CN113967327A - Nasal obstruction filter device and nasal obstruction filter device set - Google Patents

Abstract

A nasal obstruction filter device and a nasal obstruction filter device set are provided, the nasal obstruction filter device comprises: the device comprises a device body, a filter screen, a first actuator, a second actuator and a gas sensor; the middle of the device body is provided with a ventilation flow channel, and the ventilation flow channel is provided with an air inlet end and an air outlet end; the filter screen is arranged at the air outlet end of the ventilation flow passage; the first actuator is manufactured by a semiconductor process and is arranged in the air inlet end of the ventilation flow channel so as to be driven and generate high-pressure transmission to the external gas of the device body; the second actuator is manufactured by a semiconductor process and is stacked and jointed with the first actuator so as to be driven and transmit the gas transmitted by the first actuator to the filter screen for purification and filtration; the gas sensor is arranged at the gas outlet end of the ventilation flow channel; the nasal obstruction filtering device group comprises two groups of nasal obstruction filtering devices and a connecting piece, wherein the connecting piece is connected with the two groups of nasal obstruction filtering devices in series.

Description

Nasal obstruction filter device and nasal obstruction filter device set

[ technical field ] A method for producing a semiconductor device

The present invention relates to a filtering device, and more particularly to a filtering device for nasal obstruction, which is hung in the nostrils of a human body to enhance the air intake effect and combines with air detection.

[ background of the invention ]

Modern people increasingly attach importance to the quality of gas around life, such as carbon monoxide, carbon dioxide, Volatile Organic Compounds (VOC), PM2.5, nitric oxide, sulfur monoxide, etc., and even particles contained in the gas, which are exposed to the environment and affect the health of human body, seriously and even endanger life. Therefore, the quality of the environmental gas is regarded as good and bad, and how to monitor and avoid the remote monitoring is a subject which needs to be regarded urgently at present.

In addition, in order to avoid harmful gas or particles from breathing, the nasal obstruction filter screen plugged into the nostril can provide purified inhaled gas, but the filter screen mesh of the nasal obstruction filter screen can cause the problems of insufficient breathing quantity and unsmooth breathing of a user, and the uncomfortable feeling of hanging the nasal obstruction filter screen by the user is derived.

Accordingly, the present invention is directed to a nasal obstruction filtering device that improves the above-mentioned problems.

[ summary of the invention ]

The main purpose of this scheme is to provide a nasal obstruction filter equipment, hang in human nostril, can rely on first actuator or second actuator to strengthen the leading-in of gas transport, and then provide high pressure or large-traffic gas output to the filter screen, reach the suction effect of strengthening the leading-in of gas, and can provide the inspiratory gas of filtration purification fast through the filter screen, and gas sensor also provides the detection of inspiratory gas simultaneously, lets the human body breathe to clean gas and know the gaseous gas quality of inspiratory gas.

Another objective of the present disclosure is to provide a nasal obstruction filtering device, which is hung in a nostril of a human body, and can be configured in series by a first actuator and a second actuator, so as to enable the first actuator to provide high-pressure air introduction, and the second actuator to provide a large flow of air output to a filter screen, thereby enhancing the inhalation effect of the air introduction, and providing filtered and purified inhaled air through the filter screen, and a gas sensor also provides inhaled air detection, so that the human body breathes clean air and knows the quality of the inhaled air, and a connecting member, which is connected in series with two nasal obstruction filtering devices and is used for plugging into the nostril of the human body and providing air filtering and purification.

One broad aspect of the present disclosure is a nasal prong filtering device, comprising: the device comprises a device body, a first air inlet, a second air inlet, a first air outlet and a second air outlet, wherein the middle of the device body is provided with an air channel which is provided with an air inlet end and an air outlet end; a filter screen arranged at the air outlet end; a first actuator, which is manufactured by a semiconductor process and is arranged in the air inlet end of the ventilation flow channel for being driven and generating high-pressure transmission to gas outside the device body; a second actuator, fabricated in a semiconductor process, in stacked engagement with the first actuator, for being driven and for re-delivering the gas delivered by the first actuator to the filter for cleaning and filtering; the gas sensor is arranged at the gas outlet end of the ventilation flow channel and used for detecting the gas quality data of the gas outlet end; the driving module is electrically connected with the first actuator, the second actuator and the gas sensor and is provided with a microprocessor and a communication unit; the microprocessor is used for driving the first actuator, the second actuator and the gas sensor, and transmitting the gas quality data of the gas sensor to an external device through the communication unit.

Another broad aspect of the disclosure is a nasal prong filtering device, comprising: the device comprises a device body, a first air inlet, a second air inlet, a first air outlet and a second air outlet, wherein the middle of the device body is provided with an air channel which is provided with an air inlet end and an air outlet end; a filter screen arranged in the ventilation flow passage; a first actuator, which is made by semiconductor process and is arranged in the ventilation flow channel for being driven and generating high pressure to a gas outside the device body, and the gas is conveyed and guided into the filter screen for purification and filtration and is discharged from the gas outlet end; the gas sensor is arranged at the gas outlet end of the ventilation flow channel and used for detecting the gas quality data of the gas outlet end; the driving module is electrically connected with the first actuator, the second actuator and the gas sensor and is provided with a microprocessor and a communication unit; the microprocessor is used for driving the first actuator, the second actuator and the gas sensor, and transmitting the gas quality data of the gas sensor to an external device through the communication unit.

Another broad aspect of the disclosure is a nasal prong filtering device, comprising: the device comprises a device body, a first air inlet, a second air inlet, a first air outlet and a second air outlet, wherein the middle of the device body is provided with an air channel which is provided with an air inlet end and an air outlet end; a filter screen arranged in the ventilation flow passage; a second actuator, which is made by semiconductor process and is arranged in the ventilation flow channel for being driven and generating large flow for gas outside the device body, and the gas is conveyed and guided into the filter screen for purification and filtration and is discharged from the gas outlet end; the gas sensor is arranged at the gas outlet end of the ventilation flow channel and used for detecting gas quality data of the gas outlet end; the driving module is electrically connected with a first actuator, the second actuator and the gas sensor and is provided with a microprocessor and a communication unit; the microprocessor is used for driving the first actuator, the second actuator and the gas sensor, and transmitting the gas quality data of the gas sensor to an external device through the communication unit.

[ description of the drawings ]

Fig. 1 is a schematic view of an embodiment of the nasal obstruction filtering device set.

Fig. 2A is a schematic cross-sectional view of the nasal obstruction filtering device with the first actuator and the second actuator stacked and joined to perform air guide filtering and purifying.

Fig. 2B is a schematic cross-sectional view of the nasal obstruction filtering device in the present invention, wherein the first actuator and the second actuator are stacked and engaged to perform air guiding, filtering and purifying.

Fig. 2C is a schematic cross-sectional view of the nasal obstruction filtering device using the first actuator to perform air guiding filtering purification.

Fig. 2D is a schematic cross-sectional view of the nasal obstruction filtering device using the first actuator to perform air guiding, filtering and purifying.

Fig. 2E is a schematic cross-sectional view of the nasal obstruction filtering device using the second actuator to perform air guide filtering and purifying.

Fig. 2F is a schematic cross-sectional view of the nasal obstruction filtering device using the second actuator to perform air guiding, filtering and purifying.

Fig. 2G is a schematic cross-sectional view of the nasal obstruction filtering device according to another preferred embodiment of the present invention.

Fig. 3A is a schematic view of a first actuator of the nasal obstruction filtering device.

Fig. 3B to fig. 3C are operation diagrams of the first actuator in fig. 3A.

Fig. 4A is a schematic view of a second actuator of the nasal obstruction filtering device.

Fig. 4B to fig. 4C are operation diagrams of the second actuator in fig. 4A.

[ notation ] to show

200: nasal obstruction filtering device set

20: connecting piece

100: nasal obstruction filtering device

1: device body

11: ventilation flow passage

111: air inlet end

112: air outlet end

2: first actuator

21: air outlet base

211: air outlet chamber

212: compression chamber

213: through hole

22: first oxide layer

23: jet resonance layer

231: air inlet hole

232: gas injection hole

233: suspension section

24: second oxide layer

241: resonant cavity section

25: resonant cavity layer

251: resonant cavity

26: first piezoelectric component

261: a first lower electrode layer

262: first piezoelectric layer

263: a first insulating layer

264: a first upper electrode layer

3: second actuator

31: air inlet base

311: air intake

32: third oxide layer

321: confluence channel

322: confluence chamber

33: resonant layer

331: center hole

332: vibrating section

333: fixing segment

34: a fourth oxide layer

341: compression chamber segment

35: vibration layer

351: actuating section

352: outer rim section

353: air hole

36: second piezoelectric element

361: a second lower electrode layer

362: second piezoelectric layer

363: a second insulating layer

364: second upper electrode layer

4: filter screen

5: gas sensor

6: drive module

61: microprocessor

62: communication unit

7: battery with a battery cell

8: waterproof breathable film

9: external device

[ detailed description ] embodiments

Embodiments that embody the features and advantages of this disclosure will be described in detail in the description that follows. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

As shown in fig. 1, fig. 2A and fig. 2B, the present disclosure provides a nasal obstruction filtering device 100, including: the device comprises a device body 1, a first actuator 2, a second actuator 3, a filter 4, a gas sensor 5, a driving module 6 and a battery 7. Wherein the device body 1 has a ventilation channel 11 in the middle, the ventilation channel 11 has an air inlet 111 and an air outlet 112; the filter screen 4 is disposed at the air outlet 112 of the ventilation channel 11 for filtering a gas passing through and discharging the gas from the air outlet 112; the first actuator 2, the second actuator 3, the driving module 6 and the battery 7 are disposed in the air inlet 111 of the ventilation channel 11, and the battery 7 provides an operating power source for the driving module 6, so that the driving module 6 controls the driving of the first actuator 2 and the second actuator 3; the first actuator 2 is manufactured by a semiconductor process and is driven to generate high-pressure delivery to the gas outside the device body 1; and a second actuator 3, made by semiconductor process, in stacked engagement with the first actuator 2, for being driven and for re-conveying the gas conveyed by the first actuator 2 to the filter 4 for purification and filtration; the gas sensor 5 is disposed at the gas outlet 112 of the ventilation channel 11 for detecting the gas at the gas outlet 112 and obtaining the gas quality data. The nasal obstruction filtering device 100 can be hung in the nostrils of the human body, and the first actuator 2 and the second actuator 3 can be matched in series without being limited by the above, thereby providing the effects of enhancing the gas introduction and inhalation, enabling the gas to rapidly pass through the filter screen 4, and providing the inhaled gas for filtering and purifying. Meanwhile, the gas sensor 5 also provides the detection of the inhaled gas, so that the human body breathes clean gas and knows the gas quality of the inhaled gas. The filter screen 4 can be a High-Efficiency filter screen (HEPA) to provide a better filtering effect; the filter screen 4 can also be coated with a layer of cleaning factor (AMS) of chlorine dioxide to inhibit viruses and bacteria in the gas, so that the inhibition rate of influenza A virus, influenza B virus, enterovirus and norovirus is over 99 percent, and the cross infection of the viruses is reduced; alternatively, the filter screen 4 may be coated with a herbal protective coating layer from which ginkgo biloba and japanese sumac are extracted to form a herbal protective anti-allergy filter screen that is effective in anti-allergy and further destroys the surface proteins of influenza viruses (e.g., H1N1 influenza virus) passing through the filter screen 4. The gas sensor 5 may be a gas particulate sensor that detects the gas particulate concentration of PM10, PM2.5, and PM 1.

The driving module 6 is electrically connected to the first actuator 2, the second actuator 3 and the gas sensor 5, the driving module 6 includes a microprocessor 61 and a communication unit 62, the microprocessor 61 is electrically connected to the first actuator 2, the second actuator 3 and the gas sensor 5, and the microprocessor 61 controls the first actuator 2 and the second actuator 3. The microprocessor 61 receives and analyzes the gas quality data detected by the gas sensor 5. The communication unit 62 is electrically connected to the microprocessor 61, and the microprocessor 61 obtains the gas quality data and transmits the gas quality data to an external device 9.

Referring to fig. 2A, the external device 9 may be a cloud device, which receives and stores the gas quality data transmitted by the communication unit 62, and after receiving the gas quality data, the external device 9 may be a cloud device having an artificial intelligence arithmetic unit, and after analyzing and calculating the big data by using the artificial intelligence arithmetic unit, obtains the gas information of the user when using the nasal obstruction filtering device 100, and then optimizes the transmission efficiency of the first actuator 2 and the second actuator 3 by using the artificial intelligence arithmetic unit, and transmits the optimized transmission efficiency back to the microprocessor 61 by using the communication unit 62, and the microprocessor 61 performs fine adjustment on the first actuator 2 and the second actuator 3 according to the returned transmission efficiency, thereby improving the efficiency of the nasal obstruction filtering device 100.

Of course, as shown in fig. 1, the two nasal obstruction filtering devices 100 of the present invention can be serially connected together by a connecting member 20 to form a nasal obstruction filtering device set 200, so that the two nasal obstruction filtering devices 100 can be respectively plugged into the nostrils of the human body to provide air filtration and purification.

As further shown in fig. 1 and 2G, another preferred embodiment of a nasal prong filtering device 100 is provided. In the present embodiment, the filter 4 is disposed at the air inlet 111 of the ventilation channel 11 for filtering a gas passing through, the first actuator 2, the second actuator 3, the driving module 6 and the battery 7 are disposed in the air inlet 111 of the ventilation channel 11, the battery 7 provides an operation power source for the driving module 6, so that the driving module 6 controls the driving of the first actuator 2 and the second actuator 3; the first actuator 2 is manufactured in a semiconductor process and used for being driven and generating high-pressure transmission to the gas outside the device body 1 so as to guide the gas into the filter 4 for purification and filtration, and the second actuator 3 is manufactured in the semiconductor process and is stacked and jointed with the first actuator 2 so as to be driven and used for transmitting and guiding the gas transmitted by the first actuator 2 again, so that the gas purified and filtered by the filter 4 is discharged from the gas outlet end 112; the gas sensor 5 is disposed at the gas outlet 112 of the ventilation channel 11 for detecting the gas at the gas outlet 112 and obtaining the gas quality data. The nasal obstruction filtering device 100 can be hung in the nostrils of the human body, and the first actuator 2 and the second actuator 3 can be matched in series without being limited by the above, thereby providing the effects of enhancing the gas introduction and inhalation, enabling the gas to rapidly pass through the filter screen 4, and providing the inhaled gas for filtering and purifying. Meanwhile, the gas sensor 5 also provides the detection of the inhaled gas, so that the human body breathes clean gas and knows the gas quality of the inhaled gas. In addition, in this embodiment, a waterproof permeable membrane 8 can be bonded to the air outlet end 112 of the device body 1, so that the gas transmitted by the first actuator 2 and the second actuator 3 can be introduced into the device body 1, filtered and purified by the filter screen 4, and inhaled through the waterproof permeable membrane 8, so as to provide purified gas for the user, and the liquid flowing out of the nostrils of the user is blocked by the waterproof permeable membrane 8, and cannot enter the device body 1, thereby affecting the operation of the device elements.

As also shown in fig. 2C and 2D, the present disclosure provides a nasal prong filtering device 100 comprising: the device comprises a device body 1, a first actuator 2, a filter 4, a gas sensor 5, a driving module 6 and a battery 7. Wherein the device body 1 has a ventilation channel 11 in the middle, the ventilation channel 11 has an air inlet 111 and an air outlet 112; the filter screen 4 is disposed at the air outlet 112 of the ventilation channel 11 for filtering a gas passing through and discharging the gas from the air outlet 112; the first actuator 2, a driving module 6 and a battery 7 are disposed in the air inlet 111 of the ventilation channel 11, and the battery 7 provides an operating power source for the driving module 6, so that the driving module 6 controls the driving of the first actuator 2; the first actuator 2 is manufactured by a semiconductor process and is used for being driven to generate high-pressure transmission to the gas outside the device body 1 and transmitting and guiding the gas to the filter screen 4 for purification and filtration; the gas sensor 5 is disposed at the gas outlet 112 of the ventilation channel 11 for detecting the gas at the gas outlet 112 and obtaining the gas quality data. The nasal obstruction filtering device 100 is hung in the nostrils of the human body, the first actuator 2 can be used for enhancing the guiding of gas delivery, and then large-flow gas is output to the filter screen 4, so that the suction effect of enhancing the guiding of the gas is achieved, the filtered and purified suction gas can be rapidly provided through the filter screen 4, meanwhile, the gas sensor 5 also provides the detection of the suction gas, and the human body breathes clean gas and knows the gas quality of the suction gas.

As shown in fig. 2E and 2F, the present disclosure provides a nasal obstruction filtering device 100, including: a device body 1, a second actuator 3, a filter 4, a gas sensor 5, a driving module 6 and a battery 7. Wherein the device body 1 has a ventilation channel 11 in the middle, the ventilation channel 11 has an air inlet 111 and an air outlet 112; the filter screen 4 is disposed at the air outlet 112 of the ventilation channel 11 for filtering a gas passing through and discharging the gas from the air outlet 112; the second actuator 3, a driving module 6 and a battery 7 are disposed in the air inlet 111 of the ventilation channel 11, the battery 7 provides an operating power source for the driving module 6, so that the driving module 6 controls the driving of the second actuator 3; the second actuator 3 is manufactured by a semiconductor process and is used for being driven to generate large-flow conveying for the gas outside the device body 1 and conveying the gas to the filter screen 4 for purification and filtration; the gas sensor 5 is disposed at the gas outlet 112 of the ventilation channel 11 for detecting the gas at the gas outlet 112 and obtaining the gas quality data. The nasal obstruction filtering device 100 is hung in the nostrils of the human body, the second actuator 3 can be used for enhancing the introduction of gas delivery, and further providing large-flow gas output to the filter screen 4, so that the suction effect of enhancing the introduction of gas is achieved, filtered and purified suction gas can be rapidly provided through the filter screen 4, meanwhile, the gas sensor 5 also provides detection of the suction gas, and the human body breathes clean gas and knows the gas quality of the suction gas.

In the present embodiment, the gas sensor 5 can be a volatile organic compound sensor, and provides gas quality data for detecting formaldehyde, ammonia, carbon monoxide, carbon dioxide, oxygen, and ozone. Or the gas sensor 5 may be a virus sensor providing detection data information for detecting a virus.

As for the above-described first actuator 2 and second actuator 3 related structures and the air guide output operation, they are described below.

As shown in fig. 3A to 3C, the first actuator 2 includes: an air outlet base 21, a first oxide layer 22, an air injection resonance layer 23, a second oxide layer 24, a resonance cavity layer 25 and a first piezoelectric element 26 are all manufactured by semiconductor process. The semiconductor process of the present embodiment includes an etching process and a deposition process. The etching process may be a wet etching process, a dry etching process or a combination thereof, but not limited thereto. The deposition process may be a physical vapor deposition Process (PVD), a chemical vapor deposition process (CVD), or a combination of both. The following description is not repeated.

The gas outlet base 21 is formed by etching a silicon substrate to form a gas outlet chamber 211 and a compression chamber 212, and a through hole 213 is formed between the gas outlet chamber 211 and the compression chamber 212; the first oxide layer 22 is deposited on the gas outlet base 21 and etched to remove the portion corresponding to the compression chamber 212; the aforementioned jet resonance layer 23 is formed by a silicon substrate deposition process to be superimposed on the first oxide layer 22, and forms a plurality of air inlet holes 231 by partially etching and removing corresponding to the compression chamber 212, and forms a jet hole 232 by partially etching and removing corresponding to the center of the compression chamber 212, so as to form a suspension section 233 capable of vibrating and moving between the air inlet holes 231 and the jet hole 232; the second oxide layer 24 is formed by deposition process to be overlapped on the suspension section 233 of the jet resonance layer 23, and is partially etched to form a resonance cavity section 241, and is communicated with the jet hole 232; the resonant cavity layer 25 is formed by a silicon substrate etching process to form a resonant cavity 251, and is correspondingly bonded and overlapped on the second oxide layer 24, so that the resonant cavity 251 corresponds to the resonant cavity section 241 of the second oxide layer 24; the first piezoelectric element 26 is formed by a deposition process to be stacked on the resonant cavity layer 25, and includes a first lower electrode layer 261, a first piezoelectric layer 262, a first insulating layer 263 and a first upper electrode layer 264, wherein the first lower electrode layer 261 is formed by a deposition process to be stacked on the resonant cavity layer 25, the first piezoelectric layer 262 is formed by a deposition process to be stacked on a portion of the surface of the first lower electrode layer 261, the first insulating layer 263 is formed by a deposition process to be stacked on a portion of the surface of the first piezoelectric layer 262, and the first upper electrode layer 264 is formed by a deposition process to be stacked on the surface of the first insulating layer 263 and the surface of the first piezoelectric layer 262 not provided with the first insulating layer 263, so as to be electrically connected to the first piezoelectric layer 262.

As shown in fig. 3B to 3C, the first piezoelectric element 26 is driven to drive the gas injection resonance layer 23 to resonate, so that the suspension section 233 of the gas injection resonance layer 23 generates reciprocating vibration displacement, so as to draw gas into the compression chamber 212 through the plurality of gas inlet holes 231, and the gas is introduced into the resonance cavity 251 through the gas injection holes 232, and the vibration frequency of the gas in the resonance cavity 251 is controlled to be approximately the same as the vibration frequency of the suspension section 233, so that the resonance cavity 251 and the suspension section 233 generate a Helmholtz resonance effect (Helmholtz resonance), and the concentrated gas discharged from the resonance cavity 251 is introduced into the compression chamber 212, passes through the through holes 213, and is discharged from the gas outlet chamber 211 at a high pressure, so as to achieve high-pressure gas transmission and improve gas transmission efficiency.

Referring to fig. 4A, 4B and 4C, the second actuator 3 includes an air inlet base 31, a third oxide layer 32, a resonant layer 33, a fourth oxide layer 34, a vibrating layer 35 and a second piezoelectric element 36, all manufactured by a semiconductor process. The semiconductor process of the present embodiment includes an etching process and a deposition process. The etching process may be a wet etching process, a dry etching process or a combination thereof, but not limited thereto. The deposition process may be a physical vapor deposition Process (PVD), a chemical vapor deposition process (CVD), or a combination of both. The following description is not repeated.

The gas inlet base 31 is fabricated by a silicon substrate etching process to form at least one gas inlet hole 311; the third oxide layer 32 is formed by deposition process and stacked on the inlet base 31, and a plurality of converging channels 321 and a converging chamber 322 are formed by etching process, wherein the converging channels 321 are communicated between the converging chamber 322 and the inlet holes 311 of the inlet base 31; the resonant layer 33 is formed by a silicon substrate deposition process and is superimposed on the third oxide layer 32, and an etching process is performed to form a central through hole 331, a vibration section 332 and a fixing section 333, wherein the central through hole 331 is formed at the center of the resonant layer 33, the vibration section 332 is formed at the peripheral region of the central through hole 331, and the fixing section 333 is formed at the peripheral region of the resonant layer 33; the fourth oxide layer 34 is deposited on the resonant layer 33 and partially etched to form a compressed cavity section 341; the vibration layer 35 is formed by a silicon substrate deposition process to be superimposed on the fourth oxide layer 34, and an etching process is performed to form an actuating section 351, an outer edge section 352 and a plurality of air holes 353, wherein the actuating section 351 is formed at the central portion, the outer edge section 352 is formed to surround the periphery of the actuating section 351, the plurality of air holes 353 are respectively formed between the actuating section 351 and the outer edge section 352, and the vibration layer 35 and the compression cavity section 341 of the fourth oxide layer 34 define a compression chamber; the second piezoelectric element 36 is formed by a deposition process to be superimposed on the actuating section 351 of the vibrating layer 35, and includes a second lower electrode layer 361, a second piezoelectric layer 362, a second insulating layer 363, and a second upper electrode layer 364, wherein the second lower electrode layer 361 is formed by a deposition process to be superimposed on the actuating section 351 of the vibrating layer 35, the second piezoelectric layer 362 is formed by a deposition process to be superimposed on a portion of the surface of the second lower electrode layer 361, the second insulating layer 363 is formed by a deposition process to be superimposed on a portion of the surface of the second piezoelectric layer 362, and the second upper electrode layer 364 is formed by a deposition process to be superimposed on the surface of the second insulating layer 363 and the surface of the second piezoelectric layer 362 without the second insulating layer 363, so as to be electrically connected to the second piezoelectric layer 362.

As shown in fig. 4B to 4C, the second piezoelectric element 36 is driven to drive the vibration layer 35 and the resonance layer 33 to generate resonance displacement, so that the introduced gas enters from the gas inlet 311, is collected into the collecting chamber 322 through the collecting channel 321, passes through the central through hole 331 of the resonance layer 33, and is discharged from the plurality of gas holes 353 of the vibration layer 35, thereby realizing a large flow rate of the gas.

In summary, the nasal obstruction filtering device provided by the present invention is hung in the nostril of a human body, and can enhance the introduction of gas delivery by the first actuator or the second actuator, and further provide high-pressure or large-flow gas output to the filter screen, so as to enhance the suction effect of gas introduction, or can enhance the suction effect of gas introduction by the series connection and matching of the first actuator and the second actuator, so that the first actuator provides high-pressure gas introduction, and the second actuator provides large-flow gas output to the filter screen, so as to enhance the suction effect of gas introduction, thereby forming the nasal obstruction filtering device to guide gas to rapidly pass through the filter screen, provide filtered and purified suction gas, and simultaneously provide the detection of suction gas by the gas sensor, so that the human body breathes clean gas and knows the gas quality of the suction gas, thereby having great industrial applicability and progressiveness.

Claims (18)

1. A nasal prong filtering device, comprising:

the device comprises a device body, a first air inlet, a second air inlet, a first air outlet and a second air outlet, wherein the middle of the device body is provided with an air channel which is provided with an air inlet end and an air outlet end;

a filter screen arranged at the air outlet end;

a first actuator, which is manufactured by a semiconductor process and is arranged in the air inlet end for being driven and generating high-pressure transmission to a gas outside the device body;

a second actuator, fabricated in a semiconductor process, in stacked engagement with the first actuator, for being driven and for re-delivering the gas delivered by the first actuator to the filter for cleaning and filtering;

a gas sensor arranged at the gas outlet end for detecting a gas quality data of the gas outlet end; and

the driving module is electrically connected with the first actuator, the second actuator and the gas sensor and is provided with a microprocessor and a communication unit;

the microprocessor is used for driving the first actuator, the second actuator and the gas sensor, and transmitting the gas quality data of the gas sensor to an external device through the communication unit.

2. The nasal prong filtering device of claim 1, wherein the first actuator comprises:

an air outlet base, an air outlet chamber and a compression chamber are manufactured by a silicon substrate etching process, and a through hole is etched between the air outlet chamber and the compression chamber;

a first oxide layer formed by deposition process and superposed on the gas outlet base, and etched to remove the part corresponding to the compression chamber;

a jet resonance layer which is generated by a silicon substrate deposition process and is superposed on the first oxide layer, and forms a plurality of air inlet holes corresponding to partial etching removal of the compression chamber, and forms a jet hole corresponding to the partial etching removal of the center of the compression chamber, so that a suspension section capable of moving and vibrating is formed between the air inlet holes and the jet hole;

a second oxide layer formed by deposition process and overlapped on the suspension section of the jet resonance layer, and partially etched to form a resonance cavity section and communicated with the jet hole;

a resonant cavity layer, which is made by a silicon substrate etching process and is correspondingly bonded and overlapped on the second oxide layer to promote the resonant cavity to correspond to the resonant cavity section of the second oxide layer;

a first piezoelectric component, formed by deposition process and superposed on the resonant cavity layer, including a first lower electrode layer, a first piezoelectric layer, a first insulating layer and a first upper electrode layer, wherein the first lower electrode layer is formed by deposition process and superposed on the resonant cavity layer, the first piezoelectric layer is formed by deposition process and superposed on part of the surface of the first lower electrode layer, the first insulating layer is formed by deposition process and superposed on part of the surface of the first piezoelectric layer, the first upper electrode layer is formed by deposition process and superposed on the surface of the first insulating layer and the surface of the first piezoelectric layer not provided with the first insulating layer, so as to be electrically connected with the first piezoelectric layer;

the first piezoelectric component is driven to drive the jet resonance layer to generate resonance, so that the suspension section of the jet resonance layer generates reciprocating vibration displacement to attract the gas to enter the compression chamber through the plurality of gas inlet holes, the gas is guided into the resonant cavity through the gas jet holes, the gas is discharged from the resonant cavity and is concentrated and guided into the compression chamber, the gas passes through the through hole, and the gas outlet chamber forms high-pressure discharge, so that the gas is transmitted and flows.

3. The nasal prong filtering device of claim 1, wherein the second actuator comprises:

an air inlet base, which is used for manufacturing at least one air inlet hole by a silicon substrate etching process;

a third oxide layer formed on the air inlet base by deposition process and having multiple converging channels and a converging chamber formed by etching process, wherein the converging channels are communicated between the converging chamber and the air inlet of the air inlet base;

a resonance layer formed by a silicon substrate deposition process and superposed on the third oxide layer, and an etching process to form a central through hole, a vibration section and a fixed section, wherein the central through hole is formed at the center of the resonance layer, the vibration section is formed at the peripheral area of the central through hole, and the fixed section is formed at the peripheral area of the resonance layer;

a fourth oxide layer formed by deposition process and overlapped on the resonance layer, and partially etched to form a compression cavity section;

a vibration layer which is formed by a silicon substrate deposition process and is superposed on the fourth oxide layer, and an actuating section, an outer edge section and a plurality of air holes are formed by an etching process, wherein the actuating section is formed at the central part, the outer edge section forms a periphery surrounding the actuating section, the plurality of air holes are respectively formed between the actuating section and the outer edge section, and the vibration layer and the compression cavity section of the fourth oxide layer define a compression chamber; and

a second piezoelectric component, which is formed by deposition process and is superposed on the actuating section of the vibration layer, and includes a second lower electrode layer, a second piezoelectric layer, a second insulating layer and a second upper electrode layer, wherein the second lower electrode layer is formed by deposition process and is superposed on the actuating section of the vibration layer, the second piezoelectric layer is formed by deposition process and is superposed on a part of the surface of the second lower electrode layer, the second insulating layer is formed by deposition process and is superposed on a part of the surface of the second piezoelectric layer, and the second upper electrode layer is formed by deposition process and is superposed on the surface of the second insulating layer and the surface of the second piezoelectric layer not provided with the second insulating layer, so as to be electrically connected with the second piezoelectric layer;

the second piezoelectric component is driven to drive the vibration layer and the resonance layer to generate resonance displacement, the gas is guided into the gas inlet hole, is collected into the collecting chamber through the collecting channel, passes through the central through hole of the vibration layer and is discharged from the plurality of air holes of the vibration layer, and the transmission and flowing of the gas are realized.

4. The nasal prong filtering device of claim 1, comprising a battery electrically connected to the driving module, wherein the battery provides an operating power source for the driving module, causing the driving module to control the driving of the first actuator and the second actuator.

5. The nasal obstruction filtering device of claim 1, wherein the external device is a cloud device with an artificial intelligence computing unit.

6. The nasal obstruction filtering device of claim 1, wherein the gas sensor is a volatile organic compound sensor providing the gas quality data for detecting formaldehyde, ammonia, carbon monoxide, carbon dioxide, oxygen, ozone.

7. The nasal prong filtering device of claim 1, wherein the gas sensor is a virus sensor providing a detection data information for detecting a virus.

8. The nasal prong filtering device of claim 1, wherein the gas sensor is a gas particulate sensor that detects a concentration of gas particulates comprising PM10, PM2.5, or PM 1.

9. The nasal prong filtering device of claim 1, wherein the filter is a high efficiency filter.

10. The nasal obstruction filtering device of claim 1, wherein the filter screen is coated with a layer of chlorine dioxide cleaning factor to inhibit viruses and bacteria in the gas.

11. The nasal obstruction filtering device of claim 1 wherein the screen is coated with a herbal protective coating that extracts ginkgo biloba and japanese rhus chinensis to form a herbal protective anti-allergy screen that is effective in anti-allergy and destroying influenza virus surface proteins that pass through the screen.

12. The nasal prong filtering device of claim 1, wherein the air outlet end is bonded to a waterproof, air permeable membrane.

13. A nasal prong filtering device set comprising two sets of nasal prong filtering devices of any one of claims 1 to 12; and the connecting piece is connected with the two groups of nasal obstruction filtering devices in series and is used for being plugged into the nostrils of a human body and providing gas filtration and purification.

14. A nasal prong filtering device, comprising:

the device comprises a device body, a first air inlet, a second air inlet, a first air outlet and a second air outlet, wherein the middle of the device body is provided with an air channel which is provided with an air inlet end and an air outlet end;

a filter screen arranged at the air inlet end;

a first actuator, which is manufactured by a semiconductor process and is arranged in the air inlet end for being driven and generating high pressure to a gas outside the device body and transmitting the gas to the filter screen for purification and filtration;

a second actuator, made by semiconductor process, stacked and connected with the first actuator for being driven and transmitting the gas transmitted by the first actuator again, so as to make the filter screen purify and filter the gas and discharge the gas from the gas outlet end;

a gas sensor arranged at the gas outlet end for detecting a gas quality data of the gas outlet end; and

the driving module is electrically connected with the first actuator, the second actuator and the gas sensor and is provided with a microprocessor and a communication unit;

the microprocessor is used for driving the first actuator, the second actuator and the gas sensor, and transmitting the gas quality data of the gas sensor to an external device through the communication unit.

15. A nasal prong filtering device, comprising:

the device comprises a device body, a first air inlet, a second air inlet, a first air outlet and a second air outlet, wherein the middle of the device body is provided with an air channel which is provided with an air inlet end and an air outlet end;

a filter screen arranged in the ventilation flow passage;

a first actuator, which is manufactured by a semiconductor process and is arranged in the ventilation flow channel for being driven to generate high pressure to gas outside the device body, and the gas is conveyed and guided into the filter screen for purification and filtration and is discharged from the gas outlet end;

a gas sensor arranged at the gas outlet end for detecting a gas quality data of the gas outlet end; and

the driving module is electrically connected with the first actuator, the second actuator and the gas sensor and is provided with a microprocessor and a communication unit;

the microprocessor is used for driving the first actuator, the second actuator and the gas sensor, and transmitting the gas quality data of the gas sensor to an external device through the communication unit.

16. The nasal prong filtering device of claim 15, wherein the first actuator comprises:

an air outlet base, an air outlet chamber and a compression chamber are manufactured by a silicon substrate etching process, and a through hole is etched between the air outlet chamber and the compression chamber;

a first oxide layer formed by deposition process and superposed on the gas outlet base, and etched to remove the part corresponding to the compression chamber;

a jet resonance layer which is generated by a silicon substrate deposition process and is superposed on the first oxide layer, and forms a plurality of air inlet holes corresponding to partial etching removal of the compression chamber, and forms a jet hole corresponding to the partial etching removal of the center of the compression chamber, so that a suspension section capable of moving and vibrating is formed between the air inlet holes and the jet hole;

a second oxide layer formed by deposition process and overlapped on the suspension section of the jet resonance layer, and partially etched to form a resonance cavity section and communicated with the jet hole;

a resonant cavity layer, which is made by a silicon substrate etching process and is correspondingly bonded and overlapped on the second oxide layer to promote the resonant cavity to correspond to the resonant cavity section of the second oxide layer;

a first piezoelectric component, formed by deposition process and superposed on the resonant cavity layer, including a first lower electrode layer, a first piezoelectric layer, a first insulating layer and a first upper electrode layer, wherein the first lower electrode layer is formed by deposition process and superposed on the resonant cavity layer, the first piezoelectric layer is formed by deposition process and superposed on part of the surface of the first lower electrode layer, the first insulating layer is formed by deposition process and superposed on part of the surface of the first piezoelectric layer, the first upper electrode layer is formed by deposition process and superposed on the surface of the first insulating layer and the surface of the first piezoelectric layer not provided with the first insulating layer, so as to be electrically connected with the first piezoelectric layer;

the first piezoelectric component is driven to drive the jet resonance layer to generate resonance, so that the suspension section of the jet resonance layer generates reciprocating vibration displacement to attract the gas to enter the compression chamber through the plurality of gas inlet holes, the gas is guided into the resonant cavity through the gas jet holes, the gas is discharged from the resonant cavity and is concentrated and guided into the compression chamber, the gas passes through the through hole, and the gas outlet chamber forms high-pressure discharge, so that the gas is transmitted and flows.

17. A nasal prong filtering device, comprising:

the device comprises a device body, a first air inlet, a second air inlet, a first air outlet and a second air outlet, wherein the middle of the device body is provided with an air channel which is provided with an air inlet end and an air outlet end;

a filter screen arranged in the ventilation flow passage;

a second actuator, which is made by semiconductor process and is arranged in the ventilation flow channel for being driven and generating large flow for gas outside the device body, and the gas is conveyed and guided into the filter screen for purification and filtration and is discharged from the gas outlet end;

a gas sensor arranged at the gas outlet end for detecting a gas quality data of the gas outlet end; and

the driving module is electrically connected with a first actuator, the second actuator and the gas sensor and is provided with a microprocessor and a communication unit;

the microprocessor is used for driving the first actuator, the second actuator and the gas sensor, and transmitting the gas quality data of the gas sensor to an external device through the communication unit.

18. The nasal prong filtering device of claim 17, wherein the second actuator comprises:

an air inlet base, which is used for manufacturing at least one air inlet hole by a silicon substrate etching process;

a third oxide layer formed on the air inlet base by deposition process and having multiple converging channels and a converging chamber formed by etching process, wherein the converging channels are communicated between the converging chamber and the air inlet of the air inlet base;

a resonance layer formed by a silicon substrate deposition process and superposed on the third oxide layer, and an etching process to form a central through hole, a vibration section and a fixed section, wherein the central through hole is formed at the center of the resonance layer, the vibration section is formed at the peripheral area of the central through hole, and the fixed section is formed at the peripheral area of the resonance layer;

a fourth oxide layer formed by deposition process and overlapped on the resonance layer, and partially etched to form a compression cavity section;

a vibration layer which is formed by a silicon substrate deposition process and is superposed on the fourth oxide layer, and an actuating section, an outer edge section and a plurality of air holes are formed by an etching process, wherein the actuating section is formed at the central part, the outer edge section forms a periphery surrounding the actuating section, the plurality of air holes are respectively formed between the actuating section and the outer edge section, and the vibration layer and the compression cavity section of the fourth oxide layer define a compression chamber; and

a second piezoelectric component, which is formed by deposition process and is superposed on the actuating section of the vibration layer, and includes a second lower electrode layer, a second piezoelectric layer, a second insulating layer and a second upper electrode layer, wherein the second lower electrode layer is formed by deposition process and is superposed on the actuating section of the vibration layer, the second piezoelectric layer is formed by deposition process and is superposed on a part of the surface of the second lower electrode layer, the second insulating layer is formed by deposition process and is superposed on a part of the surface of the second piezoelectric layer, and the second upper electrode layer is formed by deposition process and is superposed on the surface of the second insulating layer and the surface of the second piezoelectric layer not provided with the second insulating layer, so as to be electrically connected with the second piezoelectric layer;

the second piezoelectric component is driven to drive the vibration layer and the resonance layer to generate resonance displacement, the gas is guided into the gas inlet hole, is collected into the collecting chamber through the collecting channel, passes through the central through hole of the vibration layer and is discharged from the plurality of air holes of the vibration layer, and the transmission and flowing of the gas are realized.

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