CN113960812A - Integrated optical phased array and control method thereof - Google Patents

Integrated optical phased array and control method thereof Download PDF

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Publication number
CN113960812A
CN113960812A CN202010705016.8A CN202010705016A CN113960812A CN 113960812 A CN113960812 A CN 113960812A CN 202010705016 A CN202010705016 A CN 202010705016A CN 113960812 A CN113960812 A CN 113960812A
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light
waveguide
phase
phased array
optical phased
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CN113960812B (en
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白雅文
林天华
储涛
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Zhejiang University ZJU
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Zhejiang University ZJU
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0102—Constructional details, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
    • H01Q3/26—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
    • H01Q3/26—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture
    • H01Q3/2676—Optically controlled phased array

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

The application provides an integrated optics phased array and control method thereof, is applied to optics phased array field, wherein, integrated optics phased array includes: the device comprises a laser, a beam splitter, a phase shifter, a dense waveguide, a flat waveguide and a curved grating; the laser is used for generating a light source, and the light source is input into the beam splitter to obtain a plurality of beams of light; the phase shifter is used for carrying out phase modulation on each beam of light and inputting each beam of light after phase modulation into the dense waveguide; the dense waveguide is used for coupling the light beam after phase modulation into the slab waveguide, and the slab waveguide is used for coupling a plurality of light beams into one light beam for light deflection and transmitting the light beam after light deflection through the curved grating. Therefore, the problem that crosstalk is generated due to poor mode field binding performance of the grating antenna in the conventional optical phased array is solved, and the problem that the size is large due to the fact that the arrangement distance of the grating antenna units of the conventional optical phased array cannot be reduced to one half of the wavelength is solved.

Description

Integrated optical phased array and control method thereof
Technical Field
The application relates to the technical field of optical phased arrays, in particular to an integrated optical phased array and a control method thereof.
Background
In the related art, as shown in fig. 1, a beam splitter is used to split a laser beam into a plurality of beams, each beam is phase-modulated with a specific phase shift, and then the beams are emitted through an optical antenna, thereby spatially deflecting or shaping the laser beam.
Therefore, it can be seen that in a silicon-based optoelectronic integrated chip, the arrangement pitch of grating antenna units is difficult to be reduced to one half of the wavelength due to the optical diffraction and waveguide structures, in order to avoid the occurrence of redundant grating lobes, the effect of only one grating lobe output needs to be achieved by non-uniform arrangement of arrays to suppress high-order grating lobes, which results in a larger device size, and due to the restriction of the grating antennas on mode field constraints, crosstalk generated when light is transmitted in the grating antennas cannot be optimized to a certain extent, which is higher than crosstalk generated when light is transmitted in waveguides.
Disclosure of Invention
The present application is directed to solving, at least to some extent, one of the technical problems in the related art.
Therefore, an object of the present application is to provide an integrated optical phased array, which realizes on-chip optical rotation, solves the problem of crosstalk generated by the conventional optical phased array due to poor mode field binding of the grating antenna, and can reduce the size of the device, and solves the problem of large size generated by the fact that the arrangement pitch of the grating antenna units of the conventional optical phased array cannot be reduced to one half of the wavelength.
Another object of the present application is to provide a control method using an integrated optical phased array.
To achieve the above object, an embodiment of the present application provides an integrated optical phased array, including: the device comprises a laser, a beam splitter, a phase shifter, a dense waveguide, a flat waveguide and a curved grating; the laser is used for generating a light source and inputting the light source into the beam splitter to obtain a plurality of beams of light; the phase shifter is used for carrying out phase modulation on each beam of light and inputting each beam of light after phase modulation into the dense waveguide; the dense waveguide is used for coupling the light beams after phase modulation into the slab waveguide, and the slab waveguide is used for deflecting each light beam and emitting each light beam after deflection through the curved grating.
The integrated optical phased array of the embodiment of the application is used for generating a light source through a laser, and the light source is input into a beam splitter to obtain a plurality of beams of light; the phase shifter is used for carrying out phase modulation on each beam of light and inputting each beam of light after phase modulation into the dense waveguide; the dense waveguide is used for coupling the light beam after phase modulation into the slab waveguide, and the slab waveguide is used for coupling a plurality of light beams into one light beam for light deflection and transmitting the light beam after light deflection through the curved grating. Therefore, the problem that crosstalk is generated due to poor mode field binding performance of grating antennas in the existing optical phased array is solved, the problem that the size is large due to the fact that the arrangement distance of grating antenna units of the existing optical phased array cannot be reduced to one half of the wavelength is solved, and the purposes of on-chip optical rotation and device size reduction are achieved.
In addition, the integrated optical phased array according to the above embodiment of the present application may also have the following additional technical features:
further, in one embodiment of the present application, the beam splitter is a 1 × 2 multimode interference beam splitter cascade or a star coupler.
Further, in one embodiment of the present application, the phase shifter is configured as a thermo-optic phase shifter or an electro-optic phase shifter.
Further, in one embodiment of the present application, the phase shifter is configured to phase modulate each beam of light, and includes:
a specific phase shift is added to each beam, and when the deflection angle is θ, the added phase is:
Figure BDA0002594363990000021
wherein the content of the first and second substances,
Figure BDA0002594363990000022
xi＝id；
where λ is the wavelength, d is the adjacent waveguide, and i is the sequence of waveguides (i ═ 0,1, 2.).
Further, in one embodiment of the present application, the dense waveguide uses a waveguide array structure based on sinusoidal spatial modulation.
Further, in one embodiment of the present application, each beam of light is emitted from the dense waveguide with a transmission field at the slab waveguide of:
Figure BDA0002594363990000023
where | En | is the magnitude of the field strength, rnIs the distance of the monitoring point from the transmitting point,
Figure BDA0002594363990000026
is a phase factor, ψ, generated during propagationnFor additional phase, In (θ, φ) is a far field direction function of the slab waveguide; when the light deflection angle is θ, the phase shift arm additional phase ψ n is calculated by the above formula to deflect the light beam.
Further, in one embodiment of the present application, when no phase shift is added,
Figure BDA0002594363990000024
where λ is the operating wavelength, d0For array element interval, when the order m is not equal to 0,
Figure BDA0002594363990000025
in order to achieve the above object, a second aspect of the present application provides a control method for an integrated optical phased array, including: acquiring a light source, and splitting the light source into a plurality of beams; phase modulating each of the plurality of beams of light; coupling each beam of light subjected to phase modulation into the slab waveguide through the dense waveguide; the flat waveguide is used for deflecting each light beam and emitting each light beam deflected by the light through the curved grating.
According to the control method for the application integration optical phased array, a light source is obtained, and a plurality of beams of light are obtained through beam splitting processing of the light source; phase modulation is carried out on each beam of light in the multiple beams of light; coupling each beam of light subjected to phase modulation into the slab waveguide through the dense waveguide; the flat waveguide is used for deflecting the coupled light beam and emitting the light beam after deflection through the curved grating. Therefore, the purposes of on-chip optical rotation and device size reduction are achieved.
In addition, the control method using the integrated optical phased array according to the above embodiment of the present application may further have the following additional technical features:
further, in an embodiment of the present application, the phase modulating each of the plurality of beams of light includes:
a specific phase shift is added to each beam, and when the deflection angle is θ, the added phase is:
Figure BDA0002594363990000031
wherein the content of the first and second substances,
Figure BDA0002594363990000032
xi＝id；
where λ is the wavelength, d is the adjacent waveguide, and i is the sequence of waveguides (i ═ 0,1, 2.).
Further, in one embodiment of the present application, the slab waveguide is for deflecting each light beam, including:
each beam of light emanates from the dense waveguide, with a transmission field at the slab waveguide of:
Figure BDA0002594363990000033
where | En | is the magnitude of the field strength, rnIs the distance of the monitoring point from the transmitting point,
Figure BDA0002594363990000034
is a phase factor, ψ, generated during propagationnFor additional phase, In (θ, φ) is a far field direction function of the slab waveguide; when the light deflection angle is θ, the phase shift arm additional phase ψ n is calculated by the above formula to deflect the light beam.
Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.
Drawings
The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic diagram of a prior art optical phased array in accordance with an embodiment of the present application;
FIG. 2 is a diagram illustrating an example structure of an integrated optical phased array according to an embodiment of the present application;
FIG. 3 is a schematic diagram of an integrated optical phased array on a crosstalk-free chip according to an embodiment of the present application;
FIG. 4 is a simulation diagram of an implementation process of an optical phased array according to an embodiment of the present application;
fig. 5 is a flowchart illustrating a control method for applying an integrated optical phased array according to an embodiment of the present disclosure.
Detailed Description
Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present application and should not be construed as limiting the present application.
An integrated optical phased array and a control method thereof proposed according to an embodiment of the present application are described below with reference to the accompanying drawings.
Fig. 2 is a diagram illustrating an example of the structure of an integrated optical phased array according to an embodiment of the present application. As shown in fig. 2, the method for generating high-speed video from a single motion-blurred image by using the integrated optical phased array comprises the following steps: a laser 1, a beam splitter 2, a phase shifter 3, a dense waveguide 4, a slab waveguide 5 and a curved grating 6.
The laser 1 is used for generating a light source, and the light source is input into the beam splitter 2 to obtain a plurality of beams of light.
The phase shifter 3 is used to perform phase modulation on each beam of light and input each beam of light after phase modulation to the dense waveguide 4.
The dense waveguide 4 is used for coupling the light beam after phase modulation into the slab waveguide 5, and the slab waveguide 5 is used for coupling a plurality of light beams into one light beam for light deflection, and the light beam after light deflection is emitted through the curved grating 6.
That is, light emitted from the laser 1 is divided into a plurality of beams by the beam splitter 2, coupled to the slab waveguide 5 by the dense waveguide 4, phase-modulated on the dense waveguide 4 to add a specific phase shift to each beam, phase-deflected on the slab waveguide 5, and emitted through the curved grating, thereby deflecting or shaping the laser beam on the chip.
Therefore, the difference is that the existing optical phased array realizes light deflection in space, and the application realizes light beam deflection in a flat waveguide and on-chip light rotation. Due to the restrictive nature of the mode field by the grating antenna, the crosstalk of light in the waveguide is smaller than in the grating antenna, thus realizing an optical phased array that eliminates crosstalk. The size of the existing optical phased array is too large due to the requirement of the space of the grating antenna, and the size of the device is reduced by using the waveguide.
In the embodiment of the present application, the beam splitter 2 realizes a uniform light splitting function, and may be a cascade of 1 × 2 multimode interference beam splitters or a star coupler.
In the present embodiment, the phase shifter 3 is formed by a thermo-optic phase shifter or an electro-optic phase shifter.
In the embodiment of the present application, the phase shifter 3 is used for phase modulating each beam of light, and includes:
a specific phase shift is added to each beam, and when the deflection angle is θ, the added phase is:
Figure BDA0002594363990000041
wherein the content of the first and second substances,
Figure BDA0002594363990000042
xi＝id。
where λ is the wavelength, d is the adjacent waveguide, and i is the sequence of waveguides (i ═ 0,1, 2.).
In the embodiment of the present application, the dense waveguide 4 uses a waveguide array structure based on sinusoidal spatial modulation, and it can be understood that the dense waveguide 4 couples the phase-modulated light beam into the slab waveguide 5, the structure has a large bandwidth and low loss, crosstalk can reach below-40 dB, and the distance between the output waveguide arrays can be reduced to one half of the wavelength, thereby avoiding the occurrence of grating lobes and solving the problem of large crosstalk caused by the use of grating antennas in the existing optical phased array.
In the embodiment of the present application, the slab waveguide 5 is used to complete on-chip optical rotation, each light beam is emitted from the dense waveguide 4, and the transmission field in the slab waveguide 5 is:
Figure BDA0002594363990000051
where | En | is the magnitude of the field strength, rnIs the distance of the monitoring point from the transmitting point,
Figure BDA0002594363990000054
is a phase factor, ψ, generated during propagationnFor additional phase, In (θ, φ) is a far field direction function of the slab waveguide; when the light deflection angle is θ, the phase shift arm additional phase ψ n is calculated by the above formula to deflect the light beam.
In the present embodiment, when no phase shift is added,
Figure BDA0002594363990000052
where λ is the operating wavelength, d0For array element interval, when the order m is not equal to 0,
Figure BDA0002594363990000053
it can be understood that in the silicon-based optoelectronic integrated chip, limited by the optical diffraction and waveguide structure, it is difficult to reduce the pitch of the grating antenna element arrangement to one half of the wavelength, but in the present application, this problem is effectively avoided due to the design of the dense waveguide 4, and the on-chip beam deflection is realized.
In the embodiment of the present application, the curved grating 6 can emit the light beam with a specific deflection angle from the flat area, thereby implementing the function of an optical phased array.
For the sake of clarity of the integrated optical phased array of the present application, as shown in fig. 3, an integrated optical phased array on a crosstalk-free chip includes, in order from left to right: the device comprises a laser 1, a beam splitter 2, a phase shifter 3, a dense waveguide 4, a flat waveguide 5 and a curved grating 6.
Specifically, the beam splitter 2 may be formed by a cascade of 1 × 2 multi-mode interference (MMI) beam splitters or a star coupler, so as to implement a function of uniform light splitting.
The phase shifter 3 may be formed by an electro-optic phase shifter or a thermo-optic phase shifter, and may perform a function of phase modulating each beam of light and adding a specific phase shift.
The dense waveguide 4 can use a waveguide array structure based on sinusoidal spatial modulation, and can realize the coupling of the phase-modulated light beam into the slab waveguide 5.
The slab waveguide 5 is used for completing on-chip optical rotation, and after the phase difference is generated by adjusting the phase shift arm, the equiphase plane is not vertical to the waveguide direction any more but has a certain deflection, so that the beams meeting the equiphase relation are coherent and long, the beams not meeting the equiphase condition are mutually offset, and the direction of the beams is always vertical to the equiphase plane, thereby realizing on-chip optical deflection.
For example, as shown in fig. 4, the above process is verified by using mode solutions (multifunctional waveguide mode solving and propagation simulation software), an optical phased array with a scan angle of 60 ° at 1550nm is simulated, the slab waveguide material is SiON, and the simulation result is shown in fig. 3, and it is verified that on-chip light deflection can be realized, wherein fig. 4(a) is a-30 ° optical field diagram; FIG. 4(b) is a 30 ° light field plot; FIG. 4(c) is a-30 ° far field diagram; fig. 4(d) is a 30 ° far field diagram.
Therefore, the curved grating 6 can emit the light beam with the specific deflection angle from the flat plate area, and further realize the function of deflecting the optical phased array light beam.
The integrated optical phased array of the embodiment of the application is used for generating a light source through a laser, and the light source is input into a beam splitter to obtain a plurality of beams of light; the phase shifter is used for carrying out phase modulation on each beam of light and inputting each beam of light after phase modulation into the dense waveguide; the dense waveguide is used for coupling the light beam after phase modulation into the flat waveguide, and the flat waveguide is used for deflecting the coupled light beam and emitting the light beam after deflection through the curved grating. Therefore, the problem that crosstalk is generated due to poor mode field binding performance of grating antennas in the existing optical phased array is solved, the problem that the size is large due to the fact that the arrangement distance of grating antenna units of the existing optical phased array cannot be reduced to one half of the wavelength is solved, and the purposes of on-chip optical rotation and device size reduction are achieved.
In order to implement the above embodiments, the present application further provides a control method using the integrated optical phased array.
Fig. 5 is a flowchart illustrating a control method for applying an integrated optical phased array according to an embodiment of the present disclosure.
As shown in fig. 5, the method includes:
step 101, obtaining a light source, and splitting the light source into a plurality of beams of light.
Step 102, phase modulation is performed on each of the plurality of beams of light.
And 103, coupling each beam of light subjected to phase modulation into the slab waveguide through the dense waveguide.
And 104, the flat waveguide is used for deflecting the coupled light beam and emitting the light beam after deflection through the curved grating.
In an embodiment of the present application, phase modulating each of the plurality of beams of light comprises:
a specific phase shift is added to each beam, and when the deflection angle is θ, the added phase is:
Figure BDA0002594363990000061
wherein the content of the first and second substances,
Figure BDA0002594363990000062
xi＝id；
where λ is the wavelength, d is the adjacent waveguide, and i is the sequence of waveguides (i ═ 0,1, 2.).
In the embodiment of the present application, the slab waveguide is for deflecting each light beam, and includes:
each beam emanates from a dense waveguide with a transmission field in the slab:
Figure BDA0002594363990000063
where | En | is the magnitude of the field strength, rnIs the distance of the monitoring point from the transmitting point,
Figure BDA0002594363990000064
is a phase factor, ψ, generated during propagationnFor additional phase, In (θ, φ) is a far field direction function of the slab waveguide; when the light deflection angle is θ, the phase shift arm additional phase ψ n is calculated by the above formula to deflect the light beam.
When the phase shift is not added to the signal,
Figure BDA0002594363990000071
where λ is the operating wavelength, d0For array element interval, when the order m is not equal to 0,
Figure BDA0002594363990000072
it should be noted that the foregoing explanation of the integrated optical phased array embodiment also applies to the method of the embodiment, and is not repeated here.
The high-speed video generation device of the embodiment of the application obtains a light source, and obtains a plurality of beams of light through beam splitting processing of the light source; phase modulation is carried out on each beam of light in the multiple beams of light; coupling each beam of light subjected to phase modulation into the slab waveguide through the dense waveguide; the flat waveguide is used for deflecting the coupled light beam and emitting the light beam after deflection through the curved grating. Therefore, the purposes of on-chip optical rotation and device size reduction are achieved.
In the description herein, reference to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
Any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more executable instructions for implementing steps of a custom logic function or process, and alternate implementations are included within the scope of the preferred embodiment of the present application in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the present application.
The logic and/or steps represented in the flowcharts or otherwise described herein, e.g., an ordered listing of executable instructions that can be considered to implement logical functions, can be embodied in any computer-readable medium for use by or in connection with an instruction execution system, apparatus, or device, such as a computer-based system, processor-containing system, or other system that can fetch the instructions from the instruction execution system, apparatus, or device and execute the instructions. For the purposes of this description, a "computer-readable medium" can be any means that can contain, store, communicate, propagate, or transport the program for use by or in connection with the instruction execution system, apparatus, or device. More specific examples (a non-exhaustive list) of the computer-readable medium would include the following: an electrical connection (electronic device) having one or more wires, a portable computer diskette (magnetic device), a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber device, and a portable compact disc read-only memory (CDROM). Additionally, the computer-readable medium could even be paper or another suitable medium upon which the program is printed, as the program can be electronically captured, via for instance optical scanning of the paper or other medium, then compiled, interpreted or otherwise processed in a suitable manner if necessary, and then stored in a computer memory.
It should be understood that portions of the present application may be implemented in hardware, software, firmware, or a combination thereof. In the above embodiments, the various steps or methods may be implemented in software or firmware stored in memory and executed by a suitable instruction execution system. If implemented in hardware, as in another embodiment, any one or combination of the following techniques, which are known in the art, may be used: a discrete logic circuit having a logic gate circuit for implementing a logic function on a data signal, an application specific integrated circuit having an appropriate combinational logic gate circuit, a Programmable Gate Array (PGA), a Field Programmable Gate Array (FPGA), or the like.
It will be understood by those skilled in the art that all or part of the steps carried by the method for implementing the above embodiments may be implemented by hardware related to instructions of a program, which may be stored in a computer readable storage medium, and when the program is executed, the program includes one or a combination of the steps of the method embodiments.
In addition, functional units in the embodiments of the present application may be integrated into one processing module, or each unit may exist alone physically, or two or more units are integrated into one module. The integrated module can be realized in a hardware mode, and can also be realized in a software functional module mode. The integrated module, if implemented in the form of a software functional module and sold or used as a stand-alone product, may also be stored in a computer readable storage medium.
The storage medium mentioned above may be a read-only memory, a magnetic or optical disk, etc. Although embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present application, and that variations, modifications, substitutions and alterations may be made to the above embodiments by those of ordinary skill in the art within the scope of the present application.

Claims (10)

1. An integrated optical phased array, comprising: the device comprises a laser, a beam splitter, a phase shifter, a dense waveguide, a flat waveguide and a curved grating;
the laser is used for generating a light source and inputting the light source into the beam splitter to obtain a plurality of beams of light;
the phase shifter is used for carrying out phase modulation on each beam of light and inputting each beam of light after phase modulation into the dense waveguide;
the dense waveguide is used for coupling the light beam after phase modulation into the slab waveguide, and the slab waveguide is used for coupling a plurality of light beams into one light beam for light deflection and transmitting the light beam after light deflection through the curved grating.
2. The integrated optical phased array of claim 1,
the beam splitter is formed by cascading 1 x 2 multimode interference beam splitters or a star coupler.
3. The integrated optical phased array of claim 1,
the phase shifter is composed of a thermo-optic phase shifter or an electro-optic phase shifter.
4. The integrated optical phased array of claim 1,
the phase shifter is used for modulating the phase of each beam of light, and comprises:
a specific phase shift is added to each beam, and when the deflection angle is θ, the added phase is:
Figure FDA0002594363980000011
wherein the content of the first and second substances,
Figure FDA0002594363980000012
xi＝id；
where λ is the wavelength, d is the adjacent waveguide, and i is the sequence of waveguides (i ═ 0,1, 2.).
5. The integrated optical phased array of claim 1,
the dense waveguide uses a waveguide array structure based on sinusoidal spatial modulation.
6. The integrated optical phased array of claim 1, wherein each beam of light emanates from the dense waveguide, with a transmission field at the slab waveguide of:
Figure FDA0002594363980000013
where | En | is the magnitude of the field strength, rnIs the distance of the monitoring point from the transmitting point,
Figure FDA0002594363980000014
is a phase factor, ψ, generated during propagationnFor additional phase, In (θ, φ) is a far field direction function of the slab waveguide; when the light deflection angle is θ, the phase shift arm additional phase ψ n is calculated by the above formula to deflect the light beam.
7. The integrated optical phased array of claim 6, wherein when no phase shift is added,
Figure FDA0002594363980000015
where λ is the operating wavelength, d0For array element interval, when the order m is not equal to 0,
Figure FDA0002594363980000021
8. a control method for applying the integrated optical phased array of any one of claims 1 to 7, comprising:
acquiring a light source, and splitting the light source into a plurality of beams;
phase modulating each of the plurality of beams of light;
coupling each beam of light subjected to phase modulation into the slab waveguide through the dense waveguide;
the flat waveguide is used for deflecting the coupled light beam and transmitting the light beam after deflection through the curved grating.
9. The method of claim 8, wherein said phase modulating each of said plurality of beams of light comprises:
a specific phase shift is added to each beam, and when the deflection angle is θ, the added phase is:
Figure FDA0002594363980000022
wherein the content of the first and second substances,
Figure FDA0002594363980000023
xi＝id；
where λ is the wavelength, d is the adjacent waveguide, and i is the sequence of waveguides (i ═ 0,1, 2.).
10. The method of claim 8, wherein the slab waveguide is configured to deflect each beam of light, comprising:
each beam of light emanates from the dense waveguide, with a transmission field at the slab waveguide of:
Figure FDA0002594363980000024
where | En | is the magnitude of the field strength, rnIs the distance of the monitoring point from the transmitting point,
Figure FDA0002594363980000025
is a phase factor, ψ, generated during propagationnFor additional phase, In (θ, φ) is a far field direction function of the slab waveguide; when the light deflection angle is θ, the phase shift arm additional phase ψ n is calculated by the above formula to deflect the light beam.
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