CN113937171A - 一种基于金属线栅复合薄膜的紫外偏振光谱探测器 - Google Patents
一种基于金属线栅复合薄膜的紫外偏振光谱探测器 Download PDFInfo
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- CN113937171A CN113937171A CN202111393238.1A CN202111393238A CN113937171A CN 113937171 A CN113937171 A CN 113937171A CN 202111393238 A CN202111393238 A CN 202111393238A CN 113937171 A CN113937171 A CN 113937171A
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/09—Devices sensitive to infrared, visible or ultraviolet radiation
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CN202111393238.1A CN113937171B (zh) | 2021-11-23 | 2021-11-23 | 一种基于金属线栅复合薄膜的紫外偏振光谱探测器 |
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CN202111393238.1A CN113937171B (zh) | 2021-11-23 | 2021-11-23 | 一种基于金属线栅复合薄膜的紫外偏振光谱探测器 |
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Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101435890A (zh) * | 2008-12-09 | 2009-05-20 | 华中科技大学 | 亚波长金属光栅偏振器 |
CN201387494Y (zh) * | 2007-11-26 | 2010-01-20 | 华中科技大学 | 一种金属线栅宽带偏振器 |
CN102221406A (zh) * | 2011-05-24 | 2011-10-19 | 中国科学院上海技术物理研究所 | 单片集成亚波长微偏振光栅的铟镓砷近红外探测器 |
US20110266441A1 (en) * | 2010-04-28 | 2011-11-03 | Fagan Iii Thomas P | Pixel-level optically transitioning filter elements for detector devices |
CN103018815A (zh) * | 2012-12-26 | 2013-04-03 | 北京理工大学 | 一种深紫外铝光栅偏振器 |
CN106549076A (zh) * | 2016-11-04 | 2017-03-29 | 北京理工大学 | 一种量子点发光薄膜增强紫外成像探测器 |
CN107863411A (zh) * | 2017-09-30 | 2018-03-30 | 北京理工大学 | 偏振成像探测器 |
CN109253804A (zh) * | 2018-10-10 | 2019-01-22 | 中国科学院上海技术物理研究所 | 一种单片集成长线列金属偏振光栅的InGaAs焦平面探测器 |
CN109581571A (zh) * | 2018-12-11 | 2019-04-05 | 龙岩学院 | 条形亚波长铝金属偏振光栅 |
CN111025450A (zh) * | 2020-01-02 | 2020-04-17 | 中国科学院上海光学精密机械研究所 | 一种深紫外复合结构金属线栅偏振器 |
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- 2021-11-23 CN CN202111393238.1A patent/CN113937171B/zh active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201387494Y (zh) * | 2007-11-26 | 2010-01-20 | 华中科技大学 | 一种金属线栅宽带偏振器 |
CN101435890A (zh) * | 2008-12-09 | 2009-05-20 | 华中科技大学 | 亚波长金属光栅偏振器 |
US20110266441A1 (en) * | 2010-04-28 | 2011-11-03 | Fagan Iii Thomas P | Pixel-level optically transitioning filter elements for detector devices |
CN102221406A (zh) * | 2011-05-24 | 2011-10-19 | 中国科学院上海技术物理研究所 | 单片集成亚波长微偏振光栅的铟镓砷近红外探测器 |
CN103018815A (zh) * | 2012-12-26 | 2013-04-03 | 北京理工大学 | 一种深紫外铝光栅偏振器 |
CN106549076A (zh) * | 2016-11-04 | 2017-03-29 | 北京理工大学 | 一种量子点发光薄膜增强紫外成像探测器 |
CN107863411A (zh) * | 2017-09-30 | 2018-03-30 | 北京理工大学 | 偏振成像探测器 |
CN109253804A (zh) * | 2018-10-10 | 2019-01-22 | 中国科学院上海技术物理研究所 | 一种单片集成长线列金属偏振光栅的InGaAs焦平面探测器 |
CN109581571A (zh) * | 2018-12-11 | 2019-04-05 | 龙岩学院 | 条形亚波长铝金属偏振光栅 |
CN111025450A (zh) * | 2020-01-02 | 2020-04-17 | 中国科学院上海光学精密机械研究所 | 一种深紫外复合结构金属线栅偏振器 |
Non-Patent Citations (1)
Title |
---|
张明龙,张琼妮: "国外材料领域创新进展", 知识产权出版社, pages: 425 - 427 * |
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