CN113960781A - Electrochromic device and preparation method and device thereof - Google Patents
Electrochromic device and preparation method and device thereof Download PDFInfo
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- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 5
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- G—PHYSICS
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- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
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- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
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Abstract
The invention discloses an electrochromic device and a preparation method and a device thereof, wherein the device comprises an electrothermal actuator and an angle-sensitive metamaterial unit, wherein the electrothermal actuator comprises a bearing flat plate, a plurality of cantilevers and a plurality of electrodes; the angle sensitive metamaterial unit has different spectral responses to light with different incident angles and comprises a substrate layer and a micro-nano periodic structure; the substrate layer is arranged on the bearing flat plate, and the micro-nano periodic structure is arranged on the substrate layer; the cantilever generates different deformation quantities according to different applied voltages and comprises a plurality of layers of materials with different thermal expansion coefficients; the number of the cantilever and the number of the electrodes are equal, one end of the cantilever is connected with the electrodes, and the other end of the cantilever is connected with the bearing flat plate. The embodiment of the invention can realize color regulation and control of visible light full spectrum by controlling voltage through the electrode on one device, improves resolution ratio, and can be widely applied to the technical field of devices.
Description
Technical Field
The invention relates to the technical field of devices, in particular to an electrochromic device and a preparation method and a preparation device thereof.
Background
Micro-Electro-Mechanical Systems (MEMS) is an advanced manufacturing technology that crosses many subjects such as physics, chemistry, mechanics, electricity, optics, etc. based on a semiconductor manufacturing process, and can realize functions such as measurement, driving, energy conversion, etc. by integrally manufacturing units such as Micro energy, Micro sensors, Micro actuators, etc. on a chip.
The traditional MEMS device applied to display can not realize active color regulation, and a color filter is additionally added or a tricolor light source is utilized; an Interferometric Modulator (IMOD) device capable of realizing color modulation also needs to design devices with different parameters according to the wavelengths of the three primary colors of red, green and blue, so that the area of one pixel is greatly increased, and the display resolution is limited.
Disclosure of Invention
In view of this, an object of the embodiments of the present invention is to provide an electrochromic device, and a method and an apparatus for manufacturing the electrochromic device, which can control a voltage through an electrode on one device to realize color control of a full spectrum of visible light, and improve resolution.
In a first aspect, an embodiment of the present invention provides an electrochromic device, including an electrothermal actuator and an angle-sensitive metamaterial unit, where the electrothermal actuator includes a carrier plate, a plurality of cantilevers, and a plurality of electrodes; wherein the content of the first and second substances,
the angle-sensitive metamaterial unit has different spectral responses to light with different incident angles and comprises a substrate layer and a micro-nano periodic structure; the substrate layer is arranged on the bearing flat plate, and the micro-nano periodic structure is arranged on the substrate layer;
the cantilever generates different deformation quantities according to different applied voltages and comprises a plurality of layers of materials with different thermal expansion coefficients;
the number of the cantilevers is equal to that of the electrodes, one ends of the cantilevers are connected with the electrodes, and the other ends of the cantilevers are connected with the bearing flat plate.
Optionally, the micro-nano-sized periodic structure includes a grating structure.
Optionally, the material of the substrate layer and the material of the micro-nano-sized periodic structure comprise metal and/or dielectric; and the material of the substrate layer is different from the material of the micro-nano periodic structure.
Optionally, the metal comprises Au, Ag or Al.
Optionally, the dielectric comprises Si, Si3N4、TiO2Or SiO2。
Optionally, the cantilever comprises 2 layers of materials with different coefficients of thermal expansion, and the 2 layers of materials comprise 2 layers of dielectrics or dielectrics and metals.
Optionally, the cantilever comprises 3 layers of materials with different coefficients of thermal expansion, the 3 layers of materials comprising metal, dielectric and metal.
Optionally, the number of the cantilevers and the number of the electrodes are 4, the carrier plate is a quadrilateral, and the other ends of the 4 cantilevers are respectively connected to 4 corners of the carrier plate.
In a second aspect, embodiments of the present invention provide a display or sensing apparatus comprising an electrochromic device as described above.
In a third aspect, an embodiment of the present invention provides a method for manufacturing an electrochromic device, including:
providing an SOI substrate, and forming a first layer of film of an electrothermal actuator and a substrate layer of an angle sensitive metamaterial unit on the SOI substrate;
forming an electrothermal actuator comprising a substrate layer by etching by using the structure of the SOI substrate as a mask;
forming a micro-nano periodic structure on the surface of the substrate layer;
and forming an opening on the bottom surface of the SOI substrate, and releasing the electrothermal actuator and the angle-sensitive metamaterial unit through the opening to obtain the electrochromic device.
The implementation of the embodiment of the invention has the following beneficial effects: the electrochromic device comprises an electrothermal actuator and an angle-sensitive metamaterial unit, wherein the electrothermal actuator comprises a bearing flat plate, a plurality of cantilevers and a plurality of electrodes, the angle-sensitive metamaterial unit has different spectral responses to light with different incident angles, and the cantilevers generate different deformation quantities by different applied voltages; the electric heating type actuator and the angle-sensitive metamaterial unit borne by the electric heating type actuator rotate to a required angle by applying voltage through the electrode, and then the angle-sensitive metamaterial unit generates angle inclination to produce different spectral responses to incident light through the deformation of the cantilever, so that the color regulation and control of visible light full spectrum on one device are realized, and the resolution ratio is improved.
Drawings
Fig. 1 is a block diagram of an electrochromic device according to an embodiment of the present invention;
FIG. 2 is a graph of the spectral response of an angle-sensitive metamaterial unit provided in an embodiment of the present invention for different incident angles of a white light source;
FIG. 3 is a graph of the spectral response of an angle-sensitive metamaterial unit provided in an embodiment of the present invention to a fixed incident angle of a white light source and different ambient refractive indices;
FIG. 4 is a graph of the spectral response of an angle-sensitive metamaterial unit provided in an embodiment of the present invention to a fixed light source at different scanning incidence angles of ambient refractive index;
fig. 5 is a schematic flow chart illustrating steps of a method for manufacturing an electrochromic device according to an embodiment of the present invention.
Detailed Description
The invention is described in further detail below with reference to the figures and the specific embodiments. The step numbers in the following embodiments are provided only for convenience of illustration, the order between the steps is not limited at all, and the execution order of each step in the embodiments can be adapted according to the understanding of those skilled in the art.
The Electrothermal actuator (ETA) utilizes the difference of thermal expansion coefficients among various materials to enable the materials with thermal expansion effect to generate driving effect through the difference of expansion degrees, can meet the requirements of displacement size and direction of the actuator on different occasions through differentiated structural design, and has the main advantages of low driving voltage, good system processing and manufacturing compatibility, larger actuating stroke and moment, and the like.
The metamaterial is an artificial composite material which is formed by combining composite materials under the sub-wavelength scale and has performance which is not possessed by natural materials.
As shown in fig. 1, an embodiment of the present invention provides an electrochromic device, which includes a supporting plate 5, an angle-sensitive metamaterial unit, a plurality of cantilevers 4, and a plurality of electrodes 3; wherein the content of the first and second substances,
the angle sensitive metamaterial unit has different spectral responses to light with different incident angles and comprises a substrate layer 2 and a micro-nano periodic structure 1; the substrate layer 2 is arranged on the bearing plate 5, and the micro-nano periodic structure 1 is arranged on the substrate layer 2;
the cantilever 4 generates different deformation quantities according to different applied voltages and comprises a plurality of layers of materials with different thermal expansion coefficients;
the number of the cantilever 4 is equal to that of the electrode 3, one end of the cantilever 4 is connected with the electrode 3, and the other end of the cantilever 4 is connected with the bearing flat plate 5.
The electrochromic device works according to the following principle: based on the combination of the electrothermal actuator and the angle-sensitive metamaterial, the color regulation and control are realized by utilizing the difference of reflection spectra of the angle-dependent metamaterial under different incidence angles. The actuation of the electrothermal actuator enables the angle regulation of the angle sensitive metamaterial to become active; the electrothermal actuator cantilever is prepared by utilizing multilayer materials with different thermal expansion coefficients, and stress generated by deformation in different degrees when different voltages are applied to the electrothermal actuator causes the bearing flat plate of the electrothermal actuator to incline downwards; meanwhile, because the bearing flat plate is provided with a plurality of cantilevers and electrodes, the inclination of the bearing flat plate and the angle-dependent metamaterial on the bearing flat plate at a plurality of angles can be realized by selectively applying voltages to different electrodes, and the angle scanning type imaging/detection is realized.
The angle-sensitive metamaterial unit is based on electromagnetic response between surface plasmons and is composed of two layers of different materials, namely metal, dielectric or metal and dielectric; one layer of material is a substrate layer, the other layer of material is a micro-nano scale periodic structure, and excitation is carried out through coupling between free surface charges of contact surfaces among different materials and incident electromagnetic waves at an interface.
It will be understood by those skilled in the art that the carrier plate and the substrate layer may be of the same layer structure, and other material layers may be interposed therebetween.
It should be noted that the cantilever part plays a role in supporting and adjusting the height (angle) of the bearing plate, is composed of double-layer or multi-layer materials, achieves the effect of electric heating brake by utilizing the difference of thermal expansion coefficients among the materials, and the shape of the cantilever part and the length and number of the cantilever can be designed at will.
It will be appreciated by those skilled in the art that the dimensions of the micro-nano sized periodic structures are in the sub-micron scale, and the grating and substrate may be constructed of structures and materials having angle dependent properties.
It should be noted that the shape or size of the carrying plate is not required, and may be designed arbitrarily, and this embodiment is not particularly limited.
Optionally, the micro-nano-sized periodic structure includes a grating structure.
Optionally, the material of the substrate layer and the material of the micro-nano-sized periodic structure comprise metal and/or dielectric; and the material of the substrate layer is different from the material of the micro-nano periodic structure.
Optionally, the metal comprises Au, Ag or Al.
Optionally, the dielectric comprises Si, Si3N4、TiO2Or SiO2。
It should be noted that, in different designs, the material of the substrate layer and the material of the micro-nano-sized periodic structure may be the same material or different materials, including metal and dielectric, such as Au, Ag, Al, Si3N4, TiO2, SiO2, and the like. In this embodiment, the substrate is made of Ag metal, and the periodic structure is made of Au metal.
Referring to FIG. 2, FIG. 2 is a graph showing the spectral response of the angle-sensitive metamaterial unit at different incident angles when the incident light source is white light. As can be seen from fig. 2, the reflectivity of the angle-sensitive metamaterial unit is different for white light with different incident angles and different wavelengths.
Optionally, the cantilever comprises 2 layers of materials with different coefficients of thermal expansion, and the 2 layers of materials comprise 2 layers of dielectrics or dielectrics and metals.
Optionally, the cantilever comprises 3 layers of materials with different coefficients of thermal expansion, the 3 layers of materials comprising metal, dielectric and metal.
The cantilever may be made of a material selected based on the difference in thermal expansion coefficient between the cantilever and the cantilever, and the cantilever may be made of a material having a large difference in thermal expansion coefficient and capable of generating a driving force by an electrothermal effect. In the present embodiment, the material is Si + Ag material, but may be replaced by other two-layer or multi-layer materials, and is usually a dielectric layer material with large thermal expansion coefficient difference, such as Si + Si3N4 or Si + SiO 2; or a dielectric layer and a metal material, such as Si + Au, Si + Ag or Si3N4+ metal; the design of multiple layers, such as three layers, can be metal + dielectric layer + metal, etc., or other choices, as long as the difference of thermal expansion coefficients can be satisfied and the driving force can be generated.
Optionally, the number of the cantilevers and the number of the electrodes are 4, the carrier plate is a quadrilateral, and the other ends of the 4 cantilevers are respectively connected to 4 corners of the carrier plate.
When the bearing plate is quadrilateral, the other ends of the 4 cantilevers are respectively connected with 4 angles of the bearing plate, and the angle or the direction of the bearing plate can be adjusted more conveniently and flexibly through the cantilevers and the electrodes.
The implementation of the embodiment of the invention has the following beneficial effects: the electrochromic device comprises an electrothermal actuator and an angle-sensitive metamaterial unit, wherein the electrothermal actuator comprises a bearing flat plate, a plurality of cantilevers and a plurality of electrodes, the angle-sensitive metamaterial unit has different spectral responses to light with different incident angles, and the cantilevers generate different deformation quantities by different applied voltages; the electric heating type actuator and the angle-sensitive metamaterial unit borne by the electric heating type actuator rotate to a required angle by applying voltage through the electrode, and then the angle-sensitive metamaterial unit generates angle inclination to produce different spectral responses to incident light through the deformation of the cantilever, so that the color regulation and control of visible light full spectrum on one device are realized, and the resolution ratio is improved.
The embodiment of the invention provides a display or sensing device which comprises the electrochromic device.
The surface plasmon-based metamaterial is generally used in the fields of display and sensing, and a signal detection method in the sensing field can be divided into two schemes of spectral scanning and angular scanning. The main advantage of angular scanning compared to spectral scanning schemes is that single wavelength laser sources can be used instead of polychromatic light; thus, it is possible to achieve a higher signal-to-noise ratio due to the wavelength and power stability of the light source. However, since the conventional angle scanning scheme requires a huge terminal instrument, it is difficult to implement a lab-on-a-chip or develop a miniaturized sensor.
The angle-sensitive metamaterial unit has different spectral responses under different incident angles, and can be directly expressed as color regulation; meanwhile, the angle-sensitive metamaterial unit is sensitive to the change of the environmental refractive index under a fixed incident angle, and can be directly applied to a spectrum scanning type sensing device; when the metamaterial is incident at a fixed wavelength (a laser light source), the metamaterial has different incident angles for generating resonance when the refractive index is changed, and the metamaterial can be applied to an angle scanning type sensing device.
Referring to FIG. 3, FIG. 3 shows the spectral response of the angle-sensitive metamaterial unit to change the ambient refractive index by fixing the incident angle of the white light source. As can be seen from fig. 3, the wavelength of the resonant response gradually increases as the ambient refractive index increases.
Referring to fig. 4, fig. 4 shows the spectral response of the refractive index of the environment changed by the fixed laser source (811nm laser source) of the angle-sensitive metamaterial unit and the scanning incident angle. As can be seen from fig. 4, the incident angle of the resonance response gradually decreases as the ambient refractive index increases.
The device can be applied to the display industry, can be similar to DMD, LSD, GLV, TMOS, DMS and the like, and can be applied to projection type and scanning type display devices, VR/AR, projectors and the like.
It should be noted that the above-described device can be applied to a biomedical sensor. For example, the metamaterial in the embodiment has good angle-dependent characteristics, is sensitive to refractive index change, and can be used for detecting the concentration of biomolecules.
In display application, the embodiment utilizes the combination of the electrothermal actuator and the metamaterial to realize active color regulation without additionally using a color filter or a color ring or using three primary color light sources for respective imaging, and the embodiment can utilize a white light source to realize different colors at different angles.
In the sensing field, the embodiment overcomes the requirement of huge terminal equipment of the traditional angle scanning type sensor, and can be made into lab-on-a-chip type miniaturized angle sensing equipment; meanwhile, the design has two sensing modes of angle scanning and spectrum scanning, and can be flexibly selected.
As shown in fig. 5, an embodiment of the present invention provides a method for manufacturing an electrochromic device, including:
s100, providing an SOI substrate, and forming a first layer of film of an electrothermal actuator and a substrate layer of an angle sensitive metamaterial unit on the SOI substrate.
It should be noted that, in an SOI (Silicon-On-Insulator) substrate, a buried oxide layer is introduced between a top Silicon layer and a back substrate. The method comprises the steps of preparing a surface metal structure (the first layer of a multilayer material) of ETA on an SOI substrate by a lift off process, and forming a substrate layer of a metamaterial.
And S200, forming the electrothermal actuator comprising the substrate layer by etching by using the structure of the SOI substrate as a mask.
Specifically, the structure obtained in S100 is used as a mask to perform Si etching, so that the ETA containing the metamaterial substrate is prepared.
S300, forming a micro-nano periodic structure on the surface of the substrate layer.
Specifically, the step adopts an electron beam exposure and lift off process to prepare a micro-nano periodic structure, such as a grating structure.
And S400, forming an opening on the bottom surface of the SOI substrate, and releasing the electrochromic device through the opening.
Specifically, firstly, aligning and exposing the bottom of the SOI, taking photoresist as a mask, deeply etching bottom Si of the SOI by silicon, and opening the bottom; then, using the bottom opening, SiO2 was etched using HF, releasing the ETA and the metamaterial, completing the fabrication.
While the preferred embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. An electrochromic device is characterized by comprising an electrothermal actuator and an angle-sensitive metamaterial unit, wherein the electrothermal actuator comprises a bearing flat plate, a plurality of cantilevers and a plurality of electrodes; wherein the content of the first and second substances,
the angle-sensitive metamaterial unit has different spectral responses to light with different incident angles and comprises a substrate layer and a micro-nano periodic structure; the substrate layer is arranged on the bearing flat plate, and the micro-nano periodic structure is arranged on the substrate layer;
the cantilever generates different deformation quantities according to different applied voltages and comprises a plurality of layers of materials with different thermal expansion coefficients;
the number of the cantilevers is equal to that of the electrodes, one ends of the cantilevers are connected with the electrodes, and the other ends of the cantilevers are connected with the bearing flat plate.
2. The electrochromic device according to claim 1, wherein the micro-nano sized periodic structure comprises a grating structure.
3. The electrochromic device according to claim 1, wherein the material of the substrate layer and the material of the micro-nano-sized periodic structure comprise a metal and/or a dielectric; and the material of the substrate layer is different from the material of the micro-nano periodic structure.
4. The electrochromic device according to claim 3, characterized in that the metal comprises Au, Ag or Al.
5. The electrochromic device according to claim 3, characterized in that the dielectric comprises Si, Si3N4、TiO2Or SiO2。
6. The electrochromic device according to claim 1, wherein the cantilever comprises 2 layers of materials with different coefficients of thermal expansion, the 2 layers of materials comprising 2 layers of dielectric or dielectric and metal.
7. The electrochromic device according to claim 1, wherein the cantilever comprises 3 layers of materials with different coefficients of thermal expansion, the 3 layers of materials comprising metal, dielectric and metal.
8. The electrochromic device according to claim 1, wherein the number of the cantilevers and the electrodes is 4, the carrier plate is quadrilateral, and the other ends of the 4 cantilevers are respectively connected to 4 corners of the carrier plate.
9. A display or sensing apparatus comprising an electrochromic device according to any one of claims 1 to 8.
10. A method for preparing an electrochromic device is characterized by comprising the following steps:
providing an SOI substrate, and forming a first layer of film of an electrothermal actuator and a substrate layer of an angle sensitive metamaterial unit on the SOI substrate;
forming an electrothermal actuator comprising a substrate layer by etching by using the structure of the SOI substrate as a mask;
forming a micro-nano periodic structure on the surface of the substrate layer;
and forming an opening on the bottom surface of the SOI substrate, and releasing the electrothermal actuator and the angle-sensitive metamaterial unit through the opening to obtain the electrochromic device.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111313748.3A CN113960781A (en) | 2021-11-08 | 2021-11-08 | Electrochromic device and preparation method and device thereof |
| ZA2022/04104A ZA202204104B (en) | 2021-11-08 | 2022-04-12 | Electrochromic device and preparation method thereof, and apparatus |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111313748.3A CN113960781A (en) | 2021-11-08 | 2021-11-08 | Electrochromic device and preparation method and device thereof |
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| CN113960781A true CN113960781A (en) | 2022-01-21 |
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2021
- 2021-11-08 CN CN202111313748.3A patent/CN113960781A/en active Pending
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2022
- 2022-04-12 ZA ZA2022/04104A patent/ZA202204104B/en unknown
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| CN105259600A (en) * | 2015-09-15 | 2016-01-20 | 北京大学 | Nano-meta-material full-color-gamut palette |
| KR20180113780A (en) * | 2017-04-07 | 2018-10-17 | 한국과학기술원 | Angular-sensitive tunable optical filter using transmission spectrum modulation by complementary combination of nanohole array and nanodisk array and making method for the filter |
| CN108919481A (en) * | 2018-09-26 | 2018-11-30 | 黄石晨信光电股份有限公司 | A kind of tunable filter based on MEMS mechanism |
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