exit slit. t is t0-t1The ratio of time period to pulse period determines the percentage of clusters of a given mass that can be selected to account for the total number of clusters of that mass produced by the cluster source, i.e. the mass-selective pass rate. The pass rate can be calculated by the following formula: t ═ Δ T0-1/Δt0-3Wherein T is a pass rate, Δ T0-1Is t0-t1Time length of time period, Δ t0-3Is t0-t3The length of time of the time period.
Has the advantages that: the invention provides a transverse flight time cluster mass selector, which adopts a pair of parallel plate electrodes to replace a complex structure formed by three groups of electrodes of a cluster ion forward deflection area, a free flight area and a reverse deflection area in the current general cluster flight time mass selector, so that the structure of the mass selector is greatly simplified. The cluster quality selected by the intrinsic quantity selector has a simple linear relation with the voltage amplitudes of the acceleration pulse and the deceleration pulse applied to the parallel plate electrode, so that the cluster quality can be selected simply by adjusting the amplitude of the pulse voltage, the debugging and the operation of the mass selector are visual, simple and easy, the mass resolution is constant, and the calibration is rapid. By properly setting the temporal logic of the voltage pulses, a high throughput of 50% can be achieved for cluster mass selection. In addition, the electric field distribution structure restrains ions from converging towards the axis, and compared with the electric field distribution configuration of the current general cluster flight time mass selector, which causes ion divergence, the electric field distribution structure is more favorable for improving beam quality.
Drawings
FIG. 1 is a schematic diagram of the structure, principles and method of use of a transverse time-of-flight cluster mass selector according to the present invention;
FIG. 2 is a schematic diagram of the transverse time-of-flight cluster mass selector of the present invention using the flight path of a cluster having a mass equal to a predetermined selection value;
fig. 3 is a structural diagram of a lateral time-of-flight cluster mass selector employed in embodiment 1 of the present invention;
wherein 1 is a parallel plate electrode 1, 2 is a parallel plate electrode 2, 3 is an entrance slit plate, 4 is an exit slit plate, 5 is an entrance slit, 6 is an exit slit, and 7 is a high voltage pulse V applied to the parallel plate electrode 11And 8 is a high-voltage pulse V applied to the parallel plate electrode 229 flight paths 1 of clusters having a mass equal to a preset selection value, 10 flight paths 3 of clusters having a mass smaller than the preset selection value, 11 flight paths 2 of clusters having a mass greater than the preset selection value, 12 flight paths t0-t1Period, 13 is t1-t2Period of time, 14 is t2-t3Time period, 15, is at t0The flight path 1, 16 of a cluster having a mass equal to a predetermined selected value entering the entrance slit at the moment t is1The flight path 2, 17 of the cluster having a mass equal to a preset selected value entering the entrance slit at the moment t is1The flight path 3 of the cluster with the mass equal to the preset selection value entering the entrance slit after the moment is a transverse flight time cluster mass selector, 19 is a vacuum chamber, 20 is a vacuum pump, A is the center line of the exit slit, and B is the center line of the entrance slit.
Detailed Description
The following examples further illustrate the present invention but are not to be construed as limiting the invention. Modifications and substitutions to methods, procedures, or conditions of the invention may be made without departing from the spirit and substance of the invention. Unless otherwise specified, the technical means used in the examples are conventional means well known to those skilled in the art.
Example 1
As shown in fig. 1 and 3, the transverse time-of-flight cluster mass selector includes parallel plate electrodes 1 and 2, an inlet slit plate 3 and an outlet slit plate 4, which are parallel to each other, the parallel plate electrodes are perpendicular to and attached to the slit plates, and the mass selector is installed in a vacuum chamber 19. The parallel plate electrode, the inlet slit plate 3 and the outlet slit plate 4 are all made of aluminum; the parallel plate electrode is a rectangular flat plate with the length of 740mm, the width of 100mm and the thickness of 3 mm; the two parallel plate electrodes are placed in parallel, the distance between the inner surfaces of the flat plates is 150mm, and the flat plates are electrically insulated; the entrance slit plate 3 and the exit slit plate 4 are arranged at two ends of the long side of the parallel plate and are vertical to the plane of the parallel plate electrode, the width of each slit plate is 100mm, the length of each slit plate is 156mm, and the thickness of each slit plate is 3 mm. The entrance slit plate 3 and the exit slit plate 4 are electrically insulated from the two parallel plate electrodes; an inlet slit 5 and an outlet slit 6 are respectively arranged on the inlet slit plate and the outlet slit plate, the lengths of the slits are all 30mm, and the widths of the slits are all 8 mm; the distance between the central line of the inlet slit 5 and the inner surface of the parallel plate electrode 1 is 12mm, the distance between the central line of the outlet slit 6 and the inner surface of the parallel plate electrode 2 is 12mm, and the distance between the central lines of the inlet slit 5 and the outlet slit 6 is 128 mm; the parallel plate electrode 1 is connected with the high-voltage pulse power supply 1 through a vacuum lead flange, and the parallel plate electrode 2 is connected with the high-voltage pulse power supply 2 through the vacuum lead flange; the high-voltage pulse power supplies 1 and 2 respectively apply synchronous high-voltage pulses V with a period of 10 mu s to the electrode plates 1 and 21、V2One cycle of the high voltage pulse consists of three time segments, the first time segment being 43.4 mus, V1、V2All the potentials of (a) and (b) are zero; the second time period is 21.8 mus, V1Square wave pulses of amplitude potential, V2Is at zero potential; the third time interval is 21.8 mu s, V1At zero potential, V2 is a square wave pulse with amplitude potential.
The use method of the transverse time-of-flight cluster mass selector comprises the following steps:
and 4, adjusting the amplitude of the pulse voltage to 1800V, and obtaining the selected single-size Ag cluster with the mass of 20 silver atoms from the outlet slit 6, wherein the mass selection passing rate is 50%.
Example 2
As shown in fig. 1 and 3, the transverse time-of-flight cluster mass selector includes parallel plate electrodes 1 and 2, parallel inlet slit plate 3 and outlet slit plate 4, parallel plate electrodes are perpendicular to and attached to the slit plates, and the mass selector is installed in a vacuum chamber. The parallel plate electrode, the inlet slit plate 3 and the outlet slit plate 4 are all made of stainless steel; the parallel plate electrode is a rectangular flat plate with the length of 600mm, the width of 120mm and the thickness of 2 mm; the two parallel plate electrodes are placed in parallel, the distance between the inner surfaces of the flat plates is 200mm, and the flat plates are electrically insulated; the entrance slit plate 3 and the exit slit plate 4 are arranged at two ends of the long side of the parallel plate and are vertical to the plane of the parallel plate electrode, the width of each slit plate is 120mm, the length of each slit plate is 204mm, and the thickness of each slit plate is 1 mm. The entrance slit plate 3 and the exit slit plate 4 are electrically insulated from the two parallel plate electrodes; an inlet slit 5 and an outlet slit 6 are respectively arranged on the inlet slit plate 3 and the outlet slit plate 4, the lengths of the slits are 25mm, and the widths of the slits are 5 mm; the distance between the central line of the inlet slit 5 and the inner surface of the parallel plate electrode 1 is 12mm, the distance between the central line of the outlet slit 6 and the inner surface of the parallel plate electrode 2 is 12mm, and the distance between the central lines of the inlet slit 5 and the outlet slit 6 is 170 mm; the parallel plate electrode 1 is connected with the high-voltage pulse power supply 1 through a vacuum lead flange, and the parallel plate electrode 2 is connected with the high-voltage pulse power supply 2 through the vacuum lead flange; high-voltage pulse power supplies 1 and 2 respectively apply cycles to the electrode plates 1 and 2Synchronous high-voltage pulse V of 100 mu s1、V2One cycle of the high voltage pulse consists of three time segments, the first time segment being 200 mus, V1、V2All the potentials of (a) and (b) are zero; the second time period is 155 mus, V1Square wave pulses of amplitude potential, V2Is at zero potential; the third time period is 155 mus, V1At zero potential, V2 is a square wave pulse with amplitude potential.
The use method of the transverse time-of-flight cluster mass selector comprises the following steps:
and 4, adjusting the pulse voltage amplitude to 2500V, and obtaining the selected single-size Pd cluster with the mass of 1600 Pd atoms from the outlet slit 6, wherein the mass selection passing rate is 39%.
Example 3
As shown in fig. 1 and 3, the transverse time-of-flight cluster mass selector includes parallel plate electrodes 1 and 2, an inlet slit plate 3 and an outlet slit plate 4, which are parallel to each other, the parallel plate electrodes are perpendicular to and attached to the slit plates, and the mass selector is installed in a vacuum chamber 19. The parallel plate electrode, the inlet slit plate 3 and the outlet slit plate 4 are all made of aluminum; the parallel plate electrode is a rectangular flat plate with the length of 250mm, the width of 40mm and the thickness of 2 mm; the two parallel plate electrodes are placed in parallel, the distance between the inner surfaces of the flat plates is 50mm, and the flat plates are electrically insulated; the entrance slit plate 3 and the exit slit plate 4 are arranged at two ends of the long side of the parallel plate and are perpendicular to the parallel plateThe width of each slit plate is 40mm, the length of each slit plate is 54mm, and the thickness of each slit plate is 2 mm. The entrance slit plate 3 and the exit slit plate 4 are electrically insulated from the two parallel plate electrodes; an inlet slit 5 and an outlet slit 6 are respectively arranged on the inlet slit plate and the outlet slit plate, the lengths of the slits are 20mm, and the widths of the slits are 2 mm; the distance between the central line of the inlet slit 5 and the inner surface of the parallel plate electrode 1 is 10mm, the distance between the central line of the outlet slit 6 and the inner surface of the parallel plate electrode 2 is 10mm, and the distance between the central lines of the inlet slit 5 and the outlet slit 6 is 30 mm; the parallel plate electrode 1 is connected with the high-voltage pulse power supply 1 through a vacuum lead flange, and the parallel plate electrode 2 is connected with the high-voltage pulse power supply 2 through the vacuum lead flange; the high-voltage pulse power supplies 1 and 2 respectively apply synchronous high-voltage pulses V with the period of 3 mu s to the electrode plates 1 and 21、V2One cycle of the high voltage pulse consists of three time segments, the first time segment being 1.2 mus, V1、V2All the potentials of (a) and (b) are zero; the second time period is 0.90 mus, V1Square wave pulses of amplitude potential, V2Is at zero potential; the third time interval is 0.90 mu s, V1Is at zero potential, V2Is a square wave pulse with the amplitude of the potential.
The use method of the transverse time-of-flight cluster mass selector comprises the following steps:
and step 4, adjusting the amplitude of the pulse voltage to be 3940V, and obtaining the selected cluster with the mass of 2 palladium atoms from the outlet slit 6, wherein the mass selection passing rate is 40%.
Example 4
As shown in fig. 1 and 3, the transverse time-of-flight cluster mass selector includes parallel plate electrodes 1 and 2, an inlet slit plate 3 and an outlet slit plate 4, which are parallel to each other, the parallel plate electrodes are perpendicular to and attached to the slit plates, and the mass selector is installed in a vacuum chamber 19. The parallel plate electrode, the inlet slit plate 3 and the outlet slit plate 4 are all made of aluminum; the parallel plate electrode is a rectangular flat plate with the length of 1000mm, the width of 150mm and the thickness of 3 mm; the two parallel plate electrodes are placed in parallel, the distance between the inner surfaces of the flat plates is 400mm, and the flat plates are electrically insulated; the entrance slit plate 3 and the exit slit plate 4 are arranged at two ends of the long side of the parallel plate and are vertical to the plane of the parallel plate electrode, the width of each slit plate is 150mm, the length of each slit plate is 406mm, and the thickness of each slit plate is 2 mm. The entrance slit plate 3 and the exit slit plate 4 are electrically insulated from the two parallel plate electrodes; an inlet slit 5 and an outlet slit 6 are respectively arranged on the inlet slit plate and the outlet slit plate, the lengths of the slits are 50mm, and the widths of the slits are 10 mm; the distance between the central line of the inlet slit 5 and the inner surface of the parallel plate electrode 1 is 15mm, the distance between the central line of the outlet slit 6 and the inner surface of the parallel plate electrode 2 is 15mm, and the distance between the central lines of the inlet slit 5 and the outlet slit 6 is 370 mm; the parallel plate electrode 1 is connected with the high-voltage pulse power supply 1 through a vacuum lead flange, and the parallel plate electrode 2 is connected with the high-voltage pulse power supply 2 through the vacuum lead flange; the high-voltage pulse power supplies 1 and 2 respectively apply synchronous high-voltage pulses V with the period of 1000 mus to the electrode plates 1 and 21、V2One cycle of the high voltage pulse consists of three time segments, the first time segment being 500 mus, V1、V2All the potentials of (a) and (b) are zero; the second time period is 250 mus, V1Square wave pulses of amplitude potential, V2Is at zero potential; the third time interval is 250 mus, V1Is at zero potential, V2Is a square wave pulse with the amplitude of the potential.
The use method of the transverse time-of-flight cluster mass selector comprises the following steps:
and step 4, adjusting the amplitude of the pulse voltage to be 130V, and obtaining the selected cluster with the mass of 50 silver atoms from the outlet slit 6, wherein the mass selection passing rate is 50%.
Claims (10)
1. The transverse time-of-flight cluster mass selector is characterized by comprising parallel plate electrodes 1(1) and 2(2) which are parallel to each other, an inlet slit plate 3 and an outlet slit plate 4 which are arranged in parallel, wherein the parallel plate electrodes are perpendicular to and attached to the slit plates; wherein, the parallel plate electrode 1(1) and the parallel plate electrode 2(2) are respectively externally connected with a high-voltage pulse power supply, one end of the inlet slit plate (3) close to the parallel plate electrode 1(1) is provided with an inlet slit (5), and one end of the outlet slit plate (4) close to the parallel plate electrode 2(2) is provided with an outlet slit (6); the high-voltage pulse power supply outputs high-voltage pulses V to the two electrodes1、V2All are square waves with the same period, and one period contains synchronous t0-t1、t1-t2、t2-t3Three potential states, wherein: t is t0-t1Time period, V1、V2All the potentials of (a) and (b) are kept at zero; t is t1-t2Time period, V1Is an amplitude potential, V2Is at zero potential; t is t2-t3Time period, V1Is at zero potential, V2Is an amplitude potential; the selector is placed in a vacuum chamber (19).
2. The transverse time-of-flight cluster mass selector of claim 1, wherein the parallel plate electrodes and the slit plate are made of stainless steel or aluminum and are electrically insulated from each other.
3. The transverse time-of-flight cluster mass selector of claim 1, wherein the parallel plate electrodes are rectangular flat plates with a length of 100mm to 1000mm, a width of 50mm to 200mm, a thickness of 2mm to 10mm, and a spacing between the inner surfaces of the two parallel plate electrodes of 50mm to 500 mm.
4. The transverse time-of-flight cluster mass selector of claim 1, wherein the two slit plates have a width corresponding to the width of the parallel plate electrodes, a length corresponding to the distance between the outer surfaces of the two parallel plate electrodes, and a thickness of 0.5mm to 3 mm.
5. The transverse time-of-flight cluster mass selector according to claim 1, characterized by the entrance slit (5) and the exit slit (6) being bar-shaped of the same size and both being parallel to the parallel plate electrodes, the slits being 10mm-50mm in length and 2mm-10mm in width.
6. The transverse time-of-flight cluster mass selector of claim 1, wherein the spacing between the centerline of the entrance slit (5) and the parallel plate electrode 1(1), the spacing between the centerline of the exit slit (6) and the parallel plate electrode 2(2), are equal.
7. The transverse time-of-flight cluster mass selector of claim 1, wherein the distance between the centerline of the entrance slit (5) and the centerline of the exit slit (6) is 45mm-495mm, and the slit centerline is spaced from the corresponding parallel plate electrode by not less than 1/2 and not more than 40mm of the slit width.
8. The transverse time-of-flight cluster mass selector of claim 1, in which the high voltage pulse V is1、V2All the periods of (a) are 3 mu s-1000 mu s, wherein t is0-t1The time period is 30-50 percent, t1-t2Time period and t2-t3The time periods are equal.
9. The transverse time-of-flight cluster mass selector of claim 1, in which the high voltage pulse V is1、V2The voltage pulse amplitudes are equal, and the amplitude is 100V-5000V.
10. The method of using the transverse time-of-flight cluster mass selector of any one of claims 1 to 9, comprising the steps of:
s1, placing the transverse flight time cluster mass selector (18) in the vacuum chamber (19), connecting the cluster source externally, and vacuumizing the device to 1 × 10-4-1×10-5Pa vacuum degree;
s2, operating a cluster source to generate a cluster beam, and enabling the cluster beam to enter a cluster mass selector through an entrance slit (5);
s3, starting the high-voltage pulse power supply, selecting the pulse period and t0-t1The time period accounts for the percentage, and synchronous high-voltage square wave pulses V are output to the parallel plate electrodes 1(1) and 2(2)1、V2The cluster flies along a transverse flight path;
s4, adjusting the pulse voltage amplitude according to the cluster quality to be selected, and obtaining the selected cluster with the preset quality from the outlet slit (6); the selected cluster mass and the pulse voltage amplitude have the following linear relationship: m is eV/(2dH) Δ t2。
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