CN113934137A - Ultrasonic power supply resonant frequency tracking method and system - Google Patents

Ultrasonic power supply resonant frequency tracking method and system Download PDF

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CN113934137A
CN113934137A CN202111222867.8A CN202111222867A CN113934137A CN 113934137 A CN113934137 A CN 113934137A CN 202111222867 A CN202111222867 A CN 202111222867A CN 113934137 A CN113934137 A CN 113934137A
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power supply
ultrasonic power
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CN113934137B (en
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颜文旭
卢倩
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Jiangnan University
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    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00Automatic controllers
    • G05B11/01Automatic controllers electric
    • G05B11/36Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P.I., P.I.D.

Abstract

The invention relates to an ultrasonic power supply resonant frequency tracking method and system, which comprises the following steps: s1, primarily adjusting the output frequency of the ultrasonic power supply and the resonant frequency of the transducer in a matching manner; s2, detecting a current signal output by the transducer; s3, constructing a differential link phase-locked loop; taking a current signal output by the transducer as an input signal of a differential link phase-locked loop; generating a driving signal according to an output signal of the differential link phase-locked loop; and S4, the driving signal controls the output frequency of the ultrasonic power supply to change along with the change of the resonance frequency of the transducer. By constructing a differential link phase-locked loop and combining a DDS signal generator with the differential link phase-locked loop to realize closed-loop control, the output frequency of the ultrasonic power supply can quickly track the change of the resonant frequency of the transducer, so that the ultrasonic power supply works in a resonant state, has exquisite conception, good tracking performance and is easy to realize.

Description

Ultrasonic power supply resonant frequency tracking method and system
Technical Field
The invention relates to the technical field of ultrasonic power supplies, in particular to a method and a system for tracking the resonant frequency of an ultrasonic power supply.
Background
The ultrasonic power supply is widely applied to ultrasonic welding, ultrasonic processing, ultrasonic cleaning, ultrasonic motors, ultrasonic medical treatment and the like. The ultrasonic power supply outputs a high-frequency alternating current signal matched with the load end transducer under the action of rectification filtering, full-bridge inversion, a matching circuit and the like, and the transducer converts output electric energy into mechanical energy.
However, since the frequency characteristics of the transducer slightly change according to the temperature change, the vibration amplitude change, and the load during operation, the center frequency changes, the operating efficiency of the transducer decreases, and even the transducer elements may be damaged. This requires that the ultrasonic power supply automatically detect and track the center frequency while quickly adjusting the output frequency so that the operating frequency of the power supply can be matched to the resonant frequency of the transducer.
The current commonly used ultrasonic power frequency tracking method comprises a maximum current search frequency tracking method and a matching inductance frequency tracking method. The maximum current searching frequency tracking method is based on the characteristics that load impedance is minimum and output current is maximum in a resonance state, the frequency corresponding to the maximum current is searched in a frequency sweeping and step length changing mode, namely the resonance frequency, and as the frequency sweeping period is long, the step length number is increased, the required feedback quantity is also increased, the starting time is longer, and the tracking precision is lower; the matching inductance method is that under the condition that the output frequency is kept unchanged, the frequency tracking is realized by changing the phase difference between the output voltage and the current by changing the inductance in the matching circuit, and the tracking precision of the method is low.
Disclosure of Invention
The invention provides an ultrasonic power supply resonant frequency tracking method and system, wherein a differential link phase-locked loop is constructed, a DDS signal generator is combined with the differential link phase-locked loop to realize closed-loop control, and the output frequency of an ultrasonic power supply can quickly track the change of the resonant frequency of a transducer, so that the ultrasonic power supply works in a resonant state, and the ultrasonic power supply has the advantages of exquisite conception, good tracking performance and easy realization.
In order to solve the technical problem, the invention provides an ultrasonic power supply resonant frequency tracking method, which comprises the following steps: s1, constructing an LC series matching circuit, and connecting the LC series matching circuit between an ultrasonic power supply and a transducer; the initial adjustment of matching the output frequency of the ultrasonic power supply and the resonance frequency of the transducer is realized through the LC series matching circuit; s2, detecting a current signal output by the transducer; s3, constructing a differential link phase-locked loop, and connecting the output end of the differential link phase-locked loop with the input end of a PWM signal generator; taking the current signal output by the transducer in the S2 as an input signal of a differential-element phase-locked loop; according to the output signal of the differential link phase-locked loop, the PWM signal generator generates a driving signal; the driving signal generated in S4 and S3 drives the switch tube in the ultrasonic power supply to be turned on and off to adjust the output frequency of the ultrasonic power supply, so that the output frequency of the ultrasonic power supply changes along with the change of the resonance frequency of the transducer.
Preferably, the differential link phase-locked loop constructed in S3 includes a differential phase detector, a PI controller, and a voltage-controlled oscillator, which are connected in sequence; the current signal output by the transducer is used as the input signal of the differential phase discriminator, and the control signal output by the voltage-controlled oscillator is used as the feedback signal of the differential phase discriminator; performing linear calculation on an input signal and a feedback signal of the differential phase discriminator to obtain an input phase difference signal of the PI controller, wherein an output signal of the PI controller is input to the voltage-controlled oscillator; and the control signal output by the voltage-controlled oscillator controls the output frequency of the ultrasonic power supply.
Preferably, the differential phase detector includes a double differential quadrature signal generator, and the implementation method of the double differential quadrature signal generator specifically includes: introducing a second-order filtering link, and respectively obtaining transfer functions of two differential orthogonal signal generators:
Figure BDA0003313268990000021
where i ', qi' are output variables, i is an input variable, ωrIs the resonant frequency of the transducer; and acquiring the frequency response characteristics of the two orthogonal signal generators according to the transfer function, and saving the two orthogonal signal transmitters meeting the frequency response characteristic index as double-differential orthogonal signal generators.
Preferably, the designing of the parameters of the PI controller specifically includes: setting the transfer function of the PI controller as follows:
Figure BDA0003313268990000031
wherein k ispIs the proportionality coefficient, k, of the PI controlleriIs the integral coefficient of the PI controller; and calculating to obtain a closed loop transfer function of the differential link phase-locked loop according to the transfer function of the PI controller:
Figure BDA0003313268990000032
wherein: k is a radical ofpdIs the gain factor, theta, of the phase detectorsIs a phase signal of the sampling current, and theta' is a phase signal of the output current of the voltage-controlled oscillator; calculating a damping ratio and a natural angular frequency of the closed-loop transfer function, wherein the damping ratio is as follows:
Figure BDA0003313268990000033
the natural angular frequency is:
Figure BDA0003313268990000034
and configuring the PI controller as an undamped oscillation controller, setting the damping coefficient of the closed-loop transfer function to be 0.707, and calculating to obtain values of kp and ki in the closed-loop transfer function.
Preferably, the current signal output by the transducer and the control signal output by the voltage-controlled oscillator are both subjected to Park conversion to generate a phase difference signal; and adjusting the phase difference signal by using the PI controller.
Preferably, the S1 further includes: sweeping the transducer with an impedance analyzer to determine a center frequency of the ultrasonic power supply; and taking the central frequency as the initial working frequency of the ultrasonic power supply.
Preferably, the step S4 is followed by the step S5 of establishing a simulation experiment, verifying the performance of the differential link phase-locked loop through the simulation experiment, and storing the differential link phase-locked loop meeting the performance requirement.
An ultrasonic power supply resonant frequency tracking system is characterized by comprising a series matching circuit, an energy converter, a current detection circuit, a differential link phase-locked loop and a PWM signal generator; the series matching circuit is connected between the ultrasonic power supply and the transducer, and the output frequency of the ultrasonic power supply and the resonant frequency of the transducer are initially adjusted in a matching manner through the series matching circuit; the current detection circuit is connected with the transducer to detect a current signal output by the transducer; the output end of the current detection circuit is connected with the input end of the differential link phase-locked loop, the output end of the differential link phase-locked loop is connected with the input end of the PWM signal generator, and the PWM signal generator generates a driving signal according to an output signal of the differential link phase-locked loop so as to adjust the output frequency of the ultrasonic power supply.
Preferably, the differential link phase-locked loop comprises a differential phase detector, a PI controller and a voltage-controlled oscillator which are connected in sequence; the output end of the current detection circuit is connected with the input end of the differential phase discriminator, and the output end of the voltage-controlled oscillator is connected with the input end of the PWM signal generator.
Preferably, the PWM signal generator is disposed in the ultrasonic power supply, the PWM signal generator is a DDS signal generator, and a chip AD9850 is disposed in the DDS signal generator.
Compared with the prior art, the technical scheme of the invention has the following advantages:
1. according to the invention, the LC series matching circuit is arranged between the ultrasonic power supply and the transducer, so that the initial adjustment of matching between the output frequency of the ultrasonic power supply and the resonance frequency of the transducer can be realized, the operation is simple, and the subsequent further frequency adjustment is convenient.
2. The invention can realize that the output frequency of the ultrasonic power supply tracks the resonant frequency of the transducer by sampling and tracking the current signal output by the transducer, the differential link phase-locked loop designed by the invention is simple and easy to realize, the DDS signal generator is combined with the differential link phase-locked loop to realize closed-loop control, and the output frequency of the ultrasonic power supply can quickly track the change of the resonant frequency of the transducer, so that the ultrasonic power supply works in a resonant state.
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In order that the present disclosure may be more readily and clearly understood, reference is now made to the following detailed description of the present disclosure taken in conjunction with the accompanying drawings, in which:
FIG. 1 is a schematic block diagram of the system of the present invention;
FIG. 2 is a control block diagram of the tracking method of the present invention;
FIG. 3 is a schematic diagram of the transfer function characteristics of two differential quadrature signal generators in the differential-link phase-locked loop of the present invention;
FIG. 4 is a simplified linear model diagram of a differential link phase-locked loop according to the present invention;
FIG. 5 is a schematic diagram of a simulation of the influence of values of kp and ki on the performance of a differential link phase-locked loop in the tracking method of the present invention;
FIG. 6 is a phase diagram of the output current and output voltage under the control of the tracking method of the present invention;
FIG. 7 is a schematic diagram of the resonant frequency of the tracking method of the present invention;
fig. 8 is a schematic diagram of the tracking error of the tracking method of the present invention.
Detailed Description
The present invention is further described below in conjunction with the following figures and specific examples so that those skilled in the art may better understand the present invention and practice it, but the examples are not intended to limit the present invention.
Referring to fig. 1 to 8, the invention discloses an ultrasonic power source resonant frequency tracking method and system.
The ultrasonic power supply outputs a high-frequency alternating current signal matched with the transducer at the load end under the action of rectification filtering, full-bridge inversion, a matching circuit and the like, and the transducer converts output electric energy into mechanical energy.
The ultrasonic power supply resonant frequency tracking method mainly comprises the following steps: step one, constructing an LC series matching circuit, and connecting the LC series matching circuit between an ultrasonic power supply and a transducer at a load end. The parameter value of the LC series matching circuit can be matched with the equivalent load parameter, so that the initial adjustment of matching the output frequency of the ultrasonic power supply and the resonant frequency of the transducer is realized. The LC series matching circuit is preferably a symmetrical LC series matching circuit.
Wherein, before the first step, the method further comprises: and sweeping the frequency of the transducer by adopting an impedance analyzer, observing impedance distribution and inductance parameter values of the ultrasonic power supply under different reference frequencies so as to determine the central frequency of the ultrasonic power supply, and taking the central frequency as the initial working frequency of the ultrasonic power supply.
And step two, detecting the current signal output by the transducer through a current sampling circuit. Because the high-power ultrahigh-frequency ultrasonic power supply works, the transducer at the load end outputs high-frequency alternating voltage and current, in order to ensure that a detected current signal is not distorted, the main element in the current sampling circuit is preferably a current transformer, and the current sampling circuit comprises components such as the current transformer, an operational amplifier, a resistor, a capacitor and the like.
And step three, constructing a differential link phase-locked loop, taking the current signal output by the transducer in the step two as an input signal of the differential link phase-locked loop, and connecting the output end of the differential link phase-locked loop with the input end of a PWM signal generator. The PWM signal generator can generate a driving signal according to an output signal of the differential-link phase-locked loop.
Specifically, the constructed differential link phase-locked loop comprises a differential phase discriminator, a PI controller and a voltage-controlled oscillator which are connected in sequence. The current signal output by the transducer is used as the input signal of the differential phase discriminator, and the control signal output by the voltage-controlled oscillator is used as the feedback signal of the differential phase discriminator. And performing linear calculation on the input signal and the feedback signal of the differential phase discriminator to obtain an input phase difference signal of the PI controller. The PWM signal generator generates a driving signal with adjustable frequency according to the control signal output by the voltage-controlled oscillator. The current signal output by the energy converter and the control signal output by the voltage-controlled oscillator are both subjected to Park conversion to generate a phase difference signal, and the phase difference signal is adjusted by the PI controller.
The PWM signal generator is preferably a DDS signal generator, and is provided in the ultrasonic power supplyA chip AD9850 is arranged in the DDS signal generator, so that an analog sine wave with accurately controllable frequency and phase and stability can be generated, and the sine wave can be converted into a square wave with the same frequency and stability through a high-speed comparator arranged in the chip to be output. Output frequency of fout=M·fclk/2NWhere M is the step size control word, N is the length 32 of the control word, fclkThe system clock reference frequency is the maximum value of 125MHz, and the frequency conversion time reaches nanosecond level; resolution of output frequency is delta fclk/2NThe frequency resolution of the output signal obtained according to the formula can reach 0.0291Hz, the requirement of minimum frequency precision of a high-power ultrahigh frequency ultrasonic power supply system is completely met, and fine frequency adjustment can be carried out in a wide frequency range.
The DDS signal generator adopts a direct digital frequency synthesis technology and generates a driving signal with adjustable frequency according to a control signal output by a voltage-controlled oscillator.
And step four, the driving signal generated by the PWM signal generator in the step three can prompt the MOSFET driver to work, and controls the on and off of a switching tube of the ultrasonic power supply inverter bridge to adjust the output frequency of the ultrasonic power supply.
And fifthly, building a simulation experiment, verifying the performance of the differential link phase-locked loop through the simulation experiment, and storing the differential link phase-locked loop meeting the performance requirement as an optimal differential link phase-locked loop.
Further, to make the high-power ultrahigh-frequency ultrasonic power supply operate in a resonant state, the design of a differential phase-locked loop is critical, as shown in fig. 2, wherein DU1 and DU2 represent two differential quadrature signal generators, and the main design steps of the differential phase-locked loop include:
(1) the differential phase discriminator comprises a double differential orthogonal signal generator, and the specific realization method comprises the following steps: because the pure differential controller can amplify noise and harmonic waves, a second-order filtering link is introduced to respectively obtain the transfer functions of two differential orthogonal signal generators:
Figure BDA0003313268990000071
where i ', qi' are output variables, i is an input variable, ωrIs the resonant frequency of the transducer.
The bode diagram corresponding to the transfer function is shown in fig. 3, and it can be seen from the diagram that the differential quadrature signal generator can output good frequency response characteristics, and the phase and amplitude of the output signal are only related to the state of the input signal, which is the basis for constructing a high-precision phase-locked loop. And acquiring the frequency response characteristics of the two orthogonal signal generators according to the transfer function, and saving the two orthogonal signal transmitters meeting the frequency response characteristic index as double-differential orthogonal signal generators.
(2) And designing a PI controller. In order to facilitate the design of the PI controller parameters, fig. 4 is a simplified linear model diagram of the differential element phase-locked loop according to the present invention.
The output signals of the two differential orthogonal signal generators adopt Park transformation to obtain an error signal epsilon between the input signal and the output signal of the differential phase-locked looppdI.e. epsilonpd=i'·qi'2-qi'·i'2In the formula (II), i'2、qi'2Respectively, output variables. When the system is outputting stably, the phase difference signal can be equivalent to epsilonpd=kpds- θ'), wherein kpdIs the gain coefficient, theta, of a differential phase detectorsIn order to sample the phase signal of the current, theta' is the phase signal of the output current of the voltage-controlled oscillator, namely the phase difference signal is proportional to the input and output signals, and the fact that the designed differential phase discriminator has a good phase discrimination function is verified. Because the controlled object in the differential phase-locked loop can be regarded as a first-order integral link, a PI regulator is adopted for regulation and control.
The transfer function of the PI controller is set as follows:
Figure BDA0003313268990000072
wherein k ispIs the proportionality coefficient, k, of the PI controlleriIs the integral coefficient of the PI controller.
And calculating to obtain a closed loop transfer function of the differential link phase-locked loop according to the transfer function of the PI controller:
Figure BDA0003313268990000073
wherein: k is a radical ofpdIs the gain factor, theta, of the phase detectorsIs a phase signal of the sampling current, and theta' is a phase signal of the output current of the voltage-controlled oscillator;
calculating the damping ratio and the natural angular frequency of the closed loop transfer function, wherein the damping ratio is as follows:
Figure BDA0003313268990000081
the natural angular frequency is:
Figure BDA0003313268990000082
given an input signal frequency, as shown in fig. 5, when the input signal frequency is constant, values of kp and ki have a certain influence on the dynamic performance of the differential-link phase-locked loop. Thus it is configured as an undamped oscillation controller and the damping coefficient is chosen to be the optimum value of 0.707. To obtain kp、kiRespectively is kp=1.726、ki=2.56×106. The phase-locked loop system designed on the basis has good transient response, high steady-state precision, wider bandwidth and large frequency locking range.
Further, a simulation experiment is performed to verify the performance of the ultrasonic power source resonant frequency tracking method, and the differential transfer function is converted into a differential transfer function, namely:
Figure BDA0003313268990000083
in the formula, h is an integral step length, and two closed-loop poles are obtained by analysis and positioned in a unit circle, so that the constructed closed-loop system is stable.
The tracking performance of the designed differential link phase-locked loop is verified through the simulation, when the ultrasonic power supply works in a stable state, a phase diagram of current and voltage is shown in fig. 6, the voltage and the current of an inversion output end and a load end are in the same phase, it can be seen from the phase diagram that the ultrasonic power supply enters the stable state within 0.85ms, and finally the resonance frequency is stabilized at about 1.1MH, as shown in fig. 7. The tracking error obtained by comparing the magnitudes of the reference signal and the control signal is shown in fig. 8, and the error is ± 1 × 10-11.
In conclusion, the phase-locked loop of the differential link is accurately designed, the phase difference signal is obtained by linearly calculating the current signal sampled by the transducer and the control signal output by the voltage-controlled oscillator, and the output frequency of the high-power ultrahigh-frequency ultrasonic power supply can quickly track the resonant frequency output by the transducer by combining the control action of the PI regulator.
Based on the ultrasonic power supply resonant frequency tracking method, the invention also discloses an ultrasonic power supply resonant frequency tracking system.
The ultrasonic power supply resonant frequency tracking system comprises a series matching circuit, a transducer, a current detection circuit, a differential link phase-locked loop and a PWM signal generator. The series matching circuit is connected between the ultrasonic power supply and the transducer, is a symmetrical LC series matching circuit, and can be used for initially adjusting the output frequency of the ultrasonic power supply and the resonant frequency of the transducer.
The current detection circuit is connected with the transducer to detect a current signal output by the transducer. The output end of the current detection circuit is connected with the input end of the differential link phase-locked loop, the output end of the differential link phase-locked loop is connected with the input end of the PWM signal generator, and the PWM signal generator generates a driving signal according to the output signal of the differential link phase-locked loop so as to adjust the output frequency of the ultrasonic power supply.
The differential link phase-locked loop comprises a differential phase discriminator, a PI controller and a voltage-controlled oscillator which are connected in sequence. The output end of the current detection circuit is connected with the input end of the differential phase discriminator, and the output end of the voltage-controlled oscillator is connected with the input end of the PWM signal generator. The PWM signal generator is arranged in the ultrasonic power supply, the PWM signal generator is preferably a DDS signal generator, and a chip AD9850 is arranged in the DDS signal generator.
By constructing a differential link phase-locked loop and combining a DDS signal generator with the differential link phase-locked loop to realize closed-loop control, the output frequency of the ultrasonic power supply can quickly track the change of the resonant frequency of the transducer, so that the ultrasonic power supply works in a resonant state, has exquisite conception, good tracking performance and is easy to realize.
As will be appreciated by one skilled in the art, embodiments of the present application may be provided as a method, system, or computer program product. Accordingly, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.
The present application is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the application. It will be understood that each flow and/or block of the flow diagrams and/or block diagrams, and combinations of flows and/or blocks in the flow diagrams and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications of the invention may be made without departing from the spirit or scope of the invention.

Claims (10)

1. An ultrasonic power supply resonant frequency tracking method is characterized by comprising the following steps:
s1, primarily adjusting the output frequency of the ultrasonic power supply and the resonant frequency of the transducer in a matching manner;
s2, detecting a current signal output by the transducer;
s3, constructing a differential link phase-locked loop; taking a current signal output by the transducer as an input signal of a differential link phase-locked loop; generating a driving signal according to an output signal of the differential link phase-locked loop;
and S4, the driving signal controls the output frequency of the ultrasonic power supply to change along with the change of the resonance frequency of the transducer.
2. The method for tracking the resonant frequency of the ultrasonic power supply according to claim 1, wherein the step of constructing a differential-link phase-locked loop in S3 specifically comprises:
acquiring a differential phase discriminator, a PI controller and a voltage-controlled oscillator;
the current signal output by the transducer is used as an input signal of a differential phase discriminator, and the control signal output by the voltage-controlled oscillator is used as a feedback signal of the differential phase discriminator;
performing linear calculation on an input signal and a feedback signal of the differential phase discriminator to obtain an input phase difference signal of the PI controller;
and an output signal of the PI controller is input into the voltage-controlled oscillator, and a control signal output by the voltage-controlled oscillator controls the output frequency of the ultrasonic power supply.
3. The ultrasonic power supply resonant frequency tracking method according to claim 2, wherein the implementation method of the differential phase detector specifically comprises:
introducing second order filtering to obtain transfer functions of two of said differential quadrature signal generators respectively:
Figure FDA0003313268980000011
where i ', qi' are output variables, i is an input variable, ωrIs the resonant frequency of the transducer;
and acquiring the frequency response characteristics of the two differential orthogonal signal generators according to the transfer function, and storing the two differential orthogonal signal transmitters meeting the frequency response characteristic index as differential phase detectors.
4. The method for tracking the resonant frequency of the ultrasonic power supply according to claim 2, wherein designing parameters of the PI controller specifically includes:
setting the transfer function of the PI controller as follows:
Figure FDA0003313268980000021
wherein k ispIs the proportionality coefficient, k, of the PI controlleriIs the integral coefficient of the PI controller;
according to the transfer function of the PI controllerAnd calculating to obtain a closed loop transfer function of the differential link phase-locked loop:
Figure FDA0003313268980000022
wherein: k is a radical ofpdIs the gain factor, theta, of the phase detectorsIs a phase signal of the sampling current, and theta' is a phase signal of the output current of the voltage-controlled oscillator;
calculating a damping ratio and a natural angular frequency of the closed-loop transfer function, wherein the damping ratio is as follows:
Figure FDA0003313268980000023
the natural angular frequency is:
Figure FDA0003313268980000024
and configuring the PI controller as an undamped oscillation controller, setting the damping coefficient of the closed-loop transfer function to be 0.707, and calculating to obtain values of kp and ki in the closed-loop transfer function of the PI controller.
5. The method for tracking the resonant frequency of the ultrasonic power supply according to claim 2, wherein the current signal output by the transducer and the control signal output by the voltage-controlled oscillator are both subjected to Park transformation to generate a phase difference signal.
6. The ultrasonic power supply resonance frequency tracking method according to claim 1, further comprising, before S1:
sweeping the transducer by using an impedance analyzer to obtain the center frequency of the transducer;
and taking the central frequency as the initial working frequency of the ultrasonic power supply.
7. The ultrasonic power supply resonance frequency tracking method according to claim 6, further comprising, after said S4:
and S5, establishing a simulation experiment, verifying the performance of the differential link phase-locked loop through the simulation experiment, and storing the differential link phase-locked loop meeting the performance requirement.
8. An ultrasonic power supply resonant frequency tracking system is characterized by comprising a series matching circuit, an energy converter, a current detection circuit, a differential link phase-locked loop and a PWM signal generator;
the series matching circuit is connected between the ultrasonic power supply and the transducer, and the output frequency of the ultrasonic power supply and the resonant frequency of the transducer are initially adjusted in a matching manner through the series matching circuit;
the current detection circuit is connected with the transducer to detect a current signal output by the transducer; the output end of the current detection circuit is connected with the input end of the differential link phase-locked loop, the output end of the differential link phase-locked loop is connected with the input end of the PWM signal generator, and the PWM signal generator generates a driving signal according to an output signal of the differential link phase-locked loop so as to adjust the output frequency of the ultrasonic power supply.
9. The ultrasonic power supply resonant frequency tracking system of claim 8, wherein the differential link phase-locked loop comprises a differential phase detector, a PI controller and a voltage-controlled oscillator connected in sequence;
the output end of the current detection circuit is connected with the input end of the differential phase discriminator, and the output end of the voltage-controlled oscillator is connected with the input end of the PWM signal generator.
10. The ultrasonic power supply resonant frequency tracking system of claim 9, wherein the PWM signal generator is disposed within the ultrasonic power supply, the PWM signal generator being a DDS signal generator having a chip AD9850 disposed therein.
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